A coating system and a coating method with uniform coating

Abstract

This invention relates to a coating system and method for uniform coating, comprising: a vacuum chamber, wherein the vacuum chamber obtains a vacuum environment through a corresponding vacuum system; an unwinding mechanism; a winding mechanism; a winding mechanism including a coating roller, wherein the coating roller unwinds the substrate it has wound around and exposes the bottom surface of the substrate, the coating roller including a roller body, the roller body having an internal mounting cavity, the mounting cavity being sealable, the outer surface of the roller body being covered with a rubber layer, the rubber layer having an annular bladder embedded at each of its left and right ends, a pump body being disposed within the roller body, the pump body being used to pressurize or depressurize the annular bladders, the annular bladders, after being pressurized, bulge at both ends of the rubber layer to form a structure with thicker sides and a uniform diameter in the middle; a plurality of evaporation sources, equally spaced below the axis of the coating roller; and a control system for controlling the pressurization or depressurization of the pump body.

Description

Technical Field

[0001] This invention relates to the field of coating, specifically to a coating system and coating method for achieving uniform coating. Background Technology

[0002] Coating refers to the process of heating and evaporating an evaporation source to deposit it onto the surface of a substrate, forming a single or multiple thin film. It has now become an indispensable new technology in industries such as electronics, optics, watchmaking, and aerospace, with electronics at its core.

[0003] A coating system typically includes an unwinding mechanism, a winding mechanism, a coiling mechanism, and a vapor deposition source. The substrate starts from the unwinding mechanism, passes through the winding mechanism, and reaches the winding mechanism. The vapor deposition source transfers vapor molecules to the substrate exposed on the winding mechanism, causing the vapor molecules to condense on the substrate surface. In existing technologies, such as... Figure 1 As shown, the evaporation source is generally set on the center line of the winding mechanism. The evaporation source rises from bottom to top and reaches the lower surface of the substrate. Since the distance from the left and right sides of the substrate to the evaporation source is larger than that from the middle of the substrate, on the one hand, it is more difficult for the evaporation molecules to reach the left and right sides of the substrate. On the other hand, the evaporation molecules need to convert more heat energy into kinetic energy to reach the left and right sides of the substrate, which makes the temperature of the left and right sides of the substrate lower. As a result, the film formed on the left and right sides of the substrate is thinner, and the uniformity of the overall coating is not uniform.

[0004] The purpose of this invention is to design a coating system and method with uniform coating to address the problems existing in the prior art. Summary of the Invention

[0005] In view of the problems existing in the prior art, the present invention provides a coating system and coating method with uniform coating, which can effectively solve at least one of the problems existing in the prior art.

[0006] The technical solution of this invention is:

[0007] A coating system for uniform coating, comprising:

[0008] A vacuum chamber, wherein the vacuum chamber obtains a vacuum environment through a corresponding vacuum system;

[0009] An unwinding mechanism, located within the vacuum chamber, is used to output the substrate to be coated;

[0010] A winding mechanism, located within the vacuum chamber, is used to wind up the substrate to be coated;

[0011] A winding mechanism is provided in the vacuum chamber. The substrate is wound through the winding mechanism. The winding mechanism includes a coating roller. The coating roller opens the substrate that has been wound through and exposes the bottom surface of the substrate. The coating roller includes a roller body. The roller body has an internal mounting cavity. The mounting cavity can be sealed. The outer surface of the roller body is covered with a rubber layer. An annular bladder is embedded at each of the left and right ends of the rubber layer. A pump body is provided inside the roller body. The pump body is used to pressurize or depressurize the annular bladder. When the annular bladder is pressurized, the two ends of the rubber layer bulge to form a structure with thicker sides and equal diameter in the middle. When the annular bladder is depressurized, the rubber layer returns to a structure with equal diameter.

[0012] Several evaporation sources are equally spaced below the axis of the coating roller;

[0013] A control system is used to control the pressurization or depressurization of the pump body.

[0014] Furthermore, the rubber layer is provided with an arc-shaped plate around the periphery of the annular bladder. One end of the arc-shaped plate is hinged to the roller body. When the annular bladder is pressurized, it drives the unhinged end of the arc-shaped plate to open. When the annular bladder is depressurized, it drives the unhinged end of the arc-shaped plate to close. The arc-shaped plate is used to raise or restore the diameter of both ends of the rubber layer.

[0015] Furthermore, the pump body is a forward and reverse water pump, and a liquid bag is provided in the mounting cavity. The liquid bag stores liquid and is connected to the forward and reverse water pump. The forward and reverse water pump pressurizes the annular bladder by inputting the liquid in the liquid bag into the annular bladder, and depressurizes the annular bladder by inputting the liquid in the annular bladder into the liquid bag.

[0016] Furthermore, a pressure-holding valve is provided between the pump body and the annular bladder, the pressure-holding valve being used to maintain the pressure inside the annular bladder.

[0017] Furthermore, it includes several temperature sensors, which are arranged at the left and right ends and the middle of the rubber layer. The temperature sensors are set on the surface of the rubber layer to obtain the temperature of the substrate. The control system is used to control the amount of pressure applied or released by the pump body to the annular bladder based on the data from the several temperature sensors.

[0018] Furthermore, the control system controls the amount of pressure applied or released by the pump body to the annular bladder so that the temperature at both ends and the middle position of the substrate is the same.

[0019] Furthermore, the outer ring of the annular bladder has a structure that is high in the middle and low on both sides.

[0020] Furthermore, the rubber layer has a lubricating layer on its outer ring at both ends.

[0021] A further method for achieving uniform coating is provided, comprising the following steps:

[0022] Obtain the temperatures of the left and right ends and the middle of the substrate;

[0023] The left and right ends of the substrate are bent downwards so that the left and right ends of the substrate are at the same temperature as the middle part.

[0024] Furthermore, the coating method is based on the aforementioned coating system for uniform coating, characterized in that:

[0025] The control system controls the amount of pressure applied or released by the pump body, and controls the diameter change at both ends of the coating roller, so that the left and right ends of the substrate bend downwards.

[0026] Therefore, the present invention provides the following effects and / or advantages:

[0027] This application sets the left and right ends of the coating roller to be raised, which allows the left and right ends of the bottom surface of the substrate to bend downwards in an arc shape, reducing the distance between the left and right ends of the bottom surface of the substrate and the evaporation source. This ensures that the left and right ends of the bottom surface of the substrate are fully exposed to evaporating molecules, and at the same time, it makes the heat energy transferred by the evaporating molecules to this position as similar as possible to the heat energy in the middle of the substrate. This results in a basically uniform temperature across the entire substrate, ultimately achieving the technical effect of uniform coating on the bottom surface of the substrate.

[0028] Other features and advantages of the invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained through the structures particularly pointed out in the description and the drawings.

[0029] It should be understood that the above summary and the following detailed description of the invention are exemplary and explanatory, and are intended to provide further explanation of the invention as claimed. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the coating technology in the prior art.

[0031] Figure 2 This is a schematic diagram of an embodiment of the present invention.

[0032] Figure 3 This is a schematic diagram of the unwinding mechanism, winding mechanism, and winding mechanism of the present invention.

[0033] Figure 4 for Figure 3 BB structure sectional view.

[0034] Figure 5 This is a schematic diagram of the coating roller.

[0035] Figure 6 This is a cross-sectional view of the coating roller.

[0036] Figure 7 This is a schematic diagram of the working state of the coating roller.

[0037] Figure 8 This is a schematic diagram of the arc-shaped plate.

[0038] Figure 9 This is a schematic diagram of the structure when the annular cyst bulges. Detailed Implementation

[0039] To facilitate understanding by those skilled in the art, the structure of the present invention will now be described in further detail with reference to the accompanying drawings:

[0040] refer to Figure 2-9 A coating system for uniform coating, comprising:

[0041] Vacuum chamber 1, wherein the vacuum chamber 1 obtains a vacuum environment through a corresponding vacuum system;

[0042] The unwinding mechanism 2 is located inside the vacuum chamber 1 and is used to output the substrate 5 to be coated;

[0043] The winding mechanism 3 is located inside the vacuum chamber 1 and is used to wind up the substrate 5 to be coated.

[0044] In this embodiment, a frame 101 is included. The frame 101 is equipped with an unwinding mechanism 2, a winding mechanism 3, and a winding mechanism 4. The frame 101 is designed to be movable, for example, by using a track and drive wheels to allow it to move. This allows the unwinding mechanism 2, the winding mechanism 3, and the winding mechanism 4 to be fed into or out of the vacuum chamber 1 together, facilitating the handling of uncoated and coated substrates 5. The vacuum system can be a vacuum pump. The unwinding mechanism 2, the winding mechanism 3, or the winding mechanism 4 can all be equipped with rotating components that drive the substrate 5.

[0045] A winding mechanism 4 is disposed within the vacuum chamber 1. The substrate 5 is wound through the winding mechanism 4. The winding mechanism 4 includes a coating roller 401. The coating roller 401 opens the substrate 5 it has wound through and exposes the bottom surface of the substrate 5. The coating roller 401 includes a roller body 4011. The roller body 4011 has an internal mounting cavity 4012. The mounting cavity 4012 is sealable. The outer surface of the roller body is covered with a rubber layer 4014. An annular bladder 4015 is embedded at each of the left and right ends of the rubber layer 4014. A pump body 4016 is disposed within the mounting cavity 4012. The pump body 4016 is used to pressurize or depressurize the annular bladder 4015. When the annular bladder 4015 is pressurized, the two ends of the rubber layer 4014 bulge to form a structure with thicker sides and equal diameter in the middle. When the annular bladder 4014 is depressurized, the rubber layer 4014 returns to a structure with equal diameter.

[0046] The winding mechanism 4 is the core improvement of this application. In this embodiment, several guide rollers 402 cooperate with the coating roller 401, so that the substrate 5 is formed into a certain arc shape by the guide rollers 402 and then the coating roller 401 opens the substrate 5. The diameter of the coating roller 401 is significantly larger than the diameter of the other guide rollers 402, so that more of the part of the substrate 5 that is wrapped around the bottom of the guide roller 402 can be exposed, and a certain tension is given to the substrate 5 so that the bottom surface of the substrate 5 is flat.

[0047] The coating roller 401 includes a roller body 4011, which can be a solid structure or a cylindrical structure. The roller body 4011 has an installation cavity 4012 inside. One end of the roller body 4011 can be provided with a cover 4013. The installation cavity 4012 inside the roller body 4011 can be exposed or sealed by opening and closing the cover 4013. This is because the winding mechanism 4 is exposed to the vacuum environment of the vacuum chamber 1 during the coating operation. If the installation cavity 4012 is not sealed, the subsequent annular bladder 4015, pump body 4016, etc. will be affected by the external vacuum environment, affecting the shape of the annular bladder 4015.

[0048] The rubber layer covers the outer surface of the roller 4011. The rubber layer has certain deformation characteristics and provides a certain frictional force to drive the substrate 5 to rotate, thereby conveying the substrate 5. In this embodiment, the diameter of the rubber layer 4014 remains constant except for its left and right ends. Annular bladders 4015 are provided inside the left and right ends of the rubber layer 4014. The annular bladders 4015 are filled with air or liquid by the pump body 4016, causing them to expand under pressure. After expansion, the annular bladders 4015 cause the corresponding positions of the rubber layer 4014 to bulge, thus increasing the diameter of the left and right ends of the rubber layer 4014. Furthermore, the rubber layer 4014 has the characteristic of recovering its deformation. The annular bladders 4015 are depressurized and restored by the pump body 4016, returning the rubber layer 4014 to a structure with equal diameters in the middle and at both ends.

[0049] Several evaporation sources 6 are equally spaced below the axis of the coating roller 401;

[0050] In this embodiment, the evaporation source 6 can be set at the position of the frame 101 corresponding to the axis of the coating roller 401. The evaporation source 6 includes a heating device and an evaporation tank. The heating device heats the vapor deposition liquid in the evaporation tank, thereby heating and vaporizing the vapor deposition liquid to form vapor deposition molecules. The vapor deposition molecules fly upward to the bottom surface of the substrate 5.

[0051] A control system is used to control the pressurization or depressurization of the pump body 416.

[0052] The working principle of this embodiment is as follows: when the evaporation source 6 rises upwards at a scattering angle A, the reference... Figure 7 The distance from the center of the evaporation source 6 to the bottom surface of the coating roller 401 is defined as L. When the roller body 4011 has a uniform diameter structure, the distance from the scattering edge of the evaporation source 6 to the bottom surface of the coating roller 401 is defined as D. Then D = L / cosA. Obviously, D is greater than L. At this time, the heat energy required for the evaporation molecules of the evaporation source 5 to reach the left and right ends of the coating roller 401 is converted into kinetic energy, and the molecular density decreases after dispersion. The left and right ends of the coating roller 401 are difficult to receive enough evaporation molecules. By raising the left and right ends of the coating roller 401, the left and right ends of the bottom surface of the substrate 5 are curved downwards, reducing the distance D between the left and right ends of the bottom surface of the substrate 5 and the evaporation source 6. This allows the left and right ends of the bottom surface of the substrate 5 to receive sufficient evaporation molecules. At the same time, it makes the heat energy transferred by the evaporation molecules to this position as similar as possible to the heat energy at the center of the substrate, so that the temperature of the entire substrate 5 is basically the same, and finally, the coating on the bottom surface of the substrate 5 is uniform. Alternatively, the distances D and L between the left and right ends of the bottom surface of the substrate 5 and the evaporation source 6 can be made equal.

[0053] Furthermore, the rubber layer 4014 is provided with an arc-shaped plate 4018 around the periphery corresponding to the annular bladder 4015. One end of the arc-shaped plate 4018 is hinged to the roller body 4011. When the annular bladder 4015 is pressurized, it drives the unhinged end of the arc-shaped plate 4018 to open. When the annular bladder 4015 is depressurized, it drives the unhinged end of the arc-shaped plate 4018 to close. The arc-shaped plate 4018 is used to raise or restore the diameter of both ends of the rubber layer 4014.

[0054] refer to Figure 8 After the arc-shaped plates 4018 are assembled, they form a ring structure. The arc-shaped plates 4018 can open and close along their hinge ends. The annular bladder 4015 is inflated and lifts the arc-shaped plates 4018. The arc-shaped plates 4018 convert the radial deformation of the annular bladder 4015 into a deformation mode in which the hinge ends of the arc-shaped plates 4018 swing. This can better bend the bottom surface of the substrate 5, so that one end of the outer side of the substrate 5 bends downward quickly, thereby reducing the distance between the left and right ends of the substrate and the evaporation source 6.

[0055] Furthermore, the pump body 4016 is a forward and reverse water pump, and a liquid bag 4017 is provided in the mounting cavity 4012. The liquid bag 4017 stores liquid and is connected to the forward and reverse water pump. The forward and reverse water pump pressurizes the annular bladder 4015 by inputting the liquid in the liquid bag 4017 into the annular bladder 4015, and depressurizes the annular bladder 4015 by inputting the liquid in the annular bladder 4015 into the liquid bag 4017.

[0056] In this embodiment, by sealing the mounting cavity 4012 and using the liquid bag 4017 containing liquid and a water pump, the liquid in the liquid bag 4017 can be transported. Furthermore, since the mounting cavity 4012 is sealed and unaffected by the external vacuum environment, and is filled with air, the expansion or contraction of the liquid bag 4017 when liquid is pumped in or out slightly changes the air pressure in the mounting cavity 4012, thereby achieving pressurization or depressurization of the annular bladder 4015 in a sealed, external vacuum environment.

[0057] Furthermore, a pressure-holding valve 4019 is provided between the pump body 4016 and the annular bladder 4015. The pressure-holding valve 4019 is used to maintain the pressure inside the annular bladder 4015. When the pressure inside the annular bladder 4015 reaches a certain value, the pressure-holding valve 4019 closes, keeping the pressure inside the annular bladder 4015 constant. At the same time, a pressure sensor can be installed inside the annular bladder 4015.

[0058] Furthermore, it includes several temperature sensors (not shown), which are arranged at the left and right ends and the middle position of the rubber layer 4014. The temperature sensors are set on the surface of the rubber layer 4014 to obtain the temperature of the substrate 5. The control system is used to control the amount of pressure applied or depressurized by the pump body 4016 to the annular bladder 4015 based on the data from the several temperature sensors.

[0059] In this embodiment, several temperature sensors can be evenly spaced along the axis of the outer surface of the rubber layer 4014 to obtain the temperature at different locations of the substrate 5. Furthermore, the degree of bulging at both ends of the rubber layer 4014 is changed according to the amount of pressure applied or released to the annular bladder 4015, thereby altering the downward curling amount at both ends of the substrate 5.

[0060] Optionally, the control system controls the amount of pressure applied or released by the pump body to the annular bladder 4014 so that the temperature at both ends and the middle position of the substrate 5 is the same.

[0061] Furthermore, the outer ring of the annular bladder 4015 has a structure that is high in the middle and low on both sides. (Reference) Figure 9 This structure allows the annular bladder 4015 to better lift the arc-shaped plate 4018 when it is inflated, and at the same time, this structure makes it easier to control the opening amount of the arc-shaped plate 4018.

[0062] Furthermore, the rubber layer 4014 has a lubricating layer on its outer ring at both ends.

[0063] In this embodiment, the lubricating layer can be graphene, mxene, etc., which has a smooth surface and is very thin. It can be coated on both ends of the rubber layer 4014 and deforms along with the rubber layer 4014. This is because when the ends of the rubber layer 4014 bulge, the rubber layer 4014 becomes a structure with larger diameters at both ends and a uniform diameter in the middle. During the rotation of the roller 4011, the rotation path at both ends of the rubber layer 4014 is longer than the rotation path at the middle position. The lubricating layer allows the ends of the substrate 5 to pass more smoothly.

[0064] A further method for achieving uniform coating is provided, comprising the following steps:

[0065] S1, obtain the temperature of the left and right ends and the middle position of the substrate 5;

[0066] S2, bend the left and right ends of the substrate 5 downwards so that the left and right ends of the substrate 5 are at the same temperature as the middle part.

[0067] Furthermore, the method provided in this embodiment is based on the above-mentioned uniform coating system. The control system controls the amount of pressure applied or released by the pump body 4016, and controls the amount of diameter change at the left and right ends of the coating roller 401, so that the left and right ends of the substrate 5 bend downward.

[0068] The principle of this control method is the same as that of the above-mentioned uniform coating system, and will not be repeated here.

[0069] Experimental data

[0070] The substrates were coated using coating rollers of equal diameter. Several batches of coated substrates produced in December 2023 were sampled and measured. The average coating thickness at the middle position of the substrate was 12.65 nanometers, and the average coating thickness at both ends of the substrate was 10.77 nanometers.

[0071] The substrate was coated using a coating roller with variable diameter at both ends provided in this embodiment. Several batches of coated substrates produced in January 2024 were sampled and measured. The average coating thickness at the middle position of the substrate was 12.59 nanometers, and the average coating thickness at both ends of the substrate was 12.13 nanometers.

[0072] As can be seen, by using the coating roller with variable diameter at both ends provided in this embodiment to transport the substrate for coating, the uniformity of the substrate coating can be improved.

[0073] It should be noted that any reference signs placed between parentheses in the claims should not be construed as limiting the claims. The word "comprising" does not exclude the presence of components or steps not listed in the claims. The word "a" or "an" preceding a component does not exclude the presence of a plurality of such components. The invention can be implemented by means of hardware comprising several different components and by means of a suitably programmed computer. In a unit claim enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

[0074] Although preferred embodiments of the invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the invention.

[0075] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0076] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

Claims

1. A coating system for uniform coating, characterized in that: include: A vacuum chamber, wherein the vacuum chamber obtains a vacuum environment through a corresponding vacuum system; An unwinding mechanism, located within the vacuum chamber, is used to output the substrate to be coated; A winding mechanism, located within the vacuum chamber, is used to wind up the substrate to be coated; A winding mechanism is provided in the vacuum chamber. The substrate is wound through the winding mechanism. The winding mechanism includes a coating roller. The coating roller opens the substrate that has been wound through and exposes the bottom surface of the substrate. The coating roller includes a roller body. The roller body has an internal mounting cavity. The mounting cavity can be sealed. The outer surface of the roller body is covered with a rubber layer. An annular bladder is embedded at each of the left and right ends of the rubber layer. A pump body is provided inside the roller body. The pump body is used to pressurize or depressurize the annular bladder. When the annular bladder is pressurized, the two ends of the rubber layer bulge to form a structure with thicker sides and equal diameter in the middle. When the annular bladder is depressurized, the rubber layer returns to a structure with equal diameter. Several evaporation sources are equally spaced below the axis of the coating roller; A control system is used to control the pressurization or depressurization of the pump body.

2. The coating system for uniform coating according to claim 1, characterized in that: The rubber layer has an arc-shaped plate around the periphery of the annular bladder. One end of the arc-shaped plate is hinged to the roller. When the annular bladder is pressurized, it drives the unhinged end of the arc-shaped plate to open. When the annular bladder is depressurized, it drives the unhinged end of the arc-shaped plate to close. The arc-shaped plate is used to raise or restore the diameter of both ends of the rubber layer.

3. The coating system for uniform coating according to claim 1, characterized in that: The pump body is a forward and reverse water pump. A liquid bag is provided in the mounting cavity. The liquid bag stores liquid. The liquid bag is connected to the forward and reverse water pump. The forward and reverse water pump pressurizes the annular bladder by inputting the liquid in the liquid bag into the annular bladder. The forward and reverse water pump depressurizes the annular bladder by inputting the liquid in the annular bladder into the liquid bag.

4. The coating system for uniform coating according to claim 1, characterized in that: A pressure-holding valve is provided between the pump body and the annular bladder, and the pressure-holding valve is used to maintain the pressure inside the annular bladder.

5. The coating system for uniform coating according to claim 1, characterized in that: The system includes several temperature sensors, which are arranged at the left and right ends and the middle of the rubber layer. The temperature sensors are set on the surface of the rubber layer to obtain the temperature of the substrate. The control system is used to control the amount of pressure applied or released by the pump body to the annular bladder based on the data from the several temperature sensors.

6. The coating system for uniform coating according to claim 5, characterized in that: The control system controls the amount of pressure applied or released by the pump body to the annular bladder so that the temperature at both ends and the middle of the substrate is the same.

7. The coating system for uniform coating according to claim 1, characterized in that: The outer ring of the annular bladder has a structure that is high in the middle and low on both sides.

8. The coating system for uniform coating according to claim 1, characterized in that: The rubber layer has a lubricating layer on its outer ring at both ends.

9. A coating method for achieving uniform coating, characterized in that: The coating method is based on a coating system with uniform coating as described in any one of claims 1-8. Includes the following steps: Obtain the temperatures of the left and right ends and the middle of the substrate; Bending the left and right ends of the substrate downwards to make the temperature of the left and right ends of the substrate the same as that of the middle part includes: controlling the amount of pressure increase or decrease of the pump body through the control system, controlling the amount of diameter change of the left and right ends of the coating roller, so that the left and right ends of the substrate are bent downwards.

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