Tri-axial fast tool servo driven by stress electromagnetic and method of using same

Abstract

The application provides a three-axis quick tool servo device driven by a stress electromagnetic force and a use method thereof, which comprises: a compliant guide mechanism assembly (1) for guiding a diamond tool; a vertical-axis stress electromagnetic actuator assembly (2) for providing driving force for the vertical-axis direction of the diamond tool; a plane-axis stress electromagnetic actuator assembly (3) for providing driving force for the plane-axis direction of the diamond tool; and a shell assembly (4) for connecting the mechanism assembly parts. The application realizes the high-efficiency and high-precision machining target of metal microstructure elements with micron-level characteristic dimensions.

Description

Technical Field

[0001] This invention relates to the field of ultra-precision manufacturing technology, specifically to a three-axis rapid tool servo device driven by electromagnetic stress and its usage method. Background Technology

[0002] As equipment systems used in fields such as integrated circuit manufacturing and advanced optical imaging place increasingly higher demands on the performance of internal microstructure functional components, the feature sizes of functional units on the surface of these components are constantly shrinking. Traditional machining lathes can no longer meet the machining requirements of these microstructure components. Three-axis rapid tool servo devices can be integrated into the vertical axis of a lathe, helping it overcome the limitations of inertial loads and enabling the creation of microstructures with feature sizes at the micrometer level. Therefore, three-axis rapid tool servo devices have extremely broad application prospects and market value in the field of ultra-precision manufacturing technology. Summary of the Invention

[0003] To address the shortcomings of existing technologies, the purpose of this invention is to provide a three-axis rapid tool servo device with normal stress electromagnetic drive and its usage method.

[0004] A three-axis rapid tool servo device with electromagnetic drive based on normal stress, according to the present invention, comprises:

[0005] Compliant guide mechanism component 1: used to guide diamond cutting tools;

[0006] Vertical axis stress electromagnetic actuator assembly 2: used to provide driving force for diamond tools in the vertical axis direction;

[0007] Planar axis stress electromagnetic actuator assembly 3; used to provide driving force in the planar axis direction for diamond tools;

[0008] Housing assembly 4: Used to connect the various mechanism components.

[0009] Preferably, the front planar compliant guide mechanism 5 of the compliant guide mechanism assembly 1 is fastened to the front panel 19 of the housing assembly 4 by bolt locking, the rear planar compliant guide mechanism 9 of the compliant guide mechanism assembly 1 is fastened to the rear panel 24 of the housing assembly 4 by bolt locking, the front vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1 is connected to the two vertical axis drive armatures 11 of the vertical axis normal stress electromagnetic actuator assembly 2 by bolt locking, and the planar drive shaft 8 of the compliant guide mechanism assembly 1 is connected to the planar drive armature 18 of the planar axis normal stress electromagnetic actuator assembly 3 by bolt locking;

[0010] The two vertical axis magnetic yokes 10 of the vertical axis normal stress electromagnetic actuator assembly 2 are connected to the vertical axis magnetic yoke support frame 20 of the housing assembly 4 by bolt locking.

[0011] The planar main magnetic yoke 15 of the planar shaft stress electromagnetic actuator assembly 3 is connected to the planar main magnetic yoke support frame 23 of the housing assembly 4 by bolt locking, and the four planar secondary magnetic yokes 14 of the planar shaft stress electromagnetic actuator assembly 3 are connected to the planar secondary magnetic yoke support frame 21 of the housing assembly 4 by bolt locking.

[0012] Preferably, the compliant guide mechanism assembly 1:

[0013] Includes: front-end planar shaft compliant guide mechanism 5, front-end vertical shaft compliant guide mechanism 6, rear-end vertical shaft compliant guide mechanism 7, planar shaft drive shaft 8, and rear-end planar shaft compliant guide mechanism 9;

[0014] Specifically: the front planar shaft compliant guide mechanism 5 and the front vertical shaft compliant guide mechanism 6 are connected by bolt locking; the front planar shaft compliant guide mechanism 5 and the planar shaft drive shaft 8 are connected by bolt locking; the front vertical shaft compliant guide mechanism 6 and the rear vertical shaft compliant guide mechanism 7 are connected by bolt locking; and the planar shaft drive shaft 8 and the rear planar shaft compliant guide mechanism 9 are connected by bolt locking.

[0015] Preferably, the vertical axis normal stress electromagnetic actuator assembly 2:

[0016] It includes: two vertical axis magnetic yokes 10, two vertical axis drive armatures 11, two vertical axis permanent magnets 12, and a vertical axis excitation coil 13. The vertical axis magnetic yokes 10 and the vertical axis permanent magnets 12 are fixed by magnetic attraction. The vertical axis excitation coil 13 is wound around the two arms of the vertical axis magnetic yokes 10. The vertical axis drive armatures 11 are connected to the front vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1 by bolt locking. The vertical axis normal stress electromagnetic actuator assembly 2 is arranged symmetrically on both sides of the front vertical axis compliant guide mechanism 6, and ensures that the two arms of the vertical axis magnetic yokes 10 and the left and right sides of the vertical axis drive armatures 11 maintain an air gap with a preset distance.

[0017] Preferably, the planar shaft normal stress electromagnetic actuator assembly 3:

[0018] It includes: a planar main magnetic yoke 15, four planar secondary magnetic yokes 14, a planar drive armature 18, four planar permanent magnets 16, and a planar excitation coil 17. The planar drive armature 18 is connected to the planar drive shaft 8 by bolt locking. The planar permanent magnets 16 and the planar secondary magnetic yokes 14 are fixed by magnetic attraction. The planar excitation coil 17 is wound around the four arms of the planar main magnetic yoke 15. The planar main magnetic yoke 15 and the planar secondary magnetic yokes 14 are placed around the planar drive armature 18 in an axially symmetrical manner to ensure that there is a preset air gap between the four arms of the planar main magnetic yoke 15 and the planar drive armature 18. There is also a preset air gap between the two arms of each planar secondary magnetic yoke 14 and the two sides of the planar drive armature 18.

[0019] Preferably, the housing assembly 4:

[0020] It includes: a front panel 19, a rear panel 24, two vertical axis magnetic yoke support frames 20, four connecting beams 22, four planar axis main magnetic yoke support frames 23, and four planar axis secondary magnetic yoke support frames 21. The front panel 19 and the rear panel 24 are connected by bolts through the four connecting beams 22. The two vertical axis magnetic yoke support frames 20 are connected to the connecting beams 22 by bolts. The four planar axis main magnetic yoke support frames 23 are connected to the connecting beams 22 by bolts. The four planar axis secondary magnetic yoke support frames 21 are connected to the rear panel 24 by bolts.

[0021] According to the present invention, a method for using a stress-driven electromagnetically operated three-axis rapid tool servo device includes, using any one of the stress-driven electromagnetically operated three-axis rapid tool servo devices described in the present invention, performing the following:

[0022] Step S1: Complete the installation of internal parts and the connection between components of the compliant guide mechanism assembly 1, the vertical axis stress electromagnetic actuator assembly 2, the planar axis stress electromagnetic actuator assembly 3, and the housing assembly 4.

[0023] Step S2: Current is passed through the planar axis excitation coil 17 of the planar axis normal stress electromagnetic actuator assembly 3, so that the planar axis drive armature 18 of the planar axis normal stress electromagnetic actuator assembly 3 is subjected to electromagnetic normal stress to generate acceleration and displacement, thereby driving the planar axis transmission shaft 8 of the compliant guide mechanism assembly 1, and driving the diamond tool integrated in the front vertical axis compliant mechanism 6 to perform planar motion.

[0024] Step S3: Current is passed through the vertical axis excitation coil 13 of the vertical axis normal stress electromagnetic actuator assembly 2, so that the two vertical axis drive armatures 11 of the vertical axis normal stress electromagnetic actuator assembly 2 are subjected to electromagnetic normal stress to generate acceleration and displacement, thereby driving the front vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1, and driving the diamond tool integrated in the front vertical axis compliant mechanism 6 to move vertically.

[0025] Step S4: The material removal target on the workpiece surface is achieved through the spatial movement of the diamond tool.

[0026] Preferably, the front planar compliant guide mechanism 5 of the compliant guide mechanism assembly 1 is fastened to the front panel 19 of the housing assembly 4 by bolt locking, the rear planar compliant guide mechanism 9 of the compliant guide mechanism assembly 1 is fastened to the rear panel 24 of the housing assembly 4 by bolt locking, the front vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1 is connected to the two vertical axis drive armatures 11 of the vertical axis normal stress electromagnetic actuator assembly 2 by bolt locking, and the planar drive shaft 8 of the compliant guide mechanism assembly 1 is connected to the planar drive armature 18 of the planar axis normal stress electromagnetic actuator assembly 3 by bolt locking;

[0027] The two vertical axis magnetic yokes 10 of the vertical axis normal stress electromagnetic actuator assembly 2 are connected to the vertical axis magnetic yoke support frame 20 of the housing assembly 4 by bolt locking.

[0028] The planar main magnetic yoke 15 of the planar shaft stress electromagnetic actuator assembly 3 is connected to the planar main magnetic yoke support frame 23 of the housing assembly 4 by bolt locking, and the four planar secondary magnetic yokes 14 of the planar shaft stress electromagnetic actuator assembly 3 are connected to the planar secondary magnetic yoke support frame 21 of the housing assembly 4 by bolt locking.

[0029] Preferably, the compliant guide mechanism assembly 1:

[0030] Includes: front-end planar shaft compliant guide mechanism 5, front-end vertical shaft compliant guide mechanism 6, rear-end vertical shaft compliant guide mechanism 7, planar shaft drive shaft 8, and rear-end planar shaft compliant guide mechanism 9;

[0031] Among them: the front planar shaft compliant guide mechanism 5 and the front vertical shaft compliant guide mechanism 6 are connected by bolt locking; the front planar shaft compliant guide mechanism 5 and the planar shaft drive shaft 8 are connected by bolt locking; the front vertical shaft compliant guide mechanism 6 and the rear vertical shaft compliant guide mechanism 7 are connected by bolt locking; and the planar shaft drive shaft 8 and the rear planar shaft compliant guide mechanism 9 are connected by bolt locking.

[0032] The vertical axis normal stress electromagnetic actuator assembly 2:

[0033] It includes: two vertical axis magnetic yokes 10, two vertical axis drive armatures 11, two vertical axis permanent magnets 12, and a vertical axis excitation coil 13. The vertical axis magnetic yokes 10 and the vertical axis permanent magnets 12 are fixed by magnetic attraction. The vertical axis excitation coil 13 is wound around the two arms of the vertical axis magnetic yokes 10. The vertical axis drive armatures 11 are connected to the front vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1 by bolt locking. The vertical axis normal stress electromagnetic actuator assembly 2 is arranged symmetrically on both sides of the front vertical axis compliant guide mechanism 6, and ensures that the two arms of the vertical axis magnetic yokes 10 and the left and right sides of the vertical axis drive armatures 11 maintain an air gap with a preset distance.

[0034] Preferably, the planar shaft normal stress electromagnetic actuator assembly 3:

[0035] It includes: a planar main magnetic yoke 15, four planar secondary magnetic yokes 14, a planar drive armature 18, four planar permanent magnets 16, and a planar excitation coil 17. The planar drive armature 18 is connected to the planar drive shaft 8 by bolt locking. The planar permanent magnets 16 and the planar secondary magnetic yokes 14 are fixed by magnetic attraction. The planar excitation coil 17 is wound around the four arms of the planar main magnetic yoke 15. The planar main magnetic yoke 15 and the planar secondary magnetic yokes 14 are placed around the planar drive armature 18 in an axially symmetrical manner to ensure that there is a preset air gap between the four arms of the planar main magnetic yoke 15 and the planar drive armature 18. There is also a preset air gap between the two arms of each planar secondary magnetic yoke 14 and the two sides of the planar drive armature 18.

[0036] The outer casing assembly 4:

[0037] It includes: a front panel 19, a rear panel 24, two vertical axis magnetic yoke support frames 20, four connecting beams 22, four planar axis main magnetic yoke support frames 23, and four planar secondary magnetic yoke support frames 21. The front panel 19 and the rear panel 24 are connected by bolts through the four connecting beams 22. The two vertical axis magnetic yoke support frames 20 are connected to the connecting beams 22 by bolts. The four planar axis main magnetic yoke support frames 23 are connected to the connecting beams 22 by bolts. The four planar axis secondary magnetic yoke support frames 21 are connected to the rear panel 24 by bolts.

[0038] Compared with the prior art, the present invention has the following beneficial effects:

[0039] This invention proposes a three-axis rapid tool servo device driven by a normal stress electromagnetic actuation method. This device can be integrated into a lathe and, through linkage with the lathe axis, can create microstructures with a feature scale of micrometers on the surface of metal materials. This solves the problem of low working bandwidth and limited machining capacity caused by inertial load limitations of traditional lathes, and achieves the goal of efficient and high-precision machining of metal microstructure components with a feature scale of micrometers. Attached Figure Description

[0040] Other features, objects, and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0041] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0042] Figure 2 This is a schematic diagram of a portion of the compliant guide mechanism component of the present invention;

[0043] Figure 3 This is a schematic diagram of the vertical axis stress electromagnetic actuator assembly structure of the present invention;

[0044] Figure 4 This is a schematic diagram of the planar axial stress electromagnetic actuator assembly structure of the present invention;

[0045] Figure 5 This is a schematic diagram of the outer shell assembly structure of the present invention;

[0046] In the picture:

[0047] 1 is a compliant guide mechanism component;

[0048] 2 is a vertical axis stress electromagnetic actuator assembly;

[0049] 3 is a planar shaft stress electromagnetic actuator assembly;

[0050] 4 represents the outer casing assembly;

[0051] 5 is a front-end planar shaft compliant guide mechanism;

[0052] 6 is the front vertical axis compliant guide mechanism;

[0053] 7 is the rear vertical axis compliant guide mechanism;

[0054] 8 is a planar shaft drive shaft;

[0055] 9 is the rear-end planar compliant guide mechanism;

[0056] 10 is the vertical axis magnetic yoke;

[0057] 11 is the vertical axis drive armature;

[0058] 12 is a vertical axis permanent magnet;

[0059] 13 is the vertical axis excitation coil;

[0060] 14 is a planar axial pair magnetic yoke;

[0061] 15 is the planar axial principal magnetic yoke;

[0062] 16 is a planar axial permanent magnet;

[0063] 17 is a planar shaft excitation coil;

[0064] 18 is a planar shaft driven armature;

[0065] 19 is the front panel;

[0066] 20 is a vertical axis magnetic yoke support frame;

[0067] 21 is a planar shaft pair magnetic yoke support frame;

[0068] 22 is a connecting beam;

[0069] 23 is a planar axis main magnetic yoke support frame;

[0070] 24 is the back-end panel. Detailed Implementation

[0071] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0072] Example 1:

[0073] This invention belongs to the field of ultra-precision manufacturing technology, specifically a three-axis rapid tool servo device driven by electromagnetic stress and its usage method, which can be integrated with a lathe to jointly complete the manufacturing process of creating microstructures on the surface of metal materials.

[0074] A three-axis rapid tool servo device driven by normal stress electromagnetics and its usage method are disclosed. The three-axis rapid tool servo device driven by normal stress electromagnetics includes: a compliant guide mechanism assembly for guiding a diamond tool; a vertical-axis normal stress electromagnetic actuator assembly for providing driving force to the diamond tool along its vertical axis; a planar-axis normal stress electromagnetic actuator assembly for providing driving force to the diamond tool along its planar axis; and a housing assembly for connecting the various parts. The invention also proposes a method for using this three-axis rapid tool servo device driven by normal stress electromagnetics, including: installing the various components; inputting current signals to the excitation coils of the planar and vertical axes to drive the diamond tool; and the diamond tool completing the material cutting target through spatial movement. This invention can be integrated into lathe axes, helping lathes overcome the limitations of inertial loads and achieve efficient and high-precision machining of microstructures with feature dimensions at the micrometer level.

[0075] According to the present invention, a method for using a stress-driven electromagnetically operated three-axis rapid tool servo device includes, using any one of the stress-driven electromagnetically operated three-axis rapid tool servo devices described in the present invention, performing the following:

[0076] Step S1: Complete the installation of internal parts and the connection between components of the compliant guide mechanism assembly 1, the vertical axis stress electromagnetic actuator assembly 2, the planar axis stress electromagnetic actuator assembly 3, and the housing assembly 4.

[0077] Step S2: Current is passed through the planar axis excitation coil 17 of the planar axis normal stress electromagnetic actuator assembly 3, so that the planar axis drive armature 18 of the planar axis normal stress electromagnetic actuator assembly 3 is subjected to electromagnetic normal stress to generate acceleration and displacement, thereby driving the planar axis transmission shaft 8 of the compliant guide mechanism assembly 1, and driving the diamond tool integrated in the front vertical axis compliant guide mechanism 6 to perform planar motion.

[0078] Step S3: Current is passed through the vertical axis excitation coil 13 of the vertical axis normal stress electromagnetic actuator assembly 2, so that the two vertical axis drive armatures 11 of the vertical axis normal stress electromagnetic actuator assembly 2 are subjected to electromagnetic normal stress to generate acceleration and displacement, thereby driving the front vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1, and driving the diamond tool integrated in the front vertical axis compliant guide mechanism 6 to move vertically.

[0079] Step S4: The material removal target on the workpiece surface is achieved through the spatial movement of the diamond tool.

[0080] Specifically, the front planar compliant guide mechanism 5 of the compliant guide mechanism assembly 1 is fastened to the front panel 19 of the housing assembly 4 by bolts, the rear planar compliant guide mechanism 9 of the compliant guide mechanism assembly 1 is fastened to the rear panel 24 of the housing assembly 4 by bolts, the front vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1 is connected to the two vertical axis drive armatures 11 of the vertical axis normal stress electromagnetic actuator assembly 2 by bolts, and the planar drive shaft 8 of the compliant guide mechanism assembly 1 is connected to the planar drive armature 18 of the planar axis normal stress electromagnetic actuator assembly 3 by bolts.

[0081] The two vertical axis magnetic yokes 10 of the vertical axis normal stress electromagnetic actuator assembly 2 are connected to the vertical axis magnetic yoke support frame 20 of the housing assembly 4 by bolt locking.

[0082] The planar main magnetic yoke 15 of the planar shaft stress electromagnetic actuator assembly 3 is connected to the planar main magnetic yoke support frame 23 of the housing assembly 4 by bolt locking, and the four planar secondary magnetic yokes 14 of the planar shaft stress electromagnetic actuator assembly 3 are connected to the planar secondary magnetic yoke support frame 21 of the housing assembly 4 by bolt locking.

[0083] Specifically, the compliant guide mechanism assembly 1:

[0084] Includes: front-end planar shaft compliant guide mechanism 5, front-end vertical shaft compliant guide mechanism 6, rear-end vertical shaft compliant guide mechanism 7, planar shaft drive shaft 8, and rear-end planar shaft compliant guide mechanism 9;

[0085] Among them: the front planar shaft compliant guide mechanism 5 and the front vertical shaft compliant guide mechanism 6 are connected by bolt locking; the front planar shaft compliant guide mechanism 5 and the planar shaft drive shaft 8 are connected by bolt locking; the front vertical shaft compliant guide mechanism 6 and the rear vertical shaft compliant guide mechanism 7 are connected by bolt locking; and the planar shaft drive shaft 8 and the rear planar shaft compliant guide mechanism 9 are connected by bolt locking.

[0086] The vertical axis normal stress electromagnetic actuator assembly 2:

[0087] It includes: two vertical axis magnetic yokes 10, two vertical axis drive armatures 11, two vertical axis permanent magnets 12, and a vertical axis excitation coil 13. The vertical axis magnetic yokes 10 and the vertical axis permanent magnets 12 are fixed by magnetic attraction. The vertical axis excitation coil 13 is wound around the two arms of the vertical axis magnetic yokes 10. The vertical axis drive armatures 11 are connected to the front vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1 by bolt locking. The vertical axis normal stress electromagnetic actuator assembly 2 is arranged symmetrically on both sides of the front vertical axis compliant guide mechanism 6, and ensures that the two arms of the vertical axis magnetic yokes 10 and the left and right sides of the vertical axis drive armatures 11 maintain an air gap with a preset distance.

[0088] Specifically, the planar shaft normal stress electromagnetic actuator assembly 3:

[0089] It includes: a planar main magnetic yoke 15, four planar secondary magnetic yokes 14, a planar drive armature 18, four planar permanent magnets 16, and a planar excitation coil 17. The planar drive armature 18 is connected to the planar drive shaft 8 by bolt locking. The planar permanent magnets 16 and the planar secondary magnetic yokes 14 are fixed by magnetic attraction. The planar excitation coil 17 is wound around the four arms of the planar main magnetic yoke 15. The planar main magnetic yoke 15 and the planar secondary magnetic yokes 14 are placed around the planar drive armature 18 in an axially symmetrical manner to ensure that there is a preset air gap between the four arms of the planar main magnetic yoke 15 and the planar drive armature 18. There is also a preset air gap between the two arms of each planar secondary magnetic yoke 14 and the two sides of the planar drive armature 18.

[0090] The outer casing assembly 4:

[0091] It includes: a front panel 19, a rear panel 24, two vertical axis magnetic yoke support frames 20, four connecting beams 22, four planar axis main magnetic yoke support frames 23, and four planar axis secondary magnetic yoke support frames 21. The front panel 19 and the rear panel 24 are connected by bolts through the four connecting beams 22. The two vertical axis magnetic yoke support frames 20 are connected to the connecting beams 22 by bolts. The four planar axis main magnetic yoke support frames 23 are connected to the connecting beams 22 by bolts. The four planar axis secondary magnetic yoke support frames 21 are connected to the rear panel 24 by bolts.

[0092] Example 2:

[0093] Example 2 is a preferred embodiment of Example 1, and is used to illustrate the present invention in more detail.

[0094] According to the present invention, a three-axis rapid tool servo device with electromagnetic drive based on normal stress is provided, such as... Figures 1-5 As shown, it includes:

[0095] Compliant guide mechanism component 1: used to guide diamond cutting tools;

[0096] Vertical axis stress electromagnetic actuator assembly 2: used to provide driving force for diamond tools in the vertical axis direction;

[0097] Planar axis stress electromagnetic actuator assembly 3; used to provide driving force in the planar axis direction for diamond tools;

[0098] Housing assembly 4: Used to connect the various mechanism components.

[0099] Specifically, the front planar compliant guide mechanism 5 of the compliant guide mechanism assembly 1 is fastened to the front panel 19 of the housing assembly 4 by bolts, the rear planar compliant guide mechanism 9 of the compliant guide mechanism assembly 1 is fastened to the rear panel 24 of the housing assembly 4 by bolts, the front vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1 is connected to the two vertical axis drive armatures 11 of the vertical axis normal stress electromagnetic actuator assembly 2 by bolts, and the planar drive shaft 8 of the compliant guide mechanism assembly 1 is connected to the planar drive armature 18 of the planar axis normal stress electromagnetic actuator assembly 3 by bolts.

[0100] The two vertical axis magnetic yokes 10 of the vertical axis normal stress electromagnetic actuator assembly 2 are connected to the vertical axis magnetic yoke support frame 20 of the housing assembly 4 by bolt locking.

[0101] The planar main magnetic yoke 15 of the planar shaft stress electromagnetic actuator assembly 3 is connected to the planar main magnetic yoke support frame 23 of the housing assembly 4 by bolt locking, and the four planar secondary magnetic yokes 14 of the planar shaft stress electromagnetic actuator assembly 3 are connected to the planar secondary magnetic yoke support frame 21 of the housing assembly 4 by bolt locking.

[0102] Specifically, the compliant guide mechanism assembly 1:

[0103] Includes: front-end planar shaft compliant guide mechanism 5, front-end vertical shaft compliant guide mechanism 6, rear-end vertical shaft compliant guide mechanism 7, planar shaft drive shaft 8, and rear-end planar shaft compliant guide mechanism 9;

[0104] Specifically: the front planar shaft compliant guide mechanism 5 and the front vertical shaft compliant guide mechanism 6 are connected by bolt locking; the front planar shaft compliant guide mechanism 5 and the planar shaft drive shaft 8 are connected by bolt locking; the front vertical shaft compliant guide mechanism 6 and the rear vertical shaft compliant guide mechanism 7 are connected by bolt locking; and the planar shaft drive shaft 8 and the rear planar shaft compliant guide mechanism 9 are connected by bolt locking.

[0105] Specifically, the vertical axis normal stress electromagnetic actuator assembly 2:

[0106] It includes: two vertical axis magnetic yokes 10, two vertical axis drive armatures 11, two vertical axis permanent magnets 12, and a vertical axis excitation coil 13. The vertical axis magnetic yokes 10 and the vertical axis permanent magnets 12 are fixed by magnetic attraction. The vertical axis excitation coil 13 is wound around the two arms of the vertical axis magnetic yokes 10. The vertical axis drive armatures 11 are connected to the front vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1 by bolt locking. The vertical axis normal stress electromagnetic actuator assembly 2 is arranged symmetrically on both sides of the front vertical axis compliant guide mechanism 6, and ensures that the two arms of the vertical axis magnetic yokes 10 and the left and right sides of the vertical axis drive armatures 11 maintain an air gap with a preset distance.

[0107] Specifically, the planar shaft normal stress electromagnetic actuator assembly 3:

[0108] It includes: a planar main magnetic yoke 15, four planar secondary magnetic yokes 14, a planar drive armature 18, four planar permanent magnets 16, and a planar excitation coil 17. The planar drive armature 18 is connected to the planar drive shaft 8 by bolt locking. The planar permanent magnets 16 and the planar secondary magnetic yokes 14 are fixed by magnetic attraction. The planar excitation coil 17 is wound around the four arms of the planar main magnetic yoke 15. The planar main magnetic yoke 15 and the planar secondary magnetic yokes 14 are placed around the planar drive armature 18 in an axially symmetrical manner to ensure that there is a preset air gap between the four arms of the planar main magnetic yoke 15 and the planar drive armature 18. There is also a preset air gap between the two arms of each planar secondary magnetic yoke 14 and the two sides of the planar drive armature 18.

[0109] Specifically, the housing assembly 4:

[0110] It includes: a front panel 19, a rear panel 24, two vertical axis magnetic yoke support frames 20, four connecting beams 22, four planar axis main magnetic yoke support frames 23, and four planar secondary magnetic yoke support frames 21. The front panel 19 and the rear panel 24 are connected by bolts through the four connecting beams 22. The two vertical axis magnetic yoke support frames 20 are connected to the connecting beams 22 by bolts. The four planar axis main magnetic yoke support frames 23 are connected to the connecting beams 22 by bolts. The four planar axis secondary magnetic yoke support frames 21 are connected to the rear panel 24 by bolts.

[0111] Example 3:

[0112] Example 3 is a preferred example of Example 1, and is used to illustrate the present invention in more detail.

[0113] The purpose of this invention is to provide a three-axis rapid tool servo device that completes the actuation process through normal stress electromagnetic drive. This device can be integrated into the vertical axis of a lathe and, through linkage with the lathe axis, completes the creation of microstructures with feature dimensions at the micrometer level on the surface of metal materials.

[0114] like Figure 1 As shown, the present invention includes a compliant guide mechanism assembly 1, a vertical axis normal stress electromagnetic actuator assembly 2, a planar axis normal stress electromagnetic actuator assembly 3, and a housing assembly 4. The front-end planar axis compliant guide mechanism 5 of the compliant guide mechanism assembly 1 is bolted to the front panel 19 of the housing assembly 4. The rear-end planar axis compliant guide mechanism 9 of the compliant guide mechanism assembly 1 is bolted to the rear panel 24 of the housing assembly 4. The front-end vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1 is bolted to the two vertical axis drive armatures 11 of the vertical axis normal stress electromagnetic actuator assembly 2. The planar axis drive shaft 8 of the compliant guide mechanism assembly 1 is bolted to the planar axis drive armature 18 of the planar axis normal stress electromagnetic actuator assembly 3. The two vertical axis magnetic yokes 10 of the vertical axis normal stress electromagnetic actuator assembly 2 are bolted to the vertical axis magnetic yoke support frame 20 of the housing assembly 4. The planar main magnetic yoke 15 of the planar shaft stress electromagnetic actuator assembly 3 is connected to the planar main magnetic yoke support frame 23 of the housing assembly 4 by bolt locking, and the four planar secondary magnetic yokes 14 of the planar shaft stress electromagnetic actuator assembly 3 are connected to the planar secondary magnetic yoke support frame 21 of the housing assembly 4 by bolt locking.

[0115] The compliant guide mechanism assembly includes: a front planar shaft compliant guide mechanism, a front vertical shaft compliant guide mechanism, a rear vertical shaft compliant guide mechanism, a planar shaft drive shaft, and a rear planar shaft compliant guide mechanism, wherein the front planar shaft compliant guide mechanism and the front vertical shaft compliant guide mechanism are connected by bolt locking, the front planar shaft compliant guide mechanism and the planar shaft drive shaft are connected by bolt locking, the front vertical shaft compliant guide mechanism and the rear vertical shaft compliant guide mechanism are connected by bolt locking, and the planar shaft drive shaft and the rear planar shaft compliant guide mechanism are connected by bolt locking.

[0116] The vertical axis normal stress electromagnetic actuator assembly includes: two vertical axis magnetic yokes, two vertical axis drive armatures, two vertical axis permanent magnets, and excitation coils. The vertical axis magnetic yokes and vertical axis permanent magnets are fixed by magnetic attraction. The excitation coils are wound around the two arms of the vertical axis magnetic yokes. The vertical axis drive armatures are connected to the front vertical axis compliant guide mechanism by bolt locking. The vertical axis normal stress actuators are arranged symmetrically on both sides of the front vertical axis compliant guide mechanism, ensuring that an air gap of 0.2 mm is maintained between the two arms of the vertical axis magnetic yokes and the left and right sides of the armatures.

[0117] The planar shaft stress electromagnetic actuator assembly includes: a planar shaft main yoke, four planar shaft secondary yokes, a planar shaft drive armature, four planar shaft permanent magnets, and an excitation coil. The planar shaft drive armature is connected to the planar shaft drive shaft by bolts. The planar shaft permanent magnets are fixed to the planar shaft secondary yokes by magnetic attraction. The excitation coil is wound around the four arms of the planar shaft main yoke. The planar shaft main yoke and planar shaft secondary yokes are arranged symmetrically around the planar shaft drive armature, ensuring a 0.2mm air gap between the four arms of the planar shaft main yoke and the planar shaft drive armature, and a 0.5mm air gap between the two arms of each planar shaft secondary yoke and both sides of the planar shaft drive armature.

[0118] The outer casing assembly includes: a front panel, a rear panel, two vertical axis magnetic yoke support frames, four connecting beams, four planar axis main magnetic yoke support frames, and four planar secondary magnetic yoke support frames. The front panel and rear panel are connected by bolts via the four connecting beams. The two vertical axis magnetic yoke support frames are connected to the connecting beams via bolts. The four planar axis main magnetic yoke support frames are connected to the connecting beams via bolts. The four planar axis secondary magnetic yoke support frames are connected to the rear panel via bolts.

[0119] In the implementation of this invention, after the internal parts of the compliant guide mechanism assembly 1, the vertical axis normal stress electromagnetic actuator assembly 2, the planar axis normal stress electromagnetic actuator assembly 3, and the housing assembly 4 are installed and the connections between the assemblies are made, current is passed through the planar axis excitation coil 17 of the planar axis normal stress electromagnetic actuator assembly 3. The planar axis drive armature 18 of the planar axis normal stress electromagnetic actuator assembly 3 is accelerated and displaced by electromagnetic stress, thereby driving the planar axis transmission shaft 8 of the compliant guide mechanism assembly 1, which in turn drives the diamond tool integrated in the front vertical axis compliant mechanism 6 to perform planar motion. Current is passed through the vertical axis excitation coil 13 of the vertical axis normal stress electromagnetic actuator assembly 2. The two vertical axis drive armatures 11 of the vertical axis normal stress electromagnetic actuator assembly 2 are accelerated and displaced by electromagnetic stress, which in turn drives the front vertical axis compliant guide mechanism 6 of the compliant guide mechanism assembly 1, which in turn drives the diamond tool integrated in the front vertical axis compliant mechanism 6 to perform vertical motion. Through the spatial movement of the diamond tool, the material removal target on the workpiece surface is achieved.

[0120] Those skilled in the art will understand that, besides implementing the system and its various devices, modules, and units provided by this invention in the form of purely computer-readable program code, the same functions can be achieved entirely through logical programming of the method steps, enabling the system and its various devices, modules, and units to function in the form of logic gates, switches, application-specific integrated circuits, programmable logic controllers, and embedded microcontrollers. Therefore, the system and its various devices, modules, and units provided by this invention can be considered a hardware component, and the devices, modules, and units included therein for implementing various functions can also be considered structures within the hardware component; alternatively, the devices, modules, and units for implementing various functions can be considered both software modules implementing the method and structures within the hardware component.

[0121] Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. A three-axis rapid tool servo device driven by electromagnetic stress, characterized in that, include: Compliant guide mechanism assembly (1): used to guide diamond tools; Vertical axis stress electromagnetic actuator assembly (2): used to provide driving force for diamond tools in the vertical axis direction; Planar axis stress electromagnetic actuator assembly (3); used to provide driving force for diamond tools in the planar axis direction; Housing assembly (4): Used to connect the various mechanism components; The front planar compliant guide mechanism (5) of the compliant guide mechanism assembly (1) is fastened to the front panel (19) of the housing assembly (4) by bolt locking. The rear planar compliant guide mechanism (9) of the compliant guide mechanism assembly (1) is fastened to the rear panel (24) of the housing assembly (4) by bolt locking. The front vertical axis compliant guide mechanism (6) of the compliant guide mechanism assembly (1) is connected to the two vertical axis drive armatures (11) of the vertical axis normal stress electromagnetic actuator assembly (2) by bolt locking. The planar drive shaft (8) of the compliant guide mechanism assembly (1) is connected to the planar drive armature (18) of the planar axis normal stress electromagnetic actuator assembly (3) by bolt locking. The two vertical axis magnetic yokes (10) of the vertical axis electromagnetic actuator assembly (2) are connected to the vertical axis magnetic yoke support frame (20) of the housing assembly (4) by bolt locking. The planar main magnetic yoke (15) of the planar stress electromagnetic actuator assembly (3) is connected to the planar main magnetic yoke support frame (23) of the housing assembly (4) by bolt locking. The four planar secondary magnetic yokes (14) of the planar stress electromagnetic actuator assembly (3) are connected to the planar secondary magnetic yoke support frame (21) of the housing assembly (4) by bolt locking. The planar shaft stress electromagnetic actuator assembly (3): It includes: a planar main magnetic yoke (15), four planar secondary magnetic yokes (14), a planar drive armature (18), four planar permanent magnets (16), and a planar excitation coil (17). The planar drive armature (18) is connected to the planar drive shaft (8) by bolt locking. The planar permanent magnets (16) and the planar secondary magnetic yokes (14) are fixed by magnetic attraction. The planar excitation coil (17) is wound around the four arms of the planar main magnetic yoke (15). The planar main magnetic yoke (15) and the planar secondary magnetic yokes (14) are placed around the planar drive armature (18) in an axially symmetrical manner to ensure that the four arms of the planar main magnetic yoke (15) and the planar drive armature (18) maintain a preset air gap. The two arms of each planar secondary magnetic yoke (14) maintain a preset air gap with the two sides of the planar drive armature (18).

2. The three-axis rapid tool servo device with electromagnetic drive according to claim 1, characterized in that, The compliant guide mechanism assembly (1): Includes: front planar shaft compliant guide mechanism (5), front vertical shaft compliant guide mechanism (6), rear vertical shaft compliant guide mechanism (7), planar shaft drive shaft (8) and rear planar shaft compliant guide mechanism (9); Among them: the front planar shaft compliant guide mechanism (5) and the front vertical shaft compliant guide mechanism (6) are connected by bolt locking, the front planar shaft compliant guide mechanism (5) and the planar shaft drive shaft (8) are connected by bolt locking, the front vertical shaft compliant guide mechanism (6) and the rear vertical shaft compliant guide mechanism (7) are connected by bolt locking, and the planar shaft drive shaft (8) and the rear planar shaft compliant guide mechanism (9) are connected by bolt locking.

3. The three-axis rapid tool servo device with electromagnetic drive according to claim 1, characterized in that, The vertical axis normal stress electromagnetic actuator assembly (2): It includes: two vertical axis magnetic yokes (10), two vertical axis drive armatures (11), two vertical axis permanent magnets (12) and vertical axis excitation coils (13), wherein: the vertical axis magnetic yokes (10) and the vertical axis permanent magnets (12) are fixed by magnetic attraction, the vertical axis excitation coils (13) are wound around the two arms of the vertical axis magnetic yokes (10) in a loop manner, the vertical axis drive armatures (11) are connected to the front vertical axis compliant guide mechanism (6) of the compliant guide mechanism assembly (1) by bolt locking, and the vertical axis normal stress electromagnetic actuator assembly (2) is arranged symmetrically on both sides of the front vertical axis compliant guide mechanism (6), and ensures that the two arms of the vertical axis magnetic yokes (10) and the left and right sides of the vertical axis drive armatures (11) retain an air gap with a preset distance.

4. The three-axis rapid tool servo device with electromagnetic drive according to claim 1, characterized in that, The outer casing assembly (4): It includes: a front panel (19), a rear panel (24), two vertical axis magnetic yoke support frames (20), four connecting beams (22), four planar axis main magnetic yoke support frames (23) and four planar axis secondary magnetic yoke support frames (21), wherein: the front panel (19) and the rear panel (24) are connected by bolts through the four connecting beams (22), the two vertical axis magnetic yoke support frames (20) are connected to the connecting beams (22) by bolts, the four planar axis main magnetic yoke support frames (23) are connected to the connecting beams (22) by bolts, and the four planar axis secondary magnetic yoke support frames (21) are connected to the rear panel (24) by bolts.

5. A method of using a three-axis rapid tool servo device driven by electromagnetic stress, characterized in that, The three-axis rapid tool servo device with electromagnetic drive according to any one of claims 1-4 performs the following: Step S1: Complete the internal parts installation and connection between the compliant guide mechanism assembly (1), the vertical axis stress electromagnetic actuator assembly (2), the planar axis stress electromagnetic actuator assembly (3), and the housing assembly (4); Step S2: Current is passed through the plane axis excitation coil (17) of the plane axis normal stress electromagnetic actuator assembly (3), so that the plane axis drive armature (18) of the plane axis normal stress electromagnetic actuator assembly (3) is subjected to electromagnetic stress to generate acceleration and displacement, thereby driving the plane axis transmission shaft (8) of the compliant guide mechanism assembly (1), and driving the diamond tool integrated in the front vertical axis compliant guide mechanism (6) to perform planar motion; Step S3: Current is passed through the vertical axis excitation coil (13) of the vertical axis normal stress electromagnetic actuator assembly (2), so that the two vertical axis drive armatures (11) of the vertical axis normal stress electromagnetic actuator assembly (2) are subjected to electromagnetic stress to generate acceleration and displacement, thereby driving the front vertical axis compliant guide mechanism (6) of the compliant guide mechanism assembly (1), and driving the diamond tool integrated in the front vertical axis compliant guide mechanism (6) to move vertically; Step S4: The material removal target on the workpiece surface is achieved through the spatial movement of the diamond tool.

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