An aperture processing device and a processing method

Abstract

The present invention discloses a diaphragm processing device and a processing method. The device includes a microfluidic control module, an electric slide table control module, a stage module, and a computer control system module. The microfluidic control module is used to control the liquid storage flow rate and process the diaphragm on the stage module. The electric slide table control module is used to perform multi-axis control on the electric slide table to meet the processing requirements. The stage module is used to place the diaphragm to be processed. The computer control system module is respectively connected to the microfluidic control module and the electric slide table control module, and is used to set the processing parameters, microfluidic control parameters, and electric slide table movement parameters. The device and method of the present invention solve the problems of high cost, high difficulty, and environmental pollution in the traditional processing technology by first titrating fixed-size water droplets at fixed points on a glass wafer or a lens, then spraying a hydrophobic light-absorbing material, and then sucking the water droplets at fixed points again, and realize the rapid and batch processing of diaphragms with corresponding apertures.

Description

Technical Field

[0001] The present invention relates to the technical field of optical component processing, and in particular, to a diaphragm processing device and a processing method. Background Art

[0002] A diaphragm refers to an entity that restricts the light beam in an optical system, mainly used for adjusting the intensity of the passing light beam.

[0003] The main methods for diaphragm processing are: 1. Mechanical drilling processing method, 2. Electrical discharge machining, 3. Laser cutting processing (Chinese Patent Publication No. CN101131470A, ultraviolet laser microprocessing system and method for diaphragm of scanning electron microscope), and 4. Method combining wet etching, reactive ion etching, and surface evaporation plating (Chinese Patent Publication No. CN104599927A, a preparation method for a porous diaphragm), etc.

[0004] Among them, the mechanical processing method requires expensive diamond drills; electrical discharge machining requires corresponding electrodes to be made for different controls, and the difficulty of processing electrodes exceeds that of making diaphragms; laser cutting processing relies on ultraviolet high-energy laser devices, and the equipment is expensive; the etching method has a complex manufacturing process flow, low efficiency, and generates a large amount of chemical waste liquid, causing environmental pollution. In particular, traditional diaphragms must rely on entities for design and processing.

[0005] The existing diaphragm processing has the following disadvantages:

[0006] (a) The mechanical processing method requires expensive diamond drills;

[0007] (b) Electrical discharge machining requires corresponding electrodes to be made for different controls, and the difficulty of processing electrodes exceeds that of making diaphragms;

[0008] (c) Laser cutting processing relies on ultraviolet high-energy laser devices, and the equipment is expensive;

[0009] (d) The etching method has a complex manufacturing process flow, low efficiency, and generates a large amount of chemical waste liquid, causing environmental pollution;

[0010] (e) Now the optical path lens components are becoming more and more complex. In order to prevent crosstalk or stray light during the optical path, a non-independent entity diaphragm is required, so there is a need to realize diaphragm processing based on the surface of a lens or the like as a substrate, breaking through the dependence on the physical diaphragm. Summary of the Invention

[0011] Object of the Invention: Aiming at the existing problems, by using the spraying process of light-absorbing materials and the hydrophobic mechanism of the selected materials, a diaphragm processing device and method are proposed. First, water droplets of a fixed size are titrated at fixed points and in fixed quantities on a substrate (such as a glass wafer, a lens, a diffuser, etc.), then a hydrophobic light-absorbing material is sprayed, and finally the water droplets are sucked at fixed points again, so as to realize the rapid and batch processing of diaphragms with corresponding apertures.

[0012] Technical Solution: A diaphragm processing device according to the present invention includes a microfluidic control module, an electric slide table control module, a stage module, and a computer control system module;

[0013] The microfluidic control module is used to control the liquid storage flow rate and process the diaphragm on the stage module;

[0014] The electric slide table control module is used to perform multi-axis control on the electric slide table to meet the processing requirements;

[0015] The stage module is used to place the diaphragm to be processed;

[0016] The computer control system module is respectively connected to the microfluidic control module and the electric slide table control module, and is used to set processing parameters, microfluidic control parameters, and electric slide table movement parameters.

[0017] In some embodiments, the microfluidic control module includes a liquid storage module, a microfluidic controller, a droplet pumping and nozzle module, which are connected to each other through conduits.

[0018] In some embodiments, the liquid storage module includes a water droplet reservoir, a waste liquid reservoir, and a hydrophobic light-absorbing material reservoir.

[0019] In some embodiments, the droplet pumping and nozzle module includes a droplet head, a liquid pumping head, an air atomizing nozzle, and a rotary switching turntable base. The droplet head, the liquid pumping head, and the air atomizing nozzle are installed on the rotary switching turntable base through conduits; the droplet head is responsible for titrating water droplets, the liquid pumping head is responsible for sucking the water droplets titrated on the substrate, and the air atomizing nozzle is responsible for air atomizing and spraying the hydrophobic light-absorbing material.

[0020] In some embodiments, the droplet pumping and nozzle module is installed above the stage module.

[0021] In some embodiments, the stage module includes a substrate and a vacuum adsorption base for fixing the substrate.

[0022] In some embodiments, the electric slide table control module includes a multi-axis electric slide table and a slide table controller for controlling the movement of the multi-axis electric slide table.

[0023] In some embodiments, the computer control system module includes a computer and control software installed on the computer; the size of the diaphragm hole is set corresponding to the size of the droplet through the computer control system module; the settings for titrating water droplets, spraying hydrophobic light-absorbing materials, and extracting the titrated water droplets are switched; and the fixed-point movement setting of the electric slide table required for batch processing of wafer glass or lenses is performed.

[0024] On the other hand, the present invention also discloses a processing method for a diaphragm processing device, including the following steps:

[0025] (1) Power on: Turn on the power supplies corresponding to the microfluidic control module, the electric slide table control module, and the computer control system module;

[0026] (2) Place the substrate: Place the substrate at the center of the vacuum adsorption base of the stage module;

[0027] (3) Open the control system software: Open the software of the computer control system module;

[0028] (4) Set the processing parameters: (a) Set the aperture for diaphragm processing; (b) Calculate the processing quantity and the corresponding moving distance according to the substrate size, and set the moving distance parameter of the electric slide table;

[0029] (5) Run the processing: The pumping and nozzle module works: (a) Titration: The turntable base rotates and switches to the liquid dropping head to perform array titration of water droplets on the substrate; (b) Spraying: The turntable base rotates and switches to the air atomizing nozzle to spray hydrophobic light-absorbing materials; (c) Liquid extraction: The turntable base rotates and switches to the liquid extraction head to extract the titrated water droplets;

[0030] (6) After the processing is completed, take a sample: Remove the processed diaphragm sample;

[0031] (7) Power off: Close the software and turn off the power supply.

[0032] In some embodiments, specifically calling the built-in calibration database of the diaphragm hole size in step (4) to set the aperture for diaphragm processing, and the generation steps of the database are as follows:

[0033] (1) For the selected water droplets, measure the data of their coverage area on the substrate surface according to the gradient of 0.1 μL in the titration volume range of 0.1 μL - 10 μL;

[0034] (2) Calculate the corresponding aperture data;

[0035] (3) Plot the curve and database of the relationship between the diaphragm aperture and the droplet volume for the data;

[0036] (4) When in use, according to the diaphragm aperture requirement, call the database relationship to realize the call of the microfluidic droplet titration volume.

[0037] Advantageous effects: The advantageous effects of the present invention are as follows:

[0038] (1) In the present invention, fixed-size water droplets are first titrated at fixed points on a glass wafer or a lens in a fixed quantity, and then a hydrophobic light-absorbing material is sprayed. Subsequently, the water droplets are aspirated at fixed points again, solving the problems of high cost, high difficulty, and environmental pollution in traditional processing technologies, and realizing rapid and batch processing of diaphragms with corresponding apertures;

[0039] (2) Through the diaphragm aperture size calibration database of the present invention, the mapping relationship between the diaphragm aperture and the droplet volume is solved, enabling the calling of the microfluidic droplet titration quantity, and thus realizing the precise processing of the diaphragm aperture;

[0040] (3) Through the parameter setting of the electric control console of the present invention, the precise control of the titration position and the function switching problem are solved, realizing automated batch processing on a substrate (such as a glass wafer, a lens, a diffusion sheet, etc.);

[0041] (4) Through the processing of a virtual diaphragm on the lens surface of the present invention, the crosstalk and stray light effects in the optical paths of multiple lenses or compound eye lenses are solved, enabling the optical path design to get rid of the design limitations of the physical diaphragm, and further improving the optical path optimization space. Brief description of the drawings

[0042] Figure 1 It is a schematic structural diagram of a processing device according to an embodiment of the present invention;

[0043] Figure 2 It is a schematic flowchart of a processing method according to an embodiment of the present invention;

[0044] Figure 3 It is a curve graph showing the variation relationship between the diaphragm aperture and the droplet volume according to an embodiment of the present invention;

[0045] Figure 4 It is a schematic diagram of the processing operation according to an embodiment of the present invention;

[0046] Figure 5 It is an effect diagram of the diaphragm processing according to an embodiment of the present invention. Detailed implementation manners

[0047] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0048] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "inner", "outer", etc. is the orientation or positional relationship shown, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0049] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", "connected to" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] The present invention will be further described in detail below through specific embodiments in conjunction with the accompanying drawings. Embodiment

[0051] A diaphragm processing device includes a microfluidic control module, an electric slide table control module, a stage module, and a computer control system module;

[0052] The microfluidic control module is used to control the liquid storage flow rate and process the diaphragm on the stage module;

[0053] The electric slide table control module is used to perform multi-axis control on the electric slide table to meet the processing requirements;

[0054] The stage module is used to place the diaphragm to be processed;

[0055] The computer control system module is respectively connected to the microfluidic control module and the electric slide table control module, and is used to set processing parameters, microfluidic control parameters, and electric slide table movement parameters. Embodiment

[0056] As Figure 1 shown, a diaphragm processing device includes a microfluidic control module, an electric slide table control module, a stage module, and a computer control system module;

[0057] The microfluidic control module is used to control the liquid storage flow rate and process the diaphragm on the stage module;

[0058] The electric slide table control module is used to perform multi-axis control on the electric slide table to meet the processing requirements;

[0059] The stage module is used to place the diaphragm to be processed;

[0060] The described computer control system module is respectively connected to the microfluidic control module and the electric slide table control module, and is used to set processing parameters, microfluidic control parameters, and electric slide table movement parameters.

[0061] In this embodiment, as Figure 1 shown, the microfluidic control module includes a liquid reservoir module 4, a microfluidic controller 3, and a droplet extraction and nozzle module 6. Among them, the microfluidic controller 3 is respectively connected to the liquid reservoir module 4 and the droplet extraction and nozzle module 6 through a conduit 5, and the liquid reservoir module 4 and the droplet extraction and nozzle module 6 are communicated through the conduit 5 to provide a liquid storage and transportation channel. The microfluidic controller 3 monitors the liquid stored in the liquid reservoir module 4, and performs switch operations on the titration and extraction of the droplet extraction and nozzle module 6. At the same time, it also includes the setting of suction values and pressure values, etc.

[0062] In this embodiment, as Figure 1 shown, the liquid reservoir module 4 specifically includes a water droplet reservoir, a waste liquid reservoir, and a hydrophobic light-absorbing material reservoir. Among them, the water droplet reservoir, the waste liquid reservoir, and the hydrophobic light-absorbing material reservoir are respectively connected to the droplet head, the liquid extraction head, and the nozzle in the droplet extraction and nozzle module 6 through conduits.

[0063] In this embodiment, as Figure 1 shown, the droplet extraction and nozzle module 7 includes a droplet head, a liquid extraction head, an air atomizing nozzle, and a rotary switching turntable seat. The droplet head, the liquid extraction head, and the air atomizing nozzle are installed on the rotary switching turntable seat through conduits; the droplet head is responsible for titrating water droplets, the liquid extraction head is responsible for extracting the water droplets titrated on the substrate, and the air atomizing nozzle is responsible for air atomizing and spraying the hydrophobic light-absorbing material.

[0064] In this embodiment, as Figure 1 shown, the droplet extraction and nozzle module 6 is installed above the stage module 7.

[0065] In this embodiment, as Figure 1 shown, the stage module 7 includes a substrate (such as a glass wafer, a lens, a diffuser, etc.) and a vacuum adsorption base for fixing the substrate, and adsorbs and fixes the wafer glass, the lens, or the diffuser, etc. through the vacuum adsorption base.

[0066] In this embodiment, as Figure 1 shown, the electric slide table control module includes a multi-axis electric slide table 9 and a slide table controller 2 for controlling the movement of the multi-axis electric slide table 9. Among them, the multi-axis electric slide table 9 includes adjustment functions such as X / Y / Z axis / tilt / rotation, etc., and the corresponding position is adjusted through the slide table controller 2. The slide table controller 2 can also adjust the movement speed, etc.

[0067] In this embodiment, as Figure 1 shown, the computer control system module includes a computer 8 and control software installed on the computer 8; the size of the diaphragm hole is set corresponding to the size of the droplet through the computer control system module; the settings for titrating water droplets, spraying hydrophobic light-absorbing materials, and extracting the titrated water droplets are switched; and the fixed-point movement setting of the electric slide table required for batch processing of wafer glass or lenses is performed.

[0068] In addition, to ensure the stability of the overall processing of the diaphragm, as Figure 1 shown, the slide table controller 2, the microfluidic controller 3, the liquid reservoir module 4, the droplet extraction and nozzle module 6, and the multi-axis electric slide table 9 are all placed on a stable base 1, so as to ensure the precision and stability of the overall processing. Embodiment

[0069] As Figure 2 shown, the processing method of a diaphragm processing device in the above Embodiment 1 or Embodiment 2 specifically includes the following steps:

[0070] (1) Power on: Turn on the power supplies corresponding to the microfluidic control module, the electric slide table control module, and the computer control system module;

[0071] (2) Place the substrate: Place the substrate at the center of the vacuum adsorption base of the stage module;

[0072] (3) Open the control system software: Open the software of the computer control system module;

[0073] (4) Set the processing parameters: (a) Set the aperture of the diaphragm processing; (b) Calculate the processing quantity and the corresponding moving distance according to the substrate size, and set the moving distance parameter of the electric slide table;

[0074] (5) Run the processing: The droplet extraction and nozzle module works: (a) Titration: The turntable base rotates and switches to the droplet head to perform array titration of water droplets on the substrate; (b) Spraying: The turntable base rotates and switches to the air atomization nozzle to spray hydrophobic light-absorbing materials; (c) Liquid extraction: The turntable base rotates and switches to the liquid extraction head to extract the titrated water droplets;

[0075] (6) After the processing is completed, take a sample: Take down the processed diaphragm sample, as Figure 5 shown;

[0076] (7) Power off: Close the software and turn off the power.

[0077] In this embodiment, specifically calling the built-in diaphragm hole size calibration database for setting the aperture of the diaphragm processing in step (4), the generation steps of the database are as follows:

[0078] (1)For the selected water droplets, measure the data of their coverage area on the substrate surface at a gradient of 0.1 μL within the titration range of 0.1 μL - 10 μL;

[0079] (2)Calculate the corresponding aperture data;

[0080] (3)Plot the curve and database of the variation of the aperture with the droplet volume for the data, as Figure 3 shown;

[0081] (4)During use, according to the aperture requirement, call the database relationship to realize the call of the microfluidic droplet titration amount.

[0082] As described above, it is only a preferred embodiment of the present invention and does not impose any formal restrictions on the present invention. Although the present invention has been disclosed above with the preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art, without departing from the technical solution of the present invention, may make some changes or modifications to equivalent embodiments by using the disclosed technical content. However, as long as it does not depart from the technical solution of the present invention, any simple modification, equivalent change, and modification made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. An aperture processing device, characterized in that: It includes a microfluidic control module, an electric slide table control module, a stage module, and a computer control system module; The described microfluidic control module is used to control the liquid storage flow rate and process the aperture on the stage module; The described electric slide table control module is used to perform multi-axis control on the electric slide table to meet the processing requirements; the described stage module is used to place the aperture to be processed; The described computer control system module is respectively connected to the microfluidic control module and the electric slide table control module, and is used to set processing parameters, microfluidic control parameters, and electric slide table movement parameters; The microfluidic control module includes a liquid reservoir module, a microfluidic controller, a droplet extraction and nozzle module, which are connected to each other through conduits; The droplet extraction and nozzle module includes a droplet head, a liquid extraction head, an air atomizing nozzle, and a rotary switching turntable seat. The droplet head, the liquid extraction head, and the air atomizing nozzle are installed on the rotary switching turntable seat through conduits; the droplet head is responsible for titrating water droplets, the liquid extraction head is responsible for extracting the water droplets titrated on the substrate, and the air atomizing nozzle is responsible for air atomizing and spraying the hydrophobic light-absorbing material.

2. The diaphragm processing device according to claim 1, characterized in that: The liquid reservoir module includes a water droplet reservoir, a waste liquid reservoir, and a hydrophobic light-absorbing material reservoir.

3. The diaphragm processing device according to claim 1, characterized in that: The droplet extraction and nozzle module is installed above the stage module.

4. A diaphragm processing device according to claim 1, characterized in that: The stage module includes a substrate and a vacuum adsorption base for fixing the substrate.

5. The diaphragm processing device according to claim 1, characterized in that: The electric slide table control module includes a multi-axis electric slide table and a slide table controller for controlling the movement of the multi-axis electric slide table.

6. The diaphragm processing device according to claim 1, wherein: The computer control system module includes a computer and control software installed on the computer; the computer control system module is used to set the droplet size corresponding to the aperture size of the aperture; set the switching of titrating water droplets, spraying the hydrophobic light-absorbing material, and extracting the titrated water droplets; and set the fixed-point movement of the electric slide table required for batch processing of wafer glass or lenses.

7. The processing method of the diaphragm processing device according to any one of claims 1-6, characterized in that: It includes the following steps: (1) Power on: Turn on the power supplies corresponding to the microfluidic control module, the electric slide table control module, and the computer control system module; (2) Place the substrate: Place the substrate at the center of the vacuum adsorption base of the stage module; (3) Open the control system software: Open the software of the computer control system module; (4) Set processing parameters: (a) Set the aperture diameter for aperture processing; (b) Calculate the processing quantity and the corresponding moving distance according to the substrate size, and set the electric slide table moving distance parameter; (5) Run the processing: The droplet extraction and nozzle module works: (a) Titration: The turntable seat rotates and switches to the droplet head to perform array titration of water droplets on the substrate; (b) Spraying: The turntable seat rotates and switches to the air atomizing nozzle to spray the hydrophobic light-absorbing material; (c) Liquid extraction: The turntable seat rotates and switches to the liquid extraction head to extract the titrated water droplets; (6) After processing is completed, take a sample: Remove the processed aperture sample; (7) Power off: Close the software and turn off the power.

8. The processing method of the diaphragm processing device according to claim 7, characterized in that: In step (4), setting the aperture diameter for aperture processing specifically calls the built-in aperture size calibration database, and the generation steps of the database are as follows: (1) For the selected water droplets, measure the data of their coverage area on the substrate surface in the titration range of 0.1 uL - 10 uL at a gradient of 0.1 uL; (2) Calculate the corresponding aperture data; (3) Plot the curve of the diaphragm aperture varying with the droplet volume and establish a database for the data; (4) During use, according to the diaphragm aperture requirement, call the database relationship to achieve the call of the microfluidic droplet quantification.

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