Ceramic bonding tool outer grinding motorized chuck shaft positioning fine adjustment mechanism

Abstract

The application discloses a ceramic bonding tool outer grinding electric chuck shaft positioning trace adjustment mechanism, which comprises a clamp table, an electric chuck, a 1um displacement adjustment mechanism, a 10um displacement adjustment mechanism, a power supply plug-in mechanism and a control module; the adjustment mechanism is used for micron-level trace adjustment of the ceramic bonding tool profile which is offset after being clamped and positioned by the 10um displacement adjustment mechanism and the 1um displacement adjustment mechanism, so as to make up for the shortage of the traditional electric cylinder adjustment precision which cannot reach 1um displacement adjustment, and after the adjustment is completed, the central axis of the ceramic bonding tool profile coincides with the reference central axis of the visual detection mechanism, so that the machining precision of the ceramic bonding tool outer chamfer grinding can be improved.

Description

Technical Field

[0001] This invention belongs to the field of ceramic bonding tool processing technology, and in particular relates to a micro-adjustment mechanism for the shaft positioning of an electric chuck in the external grinding process of ceramic bonding tools. Background Technology

[0002] Bonding tools, also known as wire bonding tools, are used for bonding gold, silver, and alloy wires in semiconductor packaging. They are consumables in semiconductor packaging and are widely used in bonding circuits for silicon controlled rectifiers, LEDs, diodes, transistors, and IC chips. There are three main materials for bonding tools: tungsten carbide, titanium, and ceramic. Ceramic is an excellent material for making bonding tools. In existing technologies, the substrate positioning mechanism of traditional ceramic bonding tool chamfering and grinding devices has low positioning accuracy. This is because, after clamping and fixing the ceramic substrate, the ceramic substrate and the positioning mechanism are not coaxial. When the ceramic substrate rotates with the clamp of the positioning mechanism, there is a micrometer-level runout. Even using electric push rods or telescopic cylinders, it is impossible to achieve a 1µm displacement adjustment of the ceramic substrate, thus affecting the processing accuracy of the ceramic bonding tool's chamfering and grinding. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a mechanism that enables 1µm micro-displacement adjustment after the ceramic bonding tool substrate is clamped and fixed on an electric chuck.

[0004] To solve the above-mentioned technical problems, the present invention is achieved through the following technical solution: a micro-adjustment mechanism for the shaft positioning of an electric chuck in the external grinding of ceramic bonding tools, comprising a fixture table, an electric chuck, a 1µm displacement adjustment mechanism, a 10µm displacement adjustment mechanism, a power supply plug-in mechanism, and a control module;

[0005] The 10µm displacement adjustment mechanism comprises a second truncated cone, a third linear slide rail, a first electric cylinder, a third slider, a first connecting plate, a second square platform, a fourth linear slide rail, and a second electric cylinder. The second truncated cone is rotatably mounted on a fixture platform, on which a drive motor is fixedly mounted. A bushing is coaxially mounted on the rear end of the second truncated cone, and the output shaft of the drive motor is connected to the bushing at the rear end of the second truncated cone. Two fourth linear slide rails are longitudinally parallel and fixedly mounted on the second truncated cone. A fourth slider is fixedly mounted on the bottom of the second square platform, and the fourth slider is slidably mounted on the fourth linear slide rail. Two fourth sliders at the same end of the two fourth linear slide rails are fixedly connected by a second connecting plate. The second electric cylinder is fixedly mounted on the second truncated cone, and its actuator is fixedly connected to the second connecting plate. Two third linear slide rails are transversely parallel and fixedly mounted on the second square platform. A third slider is slidably mounted on the third linear slide rail, and two third sliders at the same end of the two third linear slide rails are fixedly connected by a first connecting plate. The first electric cylinder is fixedly mounted on the second square platform, and its actuator is fixedly connected to the first connecting plate.

[0006] The 1µm displacement adjustment mechanism comprises a first truncated cone, a first linear slide rail, a first square platform, a first slider, a second linear slide rail, four rotating shafts, four fine-tuning wheels, and four servo motors. The first truncated cone is fixedly mounted on the third slider. Two second linear slide rails are longitudinally parallel and fixedly mounted on the first truncated cone. A second slider is slidably mounted on the second linear slide rails. The first square platform is fixedly mounted on the second slider. Two first linear slide rails are transversely parallel and fixedly mounted on the first square platform. The first slider is slidably mounted on the first linear slide rail. The electric chuck has symmetrically mounted and fixedly mounted support frames on its upper and lower sides. The support frames are fixedly mounted on the first slider. Two servo motors are symmetrically mounted and fixedly mounted at the upper and lower ends of the first truncated cone, and the other two servo motors are symmetrically mounted on the first slider. It is fixedly installed at the left and right ends of the first square platform. Two of the rotating shafts are rotatably installed at the upper and lower ends of the first circular platform through ball bearings. The other two rotating shafts are rotatably installed at the left and right ends of the first square platform through ball bearings. Two fine adjustment wheels are fixedly sleeved on the rotating shafts at the upper and lower ends of the first circular platform. The two fine adjustment wheels located at the upper and lower ends of the first circular platform press against the upper and lower end surfaces of the first square platform. The other two fine adjustment wheels are fixedly sleeved on the rotating shafts at the left and right ends of the first square platform. The two fine adjustment wheels located at the left and right ends of the first square platform press against the outer surfaces of the left and right ends of the electric chuck. The output shafts of the servo motors located at the upper and lower ends of the first circular platform are connected to the rotating shafts located at the upper and lower ends of the first circular platform. The output shafts of the servo motors located at the left and right ends of the first square platform are connected to the rotating shafts located at the left and right ends of the first square platform.

[0007] The outer cylindrical surface of the fine-tuning wheel has ten arc-shaped protrusions arranged in a ring array. The height of the highest point of the ten arc-shaped protrusions from the outer cylindrical surface of the fine-tuning wheel is set to 0um-9um in increments of 1um.

[0008] The power supply plugging and unplugging mechanism consists of an electric push rod, a push plate, a guide rod, a male plug, and a female plug. A sliding groove is provided on the fixture table, the guide rod is fixedly installed in the sliding groove, the push plate is slidably installed on the guide rod, the electric push rod is fixedly installed on the fixture table, the actuator of the electric push rod is fixedly connected to the push plate, the male plug is fixedly installed on the push plate, and the female plug is fixedly installed on the outer cylindrical surface of the first truncated cone. The electric chuck, servo motor, first electric cylinder, and second electric cylinder are respectively connected to the control module and the female plug through circuits.

[0009] Preferably, the sum of the dimensions of the arc-shaped protrusions that contact the upper and lower ends of the first circular platform with the upper and lower end surfaces of the first square platform is 9µm, and the sum of the dimensions of the arc-shaped protrusions that contact the outer surface of the electric chuck with the upper and lower ends of the first square platform is 9µm.

[0010] Preferably, the female plug is fixedly mounted on the outer cylindrical surface of the first frustum by a rubber pad.

[0011] Preferably, both ends of the first linear slide rail, the second linear slide rail, the third linear slide rail, and the fourth linear slide rail are provided with limiting baffles to prevent slippage.

[0012] Preferably, a guide pin is fixedly installed on the push plate, and a guide hole that mates with the guide pin is provided on the female plug.

[0013] Compared with the prior art, the advantages of this invention are: the adjustment mechanism uses a 10µm displacement adjustment mechanism in conjunction with a 1µm displacement adjustment mechanism to perform micron-level micro-adjustment of the ceramic bonding tool profile after it has been clamped and positioned by the electric chuck, which makes up for the shortcomings of the traditional electric cylinder adjustment which can achieve a displacement adjustment of 1µm. After the adjustment is completed, the central axis of the ceramic bonding tool profile is located at the reference central axis of the visual inspection mechanism, which can improve the processing accuracy of the external chamfer grinding of the ceramic bonding tool. Attached Figure Description

[0014] The invention will be further described below with reference to the accompanying drawings.

[0015] Figure 1 This is a schematic diagram of the 1µm displacement adjustment mechanism of the present invention.

[0016] Figure 2 This is a schematic diagram of the 10µm displacement adjustment mechanism of the present invention.

[0017] Figure 3This is a schematic diagram of the structure of the ten arc-shaped protrusions on the fine-tuning wheel.

[0018] Figure 4 yes Figure 1 A magnified structural diagram at point M. Detailed Implementation

[0019] The present invention will now be described in detail with reference to specific embodiments:

[0020] like Figures 1 to 4 The electric chuck shaft positioning micro-adjustment mechanism for external grinding of ceramic bonding tools shown includes a fixture table 1, an electric chuck 4, a 1µm displacement adjustment mechanism, a 10µm displacement adjustment mechanism, a power supply plug-in mechanism, and a control module.

[0021] The 10µm displacement adjustment mechanism comprises a second frustum 3, a third linear slide rail 7, a first electric cylinder 71, a third slider 72, a first connecting plate 73, a second square platform 8, a fourth linear slide rail 81, and a second electric cylinder 82. The second frustum 3 is rotatably mounted on a fixture platform 1, on which a drive motor is fixedly mounted. A bushing is coaxially mounted at the rear end of the second frustum 3, and the output shaft of the drive motor is connected to the bushing at the rear end of the second frustum 3. Two fourth linear slide rails 81 are longitudinally parallel and fixedly mounted on the second frustum 3. A fourth slider is fixedly mounted at the bottom of the second square platform 8, and the fourth slider is slidably mounted on the second square platform 8. On the four linear slide rails 81, two fourth sliders at the same end of the two fourth linear slide rails 81 are fixedly connected by a second connecting plate. The second electric cylinder 82 is fixedly installed on the second circular platform 3. The actuator of the second electric cylinder 82 is fixedly connected to the second connecting plate. Two third linear slide rails 7 are horizontally parallel and fixedly installed on the second square platform 8. A third slider 72 is slidably installed on the third linear slide rail 7. Two third sliders 72 at the same end of the two third linear slide rails 7 are fixedly connected by a first connecting plate 73. The first electric cylinder 71 is fixedly installed on the second square platform 8. The actuator of the first electric cylinder 71 is fixedly connected to the first connecting plate 73.

[0022] The 1µm displacement adjustment mechanism comprises a first truncated cone 2, a first linear slide rail 5, a first square truncated cone 50, a first slider 51, a second linear slide rail 52, four rotating shafts 6, four fine-tuning wheels 61, and four servo motors. The first truncated cone 2 is fixedly mounted on a third slider 72. Two second linear slide rails 52 are longitudinally parallel and fixedly mounted on the first truncated cone 2. A second slider is slidably mounted on the second linear slide rails 52. The first square truncated cone 50 is fixedly mounted on the second slider. Two first linear slide rails 5 are transversely parallel and fixedly mounted on the first square truncated cone 50. The first slider 51 is slidably mounted on the first linear slide rail 5. The electric chuck 4 has symmetrically mounted support frames 41 on its upper and lower sides. The support frames 41 are fixedly mounted on the first slider 51. Two servo motors are symmetrically mounted on the upper and lower ends of the first truncated cone 2, and the other two servo motors are symmetrically mounted on the lower and upper ends of the first truncated cone 2. It is fixedly installed at both ends of the first square platform 50. Two rotating shafts 6 are rotatably installed at the upper and lower ends of the first circular platform 2 via ball bearings. The other two rotating shafts 6 are rotatably installed at both ends of the first square platform 50 via ball bearings. Two fine adjustment wheels 61 are fixedly sleeved on the rotating shafts 6 at the upper and lower ends of the first circular platform 2. The two fine adjustment wheels 61 located at the upper and lower ends of the first circular platform 2 press against the upper and lower end surfaces of the first square platform 50. The other two fine adjustment wheels 61 are fixedly sleeved on the rotating shafts 6 at the left and right ends of the first square platform 50. The two fine adjustment wheels 61 located at the left and right ends of the first square platform 50 press against the outer surfaces of the left and right ends of the electric chuck 4. The output shafts of the servo motors located at the upper and lower ends of the first circular platform 2 are connected to the rotating shafts 6 at the upper and lower ends of the first circular platform 2. The output shafts of the servo motors located at the left and right ends of the first square platform 50 are connected to the rotating shafts 6 at the left and right ends of the first square platform 50.

[0023] The fine-tuning wheel 61 has ten arc-shaped protrusions arranged in a ring array on its outer cylindrical surface. The height of the highest point of the ten arc-shaped protrusions from the outer cylindrical surface of the fine-tuning wheel 61 is set to 0um-9um in increments of 1um, i.e., 0um, 1um, 2um, 3um, 4um, 5um, 6um, 7um, 8um, and 9um.

[0024] The power supply plugging and unplugging mechanism consists of an electric push rod 9, a push plate 91, a guide rod 92, a male plug 94, and a female plug 95. The fixture table 1 is provided with a sliding groove 11. The guide rod 92 is fixedly installed in the sliding groove 11. The push plate 91 is slidably installed on the guide rod 92. The electric push rod 9 is fixedly installed on the fixture table 1. The actuator of the electric push rod 9 is fixedly connected to the push plate 91. The male plug 94 is fixedly installed on the push plate 91. The female plug 95 is fixedly installed on the outer cylindrical surface of the first truncated cone 2. The electric chuck 4, the servo motor, the first electric cylinder 71, and the second electric cylinder 82 are respectively connected to the control module and the female plug 95 through circuits.

[0025] When adjusting the first square platform 50 to move up and down along the second linear slide rail 52, the two fine-adjusting wheels 61 at the upper and lower ends of the first circular platform 2 rotate synchronously in opposite directions, so that the sum of the dimensions of the arc-shaped protrusions at the upper and lower ends of the first circular platform 2 in contact with the upper and lower end surfaces of the first square platform 50 is always 9µm. When adjusting the electric chuck 4 to move left and right along the first linear slide rail 5, the two fine-adjusting wheels 61 at the left and right ends of the first square platform 50 rotate synchronously in opposite directions, so that the sum of the dimensions of the arc-shaped protrusions at the upper and lower ends of the first square platform 50 in contact with the outer surface of the electric chuck 4 is always 9µm. This can avoid squeezing and wearing on the arc-shaped protrusions on the surface of the fine-adjusting wheels 61, thereby extending their service life.

[0026] The female plug 95 is fixedly installed on the outer cylindrical surface of the first truncated cone 2 by a rubber pad. The rubber pad has the characteristic of being flexible and deformable, which can prevent the female plug 95 from becoming loose when there is relative displacement between it and the male plug 94.

[0027] The first linear slide rail 5, the second linear slide rail 52, the third linear slide rail 7, and the fourth linear slide rail 81 are all equipped with limit baffles at both ends to prevent the sliders on each linear slide rail from coming off from their ends.

[0028] A guide pin 93 is fixedly installed on the push plate 91, and a guide hole that mates with the guide pin 93 is provided on the female plug 95. The guide pin 93 is inserted into the guide hole of the female plug 95 for pre-positioning, and can play a guiding role when the male plug 94 and the female plug 95 are inserted and mated.

[0029] The first electric cylinder 71 and the second electric cylinder 82 can achieve displacement adjustment with a precision of 10µm. The drive motor drives the second truncated cone 3, the first truncated cone 2, and the female plug 95 to rotate to the desired position. Figure 1After reaching the indicated position, the actuator of the electric push rod 9 extends and retracts, pushing the push plate 91 and the male plug 94 to the left, connecting the male plug 94 and the female plug 95 to power them on. The circuit of the male plug 94 is connected to the power supply. The ceramic bonding tool profile is installed in the electric chuck 4. The control module starts the electric chuck 4 to clamp and fix the ceramic bonding tool profile. The vision inspection mechanism sends the position offset detection data of the ceramic bonding tool profile to the control module. Taking the central axis of the ceramic bonding tool profile as being located to the lower left of the reference central axis of the vision inspection mechanism as an example, the central axis of the ceramic bonding tool profile is located 23µm to the left of the reference central axis of the vision inspection mechanism, and is located below the reference central axis of the vision inspection mechanism. 2µm, the actuator of the first electric cylinder 71 retracts, causing the first circular platform 2 to move 20µm to the right along the third linear slide rail 7. The servo motors located at the left and right ends of the first square platform 50 drive the two fine adjustment wheels 61 to rotate synchronously in the opposite direction for adjustment. The fine adjustment wheel 61 located at the left end of the first square platform 50 rotates counterclockwise by 108° (i.e., rotates three arc-shaped protrusions) to increase the value of the arc-shaped protrusions in contact with the outer surface of the electric chuck 4 by 3µm. At the same time, the fine adjustment wheel 61 located at the right end of the first square platform 50 rotates clockwise by 108° (i.e., rotates three arc-shaped protrusions) to decrease the value of the arc-shaped protrusions in contact with the outer surface of the electric chuck 4 by 3µm. This achieves the adjustment of the electric chuck 4 to move 3µm to the right. The servo motors at the upper and lower ends of the first truncated cone 2 are activated to drive the two fine adjustment wheels 61 to rotate in the opposite direction. The fine adjustment wheel 61 at the lower end of the first truncated cone 2 rotates 72° counterclockwise (i.e., rotates the two arc-shaped protrusions) to increase the value of the arc-shaped protrusions in contact with the lower end surface of the first square truncated cone 50 by 2µm. At the same time, the fine adjustment wheel 61 at the upper end of the first truncated cone 2 rotates 72° clockwise (i.e., rotates the two arc-shaped protrusions) to decrease the value of the arc-shaped protrusions in contact with the upper end surface of the first square truncated cone 50 by 2µm. This allows the adjustment of the upward movement of the first truncated cone 2 by 2µm. After adjustment, the central axis of the ceramic bonding tool profile coincides with the reference central axis of the vision inspection mechanism. The actuator of the electric push rod 9 separates the male plug 94 from the female plug 95 and cuts off the power. The first electric cylinder 71, the second electric cylinder 82, and the servo motor all have a power-off locking function, which can ensure the stability of the ceramic bonding tool profile during processing after clamping and fine adjustment. The drive motor drives the electric chuck 4, the 1µm displacement adjustment mechanism, the 10µm displacement adjustment mechanism, and the ceramic bonding tool profile to rotate for external grinding operations.

Claims

1. A micro-adjustment mechanism for the shaft positioning of an electric chuck in the external grinding of ceramic bonding tools, characterized in that: Includes a fixture table (1), an electric chuck (4), a 1µm displacement adjustment mechanism, a 10µm displacement adjustment mechanism, a power supply plug-in mechanism, and a control module; The 10µm displacement adjustment mechanism consists of a second truncated cone (3), a third linear slide rail (7), a first electric cylinder (71), a third slider (72), a first connecting plate (73), a second square platform (8), a fourth linear slide rail (81), and a second electric cylinder (82). The second truncated cone (3) is rotatably mounted on a fixture platform (1). A drive motor is fixedly mounted on the fixture platform (1). A bushing is fixedly installed on the rear end of the second truncated cone (3) on the same axis. The output shaft of the drive motor is connected to the bushing at the rear end of the second truncated cone (3). Two fourth linear slide rails (81) are longitudinally parallel and fixedly mounted on the second truncated cone (3). A fourth slider is fixedly mounted on the bottom of the second square platform (8). The fourth slider is slidably mounted on the second truncated cone (7) and the third electric cylinder (72). On the four linear slide rails (81), the two fourth sliders at the same end of the two fourth linear slide rails (81) are fixedly connected by the second connecting plate. The second electric cylinder (82) is fixedly installed on the second round platform (3). The actuator of the second electric cylinder (82) is fixedly connected to the second connecting plate. The two third linear slide rails (7) are parallel to each other and fixedly installed on the second square platform (8). The third slider (72) is slidably installed on the third linear slide rail (7). The two third sliders (72) at the same end of the two third linear slide rails (7) are fixedly connected by the first connecting plate (73). The first electric cylinder (71) is fixedly installed on the second square platform (8). The actuator of the first electric cylinder (71) is fixedly connected to the first connecting plate (73). The 1µm displacement adjustment mechanism consists of a first truncated cone (2), a first linear slide rail (5), a first square platform (50), a first slider (51), a second linear slide rail (52), four rotating shafts (6), four fine-tuning wheels (61), and four servo motors. The first truncated cone (2) is fixedly mounted on the third slider (72). The two second linear slide rails (52) are longitudinally parallel and fixedly mounted on the first truncated cone (2). The second slider is slidably mounted on the second linear slide rails (52). The first square platform (50) is fixedly mounted on the second slider. The two first linear slide rails (5) are transversely parallel and fixedly mounted on the first square platform (50). The first slider (51) is slidably mounted on the first linear slide rail (5). The electric chuck (4) has symmetrical and fixedly mounted support frames (41) on its upper and lower sides. The support frames (41) are fixedly mounted on the first slider (51). Two servo motors are symmetrically and fixedly mounted on the upper and lower ends of the first truncated cone (2). The other two servo motors are symmetrically and fixedly mounted on the upper and lower ends of the first truncated cone (2). Fixedly installed at the left and right ends of the first square platform (50), two of the rotating shafts (6) are rotatably installed at the upper and lower ends of the first circular platform (2) through ball bearings, and the other two rotating shafts (6) are rotatably installed at the left and right ends of the first square platform (50) through ball bearings. Two of the fine adjustment wheels (61) are fixedly sleeved on the rotating shafts (6) at the upper and lower ends of the first circular platform (2). The two fine adjustment wheels (61) located at the upper and lower ends of the first circular platform (2) are pressed against the upper and lower end surfaces of the first square platform (50). The other two fine adjustment wheels (61) are fixedly sleeved on the rotating shafts (6) at the left and right ends of the first square platform (50). The two fine adjustment wheels (61) located at the left and right ends of the first square platform (50) are pressed against the outer surfaces of the left and right ends of the electric chuck (4). The output shafts of the servo motors located at the upper and lower ends of the first circular platform (2) are connected to the rotating shafts (6) at the upper and lower ends of the first circular platform (2). The output shafts of the servo motors located at the left and right ends of the first square platform (50) are connected to the rotating shafts (6) at the left and right ends of the first square platform (50). The fine adjustment wheel (61) has ten arc-shaped protrusions arranged in a ring array on its outer cylindrical surface. The height of the highest point of the ten arc-shaped protrusions from the outer cylindrical surface of the fine adjustment wheel (61) is set to 0um-9um in increments of 1um. The power supply plugging and unplugging mechanism consists of an electric push rod (9), a push plate (91), a guide rod (92), a male plug (94), and a female plug (95). The fixture table (1) is provided with a sliding groove (11). The guide rod (92) is fixedly installed in the sliding groove (11). The push plate (91) is slidably installed on the guide rod (92). The electric push rod (9) is fixedly installed on the fixture table (1). The actuator of the electric push rod (9) is fixedly connected to the push plate (91). The male plug (94) is fixedly installed on the push plate (91). The female plug (95) is fixedly installed on the outer cylindrical surface of the first truncated cone (2). The electric chuck (4), servo motor, first electric cylinder (71), and second electric cylinder (82) are respectively connected to the control module and the female plug (95) through circuits.

2. The micro-adjustment mechanism for the shaft positioning of the electric chuck in the external grinding of ceramic bonding tools according to claim 1, characterized in that: The sum of the dimensions of the arc-shaped protrusions that contact the upper and lower ends of the first circular platform (2) with the upper and lower end surfaces of the first square platform (50) is 9um. The sum of the dimensions of the arc-shaped protrusions that contact the upper and lower ends of the first square platform (50) with the outer surface of the electric chuck (4) is 9um.

3. The micro-adjustment mechanism for the shaft positioning of the electric chuck in the external grinding of ceramic bonding tools according to claim 1, characterized in that: The female plug (95) is fixedly installed on the outer cylindrical surface of the first frustum (2) by a rubber pad.

4. The micro-adjustment mechanism for the shaft positioning of the electric chuck in the external grinding of ceramic bonding tools according to claim 1, characterized in that: Both ends of the first linear slide rail (5), the second linear slide rail (52), the third linear slide rail (7), and the fourth linear slide rail (81) are all equipped with limit baffles to prevent slippage.

5. The micro-adjustment mechanism for the shaft positioning of the electric chuck in the external grinding of ceramic bonding tools according to claim 1, characterized in that: A guide pin (93) is fixedly installed on the push plate (91), and a guide hole that cooperates with the guide pin (93) is provided on the female plug (95).

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