A vacuum sealing device for a radio frequency negative hydrogen ion source built-in radio frequency porcelain antenna

Abstract

The application discloses a vacuum sealing device of a radio frequency negative hydrogen ion source built-in radio frequency porcelain antenna, the lower floating flange of the vacuum sealing device is two independent lower flanges through which two radio frequency porcelain antenna copper pipes respectively pass; the upper floating flange is two independent upper flanges through which two radio frequency porcelain antenna copper pipes respectively pass; the two independent lower floating flanges and the two independent upper floating flanges are respectively provided with two inwardly 45° concave conical surfaces; by designing the lower floating flange and the upper floating flange to be two independent flanges respectively, the problem that the adjustable amount of the antenna spacing is very small after the antenna is coated with porcelain and the porcelain is broken during the adjusting process is solved, and the vacuum sealing is not achieved due to the porcelain breakage; meanwhile, by designing the inwardly 45° concave conical surfaces of the lower floating flange and the upper floating flange, the maximum holding force for the radio frequency antenna is achieved, and the problem that the traditional sealing device is not applicable to the special shape of the porcelain radio frequency antenna is solved.

Description

Technical Field

[0001] This invention belongs to the field of radio frequency negative hydrogen ion source technology, and particularly relates to a vacuum sealing device for a radio frequency negative hydrogen ion source with a built-in radio frequency enamel antenna. Background Technology

[0002] One of the challenges in designing a vacuum sealing device lies in the dimensional error of the radio frequency (RF) antenna. The first reason for this error is the antenna's unique shape: the RF antenna built into the negative hydrogen ion source consists of two vertically parallel copper tubes and multiple spiral coils wound around the lower ends of these tubes. Due to dimensional issues during the winding of the spiral coils, the spacing between the two antenna copper tubes leading from the spiral coils is inaccurate. In other words, the actual spacing between the two copper tubes in the wound RF antenna does not meet the requirements specified in the drawings. The second reason for the dimensional error is the enamel layer applied to the antenna. The built-in radio frequency antenna of the negative hydrogen ion source needs to be coated with enamel of a certain thickness during use, and the enamel coating requires a high-temperature environment. Because materials are prone to deformation under high temperatures, the distance between the two copper tubes of the radio frequency antenna will also change during the high-temperature enamel coating process. After the antenna is coated with enamel, the adjustable range of the antenna spacing is very small. If you are not careful, even a slight increase in the adjustment range during the adjustment process will cause the enamel to crack, resulting in a high scrap rate. Because each RF antenna has a certain dimensional error after being coated with enamel, it is difficult to control the spacing between the two copper tubes when installing the antenna, which makes it difficult to solve the antenna sealing problem.

[0003] The second challenge in designing a vacuum sealing device is that, for ordinary sealing structures, the traditional sealing method is to use an O-ring to apply pressure between two surfaces to achieve a seal. However, due to the unique characteristics of radio frequency antennas, the traditional sealing method can no longer meet the requirements. Summary of the Invention

[0004] To address the problems existing in the prior art, this invention proposes a vacuum sealing device for an integrated radio frequency (RF) enamel antenna within a radio frequency (RF) negative hydrogen ion source. The first objective is to solve the dimensional error problem of the RF antenna, achieving compatibility with integrated RF antennas of different spacings and realizing vacuum sealing of these antennas with varying time and economic costs. The second objective is to solve the problem of unsatisfactory sealing performance of tubular sealing structures for RF antennas.

[0005] The present invention adopts the following technical solution to solve its technical problem:

[0006] A vacuum sealing device for a radio frequency negative hydrogen ion source with an embedded radio frequency enamel antenna is provided. The vacuum sealing device is arranged on the upper cover plate of the ion source and is used to seal the ion source built-in radio frequency enamel antenna on the upper cover plate. The vacuum sealing device is arranged in the following order from bottom to top: radio frequency enamel antenna 15, upper magnet seat 2, upper cover plate 1, lower floating flange 6, upper floating flange 7, and floating flange clamping block 11. The two copper tubes of the radio frequency enamel antenna 15 pass through the upper magnet seat 2 and the upper cover plate 1 from bottom to top, and then pass through two independent lower floating flanges 6, two independent upper floating flanges 7 and floating flange clamping block 11 respectively. Finally, they are led out from the upper surface of the floating flange clamping block 11 and fixed on two independent radio frequency enamel antenna wiring plates 18 and wiring pressure plates 19 above the floating flange clamping block 11.

[0007] Its characteristics are:

[0008] The lower floating flange 6 consists of two independent lower flanges through which the two RF enamel antenna copper tubes pass respectively; the upper floating flange 7 consists of two independent upper flanges through which the two RF enamel antenna copper tubes pass respectively.

[0009] The two independent lower floating flanges 6 and the two independent upper floating flanges 7 have two concave conical surfaces on their opposite sides. Specifically, the lower surface of the two independent lower floating flanges 6 is a flat surface, and the upper surface is a concave conical surface at 45° inward. The upper surface of the two independent upper floating flanges 7 is a flat surface, and the lower surface is a concave conical surface at 45° inward. Two independent O-rings 8 are correspondingly arranged between the two independent lower floating flanges 6 and the two independent upper floating flanges 7. The lower floating flanges 6 and the upper floating flanges 7 simultaneously press the O-rings 8 through the 45° groove, so that the O-rings can completely hug the antenna and achieve the sealing purpose.

[0010] Furthermore, the two independent lower floating flanges 6 and the two independent upper floating flanges 7 can float left and right depending on the distance between the two copper tubes of the radio frequency enamel antenna. Specifically, a set gap is left between the concave groove on the upper surface of the upper cover plate (1) and the outer side of the two independent lower floating flanges 6. The set gap is used so that the two independent lower floating flanges 6 and the two independent upper floating flanges 7 can change their positions according to the distance between the two copper tubes of the radio frequency enamel antenna.

[0011] Furthermore, the two independent lower flanges and the two independent upper flanges are provided with a central hole for the copper tube of the enamel radio frequency antenna to pass through, the size of which is based on the standard that the copper tube of the enamel radio frequency antenna can pass through.

[0012] Furthermore, the size of the central hole is based on the standard that the copper tube of the enamel radio frequency antenna can pass through it, that is, the diameter of the central hole is 0.2mm larger than the outer diameter of the largest enamel radio frequency antenna copper tube.

[0013] Furthermore, the two independent lower flanges and the two independent upper flanges each have a concave conical surface at 45° inwards, which is concentric with the enamel-lined RF antenna copper tube passing through the conical surface.

[0014] Furthermore, the floating flange clamping block 11 passes through the two inner holes of the RF enamel antenna 15, the outer sides of the two independent lower floating flanges 6 and the two independent upper floating flanges 7, the upper cover plate 1 passes through the two inner holes of the RF enamel antenna 15, and the upper magnet seat 2 passes through the two inner holes of the RF enamel antenna 15, all with a set gap. This set gap is designed based on the RF enamel antenna spacing with the maximum error measured after the copper tube RF enamel antenna is enamel coated.

[0015] Furthermore, the height of the pressing surface of the floating flange pressing block 11 to the upper cover plate 1 is slightly less than the total height of the two independent upper floating flanges 7 below it to the upper cover plate 1, so that the floating flange pressing block 11 can press the two independent lower floating flanges 6 and the two independent upper floating flanges 7 together.

[0016] Furthermore, the height of the pressing surface of the floating flange pressing block 11 to the upper cover plate 1 is slightly less than the total height of the two independent upper floating flanges 7 below it to the upper cover plate 1. Specifically, the distance from the pressing surface of the floating flange pressing block 11 to the upper cover plate 1 is 0.1mm lower than the distance from the upper floating flanges 7 to the upper cover plate 1, so that the floating flange pressing block 11 can achieve better pressing and sealing.

[0017] Furthermore, an O-ring is provided between each of the two independent lower floating flanges 6 and the upper cover plate 1. The O-ring is used to solve the surface-to-surface vacuum seal between the two independent lower floating flanges 6 and the upper cover plate 1.

[0018] Advantages and effects of the present invention

[0019] 1. This invention solves the problem that after the antenna is coated with enamel, the adjustable range of the antenna spacing is very small. If the adjustment is not careful, even a slight increase in the adjustment range during the adjustment process will cause the enamel to crack, resulting in a high scrap rate and the destruction of the vacuum.

[0020] 2. The present invention designs the lower floating flange and the upper floating flange with concave conical surfaces at 45° inward, which realizes the maximum clamping force for the copper tube of the radio frequency antenna and solves the problem that the traditional sealing structure can only solve the sealing between surfaces, but is not suitable for the special shape of the enamel radio frequency antenna. Attached Figure Description

[0021] Figure 1 This is a perspective view of the vacuum sealing device for the built-in radio frequency antenna of the radio frequency negative hydrogen ion source of the present invention.

[0022] Figure 2a This is an exploded view of the vacuum-sealed device for the built-in radio frequency antenna of the radio frequency negative hydrogen ion source of the present invention.

[0023] Figure 2b For the present invention Figure 2a A partially enlarged view of the exploded diagram of the vacuum sealing device;

[0024] Figure 3 This is a schematic diagram of the conical surface of the floating flange of the vacuum sealing device of the present invention, which is concave inward at 45°.

[0025] Figure 4 This is a cross-sectional view of the vacuum sealing device for the built-in radio frequency antenna of the radio frequency negative hydrogen ion source of the present invention;

[0026] Figure 4a for Figure 4 A magnified view of the gap between the concave groove on the upper surface of the top cover plate and the lower floating flange;

[0027] Figure 5 This is a schematic diagram illustrating the design principle of the lower floating flange and the upper floating flange with a 45° concave concave tapered surface in this invention.

[0028] In the diagram, 1: Top cover plate; 2: Upper magnet base; 3: Copper tube; 4: Sealing ring; 5: Sealing ring; 6: Lower floating flange; 7: Upper floating flange; 8: Sealing ring; 9: Screw; 10: Screw; 11: Floating flange clamping block; 12: Screw; 13: Screw; 14: Gasket; 15: RF enamel antenna; 16: Water connector; 17: Insulating block; 18: Terminal block; 19: Terminal block pressure plate; 20: Insulating block fixing bend; 21: Screw; 22: Screw; 23: Gasket; 24: Screw; 25: Screw; 26: Gasket. Detailed Implementation

[0029] Design principle of the invention

[0030] 1. The design principle of the 45-degree slot clamping RF enamel antenna copper tube of this invention. (For example...) Figure 5 As shown, since the two opposing surfaces of the lower floating flange 6 and the upper floating flange 7 are concave conical surfaces at 45°, according to the force decomposition, when the angle is 45°, for each pair of upper floating flanges 7 and lower floating flanges 6, the resultant force of the component forces of the upper and lower conical surfaces causes the O-ring seal to generate a uniform clamping force. Therefore, when the conical surface is 45°, the O-ring seal is subjected to the most uniform force and has the best clamping effect.

[0031] 2. The design principle of the floating flange of this invention. For example... Figure 2bAs shown, this invention designs the lower floating flange as two independent flanges, and the upper floating flange as two independent flanges. The advantage of this separate design is that the size of the center hole of each floating flange is designed only to allow the copper tube to pass through, without requiring additional allowance, ensuring better sealing of the RF enamel antenna. The advantage of designing two independent flanges is that regardless of the change in the distance between the two copper tubes, each floating flange and the copper tube remain concentric. This ensures that the inwardly concave 45° conical surfaces of the lower and upper floating flanges are always concentric with the copper tube of the RF enamel antenna. Only when the inwardly concave 45° conical floating flange is concentric with the antenna copper tube can the core force of the upper and lower conical surfaces be focused on the copper tube, resulting in uniform force on the O-ring seal and a better clamping effect. If two independent lower or upper floating flanges are made into a single unit, the diameter of the center hole of the lower and upper floating flanges needs to be large enough. That is, according to the maximum error of the antenna, the diameter of the flange center hole should be 2-3mm larger than the outer diameter of the antenna copper tube. In this case, the center point of one of the copper tubes may not be on the center point of the flange center hole, but deviated from the center point of the flange center hole. As a result, the center point of the 45° concave concave surface of the flange will be off-center relative to the center point of the antenna copper tube and will not be concentric with the center point of the copper tube, thus failing to achieve a good clamping effect on the copper tube.

[0032] Based on the above-mentioned inventive principles, this invention designs a vacuum-sealed device for a radio frequency negative hydrogen ion source with a built-in radio frequency enamel antenna, such as... Figure 1 , Figure 2a , Figure 2b , Figure 3 , Figure 4 , Figure 4a As shown, the vacuum sealing device is installed on the ion source cover plate 1 to seal the ion source's built-in radio frequency enamel antenna 15 on the cover plate 1. The vacuum sealing device, from bottom to top, consists of: the radio frequency enamel antenna 15, the upper magnet base 2, the upper cover plate 1, the lower floating flange 6, the upper floating flange 7, and the floating flange clamping block 11. Two copper tubes of the radio frequency enamel antenna 15 pass through the upper magnet base 2 and the upper cover plate 1 from bottom to top, then through two independent lower floating flanges 6, two independent upper floating flanges 7, and the floating flange clamping block 11. Finally, they extend from the upper surface of the floating flange clamping block 11 and are fixed to two independent radio frequency enamel antenna wiring plates 18 and wiring pressure plates 19 above the floating flange clamping block 11. Its characteristic is:

[0033] The lower floating flange 6 consists of two independent lower flanges through which the two RF enamel antenna copper tubes pass respectively; the upper floating flange 7 consists of two independent upper flanges through which the two RF enamel antenna copper tubes pass respectively.

[0034] The two independent lower floating flanges 6 and the two independent upper floating flanges 7 have inwardly concave tapered surfaces on their opposite sides. Specifically, the lower surface of the two independent lower floating flanges 6 is a flat surface, and the upper surface is an inwardly concave tapered surface at 45°. The upper surface of the two independent upper floating flanges 7 is a flat surface, and the lower surface is an inwardly concave tapered surface at 45°. Two independent O-rings 8 are correspondingly arranged between the two independent lower floating flanges 6 and the two independent upper floating flanges 7. The lower floating flanges 6 and the upper floating flanges 7 simultaneously press the O-rings 8 through the 45° groove, so that the O-rings can completely hug the antenna and achieve the sealing purpose.

[0035] Supplementary Note 1

[0036] The vacuum sealing device of this invention is divided by the upper cover plate 1. The sealing devices above the upper cover plate 1 are in an atmospheric environment, while the sealing devices below the upper magnet base 2 are in a vacuum environment. The lower surface of the upper magnet base 2 is connected to the inner cylinder of the ion source. The lower half of the radio frequency enamel antenna, i.e., the helical part, is arranged in the inner cylinder of the ion source. The upper half of the radio frequency enamel antenna, i.e., the two copper tubes, extends out of the upper cover plate 1 and is finally fixed to the two radio frequency enamel antenna wiring boards 18 and wiring pressure plates 19, respectively.

[0037] Hydrogen gas is introduced into the vacuum chamber of the inner cylinder of the ion source through copper tube 3. Under the action of the radio frequency enamel antenna, negative hydrogen ions are generated, and the negative hydrogen ions are extracted from the plasma electrode, absorber electrode, and ground electrode. The structure of the ion source extraction region is not the focus of this invention. See patent number: 2023103955954, patent title: A Multi-Peak High-Current Negative Hydrogen Radio Frequency Ion Source Extraction Structure.

[0038] Furthermore, the two independent lower floating flanges 6 and the two independent upper floating flanges 7 can float left and right depending on the distance between the two copper tubes of the radio frequency enamel antenna. Specifically, a set gap is left on the outer side of the concave groove on the upper surface of the upper cover plate (1) and the two independent lower floating flanges 6 and the two independent upper floating flanges 7. The set gap is used so that the two independent lower floating flanges 6 can change position according to the distance between the two copper tubes of the radio frequency enamel antenna.

[0039] Furthermore, the two independent lower flanges and the two independent upper flanges are provided with a central hole for the copper tube of the enamel radio frequency antenna to pass through, the size of which is based on the standard that the copper tube of the enamel radio frequency antenna can pass through.

[0040] Furthermore, the size of the central hole is based on the standard that the copper tube of the enamel radio frequency antenna can pass through it, that is, the diameter of the central hole is 0.2mm larger than the outer diameter of the largest enamel radio frequency antenna copper tube.

[0041] Supplementary Note 2:

[0042] The diameter of the center hole of the aforementioned floating flange is 0.2mm larger than the outer diameter of the largest enamel-lined RF antenna copper tube. This 0.2mm difference is at least one-tenth of the 2-3mm difference. The reason for the relatively small opening size of the floating flange is that a single floating flange (either a lower or upper flange) only needs to accommodate one copper tube, without considering the error between the two tubes. Conversely, if the lower and upper floating flanges are made as a single integrated lower and upper flange, the flange opening must account for the error in the distance between the two copper tubes. Both openings on a single integrated lower or upper flange would need to be sufficiently large. This means that when two copper tubes are installed, at least one tube will be off-center. To ensure the other tube remains centered, the first tube will become eccentric. With an eccentric tube, the eccentric tube and the flange center hole are not concentric, resulting in suboptimal sealing.

[0043] Furthermore, the two independent lower flanges and the two independent upper flanges each have a concave conical surface at 45° inwards, which is concentric with the enamel-lined RF antenna copper tube passing through the conical surface.

[0044] Furthermore, the floating flange clamping block 11 passes through the two inner holes of the RF enamel antenna 15, the outer sides of the two independent lower floating flanges 6 and the two independent upper floating flanges 7, the upper cover plate 1 passes through the two inner holes of the RF enamel antenna 15, and the upper magnet seat 2 passes through the two inner holes of the RF enamel antenna 15, all with a set gap. This set gap is designed based on the RF enamel antenna spacing with the maximum error measured after the copper tube RF enamel antenna is enamel coated.

[0045] Supplementary Note 3:

[0046] The aforementioned gap can be 2-3mm. The reason for this relatively large gap is that the floating flange clamping block 11, the upper cover plate 1 groove, and the upper magnet seat 2 are all integral parts. Drilling holes in each of these three integral parts to allow the two copper tubes to pass through requires a sufficiently large hole diameter to account for various errors in the spacing between the two copper tubes. For example, errors in the winding process of the enamel RF antenna's spiral coil can cause the spacing between the two copper tubes to increase or decrease. When the spacing on one side increases by 1mm or 1.5mm, the overall error becomes 2mm or 3mm.

[0047] Furthermore, the height of the pressing surface of the floating flange pressing block 11 to the upper cover plate 1 is slightly less than the total height of the two independent upper floating flanges 7 below it to the upper cover plate 1, so that the floating flange pressing block 11 can press the two independent lower floating flanges 6 and the two independent upper floating flanges 7 together.

[0048] Furthermore, the height of the pressing surface of the floating flange pressing block 11 to the upper cover plate 1 is slightly less than the total height of the two independent upper floating flanges 7 below it to the upper cover plate 1. Specifically, the distance from the pressing surface of the floating flange pressing block 11 to the upper cover plate 1 is 0.1mm lower than the distance from the upper floating flanges 7 to the upper cover plate 1, so that the floating flange pressing block 11 can achieve better pressing and sealing.

[0049] Furthermore, an O-ring is provided between each of the two independent lower floating flanges 6 and the upper cover plate 1. The O-ring is used to solve the surface-to-surface vacuum seal between the two independent lower floating flanges 6 and the upper cover plate 1.

[0050] Example 1

[0051] like Figure 1 , Figure 2a , Figure 2b , Figure 3 , Figure 4 , Figure 4a As shown, when replacing RF enamel antennas of different sizes, the RF enamel antenna 15 passes through the upper magnet base 2 and the upper cover plate 1. The lower floating flange 6 and the upper floating flange 7 can be adjusted within a certain range to accommodate RF enamel antennas 15 with different spacing. The lower floating flange 6 and the upper floating flange 7 simultaneously press the sealing ring 8 through a 45° groove, with a ring-to-groove ratio greater than 80%, ensuring a vacuum seal for the RF enamel antenna 15. The distance from the pressing surface of the floating flange pressing block 11 to the upper cover plate 1 is 0.1mm lower than the distance from the upper floating flange 7 to the upper cover plate 1, allowing the floating flange pressing block 11 to achieve better pressing and sealing. This design ensures a better seal for the RF enamel antenna 15 by the floating flange pressing block 11. Subsequent experiments also proved that this sealing design can effectively vacuum seal the RF enamel antenna 15.

[0052] The above description is merely an example and illustration of the concept of the present invention. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the concept of the invention or exceed the scope defined in the claims, they should all fall within the protection scope of the present invention.

Claims

1. A vacuum sealing device for an RF negative hydrogen ion source with an embedded RF enamel antenna, the vacuum sealing device being disposed on the upper cover plate of the ion source for sealing the RF enamel antenna embedded in the upper cover plate; the vacuum sealing device is arranged in the following order from bottom to top: RF enamel antenna (15), upper magnet seat (2), upper cover plate (1), lower floating flange (6), upper floating flange (7), and floating flange clamping block (11); the two copper tubes of the RF enamel antenna (15) pass through the upper magnet seat (2) and the upper cover plate (1) respectively from bottom to top, and then pass through two independent lower floating flanges (6), two independent upper floating flanges (7) and the floating flange clamping block (11) respectively, and finally lead out from the upper surface of the floating flange clamping block (11) and are fixed on two independent RF enamel antenna wiring plates (18) and wiring pressure plates (19) above the floating flange clamping block (11); characterized in that: The lower floating flange (6) is two independent lower flanges through which the two RF enamel antenna copper tubes pass respectively; the upper floating flange (7) is two independent upper flanges through which the two RF enamel antenna copper tubes pass respectively. The two independent lower floating flanges (6) and the two independent upper floating flanges (7) have two concave conical surfaces on their opposite sides. Specifically, the lower surface of the two independent lower floating flanges (6) is a flat surface, and the upper surface is a concave conical surface at 45°. The upper surface of the two independent upper floating flanges (7) is a flat surface, and the lower surface is a concave conical surface at 45°. Two independent O-rings (8) are arranged between the two independent lower floating flanges (6) and the two independent upper floating flanges (7). The lower floating flanges (6) and the upper floating flanges (7) simultaneously press the O-rings (8) through the 45° groove, so that the O-rings can completely hold the antenna and achieve the sealing purpose. The two independent lower floating flanges (6) and the two independent upper floating flanges (7) can float left and right depending on the distance between the two copper tubes of the radio frequency enamel antenna. Specifically, a set gap is left on the concave groove on the upper surface of the upper cover plate (1) and the outside of the two independent lower floating flanges (6). The set gap is used so that the two independent lower floating flanges (6) and the two independent upper floating flanges (7) can change their positions according to the distance between the two copper tubes of the radio frequency enamel antenna.

2. The vacuum sealing device for a radio frequency negative hydrogen ion source with a built-in radio frequency enamel antenna according to claim 1, characterized in that: The two independent lower flanges and two independent upper flanges are provided with a central hole for the copper tube of the enamel radio frequency antenna to pass through, the size of which is based on the standard that the copper tube of the enamel radio frequency antenna can pass through.

3. The vacuum sealing device for a radio frequency negative hydrogen ion source with a built-in radio frequency enamel antenna according to claim 2, characterized in that: The size of the central hole is designed so that the copper tube of the enamel radio frequency antenna can pass through it; that is, the diameter of the central hole is 0.2 mm larger than the outer diameter of the largest enamel radio frequency antenna copper tube.

4. The vacuum sealing device for a radio frequency negative hydrogen ion source with a built-in radio frequency enamel antenna according to claim 1, characterized in that: The two independent lower flanges and two independent upper flanges each have a concave conical surface at 45° inwards, which is concentric with the enamel-lined RF antenna copper tube passing through the conical surface.

5. The vacuum sealing device for a radio frequency negative hydrogen ion source with a built-in radio frequency enamel antenna according to claim 1, characterized in that: The floating flange clamping block (11) passes through the two inner holes of the RF enamel antenna (15), the outer sides of the two independent lower floating flanges (6) and the two independent upper floating flanges (7), and the upper cover plate (1) passes through the two inner holes of the RF enamel antenna (15). The upper magnet seat (2) passes through the two inner holes of the RF enamel antenna (15). A set gap is left in all these gaps. The set gap is designed based on the RF enamel antenna spacing with the maximum error measured after the copper tube RF enamel antenna is enamel coated.

6. The vacuum sealing device for a radio frequency negative hydrogen ion source with a built-in radio frequency enamel antenna according to claim 1, characterized in that: The height of the pressing surface of the floating flange clamping block (11) to the upper cover plate (1) is slightly less than the total height of the two independent upper floating flanges (7) below it to the upper cover plate (1), so that the floating flange clamping block (11) can clamp the two independent lower floating flanges (6) and the two independent upper floating flanges (7).

7. The vacuum sealing device for a radio frequency negative hydrogen ion source with a built-in radio frequency enamel antenna according to claim 6, characterized in that: The height of the pressing surface of the floating flange pressing block (11) to the upper cover plate (1) is slightly less than the total height of the two independent upper floating flanges (7) below it to the upper cover plate (1). Specifically, the distance from the pressing surface of the floating flange pressing block (11) to the upper cover plate (1) is 0.1 mm lower than the distance from the upper floating flange (7) to the upper cover plate (1), so that the floating flange pressing block (11) can achieve better pressing and sealing.

8. The vacuum sealing device for a radio frequency negative hydrogen ion source with a built-in radio frequency enamel antenna according to claim 1, characterized in that: An O-ring is provided between the two independent lower floating flanges (6) and the upper cover plate (1) respectively. The O-ring is used to solve the surface-to-surface vacuum seal between the two independent lower floating flanges (6) and the upper cover plate (1).

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