A leveling mechanism and a vacuum device

Abstract

This invention discloses a leveling mechanism and a vacuum device. The leveling mechanism includes: a bellows surrounding a vacuum robot, comprising an upper flange, a lower flange, and a first corrugated section located between the upper and lower flanges, the distance between the upper and lower flanges being adjustable with the extension and retraction of the first corrugated section; and multiple lifting adjustment rods arranged around the bellows, each rod passing through the upper and lower flanges and adjustable in length by adjusting the extension and retraction distance of the first corrugated section to adjust the distance between the upper and lower flanges. This leveling mechanism can adjust the levelness of the vacuum robot inside the vacuum device, thereby reducing the precision requirements for the machining of the vacuum cavity, saving time and costs.

Description

Technical Field

[0001] This invention relates to the field of semiconductors, and in particular to a leveling mechanism and a vacuum device having the leveling mechanism. Background Technology

[0002] Vacuum equipment is primarily used in the manufacturing process of semiconductor devices, and it features a vacuum robot at its base. Currently, the levelness of the vacuum robot's base depends entirely on the machining levelness of the bottom mounting surface of the vacuum chamber it is placed in. Therefore, this places high demands on the machining precision of the vacuum chamber. Once the vacuum chamber is machined, the levelness of its bottom mounting surface is fixed and cannot be changed, and consequently, the levelness of the vacuum robot's mounting is also fixed and cannot be altered. If the machining error is significant and the levelness of the bottom mounting surface cannot be guaranteed, the vacuum chamber may need to be reworked, or it may even become unusable and scrapped. However, the vacuum chambers used to house the vacuum robot are large in size and are machined from solid material using a material-removing process, resulting in very high material and machining costs. To reduce or directly avoid this situation, a solution for adjusting the levelness of the vacuum robot is urgently needed. Summary of the Invention

[0003] To address the shortcomings of existing technologies, the present invention aims to provide a leveling mechanism and a vacuum device having the leveling mechanism. This leveling mechanism can adjust the levelness of the vacuum robot inside the vacuum device, thereby reducing the machining accuracy requirements of the vacuum cavity, saving time and costs.

[0004] According to one aspect of the present invention, a leveling mechanism is provided, the leveling mechanism comprising: a bellows surrounding a vacuum robot, including an upper flange, a lower flange, and a first corrugated section located between the upper flange and the lower flange, the distance between the upper flange and the lower flange being adjustable with the extension and retraction of the first corrugated section; and a plurality of lifting adjustment rods arranged around the bellows, each of the lifting adjustment rods passing through the upper flange and the lower flange, and being adjustable with respect to the extension and retraction distance of the first corrugated section to adjust the distance between the upper flange and the lower flange;

[0005] The lifting adjustment rod includes: a lead screw body that passes through the upper flange and the lower flange; a first outer edge that surrounds the lead screw body and extends outward from the lead screw body, the first outer edge supporting the upper flange; a second outer edge that surrounds the lead screw body and extends outward from the lead screw body, the second outer edge supporting the lower flange; a second corrugated section disposed between the first outer edge and the second outer edge, the distance between the first outer edge and the second outer edge being variable with the expansion and contraction of the second corrugated section; a threaded sleeve that is sleeved outside the lead screw body and can push the second outer edge to move towards the first outer edge; and a fastener disposed on the threaded sleeve for fixing the threaded sleeve.

[0006] The screw sleeve is threadedly connected to the lead screw body, and rotating the screw sleeve pushes the second outer edge to move towards the first outer edge;

[0007] The fastener is a fastening set screw, and the outer side of the threaded sleeve is provided with a connecting hole that is adapted to the fastening set screw. The fastener passes through the connecting hole to fix the threaded sleeve.

[0008] The lifting adjustment rod also includes a bearing, and the lead screw body passes through the upper flange and is fixedly connected to the upper flange through the bearing.

[0009] Optionally, the bearing is a spherical bearing, and the lifting adjustment rod further includes a stop bolt, which is located at one end of the lead screw body that passes through the upper flange and passes through the spherical bearing to connect to the lead screw body.

[0010] Optionally, a sealing ring is also provided between the lower flange and the second outer edge of the lifting adjustment rod.

[0011] Optionally, the upper flange includes at least three connecting lugs, which are evenly arranged around the bellows, and the lifting adjustment rod is disposed at the connecting lugs.

[0012] According to another aspect of the present invention, a vacuum device is also provided, the vacuum device comprising: a vacuum chamber; a vacuum robot disposed at the bottom of the vacuum chamber; and the aforementioned leveling mechanism, the leveling mechanism being disposed at the bottom of the vacuum chamber, wherein the bottom wall of the vacuum chamber is located between the upper flange and the lower flange and is sealed and fixed to the lower flange, and the vacuum robot is disposed on the upper flange and is sealed and fixed to the upper flange.

[0013] Optionally, the bottom wall of the vacuum chamber is sealed to the lower flange by a sealing ring, and the vacuum robot is sealed to the upper flange by a sealing ring.

[0014] Compared to existing technologies, the leveling mechanism and vacuum equipment provided in this invention allow for adjustment of the distance between the upper and lower flanges of the bellows via multiple lifting adjustment rods. Furthermore, when used in a vacuum device, the levelness of the vacuum robot within the device can be adjusted, thus eliminating the influence of the vacuum chamber's surface levelness on the robot's installation levelness. This eliminates the need for machining during vacuum chamber manufacturing to ensure the mounting surface's levelness, reducing the precision requirements for machining the vacuum chamber's plane, saving time and costs. Moreover, this leveling mechanism is highly versatile and compatible with most vacuum robots. Attached Figure Description

[0015] Other features, objects, and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0016] Figure 1 This is a schematic diagram of the leveling mechanism according to an embodiment of the present invention;

[0017] Figure 2 This is a schematic cross-sectional view of the leveling mechanism according to an embodiment of the present invention;

[0018] Figure 3 This is a schematic diagram of the lifting and adjusting rod of the leveling mechanism according to an embodiment of the present invention; and

[0019] Figure 4 This is a schematic diagram of the structure of a vacuum device according to an embodiment of the present invention. Detailed Implementation

[0020] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that the invention will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0021] The described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Numerous specific details are provided in the following description to give a full understanding of embodiments of the invention. However, those skilled in the art will recognize that the technical solutions of the invention can be practiced without one or more of the specific details, or by employing other methods, components, materials, etc. In some cases, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring the invention.

[0022] According to the inventive concept, the leveling mechanism of the present invention includes a bellows surrounding a vacuum robot, comprising an upper flange, a lower flange, and a first corrugated section located between the upper flange and the lower flange, wherein the distance between the upper flange and the lower flange can change with the extension and retraction of the first corrugated section; a plurality of lifting adjustment rods are arranged around the bellows, each of the lifting adjustment rods passing through the upper flange and the lower flange, and capable of adjusting the extension and retraction distance of the first corrugated section to adjust the distance between the upper flange and the lower flange.

[0023] The technical content of the present invention will be further described below with reference to the accompanying drawings and embodiments.

[0024] Please see also Figure 1 and Figure 2 The diagrams show a schematic structural diagram of the leveling mechanism according to an embodiment of the present invention, as well as a schematic cross-sectional diagram of the leveling mechanism. Figure 1 and Figure 2 As shown, in an embodiment of the present invention, the leveling mechanism includes at least: a bellows 1 and a plurality of lifting adjustment rods.

[0025] Specifically, the bellows 1 surrounds the vacuum robot of the vacuum equipment. The bellows 1 includes an upper flange 11, a lower flange 12, and a first corrugated section 13 located between the upper flange 11 and the lower flange 12. The distance between the upper flange 11 and the lower flange 12 can change with the expansion and contraction of the first corrugated section 13. In this embodiment of the invention, the upper flange 11 includes at least three connecting lugs, all of which are evenly distributed around the bellows 1. Figure 1 and Figure 2 In the illustrated embodiment, the upper flange 11 includes three connecting lugs 111, which are evenly arranged around the bellows 1, i.e., the included angle between the three connecting lugs is 120 degrees. It is understood that in this embodiment of the invention, the number of connecting lugs is not limited to three; more can be provided for easier adjustment.

[0026] Multiple lifting and adjusting rods are arranged around the bellows 1. For example... Figure 1 and Figure 2 As shown, the lifting adjustment rod is located at the connecting lug 111. Each lifting adjustment rod passes through the upper flange 11 and the lower flange 12, and can adjust the extension distance of the first corrugated section 13 to adjust the distance between the upper flange 11 and the lower flange 12.

[0027] More specifically, please see also Figure 2 and Figure 3 ,in, Figure 3 A schematic diagram of the lifting adjustment rod of the leveling mechanism according to an embodiment of the present invention is shown. (In conjunction with...) Figure 2 and Figure 3As shown, the lifting adjustment rod mainly includes a lead screw body 31, a first outer edge 32, a second outer edge 33, a second corrugated section 34, a screw sleeve 35, and a fastener 36.

[0028] The lead screw body 31 passes through the upper flange 11 and the lower flange 12. A first outer edge 32 surrounds the lead screw body 31 and extends outward from it. Figure 2 and Figure 3 As shown, the first outer edge 32 is disposed on the upper part of the lead screw body 31 and extends radially around the lead screw body 31 to support the upper flange 11. Combined Figure 2 As shown, when the lifting adjustment rod is connected, the first outer edge 32 is located below the connecting lug 111 of the upper flange 11. Similar to the first outer edge 32, the second outer edge 33 surrounds the lead screw body 31 and extends outward from the lead screw body 31; the second outer edge 33 supports the lower flange 12. Figure 2 As shown, the second outer edge 33 is located below the first outer edge 32 and is disposed at the lower part of the lead screw body 31. When the lifting adjustment rod is connected, the second outer edge 33 is located below the lower flange 12. The second corrugated section 34 is disposed between the first outer edge 32 and the second outer edge 33. Furthermore, when the second outer edge 33 moves, the second corrugated section 34 can extend and retract accordingly, and the distance between the first outer edge 32 and the second outer edge 33 can also change with the extension and retraction of the second corrugated section 34.

[0029] The threaded sleeve 35 is fitted outside the lead screw body 31 and can push the second outer edge 33 towards the first outer edge 32. In an embodiment of the present invention, the threaded sleeve 35 and the lead screw body 31 are connected by a thread. Rotating the threaded sleeve 35 can move it along the axial direction (vertical direction in the figure) of the lead screw body 31 by rotating it clockwise or counterclockwise, thereby pushing the second outer edge 33 towards the first outer edge 32. Optionally, the threaded sleeve 35 can be a hexagonal threaded sleeve.

[0030] Fastener 36 is disposed on threaded sleeve 35 for fixing threaded sleeve 35. Optionally, fastener 36 is a fastening set screw. The outer side of threaded sleeve 35 is provided with a connecting hole adapted to the fastening set screw. After threaded sleeve 35 is adjusted, the fastening set screw, as fastener 36, can be radially inserted into the connecting hole to fix threaded sleeve 35.

[0031] Furthermore, in Figure 2 In the illustrated embodiment, the lifting adjustment rod further includes a bearing 37. The lead screw body 31 passes through the upper flange 11 and is fixedly connected to the upper flange 11 via the bearing 37. In this embodiment, the bearing 37 is a spherical bearing; furthermore, the lifting adjustment rod also includes a stop bolt 38. The stop bolt 38 is disposed at one end of the lead screw body 31 that passes through the upper flange 11 (…). Figure 2The upper end of the lead screw body 31 is connected to the ball bearing. Optionally, the upper end of the lead screw body 31 may be provided with a threaded hole, such as an M10 threaded hole, for connection with the plug bolt 38.

[0032] Furthermore, in an embodiment of the present invention, a sealing ring is provided between the lower flange 12 and the second outer edge of the lifting adjustment rod for sealing.

[0033] Furthermore, the present invention also provides a vacuum device. Please see [link to related document]. Figure 4 This illustrates a schematic diagram of the structure of a vacuum device according to an embodiment of the present invention. Figure 4 As shown, the vacuum equipment includes a vacuum chamber 5, a vacuum robot 6, and the aforementioned... Figures 1 to 3 The leveling mechanism is shown. Specifically, the vacuum robot 6 is located at the bottom of the vacuum chamber 5. The bottom wall of the vacuum chamber 5 is located between the upper flange 11 and the lower flange 12 of the bellows 1. The bottom wall of the vacuum chamber 5 is sealed and fixed to the lower flange 12. The vacuum robot 6 is mounted on the upper flange 11 and sealed and fixed to it. Optionally, the bottom wall of the vacuum chamber 5 and the lower flange 12, as well as the vacuum robot 6 and the upper flange 11, are sealed with sealing rings. After the leveling mechanism is installed, simply place the level in the vacuum robot's measuring position and adjust the multiple lifting adjustment rods of the leveling mechanism to make the vacuum robot level.

[0034] In summary, the leveling mechanism and vacuum equipment provided in this embodiment of the invention allow for adjustment of the distance between the upper and lower flanges of the bellows via multiple lifting adjustment rods. Furthermore, when used in a vacuum equipment, the levelness of the vacuum robot within the equipment can be adjusted, thus eliminating the influence of the vacuum chamber's surface levelness on the robot's installation levelness. This eliminates the need for machining during the vacuum chamber manufacturing process to ensure the mounting surface's levelness, reducing the precision requirements for machining the vacuum chamber's plane, saving time and costs. Moreover, this leveling mechanism is highly versatile and compatible with most vacuum robots.

[0035] While the present invention has been disclosed above with reference to optional embodiments, it is not intended to limit the invention. Those skilled in the art to which this invention pertains can make various modifications and alterations without departing from the spirit and scope of the invention. Therefore, the scope of protection of this invention shall be determined by the scope defined in the claims.

Claims

1. A leveling mechanism, characterized in that, The leveling mechanism includes: A bellows surrounds a vacuum robot, comprising an upper flange, a lower flange, and a first corrugated section located between the upper flange and the lower flange, wherein the distance between the upper flange and the lower flange can change with the expansion and contraction of the first corrugated section; Multiple lifting adjustment rods are arranged around the corrugated pipe. Each lifting adjustment rod passes through the upper flange and the lower flange and can adjust the extension distance of the first corrugated section to adjust the distance between the upper flange and the lower flange. The lifting adjustment rod includes: The lead screw body extends through the upper flange and the lower flange; The first outer edge surrounds the lead screw body and extends outward from the lead screw body, and the first outer edge is used to support the upper flange; The second outer edge surrounds the lead screw body and extends outward from the lead screw body; the second outer edge is used to support the lower flange. The second corrugated segment is disposed between the first outer edge and the second outer edge, and the distance between the first outer edge and the second outer edge can change with the expansion and contraction of the second corrugated segment; A threaded sleeve is fitted outside the main body of the lead screw and can push the second outer edge to move towards the first outer edge; Fasteners are provided on the threaded sleeve for fixing the threaded sleeve; The screw sleeve is threadedly connected to the lead screw body, and rotating the screw sleeve pushes the second outer edge to move towards the first outer edge; The fastener is a fastening set screw, and the outer side of the threaded sleeve is provided with a connecting hole that is adapted to the fastening set screw. The fastener passes through the connecting hole to fix the threaded sleeve. The lifting adjustment rod also includes a bearing, and the lead screw body passes through the upper flange and is fixedly connected to the upper flange through the bearing.

2. The leveling mechanism as described in claim 1, characterized in that, The bearing is a spherical bearing, and the lifting adjustment rod also includes a stop bolt, which is located at one end of the lead screw body that passes through the upper flange and passes through the spherical bearing to connect to the lead screw body.

3. The leveling mechanism as described in claim 1, characterized in that, A sealing ring is also provided between the lower flange and the second outer edge of the lifting adjustment rod.

4. The leveling mechanism as described in claim 1, characterized in that, The upper flange includes at least three connecting lugs, which are evenly arranged around the bellows, and the lifting adjustment rod is located at the connecting lugs.

5. A vacuum device, characterized in that, The vacuum device includes: Vacuum cavity; A vacuum robot is positioned at the bottom of the vacuum chamber; and The leveling mechanism as described in any one of claims 1 to 4 is disposed at the bottom of the vacuum chamber, wherein the bottom wall of the vacuum chamber is located between the upper flange and the lower flange and is sealed and fixed to the lower flange, and the vacuum robot is disposed on the upper flange and is sealed and fixed to the upper flange.

6. The vacuum device as described in claim 5, characterized in that, The bottom wall of the vacuum chamber is sealed to the lower flange by a sealing ring, and the vacuum robot is sealed to the upper flange by a sealing ring.

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