A vacuum water filtering tank and a dicing machine

Abstract

The present application relates to the technical field of dicing machines, and particularly to a vacuum water filter tank and a dicing machine. The vacuum water filter tank includes: a water filter tank, with an inlet connector and an outlet connector provided at the top of the water filter tank; the inlet connector is connected to the working table through a pipeline; the outlet connector is connected to a vacuum generator through a pipeline; the vacuum generator is used for evacuating; a drain hole is provided at the bottom of the water filter tank, and the drain hole is connected to the water inlet of a water pump through a pipeline, and the water outlet of the water pump is connected to a sewer pipeline through a pipeline; a float switch is provided inside the water filter tank, and the float switch is used to control the opening or closing of the water pump according to the liquid level height inside the water filter tank. By collecting the water entering the vacuum pipeline through the water filter tank and using the float switch to control the water pump, the water in the water filter tank can be quickly discharged, ensuring the vacuum degree of the vacuum pipeline; it can replace the vacuum generator for draining water, saving compressed air and having a high drainage efficiency.

Description

Technical Field

[0001] The present application relates to the technical field of dicing machines, and particularly to a vacuum water filter tank and a dicing machine. Background Art

[0002] The cutting process of the dicing machine for the wafer workpiece is completed on the cutting workbench, and there is a worktable on the cutting workbench for fixing the wafer workpiece. The worktable has a high requirement for maintaining the vacuum of the workpiece and needs to maintain the workpiece vacuum at -90 kPa during the processing.

[0003] Some customers, according to special requirements, use a metal suction cup as the worktable to adsorb the product. The metal suction cup may cause water to enter the vacuum pipeline when adsorbing the workpiece, resulting in the vacuum value not meeting the standard. More seriously, it may cause the vacuum value to be too low and the product to fall.

[0004] Currently, as disclosed in a dicing machine vacuum pipeline filtering device and filtering method of a Chinese patent with the application number 202310770591.X, a vacuum generator is used to pump water out from the water outlet. However, when the vacuum reaches -90 kPa, the atmospheric pressure on the water outlet is relatively large, resulting in slow drainage or even inability to drain, which will also cause vacuum loss; moreover, the vacuum generator consumes a large amount of compressed air, wasting resources. Summary of the Invention

[0005] The present application aims to at least solve one of the technical problems in the prior art or related technologies, that is, using a vacuum generator to pump water out from the water outlet, resulting in slow drainage or even inability to drain, which will also cause vacuum loss; moreover, the vacuum generator consumes a large amount of compressed air, wasting resources.

[0006] To this end, the present application provides a vacuum water filter tank, which collects the water entering the vacuum pipeline through the water filter tank, uses a float switch to control the water pump, can quickly drain the water in the water filter tank, and ensure the vacuum degree of the vacuum pipeline; can replace the vacuum generator for drainage, save compressed air, and has high drainage efficiency.

[0007] The present application also provides a dicing machine including the above-mentioned vacuum water filter tank.

[0008] A vacuum water filter tank according to an embodiment of the first aspect of the present application includes: a water filter tank, with an inlet joint and an outlet joint provided at the top of the water filter tank; the inlet joint is connected to the worktable through a pipeline; the outlet joint is connected to the vacuum generator through a pipeline; the vacuum generator is used for vacuum pumping; a drainage hole is provided at the bottom of the water filter tank, and the drainage hole is connected to the water inlet of the water pump through a pipeline, and the water outlet of the water pump is connected to the sewer pipeline through a pipeline; a float switch is provided inside the water filter tank, and the float switch is used to control the opening or closing of the water pump according to the liquid level height inside the water filter tank.

[0009] Optionally, the float switch includes: a first switch ball, a second switch ball and a connecting rod. The first switch ball is located below the second switch ball. One end of the connecting rod is connected to the first switch ball, and the other end is connected to the second switch ball. The second switch ball is used to control the pump to start when the liquid level in the water filter tank is higher than the preset upper limit. The first switch ball is used to control the pump to stop when the liquid level in the water filter tank is lower than the preset lower limit.

[0010] Optionally, an adjusting mechanism is provided on the connecting rod, and the adjusting mechanism is used to adjust the distance between the first switch ball and the second switch ball.

[0011] Optionally, a threaded filter element is provided at the inlet joint.

[0012] Optionally, a water baffle is provided in the water filter tank, and the water baffle is located between the inlet joint and the outlet joint.

[0013] Optionally, a liquid level display tube is provided on the water filter tank, and the liquid level display tube is used to display the liquid level height in the water filter tank.

[0014] Optionally, a liquid level sensor is provided on the liquid level display tube.

[0015] Optionally, a liquid level partition is provided in the water filter tank. The liquid level partition is vertically arranged between the inner wall near the liquid level display tube and the inlet joint. A communication gap is provided at the bottom of the liquid level partition.

[0016] Optionally, a solenoid valve is provided on the pipeline between the drain hole at the bottom of the water filter tank and the water inlet of the pump. The solenoid valve is used to open or close the drain hole at the bottom of the water filter tank.

[0017] A dicing machine provided in the second aspect embodiment of the present application is provided with the above-mentioned vacuum water filter tank. Since the vacuum water filter tank has the above technical effects, the dicing machine provided with the vacuum water filter tank should also have corresponding technical effects.

[0018] At least one of the technical solutions in the above technical solutions has the following advantages or beneficial effects:

[0019] For a vacuum water filter tank and a dicing machine provided in the embodiments of the present application, the vacuum water filter tank includes: a water filter tank. An inlet joint and an outlet joint are provided at the top of the water filter tank. The inlet joint is connected to the workbench through a pipeline. The outlet joint is connected to a vacuum generator through a pipeline. The vacuum generator is used to evacuate. A drain hole is provided at the bottom of the water filter tank. The drain hole is connected to the water inlet of the pump through a pipeline. The water outlet of the pump is connected to the sewer pipeline through a pipeline. A float switch is provided in the water filter tank, and the float switch is used to control the pump to start or stop according to the liquid level height in the water filter tank. By collecting the water entering the vacuum pipeline through the water filter tank and using the float switch to control the pump, the water in the water filter tank can be quickly discharged, ensuring the vacuum degree of the vacuum pipeline; it can replace the vacuum generator for drainage, save compressed air, and has high drainage efficiency. Brief Description of the Drawings

[0020] To more clearly illustrate the technical solutions of this application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, for those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0021] Figure 1 Fig. shows a schematic structural diagram of a vacuum water filter tank provided by an embodiment of this application;

[0022] Figure 2 Fig. shows Figure 1 a sectional view along line A-A in;

[0023] Figure 3 Fig. shows a schematic structural diagram of a float switch provided by an embodiment of this application.

[0024] Description of Reference Numerals:

[0025] 1. Water filter tank, 11. Inlet joint, 12. Outlet joint, 13. Threaded filter element, 14. Liquid level display tube, 15. Liquid level partition, 16. Liquid level sensor, 17. Water baffle, 2. Float switch, 21. First switch ball, 22. Second switch ball, 23. Connecting rod, 3. Solenoid valve, 4. Water pump, 5. Pressure gauge, 6. Vacuum generator, 7. Downpipe, 8. Working plate. Detailed Embodiments

[0026] To better explain this application for easy understanding, the following will combine the drawings and describe this application in detail through specific embodiments. The orientation terms such as "upper", "lower", "inner" and "outer" mentioned herein are with reference to Figure 1 and Figure 2 the orientation. The position of the inlet joint 11 relative to the solenoid valve 3 is defined as "upper"; the position of the water baffle 17 relative to the water filter tank 1 is defined as "inner".

[0027] As mentioned above, a dicing saw, also known as a precision grinding wheel cutting machine, is a precision numerical control device integrating technologies such as water, gas, electricity, air static pressure high-speed spindle, precision mechanical transmission, sensors and automation control. It is mainly used for dicing and processing of materials such as silicon integrated circuits, light-emitting diodes, lithium niobate, piezoelectric ceramics, gallium arsenide, sapphire, alumina, iron oxide, quartz, glass, ceramics, solar cell wafers, etc. The working principle of the dicing saw is mainly to use a high-speed rotating grinding wheel to cut the material. The motor drives the grinding wheel to rotate at high speed, the material is placed on the cutting table, and the grinding wheel is precisely guided by the guide rail to move into contact with the material to achieve cutting.

[0028] In order to solve at least one of the technical problems existing in the prior art or related technologies, the present application provides a vacuum water filter tank and a dicing machine. The vacuum water filter tank includes: a water filter tank with an inlet joint and an outlet joint provided at the top of the water filter tank; the inlet joint is connected to a working plate through a pipeline; the outlet joint is connected to a vacuum generator through a pipeline; the vacuum generator is used for vacuum pumping; a drain hole is provided at the bottom of the water filter tank, and the drain hole is connected to the water inlet of a water pump through a pipeline, and the water outlet of the water pump is connected to a sewer pipeline through a pipeline; a float switch is provided inside the water filter tank, and the float switch is used to control the opening or closing of the water pump according to the liquid level height inside the water filter tank. By collecting the water entering the vacuum pipeline through the water filter tank and using the float switch to control the water pump, the water in the water filter tank can be quickly discharged, ensuring the vacuum degree of the vacuum pipeline; it can replace the vacuum generator for drainage, save compressed air, and has a high drainage efficiency.

[0029] The following describes a vacuum water filter tank according to some embodiments provided by the present application with reference to the accompanying drawings.

[0030] See Figures 1 to 3 , a vacuum water filter tank provided by an embodiment of the first aspect of the present application includes: a water filter tank 1, with an inlet joint 11 and an outlet joint 12 provided at the top of the water filter tank 1; the inlet joint 11 is connected to a working plate 8 through a pipeline; the outlet joint 12 is connected to a vacuum generator 6 through a pipeline; the vacuum generator 6 is used for vacuum pumping; a drain hole is provided at the bottom of the water filter tank 1, and the drain hole is connected to the water inlet of a water pump 4 through a pipeline, and the water outlet of the water pump 4 is connected to a sewer pipeline 7 through a pipeline; a float switch 2 is provided inside the water filter tank 1, and the float switch 2 is used to control the opening or closing of the water pump 4 according to the liquid level height inside the water filter tank 1.

[0031] The water filter tank 1 is a sealed tank body, and the vacuum generator 6 is a device capable of generating negative pressure, that is, extracting air or other gases inside the device to create a vacuum environment. When the vacuum generator 6 pumps vacuum, the water filter tank 1 is sealed and will not affect the vacuum value of the pipeline. Water will enter the vacuum pipeline from the working plate 8, and when passing through the inlet joint 11, the water will enter the water filter tank 1. As Figure 1 shown, since both the inlet joint 11 and the outlet joint 12 are provided at the top of the water filter tank 1, the water enters the water filter tank 1 from the inlet joint 11 and will fall to the bottom of the water filter tank 1 under the action of gravity, and thus will not enter the pipeline after the outlet joint 12.

[0032] The working principle of the float switch 2 is mainly based on buoyancy and magnetic effects. One or more reed switches are installed in a closed non-magnetic tube, and then this tube is passed through one or more hollow float balls with annular magnets inside. When the liquid level rises or falls, it drives the float ball to move up and down together, so that the reed switch in the non-magnetic tube generates an action of closing or opening, and then outputs a switch signal, also known as a passive contact signal. This signal can be used to control the on-off of the circuit and achieve various automatic control functions. When the liquid level in the water filter tank 1 reaches a certain height, it will cause the float switch 2 to output an open signal, thereby controlling the water pump 4 to start. The water pump 4 quickly pumps out the water in the water filter tank 1 and discharges it into the downstream pipeline 7. Since all the water is collected by the water filter tank 1 and will not enter the pipeline after the outlet joint 12, it will not affect the vacuum pumping of the vacuum generator 6, can replace the vacuum generator 6 for drainage, save compressed air, and has a high drainage efficiency.

[0033] The water pump 4 is arranged below the water filter tank 1, which can not only reduce the connecting pipes but also make full use of the gravity effect. Since the water pump 4 is located below the water filter tank 1, when drainage is required, the water can flow naturally to the water pump 4 by gravity, reducing the gravitational potential energy that the water pump 4 needs to overcome, thereby reducing the energy consumption of the water pump 4; moreover, with this arrangement, the equipment structure is compact, occupies little space, and is convenient to install.

[0034] Furthermore, sealing rings are provided on the inlet joint 11 and the outlet joint 12. The main function of the sealing ring is to provide reliable sealing, prevent leakage at the joint during vacuum pumping, and ensure the airtightness of the equipment.

[0035] In a schematic embodiment, as Figure 3 shown, the float switch 2 includes: a first switch ball 21, a second switch ball 22, and a connecting rod 23. The first switch ball 21 is located below the second switch ball 22; one end of the connecting rod 23 is connected to the first switch ball 21, and the other end is connected to the second switch ball 22; the second switch ball 22 is used to control the water pump 4 to start when the liquid level in the water filter tank 1 is higher than the preset upper limit; the first switch ball 21 is used to control the water pump 4 to close when the liquid level in the water filter tank 1 is lower than the preset lower limit.

[0036] The first switch ball 21 is located below the second switch ball 22. When the liquid level in the water filter tank 1 reaches the upper limit of the first switch ball 21, the first switch ball 21 will be connected first, outputting a first opening signal. At this time, there is no need to control the water pump 4 to start. When the liquid level in the water filter tank 1 reaches the upper limit of the second switch ball 22, that is, when the liquid level in the water filter tank 1 is higher than the preset upper limit, the second switch ball 22 is connected, outputting a second opening signal. At this time, the water pump 4 is controlled to start. The water pump 4 quickly pumps out the water in the water filter tank 1. When the liquid level in the water filter tank 1 reaches the lower limit of the second switch ball 22, the second switch ball 22 is disconnected, outputting a second closing signal. At this time, there is no need to control the water pump 4 to close. When the liquid level in the water filter tank 1 reaches the lower limit of the first switch ball 21, that is, when the liquid level in the water filter tank 1 is lower than the preset lower limit, the first switch ball 21 is disconnected, outputting a first closing signal. At this time, the water pump 4 is controlled to close. Such a setting enables the first switch ball 21 and the second switch ball 22 to form a hysteresis control effect, which can reduce the frequent start and stop of the water pump 4. When the liquid level fluctuates between the upper and lower limits, the hysteresis control will not frequently turn on and off the water pump 4. This helps to reduce the wear and energy consumption of the equipment, extend the service life of the equipment, make the equipment more stable in the face of small liquid level fluctuations, and will not make unnecessary reactions due to short-term liquid level changes.

[0037] In a schematic embodiment, an adjusting mechanism is provided on the connecting rod 23, and the adjusting mechanism is used to adjust the distance between the first switch ball 21 and the second switch ball 22.

[0038] By adjusting the distance between the first switch ball 21 and the second switch ball 22, the preset upper limit and the preset lower limit can be accurately set, and the adjustment of the liquid level control sensitivity and the hysteresis range can be realized, that is, adjusting the position to which the liquid level needs to rise or fall to a higher or lower position to trigger the opening or closing of the switch. Appropriate distance setting can optimize the hysteresis effect, make the equipment more stable during liquid level fluctuations, and even if the liquid level changes within a short time, the equipment will not start or stop frequently, thereby reducing the wear and energy consumption of the equipment.

[0039] Further, the adjusting mechanism can adopt a threaded method. By setting a thread on the connecting rod 23, the distance between the first switch ball 21 and the second switch ball 22 can be easily adjusted by rotating the thread. This adjustment method is simple and fast, without the need for complex tools or operations. The adjusting mechanism can also adopt a telescopic rod method. The connecting rod 23 is designed as a telescopic rod form, which can conveniently adjust the distance between the first switch ball 21 and the second switch ball 22. By simply telescoping the rod body, the required liquid level control range can be easily set.

[0040] In a schematic embodiment, such as Figure 2As shown, a threaded filter element 13 is provided at the inlet joint 11. The main function of the threaded filter element 13 is to filter out impurities in the water, such as particulate matter, suspended matter, etc., to avoid the accumulation of impurities in the water in the water filter tank 1, causing pipeline blockage. The threaded filter element 13 adopts a detachable design, which is convenient for regularly checking the usage of the filter element. If it is blocked or damaged, it can be cleaned or replaced in time.

[0041] In a schematic embodiment, a water baffle 17 is provided in the water filter tank 1, and the water baffle 17 is located between the inlet joint 11 and the outlet joint 12. The main function of the water baffle 17 is to prevent water from flowing from the inlet joint 11 to the outlet joint 12, so as not to affect the vacuum pumping of the vacuum generator 6.

[0042] In a schematic embodiment, a liquid level display tube 14 is provided on the water filter tank 1, and the liquid level display tube 14 is used to display the liquid level height in the water filter tank 1. Based on the principle of communicating vessels, the liquid level display tube 14 is connected to the inside of the water filter tank 1 and can reflect the change of the liquid level in the tank in real time. In this way, the operator can always master the storage amount of the liquid in the tank without opening the tank body or relying on other complex detection equipment.

[0043] In a schematic embodiment, a liquid level sensor 16 is provided on the liquid level display tube 14. The liquid level sensor 16 can be set at the upper end of the liquid level display tube 14. When the liquid level sensor 16 detects a liquid level signal, it means that the liquid level height in the water filter tank 1 is too high, and an alarm message can be sent to prompt the operator to handle it. The use of the liquid level sensor 16 plays an automatic monitoring and alarm role, reducing manual operation, preventing potential safety hazards and equipment damage caused by too high liquid level, and improving the overall stability and safety of the equipment.

[0044] In a schematic embodiment, a liquid level partition 15 is provided in the water filter tank 1. The liquid level partition 15 is vertically arranged between the inner wall near the liquid level display tube 14 and the inlet joint 11; a communication gap is provided at the bottom of the liquid level partition 15. The liquid level partition 15 is used to make the liquid level displayed by the liquid level display tube 14 more accurate. The liquid level partition 15 separates the water inlet section from the display section through physical isolation, thereby reducing the violent fluctuation of the water surface caused by a large water inflow. This design helps to keep the liquid level in the display section relatively stable, making the liquid level display of the liquid level display tube 14 more accurate, and avoiding being affected by the violent fluctuation of the water surface when the water inflow is large.

[0045] In a schematic embodiment, a solenoid valve 3 is provided on the pipeline between the bottom drain hole of the water filtration tank 1 and the water inlet of the water pump 4. The solenoid valve 3 is used to open or close the drain hole at the bottom of the water filtration tank 1. The solenoid valve 3 can be controlled by a float switch 2. When drainage is required, the solenoid valve 3 receives an open signal, allowing water to flow through the pipeline into the water pump 4; when drainage is not required, the solenoid valve 3 receives a closed signal, blocking the water flow and acting as a seal to prevent vacuum loss.

[0046] Furthermore, a pressure gauge 5 is provided on the pipeline connecting the inlet joint 11 and the working disk 8. The pressure gauge 5 is used to display the vacuum value in the pipeline in real time, facilitating the operator to monitor the vacuum condition of the working disk 8 at any time.

[0047] Based on the vacuum water filtration tank provided in the above embodiments, the second aspect of the present application also provides a dicing machine, including the vacuum water filtration tank provided in the above embodiments. Since the dicing machine provided in this embodiment has the vacuum water filtration tank provided in any of the above embodiments, the dicing machine has all the beneficial effects of the vacuum water filtration tank provided in any of the above embodiments, which will not be elaborated here.

[0048] In the description of the present application, it should be understood that the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, "a plurality of" means two or more, unless otherwise specifically defined.

[0049] In the present application, unless otherwise clearly defined and limited, the terms "installed", "connected", "connected to", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium; it may be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0050] In the present application, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0051] In the description of this specification, the descriptions of terms such as "one embodiment", "some embodiments", "embodiment", "exemplary embodiment", "example", "specific example", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0052] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present application. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present application.

Claims

1. A vacuum water filtering tank, characterized in that, Comprising: A water filter tank (1), with an inlet connector (11) and an outlet connector (12) provided at the top of the water filter tank (1); The inlet connector (11) is connected to a working plate (8) through a pipeline; the outlet connector (12) is connected to a vacuum generator (6) through a pipeline; the vacuum generator (6) is used for vacuum pumping; A water pump (4) is arranged below the water filter tank (1); a drain hole is provided at the bottom of the water filter tank (1), and the drain hole is connected to the water inlet of the water pump (4) through a pipeline, and the water outlet of the water pump (4) is connected to a sewer pipeline (7) through a pipeline; A float switch (2) is arranged inside the water filter tank (1), and the float switch (2) is used to control the opening or closing of the water pump (4) according to the liquid level height inside the water filter tank (1); A baffle plate (17) is arranged inside the water filter tank (1), and the baffle plate (17) is located between the inlet connector (11) and the outlet connector (12); A liquid level display tube (14) is provided on the water filter tank (1), and the liquid level display tube (14) is used to display the liquid level height inside the water filter tank (1); A liquid level sensor (16) is provided on the liquid level display tube (14); A threaded filter element (13) is provided at the inlet connector (11); A liquid level partition plate (15) is arranged inside the water filter tank (1), the liquid level partition plate (15) is vertically arranged, and is located between the inner wall on the side close to the liquid level display tube (14) and the inlet connector (11); a communicating notch is provided at the bottom of the liquid level partition plate (15); The float switch (2) includes: a first switch ball (21), a second switch ball (22) and a connecting rod (23), the first switch ball (21) is located below the second switch ball (22); one end of the connecting rod (23) is connected to the first switch ball (21), and the other end is connected to the second switch ball (22); The second switch ball (22) is used to control the opening of the water pump (4) when the liquid level inside the water filter tank (1) is higher than a preset upper limit; The first switch ball (21) is used to control the closing of the water pump (4) when the liquid level inside the water filter tank (1) is lower than a preset lower limit; When the liquid level rises to reach the upper limits of the first switch ball (21) and the second switch ball (22) respectively, after successively turning on and outputting a first opening signal and a second opening signal, the water pump (4) is controlled to open; When the liquid level drops to reach the lower limits of the second switch ball (22) and the first switch ball (21) respectively, after successively turning off and outputting a second closing signal and a first closing signal, the water pump (4) is controlled to close.

2. The vacuum water filtering tank according to claim 1, characterized in that, An adjusting mechanism is provided on the connecting rod (23), and the adjusting mechanism is used to adjust the distance between the first switch ball (21) and the second switch ball (22).

3. A vacuum water filter tank according to claim 1, characterized in that, An electromagnetic valve (3) is provided on the pipeline between the drain hole at the bottom of the water filter tank (1) and the water inlet of the water pump (4), and the electromagnetic valve (3) is used to open or close the drain hole at the bottom of the water filter tank (1).

4. A dicing machine, characterized in that, Comprising: A vacuum water filter tank according to any one of claims 1 - 3.

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