A metallographic preparation method of yttrium oxide PVD coating

Abstract

The application relates to the technical field of detection. A metallographic preparation method of a yttria PVD coating comprises the following steps: step one, inlay protection; embedding a sample in an embedding mold, embedding by using an epoxy resin and a curing agent, a curing time being 12-16 hours, forming an embedding block, ensuring complete coating coverage, and protecting the yttria PVD coating; step two, wet cutting; cutting the embedding block after curing is completed by using a diamond cutting wheel; step three, re-embedding; embedding the cut section, using an epoxy resin and a curing agent, and a curing time being 12 hours; step four, grinding and polishing; sequentially performing coarse grinding, fine grinding, first diamond polishing, second diamond polishing, and oxide polishing. The method solves the problem that the yttria PVD coating is prone to cracking during the metallographic preparation process.

Description

Technical Field

[0001] This invention relates to the field of detection technology, and more specifically to a method for preparing metallographic images. Background Technology

[0002] In semiconductor manufacturing, yttrium oxide is widely used for surface treatment of key components in semiconductor manufacturing equipment due to its excellent etching resistance. Physical vapor deposition (PVD), as a surface treatment technology, forms high-hardness, low-wear, and long-life coatings at the atomic and molecular level, and is also widely used for surface treatment of key components in semiconductor manufacturing equipment. Compared to thermal spray coatings, PVD coatings have almost zero porosity, providing excellent protection for the substrate material and preventing corrosion. However, due to the extremely high hardness of yttrium oxide PVD coatings, which differs significantly from the hardness of the substrate material, it becomes difficult to prepare coating cross-section samples that are both smooth and glossy. Furthermore, because yttrium oxide PVD coatings are brittle and have high internal stress, they are prone to cracking during mechanical preparation, making it difficult to obtain high-quality coating cross-sections.

[0003] Currently, there is a lack of a method for obtaining the cross-section of yttrium oxide PVD coatings. Summary of the Invention

[0004] To address the problems existing in the prior art, the present invention provides a metallographic preparation method for yttrium oxide PVD coating, which solves at least one of the above-mentioned technical problems.

[0005] The technical solution of this invention is: a metallographic preparation method for yttrium oxide PVD coatings, characterized by comprising the following steps:

[0006] Step 1: Embedding and Protection;

[0007] The sample is placed in the mounting mold and mounted using epoxy resin and curing agent. The curing time is 12-16 hours to form a mounting block, ensuring complete coverage of the coating and protecting the yttrium oxide PVD coating.

[0008] Step two, wet cutting;

[0009] The inlay block is cut using a diamond cutting wheel after it has been cured;

[0010] Step three, then inlay;

[0011] The cut sections are then inlaid using epoxy resin and a curing agent, with a curing time of 12 hours.

[0012] Step four, grinding and polishing;

[0013] The process involves coarse grinding, fine grinding, first diamond polishing, second diamond polishing, and oxide polishing in sequence.

[0014] During rough grinding, water is used as a lubricant, the grinding disc is MD-Piano 220, the grinding disc speed is 200-300 rpm, the test force is 20-25N, and the inlay surface is ground flat with a diamond grinding disc;

[0015] For fine grinding, the grinding disc is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40 N, and diamond grinding fluid is used to grind the sample for 4-6 minutes.

[0016] During a single diamond polishing process, the polishing cloth is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40 N, and the sample is polished for 3-5 minutes using diamond polishing fluid.

[0017] During secondary diamond polishing, the rotation speed is 150-200 rpm, the test force is 25-30 N, and the sample is polished with diamond polishing fluid for 2-4 minutes.

[0018] When polishing with oxides, the rotation speed is 150-200 rpm, the test force is 15-20 N, and the sample is ground with oxide polishing suspension for 1-2 minutes.

[0019] More preferably, in steps one and three, the epoxy resin is EpoFix cold-mounting material.

[0020] More preferably, in steps one and three, the weight ratio of epoxy resin to curing agent is 25:3.

[0021] More preferably, in step two, the cutting feed speed is 0.01-0.1 mm / s and the rotation speed is 2000 rpm.

[0022] Further preferably, in step four, the grinding disc for coarse grinding is an MD-Piano 220.

[0023] In a further preferred embodiment, in step four, the grinding disc for fine grinding is MD-Largo, and the diamond grinding fluid is Largo 9μm.

[0024] In a further preferred embodiment, in step four, the polishing cloth used for the first diamond polishing is MD-Largo, and the diamond polishing slurry is Largo 3μm.

[0025] In a further preferred embodiment, in step four, the polishing cloth for the secondary diamond polishing is MD-Dac, and the diamond polishing slurry is Dac 3μm.

[0026] In a further preferred embodiment, in step four, the polishing cloth for oxide polishing is MD-Chem, and the oxide polishing suspension is OP-S.

[0027] A metallographic preparation method for a yttrium oxide PVD coating, characterized by comprising the following steps:

[0028] Step 1: Embedding and Protection;

[0029] The sample is placed in an inlay mold and inlaid with epoxy resin and curing agent. The weight ratio of epoxy resin to curing agent is 25:3, and the curing time is 12-16 hours to form an inlay block, ensuring complete coverage of the coating and protecting the yttrium oxide PVD coating.

[0030] Step two, wet cutting;

[0031] The inlay block is cut using a diamond cutting wheel after it has been cured;

[0032] Step three, then inlay;

[0033] The cut sections are inlaid using epoxy resin and a curing agent, with a weight ratio of epoxy resin to curing agent of 25:3 and a curing time of 12 hours.

[0034] Step four, grinding and polishing;

[0035] The process involves coarse grinding, fine grinding, first diamond polishing, second diamond polishing, and oxide polishing in sequence.

[0036] During rough grinding, water is used as a lubricant, the grinding disc is MD-Piano 220, the grinding disc speed is 200-300 rpm, the test force is 20-25N, and the inlay surface is ground flat with a diamond grinding disc;

[0037] For fine grinding, the grinding disc is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40 N, and diamond polishing slurry (Largo 9μm) is used. The sample is ground for 4-6 minutes.

[0038] During a single diamond polishing process, the polishing cloth is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40 N, and the diamond polishing slurry is Largo 3μm. The sample is polished for 3-5 minutes.

[0039] During secondary diamond polishing, the polishing cloth is MD-Dac, the rotation speed is 150-200 rpm, the test force is 25-30N, and diamond polishing fluid is used. The diamond polishing fluid is 3μm Dac, and the sample is polished for 2-4 minutes.

[0040] During oxide polishing, the polishing cloth is MD-Chem, the rotation speed is 150-200 rpm, the test force is 15-20 N, and the oxide polishing suspension is OP-S. The sample is ground for 1-2 minutes.

[0041] Beneficial effects:

[0042] 1. Solved the problem of easy cracking of yttrium oxide PVD coatings during metallographic preparation;

[0043] 2. It can effectively display the true cross-sectional structure of yttrium oxide coatings;

[0044] 3. High success rate in one preparation, with a certain degree of reproducibility;

[0045] 4. The method is simple to operate, highly efficient, and requires little labor. Attached Figure Description

[0046] Figure 1 A cross-sectional SEM image of the sample prepared in Specific Embodiment 1 of the present invention;

[0047] Figure 2 A cross-sectional SEM image of the sample prepared in Specific Embodiment 1 of the present invention;

[0048] Figure 3 A cross-sectional SEM image of the sample prepared in Specific Embodiment 1 of the present invention;

[0049] Figure 4 This is a cross-sectional SEM image of the sample prepared in Comparative Example 1 of this invention;

[0050] Figure 5 This is a cross-sectional SEM image of the sample prepared in Comparative Example 2 of this invention;

[0051] Figure 6 This is a cross-sectional SEM image of the sample prepared in Comparative Example 3 of this invention;

[0052] Figure 7 This is a cross-sectional SEM image of the sample prepared in Comparative Example 4 of this invention;

[0053] Figure 8 This is a cross-sectional SEM image of the sample prepared in Comparative Example 5 of this invention;

[0054] Figure 9 This is a cross-sectional SEM image of the sample prepared in Comparative Example 6 of this invention;

[0055] Figure 10 This is a cross-sectional SEM image of the sample prepared in Comparative Example 7 of this invention. Detailed Implementation

[0056] See Figures 1 to 3 Specific embodiment 1, a metallographic preparation method for a yttrium oxide PVD coating, characterized by comprising the following steps:

[0057] Step 1: Embedding and Protection;

[0058] The sample is placed in an inlay mold and inlaid with epoxy resin and curing agent. The weight ratio of epoxy resin to curing agent is 25:3, and the curing time is 12-16 hours to form an inlay block, ensuring complete coverage of the coating and protecting the yttrium oxide PVD coating.

[0059] Step two, wet cutting;

[0060] The inlay block is cut using a diamond cutting wheel after it has been cured;

[0061] Step three, then inlay;

[0062] The cut sections are inlaid using epoxy resin and a curing agent, with a weight ratio of epoxy resin to curing agent of 25:3 and a curing time of 12 hours.

[0063] Step four, grinding and polishing;

[0064] The process involves coarse grinding, fine grinding, first diamond polishing, second diamond polishing, and oxide polishing in sequence.

[0065] During coarse grinding, water is used as a lubricant, the grinding disc is an MD-Piano 220, the grinding disc speed is 200-300 rpm, the test force is 20-25 N, and the inlay surface is ground flat with a diamond grinding disc; then, the sample, the operator's hands and the grinding disc are rinsed clean with deionized water.

[0066] For fine grinding, use an MD-Largo grinding disc, rotate at 150-200 rpm, apply a test force of 35-40 N, and use a diamond grinding slurry (Largo 9μm) to grind the sample for 4-6 minutes. Then, rinse the sample and the operator's hands with deionized water.

[0067] During a single diamond polishing process, the polishing cloth is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40 N, and the diamond polishing slurry is Largo 3μm. The sample is polished for 3-5 minutes. Then, the sample and the operator's hands are rinsed with deionized water.

[0068] During secondary diamond polishing, the polishing cloth is MD-Dac, the rotation speed is 150-200 rpm, the test force is 25-30N, and diamond polishing slurry (Dac 3μm) is used to polish the sample for 2-4 minutes. Then, the sample and the operator's hands are rinsed with deionized water.

[0069] During oxide polishing, the polishing cloth is MD-Chem, the rotation speed is 150-200 rpm, the test force is 15-20 N, and the oxide polishing suspension is OP-S. The sample is ground for 1-2 minutes. Then, the sample, the operator's hands, and the polishing disc are rinsed with deionized water.

[0070] After coarse grinding for 1 minute.

[0071] See Figures 1 to 3 The cross-sectional SEM images of the yttrium oxide PVD coating were examined and analyzed using a scanning electron microscope. In the example, the SEM images of the coating cross-section showed that the coating cross-section was intact after sample preparation, without any scratches or cracks.

[0072] Comparative Example 1: Steps three and four are omitted;

[0073] Step 1: Inlay Protection;

[0074] The yttrium oxide PVD coating sample was placed in an inlay mold and inlaid with a small amount of EpoFix epoxy resin and curing agent (25:3). The curing time was 12-16 hours to ensure that the resin completely covered the coating and protected the PVD coating.

[0075] Step 2: Wet cutting;

[0076] The cured insert is cut using a diamond cutting wheel at a feed rate of 0.01-0.1 mm / s and a rotation speed of 2000 rpm.

[0077] Cross-sectional SEM images of the yttrium oxide PVD coating were obtained and analyzed using scanning electron microscopy. See the image below for the cross-sectional view of the coating after sample preparation. Figure 4 The coating has scratches and obvious cracks.

[0078] Comparative Example 2: Variations were made to the grinding and polishing steps:

[0079] Step 1: Embedding and Protection;

[0080] The yttrium oxide PVD coating sample was placed in an inlay mold and inlaid with a small amount of EpoFix epoxy resin and curing agent (25:3). The curing time was 12-16 hours to ensure that the resin completely covered the coating and protected the PVD coating.

[0081] Step two, wet cutting;

[0082] The cured insert is cut using a diamond cutting wheel at a feed rate of 0.01-0.1 mm / s and a rotation speed of 2000 rpm.

[0083] Step three, then inlay;

[0084] After cutting, the cut sections are inlaid using EpoFix epoxy resin and curing agent (25:3), with a curing time of 12 hours.

[0085] Step four, grinding and polishing;

[0086] The inlay surfaces are to be prepared according to the following steps:

[0087] Rough grinding: Using water as a lubricant, the grinding disc rotates at 200-300 rpm, with a test force of 20-25 N. Grind the inlay surface smooth using a diamond grinding disc (Piano 220). Then rinse the sample, the operator's hands, and the grinding disc with deionized water.

[0088] Cross-sectional SEM images of the yttrium oxide PVD coating were obtained and analyzed using scanning electron microscopy. See the image below for the cross-sectional view of the coating after sample preparation. Figure 5 The coating has scratches and obvious cracks.

[0089] Comparative Example 3: Variations were made to the grinding and polishing steps:

[0090] Step 1: Embedding and Protection;

[0091] The yttrium oxide PVD coating sample was placed in an inlay mold and inlaid with a small amount of EpoFix epoxy resin and curing agent (25:3). The curing time was 12-16 hours to ensure that the resin completely covered the coating and protected the PVD coating.

[0092] Step two, wet cutting;

[0093] The cured insert is cut using a diamond cutting wheel at a feed rate of 0.01-0.1 mm / s and a rotation speed of 2000 rpm.

[0094] Step three, then inlay;

[0095] After cutting, the cut sections are inlaid using EpoFix epoxy resin and curing agent (25:3), with a curing time of 12 hours.

[0096] Step four, grinding and polishing;

[0097] The inlay surfaces are to be prepared according to the following steps:

[0098] Rough grinding: Using water as a lubricant, the grinding disc rotates at 200-300 rpm, with a test force of 20-25 N. Grind the inlay surface smooth using a diamond grinding disc (Piano 220). Then rinse the sample, the operator's hands, and the grinding disc with deionized water.

[0099] Fine grinding: Using water as a lubricant, the grinding disc rotates at 200-300 rpm, with a test force of 20-25 N. Grind the sample for 1-2 minutes using a diamond grinding disc (Piano 1200). Then rinse the sample, the operator's hands, and the grinding disc with deionized water.

[0100] Cross-sectional SEM images of the yttrium oxide PVD coating were obtained and analyzed using scanning electron microscopy. See the image below for the cross-sectional view of the coating after sample preparation. Figure 6 The coating has scratches and obvious cracks.

[0101] Comparative Example 4; The grinding and polishing steps were varied:

[0102] Step 1: Embedding and Protection;

[0103] The yttrium oxide PVD coating sample was placed in an inlay mold and inlaid with a small amount of EpoFix epoxy resin and curing agent (25:3). The curing time was 12-16 hours to ensure that the resin completely covered the coating and protected the PVD coating.

[0104] Step two, wet cutting;

[0105] The sample block was cut using a diamond cutting wheel at a feed rate of 0.01-0.1 mm / s and a rotation speed of 2000 rpm.

[0106] Step 3, inlaying;

[0107] After cutting, the cut sections are inlaid using EpoFix epoxy resin and curing agent (25:3), with a curing time of 12 hours.

[0108] Step four, grinding and polishing;

[0109] The inlay surfaces are to be prepared according to the following steps:

[0110] Rough grinding: Using water as a lubricant, the grinding disc rotates at 200-300 rpm, with a test force of 20-25 N. Grind the inlay surface smooth using a diamond grinding disc (Piano 220). Then rinse the sample, the operator's hands, and the grinding disc with deionized water.

[0111] Fine grinding: The grinding disc is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40N, and diamond grinding fluid (Largo 9μm) is used to grind the sample for 4-6 minutes. Then, the sample and the operator's hands are rinsed with deionized water.

[0112] Cross-sectional SEM images of the yttrium oxide PVD coating were obtained and analyzed using scanning electron microscopy. See the image below for the cross-sectional view of the coating after sample preparation. Figure 7The coating has scratches and obvious cracks.

[0113] Comparative Example 5: Variations were made to the grinding and polishing steps;

[0114] Step 1: Embedding and Protection;

[0115] The yttrium oxide PVD coating sample was placed in an inlay mold and inlaid with a small amount of EpoFix epoxy resin and curing agent (25:3). The curing time was 12-16 hours to ensure that the resin completely covered the coating and protected the PVD coating.

[0116] Step two, wet cutting;

[0117] The sample block was cut using a diamond cutting wheel at a feed rate of 0.01-0.1 mm / s and a rotation speed of 2000 rpm.

[0118] Step 3, inlaying;

[0119] After cutting, the cut sections are inlaid using EpoFix epoxy resin and curing agent (25:3), with a curing time of 12 hours.

[0120] Step four, grinding and polishing;

[0121] The inlay surfaces are to be prepared according to the following steps:

[0122] Rough grinding: Using water as a lubricant, the grinding disc rotates at 200-300 rpm, with a test force of 20-25 N. Grind the inlay surface smooth using a diamond grinding disc (Piano 220). Then rinse the sample, the operator's hands, and the grinding disc with deionized water.

[0123] Fine grinding: The grinding disc is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40N, and diamond grinding fluid (Largo 9μm) is used to grind the sample for 4-6 minutes. Then, the sample and the operator's hands are rinsed with deionized water.

[0124] Diamond polishing: The polishing cloth is MD-Dac, the rotation speed is 150-200 rpm, the test force is 25-30N, and the sample is polished with diamond polishing fluid (Dac 3μm) for 2-4 minutes. Then, the sample and the operator's hands are rinsed with deionized water.

[0125] Cross-sectional SEM images of the yttrium oxide PVD coating were obtained and analyzed using scanning electron microscopy. See the image below for the cross-sectional view of the coating after sample preparation. Figure 8 The coating has scratches, but the cracks are not obvious.

[0126] Comparative Example 6 - Step 1 of the present invention is omitted:

[0127] Step 1: Wet cutting;

[0128] The sample block was cut using a diamond cutting wheel at a feed rate of 0.01-0.1 mm / s and a rotation speed of 2000 rpm.

[0129] Step two, inlaying;

[0130] After cutting, the cut sections are inlaid using EpoFix epoxy resin and curing agent (25:3), with a curing time of 12 hours.

[0131] Step 3, grinding and polishing;

[0132] The inlay surfaces are to be prepared according to the following steps:

[0133] Rough grinding: Using water as a lubricant, the grinding disc rotates at 200-300 rpm, with a test force of 20-25 N. Grind the inlay surface smooth using a diamond grinding disc (Piano 220). Then rinse the sample, the operator's hands, and the grinding disc with deionized water.

[0134] Fine grinding: The grinding disc is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40N, and diamond grinding fluid (Largo 9μm) is used to grind the sample for 4-6 minutes. Then, the sample and the operator's hands are rinsed with deionized water.

[0135] Diamond polishing: The polishing cloth is MD-Dac, the rotation speed is 150-200 rpm, the test force is 25-30N, and the sample is polished with diamond polishing fluid (Dac 3μm) for 2-4 minutes. Then, the sample and the operator's hands are rinsed with deionized water.

[0136] Oxide polishing: The polishing cloth is MD-Chem, the rotation speed is 150-200 rpm, the test force is 15-20N, and the sample is ground with oxide polishing suspension (OP-S) for 1-2 minutes. Then, the sample, the operator's hands and the polishing disc are rinsed with deionized water.

[0137] Cross-sectional SEM images of the yttrium oxide PVD coating were obtained and analyzed using scanning electron microscopy. See the image below for the cross-sectional view of the coating after sample preparation. Figure 9 The coating has scratches and obvious cracks.

[0138] Comparative Example 7: Adjusting the grinding test force in step four:

[0139] Step 1: Embedding and Protection;

[0140] The yttrium oxide PVD coating sample was placed in an inlay mold and inlaid with a small amount of EpoFix epoxy resin and curing agent (25:3). The curing time was 12-16 hours to ensure that the resin completely covered the coating and protected the PVD coating.

[0141] Step two, wet cutting;

[0142] The sample block was cut using a diamond cutting wheel at a feed rate of 0.01-0.1 mm / s and a rotation speed of 2000 rpm.

[0143] Step 3, inlaying;

[0144] After cutting, the cut sections are inlaid using EpoFix epoxy resin and curing agent (25:3), with a curing time of 12 hours.

[0145] Step four, grinding and polishing;

[0146] The inlay surfaces are to be prepared according to the following steps:

[0147] Rough grinding: Using water as a lubricant, the grinding disc rotates at 200-300 rpm, with a test force of 20-25 N. Grind the inlay surface smooth using a diamond grinding disc (Piano 220). Then rinse the sample, the operator's hands, and the grinding disc with deionized water.

[0148] Fine grinding: The grinding disc is MD-Largo, the rotation speed is 150-200 rpm, the test force is 25-30N, and diamond grinding fluid (Largo 9μm) is used to grind the sample for 2-3 minutes. Then, the sample and the operator's hands are rinsed with deionized water.

[0149] Diamond polishing 1: The polishing cloth is MD-Largo, the rotation speed is 150-200 rpm, the test force is 25-30N, and the sample is polished with diamond polishing fluid (Largo 3μm) for 2-3 minutes. Then, the sample and the operator's hands are rinsed with deionized water.

[0150] Diamond polishing 2: The polishing cloth is MD-Dac, the rotation speed is 150-200 rpm, the test force is 15-20N, and the sample is polished with diamond polishing fluid (Dac 3μm) for 2-3 minutes. Then, the sample and the operator's hands are rinsed with deionized water.

[0151] Oxide polishing: The polishing cloth is MD-Chem, the rotation speed is 150-200 rpm, the test force is 10-15N, and the sample is ground with oxide polishing suspension (OP-S) for 1-2 minutes. Then, the sample, the operator's hands and the polishing disc are rinsed with deionized water.

[0152] Cross-sectional SEM images of the yttrium oxide PVD coating were obtained and analyzed using scanning electron microscopy. See the image below for the cross-sectional view of the coating after sample preparation. Figure 10 The coating has scratches and obvious cracks.

[0153] The scanning electron microscope detection results of the samples obtained in this invention and the comparative example are as follows:

[0154]

[0155]

[0156] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A metallographic preparation method for a yttrium oxide PVD coating, characterized in that, Includes the following steps: Step 1: Embedding and Protection; The sample is placed in the mounting mold and mounted using epoxy resin and curing agent. The curing time is 12-16 hours to form a mounting block, ensuring complete coverage of the coating and protecting the yttrium oxide PVD coating. Step two, wet cutting; The inlay block is cut using a diamond cutting wheel after it has been cured; Step three, then inlay; The cut sections are then inlaid using epoxy resin and a curing agent, with a curing time of 12 hours. Step four, grinding and polishing; The process involves coarse grinding, fine grinding, first diamond polishing, second diamond polishing, and oxide polishing in sequence. During rough grinding, water is used as a lubricant, the grinding disc is MD-Piano 220, the grinding disc speed is 200-300 rpm, the test force is 20-25 N, and the inlay surface is ground flat with a diamond grinding disc; For fine grinding, the grinding disc is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40 N, and diamond grinding fluid is used to grind the sample for 4-6 minutes. During a single diamond polishing process, the polishing cloth is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40 N, and the sample is polished with diamond polishing fluid for 3-5 minutes. During secondary diamond polishing, the rotation speed is 150-200 rpm, the test force is 25-30 N, and the sample is polished with diamond polishing fluid for 2-4 minutes. When polishing with oxides, the rotation speed is 150-200 rpm, the test force is 15-20 N, and the sample is ground with oxide polishing suspension for 1-2 minutes. In step four, the grinding disc for fine grinding is MD-Largo, and the diamond grinding fluid is Largo 9μm; In step four, the polishing cloth used for the first diamond polishing is MD-Largo, and the diamond polishing slurry is Largo 3μm. In step four, the polishing cloth used for secondary diamond polishing is MD-Dac, and the diamond polishing slurry is Dac 3μm. In step four, the polishing cloth for oxide polishing is MD-Chem, and the oxide polishing suspension is OP-S.

2. The metallographic preparation method of yttrium oxide PVD coating according to claim 1, characterized in that: In steps one and three, the epoxy resin is EpoFix cold mounting material.

3. The metallographic preparation method of yttrium oxide PVD coating according to claim 1, characterized in that: In steps one and three, the weight ratio of epoxy resin to curing agent is 25:

3.

4. The metallographic preparation method of yttrium oxide PVD coating according to claim 1, characterized in that: In step two, the cutting feed rate is 0.01-0.1 mm / s, and the rotation speed is 2000 rpm.

5. A metallographic preparation method for a yttrium oxide PVD coating, characterized in that, Includes the following steps: Step 1: Embedding and Protection; The sample is placed in an inlay mold and inlaid with epoxy resin and curing agent. The weight ratio of epoxy resin to curing agent is 25:3, and the curing time is 12-16 hours to form an inlay block, ensuring complete coverage of the coating and protecting the yttrium oxide PVD coating. Step two, wet cutting; The inlay block is cut using a diamond cutting wheel after it has been cured; Step three, then inlay; The cut sections are then inlaid using epoxy resin and a curing agent, with a weight ratio of epoxy resin to curing agent of 25:3 and a curing time of 12 hours. Step four, grinding and polishing; The process involves coarse grinding, fine grinding, first diamond polishing, second diamond polishing, and oxide polishing in sequence. During rough grinding, water is used as a lubricant, the grinding disc is MD-Piano 220, the grinding disc speed is 200-300 rpm, the test force is 20-25 N, and the inlay surface is ground flat with a diamond grinding disc; For fine grinding, the grinding disc is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40 N, and diamond polishing fluid is used. The diamond polishing fluid is Largo 9μm. The sample is ground for 4-6 minutes. During a single diamond polishing process, the polishing cloth is MD-Largo, the rotation speed is 150-200 rpm, the test force is 35-40 N, and the diamond polishing slurry is Largo 3μm. The sample is polished for 3-5 minutes. During secondary diamond polishing, the polishing cloth is MD-Dac, the rotation speed is 150-200 rpm, the test force is 25-30 N, and the diamond polishing slurry is 3μm Dac. The sample is polished for 2-4 minutes using a diamond suspension. During oxide polishing, the polishing cloth is MD-Chem, the rotation speed is 150-200 rpm, the test force is 15-20 N, and the oxide polishing suspension is OP-S. The sample is ground for 1-2 minutes.

Images