Ultrafast laser processing system and method for two-dimensional material nanostructure preparation

Abstract

The present application belongs to the field of laser processing, and particularly relates to a superfast laser processing system for two-dimensional material nanostructure preparation, which comprises an adjustment and calibration module, a workpiece clamping module, a laser processing module, a laser beam expanding module, an adjustment and control module, a processing prompting module and an information recording module. Through the action of the device detection module, the working state of the laser processing device can be detected, and the levelness, flatness and functionality can be detected. In cooperation with the action of the adjustment and calibration module, the processing device can be adjusted and calibrated to maintain the optimal working state of the device, prevent the inclination of the device or the unevenness of the workpiece from affecting the laser processing effect, and expand the laser through the action of the laser beam expanding module. The laser spot energy distribution is uniform, the edge of the processed workpiece after cutting is smooth, the processing effect is better, and through the adjustment and control module, each parameter of the processing can be adjusted to improve the adaptability of the device.

Description

Technical Field

[0001] This invention belongs to the field of laser processing, specifically relating to an ultrafast laser processing system and method for preparing two-dimensional material nanostructures. Background Technology

[0002] Novel graphene-like two-dimensional materials have wide applications in electronics, optoelectronics, sensing, catalysis, and energy conversion. Natural two-dimensional materials are abundant and inexpensive, but their bulk form is inert, meaning they have low chemical activity, which is detrimental to chemical and biological applications such as chemical catalysis, biosensing, and energy conversion. Unlike bulk materials, two-dimensional nanostructures possess numerous active sites on their edges and surfaces, which are advantageous for chemical and biological applications. Furthermore, two-dimensional materials, such as transition metal sulfides, are intrinsically semiconductor in nature, while metallic transition metal sulfides exhibit higher electrical conductivity and photoexcitation properties.

[0003] Methods for preparing two-dimensional nanostructures of transition metal sulfides include hydrothermal methods and exfoliation methods; exfoliation methods include chemical intercalation exfoliation, electrochemical intercalation exfoliation, and microwave-assisted exfoliation. These methods require various chemical reagents, complex steps, and specific environments such as particular temperatures and pressures. The resulting nanostructures exhibit poor crystallinity, common shapes, and lack of metallic phase transitions.

[0004] Fast laser processing is a novel technology in the field of micro- and nano-manufacturing. Laser processing methods are fast, flexible, non-contact, pollution-free, and do not require harsh conditions. Ultrafast lasers, in particular, have advantages such as short pulse duration, high peak pulse power, the ability to avoid thermal effects and prevent thermal oxidation of materials, and precise focusing for positioning and processing.

[0005] Current laser processing equipment for fabricating two-dimensional nanostructures suffers from several drawbacks. Firstly, the equipment may not be level before processing, resulting in misalignment between the equipment and the workpiece. This leads to tilted grooves and holes during laser processing, negatively impacting the processing results. Secondly, impurities on the workpiece surface can affect its flatness, further hindering the processing. Therefore, improvements are necessary. Summary of the Invention

[0006] The purpose of this invention is to provide an ultrafast laser processing system and method for the preparation of two-dimensional material nanostructures, which solves the problems of unevenness between the equipment and the workpiece affecting the grooving and hole cutting effect, and unevenness of the workpiece surface affecting the processing effect.

[0007] To achieve the above objectives, this invention provides an ultrafast laser processing system for the fabrication of two-dimensional material nanostructures, comprising an adjustment and calibration module, a workpiece clamping module, a laser processing module, a laser beam expanding module, an adjustment and control module, a processing prompt module, and an information recording module. The user terminal module is connected to the command transmission module, allowing the user terminal to transmit operation commands. The command transmission module is connected to the operation control module, enabling the transmission of user-sent control commands to the operation control module for execution. The operation control module is connected to the equipment detection module, enabling the detection of the laser processing equipment. The equipment detection module is also connected to the adjustment and calibration module, allowing for the analysis of any issues discovered during the detection process. The system adjusts and calibrates to address issues. The operation control module is connected to the workpiece clamping module, enabling the execution of operation commands and workpiece positioning and clamping. It is also connected to the laser processing module, sending commands to perform processing. The laser processing module is connected to the laser beam expander, expanding the emitted laser beam. The operation control module is connected to the adjustment control module, allowing adjustment of the processing equipment's height, mask, and horizontal position. The operation control module is connected to the processing prompt module, providing feedback on processing completion information. Finally, the processing prompt module is connected to the information recording module, storing and recording processing logs and data.

[0008] The principle of this invention is as follows: When the equipment is in use, the workpiece is first placed on the rotating wheel, and then the hydraulic cylinder is started. The output end of the hydraulic cylinder drives the push rod to move upward, and the push rod drives the inclined block to move. The inclined block slides relative to the pulley, and the inclined block drives the hinge rod to rotate. The hinge rod slides along the fixed rod, and the hinge rod compresses the spring, which can realize the deflection of the clamping wheel towards the workpiece, so that the clamping wheel contacts the workpiece, and the workpiece can be clamped and positioned. Moreover, the clamping wheels at both ends move synchronously, which can center and clamp the workpiece with high positioning accuracy, thereby improving the laser processing effect.

[0009] The beneficial effects of this invention are as follows: By designing the equipment detection module, the working status of the laser processing equipment can be detected, including levelness, flatness, and functionality. Combined with the adjustment and calibration module, the processing equipment can be adjusted and calibrated to maintain its optimal working condition and prevent tilting of the equipment or unevenness of the workpiece from affecting the laser processing effect. The laser beam expanding module expands the laser beam, resulting in a uniform laser spot energy distribution, smooth edges on the cut workpiece, and better processing results. Simultaneously, the adjustment and control module allows for the adjustment of various processing parameters, improving the equipment's adaptability.

[0010] By designing the function of the hydraulic cylinder, the output end of the hydraulic cylinder can drive the push rod to move vertically. The push rod simultaneously drives the inclined block to move. Through the sliding connection between the pulley and the inclined block and the hinge connection between the hinge rod and the machine body, the clamping wheel can be deflected towards the workpiece. Moreover, the clamping wheels at both ends move synchronously, which can center and clamp the workpiece with high positioning accuracy, thereby improving the laser processing effect.

[0011] Furthermore, the equipment testing module includes a leveling testing module, a flatness testing module, and a function self-testing module. The leveling testing module and the flatness testing module are connected, and the flatness testing module and the function self-testing module are connected. The equipment testing module can detect the levelness of the equipment, the flatness of the workpiece, and the normal operating function of the equipment.

[0012] Furthermore, the adjustment and calibration module includes a leveling adjustment module, a flatness adjustment module, and a manual calibration module. The leveling adjustment module and the flatness adjustment module are connected, and the flatness adjustment module and the manual calibration module are connected. Through the adjustment and calibration module, the detected problems can be adjusted and calibrated.

[0013] Furthermore, the laser beam expanding module includes a beam expanding mirror module, a transmission-reflecting prism module, and a focusing lens module. The beam expanding mirror module and the transmission-reflecting prism module are connected, and the transmission-reflecting prism module and the focusing lens module are connected. The laser beam expanding module can expand the emitted laser beam.

[0014] Furthermore, the adjustment control module includes a lifting control module, a mask adjustment module, and a lens offset module. The lifting control module and the mask adjustment module are connected, and the mask adjustment module and the lens offset module are connected. Through the adjustment control module, different working parameters of the processing equipment can be adjusted.

[0015] Furthermore, it also includes a machine body, the bottom of which is fixedly connected to four evenly distributed support bases, the front end of which has a heat dissipation vent, the right end of which is hinged to an inspection door, the top of which is bolted to a mounting base, the top of which is fixedly connected to a bracket, the front end of which is fixedly connected to a laser, the lower end of which is provided with an emitting head, and the machine body is provided with a clamping mechanism.

[0016] Furthermore, the clamping mechanism includes hydraulic cylinders. Two symmetrically distributed hydraulic cylinders are fixedly connected inside the machine body. A push rod is fixedly connected to the upper end of the output end of each hydraulic cylinder. The push rod is slidably connected to the machine body. A rotating wheel is hinged inside the upper end of the push rod. Wedges are fixedly connected to both ends of the push rod. A pulley is contacted on the upper surface of each wedge. A hinge rod is rotatably sleeved on the outer side of the pulley. The hinge rod is rotatably connected to the machine body via a hinge shaft. A clamping wheel is hinged inside the upper end of the hinge rod. A fixing rod is fixedly connected to the inner wall of the machine body. The fixing rod is slidably connected to the hinge rod. A spring is provided on the outer side of the fixing rod. By designing this clamping mechanism, the workpiece positioning and clamping effect can be improved.

[0017] Furthermore, a through groove is provided inside the hinge rod, and a fixed rod is slidably connected inside the through groove. By designing the through groove, the fixed rod can slide relative to the hinge rod.

[0018] Furthermore, one end of the spring is fixedly connected to the inner wall of the machine body, and the other end of the spring is fixedly connected to the hinge rod. By designing the spring, the spring force can be applied to the hinge rod.

[0019] The method of using an ultrafast laser processing system for fabricating two-dimensional material nanostructures includes the following specific steps:

[0020] Step 1: First, place the workpiece on the worktable surface of the laser processing equipment using a robotic arm or manually. Then, the user logs into the user terminal module to operate the port, inputting the spatial requirements, processing parameters, and data information. The user's input commands are sent through the command transmission module.

[0021] Step 2: The operation control module receives the operation instruction information. At this time, the operation control module first sends the execution instruction to the workpiece clamping module. Then, the workpiece clamping module clamps and positions the workpiece on the worktable surface. After clamping is completed, the operation control module sends the operation instruction to the equipment detection module.

[0022] Step 3: After receiving the instruction, the equipment detection module performs the detection. First, the level detection module detects the levelness of the equipment, and then the flatness detection module detects the flatness of the workpiece surface to determine whether there are any impurities or obstructions. At the same time, the function self-test module can perform self-testing of the basic functions of the laser processing equipment to determine whether it is in normal working condition.

[0023] Step 4: After the equipment test is completed, if a problem message is found, an instruction will be sent to the adjustment and calibration module. The horizontal adjustment module will adjust the levelness of the equipment, and the flatness adjustment module will adjust the flatness of the workpiece surface. If the adjustment equipment malfunctions, manual adjustment and calibration will be performed through the manual calibration module.

[0024] Step 5: After the equipment inspection and adjustment are completed, the operation control module sends an instruction to the laser processing module to start the laser processing of the workpiece. After the laser is emitted, it is expanded by the laser beam expansion module. After the beam is expanded, the laser can process the workpiece. During the processing, the adjustment control module can also be used to adjust and control the workpiece. The lifting control module adjusts the distance between the lens and the workpiece, the mask adjustment module adjusts the focusing position, and the lens offset module adjusts the lens position.

[0025] Step Six: After the laser processing of the workpiece is completed, the operation control module sends a command to the workpiece clamping module to release the workpiece from positioning. At the same time, the processing prompt module sends feedback information to the user terminal module to indicate the completion of the processing. Finally, the information recording module records and stores the processing log and data information during the processing, thus completing the entire processing work. Attached Figure Description

[0026] Figure 1 This is a system schematic diagram of an ultrafast laser processing system for fabricating two-dimensional material nanostructures according to an embodiment of the present invention.

[0027] Figure 2 This invention provides an ultrafast laser processing system for fabricating two-dimensional material nanostructures. Figure 1 Schematic diagram of the equipment testing module;

[0028] Figure 3 This invention provides an ultrafast laser processing system for fabricating two-dimensional material nanostructures. Figure 1 Schematic diagram of the adjustment and calibration module;

[0029] Figure 4 This invention provides an ultrafast laser processing system for fabricating two-dimensional material nanostructures. Figure 1 Schematic diagram of a laser beam expander module;

[0030] Figure 5 This invention provides an ultrafast laser processing system for fabricating two-dimensional material nanostructures. Figure 1 Schematic diagram of the adjustment and control module;

[0031] Figure 6 This is a perspective view of an ultrafast laser processing system for fabricating two-dimensional material nanostructures according to an embodiment of the present invention;

[0032] Figure 7 This invention provides an ultrafast laser processing system for fabricating two-dimensional material nanostructures. Figure 6 A front sectional view;

[0033] Figure 8 This invention provides an ultrafast laser processing system for fabricating two-dimensional material nanostructures. Figure 7Enlarged view of point A. Detailed Implementation

[0034] The following detailed description illustrates the specific implementation method:

[0035] The reference numerals in the accompanying drawings include:

[0036] User terminal module 10, instruction transmission module 11, operation control module 12, equipment detection module 13, adjustment and calibration module 14, workpiece clamping module 15, laser processing module 16, laser beam expander module 17, adjustment and control module 18, processing prompt module 19, information recording module 20, level detection module 131, flatness detection module 132, function self-test module 133, level adjustment module 141, flatness adjustment module 142, manual calibration module 143, beam expander module 144, laser beam expander ...4, flatness adjustment module 145, laser beam expander module 16, laser beam expander module 17, laser processing module 18, processing prompt module 19, information recording module 20, laser processing module 131, laser beam expander module 144, laser beam expander module 145, laser beam expander module 146, laser beam expander module 147, laser beam expander module 148, laser beam expander module 149, laser beam expander module 140, laser beam expander module 141, laser beam expander module 142, laser beam expander module 143, laser beam expander module 144, laser beam expander module 145, laser Beam lens module 171, Transmitting and reflecting prism module 172, Focusing lens module 173, Lifting control module 181, Mask adjustment module 182, Lens offset module 183, Body 1, Support base 2, Heat dissipation vent 3, Inspection door 4, Mounting base 5, Bracket 6, Laser 7, Emitter head 8, Clamping mechanism 9, Hydraulic cylinder 91, Top rod 92, Rotating wheel 93, Inclined block 94, Pulley 95, Hinge rod 96, Clamping wheel 98, Fixing rod 99, Through slot 991, Spring 992.

[0037] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5As shown, this embodiment provides an ultrafast laser processing system for the fabrication of two-dimensional material nanostructures, including a user terminal module 10, an instruction transmission module 11, an operation control module 12, an equipment detection module 13, an adjustment and calibration module 14, a workpiece clamping module 15, a laser processing module 16, a laser beam expander module 17, an adjustment and control module 18, a processing prompt module 19, and an information recording module 20. The user terminal module 10 is connected to the instruction transmission module 11, allowing the user terminal to transmit operation instructions. The instruction transmission module 11 is connected to the operation control module 12, transmitting user-sent control instructions to the operation control module 12 for execution. The operation control module 12 is connected to the equipment detection module 13, enabling the detection of the laser processing equipment. The adjustment and calibration module 14 is connected to adjust and calibrate for problems found after testing. The operation control module 12 is connected to the workpiece clamping module 15 to execute operation commands and position and clamp the workpiece. The operation control module 12 is connected to the laser processing module 16 to send commands to the laser processing module 16 for processing. The laser processing module 16 is connected to the laser beam expanding module 17 to expand the emitted laser beam. The operation control module 12 is connected to the adjustment control module 18 to adjust the height, mask, and horizontal position of the processing equipment. The operation control module 12 is connected to the processing prompt module 19 to provide feedback prompts for processing completion information. The processing prompt module 19 is connected to the information recording module 20 to store and record processing logs and processing data.

[0038] The equipment testing module 13 includes a leveling testing module 131, a flatness testing module 132, and a function self-testing module 133. The leveling testing module 131 and the flatness testing module 132 are connected, and the flatness testing module 132 and the function self-testing module 133 are connected. The equipment testing module 13 can be used to test the levelness of the equipment, the flatness of the workpiece, and the normal operation of the equipment.

[0039] The adjustment and calibration module 14 includes a leveling adjustment module 141, a flatness adjustment module 142, and a manual calibration module 143. The leveling adjustment module 141 and the flatness adjustment module 142 are connected, and the flatness adjustment module 142 and the manual calibration module 143 are connected. The adjustment and calibration module 14 can be used to adjust and calibrate the detected problems.

[0040] The laser beam expanding module 17 includes a beam expanding mirror module 171, a transmission-reflection prism module 172, and a focusing lens module 173. The beam expanding mirror module 171 and the transmission-reflection prism module 172 are connected, and the transmission-reflection prism module 172 and the focusing lens module 173 are connected. The laser beam expanding module 17 can expand the emitted laser beam.

[0041] The adjustment control module 18 includes a lifting control module 181, a mask adjustment module 182, and a lens offset module 183. The lifting control module 181 and the mask adjustment module 182 are connected, and the mask adjustment module 182 and the lens offset module 183 are connected. Different working parameters of the processing equipment can be adjusted through the adjustment control module 18.

[0042] The method of using an ultrafast laser processing system for fabricating two-dimensional material nanostructures includes the following specific steps:

[0043] Step 1: First, place the workpiece on the worktable surface of the laser processing equipment using a robotic arm or manually. Then, the user logs into the user terminal module 10 to operate the port, inputting the spatial requirements, processing parameters, and data information. The user's input instructions are sent through the instruction transmission module 11.

[0044] Step 2: The operation control module 12 receives the operation instruction information. At this time, the operation control module 12 first sends the execution instruction to the workpiece clamping module 15. Then, the workpiece clamping module 15 clamps and positions the workpiece on the worktable surface. After the clamping is completed, the operation control module 12 sends the operation instruction to the equipment detection module 13.

[0045] Step 3: After receiving the instruction, the equipment detection module 13 performs the detection. First, the horizontal detection module 131 detects the levelness of the equipment, and then the flatness detection module 132 detects the flatness of the workpiece surface to determine whether there are any impurities or obstructions. At the same time, the function self-test module 133 can perform self-test on the basic functions of the laser processing equipment to determine whether it is in normal working condition.

[0046] Step 4: After the equipment test is completed, if a problem occurs, an instruction will be sent to the adjustment and calibration module 14. The horizontal adjustment module 141 will adjust the levelness of the equipment, and the flatness adjustment module 142 will adjust the flatness of the workpiece surface. If the adjustment equipment malfunctions, manual adjustment and calibration will be performed through the manual calibration module 143.

[0047] Step 5: After the equipment inspection and adjustment are completed, the operation control module 12 sends an instruction to the laser processing module 16 to start the laser processing of the workpiece. After the laser is emitted, it is expanded by the laser beam expansion module 17. After the beam is expanded, the laser can process the workpiece. During the processing, it can also be adjusted and controlled by the adjustment control module 18. The lifting control module 181 adjusts the distance between the lens and the workpiece, the mask adjustment module 182 adjusts the focusing position, and the lens offset module 183 adjusts the lens position.

[0048] Step Six: After the laser processing of the workpiece is completed, the operation control module 12 sends an instruction to the workpiece clamping module 15 to release the workpiece positioning. At the same time, the processing prompt module 19 sends feedback information to the user terminal module 10 to indicate the completion of the processing. Finally, the information recording module 20 records and stores the processing log and data information during the processing, thus completing all the processing work.

[0049] In another embodiment, such as Figure 6 , Figure 7 , Figure 8 As shown, the ultrafast laser processing system for fabricating two-dimensional material nanostructures also includes a body 1. The bottom of the body 1 is fixedly connected to four evenly distributed support seats 2. The front end of the body 1 has a heat dissipation vent 3. The right end of the body 1 is hinged to an inspection door 4. The top of the body 1 is bolted to a mounting seat 5. The top of the mounting seat 5 is fixedly connected to a bracket 6. The front end of the bracket 6 is fixedly connected to a laser 7. The lower end of the laser 7 is provided with an emission head 8. The body 1 is provided with a clamping mechanism 9.

[0050] The clamping mechanism 9 includes hydraulic cylinders 91. Two symmetrically distributed hydraulic cylinders 91 are fixedly connected inside the machine body 1. A push rod 92 is fixedly connected to the upper end of the output end of each hydraulic cylinder 91. The push rod 92 is slidably connected to the machine body 1. A rotating wheel 93 is hinged inside the upper end of the push rod 92. An inclined block 94 is fixedly connected to both ends of the push rod 92. A pulley 95 is in contact with the upper surface of the inclined block 94. A hinge rod 96 is rotatably sleeved on the outer side of the pulley 95. The hinge rod 96 is rotatably connected to the machine body 1 through a hinge shaft. A clamping wheel 98 is hinged inside the upper end of the hinge rod 96. A fixing rod 99 is fixedly connected to the inner wall of the machine body 1. The fixing rod 99 is slidably connected to the hinge rod 96. A spring 992 is provided on the outer side of the fixing rod 99. By designing the clamping mechanism 9, the workpiece positioning and clamping effect can be improved.

[0051] The hinge rod 96 has a through groove 991 inside, and a fixed rod 99 is slidably connected inside the through groove 991. By designing the through groove 991, the fixed rod 99 can slide relative to the hinge rod 96.

[0052] One end of the spring 992 is fixedly connected to the inner wall of the body 1, and the other end of the spring 992 is fixedly connected to the hinge rod 96. By designing the spring 992, the force of the spring 992 can be applied to the hinge rod 96.

[0053] The specific implementation process of this invention is as follows: When the equipment is in use, the workpiece is first placed on the rotating wheel 93, and then the hydraulic cylinder 91 is started. The output end of the hydraulic cylinder 91 drives the push rod 92 to move upward. The push rod 92 drives the inclined block 94 to move. The inclined block 94 slides relative to the pulley 95. The inclined block 94 will drive the hinge rod 96 to rotate. The hinge rod 96 slides along the fixed rod 99. The hinge rod 96 compresses the spring 992, which can realize the deflection of the clamping wheel 98 towards the workpiece, so that the clamping wheel 98 contacts the workpiece, and the workpiece can be clamped and positioned. Moreover, the clamping wheels 98 at both ends move synchronously, which can center and clamp the workpiece with high positioning accuracy, thereby improving the laser processing effect.

[0054] The beneficial effects of this invention are as follows: By designing the equipment detection module 13, the working status of the laser processing equipment can be detected, including levelness, flatness, and functionality. In conjunction with the adjustment and calibration module 14, the processing equipment can be adjusted and calibrated to maintain its optimal working state and prevent tilting of the equipment or unevenness of the workpiece from affecting the laser processing effect. Through the laser beam expanding module 17, the laser beam can be expanded, resulting in a uniform distribution of laser spot energy, smooth edges of the cut workpiece, and better processing effect. At the same time, through the adjustment and control module 18, various processing parameters can be adjusted to improve the adaptability of the equipment.

[0055] By designing the function of hydraulic cylinder 91, the output end of hydraulic cylinder 91 can drive push rod 92 to move vertically. Push rod 92 simultaneously drives inclined block 94 to move. Through the sliding connection between pulley 95 and inclined block 94 and the hinge rod 96 and machine body 1, the clamping wheel 98 can be deflected towards the workpiece. Moreover, the clamping wheels 98 at both ends move synchronously, which can center and clamp the workpiece with high positioning accuracy, thereby improving the laser processing effect.

[0056] It should be noted in advance that, in this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0057] The above descriptions are merely embodiments of the present invention, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of the present invention, and these should also be considered within the scope of protection of the present invention. These modifications and improvements will not affect the effectiveness of the present invention or the practicality of the patent. The scope of protection claimed in this application should be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. An ultrafast laser processing system for fabricating two-dimensional material nanostructures, comprising a user terminal module, a command transmission module, an operation control module, an equipment detection module, an adjustment and calibration module, a workpiece clamping module, a laser processing module, a laser beam expander module, an adjustment and control module, a processing prompt module, and an information recording module, characterized in that: The user terminal module is connected to the instruction transmission module, which can transmit operation instructions. The instruction transmission module is connected to the operation control module, which can transmit the control instructions sent by the user to the operation control module for execution. The operation control module is connected to the equipment detection module, which can perform detection work on the laser processing equipment. The equipment detection module is connected to the adjustment and calibration module, which can adjust and calibrate the problems found after detection. The operation control module is connected to the workpiece clamping module, which can execute the operation instructions and position and clamp the workpiece. The operation control module is connected to the laser processing module, which can send instructions to the laser processing module for processing. The laser processing module is connected to the laser beam expanding module, which can expand the emitted laser beam. The operation control module is connected to the adjustment control module, which can adjust the height, mask, and horizontal position of the processing equipment. The operation control module is connected to the processing prompt module, which can provide feedback prompts on processing completion information. The processing prompt module is connected to the information recording module, which can store and record processing logs and processing data. It also includes a body, characterized in that: four evenly distributed support seats are fixedly connected to the bottom of the body, a heat dissipation vent is opened inside the front end of the body, an inspection door is hinged to the right end of the body, a mounting base is installed on the top of the body by bolts, a bracket is fixedly connected to the top of the mounting base, a laser is fixedly connected to the front end of the bracket, an emitting head is provided at the lower end of the laser, and a clamping mechanism is provided on the body; The clamping mechanism includes hydraulic cylinders. Two symmetrically distributed hydraulic cylinders are fixedly connected inside the machine body. A push rod is fixedly connected to the upper end of the output end of the hydraulic cylinder. The push rod is slidably connected to the machine body. A rotating wheel is hinged inside the upper end of the push rod. An inclined block is fixedly connected to both ends of the push rod. A pulley is in contact with the upper surface of the inclined block. A hinge rod is rotatably sleeved on the outer side of the pulley. The hinge rod is rotatably connected to the machine body through a hinge shaft. A clamping wheel is hinged inside the upper end of the hinge rod. A fixing rod is fixedly connected to the inner side wall of the machine body. The fixing rod is slidably connected to the hinge rod. A spring is provided on the outer side of the fixing rod.

2. The ultrafast laser processing system for fabricating two-dimensional material nanostructures according to claim 1, characterized in that: The equipment testing module includes a leveling module, a flatness testing module, and a function self-testing module. The leveling module and the flatness testing module are connected, and the flatness testing module and the function self-testing module are connected. The equipment testing module can detect the levelness of the equipment, the flatness of the workpiece, and the normal operating function of the equipment.

3. The ultrafast laser processing system for fabricating two-dimensional material nanostructures according to claim 1, characterized in that: The adjustment and calibration module includes a leveling adjustment module, a flatness adjustment module, and a manual calibration module. The leveling adjustment module and the flatness adjustment module are connected, and the flatness adjustment module and the manual calibration module are connected. The adjustment and calibration module can be used to adjust and calibrate the detected problems.

4. The ultrafast laser processing system for fabricating two-dimensional material nanostructures according to claim 1, characterized in that: The laser beam expanding module includes a beam expanding lens module, a transmission-reflecting prism module, and a focusing lens module. The beam expanding lens module and the transmission-reflecting prism module are connected, and the transmission-reflecting prism module and the focusing lens module are connected. The laser beam expanding module can expand the emitted laser beam.

5. The ultrafast laser processing system for fabricating two-dimensional material nanostructures according to claim 1, characterized in that: The adjustment and control module includes a lifting control module, a mask adjustment module, and a lens offset module. The lifting control module and the mask adjustment module are connected, and the mask adjustment module and the lens offset module are connected. Through the adjustment and control module, different working parameters of the processing equipment can be adjusted.

6. The ultrafast laser processing system for fabricating two-dimensional material nanostructures according to claim 5, characterized in that: The hinge rod has a through groove inside, and a fixed rod is slidably connected inside the through groove.

7. The ultrafast laser processing system for fabricating two-dimensional material nanostructures according to claim 6, characterized in that: One end of the spring is fixedly connected to the inner wall of the machine body, and the other end of the spring is fixedly connected to the hinge rod.

8. An ultrafast laser processing method for fabricating two-dimensional material nanostructures, characterized in that: The system described in any one of claims 1-7 is employed, and the specific steps include: Step 1: First, place the workpiece on the worktable surface of the laser processing equipment using a robotic arm or manually. Then, the user logs into the user terminal module to operate the port, inputting the spatial requirements, processing parameters, and data information. The user's input commands are sent through the command transmission module. Step 2: The operation control module receives the operation instruction information. At this time, the operation control module first sends the execution instruction to the workpiece clamping module. Then, the workpiece clamping module clamps and positions the workpiece on the worktable surface. After clamping is completed, the operation control module sends the operation instruction to the equipment detection module. Step 3: After receiving the instruction, the equipment detection module performs the detection. First, the level detection module detects the levelness of the equipment, and then the flatness detection module detects the flatness of the workpiece surface to determine whether there are any impurities or obstructions. At the same time, the function self-test module can perform self-testing of the basic functions of the laser processing equipment to determine whether it is in normal working condition. Step 4: After the equipment test is completed, if a problem message is found, an instruction will be sent to the adjustment and calibration module. The horizontal adjustment module will adjust the levelness of the equipment, and the flatness adjustment module will adjust the flatness of the workpiece surface. If the adjustment equipment malfunctions, manual adjustment and calibration will be performed through the manual calibration module. Step 5: After the equipment inspection and adjustment are completed, the operation control module sends an instruction to the laser processing module to start the laser processing of the workpiece. After the laser is emitted, it is expanded by the laser beam expansion module. After the beam is expanded, the laser can process the workpiece. During the processing, the adjustment control module can also be used to adjust and control the workpiece. The lifting control module adjusts the distance between the lens and the workpiece, the mask adjustment module adjusts the focusing position, and the lens offset module adjusts the lens position. Step Six: After the laser processing of the workpiece is completed, the operation control module sends a command to the workpiece clamping module to release the workpiece from positioning. At the same time, the processing prompt module sends feedback information to the user terminal module to indicate the completion of the processing. Finally, the information recording module records and stores the processing log and data information during the processing, thus completing the entire processing work.

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