A device and method for electronic grade hydrogen peroxide tank truck filling

Abstract

A device and method for electronic grade hydrogen peroxide tank truck filling, including cabinet, setting in the cabinet electric control system, terminal control system, air blower, air filter, pure water supply pipeline, with pure water supply pipeline connected with pure water flushing spray gun, with nitrogen supply pipeline connected with nitrogen purge gun, setting in the cabinet electronic grade hydrogen peroxide supply pipeline, with electronic grade hydrogen peroxide supply pipeline connected with automatic filling valve, sampling tube, with air release pipeline connected with air release valve, with automatic filling valve connected with first cleaning circulation pipe, first cleaning circulation control valve. When filling, first flush automatic filling valve and air release valve with pure water, then use nitrogen purge gun to purge them, after purging and cleaning, connect tank truck liquid pipeline with automatic filling valve, connect tank truck exhaust pipeline with air release valve, then open first cleaning circulation control valve, send hydrogen peroxide to production workshop for reuse, after sampling analysis is qualified, fill again.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of integrated circuit new material production, and particularly relates to a device for electronic-grade hydrogen peroxide tank truck filling, and the present application also relates to a method for electronic-grade hydrogen peroxide tank truck filling. BACKGROUND

[0002] Hydrogen peroxide aqueous solution, also known as hydrogen peroxide, is an important raw material for producing peroxides such as peroxyacetic acid and thiourea peroxide, and is widely used in the medical, textile printing and dyeing, papermaking bleaching and other industries. High-concentration hydrogen peroxide has strong oxidizing property and instability, and is a transparent, colorless liquid at room temperature, has a pungent odor, and has a viscosity slightly greater than water. This substance is a class A fire hazard, and the main characteristics include combustion-supporting, easy decomposition to produce water and oxygen.

[0003] Electronic-grade hydrogen peroxide is an electronic chemical raw material necessary for large-scale integrated circuit production processes, and is mainly used for semiconductor silicon wafer cleaning agents, etching agents and photoresist remover, and can also be used for high-grade insulating layer preparation, removal of inorganic impurities in electroplating solution, processing of copper, copper alloy and gallium, germanium in the electronic industry, and etching and cleaning of solar silicon wafers. The quality of electronic-grade hydrogen peroxide directly affects the performance of integrated circuits and the continuity and stability of their production. Electronic-grade hydrogen peroxide aqueous solution is generally prepared by using industrial-grade hydrogen peroxide aqueous solution as raw material and through a series of refining and purification. To ensure the quality of electronic-grade hydrogen peroxide, in addition to improving the purity of hydrogen peroxide through technology in production, it is also necessary to prevent pollution to electronic-grade hydrogen peroxide in the storage and transportation links.

[0004] CN208313093U discloses a barrel hydrogen peroxide filling device, which comprises a filling frame and a carrying frame. A filling groove is formed in the side wall of the filling frame, and the carrying frame is inserted into the filling groove. A storage barrel is assembled in the carrying frame. An assembly groove is formed in the top of the filling frame and communicates with the filling groove. A lifting mechanism is fixedly assembled on the top of the filling frame. The filling frame is fixedly connected with a filling mechanism through the lifting mechanism, and the filling mechanism is located in the assembly groove. The auxiliary fixing frame can assist in fixing the storage barrel, maintaining the stability of the storage barrel during the filling process. The bottom of the sealing plate is also provided with a rubber ring for sealing the connection between the storage barrel and the filling mechanism. The device can maintain the stability of the storage barrel during the filling process of the barrel hydrogen peroxide, avoid the splashing of hydrogen peroxide to the surrounding environment, and protect the surrounding environment and construction personnel.

[0005] In the prior art, some merchants use tank trucks to fill electronic-grade hydrogen peroxide. However, when the gas and liquid phase pipes of the tank truck are connected with the filling facilities, there is a risk of pollution to the electronic-grade hydrogen peroxide. In addition, there are problems such as inconvenience in sampling the hydrogen peroxide filled into the tank truck SUMMARY

[0006] In view of the deficiencies of the prior art, the purpose of the present application is to provide a device and a filling method for filling electronic-grade hydrogen peroxide tank cars, which can effectively prevent impurities in the environment from contaminating the filling of electronic-grade hydrogen peroxide tank cars, and reduce the risk of contamination of electronic-grade hydrogen peroxide; at the same time, it is convenient to take samples of the hydrogen peroxide filled in the tank car, and control the product quality.

[0007] In order to solve the above technical problems, on the one hand, the present application provides a device for filling electronic-grade hydrogen peroxide tank cars, comprising a cabinet, an electric control system arranged in the cabinet, a terminal control system connected with the cabinet, a blower connected with the cabinet, an air filter connected with the cabinet for filtering the air blown into the cabinet by the blower, a pure water supply pipeline connected with the cabinet, a pure water flushing spray gun connected with the pure water supply pipeline, a nitrogen gas supply pipeline connected with the cabinet, a nitrogen gas purging gun connected with the nitrogen gas supply pipeline, an electronic-grade hydrogen peroxide supply pipeline connected with the cabinet, an automatic filling valve with a first end connected with the electronic-grade hydrogen peroxide supply pipeline and the other end used for connecting with a tank car liquid phase pipe, a sampling pipe connected with the electronic-grade hydrogen peroxide supply pipeline, a sampling table connected with the sampling pipe, a gas bleeding pipeline connected with the cabinet, a gas bleeding valve arranged on the gas bleeding pipeline, a gas supplementing and bleeding valve with a first end connected with the gas bleeding pipeline and the other end used for connecting with a tank car gas phase pipe, a gas supplementing pipeline with a first end in communication with the nitrogen gas supply pipeline and the other end in communication with the gas bleeding pipeline between the gas supplementing and bleeding valve and the gas bleeding valve, a gas supplementing control valve arranged on the gas supplementing pipeline, a first cleaning and circulating pipeline connected with the automatic filling valve, and a first cleaning and circulating control valve arranged on the first cleaning and circulating pipeline; the electric control system provides high-voltage or low-voltage power supply for electrical equipment; the terminal control system comprises a PLC, a touch screen controller electrically connected with the PLC, and each operation or control valve is connected with the PLC for control.

[0008] As a further improved technical solution, the device for filling electronic-grade hydrogen peroxide tank cars provided by the present application further comprises a pipeline purging pipe with a first end connected with the nitrogen gas supply pipeline and the other end connected with the electronic-grade hydrogen peroxide supply pipeline, and a purging control valve arranged on the pipeline purging pipe.

[0009] As a further improved technical solution, the device for electronic grade hydrogen peroxide tank truck filling provided by the application further has a manual liquid supply pipeline connected with the electronic grade hydrogen peroxide supply pipeline, a first end of the manual liquid supply pipeline is connected with the manual filling valve, another end of the manual filling valve is used for being connected with the tank truck liquid phase pipeline, a second sampling pipeline is connected with the manual liquid supply pipeline, a second cleaning circulation pipeline is connected with the manual liquid supply pipeline, a second cleaning circulation control valve is arranged on the second cleaning circulation pipeline, a second pipeline purging pipeline with a first end connected with the nitrogen gas supply pipeline and another end connected with the manual liquid supply pipeline is arranged, and a second purging control valve is arranged on the second pipeline purging pipeline; the second sampling pipeline is connected with the sampling table.

[0010] As a further improved technical solution, the device for electronic grade hydrogen peroxide tank truck filling provided by the application further has a compressed air pipeline for supplying air to each air-consuming device.

[0011] In order to solve the above technical problems, on the other hand, the application provides a method for electronic grade hydrogen peroxide tank truck filling, which is applied to the device for electronic grade hydrogen peroxide tank truck filling described above, and the filling process comprises the following steps:

[0012] 1) The pure water flushing spray gun is lifted to flush the automatic filling valve and the air charging and discharging valve and their surrounding environment;

[0013] 2) The nitrogen gas purging gun is lifted to purge the automatic filling valve and the air charging and discharging valve and their surrounding environment;

[0014] 3) The air charging and discharging valve is in a closed state, the air charging control valve and the air discharging valve are opened, and the air discharging pipeline is purged; after the purging is completed, the air charging control valve and the air discharging valve are closed;

[0015] 4) The tank truck top cover is opened, the tank truck liquid phase pipeline and the tank truck gas phase pipeline are removed, the tank truck liquid phase pipeline is connected with the automatic filling valve, the tank truck gas phase pipeline is connected with the air charging and discharging valve, and it is ensured that the installation is correct and the connection is reliable;

[0016] 5) The terminal control system is operated, the first cleaning circulation control valve is opened, the flow direction of the automatic filling valve is switched to the first cleaning circulation pipeline, and the incoming material of the electronic grade hydrogen peroxide supply pipeline is sent to the production workshop for reuse;

[0017] 6) The sampling valve of the automatic filling pipeline on the sampling table is opened, the electronic grade hydrogen peroxide is sampled and detected, after the detection is qualified, the first cleaning circulation control valve is closed, the flow direction of the automatic filling valve is switched to the tank truck liquid phase pipeline for filling operation, and the air charging and discharging valve and the air discharging valve are opened;

[0018] 7) After the completion of the tank filling, the automatic filling valve and the air release valve are closed, the air supplement control valve is opened to introduce nitrogen into the tank truck to reach the pressure test pressure requirement, then the air supplement and release valve are closed, the liquid phase pipe of the tank truck is taken out from the automatic filling valve and is retracted into the tank truck, the sealing performance of the tank truck is checked to reach the requirement, then the gas phase pipe of the tank truck is taken out from the air supplement and release valve and is retracted into the tank truck, and the residual liquid and the on-site articles are cleaned.

[0019] As a further improved technical solution, the method for electronic-grade hydrogen peroxide tank truck filling provided by the application further comprises a pipeline purge pipe connected with the electronic-grade hydrogen peroxide supply pipe at one end and with the nitrogen supply pipe at the other end, and a purge control valve arranged on the pipeline purge pipe.

[0020] After the completion of the tank filling in step 7), the total valve of the electronic-grade hydrogen peroxide supply pipe is closed, the first cleaning cycle control valve is opened, the flow direction of the automatic filling valve is switched to the first cleaning cycle pipe, and the purge control valve is opened to purge the electronic-grade hydrogen peroxide supply pipe.

[0021] As a further improved technical solution, the method for electronic-grade hydrogen peroxide tank truck filling provided by the application further comprises a pipeline purge pipe connected with the electronic-grade hydrogen peroxide supply pipe at one end and with the nitrogen supply pipe at the other end, and a purge control valve arranged on the pipeline purge pipe.

[0022] 1) The pure water flushing lance is lifted to flush the manual filling valve and the air supplement and release valve and their surrounding environment;

[0023] 2) The nitrogen purge lance is lifted to purge the manual filling valve and the air supplement and release valve and their surrounding environment;

[0024] 3) The air supplement and release valve is in a closed state, the air supplement control valve and the air release valve are opened to purge the air release pipe, and after the purging is completed, the air supplement control valve and the air release valve are closed;

[0025] 4) The tank truck top cover is opened, the tank truck liquid phase pipe and the tank truck gas phase pipe are taken out, the tank truck liquid phase pipe is connected with the manual filling valve, the tank truck gas phase pipe is connected with the air supplement and release valve, and it is ensured that the installation is correct and the connection is reliable;

[0026] 5) open the second cleaning cycle control valve, send the incoming material of the electronic grade hydrogen peroxide supply pipeline to the production workshop for reuse;

[0027] 6) open the sampling valve of the sampling station manual liquid supply pipeline, sample and detect the electronic grade hydrogen peroxide, after the detection is qualified, close the second cleaning cycle control valve, open the manual filling valve to perform filling operation, open the air charging and venting valve and the venting valve;

[0028] 7) after the tank filling is completed, close the manual filling valve and the venting valve, open the air charging control valve to introduce nitrogen into the tank car to reach the pressure test pressure requirement, then close the air charging and venting valve, take out the liquid phase pipeline of the tank car from the manual filling valve and retract it into the tank car, check the sealing performance of the tank car to reach the requirement, then take out the gas phase pipeline of the tank car from the air charging and venting valve and retract it into the tank car; clean the residual liquid and on-site articles.

[0029] In the case of no conflict, the foregoing improved technical solutions can be implemented alone or in combination.

[0030] The technical solution provided by the application, during filling, the automatic filling valve and the air charging and venting valve are first flushed with pure water, then the automatic filling valve and the air charging and venting valve are purged with a nitrogen purging gun, after the purging and cleaning, the liquid inlet pipeline of the tank car is connected with the automatic filling valve, the exhaust pipeline of the tank car is connected with the air charging and venting valve, then the first cleaning cycle control valve is opened to send the hydrogen peroxide to the production workshop for reuse, after the sampling analysis is qualified, the automatic filling valve is opened to fill the tank car. The risk of pollution to the electronic grade hydrogen peroxide during the filling process is avoided. Sampling is performed at the sampling station and the system runs in the hydrogen peroxide circulation process or the filling process, which is convenient and guarantees the representativeness of the sampling. BRIEF DESCRIPTION OF DRAWINGS

[0031] The accompanying drawings are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and serve to explain the principles of the application, but do not constitute improper limitations on the application. In the drawings:

[0032] Figure 1 It is a structure schematic view of the device for electronic grade hydrogen peroxide tank car filling in the embodiment;

[0033] Figure 2 It is a pipeline structure principle view of the device for electronic grade hydrogen peroxide tank car filling in the embodiment. IMPLEMENTATION

[0034] The specific implementation of the application will be further described in detail below in combination with the drawings.

[0035] As Figure 1The device for electronic grade hydrogen peroxide tank truck filling shown, including cabinet 1, electric control system 2 arranged in the cabinet 1, terminal control system 3 connected with the cabinet 1, air blower 4 connected with the cabinet 1, air filter 5 for filtering the air blown into the cabinet 1 by the air blower 4. Figure 2 As shown, the device for electronic grade hydrogen peroxide tank truck filling also has pure water supply pipeline 6 connected with the cabinet 1, pure water flushing spray gun 7a, 7b connected with the pure water supply pipeline 6, nitrogen gas supply pipeline 8 connected with the cabinet 1, nitrogen gas purging gun 9a, 9b connected with the nitrogen gas supply pipeline 8, electronic grade hydrogen peroxide supply pipeline 10 connected with the cabinet 1, automatic filling valve 11 with the first end connected with the electronic grade hydrogen peroxide supply pipeline 10 and the other end used for connecting with tank truck liquid phase pipeline, sampling pipe 12 connected with the electronic grade hydrogen peroxide supply pipeline 10, sampling table 13 connected with the sampling pipe 12, air release pipeline 14 connected with the cabinet 1, air release valve 15 with the first end connected with the air release pipeline 14 and the other end used for connecting with tank truck gas phase pipeline, air release valve 16 arranged on the air release pipeline 14, air supplement pipeline 17 with the first end communicated with the nitrogen gas supply pipeline 8 and the other end communicated with the air release pipeline between the air supplement air release valve 15 and the air release valve 16, air supplement control valve 30 arranged on the air supplement pipeline 17, first cleaning circulation pipeline 20 connected with the automatic filling valve 11, first cleaning circulation control valve 21 arranged on the first cleaning circulation pipeline 20; the electric control system 2 provides high voltage or low voltage power supply for electric equipment; the terminal control system 3 includes PLC, touch screen controller electrically connected with the PLC, and operation or control valve arranged on each pipeline is connected with the PLC control.

[0036] Specifically, the cabinet 1 is a closed structure, and the sampling and filling connection parts and other partial areas can adopt a push-pull type glass door. The air blower 4 blows air into the cabinet 1, and the blown air is filtered through the air filter 5, so that a slightly positive pressure environment is maintained in the cabinet 1, preventing untreated air from entering and avoiding untreated air from bringing dust and other pollutants into the cabinet. The sampling table 13 is provided with a sampling valve and a liquid collector, and the liquid collected by the liquid collector is pumped back to the production system for reuse. The electric control system 2 provides high or low voltage power supply for electrical equipment, including power supply for the terminal control system 3, the air blower 4, control valves, pump equipment and the like; the terminal control system 3 includes a PLC, a touch screen controller electrically connected with the PLC, and operation or control valves provided on each pipeline and connected with the PLC. Each operation or control valve can adopt an electric or pneumatic valve, and the selection of the valve is based on the process requirements and selected from existing products on the market. The automatic filling valve 11 can switch to supply liquid to the first cleaning circulation pipe 20 or to the tank truck liquid inlet pipeline. In the design, the switching of the automatic filling valve 11 is operated by the terminal control system 3, and the working principle of the automatic filling valve 11 refers to the working principle of a reversing valve. Two cleaning circulation control valves can be provided on the first cleaning circulation pipe 20, one of which is used to control the recovery of low-concentration liquid during cleaning, and the other is used to control the circulation of hydrogen peroxide before filling. Part of the hydrogen peroxide is sent back to the production workshop before filling, and after the sampling analysis is qualified, it is loaded into the tank truck again, which is also conducive to the removal of possible pollutants in the system.

[0037] The filling process includes the following steps:

[0038] 1) Lift the pure water flushing spray gun 7a or 7b to flush the automatic filling valve 11 and the air charging and discharging valve 15 and their surrounding environment;

[0039] 2) Lift the nitrogen blowing gun 9a or 9b to blow the automatic filling valve 11 and the air charging and discharging valve 15 and their surrounding environment;

[0040] 3) The air charging and discharging valve 15 is in a closed state, the air charging control valve 30 and the air discharge valve 16 are opened, and the air discharge pipeline 14 is blown; after blowing is completed, the air charging control valve 30 and the air discharge valve 16 are closed;

[0041] 4) Open the tank truck top cover, remove the tank truck liquid phase pipe and the tank truck gas phase pipe, connect the tank truck liquid phase pipe with the automatic filling valve 11, connect the tank truck gas phase pipe with the air charging and discharging valve 15, and ensure correct installation and reliable connection;

[0042] 5) Operate the terminal control system 3 to open the first cleaning circulation control valve 21, switch the flow direction of the automatic filling valve 11 to the first cleaning circulation pipe 20, and send the incoming material of the electronic grade hydrogen peroxide supply pipeline 10 to the production workshop for reuse;

[0043] 6) open the sampling valve of the automatic filling pipeline on the sampling station 13 to sample and detect the electronic grade hydrogen peroxide, after the detection is qualified, close the first cleaning circulation control valve 21, switch the flow direction of the automatic filling valve 11 to the liquid phase pipeline of the tank truck for filling operation, open the air supplementing and discharging valve 15 and the air discharging valve 16;

[0044] 7) after the tank filling is completed, close the automatic filling valve 11 and the air discharging valve 16, open the air supplementing control valve 30 to introduce nitrogen into the tank truck to reach the pressure test pressure requirement, then close the air supplementing and discharging valve 15, take out the liquid phase pipeline of the tank truck from the automatic filling valve 11 and retract it into the tank truck, check the sealing performance of the tank truck to reach the requirement, then take out the gas phase pipeline of the tank truck from the air supplementing and discharging valve 15 and retract it into the tank truck, clean the residual liquid and the on-site articles, introduce nitrogen into the tank truck to check the sealing performance of the tank truck, the tank truck with perfect sealing can avoid the impurities from the outside into the tank truck in the transportation process, after the check is completed, reduce the nitrogen pressure in the tank truck to keep the tank truck in a slight positive pressure, which can further ensure that the impurities from the outside do not enter the tank truck in the transportation process.

[0045] The technical scheme provided by the application, during filling, the automatic filling valve 11 and the air supplementing and discharging valve 15 are first flushed with pure water, then the automatic filling valve 11 and the air supplementing and discharging valve 15 are purged with a nitrogen purging gun, after the purging and cleaning, the liquid inlet pipeline of the tank truck is connected with the automatic filling valve 11, the exhaust pipeline of the tank truck is connected with the air supplementing and discharging valve 15, then the first cleaning circulation control valve 21 is opened, the hydrogen peroxide is sent to the production workshop for reuse, after the sampling analysis is qualified, the automatic filling valve 11 is opened to load the tank truck. The risk of pollution to the electronic grade hydrogen peroxide during the filling process is avoided. The sampling is conducted at the sampling station 13 and the system runs in the hydrogen peroxide circulation process or the filling process, which is convenient and guarantees the representativeness of the sampling.

[0046] As shown in Figure 2 as one of the embodiments, on the basis of the foregoing basic scheme, the device for electronic grade hydrogen peroxide tank truck filling provided by the application further has a pipeline purging pipe 18 connected with the nitrogen supply pipeline 8 at one end and connected with the electronic grade hydrogen peroxide supply pipeline 10 at the other end, and a purging control valve 19 arranged on the pipeline purging pipe 18.

[0047] After the tank filling is completed, the total valve of the electronic grade hydrogen peroxide supply pipeline 10 is closed, the first cleaning circulation control valve 21 is opened, the flow direction of the automatic filling valve 11 is switched to the first cleaning circulation pipe 20, and the purging control valve 19 is opened to purge the electronic grade hydrogen peroxide supply pipeline 10. The electronic grade hydrogen peroxide in the electronic grade hydrogen peroxide supply pipeline 10 is emptied to avoid the pollution of the hydrogen peroxide, which is beneficial to the cleaning during the next loading.

[0048] As shown in Figure 2As shown, as one of the embodiments, based on the foregoing basic scheme, the device for electronic grade hydrogen peroxide tank truck filling provided by the application further has a manual liquid supply pipeline 22 connected with the electronic grade hydrogen peroxide supply pipeline 10, a first end connected with the manual liquid supply pipeline 22, another end used for connecting with a tank truck liquid phase pipeline, a manual filling valve 23, a second sampling pipeline 24 connected with the manual liquid supply pipeline 22, a second cleaning circulation pipeline 25 connected with the manual liquid supply pipeline 22, a second cleaning circulation control valve 26 arranged on the second cleaning circulation pipeline 25, a second pipeline purge pipeline 27 with a first end connected with the nitrogen gas supply pipeline 8 and another end connected with the manual liquid supply pipeline 22, and a second purge control valve 28 arranged on the second pipeline purge pipeline 27; the second sampling pipeline 24 is connected with the sampling table 13. The manual liquid supply pipeline 22 and the manual filling valve 23, and the matched sampling, cleaning circulation and purge pipeline are arranged as a backup scheme, so that when the automatic filling pipeline or the control system fails, the normal tank truck filling operation is not affected.

[0049] When the automatic filling production line cannot be used, the manual production line is used for filling, and the filling process includes the following steps:

[0050] 1) The pure water flushing spray gun 7a or 7b is lifted to flush the manual filling valve 23 and the air charging and discharging valve 15 and the surrounding environment thereof;

[0051] 2) The nitrogen gas purge gun 9a or 9b is lifted to purge the manual filling valve 23 and the air charging and discharging valve 15 and the surrounding environment thereof;

[0052] 3) The air charging and discharging valve 15 is in a closed state, the air charging control valve 30 and the air discharging valve 16 are opened, and the air discharging pipeline 14 is purged; after the purging is completed, the air charging control valve 30 and the air discharging valve 16 are closed;

[0053] 4) The tank truck top cover is opened, the tank truck liquid phase pipeline and the tank truck gas phase pipeline are removed, the tank truck liquid phase pipeline is connected with the manual filling valve 23, the tank truck gas phase pipeline is connected with the air charging and discharging valve 15, and it is ensured that the installation is correct and the connection is reliable;

[0054] 5) The second cleaning circulation control valve 26 is opened, and the incoming material of the electronic grade hydrogen peroxide supply pipeline 10 is sent to the production workshop for reuse;

[0055] 6) The sampling valve of the manual liquid supply pipeline 22 on the sampling table 13 is opened, the electronic grade hydrogen peroxide is sampled and detected, after the detection is qualified, the second cleaning circulation control valve 26 is closed, the manual filling valve 23 is opened to perform the filling operation, and the air charging and discharging valve 15 and the air discharging valve 16 are opened;

[0056] 7) After the completion of the filling, close the manual filling valve 23 and the air release valve 16, open the air supplement control valve 30 to introduce nitrogen into the tank truck to reach the pressure test pressure requirement, then close the air supplement and release valve 15, take out the liquid phase pipe of the tank truck from the manual filling valve 23 and retract it into the tank truck, check the sealing performance of the tank truck to reach the requirement, then take out the gas phase pipe of the tank truck from the air supplement and release valve 15 and retract it into the tank truck; clean the residual liquid and the on-site articles.

[0057] As shown in Figure 2 As one of the embodiments, the device for filling the electronic grade hydrogen peroxide tank truck provided by the application also has a compressed air pipe 29 for supplying air to each air using equipment. The compressed air pipe 29 mainly provides power for the selected pneumatic equipment.

[0058] The above only describes the preferred embodiments of the present application and does not limit the present application in any way. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An apparatus for filling electronic-grade hydrogen peroxide tank trucks, comprising a cabinet (1), an electrical control system (2) disposed within the cabinet (1), and a terminal control system (3) connected to the cabinet (1), characterized in that, It also includes a blower (4) connected to the cabinet (1), an air filter (5) connected to the cabinet (1) to filter the air blown into the cabinet (1) by the blower (4), a pure water supply pipe (6) connected to the cabinet (1), pure water flushing spray guns (7a, 7b) connected to the pure water supply pipe (6), a nitrogen supply pipe (8) connected to the cabinet (1), nitrogen purging guns (9a, 9b) connected to the nitrogen supply pipe (8), an electronic-grade hydrogen peroxide supply pipe (10) connected to the cabinet (1), an automatic filling valve (11) with one end connected to the electronic-grade hydrogen peroxide supply pipe (10) and the other end used to connect to the liquid phase pipe of the tank truck, a sampling pipe (12) connected to the electronic-grade hydrogen peroxide supply pipe (10), a sampling platform (13) connected to the sampling pipe (12), and a sampling station (13) connected to the cabinet (1). The system includes a vent pipe (14) connected to the vent pipe (14), a gas supply and vent valve (15) connected at one end to the vent pipe (14) and at the other end to the gas phase pipe of the tank truck, a vent valve (16) set on the vent pipe (14), a gas supply pipe (17) connected at one end to the nitrogen supply pipe (8) and at the other end to the vent pipe between the gas supply and vent valve (15) and the vent valve (16), a gas supply control valve (30) set on the gas supply pipe (17), a first cleaning circulation pipe (20) connected to the automatic filling valve (11), and a first cleaning circulation control valve (21) set on the first cleaning circulation pipe (20); the electrical control system (2) provides high-voltage or low-voltage power to the electrical equipment; the terminal control system (3) includes a PLC, a touch screen controller electrically connected to the PLC, and each operating or control valve connected to the PLC control.

2. The apparatus for filling electronic-grade hydrogen peroxide tank trucks according to claim 1, characterized in that, It also has a purge pipe (18) with one end connected to the nitrogen supply pipe (8) and the other end connected to the electronic-grade hydrogen peroxide supply pipe (10), and a purge control valve (19) installed on the purge pipe (18).

3. The apparatus for filling electronic-grade hydrogen peroxide tank trucks according to claim 1, characterized in that, It also has a manual liquid supply pipe (22) connected to the electronic-grade hydrogen peroxide supply pipe (10), a manual filling valve (23) with one end connected to the manual liquid supply pipe (22) and the other end connected to the liquid phase pipe of the tank truck, a second sampling pipe (24) connected to the manual liquid supply pipe (22), a second cleaning circulation pipe (25) connected to the manual liquid supply pipe (22), a second cleaning circulation control valve (26) set on the second cleaning circulation pipe (25), a second pipeline purging pipe (27) with one end connected to the nitrogen supply pipe (8) and the other end connected to the manual liquid supply pipe (22), and a second purging control valve (28) set on the second pipeline purging pipe (27); the second sampling pipe (24) is connected to the sampling platform (13).

4. The apparatus for filling electronic-grade hydrogen peroxide tank trucks according to claim 1, characterized in that, It also has compressed air pipes (29) for supplying air to various air-using equipment.

5. A method for filling electronic-grade hydrogen peroxide tank trucks, applied to the apparatus for filling electronic-grade hydrogen peroxide tank trucks as described in claim 1, characterized in that, The filling process includes the following steps: 1) Use the pure water rinsing spray guns (7a, 7b) to rinse the automatic filling valve (11) and the air replenishment and venting valve (15) and their surrounding environment; 2) Use nitrogen purging guns (9a, 9b) to purge the automatic filling valve (11) and the gas replenishment and venting valve (15) and their surrounding environment; 3) With the air supply and vent valve (15) closed, open the air supply control valve (30) and the vent valve (16) to purge the vent pipe (14); after purging, close the air supply control valve (30) and the vent valve (16). 4) Open the top cover of the tank truck, remove the liquid phase pipe and the gas phase pipe of the tank truck, connect the liquid phase pipe of the tank truck to the automatic filling valve (11), connect the gas phase pipe of the tank truck to the gas supply and venting valve (15), and ensure that the installation is correct and the connection is reliable. 5) Operate the terminal control system (3), open the first cleaning circulation control valve (21), switch the flow direction of the automatic filling valve (11) to the first cleaning circulation pipe (20), and send the incoming material from the electronic grade hydrogen peroxide supply pipe (10) to the production workshop for reuse; 6) Open the sampling valve of the automatic filling pipeline on the sampling platform (13) to sample and test the electronic grade hydrogen peroxide. After the test is qualified, close the first cleaning circulation control valve (21), switch the flow direction of the automatic filling valve (11) to the liquid phase pipe of the tank truck for filling operation, and open the gas replenishment and venting valve (15) and the venting valve (16). 7) After filling is completed, close the automatic filling valve (11) and the vent valve (16), open the gas replenishment control valve (30) to introduce nitrogen into the tank truck to reach the test pressure requirement, close the gas replenishment and vent valve (15), remove the liquid phase pipe of the tank truck from the automatic filling valve (11) and return it to the tank truck, check that the sealing performance of the tank truck meets the requirements, remove the gas phase pipe of the tank truck from the gas replenishment and vent valve (15) and return it to the tank truck; clean up the residual liquid and items on site.

6. The method for filling electronic-grade hydrogen peroxide tank trucks according to claim 5, characterized in that, The device for filling electronic-grade hydrogen peroxide tank trucks also has a pipeline purge pipe (18) with one end connected to the nitrogen supply pipeline (8) and the other end connected to the electronic-grade hydrogen peroxide supply pipeline (10), and a purge control valve (19) installed on the pipeline purge pipe (18); the filling process also includes the following steps: After the filling is completed in step 7), the main valve of the electronic-grade hydrogen peroxide supply pipeline (10) is closed, the first cleaning circulation control valve (21) is opened, the flow direction of the automatic filling valve (11) is switched to the flow direction of the first cleaning circulation pipe (20), and the purging control valve (19) is opened to purge the electronic-grade hydrogen peroxide supply pipeline (10).

7. The method for filling electronic-grade hydrogen peroxide tank trucks according to claim 5, characterized in that, The device for filling electronic-grade hydrogen peroxide tank trucks also includes a manual supply pipe (22) connected to the electronic-grade hydrogen peroxide supply pipe (10), a manual filling valve (23) with one end connected to the manual supply pipe (22) and the other end connected to the liquid phase pipe of the tank truck, a second sampling pipe (24) connected to the manual supply pipe (22), a second cleaning circulation pipe (25) connected to the manual supply pipe (22), a second cleaning circulation control valve (26) provided on the second cleaning circulation pipe (25), a second pipeline purging pipe (27) with one end connected to the nitrogen supply pipe (8) and the other end connected to the manual supply pipe (22), and a second purging control valve (28) provided on the second pipeline purging pipe (27); the second sampling pipe (24) is connected to the sampling platform (13); when the automatic filling production line cannot be used, the manual production line is used for filling, and the filling process includes the following steps: 1) Use the pure water rinsing spray guns (7a, 7b) to rinse the manual filling valve (23) and the air supply and venting valve (15) and their surrounding environment; 2) Use nitrogen purge guns (9a, 9b) to purge the manual filling valve (23) and the gas supply and release valve (15) and their surrounding environment; 3) With the air supply and vent valve (15) closed, open the air supply control valve (30) and the vent valve (16) to purge the vent pipe (14); after purging, close the air supply control valve (30) and the vent valve (16). 4) Open the top cover of the tank truck, remove the liquid phase pipe and the gas phase pipe of the tank truck, connect the liquid phase pipe of the tank truck to the manual filling valve (23), connect the gas phase pipe of the tank truck to the gas supply and venting valve (15), and ensure that the installation is correct and the connection is reliable. 5) Open the second cleaning circulation control valve (26) to send the incoming material from the electronic-grade hydrogen peroxide supply pipeline (10) to the production workshop for reuse; 6) Open the sampling valve of the manual liquid supply pipeline (22) on the sampling platform (13) to sample and test the electronic grade hydrogen peroxide. After the test is qualified, close the second cleaning circulation control valve (26), open the manual filling valve (23) to carry out the filling operation, and open the gas replenishment and venting valve (15) and the venting valve (16). 7) After filling is completed, close the manual filling valve (23) and the vent valve (16), open the gas replenishment control valve (30) to introduce nitrogen into the tank truck to reach the test pressure requirement, close the gas replenishment and vent valve (15), remove the liquid phase pipe of the tank truck from the manual filling valve (23) and return it to the tank truck, check that the sealing performance of the tank truck meets the requirements, remove the gas phase pipe of the tank truck from the gas replenishment and vent valve (15) and return it to the tank truck; clean up the residual liquid and items on site.

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