Semiconductor chemical liquid tank cleaning device

Abstract

The application belongs to the technical field of chemical equipment cleaning, and discloses a semiconductor chemical liquid barrel cleaning device, which comprises a casing, a clamping and conveying structure, an internal cleaning structure, an external cleaning structure and a driving structure. In the application, the clamping and conveying structure and the driving structure are matched, the driving motor is started after the liquid barrel enters the casing, the driving motor drives the liquid barrel to rotate, then the cleaning liquid is input into the cleaning spray pipe, the cleaning spray pipe flushes the outer surface of the liquid barrel, when the flushing is completed, the cleaning spray pipe is rotated and moved away from the liquid barrel by using the turning telescopic rod, then the internal cleaning structure is driven by the multi-stage telescopic rod, the internal cleaning structure flushes and rubs the inner wall of the liquid barrel, so that the residues in the liquid barrel are cleaned, and the liquid barrel is clamped and rotated, which prevents the liquid barrel from being tilted during the flushing process and causing the problem that the liquid barrel cannot be continuously cleaned.

Description

Technical Field

[0001] This invention belongs to the field of chemical equipment cleaning technology, specifically a cleaning device for semiconductor chemical liquid tanks. Background Technology

[0002] In semiconductor manufacturing, various chemical solutions are used to assist in production. Over time, residues accumulate on the inner walls of chemical containers. These residues affect the chemical quality and reaction effectiveness of the solutions during storage, leading to increased defect rates and ultimately financial losses. Current methods for cleaning chemical container containers typically involve a combination of equipment to rinse both the inner and outer surfaces. However, cleaning the inner walls requires prolonged rinsing, wasting water. Furthermore, the use of conveyor belts and other moving devices can cause the containers to shift during rinsing, potentially tipping over and preventing them from participating in subsequent cleaning steps, resulting in poor cleaning effectiveness. Summary of the Invention

[0003] The purpose of this invention is to provide a semiconductor chemical liquid tank cleaning device to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, the present invention provides the following technical solution: a semiconductor chemical liquid tank cleaning device, comprising a housing, an opening on the side of the housing, a multi-stage telescopic rod fixedly connected to the inner bottom surface of the housing, and a downward telescopic rod with its telescopic end penetrating through the top surface of the housing, and further comprising:

[0005] A clamping and transporting structure includes a sliding frame and a clamping frame. The top surface of the clamping frame is slidably connected to multiple centrally symmetrical clamping blocks. A toothed ring is fixedly sleeved on the outer surface of the clamping frame. Symmetrical sliding blocks are slidably connected inside the sliding frame. Symmetrical connecting arms are fixedly connected to the top surface of the sliding blocks. A rotating ring is rotatably mounted at the other end of the connecting arm. An annular groove is formed on the bottom surface of the clamping frame, and the rotating ring is located in the annular groove.

[0006] The internal cleaning structure includes a hollow column and a support. The bottom end of the hollow column is fixedly connected to the top of the telescopic end of the multi-stage telescopic rod. The outer surface of the hollow column has two sets of hinge slots with different heights. A bent rod is hinged in the hinge slot. Multiple connecting rods are hinged on the outer surface of the hollow column. The connecting rods have hinge grooves on their sides facing the hollow column. The long end of the bent rod is slidably connected in the hinge groove. When the connecting rod is in a vertical state, the short end of the bent rod is in a horizontal state. A trigger is slidably sleeved inside the hollow column. When the trigger moves downward and contacts the short end of the bent rod, it makes the connecting rod horizontal.

[0007] Preferably, it also includes an external cleaning structure, which includes a rotary joint and a cleaning nozzle. The rotary joint is fixedly connected to the inner side of the housing adjacent to the opening. Its inlet passes through the housing and is connected to an external liquid supply pipe. The bottom end of the cleaning nozzle is fixedly connected to the output end of the rotary joint. The cleaning nozzle is inverted L-shaped and a high-pressure nozzle is fixedly connected to it in the direction facing the center of the housing. A rotating gear is fixedly sleeved on the outer surface of the vertical end of the cleaning nozzle. A through gear groove is opened on the inner side of the housing. The teeth of the rotating gear are located in the gear groove. A first rack is slidably connected inside the gear groove. The first rack meshes with the rotating gear. A steering telescopic rod is fixedly connected to the outer side of the housing. Its telescopic end is fixedly connected to the back of the first rack. After the steering telescopic rod is fully extended, the rotating gear rotates 90 degrees.

[0008] Preferably, it further includes a drive structure, which includes a drive motor fixedly connected to the outer side of the housing away from the opening, the output shaft of which extends into the interior of the housing and is fixedly sleeved with a first helical gear, a rotating shaft is rotatably mounted inside the housing, and a second helical gear and a drive gear are fixedly sleeved on the rotating shaft, the first helical gear and the second helical gear mesh with each other, and the drive gear meshes with the gear ring when the clamping frame is located inside the housing.

[0009] Preferably, the top surface of the clamping frame is provided with a plurality of centrally symmetrical first sliding grooves, the bottom of the clamping block is slidably connected in the first sliding groove, the side of the bottom of the clamping block is elastically connected to the inner side of the first sliding groove with a first spring, the elastic force of the first spring moves the clamping block toward the center of the clamping frame, the top of the clamping block is provided with a sloping sliding surface, and a rubber block is fixedly connected to the side of the clamping block facing the center of the clamping frame.

[0010] Preferably, the outer surface of the hollow column is fixedly connected with a pipe clamp of the same number as the set of hinge slots. A flexible tube is sleeved inside the pipe clamp. One end of the flexible tube passes through the hollow column and is connected to the liquid supply device. Multiple liquid outlets are opened on the side of the bracket corresponding to the hinge slot at the upper height away from the hollow column. The multiple liquid outlets are connected to the flexible tube.

[0011] Preferably, a second groove is formed on the inner surface of the top of the hollow column, a ring is fixedly sleeved on the outer surface of the trigger, the ring is slidably connected in the second groove, a second spring is elastically connected between the bottom surface of the ring and the bottom surface of the second groove, a plurality of centrally symmetrical bottom blocks are fixedly connected to the bottom surface of the trigger, a plurality of centrally symmetrical first grooves are formed on the side of the trigger, and a connecting extrusion groove is formed between the side of the trigger and the side of the bottom blocks.

[0012] Preferably, a pressure rod is slidably connected to the inner side of the hollow column, extending through the hollow column. The pressure rod extends out of the outer surface of the hollow column and is located inside the pipe clamp. A roller is rotatably mounted on one end of the pressure rod inside the hollow column. A third spring is movably sleeved on the outer surface of the pressure rod inside the hollow column. The third spring pushes the pressure rod into the hollow column. When the trigger moves downward, the roller contacts the inner side of the extrusion groove.

[0013] Preferably, the trigger has a sliding rod internally connected to it, and a fourth spring is movably sleeved on the outer surface of the sliding rod. The fourth spring drives the sliding rod to move upward. Multiple pressure plates are fixedly connected to the bottom surface of the sliding rod. The outer side of the pressure plate has an inclined sliding surface. The opposite surfaces of the bottom block each have a transverse sliding groove. A trigger block is slidably connected to two transverse sliding grooves. The top surface of the trigger block has an inclined groove, which corresponds to the inclined sliding surface of the pressure plate. A fifth spring is provided inside the transverse sliding groove, and the fifth spring pushes the trigger block toward the sliding rod.

[0014] Preferably, a bottom cleaning brush is fixedly sleeved on the outer surface of the trigger, the bristle length of the bottom cleaning brush is greater than the length of the sliding rod extending out of the trigger, two magnetic rings are fixedly connected to the outer surface of the hollow column, and a magnetic block is fixedly connected to the side of the connecting rod. When the connecting rod is in a vertical state, the magnetic block is attracted to the side of the magnetic ring.

[0015] Preferably, the bracket has a downward sliding groove on the side near the connecting rod, and a hinged slider is slidably connected inside the downward sliding groove. The connecting rod is hinged to the hinged slider, and a sixth spring is elastically connected between the bottom surface of the hinged slider and the inner bottom surface of the downward sliding groove.

[0016] The beneficial effects of this invention are as follows:

[0017] 1. In this invention, through the cooperation of the clamping and transporting structure and the drive structure, after the medicine tank enters the machine housing, the drive motor is started to make the medicine tank rotate. Then, by inputting cleaning fluid into the cleaning nozzle, the cleaning nozzle washes the outer surface of the medicine tank. After washing is completed, the steering telescopic rod is used to rotate the cleaning nozzle away from the medicine tank. Then, the multi-stage telescopic rod is driven to make the internal cleaning structure wash and rub the inner wall of the medicine tank to clean the residue inside the medicine tank. At the same time, by clamping and rotating the medicine tank, it also prevents it from tipping over during the washing process, which would prevent it from being cleaned further.

[0018] 2. This invention utilizes an internal cleaning structure. A hollow column is controlled to move upwards using a multi-stage telescopic rod. When the bottom cleaning brush contacts the bottom of the medicine container, it cleans it. As the hollow column continues to rise, a trigger is pushed downwards, causing the upper curved rod to rotate. This brings the corresponding support closer to the inner wall of the medicine container. Cleaning fluid is supplied to the hose, spraying out from the outlet and rinsing the inner wall of the medicine container. The brush bristles near the outlet provide friction cleaning to the inner wall during rinsing, improving the cleaning effect. After rinsing, the hollow column continues to rise, causing the trigger to move downwards. This trigger drives the lower curved rod to rotate, bringing the corresponding support closer to the inner wall of the medicine container and scraping it to remove residue and cleaning fluid. At this point, the upper curved rod and its corresponding support retract and fit against the outer surface of the hollow column. After scraping, the multi-stage telescopic rod retracts, and the trigger automatically resets under the drive of the second spring.

[0019] 3. The present invention, through the setting of a sliding rod and a trigger block, allows the sliding rod to be pressed down synchronously when the trigger is pressed down. At this time, the pressure plate pushes the trigger block to move outward, causing the trigger block to push the bent rod to rotate as the trigger moves down, thereby bringing the bracket closer to the inner wall of the medicine tank. When the hollow column descends and the trigger moves up, the sliding rod moves upward under the push of the fourth spring due to the lack of obstruction above, while the trigger block moves towards the sliding rod under the push of the fifth spring. This prevents the trigger block from maintaining contact with the bent rod during the return stroke of the trigger, thus preventing the trigger from failing to return. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 This is a schematic diagram of the left rear view of the present invention;

[0022] Figure 3 This is a cross-sectional view of the outer casing of the present invention;

[0023] Figure 4 For the present invention Figure 3 Enlarged view of point A in the middle;

[0024] Figure 5 This is a cross-sectional view of the clamping and transporting structure of the present invention;

[0025] Figure 6 For the present invention Figure 5 Enlarged view at point B in the middle;

[0026] Figure 7 This is a schematic diagram of the internal cleaning structure of the present invention;

[0027] Figure 8 This is a cross-sectional view of the internal cleaning structure of the present invention;

[0028] Figure 9 This is a cross-sectional view of the hollow column of the present invention;

[0029] Figure 10 For the present invention Figure 9 Enlarged view at point C;

[0030] Figure 11 This is a cross-sectional view of the trigger of the present invention;

[0031] Figure 12 This is a schematic diagram of the base block structure of the present invention;

[0032] Figure 13 This is a schematic diagram of the connecting rod structure of the present invention;

[0033] Figure 14 This is a schematic diagram of the hinge surface of the bracket of the present invention.

[0034] In the diagram: 1. Housing; 11. Multi-stage telescopic rod; 12. Downward telescopic rod; 13. Gear groove; 2. Clamping and transporting structure; 21. Sliding frame; 22. Sliding block; 23. Connecting arm; 24. Rotating ring; 25. Clamping frame; 26. Gear ring; 27. Annular slide groove; 28. Clamping block; 29. ​​Rubber block; 210. First slide groove; 211. First spring; 3. Internal cleaning structure; 31. Hollow column; 32. Hinge groove; 33. Bent rod; 34. Connecting rod; 35. Bracket; 36. Hoses; 37. Liquid outlet; 38. Trigger; 39. Second spring; 310. Magnetic ring; 311. Second slide groove; 312. Pipe clamp; 313. Pressure rod; 314. Third spring; 315. 316. Roller; 317. Ring; 318. First groove; 319. Sliding rod; 310. Fourth spring; 321. Pressure plate; 322. Bottom block; 323. Extrusion groove; 324. Transverse slide groove; 325. Trigger block; 326. Fifth spring; 327. Inclined groove; 328. Magnet block; 329. Hinge slide groove; 330. Downward pressure slide groove; 331. Hinge slider; 332. Sixth spring; 333. Bottom cleaning brush; 41. Rotary joint; 42. Cleaning nozzle; 43. Rotary gear; 44. First rack; 45. Steering telescopic rod; 56. Drive structure; 51. Drive motor; 52. Rotating shaft; 53. First helical gear; 54. Second helical gear; 55. Drive gear. Detailed Implementation

[0035] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0036] like Figures 1 to 14 As shown, this embodiment of the invention provides a semiconductor chemical liquid tank cleaning device, including a housing 1, an opening on the side of the housing 1, a multi-stage telescopic rod 11 fixedly connected to the inner bottom surface of the housing 1, and a downward telescopic rod 12 with its telescopic end penetrating through the top surface of the housing 1 fixedly connected to the top surface of the housing 1, and further including:

[0037] The clamping and transporting structure 2 includes a sliding frame 21 and a clamping frame 25. The top surface of the clamping frame 25 is slidably connected with a plurality of centrally symmetrical clamping blocks 28. A toothed ring 26 is fixedly sleeved on the outer surface of the clamping frame 25. The sliding frame 21 is slidably connected with symmetrical sliding blocks 22. The top surface of the sliding blocks 22 is fixedly connected with symmetrical connecting arms 23. A rotating ring 24 is rotatably installed at the other end of the connecting arm 23. The bottom surface of the clamping frame 25 is provided with an annular groove 27, and the rotating ring 24 is located in the annular groove 27.

[0038] The internal cleaning structure 3 includes a hollow column 31 and a bracket 35. The bottom end of the hollow column 31 is fixedly connected to the top of the telescopic end of the multi-stage telescopic rod 11. The outer surface of the hollow column 31 is provided with two sets of hinge grooves 32 of different heights. A bent rod 33 is hinged in the hinge groove 32. Multiple connecting rods 34 are hinged on the outer surface of the hollow column 31. The connecting rods 34 are provided with hinge grooves 328 on the side facing the hollow column 31. The long end of the bent rod 33 is slidably connected in the hinge groove 328. When the connecting rod 34 is in a vertical state, the short end of the bent rod 33 is in a horizontal state. A trigger 38 is slidably sleeved inside the hollow column 31. When the trigger 38 moves downward and contacts the short end of the bent rod 33, the connecting rod 34 is in a horizontal state.

[0039] In this invention, through the cooperation of the clamping and transporting structure 2 and the driving structure 5, after the medicine tank enters the housing 1, the driving motor 51 is started to rotate the medicine tank. Then, cleaning fluid is introduced into the cleaning nozzle 42, which washes the outer surface of the medicine tank. After washing, the steering telescopic rod 45 is used to rotate the cleaning nozzle 42 away from the medicine tank. Then, the multi-stage telescopic rod 11 is driven to the internal cleaning structure 3, which washes and rubs the inner wall of the medicine tank to clean the residue inside the medicine tank. At the same time, by clamping and rotating the medicine tank, it is also prevented from tipping over during the washing process, which would prevent it from being cleaned further.

[0040] This invention utilizes an internal cleaning structure 3. A multi-stage telescopic rod 11 controls the upward movement of a hollow column 31. When the bottom cleaning brush 332 contacts the bottom surface of the medicine container, it cleans it. As the hollow column 31 continues to rise, a trigger 38 is pushed downward, causing the upper curved rod 33 to rotate. This brings the corresponding support 35 closer to the inner wall of the medicine container. Cleaning fluid is supplied to the hose 36 and sprayed from the outlet 37, rinsing the inner wall of the medicine container. Furthermore, the brush bristles near the outlet 37 effectively clean the inner wall. Simultaneously, the inner wall is rubbed and cleaned to improve the cleaning effect. After rinsing, the hollow column 31 continues to rise, causing the trigger 38 to move down. This causes the trigger 38 to drive the lower bent rod 33 to rotate, bringing the corresponding bracket 35 close to the inner wall of the liquid tank and scraping it to remove residue and cleaning fluid. At this time, the upper bent rod 33 and the corresponding bracket 35 retract and fit against the outer side of the hollow column 31. After scraping, the multi-stage telescopic rod 11 retracts, and the trigger 38 will automatically reset under the drive of the second spring 39.

[0041] The present invention utilizes a sliding rod 318 and a trigger block 324. When the trigger 38 is pressed down, the sliding rod 318 is pressed down synchronously. At this time, the pressure plate 320 pushes the trigger block 324 to move outward, causing the trigger block 324 to push the bent rod 33 to rotate as the trigger 38 moves down. This causes the bracket 35 to approach the inner wall of the medicine tank. When the hollow column 31 descends and the trigger 38 moves up, the sliding rod 318 moves upward under the push of the fourth spring 319 due to the lack of obstruction above. Meanwhile, the trigger block 324 moves towards the sliding rod 318 under the push of the fifth spring 325. This prevents the trigger block 324 from maintaining contact with the bent rod 33 during the return stroke of the trigger 38, thus preventing the trigger 38 from failing to return.

[0042] The system also includes an external cleaning structure, which includes a rotary joint 41 and a cleaning nozzle 42. The rotary joint 41 is fixedly connected to the inner side of the housing 1 adjacent to the opening. Its inlet passes through the housing 1 and is connected to an external liquid supply pipe. The bottom end of the cleaning nozzle 42 is fixedly connected to the output end of the rotary joint 41. The cleaning nozzle 42 is inverted L-shaped and a high-pressure nozzle is fixedly connected to it in the direction facing the center of the housing 1. A rotating gear 43 is fixedly sleeved on the outer surface of the vertical end of the cleaning nozzle 42. A through gear groove 13 is opened on the inner side of the housing 1. The teeth of the rotating gear 43 are located in the gear groove 13. A first rack 44 is slidably connected inside the gear groove 13. The first rack 44 meshes with the rotating gear 43. A steering telescopic rod 45 is fixedly connected to the outer side of the housing 1. Its telescopic end is fixedly connected to the back of the first rack 44. After the steering telescopic rod 45 is fully extended, the rotating gear 43 rotates 90 degrees.

[0043] The system also includes a drive structure 5, which includes a drive motor 51 fixedly connected to the outer side of the housing 1 away from the opening. Its output shaft extends into the interior of the housing 1 and is fixedly sleeved with a first helical gear 53. A rotating shaft 52 is rotatably mounted inside the housing 1. A second helical gear 54 and a drive gear 55 are fixedly sleeved on the rotating shaft 52. The first helical gear 53 and the second helical gear 54 mesh with each other. When the clamping frame 25 is located inside the housing 1, the drive gear 55 meshes with the gear ring 26.

[0044] like Figure 5 As shown, the top surface of the clamping frame 25 is provided with a plurality of centrally symmetrical first sliding grooves 210. The bottom of the clamping block 28 is slidably connected in the first sliding groove 210. The side of the bottom of the clamping block 28 is elastically connected to the inner side of the first sliding groove 210. The elastic force of the first spring 211 moves the clamping block 28 toward the center of the clamping frame 25. The top of the clamping block 28 is provided with a sloping sliding surface. A rubber block 29 is fixedly connected to the side of the clamping block 28 facing the center of the clamping frame 25.

[0045] After the medicine container is clamped in the clamping and transporting structure 2, the first spring 211 applies a pushing force to the clamping block 28, which makes the medicine container centered by the cooperation of multiple clamping blocks 28, preventing the medicine container from flying out during rotation due to misalignment of axes.

[0046] like Figure 7 As shown, the outer surface of the hollow column 31 is fixedly connected with a number of pipe clamps 312 equal to the number of a set of hinge slots 32. A hose 36 is sleeved inside the pipe clamp 312. One end of the hose 36 passes through the hollow column 31 and is connected to the liquid supply device. The support 35 corresponding to the hinge slot 32 at the top has multiple liquid outlets 37 on its side away from the hollow column 31. The multiple liquid outlets 37 are connected to the hose 36. Through the liquid outlets 37 and the hose 36, the cleaning liquid flushes the inner wall of the liquid tank after the support 35 approaches the inner wall of the liquid tank.

[0047] like Figures 8 to 12 As shown, a second groove 311 is provided on the inner surface of the top of the hollow column 31. A ring 316 is fixedly sleeved on the outer surface of the trigger 38. The ring 316 is slidably connected in the second groove 311. A second spring 39 is elastically connected between the bottom surface of the ring 316 and the bottom surface of the second groove 311. A plurality of centrally symmetrical bottom blocks 321 are fixedly connected to the bottom surface of the trigger 38. A plurality of centrally symmetrical first grooves 317 are provided on the side of the trigger 38. A connecting extrusion groove 322 is provided on the side of the trigger 38 and the bottom block 321.

[0048] The first groove 317 is designed so that after the inside of the medicine tank is rinsed, as the scraping step begins, the trigger 38 is pressed down further. At this time, the short end of the upper bent rod 33 lacks push and switches from a vertical to a horizontal state, and enters the first groove 317, preventing the bent rod 33 from obstructing the movement of the trigger 38.

[0049] like Figure 9 and Figure 10 As shown, a pressure rod 313 is slidably connected to the inner side of the hollow column 31, penetrating the hollow column 31. The pressure rod 313 extends out of the outer surface of the hollow column 31 and is located inside the tube clamp 312. A roller 315 is rotatably installed at one end of the pressure rod 313 inside the hollow column 31. A third spring 314 is movably sleeved on the outer surface of the pressure rod 313 inside the hollow column 31. The third spring 314 pushes the pressure rod 313 into the interior of the hollow column 31. When the trigger 38 moves downward, the roller 315 contacts the inner side of the extrusion groove 322.

[0050] When the pressure rod 313 is pressed towards the pipe clamp 312 by the trigger 38, the pressure rod 313 squeezes the hose 36. As the degree of squeezing of the hose 36 by the pressure rod 313 changes, the impact force of the liquid sprayed from the outlet 37 also changes, thereby adjusting the flushing force of the cleaning fluid.

[0051] like Figure 11 and Figure 12 As shown, a sliding rod 318 is slidably connected inside the trigger 38. A fourth spring 319 is movably sleeved on the outer surface of the sliding rod 318. The fourth spring 319 drives the sliding rod 318 to move upward. Multiple pressure plates 320 are fixedly connected to the bottom surface of the sliding rod 318. An inclined sliding surface is opened on the outer side of the pressure plate 320. A transverse sliding groove 323 is opened on the opposite side of the bottom block 321. A trigger block 324 is slidably connected to the two transverse sliding grooves 323. An inclined groove 326 is opened on the top surface of the trigger block 324. The inclined groove 326 corresponds to the inclined sliding surface of the pressure plate 320. A fifth spring 325 is provided inside the transverse sliding groove 323. The fifth spring 325 pushes the trigger block 324 toward the sliding rod 318.

[0052] By using the sliding rod 318, when the trigger 38 moves down, the trigger block 324 moves outward and drives the bent rod 33 to rotate, thereby bringing the bracket 35 closer to the inner wall of the medicine tank. When the trigger 38 moves up, the trigger block 324 is pushed by the fifth spring 325 to move closer to the sliding rod 318 without contacting the bent rod 33, so that the trigger 38 will only drive the bracket 35 closer to the medicine tank when it moves down.

[0053] like Figures 7 to 9 as well as Figure 13As shown, a bottom cleaning brush 332 is fixedly sleeved on the outer surface of the trigger 38. The bristle length of the bottom cleaning brush 332 is greater than the length of the sliding rod 318 extending out of the trigger 38. Two magnetic rings 310 are fixedly connected to the outer surface of the hollow column 31. A magnetic block 327 is fixedly connected to the side of the connecting rod 34. When the connecting rod 34 is in a vertical state, the magnetic block 327 is attracted to the side of the magnetic ring 310.

[0054] By using the magnet block 327 and the magnet ring 310, the bracket 35 is attached to the side of the hollow column 31 when the connecting rod 34 is kept vertical, preventing the bracket 35 from moving or being damaged due to vibrations or other factors during equipment operation, thus preventing the equipment from working properly.

[0055] like Figure 14 As shown, a downward sliding groove 329 is provided on the side of the bracket 35 near the connecting rod 34. A hinged slider 330 is slidably connected inside the downward sliding groove 329. The connecting rod 34 is hinged to the hinged slider 330. A sixth spring 331 is elastically connected between the bottom surface of the hinged slider 330 and the inner bottom surface of the downward sliding groove 329.

[0056] When the bracket 35 is close to the inner wall of the liquid tank, its top surface abuts against the bottom surface of the bottom cleaning brush 332. When adjusting the height of the trigger 38 to adjust the liquid pressure of the outlet 37, the connecting rod 34 is prevented from being damaged by sliding the hinge slider 330 in the downward sliding groove 329.

[0057] Working principle:

[0058] When using this invention to clean the medicine tank, first move the control sliding block 22 to the part of the sliding frame 21 located outside the housing 1. Then, clamp the medicine tank between the three clamping blocks 28 in an upside-down manner. Through the pushing action of the first spring 211, the axis of the medicine tank coincides with the axis of the clamping frame 25, ensuring that the medicine tank will not rotate eccentrically during the rotation of the clamping frame 25. Then, move the control sliding block 22 to the cleaning station inside the housing 1.

[0059] As the sliding block 22 moves the clamping frame 25 into the interior of the housing 1, the gear ring 26 meshes with the drive gear 55. Then, the drive motor 51 is started, causing the clamping frame 25 to rotate, which in turn drives the medicine tank to rotate. At the same time, cleaning fluid is input into the rotary joint 41, causing the cleaning fluid to be sprayed from the high-pressure nozzle on the cleaning nozzle 42 to rinse the outer surface of the medicine tank. After rinsing the outer surface of the medicine tank, the steering telescopic rod 45 is activated, causing it to drive the first rack 44 to move forward and drive the rotating gear 43 to rotate, which in turn causes the cleaning nozzle 42 to rotate, so that the curved part at the top of the cleaning nozzle 42 moves away from the downward telescopic rod 12 above.

[0060] Then, the downward telescopic rod 12 is extended, so that the top of the downward telescopic rod 12 abuts against the outer bottom surface of the medicine tank. Next, the multi-stage telescopic rod 11 is extended, causing the internal cleaning structure 3 to move upward. As the bottom cleaning brush 332 contacts the inner bottom surface of the medicine tank, it aligns and cleans. The internal cleaning structure 3 continues to move upward, causing the sliding rod 318 inside the trigger 38 to be pressed down. At this time, the pressure plate 320 at the bottom of the sliding rod 318 moves downward, and the sliding surface on its side contacts the inclined groove 326, causing the trigger block 324 to be pushed away from the sliding rod 318. This makes the surface of the trigger block 324 away from the sliding rod 318 coplanar with the bottom block 321 and the outer surface of the trigger 38. As the internal cleaning structure 3 continues to move upward, the trigger... When the trigger 38 is pushed downwards, the trigger block 324 contacts the short end of the bent rod 33, causing the bent rod 33 to rotate. This causes the long end of the bent rod 33 to tilt upwards, switching the connecting rod 34 from a vertical state to a parallel state. This causes the bracket 35 to come close to the inner wall of the medicine tank. At this time, cleaning fluid is supplied to the bracket 35 with the outlet 37 through the hose 36 to rinse the inner wall of the medicine tank. Simultaneously, brushing can be performed while rinsing by adding bristles near the outlet 37. By adjusting the downward pressure of the trigger 38, the squeezing groove 322 pushes the roller 315 and the pressure rod 313 outwards by different lengths, causing the pressure rod 313 to squeeze the hose 36, thereby adjusting the pressure of the cleaning fluid after it is sprayed from the outlet 37.

[0061] After rinsing is complete, the multi-stage telescopic rod 11 continues to extend, causing the trigger 38 to continue to move downwards. At this time, the short end of the bent rod 33 enters the first groove 317 opened on the side of the trigger 38. The weight of the bracket 35 drives the bent rod 33 to rotate, thereby causing the connecting rod 34 to switch from a horizontal state to a vertical state. At the same time, the magnet 327 on the bracket 35 is attracted to the magnet ring 310, improving the stability of the bracket 35. Meanwhile, the pressure rod 313 squeezes the hose 36, causing the passage in the hose 36 to be broken, preventing liquid from spraying out after the bracket 35 is retracted. When the trigger 38 contacts the short end of the bent rod 33 located below, it will cause the bent rod 33 to rotate, thereby causing the corresponding connecting rod 34 to switch from a vertical state to a horizontal state. This will cause the corresponding bracket 35 to move closer to the inner wall of the medicine tank. At this time, the bracket 35 will scrape the inner wall of the medicine tank to separate the rinsed substances from the inner wall of the medicine tank.

[0062] After the above cleaning is completed, the multi-stage telescopic rod 11 is retracted. At this time, the trigger 38 is pushed upward by the second spring 39. After the top arc surface of the trigger block 324 contacts the horizontal short end of the upper curved rod 33, the trigger 38 stops. At the same time, because there is no obstruction at the top of the trigger 38, the sliding rod 318 continues to move upward under the push of the fourth spring 319, while the trigger block 324 moves towards the center of the trigger 38 under the push of the fifth spring 325, so that the trigger block 324 no longer contacts the curved rod 33. Thus, the trigger 38 can be pushed upward by the second spring 39 to complete the reset. At this time, all the connecting rods 34 are in a vertical state, so that the bracket 35 is close to the hollow column 31, and the magnet block 327 and the magnet ring 310 are attracted. Then, the sliding block 22 is controlled to slide outward, and the steering telescopic rod 45 is controlled to retract, so as to realize the reset of the device.

[0063] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0064] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A semiconductor chemical liquid tank cleaning device, comprising a housing (1), wherein an opening is provided on the side of the housing (1), a multi-stage telescopic rod (11) is fixedly connected to the inner bottom surface of the housing (1), and a downward telescopic rod (12) with its telescopic end penetrating through the top surface is fixedly connected to the top surface of the housing (1), characterized in that, Also includes: The clamping transport structure (2) includes a sliding frame (21) and a clamping frame (25). The top surface of the clamping frame (25) is slidably connected with a plurality of centrally symmetrical clamping blocks (28). The outer surface of the clamping frame (25) is fixedly sleeved with a toothed ring (26). The interior of the sliding frame (21) is slidably connected with symmetrical sliding blocks (22). The top surface of the sliding blocks (22) is fixedly connected with symmetrical connecting arms (23). The other end of the connecting arms (23) is rotatably mounted with a rotating ring (24). The bottom surface of the clamping frame (25) is provided with an annular groove (27). The rotating ring (24) is located in the annular groove (27). The internal cleaning structure (3) includes a hollow column (31) and a bracket (35). The bottom end of the hollow column (31) is fixedly connected to the top of the telescopic end of the multi-stage telescopic rod (11). The outer surface of the hollow column (31) is provided with two sets of hinge grooves (32) of different heights. A bent rod (33) is hinged in the hinge groove (32). A plurality of connecting rods (34) are hinged on the outer surface of the hollow column (31). The connecting rod (34) is provided with a hinge slide groove (328) on the side facing the hollow column (31). The long end of the bent rod (33) is slidably connected in the hinge slide groove (328). When the connecting rod (34) is in a vertical state, the short end of the bent rod (33) is in a horizontal state. A trigger (38) is slidably sleeved inside the hollow column (31). When the trigger (38) moves downward and contacts the short end of the bent rod (33), the connecting rod (34) is in a horizontal state. It also includes an external cleaning structure, which includes a rotary joint (41) and a cleaning nozzle (42). The rotary joint (41) is fixedly connected to the inner side of the housing (1) adjacent to the opening. Its inlet passes through the housing (1) and is connected to an external liquid supply pipe. The bottom end of the cleaning nozzle (42) is fixedly connected to the output end of the rotary joint (41). The cleaning nozzle (42) is inverted L-shaped and a high-pressure nozzle is fixedly connected to it in the direction of the center of the housing (1). A rotating gear is fixedly sleeved on the outer surface of the vertical end of the cleaning nozzle (42). 43), a through gear groove (13) is provided on the inner side of the housing (1), the teeth of the rotating gear (43) are located in the gear groove (13), a first rack (44) is slidably connected inside the gear groove (13), the first rack (44) meshes with the rotating gear (43), a steering telescopic rod (45) is fixedly connected to the outer side of the housing (1), its telescopic end is fixedly connected to the back of the first rack (44), and the rotating gear (43) rotates 90 degrees after the steering telescopic rod (45) is fully extended; The hollow column (31) has a fixed connection to a number of pipe clamps (312) equal to the number of the set of hinge slots (32) on its outer surface. A hose (36) is sleeved inside the pipe clamp (312). One end of the hose (36) passes through the hollow column (31) and is connected to the liquid supply device. The bracket (35) corresponding to the hinge slot (32) at the top has multiple liquid outlets (37) on its side away from the hollow column (31). The multiple liquid outlets (37) are connected to the hose (36). The inner surface of the top of the hollow column (31) is provided with a second groove (311). The outer surface of the trigger (38) is fixedly fitted with a ring (316). The ring (316) is slidably connected in the second groove (311). A second spring (39) is elastically connected between the bottom surface of the ring (316) and the bottom surface of the second groove (311). The bottom surface of the trigger (38) is fixedly connected with a plurality of centrally symmetrical bottom blocks (321). The side surface of the trigger (38) is provided with a plurality of centrally symmetrical first grooves (317). The side surface of the trigger (38) and the side surface of the bottom blocks (321) are provided with connected extrusion grooves (322). The trigger (38) is internally connected to a sliding rod (318), and a fourth spring (319) is movably sleeved on the outer surface of the sliding rod (318). The fourth spring (319) drives the sliding rod (318) to move upward. Multiple pressure plates (320) are fixedly connected to the bottom surface of the sliding rod (318). An inclined sliding surface is opened on the outer side of the pressure plate (320). A transverse sliding groove (323) is opened on the opposite side of the bottom block (321). A trigger block (324) is slidably connected to the two transverse sliding grooves (323). An inclined groove (326) is opened on the top surface of the trigger block (324). The inclined groove (326) corresponds to the inclined sliding surface of the pressure plate (320). A fifth spring (325) is provided inside the transverse sliding groove (323). The fifth spring (325) pushes the trigger block (324) toward the sliding rod (318). The bracket (35) has a downward sliding groove (329) on the side near the connecting rod (34). A hinged slider (330) is slidably connected inside the downward sliding groove (329). The connecting rod (34) is hinged to the hinged slider (330). A sixth spring (331) is elastically connected between the bottom surface of the hinged slider (330) and the inner bottom surface of the downward sliding groove (329).

2. The semiconductor chemical solution tank cleaning device according to claim 1, characterized in that: It also includes a drive structure (5), which includes a drive motor (51) fixedly connected to the outer side of the housing (1) away from the opening, the output shaft of which extends into the interior of the housing (1) and is fixedly sleeved with a first helical gear (53), a rotating shaft (52) is rotatably mounted inside the housing (1), a second helical gear (54) and a drive gear (55) are fixedly sleeved on the rotating shaft (52), the first helical gear (53) and the second helical gear (54) mesh with each other, and the drive gear (55) meshes with the gear ring (26) when the clamping frame (25) is located inside the housing (1).

3. The semiconductor chemical solution tank cleaning device according to claim 2, characterized in that: The top surface of the clamping frame (25) is provided with a plurality of centrally symmetrical first sliding grooves (210). The bottom of the clamping block (28) is slidably connected in the first sliding groove (210). A first spring (211) is elastically connected between the side of the bottom of the clamping block (28) and the inner side of the first sliding groove (210). The elastic force of the first spring (211) moves the clamping block (28) toward the center of the clamping frame (25). The top of the clamping block (28) is provided with a sloping sliding surface. A rubber block (29) is fixedly connected to the surface of the clamping block (28) facing the center of the clamping frame (25).

4. The semiconductor chemical solution tank cleaning device according to claim 3, characterized in that: A pressure rod (313) is slidably connected to the inner side of the hollow column (31), extending through the hollow column (31). The pressure rod (313) extends out of the outer surface of the hollow column (31) and is located inside the pipe clamp (312). A roller (315) is rotatably installed at one end of the pressure rod (313) inside the hollow column (31). A third spring (314) is movably sleeved on the outer surface of the pressure rod (313) inside the hollow column (31). The third spring (314) pushes the pressure rod (313) into the hollow column (31). When the trigger (38) moves downward, the roller (315) contacts the inner side of the extrusion groove (322).

5. The semiconductor chemical solution tank cleaning device according to claim 4, characterized in that: A bottom cleaning brush (332) is fixedly sleeved on the outer surface of the trigger (38). The bristle length of the bottom cleaning brush (332) is greater than the length of the sliding rod (318) extending out of the trigger (38). Two magnet rings (310) are fixedly connected to the outer surface of the hollow column (31). A magnet block (327) is fixedly connected to the side of the connecting rod (34). When the connecting rod (34) is in a vertical state, the magnet block (327) is attracted to the side of the magnet ring (310).

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