A kind of erosion-resistant high-entropy alloy coating and its preparation method and application

Abstract

This invention relates to the field of wear-resistant coating technology, and discloses a wear-resistant high-entropy alloy coating, its preparation method, and its application. The preparation method includes the following steps: installing an alloy target on a target position in a deposition chamber; treating the substrate; installing a substrate sample plate and closing the chamber to evacuate the vacuum; closing the gate valve and evacuating the deposition chamber to the target vacuum level; heating the sample plate to the target temperature; adjusting the target-substrate distance and setting the Ar flow rate; setting the sample rotation speed, sputtering power, and substrate bias, and starting sputtering; turning off the power after sputtering and continuing sputtering, followed by heating and sputtering; after deposition, removing the sample after it cools to room temperature; the deposited TaNbHfZr coating has high strength and plasticity, and the presence of the equiaxed crystal layer prevents the continued propagation of cracks in the thickness direction after nano-impact, providing wear-resistant protection for turbine blades; solving the problem of insufficient toughness and poor wear resistance of wear-resistant coatings on turbine blade surfaces.

Description

Technical Field

[0001] This invention belongs to the field of wear-resistant coatings and their preparation technology, specifically relating to a wear-resistant high-entropy alloy coating, its preparation method and application. Background Technology

[0002] In waters with high sediment content, hydraulic machinery components such as turbines operate under complex conditions. The working environment of turbine runners and blades is particularly harsh, with their surfaces subjected to cavitation damage from sediment particles. This leads to chemical and electrochemical corrosion and wear, causing erosion failure of the turbine's flow-through components. During cavitation, the increased activity of water vapor and oxygen due to the high pressure generated by cavitation accelerates the corrosion rate. Simultaneously, corrosion points create wave-guiding effects, concentrating the mechanical impact of cavitation bubble collapse and accelerating cavitation damage. Furthermore, sediment-laden water flow increases cavitation intensity. The high-frequency pressure and high-speed hydraulic impact in the nearby flow field during cavitation bubble collapse increase the acceleration of sand particles, exacerbating wear and abrasion. Additionally, the unevenness of the material surface under wear further promotes the formation of local vortices, intensifying cavitation erosion. Under the combined effects of wear and cavitation, turbine blades develop various forms of damage, such as pitting, honeycomb-like patterns, and pinholes. This leads to decreased turbine efficiency, vibration and noise, and can even force frequent shutdowns for maintenance, resulting in significant economic losses. Therefore, cavitation wear is a critical technical problem that urgently needs to be solved in my country's hydropower stations.

[0003] Improving the wear and corrosion resistance of hydraulic flow components can be approached from two aspects: First, starting with the materials of the flow components themselves, new metal materials with both wear resistance and corrosion resistance can be developed. However, this method is limited by the high cost of material research and development and manufacturing, and is only suitable for key components of large-scale water turbines. Second, starting with the surface modification of the flow components, advanced surface protective coating materials can be developed, and advanced surface coating technology can be used to deposit modified coatings with excellent wear and corrosion resistance on the surface of the components, thereby achieving effective local protection for key components and improving the overall operational stability and durability of the water turbine. This method not only greatly reduces material costs, but also improves the efficiency of component maintenance through coating technology that modifies only the surface of the components.

[0004] High-entropy alloys possess excellent comprehensive properties, including high strength, hardness, corrosion resistance, high-temperature stability, and radiation resistance, due to the thermodynamic high-entropy effect, kinetic hysteresis diffusion effect, structural lattice distortion effect, and the "cocktail" effect in their performance. Refractory high-entropy alloys composed of high-melting-point elements such as Mo, Nb, Ta, and Ti exhibit high high-temperature strength, hardness, and wear resistance. Currently, the main methods for preparing TaNbHfZr high-entropy alloys are arc melting and powder metallurgy, but the extremely high melting point of these alloys makes their processing cost very high. Magnetron sputtering deposition, as a vacuum physical deposition process, produces coatings with uniform composition and thickness, good film-substrate adhesion, smooth surfaces, and easily controllable coating composition and microstructure, and can achieve large-area deposition of coatings. For example, patent number CN108796444B discloses a method for preparing a high-hardness quaternary refractory high-entropy alloy (TaNbHfZr) thin film, including the following: cleaning and drying the substrate Si wafer and placing it in the sample injection chamber for backsputtering to further clean surface impurities; transferring the substrate to the sputtering chamber, mounting the target, evacuating to a high vacuum, heating the substrate Si wafer and continuing to evacuate to a vacuum; introducing argon gas and connecting the target to a DC power supply, setting the sputtering power and bias voltage, adjusting the working gas pressure, and pre-sputtering to clean impurities on the target surface; opening the sample tray baffle and rotating it to start sputtering; after sputtering ends, allowing the sample to cool to room temperature in the vacuum of the sputtering chamber before taking it out; testing the nano-indentation hardness of the thin film; however, it will be found that the TaNbHfZr thin film of the above invention still has problems of insufficient toughness and poor wear resistance when used.

[0005] Therefore, there is an urgent need to prepare a wear-resistant, high-entropy alloy coating to solve the problems existing in the above-mentioned technologies. Summary of the Invention

[0006] (a) Technical problems to be solved

[0007] To address the shortcomings of existing technologies, this invention provides a wear-resistant high-entropy alloy coating, its preparation method, and its application. By controlling the key process of magnetron sputtering, an intermediate tough equiaxed crystal layer is introduced into the refractory high-entropy alloy film, constructing a sandwich-structured high-strength, high-toughness, wear-resistant high-entropy alloy coating of columnar crystals / equiaxed crystals / columnar crystals. This improves the brittleness of the refractory high-entropy alloy film and enhances its comprehensive mechanical properties. The resulting wear-resistant sandwich-structured high-entropy alloy coating, applicable to the surface of turbine blades, possesses advantages such as high toughness and hardness, solving the problems of insufficient toughness and poor wear resistance in existing wear-resistant coatings for turbine blade surfaces.

[0008] (II) Technical Solution

[0009] To achieve the objective of preparing the aforementioned high-toughness and high-hardness wear-resistant high-entropy alloy coating for hydraulic turbines, the present invention provides the following technical solution:

[0010] A method for preparing a wear-resistant high-entropy alloy coating, which is based on magnetron sputtering technology to prepare a sandwich-structured TaNbHfZr wear-resistant high-entropy alloy coating on a substrate, including the following steps:

[0011] Step 1. Install the high-entropy alloy target on the target position inside the deposition chamber;

[0012] Step 2. Treat the base material to remove surface oil and contaminants;

[0013] Step 3. Install the sample tray of blade matrix material in the deposition chamber, close the chamber, and use a mechanical pump to evacuate to below 10 Pa;

[0014] Step 4. Close the gate valve between the sample injection chamber and the deposition chamber, and simultaneously use a mechanical pump and a molecular pump to evacuate the deposition chamber to the target vacuum level;

[0015] Step 5. Turn on the substrate heating power and wait for the sample tray to heat up to the target temperature;

[0016] Step 6. Set the Ar flow rate and simultaneously turn on the Ar gas cylinder knob to start supplying Ar gas;

[0017] Step 7. Set the sample rotation speed, set the sputtering power and substrate bias, open the sample baffle, and start sputtering; after sputtering for a period of time, turn off the heating power to stop heating, keep the substrate unheated for a period of time, and then turn on the heating power again to continue heating until the sputtering is finished;

[0018] Step 8. After deposition, turn off the target and sample disk rotation, turn off the substrate heating and Ar gas, and remove the sample after it has cooled to room temperature in the deposition chamber.

[0019] Preferably, the high-entropy alloy target material in Step 1 has the composition of Ta. 25 Nb 25 Hf 25 Zr 25 The molar atomic ratio of each element is Ta:Nb:Hf:Zr = 1:1:1:1.

[0020] Preferably, the process of treating the substrate material in step 2 is as follows: the substrate material is ultrasonically cleaned in acetone, alcohol and deionized water for 10 to 15 minutes at an ultrasonic frequency of 50 to 80 Hz to remove oil stains and contaminants from its surface, and then dried in an inert protective gas.

[0021] The base material is stainless steel.

[0022] Preferably, the target vacuum level described in Step 4 is 5 × 10⁻⁶. -5 ~5×10 -4Pa;

[0023] The target temperature mentioned in Step 5 is 650-750℃;

[0024] The target-base distance in Step 6 is 15-18 cm; the Ar flow rate is 25-35 sccm.

[0025] Preferably, the sample disk rotation speed in step 7 is 14-16 rpm;

[0026] The sputtering power is 190–210 W;

[0027] The substrate bias voltage is -80 to -100V;

[0028] The initial sputtering time is 20–30 min, the heating power is turned off for 10–15 min, the total sputtering time is 60–70 min, and the coating thickness is 900 nm–1200 nm.

[0029] A wear-resistant high-entropy alloy coating, wherein the wear-resistant high-entropy alloy coating is a TaNbHfZr wear-resistant high-entropy alloy coating, and in the TaNbHfZr wear-resistant high-entropy alloy coating, the molar atomic ratio of Ta:Nb:Hf:Zr is 1:1:1:1;

[0030] The TaNbHfZr wear-resistant high-entropy alloy coating is prepared based on the preparation method of wear-resistant high-entropy alloy coating.

[0031] Preferably, the TaNbHfZr wear-resistant high-entropy alloy coating is a sandwich-structured BCC single-phase solid solution, which includes a lower columnar crystal layer, an intermediate equiaxed crystal layer and an upper columnar crystal layer from the substrate outwards.

[0032] The grain size of the lower columnar crystal layer is smaller than that of the upper columnar crystal layer.

[0033] Preferably, the thickness of the lower columnar crystal layer is 200-300 nm, the thickness of the middle equiaxed crystal layer is 200-300 nm, and the thickness of the upper columnar crystal layer is 500-600 nm.

[0034] Preferably, the TaNbHfZr wear-resistant high-entropy alloy coating has a yield strength of 6.8-7.0 GPa and a maximum nano-indentation hardness value of 13.3 GPa.

[0035] Application of a wear-resistant high-entropy alloy coating, wherein the wear-resistant high-entropy alloy coating is used to provide wear-resistant protection for the surface of a water turbine blade.

[0036] (III) Beneficial Effects

[0037] Compared with the prior art, the present invention provides a wear-resistant high-entropy alloy coating, its preparation method and application, which has the following beneficial effects:

[0038] 1. This method utilizes magnetron sputtering deposition technology to prepare a sandwich-structured TaNbHfZr high-entropy alloy coating, which boasts advantages such as high process and microstructure controllability and a dense and uniform multilayer structure. Furthermore, by controlling key processes in magnetron sputtering, this method introduces an intermediate tough equiaxed crystal layer into the refractory high-entropy alloy film, constructing a high-strength, high-toughness, and corrosion-resistant high-entropy alloy coating with columnar crystals / equiaxed crystals / columnar crystals. This improves the brittleness of the refractory high-entropy alloy film, enhances its comprehensive mechanical properties, and achieves corrosion protection for the surface of turbine blades in hydraulic machinery.

[0039] 2. The sandwich-structured TaNbHfZr high-entropy alloy coating prepared by this method using magnetron sputtering deposition technology is prepared at a relatively high substrate heating temperature of 650-750℃. This can reduce the Gibbs free energy of solid solution formation, promote the formation of high-entropy alloy solid solution phase, and introduce a tough equiaxed crystal layer into the coating by controlling the heating time, so that the coating maintains high strength and hardness while having good plasticity, toughness and impact resistance.

[0040] 3. The coating prepared by this invention has good adhesion to the stainless steel substrate. The film has a BCC single-phase solid solution structure and exhibits excellent impact and wear resistance under the operating conditions of a water turbine. It has good market application potential and can bring significant social benefits. Attached Figure Description

[0041] Figure 1 The image shows the TEM morphology of the sandwich-structured TaNbHfZr high-entropy alloy coating prepared according to the present invention.

[0042] Figure 2 The XRD pattern of the sandwich-structured TaNbHfZr high-entropy alloy coating prepared in this invention.

[0043] Figure 3 The single-phase BCC structure diagram of the sandwich-structured TaNbHfZr high-entropy alloy coating prepared in this invention.

[0044] Figure 4 The engineering stress-strain curves, nano-indentation hardness, and elastic modulus values ​​of the sandwich-structured TaNbHfZr high-entropy alloy coating prepared for this invention are shown.

[0045] Figure 5 TEM image of the sandwich-structured TaNbHfZr high-entropy alloy coating prepared for this invention after nano-deformation impact under an accelerated load of 5 mN.

[0046] Among them, Figure 3In the figure, (a) is the TEM high-resolution image and selected area electron diffraction pattern (BCC structure); (b) is the EDX elemental distribution map;

[0047] exist Figure 4 In the figure, Figure (a) shows the yield strength strain curve of the sandwich structure TaNbHfZr high-entropy alloy coating, and Figure (b) shows the hardness strain curve of the sandwich structure TaNbHfZr high-entropy alloy coating. Detailed Implementation

[0048] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0049] Example 1: Please refer to Figures 1-5 This embodiment provides a technical solution:

[0050] Example 1: A method for preparing a sandwich-structured TaNbHfZr wear-resistant high-entropy alloy coating using magnetron sputtering technology, comprising the following steps:

[0051] Step 1. Install the TaNbHfZr high-entropy alloy target with a molar atomic ratio of Ta:Nb:Hf:Zr = 1:1:1:1 on the target site in the deposition chamber;

[0052] Step 2. Measure the size as The 304 stainless steel substrate of the turbine blade was ultrasonically cleaned for 10 minutes in acetone, alcohol and deionized water at an ultrasonic frequency of 60 Hz to remove oil stains and contaminants from its surface, and then dried in an inert protective gas.

[0053] Step 3. Install the stainless steel substrate sample tray in the deposition chamber, close the chamber, and use a mechanical pump to evacuate the chamber to within 10 Pa.

[0054] Step 4. Close the gate valve between the sample injection chamber and the deposition chamber, and simultaneously use a mechanical pump and a molecular pump to evacuate the deposition chamber to the target vacuum level of 5 × 10⁻⁶. -5 Pa;

[0055] Step 5. Turn on the substrate heating power and wait for the sample tray to heat up to the target temperature of 700℃;

[0056] Step 6. Adjust the target distance to 15cm; set the Ar flow rate to 25sccm, and simultaneously turn on the Ar gas cylinder knob to start supplying Ar gas;

[0057] Step 7. Set the sample rotation speed to 15 rpm, the sputtering power to 200 W, the substrate bias voltage to -80 V, open the sample baffle, and start sputtering; after sputtering for 20 min, turn off the heating power and keep the substrate unheated for 10 min, then turn on the heating power again and continue heating for 30 min, with a coating thickness of 1000 nm.

[0058] Step 8. After deposition is complete, turn off the target and sample tray rotation, turn off the substrate heating and Ar gas, and remove the sample after it has cooled to room temperature in the deposition chamber.

[0059] The deposited columnar / equiaxed / columnar sandwich structure TaNbHfZr coating is dense and smooth (e.g., Figure 1 The SEM cross-sectional morphology of the coating (as shown) indicates a single-phase BCC structure (e.g., Figure 2 As shown in the XRD pattern of the coating, the coating has a yield strength of 7 GPa, such as... Figure 4 As shown in (a), the hardness value is 13.3 GPa, as... Figure 4 As shown in (b).

[0060] Example 2: A method for preparing a sandwich-structured TaNbHfZr wear-resistant high-entropy alloy coating using magnetron sputtering technology, comprising the following steps:

[0061] Step 1. Install the TaNbHfZr high-entropy alloy target with a molar atomic ratio of Ta:Nb:Hf:Zr = 1:1:1:1 on the target site in the deposition chamber;

[0062] Step 2. The 304 stainless steel substrate of the turbine blade with a size of φ15.8×1mm was ultrasonically cleaned for 15 minutes in acetone, alcohol and deionized water respectively, with an ultrasonic frequency of 70Hz to remove oil stains and contaminants from its surface, and then dried in an inert protective gas.

[0063] Step 3. Install the stainless steel substrate sample tray in the deposition chamber, close the chamber, and use a mechanical pump to evacuate to below 10 Pa.

[0064] Step 4. Close the gate valve between the sample injection chamber and the deposition chamber, and simultaneously use a mechanical pump and a molecular pump to evacuate the deposition chamber to the target vacuum level of 1×10⁻⁶. -4 Pa;

[0065] Step 5. Turn on the substrate heating power and wait for the sample tray to heat up to the target temperature of 650℃;

[0066] Step 6. Adjust the target distance to 16cm; set the Ar flow rate to 30sccm, and simultaneously turn on the Ar gas cylinder knob to start supplying Ar gas;

[0067] Step 7. Set the sample rotation speed to 16 rpm, the sputtering power to 190 W, the substrate bias voltage to -90 V, open the sample baffle, and start sputtering; after sputtering for 22 min, turn off the heating power and keep the substrate unheated for 13 min, then turn on the heating power again and continue heating for 35 min, with a coating thickness of 1100 nm.

[0068] Step 8. After deposition is complete, turn off the target and sample tray rotation, turn off the substrate heating and Ar gas, and remove the sample after it has cooled to room temperature in the deposition chamber.

[0069] The deposited columnar / equiaxed / columnar sandwich structure TaNbHfZr coating exhibits a single-phase BCC structure (e.g.) Figure 3 (as shown in the TEM selected area electron diffraction pattern in a), and the coating elements are uniformly distributed (e.g., Figure 3 (As shown in the EDS elemental distribution diagram of the coating in b), the coating has a yield strength of 6.8 GPa and a hardness of 13 GPa.

[0070] Example 3: A method for preparing a sandwich-structured TaNbHfZr wear-resistant high-entropy alloy coating using magnetron sputtering technology, comprising the following steps:

[0071] Step 1. Install the TaNbHfZr high-entropy alloy target with a molar atomic ratio of Ta:Nb:Hf:Zr = 1:1:1:1 on the target site in the deposition chamber;

[0072] Step 2. Measure the size as The 304 stainless steel substrate of the turbine blade was ultrasonically cleaned for 15 minutes in acetone, alcohol and deionized water at an ultrasonic frequency of 80 Hz to remove oil stains and contaminants from its surface, and then dried in an inert protective gas.

[0073] Step 3. Install the stainless steel substrate sample tray in the deposition chamber, close the chamber, and use a mechanical pump to evacuate to below 10 Pa.

[0074] Step 4. Close the gate valve between the sample injection chamber and the deposition chamber, and simultaneously use a mechanical pump and a molecular pump to evacuate the deposition chamber to the target vacuum level of 5 × 10⁻⁶. -4 Pa;

[0075] Step 5. Turn on the substrate heating power and wait for the sample tray to heat up to the target temperature of 750℃;

[0076] Step 6. Adjust the target distance to 18cm; set the Ar flow rate to 35sccm, and simultaneously turn on the Ar gas cylinder knob to start supplying Ar gas;

[0077] Step 7. Set the sample rotation speed to 18 rpm, the sputtering power to 210 W, the substrate bias voltage to -100 V, open the sample baffle, and start sputtering; after sputtering for 22 min, turn off the heating power and keep the substrate unheated for 12 min, then turn on the heating power again and continue heating for 30 min, with a coating thickness of 1050 nm.

[0078] Step 8. After deposition, turn off the target and sample disk rotation, turn off the substrate heating and Ar gas, and remove the sample after it has cooled to room temperature in the deposition chamber. The deposited columnar / equiaxed / columnar sandwich structure TaNbHfZr coating has high strength and hardness, and after a 5 mN nanometer impact, it shows that the presence of the intermediate equiaxed layer prevents the coating from propagating cracks in the thickness direction (e.g., Figure 5 As shown in the figure, this improves the coating's ductility, toughness, and impact resistance.

[0079] By comparing the preparation methods of Examples 1-3 above with the structures of the obtained TaNbHfZr wear-resistant high-entropy alloy coatings, it can be seen that the sandwich-structured TaNbHfZr high-entropy alloy coatings prepared by the method described in this embodiment are:

[0080] (1) The structure is a BCC single-phase solid solution, which includes a lower columnar crystal layer, an intermediate equiaxed crystal layer and an upper columnar crystal layer from the matrix outwards. The grain size of the lower columnar crystal layer is smaller than that of the upper columnar crystal layer. The thickness of the lower columnar crystal layer is 300 nm, the thickness of the intermediate equiaxed crystal layer is 200 nm, and the thickness of the upper columnar crystal layer is 500 nm.

[0081] (2) The TaNbHfZr wear-resistant high-entropy alloy coating has a yield strength of up to 7GPa and a nano-indentation hardness of up to 13.3GPa. After nano-impact, the presence of the intermediate equiaxed crystal layer prevents the expansion of cracks through the thickness direction, so that the coating has high strength, high hardness and good plasticity and toughness.

[0082] (3) In the TaNbHfZr wear-resistant high-entropy alloy coating, the molar atomic ratio of Ta:Nb:Hf:Zr is 1:1:1:1.

[0083] Of the three examples above, the sandwich-structured TaNbHfZr high-entropy alloy coating prepared in Example 1 has relatively better comprehensive mechanical properties, as shown in Table 1.

[0084] Table 1: Properties of the TaNbHfZr wear-resistant high-entropy alloy coatings prepared in Examples 1-3

[0085]

[0086]

[0087] Example 2: Unlike the method described in Example 1, this example provides a comparative scheme:

[0088] Comparative Example 1: Using a method for preparing a high-entropy alloy wear-resistant and corrosion-resistant coating as disclosed in patent number CN114951634B, a CoCrNiCuAl corrosion-resistant and wear-resistant high-entropy alloy coating was obtained by laser melting deposition. The coating has a body-centered cubic structure, with a low coefficient of friction, a high corrosion potential and a low corrosion current density, and poor hardness, strength and plasticity.

[0089] Comparative Example 2: Using a method for preparing an impact-resistant, wear-resistant, and corrosion-resistant high-entropy alloy-ceramic composite coating disclosed in patent number CN115537807B, a three-layer composite coating of FeCoNiCr-Cr3C2 / Al2O3 / WC high-entropy alloy-ceramic obtained by laser cladding exhibits low wear loss weight, low corrosion current density, and high impact energy after annealing heat treatment. However, the coating requires heat treatment to achieve the above properties, the process is relatively complex, and the bonding strength between the coating and the substrate cannot be guaranteed after annealing heat treatment.

[0090] Comparative Example 3: Using a cavitation-resistant composite ceramic coating for water turbines and its preparation method disclosed in patent number CN116162884A, the cavitation-resistant composite ceramic coating, including a bonding mixed coating and an outer ceramic coating, obtained by supersonic flame spraying, remained intact after 200 hours of cavitation erosion. However, specific cavitation resistance performance indicators, such as corrosion resistance, wear resistance, strength, and hardness, were not provided.

[0091] Comparative Example 4: Using a method for preparing a high-strength, high-wear-resistant composite brazing coating for repairing turbine blades, as disclosed in patent number CN113667973A, a low-melting-point composite brazing material composed of any two or three of iron-based brazing materials, copper-based brazing materials, and nickel-based brazing materials is mixed with a high-melting-point hardening material in a 1:1 ratio to form a mixed powder. After brazing, vacuum stress relief treatment, grinding, and cleaning on the surface of the turbine blade, a high-strength, high-wear-resistant composite brazing coating is formed. It has a high bonding strength with the substrate and a microhardness of 2351 HV, but no coating toughness index.

[0092] The comparison is shown in Table 2.

[0093] Table 2: Comparison of Coating Performance

[0094]

[0095]

[0096] As can be seen from the comparative examples shown in Table 2, the sandwich-structured TaNbHfZr wear-resistant high-entropy alloy coating prepared on the substrate based on magnetron sputtering technology in Example 1 of this invention has significantly high strength and plasticity. Moreover, the equiaxed crystal layer after nano-impact can prevent the coating from continuing to propagate cracks in the thickness direction, thus providing wear-resistant protection for turbine blades. This effectively solves the problem of insufficient toughness and poor wear resistance of the wear-resistant coating on the surface of turbine blades.

[0097] While the present invention has been presented with examples above, these embodiments are not limiting. Anyone skilled in the art can make many possible variations and modifications to the above embodiments without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention, without departing from the scope of the present invention, shall still fall within the protection scope of the present invention.

Claims

1. A method for preparing a wear-resistant, corrosion-resistant high-entropy alloy coating, characterized in that: This method is based on magnetron sputtering technology to prepare a sandwich-structured TaNbHfZr wear-resistant high-entropy alloy coating on a substrate, including the following steps: Step 1. Install the high-entropy alloy target on the target position inside the deposition chamber; Step 2. Treat the base material to remove surface oil and contaminants; Step 3. Install the sample tray of blade matrix material in the deposition chamber, close the chamber, and use a mechanical pump to evacuate to within 10 Pa; Step 4. Close the gate valve between the sample injection chamber and the deposition chamber, and simultaneously use a mechanical pump and a molecular pump to evacuate the deposition chamber to the target vacuum level; Step 5. Turn on the substrate heating power and wait for the sample tray to heat up to the target temperature; The target temperature mentioned in Step 5 is 650~750°C; Step 6. Set the Ar flow rate and simultaneously turn on the Ar gas cylinder knob to start supplying Ar gas; Step 7. Set the sample rotation speed, set the sputtering power and substrate bias, open the sample baffle, and start sputtering; after sputtering for a period of time, turn off the heating power to stop heating, keep the substrate unheated for a period of time, and then turn on the heating power again to continue heating until the sputtering is finished; Step 7 described The sample disk rotates at a speed of 14~16 rpm; The sputtering power is 190~210 W; The base bias voltage is -80 to -100 V; The initial sputtering time is 20-30 min, the heating power is turned off for 10-15 min, the total sputtering time is 60-70 min, and the coating thickness is 900 nm-1200 nm. Step 8. After deposition, turn off the target and sample disk rotation, turn off the substrate heating and Ar gas, and remove the sample after it has cooled to room temperature in the deposition chamber.

2. The method for preparing a wear-resistant high-entropy alloy coating as described in claim 1, characterized in that: The high-entropy alloy target material described in Step 1 has the following composition: Ta 25 Nb 25 Hf 25 Zr 25 The molar atomic ratio of each element is Ta:Nb:Hf:Zr = 1:1:1:

1.

3. The method for preparing a wear-resistant, corrosion-resistant high-entropy alloy coating as described in claim 1, characterized in that: The process of treating the substrate material described in Step 2 is as follows: the substrate material is ultrasonically cleaned in acetone, alcohol and deionized water for 10 to 15 minutes at an ultrasonic frequency of 50 to 80 Hz to remove oil stains and contaminants from its surface, and then dried in an inert protective gas. The base material is stainless steel.

4. The method for preparing a wear-resistant, corrosion-resistant high-entropy alloy coating as described in claim 1, characterized in that: The target vacuum level mentioned in Step 4 is 5 × 10⁻⁶. -5 ~5×10 -4 Pa; The target-base distance in Step 6 is 15-18 cm; the Ar flow rate is 25-35 sccm.

5. A wear-resistant, corrosion-resistant high-entropy alloy coating, characterized in that: The wear-resistant high-entropy alloy coating is a TaNbHfZr wear-resistant high-entropy alloy coating, and in the TaNbHfZr wear-resistant high-entropy alloy coating, the molar atomic ratio of Ta:Nb:Hf:Zr is 1:1:1:1; The TaNbHfZr wear-resistant high-entropy alloy coating is prepared based on the method described in any one of claims 1-4.

6. The wear-resistant high-entropy alloy coating as described in claim 5, characterized in that: The TaNbHfZr wear-resistant high-entropy alloy coating is a sandwich-structured BCC single-phase solid solution, which includes a lower columnar crystal layer, an intermediate equiaxed crystal layer and an upper columnar crystal layer from the substrate outwards. The grain size of the lower columnar crystal layer is smaller than that of the upper columnar crystal layer.

7. The wear-resistant high-entropy alloy coating as described in claim 6, characterized in that: The thickness of the lower columnar crystal layer is 200~300 nm, the thickness of the middle equiaxed crystal layer is 200~300 nm, and the thickness of the upper columnar crystal layer is 500~600 nm.

8. The wear-resistant high-entropy alloy coating as described in claim 5, characterized in that: The TaNbHfZr wear-resistant high-entropy alloy coating has a yield strength of 6.8-7.0 GPa and a maximum nano-indentation hardness of 13.3 GPa.

9. An application of a wear-resistant, corrosion-resistant high-entropy alloy coating, characterized in that: The wear-resistant and corrosion-resistant high-entropy alloy coating is used to provide wear-resistant protection for the surface of turbine blades; The wear-resistant high-entropy alloy coating is as described in any one of claims 5-8.

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