Magnetic suspension turntable integrating displacement measurement and suspension control

Abstract

The invention discloses a magnetic suspension turntable integrating displacement measurement and suspension control. The magnetic suspension turntable comprises a stator, a rotor and an axial radial position measuring unit. The rotor comprises a first rim. The stator comprises a first suspension control component. The first suspension control component comprises two stator substrates A. The stator magnetic poles A on the two stator substrates A are staggered and cross-arranged along the circumference of the rotor. The axial radial position measuring unit comprises two magnetic cores, an excitation coil group and an induction coil group. The two magnetic cores are arranged along the axial direction of the rotor. The excitation coil group comprises at least one excitation coil. The induction coil group comprises at least two induction coils. An induction coil is sleeved outside each magnetic core. The excitation coil is sleeved outside two magnetic cores together. One magnetic core is magnetically connected to a stator substrate A. A first magnetic yoke is arranged around the magnetic core. Another magnetic core is integrally formed with the stator magnetic poles A of another stator substrate A. The excitation coil is configured to detect the radial displacement of the rotor. The two induction coils are configured to detect the axial displacement of the rotor.

Description

Technical Field

[0001] The invention relates to the technical field of magnetic suspension, in particular to a magnetic suspension turntable integrating displacement measurement and suspension control. Background Art

[0002] In semiconductor manufacturing, on the one hand, the cleanliness of the wafer is very important, because the cleanliness of the wafer surface will affect the qualification rate of subsequent semiconductor processes and products. In order to achieve ultra-clean requirements, wafers of silicon or other semiconductor materials must be processed in a controlled ultra-clean atmosphere. For example, in the wafer manufacturing process, one manufacturing step is to anneal the wafer after ion implantation. Doping imposes strain on the crystal structure. If the stress cannot be released quickly, it will cause undesirable changes in the resistivity of the ion doping. At present, rapid thermal processing (RT) is usually used for annealing. On the other hand, the processing uniformity of the wafer is very important. In order to produce uniformity, the wafer is usually rotated around the vertical axis or z-axis of the center of the wafer when processing the wafer. Rotation is also used for other wafer processing, such as chemical vapor deposition, heat treatment, ion implantation doping and other technical doping. In order to meet the stringent requirements of ultra-cleanliness and processing uniformity in semiconductor process manufacturing, semiconductor processing equipment preferably uses a magnetic levitation turntable with contactless rotation drive. The magnetic levitation turntable includes a stator and a rotor, and the stator is used to generate a magnetic field to drive the rotor and the carrier to rotate and suspend. According to the relative position difference between the stator and the rotor, the magnetic levitation turntable can be divided into an inner rotor magnetic levitation turntable and an outer rotor magnetic levitation turntable.

[0003] In order to achieve stable suspension of the rotor, accurate position information of the rotor must be provided to the control system. Generally, the required rotor position information is obtained by non-contact displacement sensor technology. At present, the position sensor of the magnetic suspension turntable includes multiple axial sensors and multiple radial sensors. The position sensor includes a sensor probe, which is radially or axially mounted on the vacuum cavity of the semiconductor processing equipment. The vacuum cavity is used to form a closed cavity with the semiconductor processing equipment to isolate the rotor and the stator, so that the rotor rotates in the closed vacuum cavity. However, when the position sensor is assembled on the cavity wall and cavity bottom of the vacuum cavity, it is necessary to form a through hole on the vacuum cavity and use a sealing ring for sealing. Due to the ultra-clean and high-temperature environment requirements of the semiconductor processing equipment, the sealing ring needs to use a high-temperature resistant fluororubber sealing ring (high cost), and needs to be replaced after a long time of use, which leads to a high cost of assembling the position sensor, and the installation process of replacing the sealing ring of the position sensor is cumbersome, and there are problems such as calibration and installation errors of the sensor reassembly and poor sealing. In addition, the multiple connecting cables of the multiple position sensors are scattered around the rotor, the wiring is messy, and it is not convenient to set up and control the sensor cables and the sensor conditioning circuit. Summary of the invention

[0004] In order to overcome the defects in the prior art, an embodiment of the present invention provides a magnetic levitation turntable integrating displacement measurement and suspension control, which is used to solve at least one of the above problems.

[0005] The embodiment of the present disclosure discloses a magnetic suspension turntable integrating displacement measurement and suspension control, comprising a stator and a rotor, wherein the rotor has a first rim protruding toward the stator, and the stator comprises a first suspension control component, wherein the first suspension control component is configured to apply an axially actively controlled suspension force to the first rim, and the first suspension control component comprises two stacked stator substrates A, wherein each of the stator substrates A has a plurality of stator magnetic poles A spaced apart along the circumference of the rotor formed on one side facing the rotor, and the stator magnetic poles A on the two stator substrates A are staggered and cross-arranged along the circumference of the rotor, and further comprises an axial radial position measurement unit, wherein the axial radial position measurement unit It includes two magnetic cores, an excitation coil group and an induction coil group, the two magnetic cores are marked as a first magnetic core and a second magnetic core, the two magnetic cores are arranged along the axial direction of the rotor, the excitation coil group includes at least one excitation coil, the induction coil group includes at least two induction coils, the induction coil is sleeved outside each of the magnetic cores, and the excitation coil is sleeved outside the two magnetic cores together, the first magnetic core is magnetically connected to a stator substrate A, and a first magnetic yoke is provided around the first magnetic core, the second magnetic core is integrally formed with the stator pole A of another stator substrate A, the excitation coil is configured to detect the radial displacement of the rotor, and the two induction coils are configured to detect the axial displacement of the rotor.

[0006] Furthermore, the excitation magnetic field of the excitation coil forms a first magnetic circuit via the two magnetic cores, the first ring edge, the stator pole A and the first magnetic yoke; the induced magnetic field of one induction coil forms a second magnetic circuit via the first magnetic core, the first ring edge and the first magnetic yoke; and the induced magnetic field of the other induction coil forms a third magnetic circuit via the second magnetic core, the first ring edge and the stator pole A.

[0007] Furthermore, a first groove is formed on the stator pole A of the other stator substrate A on a side facing the first ring edge, and the first groove defines the second magnetic core on the stator pole A.

[0008] Furthermore, a second groove is formed on the stator pole A of the other stator substrate A on a side facing the rotor, and the first groove and the second groove define two second yokes on the stator pole A.

[0009] Further, the induction coil group includes two induction coils, one of the two induction coils is sleeved on the first magnetic core, and the other is sleeved on the second magnetic core; or the induction coil group includes four induction coils, two of the four induction coils are connected in series and are respectively sleeved on the first magnetic core and one of the first magnetic yokes, the magnetic field generated by the induction coil on the first magnetic core is superimposed and enhanced with the magnetic field generated by the induction coil on the first magnetic yoke, the other two are connected in series and are respectively sleeved on the second magnetic core and one of the second magnetic yokes, the magnetic field generated by the induction coil on the second magnetic core is superimposed and enhanced with the magnetic field generated by the induction coil on one of the second magnetic yokes; or the induction coil group includes six induction coils, three of the six induction coils are connected in series and are respectively sleeved on the first magnetic core and two of the first magnetic yokes, the magnetic field generated by the induction coil on the first magnetic core is superimposed and enhanced with the magnetic field generated by the induction coil on the two first magnetic yokes, the other three are connected in series and are respectively sleeved on the second magnetic core and two of the second magnetic yokes, the magnetic field generated by the induction coil on the second magnetic core is superimposed and enhanced with the magnetic field generated by the induction coil on the two second magnetic yokes.

[0010] Furthermore, both the first groove and the second groove extend from the end surface of the stator pole A in a direction away from the rotor, and the length of the second groove is greater than or equal to the length of the first groove.

[0011] Furthermore, the cross-sections of the second magnetic core and the second magnetic yoke are both square, the axial height of the second magnetic core is the same as the axial height of the second magnetic yoke, and the lower surface of the second magnetic core is flush with the lower surface of the second magnetic yoke, and the cross-sectional area of ​​the second magnetic core is 1-3 times the cross-sectional area of ​​the second magnetic yoke.

[0012] Furthermore, the stator substrate A extends toward one side of the rotor to form a magnetic conductor, and a third groove is formed on the magnetic conductor. The third groove defines the first magnetic core and two first magnetic yokes on the magnetic conductor, and the two first magnetic yokes are respectively arranged on the left and right sides of the first magnetic core.

[0013] Furthermore, the axial height of the first magnetic core is the same as the axial height of the first magnetic yoke, the upper surface of the first magnetic core is flush with the upper surface of the first magnetic yoke, and the cross-sectional area of ​​the first magnetic core is 1-3 times the cross-sectional area of ​​the first magnetic yoke.

[0014] Furthermore, the shape and size of the second magnetic core are the same as those of the first magnetic core.

[0015] Furthermore, the axial height of the first ring edge is between the lower surface of the second magnetic core and the upper surface of the first magnetic core, and the range of axial movement of the first ring edge is: the upper surface of the first ring edge does not exceed the upper surface of the first magnetic core, and the lower surface of the first ring edge does not exceed the lower surface of the second magnetic core.

[0016] Furthermore, each of the stator substrates A is provided with three or four stator poles A equally spaced along the circumferential direction of the rotor on one side facing the rotor, the stator pole A on one stator substrate A is marked as a first stator pole, and the stator pole A on the other stator substrate A is marked as a second stator pole, the first stator pole and the second stator pole are axially staggered, and in the circumferential direction, a second stator pole is arranged between two adjacent first stator poles, and a first stator pole is arranged between two adjacent second stator poles.

[0017] Furthermore, it includes 4 axial radial position measurement units, which are correspondingly arranged on the 4 first stator poles or the 4 second stator poles, and the 4 axial radial position measurement units are divided into two mutually orthogonal groups, and each group includes two axial radial position measurement units which are radially symmetrically arranged.

[0018] Furthermore, it comprises three axial radial position measuring units, the three axial radial position measuring units are correspondingly arranged on the three first stator poles or the three second stator poles, and the three axial radial position measuring units are evenly distributed in the circumferential direction.

[0019] Furthermore, it also includes a second suspension control component, which is configured to apply a radial suspension force to the rotor. The second suspension control component includes a stator substrate B, a plurality of stator poles B protruding from the stator substrate B toward the rotor, and a control winding B arranged on the stator poles B. The plurality of stator poles B are evenly arranged in the circumferential direction and extend in the circumferential direction.

[0020] Furthermore, it also includes a permanent magnet device, which is configured as a permanent magnet ring, and the permanent magnet ring is clamped between the first suspension control component and the second suspension control component; or, the permanent magnet device is configured to include multiple permanent magnet components, the multiple permanent magnet components are evenly arranged in the circumferential direction, and the multiple permanent magnet components are clamped between the first suspension control component and the second suspension control component.

[0021] Furthermore, a plurality of motor slots are formed on one side of the stator magnetic pole B facing the rotor, motor teeth are formed between two adjacent motor slots, and a rotation control winding is provided in the motor slot.

[0022] The beneficial effects of the present invention are as follows: Compared with the prior art, the present invention forms a magnetic suspension turntable with an integrated design of displacement measurement and suspension control. By integrating an axial radial position measurement unit on the stator magnetic pole A and the stator substrate A of the first suspension control component, the radial displacement of the rotor is measured by an excitation coil, and the axial displacement of the rotor is measured by two induction coils or two groups of induction coils, so that the function of measuring the radial and axial displacements of the rotor can be realized. At the same time, the displacement measurement is integrated with the stator of the magnetic suspension turntable. With the help of the first ring edge of the rotor, the axial radial position measurement unit can detect the position information of the rotor through the cavity wall of the vacuum cavity, thereby realizing the organic combination of the rotor position detection and the stator structure, with a compact structure and high sensitivity. Since the two induction coils or two groups of induction coils for measuring the axial displacement of the rotor are located at the same angular position on the circumference of the rotor, the calculation amount of the processor during the axial displacement measurement can be reduced. The embodiment of the present invention does not need to make a through hole on the vacuum chamber and use a fluororubber sealing ring, nor does it need to replace the sealing ring. It solves the problems of recalibration and installation errors after assembling the sensor, can better meet the ultra-clean and high-temperature environment requirements of semiconductor processing equipment, can solve the problem of messy cable connections of multiple position sensors, and can greatly reduce the number of sensors used in the magnetic levitation turntable.

[0023] In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 It is a structural schematic diagram of an embodiment of a magnetic suspension turntable in the prior art;

[0026] Figure 2 The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 1 ;

[0027] Figure 3 The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 2 ;

[0028] Figure 4 It is a structural schematic diagram of a first suspension control component in an embodiment of a magnetic suspension turntable of the present invention;

[0029] Figure 5The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 3 ;

[0030] Figure 6 yes Figure 5 Schematic diagram of the structure of an embodiment of the shaft radial position measurement unit at A Figure 1 ;

[0031] Figure 7 The structure of an embodiment of a shaft radial position measuring unit is shown in FIG. Figure 2 ;

[0032] Figure 8 is a schematic diagram of the change in magnetic flux of the induction coil of the shaft radial position measurement unit when the rotor moves axially downward in an embodiment of the present invention;

[0033] Fig. 9 is a schematic diagram of the change in magnetic flux of the induction coil of the shaft radial position measurement unit when the rotor moves axially upward in an embodiment of the present invention;

[0034] Fig.10 The structure of another embodiment of the central axis radial position measuring unit of the present invention is shown in FIG. Figure 1 ;

[0035] Fig.11 It is a structural schematic diagram of another embodiment of the magnetic suspension turntable of the present invention;

[0036] Fig.12 yes Fig.11 A schematic diagram of the structure of an embodiment of a shaft radial position measurement unit at B;

[0037] Fig.13 It is a schematic structural diagram of a rotor in an embodiment of a magnetic suspension turntable of the present invention;

[0038] Fig.14 It is a schematic structural diagram of a stator in an embodiment of a magnetic suspension turntable of the present invention;

[0039] Fig.15 It is a structural schematic diagram of a stator in another embodiment of the magnetic suspension turntable of the present invention;

[0040] Fig.16 It is a structural schematic diagram of a second suspension control assembly in an embodiment of a magnetic suspension turntable of the present invention; DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. The terms "including" and "having" and any variations thereof in the specification and claims of the present invention and the above-mentioned drawings are intended to cover non-exclusive inclusions, for example, a system, product or device comprising a series of units is not necessarily limited to those units clearly listed, but may include other units that are not clearly listed or inherent to these products or devices.

[0043] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more, unless otherwise clearly specified.

[0044] The drawings in this disclosure are not drawn strictly according to the actual scale, and the specific size and quantity of each structure can be determined according to actual needs. The drawings described in this disclosure are only schematic diagrams.

[0045] In the prior art, see Figure 1 An embodiment of a magnetic suspension turntable includes a rotor 2 and a stator 1, wherein the stator 1 is arranged around the rotor 2 or the rotor 2 is arranged around the stator 1. Figure 1The example shows an inner rotor situation in which the stator 1 is arranged around the rotor 2. The stator 1 includes at least two magnetic stator substrates 112' and a permanent magnet 111'. The permanent magnet 111' is clamped between the two magnetic stator substrates 112' in the axial direction of the stator to provide a permanent magnetic bias magnetic field. The stator 1 also includes a plurality of stator poles and a plurality of winding coils. The plurality of winding coils include a plurality of rotating windings for rotation drive control and a plurality of suspension windings for suspension control. The rotation and suspension control principle of the magnetic suspension turntable can be referred to patent documents CN124210580A and CN126207927A, which will not be repeated here. In particular, the magnetic levitation turntable also includes a vacuum chamber 130', which includes an inner ring body 131' (inner chamber wall), an outer ring body 132' (outer chamber wall) and a connecting plate 133' (chamber bottom) connecting the bottom of the inner ring body 131' and the bottom of the outer ring body 132', and a U-shaped annular space is formed between the inner ring body 131' and the outer ring body 132' to accommodate the rotor 2, wherein the outer ring body 132' is a thin wall for isolating the stator 1 and the rotor 2. The position sensor of the magnetic suspension turntable includes multiple axial sensors and multiple radial sensors. The position sensor includes a sensor probe, which is radially or axially mounted on the vacuum chamber of the semiconductor processing equipment. The vacuum chamber is used to form a closed chamber with the semiconductor processing equipment to isolate the rotor and the stator, so that the rotor rotates and works in the closed vacuum chamber. However, when the position sensor is assembled on the inner wall and the bottom of the vacuum chamber, it is necessary to form a through hole on the vacuum chamber and use a sealing ring for sealing. Due to the ultra-clean and high-temperature environment requirements of the semiconductor processing equipment, the sealing ring needs to use a high-temperature resistant fluororubber sealing ring (high cost), and needs to be replaced after a long time of use, which leads to a high cost of assembling the position sensor, and the installation process of replacing the sealing ring of the position sensor is cumbersome, and there are problems such as calibration and installation errors of the sensor reassembly, poor sealing, etc. In addition, the multiple connecting cables of the multiple position sensors are scattered around the rotor, the wiring is messy, and it is not convenient to set up and control the sensor cables and the sensor conditioning circuit.

[0046] In order to solve the above problems, the present invention provides a magnetic suspension turntable with an integrated design of displacement measurement and suspension control. By integrating an axial radial position measurement unit on the stator magnetic pole A and the stator substrate A of the first suspension control component, the radial displacement of the rotor is measured by the excitation coil, and the axial displacement of the rotor is measured by two induction coils or two groups of induction coils, so that the function of measuring the radial and axial displacements of the rotor can be realized. At the same time, the displacement measurement is integrated with the stator of the magnetic suspension turntable. With the help of the first ring edge of the rotor, the axial radial position measurement unit can detect the position information of the rotor through the cavity wall of the vacuum cavity, thereby realizing the organic combination of the rotor position detection and the stator structure, with a compact structure and high sensitivity. Since the two induction coils or two groups of induction coils for measuring the axial displacement of the rotor are located at the same angular position on the circumference of the rotor, the calculation amount of the processor during the axial displacement measurement can be reduced. The embodiment of the present invention does not need to make a through hole on the vacuum cavity and use a fluororubber sealing ring, and does not need to replace the sealing ring, so as to solve the problems of recalibration and installation errors after assembling the sensor, and can better meet the ultra-clean and high-temperature environment requirements of semiconductor processing equipment, and can solve the problem of messy cable connections of multiple position sensors, and can also greatly reduce the number of sensors used in the magnetic suspension turntable.

[0047] In order to enable those skilled in the art to better understand the present invention, Figure 2-16 The present invention is further described in detail with specific implementation modes.

[0048] Figure 2 The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 1 ; Figure 3 The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 2 ; Figure 4 is a structural schematic diagram of a first suspension control component in an embodiment of a magnetic suspension turntable of the present invention, Figure 5 The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 3 ; Figure 6 yes Figure 5 Schematic diagram of the structure of an embodiment of the shaft radial position measurement unit at A Figure 1 ; Figure 7 The structure of an embodiment of a shaft radial position measuring unit is shown in FIG. Figure 2 ;

[0049] According to the embodiment of the present disclosure, see Figure 2-Figure 7A magnetic suspension turntable integrating displacement measurement and suspension control, comprising a stator 1 and a rotor 2, wherein the rotor 2 has a first rim 22 protruding toward the stator 1, and the stator 1 comprises a first suspension control component 12, wherein the first suspension control component 12 is configured to apply an axially actively controlled suspension force to the first rim 22, and the first suspension control component 12 comprises two stacked stator substrates A, which are respectively denoted as a first stator substrate 1210 and a second stator substrate 1220, and each stator substrate A has a plurality of stator substrates arranged at intervals along the circumference of the rotor 2 on one side thereof facing the rotor 2. Magnetic poles A, the stator magnetic poles A on the two stator substrates A are staggered and cross-arranged along the circumference of the rotor 2, the stator magnetic poles A on the first stator substrate 1210 are marked as the first stator magnetic poles 1211, and the stator magnetic poles A on the second stator substrate are marked as the second stator magnetic poles 1221, the first stator magnetic poles 1211 and the second stator magnetic poles 1221 are staggered along the axial direction of the rotor, along the circumference of the rotor, a second stator magnetic pole 1221 is arranged between the two first stator magnetic poles 1211, and a first stator magnetic pole 1211 is arranged between the two second stator magnetic poles 1221. The magnetic suspension turntable also includes an axial radial position measurement unit 3, see Figure 5 , Figure 6 and Figure 7 The shaft radial position measuring unit 3 includes two magnetic cores, which are denoted as a first magnetic core 311 and a second magnetic core 312. The two magnetic cores are arranged along the axial direction of the rotor 2. Figure 7The example in the figure shows that the second magnetic core 312 is axially below the first magnetic core 311. Each magnetic core is provided with an induction coil 32, and the two magnetic cores are provided with an excitation coil 33. The first magnetic core 311 is magnetically connected to a stator substrate A, for example, the first magnetic core 311 is magnetically connected to the second stator substrate 1220, wherein the magnetic connection means that the first magnetic core 311 and the second stator substrate 1220 can be mutually magnetically conductive. A first magnetic yoke 313 is provided around the first magnetic core 311, and the second magnetic core 312 is integrally formed with the stator pole A of another stator substrate A121, for example, the second magnetic core 312 is integrally formed with the first stator pole 1211 of the first stator substrate 1210, wherein the integral forming means that the second magnetic core 312 is directly formed on the first stator pole 1211 of the first stator substrate 1210. The excitation coil 33 is configured to detect the radial displacement of the rotor, and the two induction coils 32 are configured to detect the axial displacement of the rotor. In this way, the mutual induction magnetic field between the excitation coil and the induction coil changes when the rotor undergoes radial or axial displacement. The radial displacement of the rotor is measured by the excitation coil, and the axial displacement of the rotor is measured by the two induction coils, so that the function of measuring the radial and axial displacements of the rotor can be realized. At the same time, the displacement measurement is integrated with the stator of the magnetic suspension turntable. With the help of the first ring edge of the rotor, the radial position measurement unit of the shaft can detect the position information of the rotor through the cavity wall of the vacuum cavity, thereby realizing the organic combination of the rotor position detection and the stator structure, with a compact structure and high sensitivity. Since the two induction coils for measuring the axial displacement of the rotor are located at the same angular position on the circumference of the rotor, the amount of calculation of the processor during the axial displacement measurement can be reduced. The embodiment of the present invention does not need to make a through hole on the vacuum cavity and use a fluororubber sealing ring, nor does it need to replace the sealing ring, which solves the problems of recalibration and installation errors after assembling the sensor, can better meet the ultra-clean and high-temperature environment requirements of semiconductor processing equipment, and can solve the problem of messy cable connections of multiple position sensors, and can also greatly reduce the number of sensors used in the magnetic suspension turntable.

[0050] According to the embodiment of the present disclosure, see Figure 6 and Figure 7 , the excitation magnetic field of the excitation coil 33 passes through two magnetic cores, the first ring edge 22, the stator magnetic pole A (for example, the second stator magnetic pole 1221) and the first magnetic yoke 313 to form a first magnetic circuit; the induced magnetic field of one of the induction coils 32 passes through the first magnetic core 311, the first ring edge 22, the first magnetic yoke 313 to form a second magnetic circuit, and the induced magnetic field of the other induction coil 32 passes through the second magnetic core 312, the first ring edge 22, the stator magnetic pole A (for example, the second stator magnetic pole 1221) to form a third magnetic circuit. In this way, the principle of measuring the radial displacement of the rotor by the excitation coil is as follows: see Figure 7, because the excitation coil covers the height of the first ring edge of the rotor in the axial direction, when the rotor moves radially, the magnetic flux density of the excitation coil remains constant, and the magnetomotive force follows the change of magnetic resistance. The change of magnetic resistance depends on the air gap between the first ring edge of the rotor and the magnetic core of the excitation coil, and the change of magnetomotive force caused by the change of air gap is approximately linearly related to the radial displacement of the rotor. Therefore, the radial displacement of the rotor can be detected based on the magnetomotive force (current) output of the excitation coil. The principle of measuring the axial displacement of the rotor through two induction coils is as follows: see Figure 8 and Fig. 9 When the first ring edge of the rotor is located in the middle of the two induction coils, the magnetic flux density of the two induction coils is the same, and the voltage of the differential output of the two induction coils is zero; when the rotor moves axially downward or upward, one induction coil (for example Figure 8 The induction coil in the lower middle or Fig. 9 The magnetic flux density of the induction coil in the upper middle) increases, and the magnetic flux density of the other induction coil (for example Figure 8 The induction coil in the upper middle or Fig. 9 The magnetic flux density of the induction coil in the middle and lower part decreases, and the magnetic flux density of the two induction coils changes and is no longer equal. The value of the differential output is no longer 0, but is approximately linearly related to the axial displacement of the rotor. Therefore, the axial displacement of the rotor can be detected based on the differential output of the two induction coils.

[0051] According to the embodiment of the present disclosure, see Figure 5 , Figure 6 and Figure 7, a first groove 314 is formed on the stator pole A of the other stator substrate A on the side facing the first ring edge 22, and the first groove 314 defines a second magnetic core 312 on the stator pole A. In this way, by defining the second magnetic core through the first groove, the induction coil and the excitation coil can be directly integrated on the stator pole A to form an inductive sensor, without the need to configure a sensor housing, an iron core, and other coil fixing structures. Since the stator poles A on the two stator substrates A are alternately arranged in the circumferential direction and do not overlap in the rotor axial direction, it is only necessary to define the magnetic core on one stator pole A through the groove. In this embodiment, an example is given in which a second magnetic core 312 is defined by a groove on the second stator magnetic pole 1221 of the second stator substrate 1220, and a first magnetic core and a first magnetic yoke are formed above the second magnetic core along the axial direction of the rotor. The first magnetic core and the first magnetic yoke are directly connected to the first stator substrate 1210 or connected through a magnetic conductive material. For example, the first magnetic core and the first magnetic yoke are integrally formed with the first stator substrate 1210 through a silicon steel sheet. However, it is not limited to this. In other embodiments, the second magnetic core 312 can also be defined by a groove on the first stator magnetic pole 1211 of the first stator substrate 1210. At this time, the second magnetic core 312 is axially above the first magnetic core 311. In this embodiment, an embodiment is provided in which a groove is formed on the stator magnetic pole A to define the second magnetic core, so that the structural parameters of the original first suspension control component (for example, the design parameters of the air gap between the stator magnetic pole A and the first ring edge) can be maintained. Since the stator substrate A and the stator pole A are used for magnetic conduction and are usually made of silicon steel sheets, the groove structure can be formed by designing the structure of a single-layer silicon steel sheet and then stacking multiple layers of silicon steel sheets.

[0052] According to the embodiment of the present disclosure, a second groove 315 is formed on the stator magnetic pole A of the other stator substrate A on the side facing the rotor, and the first groove 314 and the second groove 315 define two second magnetic yokes 316 on the stator magnetic pole A. In this way, the second magnetic yoke is defined by the first and second grooves, and the magnetic circuit of the induction coil and the excitation coil passes through the second magnetic yoke, which plays a role in magnetic conduction and magnetic concentration, thereby reducing the diffusion of the excitation magnetic field and the induced magnetic field on the stator magnetic pole A. Preferably, see Figure 6 , the first groove 314 and the second groove 315 both extend from the end surface of the stator magnetic pole A in the direction away from the rotor 2, and the length of the second groove 315 is greater than or equal to the length of the first groove 314. In this way, the magnetic lines of force generated by the induction coil and the excitation coil can be better returned to the S stage from the N stage through the second magnetic yoke, and play a better role in magnetic conduction and magnetic concentration. The present invention does not limit the width of the second groove along the circumferential direction of the rotor with the first groove. Preferably, the width of the second groove along the circumferential direction of the rotor is smaller than the width of the first groove along the circumferential direction of the rotor.

[0053] In the above embodiment, an embodiment of one excitation coil and two induction coils is provided. However, it is not limited thereto. In other embodiments, the shaft radial position measurement unit may also include an excitation coil group and an induction coil group, wherein the excitation coil group includes at least one excitation coil 33, and the induction coil group includes at least two induction coils 32.

[0054] According to the embodiment of the present disclosure, see Fig.10 , the axial radial position measurement unit 3 may also include 1 excitation coil and 6 induction coils, that is, the induction coil group includes 6 induction coils, 3 of the 6 induction coils are connected in series and are respectively mounted on the first magnetic core 311 and the two first magnetic yokes 313, the magnetic field generated by the induction coil on the first magnetic core is superimposed and enhanced with the magnetic field generated by the induction coils on the two first magnetic yokes, the other 3 are connected in series and are respectively mounted on the second magnetic core 312 and the two second magnetic yokes 316, the magnetic field generated by the induction coil on the second magnetic core is superimposed and enhanced with the magnetic field generated by the induction coils on the two second magnetic yokes. In other embodiments, the induction coil group may also include 4 induction coils, 2 of the 4 induction coils are connected in series and are respectively mounted on the first magnetic core and one of the first magnetic yokes, the magnetic field generated by the induction coil on the first magnetic core is superimposed and enhanced with the magnetic field generated by the induction coil on the first magnetic yoke, the other 2 are connected in series and are respectively mounted on the second magnetic core and one of the second magnetic yokes, the magnetic field generated by the induction coil on the second magnetic core is superimposed and enhanced with the magnetic field generated by the induction coil on one of the second magnetic yokes. In this way, by adding induction coils to the first magnetic yoke and the second magnetic yoke, and superimposing and enhancing the magnetic field generated by the induction coils on the magnetic yoke and the magnetic field generated by the induction coils on the magnetic core, the output signal of the induction coils, such as the output voltage or the output current, can be enhanced, thereby achieving the purpose of improving the sensitivity of the axial radial position measurement unit to detect axial displacement.

[0055] In the above embodiments, an excitation coil is arranged on the magnetic core, but it is not limited to this. In other embodiments, one excitation coil or two excitation coils can be arranged on the first magnetic yoke and the second magnetic yoke, or excitation coils can be arranged on both the magnetic core and the magnetic yoke. By connecting different excitation coils in series or in parallel, the purpose of adjusting the expected output magnetic motive force can be achieved.

[0056] According to the embodiment of the present disclosure, see Figure 7, the cross-sections of the second magnetic core and the second magnetic yoke are both square, the axial height of the second magnetic core is the same as the axial height of the second magnetic yoke, and the lower surface of the second magnetic core is flush with the lower surface of the second magnetic yoke, and the cross-sectional area of ​​the second magnetic core is 1-3 times the cross-sectional area of ​​the second magnetic yoke. In this way, the second magnetic core and the second magnetic yoke have the same height along the axial direction of the rotor and are located in the same horizontal plane, which can achieve the purpose of simplifying the manufacturing process and ensuring the uniform distribution of the magnetic field of the axial radial position measurement unit. The cross-sectional area of ​​the first magnetic core is 1 times the cross-sectional area of ​​the second magnetic yoke, that is, the cross-sectional areas of the two are the same. Since the total magnetic flux of the magnetic core is divided into two parts and distributed to the two magnetic yokes, in principle, in order to avoid magnetic saturation of the magnetic core material, the area of ​​the magnetic core should be larger than the area of ​​the magnetic yoke. Therefore, preferably, the cross-sectional area of ​​the second magnetic core is twice the cross-sectional area of ​​the second magnetic yoke. In the same principle, preferably, the axial height of the first magnetic core 311 is the same as the axial height of the first magnetic yoke 313, and the upper surface of the first magnetic core 311 is flush with the upper surface of the first magnetic yoke 313, and the cross-sectional area of ​​the first magnetic core is 1-3 times the cross-sectional area of ​​the first magnetic yoke. More preferably, see Figure 7 The shape and size of the second magnetic core are the same as those of the first magnetic core. At the same time, the shape and size of the first magnetic yoke are the same as those of the second magnetic yoke, so that the magnetic circuit structure of the two induction coils along the axial direction of the rotor is symmetrical, thereby ensuring the symmetry of the axial displacement measurement and facilitating the signal processing of the sensor.

[0057] According to the embodiment of the present disclosure, see Fig.11 and Fig.12 , a stator substrate A extends toward one side of the rotor to form a magnetizer 34, a third groove 341 is formed on the magnetizer, the third groove 341 defines the first magnetic core 311 and two first magnetic yokes 313 on the magnetizer 34, and the two first magnetic yokes 313 are arranged on the left and right sides of the first magnetic core 311. In this way, the first magnetic core and the two first magnetic yokes are defined by the third groove, so that the induction coil and the excitation coil are integrated with the stator substrate A to form an inductive sensor, and there is no need to configure a sensor housing, an iron core and other coil fixing structures. Preferably, the first magnetic core 311 and the first magnetic yoke 313 are directly connected to the first stator substrate 1210 or connected through a magnetic conductive material, for example, the first magnetic core and the first magnetic yoke are integrally formed with the first stator substrate 1210 through silicon steel sheets. Since the stator substrate A and the stator magnetic pole A are used for magnetic conduction and are made of silicon steel sheets, only a single-layer silicon steel sheet structure is designed, and then a groove structure can be formed by superimposing multiple layers of silicon steel sheets.

[0058] According to the embodiment of the present disclosure, see Figure 7The axial height of the first ring edge 22 of the rotor is between the lower surface of the second magnetic core and the upper surface of the first magnetic core, and the axial movement range of the first ring edge is: the upper surface of the first ring edge does not exceed the upper surface of the first magnetic core, and the lower surface of the first ring edge does not exceed the lower surface of the second magnetic core. In this way, the axial movement of the rotor can be ensured to be within the axial height range of the excitation coil, that is, it will not affect the radial displacement measurement of the excitation coil, thereby improving the accuracy of sensor detection.

[0059] Since the stator poles A on the two stator substrates A are staggered and cross-arranged along the circumferential direction of the rotor 2, the first stator pole 1211 on the first stator substrate 1210 and the second stator pole 1221 on the second stator substrate 1220 are staggered along the axial direction of the rotor. From the bottom perspective of the magnetic suspension turntable, an embodiment such as Figure 5 and Figure 6 As shown, the axial radial position measuring unit 3 is arranged on the second stator magnetic pole 1221 of the second stator substrate in the X+, X- and Y+, Y- directions. At this time, the second magnetic core 312 of the axial radial position measuring unit 3 is axially below the first magnetic core 311. Figure 5 In FIG. 1 , it can be seen that the second magnetic core 312 and the second stator magnetic pole 1221 are integrally formed. Fig.11 and Fig.12 As shown, the second magnetic core 312 of the axial radial position measuring unit 3 is axially above the first magnetic core 311. Fig.11 It can be directly seen that the first magnetic core 311 and the first stator pole 1211 are integrally formed with the first stator substrate 1210 through the magnetic conductor 34.

[0060] The present invention does not limit the number of stator poles A of each stator substrate A. Preferably, according to the embodiment of the present disclosure, each stator substrate A is formed with 3 or 4 stator poles A arranged at equal intervals along the circumference of the rotor on one side facing the rotor. When the stator pole A on one stator substrate A is recorded as the first stator pole and the stator pole A on the other stator substrate A is recorded as the second stator pole, refer to Figure 5 , 4 first stator poles 1211 and 4 second stator poles 1221 are arranged crosswise, and the first suspension control assembly has a total of 8 stator poles A. The 4 first stator poles 1211 and the 4 second stator poles 1221 are staggered in the axial direction, and in the circumferential direction, one second stator pole 1221 is arranged between two adjacent first stator poles 1211, and one first stator pole 1211 is arranged between two adjacent second stator poles 1221.

[0061] According to the embodiment of the present disclosure, see Figure 5 and Fig.11The magnetic suspension turntable includes four axial radial position measurement units 3, which are correspondingly arranged on the four first stator magnetic poles 1211 or the four second stator magnetic poles 1221. The four axial radial position measurement units 3 are divided into two mutually orthogonal groups, and each group includes two axial radial position measurement units 3 that are radially symmetrically arranged. In this way, the four axial radial position measurement units constitute two position sensor pairs, each position sensor pair includes two axial radial position measurement units, and the two position sensor pairs are mutually orthogonally arranged. In this way, the position detection of the rotor in two orthogonal directions (x degree of freedom direction and y degree of freedom direction) can be realized, and a pair of differential sensors are formed by using two radially symmetrical axial radial position measurement units to form a differential signal, which can achieve the purpose of improving the sensitivity of radial displacement detection. At the same time, the four axial radial position measurement units are evenly distributed in the circumferential direction. When the axial displacement of the rotor is detected by the four axial radial position measurement units, the average can be calculated to eliminate the problem of inaccurate axial displacement detection due to rotor tilt.

[0062] According to an embodiment of the present disclosure, the magnetic levitation turntable may further include three axial radial position measurement units, which are correspondingly arranged on the three first stator poles or the three second stator poles, and the three axial radial position measurement units are evenly distributed in the circumferential direction. In this way, by evenly distributing the three axial radial position measurement units in the circumferential direction, the axial displacement of the rotor can be averaged when it is detected, so as to eliminate the problem of inaccurate axial displacement detection due to rotor tilt. And through the components of the three axial radial position measurement units in two orthogonal directions (x degree of freedom direction and y degree of freedom direction), the function of detecting the radial displacement of the rotor can also be realized.

[0063] According to the embodiment of the present disclosure, see Figure 2 , Figure 3 , Fig.14 , Fig.15 and Fig.16 The magnetic levitation turntable further includes a second levitation control component 13, which is configured to apply a radial levitation force to the rotor 2. The second levitation control component 13 includes a stator substrate B 130, a plurality of stator poles B 131 protruding from the stator substrate B 130 toward the rotor 2, and a control winding B 132 disposed on the stator poles B 131. The plurality of stator poles B 131 are evenly disposed in the circumferential direction and extend in the circumferential direction. For this structure, see Fig.13The rotor 2 includes a rotor body 21, a first ring edge 22 and a second ring edge extending from the rotor body 21 to the stator 1, and the second ring edge is hollowed out at equal intervals to form a plurality of rotor poles 23. In one embodiment, the control winding B 132 is a concentrated winding, and the plurality of stator poles B 131 and the control winding B 132 include a +X winding coil and a pole, a -X winding coil and a pole, a +Y winding coil and a pole, and a -Y winding coil and a pole. By increasing the current of the +X winding coil and / or reducing the current of the -X winding coil, the force applied by the +X winding coil and the pole to the rotor 2 along the -X direction can be greater than the force applied by the -X winding coil and the pole to the rotor 2 along the +X direction, and the rotor 2 moves along the -X direction of the stator 1. Conversely, the rotor 2 moves along the +X direction of the stator 1, thereby realizing active control of the rotor in the x degree of freedom. Based on the same principle, the rotor 2 can be moved along the -Y direction of the stator 1, and vice versa, the rotor 2 can be moved along the +Y direction of the stator 1, thereby realizing active control of the rotor in the y degree of freedom. It should be noted that the +X winding coil and magnetic pole, -X winding coil and magnetic pole, +Y winding coil and magnetic pole, and -Y winding coil and magnetic pole here can be a single winding coil and a single magnetic pole, or can be the resultant force generated by multiple winding coils and multiple magnetic poles.

[0064] According to the embodiment of the present disclosure, see Figure 2 and Figure 3 The magnetic suspension turntable further includes a permanent magnet device 11, which can be configured as a permanent magnet ring, which is clamped between the first suspension control component 12 and the second suspension control component 13. The permanent magnet device can also be configured to include a plurality of permanent magnet components 111, which are evenly arranged in the circumferential direction, and are clamped between the first suspension control component 12 and the second suspension control component 13. The permanent magnet device 11 is configured to apply a permanent magnetic bias magnetic field to the rotor 2. In one embodiment, the number of the plurality of stator poles B 131 and the number of the plurality of permanent magnet components 111 are both 4, and each permanent magnet component 111 is opposite to a stator pole B 131 in the circumferential direction. In this way, the number of stator poles B 131 is the same as the number of the setting positions of the permanent magnet components 111, which are both 4, so that the control winding B 132 is set on the two perpendicular degrees of freedom (x degree of freedom and y degree of freedom) of the rotor 2 on the four stator poles B131. Since the permanent magnet bias magnetic field provided by the four permanent magnet components 111 is balanced on each stator pole B 131, the force applied to the rotor 2 by the four stator poles B 131 evenly distributed in the circumferential direction must be balanced.

[0065] According to the embodiment of the present disclosure, see Fig.14 , Fig.15 and Fig.16, a plurality of motor slots 134 are formed on the side of each stator pole B 131 facing the rotor 2, and a motor tooth 135 is formed between two adjacent motor slots 134. Preferably, a motor slot gap 133 is formed between two adjacent stator poles B 131, and the motor slot gap is configured as one motor slot 134. In this way, a rotation control winding 136 for rotation control can be arranged in the motor slot 134 to realize the rotation control of the rotor 2, and the control winding B 132 is arranged on the side of the rotation control winding facing away from the rotor 2. The permanent magnetic bias magnetic field generated by the permanent magnet assembly 111 is sequentially guided to the motor tooth 135 through the stator pole B 131 (the iron core of the control winding), and an air gap is formed between the motor tooth 135 and the second ring edge of the rotor 2 and the rotor pole 23, thereby realizing the integrated design of motor rotation control and radial suspension control, optimizing the motor rotation control structure and the suspension control structure, and achieving the purpose of compact structure. In this embodiment, the rotation control winding is a concentrated winding, wherein the motor teeth are configured as the core of the concentrated winding, and the concentrated winding is wound on the corresponding motor teeth. In another embodiment, the rotation control winding can also be designed as a distributed winding, see Fig.16 , a plurality of motor slots 134 are arranged on the side of the control winding B 132 facing the rotor 2. Fig.16 The distributed windings are omitted.

[0066] In the above embodiments, the rotor 2 is formed of a magnetic material, and examples of the magnetic material include but are not limited to permanent magnetic materials or ferromagnetic materials. Furthermore, for example, the ferromagnetic material is a soft magnetic material whose magnetic permeability is much greater than the magnetic permeability of a vacuum, and examples thereof include but are not limited to iron, cobalt, nickel and alloys thereof, carbon steel, silicon steel, and electrical pure iron. Examples of permanent magnetic materials include but are not limited to samarium cobalt, neodymium iron boron, and ferrite.

[0067] Since the rotor poles 23 are mainly used to cooperate with the rotation control winding to achieve the rotation control of the rotor. Fig.13 , the number of rotor poles 23 is 8, and the number of stator poles B is 4. At this time, the number of rotor poles corresponding to each stator pole B is still the same, and the force provided by the permanent magnetic bias magnetic field during the rotation of the rotor is still balanced, thereby ensuring the stability of the rotation of the magnetic suspension turntable, and then ensuring the stability of the position of the carrier (wafer) on the turntable, ensuring that the process has high reliability.

[0068] In the above embodiments, for the convenience of explanation, the first stator substrate 1210 and the second stator substrate 1220 are described as two parts, which are convenient for processing and manufacturing, but not limited to this. In other embodiments, the first stator substrate and the second stator substrate can also be an integral structure. In this case, the first stator pole 1211 and the second stator pole 1221 are both formed on the stator substrate of the integral structure. In the above embodiments, the stator pole and the stator substrate are described as two parts, but not limited to this. In other embodiments, the stator pole and the stator substrate can be integrally formed. For example, the stator pole and the stator substrate, the magnetizer, the magnetic core and the yoke are all formed of magnetic conductive materials. Further, for example, the magnetic conductive material is a ferromagnetic material; the ferromagnetic material is, for example, a soft magnetic material whose magnetic permeability is much greater than the magnetic permeability of a vacuum, and its examples include but are not limited to iron, cobalt, nickel and its alloys, carbon steel, silicon steel, and electrical pure iron.

[0069] In the above embodiments, the permanent magnet assembly is used to provide a permanent magnet bias magnetic field, and multiple permanent magnet assemblies are equidistantly surrounded by the periphery of the rotor. In one embodiment, each permanent magnet assembly includes at least one axially magnetized permanent magnet. That is, the permanent magnet assembly at each position around the rotor can be a permanent magnet, or two or more permanent magnets. Each permanent magnet axially magnetized can provide bias flux for the first and second stator poles and stator pole B at the same time. Examples of permanent magnets include but are not limited to samarium cobalt, neodymium iron boron, and ferrite.

[0070] According to the disclosed embodiments, the magnetic levitation turntable of the present invention is applied to semiconductor manufacturing, for example, rapid thermal processing and other wafer processing in semiconductor manufacturing, such as chemical vapor deposition, thermal processing, ion implantation doping and other technical doping. The present invention integrates the axial radial position measurement unit in the stator. With the help of the first ring edge of the rotor, the axial radial position measurement unit can detect the position information of at least one degree of freedom direction (axial or / and radial) of the rotor through the cavity wall of the semiconductor processing equipment, thereby realizing the organic combination of rotor position detection and stator structure. The embodiment of the present invention does not need to make through holes on the vacuum cavity and use fluororubber sealing rings, nor does it need to replace the sealing rings, which solves the problems of recalibration and installation errors after assembling the sensor, can better meet the ultra-clean and high-temperature environment requirements of semiconductor processing equipment, and can solve the problem of messy cable connections of multiple position sensors.

[0071] In one embodiment, the magnetic levitation turntable of the disclosed embodiment also includes a carrier, and the rotor 2 is supported and positioned by a plurality of support columns 24. The stator 1 can realize individual processing of the wafers supported on the carrier by driving the rotor 2 and the carrier to rotate and suspend.

[0072] Specific embodiments are used in the present invention to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the technical solution and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A magnetic suspension turntable integrating displacement measurement and suspension control, comprising a stator (1) and a rotor (2), the rotor having a first rim (22) protruding toward the stator, the stator comprising a first suspension control component (12), the first suspension control component being configured to apply an axially actively controlled suspension force to the first rim, the first suspension control component comprising two stacked stator substrates A (121), each of the stator substrates A having a plurality of stator magnetic poles A spaced apart along the circumference of the rotor formed on a side facing the rotor, the stator magnetic poles A on the two stator substrates A being staggered and cross-arranged along the circumference of the rotor, characterized in that: It also includes an axial radial position measurement unit (3), the axial radial position measurement unit including two magnetic cores, an excitation coil group and an induction coil group, the two magnetic cores are denoted as a first magnetic core (311) and a second magnetic core (312), the two magnetic cores are arranged along the axial direction of the rotor, the excitation coil group includes at least one excitation coil (33), the induction coil group includes at least two induction coils (32), the induction coil is sleeved outside each of the magnetic cores, and the excitation coil is sleeved outside the two magnetic cores together, the first magnetic core is magnetically connected to a stator substrate A, and a first magnetic yoke (313) is provided around the first magnetic core, the second magnetic core is integrally formed with a stator pole A of another stator substrate A, the excitation coil is configured to detect the radial displacement of the rotor, and the two induction coils are configured to detect the axial displacement of the rotor.

2. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 1 is characterized in that: The excitation magnetic field of the excitation coil forms a first magnetic circuit via the two magnetic cores, the first ring edge, the stator pole A and the first magnetic yoke; the induced magnetic field of one induction coil forms a second magnetic circuit via the first magnetic core, the first ring edge and the first magnetic yoke; the induced magnetic field of the other induction coil forms a third magnetic circuit via the second magnetic core, the first ring edge and the stator pole A.

3. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 2 is characterized in that: A first groove (314) is formed on the stator magnetic pole A of the other stator substrate A on a side facing the first ring edge, and the first groove defines the second magnetic core on the stator magnetic pole A.

4. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 3 is characterized in that: A second groove (315) is also formed on the stator magnetic pole A of the other stator substrate A on a side facing the rotor, and the first groove and the second groove define two second yokes (316) on the stator magnetic pole A.

5. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 4 is characterized in that: The induction coil group includes two induction coils, one of which is sleeved on the first magnetic core, and the other is sleeved on the second magnetic core; or the induction coil group includes four induction coils, two of which are connected in series and sleeved on the first magnetic core and one of the first magnetic yokes, respectively, the magnetic field generated by the induction coil on the first magnetic core is superimposed and enhanced with the magnetic field generated by the induction coil on the first magnetic yoke, the other two are connected in series and sleeved on the second magnetic core and one of the second magnetic yokes, respectively, the magnetic field generated by the induction coil on the second magnetic core is superimposed and enhanced with the magnetic field generated by the induction coil on one of the second magnetic yokes; or the induction coil group includes six induction coils, three of which are connected in series and sleeved on the first magnetic core and two of the first magnetic yokes, respectively, the magnetic field generated by the induction coil on the first magnetic core is superimposed and enhanced with the magnetic field generated by the induction coil on the two first magnetic yokes, the other three are connected in series and sleeved on the second magnetic core and two of the second magnetic yokes, respectively, the magnetic field generated by the induction coil on the second magnetic core is superimposed and enhanced with the magnetic field generated by the induction coil on the two second magnetic yokes.

6. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 4, characterized in that: The first groove and the second groove both extend from the end surface of the stator pole A in a direction away from the rotor, and the length of the second groove is greater than or equal to the length of the first groove.

7. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 4, characterized in that: The cross-sections of the second magnetic core and the second magnetic yoke are both square, the axial height of the second magnetic core is the same as the axial height of the second magnetic yoke, the lower surface of the second magnetic core is flush with the lower surface of the second magnetic yoke, and the cross-sectional area of ​​the second magnetic core is 1-3 times the cross-sectional area of ​​the second magnetic yoke.

8. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 2, characterized in that: The stator substrate A extends toward one side of the rotor to form a magnetic conductor (34), a third groove (341) is formed on the magnetic conductor, the third groove defines the first magnetic core and two first magnetic yokes on the magnetic conductor, and the two first magnetic yokes are respectively arranged on the left and right sides of the first magnetic core.

9. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 8, characterized in that: The axial height of the first magnetic core is the same as that of the first magnetic yoke, the upper surface of the first magnetic core is flush with the upper surface of the first magnetic yoke, and the cross-sectional area of ​​the first magnetic core is 1-3 times that of the cross-sectional area of ​​the first magnetic yoke.

10. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 9, characterized in that: The shape and size of the second magnetic core are the same as those of the first magnetic core.

11. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 1, characterized in that: The axial height of the first ring edge is between the lower surface of the second magnetic core and the upper surface of the first magnetic core, and the range of axial movement of the first ring edge is: the upper surface of the first ring edge does not exceed the upper surface of the first magnetic core, and the lower surface of the first ring edge does not exceed the lower surface of the second magnetic core.

12. The magnetic suspension turntable integrating displacement measurement and suspension control according to any one of claims 1 to 11, characterized in that: Each of the stator substrates A is provided with three or four stator poles A equally spaced along the circumference of the rotor on one side facing the rotor, the stator pole A on one stator substrate A is marked as a first stator pole, and the stator pole A on the other stator substrate A is marked as a second stator pole, the first stator pole and the second stator pole are axially staggered, and in the circumferential direction, a second stator pole is arranged between two adjacent first stator poles, and a first stator pole is arranged between two adjacent second stator poles.

13. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 12, characterized in that: It comprises four axial radial position measuring units, which are correspondingly arranged on the four first stator poles or the four second stator poles, and are divided into two mutually orthogonal groups, each group comprising two axial radial position measuring units which are radially symmetrically arranged.

14. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 12, characterized in that: It comprises three axial radial position measuring units, which are correspondingly arranged on three first stator poles or three second stator poles, and are evenly distributed in the circumferential direction.

15. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 12, characterized in that: The invention also includes a second suspension control component (13), wherein the second suspension control component is configured to apply a radial suspension force to the rotor, and the second suspension control component includes a stator substrate B (130), a plurality of stator poles B (131) protruding from the stator substrate B toward the rotor, and a control winding B (132) arranged on the stator poles B, wherein the plurality of stator poles B are evenly arranged in the circumferential direction and extend in the circumferential direction.

16. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 15, characterized in that: It also includes a permanent magnet device (11), the permanent magnet device is configured as a permanent magnet ring, and the permanent magnet ring is clamped between the first suspension control component and the second suspension control component; or the permanent magnet device is configured to include a plurality of permanent magnet components (111), the plurality of permanent magnet components are evenly arranged in a circumferential direction, and the plurality of permanent magnet components are clamped between the first suspension control component and the second suspension control component.

17. The magnetic suspension turntable integrating displacement measurement and suspension control according to claim 16, characterized in that: A plurality of motor slots (134) are formed on the side of the stator magnetic pole B facing the rotor, a motor tooth (135) is formed between two adjacent motor slots, and a rotation control winding (136) is provided in the motor slot.

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