Vacuum film attaching device and vacuum film attaching method

Abstract

The application discloses a vacuum film pasting device and a vacuum film pasting method. The vacuum film pasting device comprises a sealing box, a vacuum pumping mechanism, a material conveying mechanism and a film pasting mechanism. The sealing box is provided with a vacuum cavity. The vacuum pumping mechanism is communicated with the vacuum cavity in the sealing box. The sealing box is provided with a first opening. The material conveying mechanism can seal the first opening and can move relative to the first opening. The material conveying mechanism is provided with a first operation area. The first operation area is provided with a first film material station and a first workpiece station. The film pasting mechanism is arranged in the vacuum cavity. The material conveying device can not only seal the first opening arranged on the sealing box, but also can move relative to the first opening. Therefore, the film material and the workpiece can be directly sent into or taken away from the vacuum cavity. Compared with the traditional vacuum film pasting, the vacuum pumping and vacuum recovery process is not needed for each pair of workpiece film pasting. Therefore, the vacuum film pasting process is simplified, and the time spent for the vacuum film pasting is reduced.

Description

Technical Field

[0001] This invention relates to the field of vacuum film application technology, and more particularly to a vacuum film application device and a vacuum film application method. Background Technology

[0002] Currently, the vacuum lamination process typically involves placing the workpiece in a closable space, then using a vacuum pump to evacuate the space. After evacuation, the workpiece is laminated in the vacuum environment. Once lamination is complete, the air pressure in the space needs to be restored to atmospheric pressure before the space is opened and the laminated workpiece is removed. The entire process is complex and time-consuming.

[0003] Therefore, it is necessary to provide a new vacuum film application device and vacuum film application method to solve or at least alleviate the above-mentioned technical defects. Summary of the Invention

[0004] The main objective of this invention is to provide a vacuum film application device and a vacuum film application method, which aims to solve the technical problems of complex and time-consuming processes in existing vacuum film application methods.

[0005] To achieve the above objectives, the present invention provides a vacuum film application device, the vacuum film application device comprising:

[0006] A sealed box, wherein the sealed box forms a vacuum cavity;

[0007] A vacuum pumping mechanism, which is connected to the vacuum chamber;

[0008] The material conveying mechanism has a first opening in the sealed box. The material conveying mechanism can seal the first opening and can move relative to the first opening. The material conveying mechanism is provided with a first operating area, and the first operating area is provided with a first film material station and a first workpiece station.

[0009] A film-applying mechanism is located in the vacuum chamber.

[0010] In one embodiment, the film-applying mechanism includes a drive assembly and a film-applying assembly pulverizedly connected to the drive assembly. The drive assembly is used to drive the film-applying assembly to move within the space of the vacuum chamber to deliver the film material and the workpiece into or out of the vacuum chamber.

[0011] In one embodiment, the film application assembly includes an electrostatic chuck pressure head, which is connected to the driving assembly.

[0012] In one embodiment, the sealed box is further provided with a second opening for the material conveying mechanism to enter and exit, and the material conveying mechanism is also capable of sealing the second opening and moving relative to the second opening.

[0013] In one embodiment, the material conveying mechanism is further provided with a second operating area, which includes a second film material station and a second workpiece station. When the material conveying mechanism sends the first operating area into the vacuum chamber, the second operating area is located outside the sealed box. When the material conveying mechanism sends the second operating area into the vacuum chamber, the first operating area is located outside the sealed box.

[0014] In one embodiment, the material conveying mechanism is capable of reciprocating relative to the sealed box through the first opening and the second opening, so that the material conveying mechanism can feed the first operating area into or out of the vacuum chamber through the first opening, and can feed the second operating area into or out of the vacuum chamber through the second opening.

[0015] In one embodiment, the material conveying mechanism includes a material conveying component and a first sealing component. The material conveying component is provided with the first operating area and is movable relative to the first opening. The first sealing component is disposed at the first opening and is used to seal the gap between the first opening and the material conveying component.

[0016] In one embodiment, the material conveying mechanism includes a material conveying component, a first sealing component, and a second sealing component. The material conveying component is provided with a first operating area and is movable relative to the first opening and the second opening. The first sealing component is located at the first opening and is used to seal the gap between the first opening and the material conveying component. The second sealing component is located at the second opening and is used to seal the gap between the second opening and the material conveying component.

[0017] In one embodiment, the material conveying mechanism is a linear material conveying mechanism; or, the material conveying mechanism is a ring material conveying mechanism.

[0018] In one embodiment, the material conveying mechanism has a first film material receiving groove at the first film material station; and / or, the material conveying mechanism has a first workpiece receiving groove at the first workpiece station.

[0019] Furthermore, the present invention also provides a vacuum film application method, wherein a sealed box has a vacuum cavity, a material conveying mechanism is capable of sealing the vacuum cavity and moving relative to the sealed box, and the steps of the vacuum film application method include:

[0020] The material conveying mechanism is controlled to feed the film material and the workpiece into the vacuum chamber;

[0021] The film-applying mechanism located within the vacuum chamber is controlled to apply the film material to the workpiece;

[0022] The material conveying mechanism is controlled to send the workpiece with the film applied out of the vacuum chamber.

[0023] In one embodiment, the membrane material includes a first membrane material and a second membrane material, the workpiece includes a first workpiece and a second workpiece, and the step of controlling the material conveying mechanism to feed the membrane material and the workpiece into the vacuum chamber includes:

[0024] The material conveying mechanism is controlled to feed the first film material and the first workpiece into the vacuum chamber;

[0025] The step of controlling the film-applying mechanism located in the vacuum cavity to apply the film material to the workpiece includes:

[0026] The second film material and the second workpiece are placed on the material conveying mechanism located outside the vacuum chamber; the film-applying mechanism located inside the vacuum chamber is controlled to apply the first film material to the first workpiece.

[0027] The step of controlling the material conveying mechanism to deliver the workpiece with the film applied out of the vacuum chamber includes:

[0028] The material conveying mechanism is controlled to send the first workpiece with the film applied out of the vacuum chamber, while the second workpiece and the second film material are sent into the vacuum chamber.

[0029] In one embodiment, the step of simultaneously feeding the second workpiece and the second film material into the vacuum cavity includes:

[0030] The first workpiece with the film applied is removed from the material conveying mechanism, and the first film and the first workpiece are placed on the material conveying mechanism located outside the vacuum chamber. At the same time, the film applying mechanism is controlled to apply the second film to the second workpiece.

[0031] The material conveying mechanism is controlled to send the first film material and the first workpiece into the vacuum chamber, while the second workpiece with the film applied is sent out of the vacuum chamber.

[0032] The second film material and the second workpiece are placed on the material conveying mechanism located outside the vacuum chamber, and the film-applying mechanism is controlled to apply the first film material to the first workpiece, while the second workpiece with the film applied is removed from the material conveying mechanism.

[0033] Repeat the steps of controlling the material conveying mechanism to send the first workpiece with the film applied out of the vacuum chamber, while simultaneously sending the second workpiece and the second film material into the vacuum chamber.

[0034] In one embodiment, the material conveying mechanism is capable of reciprocating relative to the sealed box, and the step of controlling the material conveying mechanism to feed the first film material and the first workpiece into the vacuum chamber includes:

[0035] The material conveying mechanism is controlled to move along a first direction to send the first film material and the first workpiece into the vacuum chamber;

[0036] The step of controlling the material conveying mechanism to send the first workpiece with the film applied out of the vacuum chamber, and simultaneously sending the second workpiece and the second film material into the vacuum chamber includes:

[0037] The material conveying mechanism is controlled to move in a second direction opposite to the first direction to send the first workpiece with the film applied out of the vacuum chamber, while the second workpiece and the second film material are sent into the vacuum chamber.

[0038] The step of controlling the material conveying mechanism to feed the first film material and the first workpiece into the vacuum chamber, and simultaneously sending the second workpiece with the film applied out of the vacuum chamber includes:

[0039] The material conveying mechanism is controlled to move along the first direction to send the first film material and the first workpiece into the vacuum chamber, while the second workpiece with the film applied is sent out of the vacuum chamber.

[0040] In one embodiment, the film-applying mechanism includes a driving assembly and a film-applying assembly driven by the driving assembly. The step of controlling the film-applying mechanism to apply the film material to the workpiece includes:

[0041] Control the film-adhesive assembly located within the vacuum chamber to adsorb the film material;

[0042] The drive assembly is controlled to drive the film application assembly to apply the film material to the workpiece.

[0043] In the above-mentioned technical solution of the present invention, the vacuum pumping mechanism is controlled to perform vacuuming treatment on the vacuum chamber in the sealed box in real time, so that the vacuum degree in the vacuum chamber is maintained within the range required by the user. The film material is placed at the first film material station and the workpiece is placed at the first workpiece station. Since the material conveying device can not only seal the first opening set on the sealed box, but also move relative to the first opening, the film material and the workpiece are directly sent into the vacuum chamber. Then, the film is applied to the workpiece by the film-applying mechanism. The film-applying workpiece is sent out of the vacuum chamber from the first opening by the material conveying device. The film-applying workpiece is removed, and the film material and the workpiece are placed on the material conveying mechanism. This process is repeated. Compared with the traditional vacuum film application, the process of vacuuming and restoring the vacuum is eliminated for each workpiece to be filmed, thereby simplifying the vacuum film application process and reducing the time spent on vacuum film application. Attached Figure Description

[0044] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0045] Figure 1 This is a schematic diagram of the structure of a vacuum film application device according to an embodiment of the present invention;

[0046] Figure 2 This is a cross-sectional view of an embodiment of the present invention when the first operating area is located outside the vacuum cavity;

[0047] Figure 3 This is a schematic diagram of the structure when the first operating area is located outside the vacuum cavity according to an embodiment of the present invention;

[0048] Figure 4 This is a cross-sectional view of an embodiment of the present invention when the first operating area is located inside a vacuum cavity;

[0049] Figure 5 This is a schematic diagram of the structure when the first operating area is located inside a vacuum cavity according to an embodiment of the present invention;

[0050] Figure 6 This is a partially exploded structural diagram of a vacuum film-applying device according to an embodiment of the present invention;

[0051] Figure 7 This is a schematic flowchart of the first embodiment of the vacuum film application method of the present invention;

[0052] Figure 8 This is a flowchart illustrating the second embodiment of the vacuum film application method of the present invention;

[0053] Figure 9 This is a flowchart illustrating the third embodiment of the vacuum film application method of the present invention;

[0054] Figure 10 This is a flowchart illustrating the fourth embodiment of the vacuum film application method of the present invention;

[0055] Figure 11 This is a flowchart illustrating the fifth embodiment of the vacuum film application method of the present invention.

[0056] Explanation of icon numbers:

[0057] 1 Vacuum film application device 11 Sealed box 111 First opening 112 Second opening 113 vacuum chamber 12 Material conveying mechanism 121 Material handling components 1211 First operating area 1212 First membrane material processing station 1213 First workpiece station 1214 Second operating area 1215 Second membrane material processing station 1216 Second workpiece station 1217 First membrane material receiving tank 1218 First workpiece receiving groove 1219 Second membrane material receiving groove 1220 Second workpiece receiving groove 122 First sealing assembly 123 Second sealing assembly 13 Film application organization 131 Driver components 132 Film application components 132A electrostatic chuck pressure head 14 First workpiece 15 First Membrane Material 16 Second workpiece 17 Second membrane material

[0058] The realization of the objective, functional characteristics and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0059] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0060] It should be noted that all directional indications (such as up, down, left, and right) in the embodiments of this invention are only used to interpret a specific posture (as shown in the attached diagram). Figure 1 The relative positions and movements of the components shown below are considered. If the specific posture changes, the directional indication will also change accordingly.

[0061] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" can explicitly or implicitly include at least one of that feature.

[0062] Furthermore, the technical solutions of the various embodiments of the present invention can be combined with each other, but only if they are implemented by those skilled in the art. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by the present invention.

[0063] This invention provides a vacuum film application device 1. In one embodiment, refer to... Figures 1-6 As shown, the vacuum film application device 1 includes a sealed box 11, a vacuum pumping mechanism (not shown), a material conveying mechanism 12, and a film application mechanism 13. The vacuum pumping mechanism is connected to the vacuum chamber 113 inside the sealed box 11. The sealed box 11 has a first opening 111. The material conveying mechanism 12 can seal the first opening 111 and can move relative to the first opening 111. The material conveying mechanism 12 is provided with a first operating area 1211. The first operating area 1211 is provided with a first film material station 1212 and a first workpiece station 1213. The film application mechanism 13 is located in the vacuum chamber 113.

[0064] The vacuum pumping mechanism continuously evacuates the vacuum chamber 113 within the sealed box 11 to maintain the vacuum level within the range required by the user. The membrane material is placed at the first membrane material station 1212, and the workpiece is placed at the first workpiece station 1213. Since the conveying device can not only seal the first opening 111 on the sealed box 11 but also move relative to the first opening 111, it directly conveys the membrane material at the first membrane material station 1212 and the workpiece at the first workpiece station 1213. The workpiece is fed into the vacuum chamber 113, and then the film is applied to the workpiece by the film-applying mechanism 13. The film-applied workpiece is then conveyed out of the vacuum chamber 113 through the first opening 111 by the material conveying device. The film-applied workpiece is then removed from the first workpiece station 1213, and the film and workpiece are placed on the material conveying mechanism 12. This process is repeated. Compared with traditional vacuum film application, this eliminates the need for vacuuming and restoring the vacuum after each application, thus simplifying the vacuum film application process and reducing the time spent. It should be noted that the vacuuming mechanism can be a vacuum pump, and the sealing box 11 has a through hole communicating with the vacuum pump. It should also be noted that the material conveying mechanism 12 seals the first opening 111 by a metal seal, a sealing ring seal, or an oil seal. The metal seal principle can adopt the sealing principle of a guide rail, that is, metal sealing can be achieved using existing technology.

[0065] According to an embodiment of the present invention, a plurality of first film material stations 1212 and a plurality of first workpiece stations 1213 may be provided in the first operating area 1211. The number of first film material stations 1212 and the number of first workpiece stations 1213 are the same and are arranged in a one-to-one correspondence. The first operating area 1211 is fed into the vacuum chamber 113 by the material conveying mechanism 12, and the film application mechanism 13 applies the film to the corresponding workpiece one by one. This allows multiple workpieces to be filmed in one feeding process, reducing the number of times the first operating area 1211 enters and exits the vacuum chamber 113 and the corresponding processes, thereby reducing the time spent on filming multiple workpieces.

[0066] Furthermore, in one embodiment, the film-applying mechanism 13 includes a drive assembly 131 and a film-applying assembly 132 pulverizedly connected to the drive assembly 131. The drive assembly 131 drives the film-applying assembly 132 to move within the vacuum chamber 113. By setting the drive assembly 131 to move the film-applying assembly 132 within the vacuum chamber 113, the flexibility of the film-applying assembly 132 is enhanced, enabling it to adsorb film material at different positions and ensuring that the film-applying assembly 132 can apply the film material to the workpiece. It should be noted that the drive assembly 131 can be a robotic arm or a three-axis motion platform.

[0067] Furthermore, in one embodiment, the film-applying assembly 132 includes an electrostatic chuck pressure head 132A, which is connected to the drive assembly 131. In existing film-applying processes, film material is typically adsorbed using air pressure. This air pressure adsorption utilizes the pressure difference between the two sides of the film material, allowing it to be adsorbed onto the chuck. However, in a vacuum film-applying environment, due to the lack of pressure difference or a small pressure difference, traditional chuck adsorption of film material cannot be used. In this embodiment, the electrostatic chuck pressure head 132A adsorbs the film material, achieving adsorption of the film material in a vacuum environment, thus solving the problem that existing film adsorption equipment cannot be directly used in a vacuum film-applying environment.

[0068] According to one embodiment of the present invention, the film-applying assembly 132 includes an adhesive pressure head for adhering the film material, and the adhesive pressure head is connected to the driving assembly 131 for transmission, so that the adhesive pressure head can move the film material to the surface of the workpiece and adhere it to the surface of the workpiece; wherein the adhesiveness of the adhesive pressure head to the film material is less than the adhesiveness of the workpiece to the film material, after the film is applied to the workpiece, the driving assembly 131 is controlled to drive the adhesive pressure head to move away from the workpiece, so that the adhesive pressure head can be separated from the film material.

[0069] In another embodiment, the sealed box 11 is further provided with a second opening 112 for the material conveying mechanism 12 to enter and exit. The material conveying mechanism 12 can also seal the second opening 112 and can move relative to the second opening 112. By providing the second opening 112, the film material and the workpiece can enter the vacuum chamber 113 from the first opening 111, and after the film is applied, they can leave the vacuum chamber 113 from the second opening 112; or the film material and the workpiece can enter the vacuum chamber 113 from the second opening 112, and then after the film is applied, they can leave the vacuum chamber 113 from the first opening 111. This conveying method allows the material conveying mechanism 12 to move only in one direction.

[0070] Reference Figures 1-6As shown, in one embodiment, the material conveying mechanism 12 is further provided with a second operating area 1214. The second operating area 1214 is provided with a second film material station 1215 and a second workpiece station 1216. When the material conveying mechanism 12 sends the first operating area 1211 into the vacuum chamber 113, the second operating area 1214 is located outside the sealed box 11. When the material conveying mechanism 12 sends the second operating area 1214 into the vacuum chamber 113, the first operating area 1211 is located outside the sealed box 11. When the material conveying mechanism 12 sends the first operating area 1211 into the vacuum chamber 113, the second operating area 1214 is located outside the vacuum chamber 113. When the film-applying mechanism 13 applies film to the workpiece located in the first operating area 1211, if there is a workpiece in the second operating area 1214 that has been film-applied, the film-applied workpiece can be removed from the second operating area 1214 first, and then the film material can be placed into the second film material station 1215 in the second operating area 1214, and the workpiece can be placed into the second workpiece station 1216 in the second operating area 1214. If there is no workpiece in the second operating area 1214 that has been film-applied, the film material can be directly placed into the second film material station 1215 in the second operating area 1214, and the workpiece can be placed into the second workpiece station 1216 in the second operating area 1214. Similarly, when the second operating area 1214 is sent into the vacuum chamber 113 by the material conveying mechanism 12, the film material can be placed into the second film material station 1215 in the second operating area 1214, and the workpiece can be placed into the second workpiece station 1216 in the second operating area 1214. When the vacuum chamber 113 is in operation, the first operating area 1211 will be sent out of the vacuum chamber 113 by the material conveying mechanism 12. When the film-applying mechanism 13 applies film to the workpiece in the second operating area 1214, if there is a workpiece in the first operating area 1211 that has been film-applied, the film-applied workpiece can be taken out from the first operating area 1211 first, and then the film material can be placed into the first film material station 1212 in the first operating area 1211, and the workpiece can be placed into the first workpiece station 1213 in the first operating area 1211. If there is no workpiece in the first operating area 1211 that has been film-applied, the film material can be placed directly into the first film material station 1212 in the first operating area 1211, and the workpiece can be placed into the first workpiece station 1213 in the first operating area 1211. Since the film-applying process and the loading and unloading process are carried out simultaneously, the film-applying efficiency of the workpiece is further improved.It should be noted that if the material conveying mechanism 12 is a linear material conveying mechanism, after placing the first workpiece 14 at the first workpiece station 1213 and the first film material 15 at the first film material station 1212, the material conveying mechanism 12 is controlled to move the first workpiece 14 and the first film material 15 to the left, so that the first workpiece 14 and the first film material 15 enter the vacuum chamber 113 through the first opening 111. Then, the film-applying mechanism 13 applies the first film material 15 to the first workpiece 14. During the process of the film-applying mechanism 13 applying the first film material 15 to the first workpiece 14, the second workpiece 16 is placed at the second workpiece station 1216 and the second film material 17 is placed at the second film material station 1215. After the first workpiece 14 has completed the film application, the material conveying mechanism 12 drives the first workpiece 14, which has completed the film application, to move to the right, so that the first workpiece 14 enters the vacuum chamber 113 through the first opening 111. 1. Leaving the receiving cavity, during this process, the material conveying mechanism 12 simultaneously drives the second film material 17 and the second workpiece 16 to move to the right and enter the receiving cavity through the second opening 112. Then, the film-applying mechanism 13 is controlled to apply film to the second workpiece 16. During this process, the first workpiece 14, after film application, is removed from the first workpiece station 1213 and placed in the first workpiece station 1213. The first film material 15 is placed in the first film material station 1212. This process is repeated, so that for a linear material conveying mechanism, the film application process and the loading and unloading process can be carried out simultaneously. In addition, for a long linear material conveying mechanism, multiple first operating areas 1211 and second operating areas 1214 can be alternately arranged on the linear material conveying mechanism. Then, the linear material conveying mechanism only needs to move in one direction. For the annular conveying mechanism, after the film-applying mechanism 13 completes the film application on the workpiece in the first operating area 1211, regardless of which direction the film-applying mechanism 13 moves, the first operating area 1211 will leave the vacuum chamber 113, and the second operating area 1214 will enter the vacuum chamber 113. For example, if the film-applying mechanism 13 completes the film application on the workpiece in the first operating area 1211, and the conveying mechanism 12 moves the first operating area 1211 away from the first opening 111, then the conveying mechanism 12 will maintain its current direction of movement, and the second operating area 1214 will enter the vacuum chamber 113 from the second opening 112; if the conveying mechanism 12 moves the first operating area 1211 away from the second opening 112, then the conveying mechanism 12 will maintain its current direction of movement, and the second operating area 1214 will enter the vacuum chamber 113 from the first opening 111. It should also be noted that when the material conveying mechanism 12 sends the first operating area 1211 out of the vacuum chamber 113, the second operating area 1214 can be located inside or outside the vacuum chamber 113. Similarly, when the material conveying mechanism 12 sends the second operating area 1214 out of the vacuum chamber 113, the first operating area 1211 can be located inside or outside the vacuum chamber 113.

[0071] According to one embodiment of the present invention, a plurality of second film material stations 1215 and a plurality of second workpiece stations 1216 may be provided in the second operation area 1214, wherein the number of second film material stations 1215 and the number of second workpiece stations 1216 are the same and they are provided in a one-to-one correspondence.

[0072] In one embodiment, the material conveying mechanism 12 includes a material conveying component 121 and a first sealing component 122. The material conveying component 121 has a first operating area 1211 and is movable relative to a first opening 111. The first sealing component 122 is located at the first opening 111 and is used to seal the gap between the first opening 111 and the material conveying component 121. By sealing the gap between the first opening 111 and the material conveying component 121 with the first sealing component 122, the entry of outside air into the vacuum chamber 113 is prevented or reduced, so that the vacuum chamber 113 can maintain the vacuum level within the range required by the user under the action of the vacuum pumping mechanism. It should be noted that the first sealing component 122 can be a sealing ring or a sealing oil layer.

[0073] According to one embodiment of the present invention, the material conveying mechanism 12 further includes a second sealing component 123, which is disposed at the second opening 112 and is used to seal the gap between the second opening 112 and the material conveying component 121.

[0074] In another embodiment, the material conveying mechanism 12 is a linear material conveying mechanism; or, the material conveying mechanism 12 is a ring-shaped material conveying mechanism. A linear material conveying mechanism is suitable for applications with ample installation space. If space is limited, a ring-shaped or arc-shaped material conveying mechanism 12 can be used. It should be noted that the material conveying assembly 121 includes a material conveying drive (not shown) and a material conveying body that is driven by the material conveying drive. The material conveying body can be a linear, ring-shaped, or arc-shaped material conveying body. The material conveying body is provided with a first operating area 1211 and a second operating area 1214. A first sealing assembly 122 is used to seal the gap between the material conveying body and the first opening 111. The material conveying drive drives the material conveying body to move rapidly, thereby achieving rapid transport of the film material and the workpiece.

[0075] Furthermore, in one embodiment, the material conveying mechanism 12 has a first film material receiving groove 1217 at the first film material station 1212; and / or, the material conveying mechanism 12 has a first workpiece receiving groove 1218 at the first workpiece station 1213. By providing the first film material receiving groove 1217 to receive the film material, the film material is positioned to a certain extent, reducing the probability of the film material detaching from the material conveying mechanism 12 during transportation, and also facilitating the accurate adsorption of the film material by the film application assembly 132; by providing the first workpiece receiving groove 1218 to receive the workpiece, the workpiece is positioned to a certain extent, reducing the probability of the workpiece detaching from the material conveying mechanism 12 during transportation, and also preventing the film application assembly 132 from experiencing large displacement of the workpiece relative to the material conveying mechanism 12 during the film application process, which could lead to film application failure. It should be noted that the material conveying mechanism 12 has a second film material receiving groove 1219 at the second film material station 1215; the material conveying mechanism 12 has a second workpiece receiving groove 1220 at the second workpiece station 1216.

[0076] Furthermore, the present invention also provides a vacuum film application method, wherein a sealed box has a vacuum cavity, and a material conveying mechanism is capable of sealing the vacuum cavity and moving relative to the sealed box, as described above. Figure 7 As shown, Figure 7 This is a flowchart illustrating the first embodiment of the vacuum film application method of the present invention. The steps of the vacuum film application method include:

[0077] S100 controls the material conveying mechanism to feed the membrane material and workpiece into the vacuum chamber;

[0078] The control material conveying mechanism feeds the film material and workpiece into the vacuum chamber through the first opening. Since the material conveying device can not only seal the first opening set on the sealing box, but also move relative to the first opening, it can directly feed the film material and workpiece into the vacuum chamber. The workpiece and film material directly enter a vacuum chamber with a vacuum level that meets the requirements. Compared with the existing vacuum film application, it eliminates the process of sealing the space after the workpiece is placed in it. It also saves the time spent by the vacuum pumping mechanism to evacuate the space under standard atmospheric pressure until the vacuum level meets the user's requirements.

[0079] S200, control the film-applying mechanism located in the vacuum chamber to apply the film material to the workpiece;

[0080] The film-applying mechanism is controlled to adsorb the film material in the vacuum chamber and then apply the film material to the surface of the workpiece, thereby realizing automatic film application to the workpiece in a vacuum environment.

[0081] S300, control the material conveying mechanism to send the workpiece with the film applied out of the vacuum chamber.

[0082] After the film is applied, the material conveying mechanism can directly send the film-applied workpiece out from the first opening. Compared with the existing vacuum film application, it saves the time spent restoring the air pressure in the vacuum chamber to the standard atmospheric pressure, and also saves the process of opening the space that contains the film-applied workpiece.

[0083] The vacuuming mechanism is connected to the vacuum chamber inside the sealed box. The vacuuming mechanism is controlled to perform real-time vacuuming of the vacuum chamber inside the sealed box to maintain the vacuum level within a preset range. The material conveying mechanism is equipped with a first operating area, which includes a first film material station and a first workpiece station. The film material is placed at the first film material station, and the workpiece is placed at the first workpiece station. Since the material conveying device can not only seal the first opening on the sealed box, but also move relative to the first opening, it can directly send the film material at the first film material station and the workpiece at the first workpiece station into the vacuum chamber. Then, the film is applied to the workpiece by the film-applying mechanism. The film-applying workpiece is then sent out of the vacuum chamber through the first opening by the material conveying device. The film-applying workpiece is then removed from the first workpiece station, and the film material and workpiece are placed back on the material conveying mechanism. This process is repeated. Compared with traditional vacuum film application, it eliminates the need for vacuuming and restoring the vacuum after applying film to each workpiece, thus simplifying the vacuum film application process and reducing the time spent on vacuum film application. It should be noted that the vacuum film application method can be applied to the vacuum film application device described above.

[0084] In one embodiment, the membrane material includes a first membrane material and a second membrane material, and the workpiece includes a first workpiece and a second workpiece, as shown in the figure. Figure 8 As shown, Figure 8 This is a schematic flowchart of the second embodiment of the vacuum film application method of the present invention. Step S100 includes:

[0085] S110, control the material conveying mechanism to send the first film material and the first workpiece into the vacuum chamber;

[0086] The steps in S200 include:

[0087] S210, the second film material and the second workpiece are placed on the material conveying mechanism located outside the vacuum chamber; and the film application mechanism located inside the vacuum chamber is controlled to apply the first film material to the first workpiece;

[0088] The steps of S300 include:

[0089] S310, control the material conveying mechanism to send the first workpiece with the film applied out of the vacuum chamber, and at the same time send the second workpiece and the second film material into the vacuum chamber.

[0090] The sealed box also has a second opening for the material conveying mechanism to enter and exit. The material conveying mechanism can seal the second opening and can move relative to it. The material conveying mechanism also has a second operating area, which includes a second film material station and a second workpiece station. The vacuum chamber is used to accommodate either the first or second operating area. When the material conveying mechanism sends the first operating area into the vacuum chamber, the second operating area is outside the vacuum chamber. During the process of the film-applying mechanism applying the first film material located at the first film material station to the first workpiece located at the first workpiece station, if there is a workpiece with completed film application in the second workpiece station of the second operating area, the completed workpiece can be removed from the second operating area first, and then the second film material can be placed into the second film material station of the second operating area, and the second workpiece can be placed into the second workpiece station of the second operating area. After the first workpiece has completed film application, the material conveying mechanism can be controlled to send the first workpiece out of the vacuum chamber, while simultaneously sending the second film material and the second workpiece into the vacuum chamber. Since the film application process and the loading and unloading process are performed simultaneously, the film application efficiency of the workpiece is further improved.

[0091] In one embodiment, reference is made to Figure 9 As shown, Figure 9 This is a schematic flowchart of a third embodiment of the vacuum film application method of the present invention. Following the step of simultaneously feeding the second workpiece and the second film material into the vacuum chamber, the method includes:

[0092] S400, the first workpiece with the film applied is removed from the material conveying mechanism, and the first film and the first workpiece are placed on the material conveying mechanism located outside the vacuum chamber, while the film applying mechanism is controlled to apply the second film to the second workpiece;

[0093] S500, control the material conveying mechanism to send the first film material and the first workpiece into the vacuum chamber, and at the same time send the second workpiece with the film applied out of the vacuum chamber;

[0094] S600, the second film material and the second workpiece are placed on the material conveying mechanism located outside the vacuum chamber, and the film application mechanism is controlled to apply the first film material to the first workpiece, while the second workpiece with the film applied is removed from the material conveying mechanism.

[0095] S700, repeat steps S310.

[0096] When the second operating area is fed into the vacuum chamber by the material conveying mechanism, the first operating area is sent out of the vacuum chamber by the material conveying mechanism. During the process of the film-applying mechanism applying the second film material located at the second film material station to the second workpiece located at the second workpiece station, if there is a first workpiece with completed film application at the first workpiece station in the first operating area, the completed workpiece can be taken out from the first operating area first, and then the first film material and the first workpiece can be placed in the first film material station in the first operating area. If there is no first workpiece with completed film application in the first operating area, the first film material and the first workpiece can be placed directly in the first film material station in the first operating area. After the second workpiece is film-applied, the first workpiece and the first film material are sent into the vacuum chamber by the material conveying mechanism. This process is repeated, which eliminates the process of forming and breaking a vacuum in the entire film-applying process, and also reduces the corresponding time, thus greatly improving the film-applying efficiency. At the same time, since the film-applying process and the loading and unloading process are carried out simultaneously, the film-applying efficiency of the workpiece is further improved. It should be noted that after the first workpiece and the first film material are placed at the first workpiece station and the first film material station respectively, the feeding mechanism is controlled to move the first workpiece and the first film material to the left so that they enter the vacuum chamber through the first opening. Then, the film-applying mechanism applies the first film material to the first workpiece. While the film-applying mechanism is applying the first film material to the first workpiece, the second workpiece and the second film material are placed at the second workpiece station. After the first workpiece is film-applied, the feeding mechanism moves the first workpiece to the right so that it leaves the receiving chamber through the first opening. During this process, the feeding mechanism simultaneously moves the second film material and the second workpiece to the right and enters the receiving chamber through the second opening. Then, the film-applying mechanism applies the film to the second workpiece. During this process, the first workpiece is removed from the first workpiece station and placed back at the first workpiece station. The first film material is then placed back at the first film material station, and this process is repeated.

[0097] In one embodiment, reference is made to Figure 10 As shown, Figure 10 This is a schematic flowchart of the fourth embodiment of the vacuum film application method of the present invention. Step S110 includes:

[0098] S111, control the material conveying mechanism to move along the first direction to send the first film material and the first workpiece into the vacuum chamber;

[0099] The steps in S310 include:

[0100] S311, control the material conveying mechanism to move along a second direction opposite to the first direction to send the first workpiece with the film applied out of the vacuum cavity, while sending the second workpiece and the second film material into the vacuum cavity;

[0101] The steps of S500 include:

[0102] S501, control the material conveying mechanism to move along the first direction to send the first film material and the first workpiece into the vacuum chamber, and at the same time send the second workpiece with the film applied out of the vacuum chamber.

[0103] The first direction is from right to left, and the second direction is from left to right. The material conveying mechanism moves the first workpiece and the first film material along the first direction, so that the first workpiece and the first film material enter the vacuum chamber through the first opening. Then, the film-applying mechanism applies the first film material to the first workpiece. During the process of applying the first film material to the first workpiece, the second workpiece is placed at the second workpiece station, and the second film material is placed at the second film material station. After the first workpiece is film-applied, the material conveying mechanism moves the first workpiece to the right, so that the first workpiece leaves the receiving chamber through the first opening. During this process, the material conveying mechanism simultaneously moves the second film material and the second workpiece to the right and enters the receiving chamber through the second opening. Then, the film-applying mechanism applies the film to the second workpiece. During this process, the first workpiece is removed from the first workpiece station, placed at the first workpiece station, and the first film material is placed at the first film material station. This process is repeated. The material conveying mechanism can move back and forth between the relatively sealed box, so that the film-applying process and the loading and unloading process can be carried out in parallel. The loading and unloading positions are relatively fixed, making it easier to operate.

[0104] In one embodiment, the film application mechanism includes a drive assembly and a film application assembly drively connected to the drive assembly, as shown below. Figure 11 As shown, Figure 11 This is a schematic flowchart of the fifth embodiment of the vacuum film application method of the present invention. Step S200 includes:

[0105] S201, control the film-adhesive assembly located in the vacuum chamber to adsorb the film material;

[0106] S202, control the drive component to drive the film application component to apply the film material to the workpiece.

[0107] The film application assembly includes an electrostatic chuck head, which adsorbs the film material and then drives the electrostatic chuck head to move above the workpiece via a drive assembly, thereby causing the film material to descend and adhere to the workpiece, thus realizing automatic film application in a vacuum environment.

[0108] The above are merely preferred embodiments of the present invention and do not limit the patent scope of the present invention. Any equivalent structural transformations made under the concept of the present invention using the contents of the specification and drawings of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A vacuum film application device, characterized in that, include: A sealed box, wherein the sealed box forms a vacuum cavity; A vacuum pumping mechanism, which is connected to the vacuum chamber; The material conveying mechanism has a first opening in the sealed box. The material conveying mechanism can seal the first opening and can move relative to the first opening. The material conveying mechanism is provided with a first operating area, and the first operating area is provided with a first film material station and a first workpiece station. A film-applying mechanism, wherein the film-applying mechanism is disposed in the vacuum cavity; The film application mechanism includes a drive assembly and a film application assembly that is pulsatorically connected to the drive assembly. The drive assembly is used to drive the film application assembly to move in the vacuum chamber. The film application assembly includes an electrostatic chuck head, which is connected to the driving assembly. The sealed box is also provided with a second opening for the material conveying mechanism to enter and exit. The material conveying mechanism is also capable of sealing the second opening and can move relative to the second opening. The material conveying mechanism is also provided with a second operating area, which is provided with a second film material station and a second workpiece station. When the material conveying mechanism sends the first operating area into the vacuum chamber, the second operating area is located outside the sealed box. When the material conveying mechanism sends the second operating area into the vacuum chamber, the first operating area is located outside the sealed box. The material conveying mechanism can reciprocate relative to the sealed box through the first opening and the second opening, so that the material conveying mechanism can send the first operating area into or out of the vacuum chamber through the first opening, and can send the second operating area into or out of the vacuum chamber through the second opening.

2. The vacuum film application device according to claim 1, characterized in that, The material conveying mechanism includes a material conveying component and a first sealing component. The material conveying component is provided with the first operating area and is movable relative to the first opening. The first sealing component is located at the first opening and is used to seal the gap between the first opening and the material conveying component.

3. The vacuum film application device according to claim 1, characterized in that, The material conveying mechanism includes a material conveying component, a first sealing component, and a second sealing component. The material conveying component is provided with a first operating area and is movable relative to the first opening and the second opening. The first sealing component is located at the first opening and is used to seal the gap between the first opening and the material conveying component. The second sealing component is located at the second opening and is used to seal the gap between the second opening and the material conveying component.

4. The vacuum film application device according to claim 1, characterized in that, The material conveying mechanism is a linear material conveying mechanism; or, the material conveying mechanism is a ring material conveying mechanism.

5. The vacuum film application device according to claim 1, characterized in that, The material conveying mechanism has a first film material receiving groove at the first film material station; and / or, the material conveying mechanism has a first workpiece receiving groove at the first workpiece station.

6. A vacuum film application method, characterized in that, The vacuum film application method is applied to the vacuum film application apparatus according to any one of claims 1 to 5, wherein a sealing box forms a vacuum cavity, a material conveying mechanism is capable of sealing the vacuum cavity and is movable relative to the sealing box, and the steps of the vacuum film application method include: The material conveying mechanism is controlled to feed the film material and the workpiece into the vacuum chamber; The film-applying mechanism located within the vacuum chamber is controlled to apply the film material to the workpiece; The material conveying mechanism is controlled to send the workpiece with the film applied out of the vacuum chamber.

7. The vacuum film application method according to claim 6, characterized in that, The membrane material includes a first membrane material and a second membrane material, and the workpiece includes a first workpiece and a second workpiece. The step of controlling the material conveying mechanism to feed the membrane material and the workpiece into the vacuum chamber includes: The material conveying mechanism is controlled to feed the first film material and the first workpiece into the vacuum chamber; The step of controlling the film-applying mechanism located in the vacuum cavity to apply the film material to the workpiece includes: The second film material and the second workpiece are placed on the material conveying mechanism located outside the vacuum chamber; and the film application mechanism located inside the vacuum chamber is controlled to apply the first film material to the first workpiece; The step of controlling the material conveying mechanism to deliver the workpiece with the film applied out of the vacuum chamber includes: The material conveying mechanism is controlled to send the first workpiece with the film applied out of the vacuum chamber, while the second workpiece and the second film material are sent into the vacuum chamber.

8. The vacuum film application method according to claim 7, characterized in that, Following the step of simultaneously feeding the second workpiece and the second membrane material into the vacuum cavity, the following is included: The first workpiece with the film applied is removed from the material conveying mechanism, and the first film and the first workpiece are placed on the material conveying mechanism located outside the vacuum chamber. At the same time, the film applying mechanism is controlled to apply the second film to the second workpiece. The material conveying mechanism is controlled to send the first film material and the first workpiece into the vacuum chamber, while the second workpiece with the film applied is sent out of the vacuum chamber. The second film material and the second workpiece are placed on the material conveying mechanism located outside the vacuum chamber, and the film-applying mechanism is controlled to apply the first film material to the first workpiece, while the second workpiece with the film applied is removed from the material conveying mechanism. Repeat the steps of controlling the material conveying mechanism to send the first workpiece with the film applied out of the vacuum chamber, while simultaneously sending the second workpiece and the second film material into the vacuum chamber.

9. The vacuum film application method according to claim 8, characterized in that, The material conveying mechanism is capable of reciprocating relative to the sealed box, and the step of controlling the material conveying mechanism to send the first membrane material and the first workpiece into the vacuum chamber includes: The material conveying mechanism is controlled to move along a first direction to send the first film material and the first workpiece into the vacuum chamber; The step of controlling the material conveying mechanism to send the first workpiece with the film applied out of the vacuum chamber, and simultaneously sending the second workpiece and the second film material into the vacuum chamber includes: The material conveying mechanism is controlled to move in a second direction opposite to the first direction to send the first workpiece with the film applied out of the vacuum chamber, while the second workpiece and the second film material are sent into the vacuum chamber. The step of controlling the material conveying mechanism to feed the first film material and the first workpiece into the vacuum chamber, and simultaneously feeding the second workpiece after film application out of the vacuum chamber includes: The material conveying mechanism is controlled to move along the first direction to send the first film material and the first workpiece into the vacuum chamber, while the second workpiece with the film applied is sent out of the vacuum chamber.

10. The vacuum film application method according to any one of claims 6 to 9, characterized in that, The film-applying mechanism includes a drive assembly and a film-applying assembly that is driveably connected to the drive assembly. The step of controlling the film-applying mechanism located in the vacuum chamber to apply the film material to the workpiece includes: Control the film-adhesive assembly located within the vacuum chamber to adsorb the film material; The drive assembly is controlled to drive the film application assembly to apply the film material to the workpiece.

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