Microscope objective and microscope objective architecture

Abstract

The application provides a microscope objective and a microscope objective architecture, relates to the technical field of microscopic imaging, and comprises the following: a first lens closest to an image side is concave towards an object side, is concave towards the image side, a second lens closest to the image side is convex towards the image side, is convex towards the object side, a third lens closest to the image side is a negative lens, is concave towards the image side, and is concave towards the object side; the concave surface of the first lens towards the object side and the convex surface of the second lens towards the image side are glued to form a first glued lens group which is a positive lens; a fourth lens closest to the image side is concave towards the image side, is concave towards the object side; a fifth lens closest to the image side is convex towards the image side, is convex towards the object side; and the concave surface of the fourth lens towards the object side and the convex surface of the fifth lens towards the image side are glued to form a second glued lens group. The resolution of the lens can be improved, a large working distance high-resolution microscope objective can be realized, and the microscope objective has the advantages of high magnification, large numerical aperture, few lenses and the like.

Description

Technical Field

[0001] This application relates to the field of microscopic imaging technology, and in particular to a microscope objective and a microscope objective architecture. Background Technology

[0002] Currently, microscopes are being used in increasingly diverse ways. High-definition digital microscopes offer advantages such as ease of operation, large field of view, and long working distance, enabling three-dimensional measurement of complex geometric micro-devices. They can also achieve true-color 3D reconstruction for high-definition true-color visualization of object outlines (such as biological samples and insects), and are increasingly being applied in high-precision inspection fields such as chip inspection, integrated circuit inspection, and automotive parts inspection. However, conventional microscope objectives suffer from low resolution in their optical systems at high magnification and long working distances. Summary of the Invention

[0003] The purpose of this application is to provide a microscope objective and a microscope objective architecture that alleviates the technical problem of low resolution in optical systems, corrects spherical aberration and field curvature of the objective, improves lens resolution, and realizes a high-resolution microscope objective with a large working distance. It has the advantages of high magnification, long working distance, large numerical aperture, high resolution performance, fewer lenses and simple processing.

[0004] In a first aspect, embodiments of this application provide a microscope objective, comprising:

[0005] Multiple lenses are arranged coaxially from the image side to the object side; the first lens closest to the image side has a concave surface facing the object side and a concave surface facing the image side; the second lens closest to the image side has a convex surface facing the image side and a convex surface facing the object side; the third lens closest to the image side is a negative lens, with a concave surface facing the image side and a concave surface facing the object side.

[0006] The concave surface of the first lens facing the object side is cemented together with the convex surface of the second lens facing the image side. The first lens and the second lens form a first cemented lens group, which is a positive lens.

[0007] In conjunction with the first aspect, this application provides a first possible implementation of the first aspect, wherein the fourth lens, which is close to the image side, has a concave surface facing the image side and a concave surface facing the object side; the fifth lens, which is close to the image side, has a convex surface facing the image side and a convex surface facing the object side; the concave surface of the fourth lens facing the object side and the convex surface of the fifth lens facing the image side are cemented together, and the fourth lens and the fifth lens form a second cemented lens group.

[0008] In conjunction with the first aspect, this application provides a second possible implementation of the first aspect, wherein the sixth lens, which is close to the image side, has a convex surface facing the image side and a convex surface facing the object side; the seventh lens, which is close to the image side, has a concave surface facing the image side and a convex surface facing the object side; the convex surface of the sixth lens facing the object side and the concave surface of the seventh lens facing the image side are cemented together, and the sixth lens and the seventh lens form a third cemented lens group.

[0009] In conjunction with the first aspect, this application provides a third possible implementation of the first aspect, wherein the eighth lens, which is closest to the image side, is a positive lens with a concave surface facing the image side and a convex surface facing the object side; the ninth lens, which is closest to the image side, has a convex surface facing the image side and a concave surface facing the object side; the tenth lens, which is closest to the image side, has a convex surface facing the image side and a convex surface facing the object side; the concave surface of the ninth lens facing the object side and the convex surface of the tenth lens facing the image side are cemented together, and the ninth lens and the tenth lens form a fourth cemented lens group, which is a positive lens; the eleventh lens, which is closest to the image side, is a negative lens with a concave surface facing the image side and a convex surface facing the object side.

[0010] In conjunction with the first aspect, this application provides a fourth possible implementation of the first aspect, wherein the twelfth lens, which is close to the image side, has a convex surface facing the image side and a convex surface facing the object side; the thirteenth lens, which is close to the image side, has a concave surface facing the image side and a convex surface facing the object side; the convex surface of the twelfth lens facing the object side and the concave surface of the thirteenth lens facing the image side are cemented together, and the twelfth lens and the thirteenth lens form a fifth cemented lens group, which is a positive lens.

[0011] In conjunction with the first aspect, this application provides a fifth possible implementation of the first aspect, wherein the fourteenth lens, which is close to the image side, has a convex surface facing the image side and a concave surface facing the object side.

[0012] In conjunction with the first aspect, this application provides a sixth possible implementation of the first aspect, wherein the concave surface of the fourteenth lens faces the object surface to enlarge the numerical aperture.

[0013] In conjunction with the first aspect, this application provides a seventh possible implementation of the first aspect, wherein the focal length of the third lens is -12mm≤f≤-6mm; and the focal length of the first cemented lens group is 20mm≤f≤24mm.

[0014] In conjunction with the first aspect, this application provides an eighth possible implementation of the first aspect, wherein the focal length of the second cemented lens group is -67mm≤f≤-64mm.

[0015] In conjunction with the first aspect, this application provides a ninth possible implementation of the first aspect, wherein the focal length of the third cemented lens group is f≤-120mm or f≥120mm.

[0016] In conjunction with the first aspect, this application provides a tenth possible implementation of the first aspect, wherein the focal length of the eighth lens is 35mm≤f≤45mm; the focal length of the fourth cemented lens group is 25mm≤f≤35mm; and the focal length of the eleventh lens is -60mm≤f≤-55mm.

[0017] In conjunction with the first aspect, this application provides an eleventh possible implementation of the first aspect, wherein the focal length of the fifth cemented lens group is 25mm≤f≤32mm.

[0018] In conjunction with the first aspect, this application provides a twelfth possible implementation of the first aspect, wherein the focal length of the fourteenth lens is 23mm≤f≤32mm.

[0019] In conjunction with the first aspect, this application provides a thirteenth possible implementation of the first aspect, wherein the focal length f of the microscope objective is 2.95mm≤f≤3.05mm, and the total optical length TTL of the microscope objective is TTL≤76mm.

[0020] Secondly, embodiments of this application also provide a microscope objective architecture, including: a sample to be observed and a microscope objective as described in the first aspect; the sample to be observed is disposed on the object side of the microscope objective.

[0021] The technical solution provided in this application has the following beneficial effects: The microscope objective and microscope objective architecture provided in this application include: a plurality of lenses arranged coaxially from the image side to the object side; wherein, the first lens closest to the image side has a concave surface facing the object side and a concave surface facing the image side; the second lens closest to the image side has a convex surface facing the image side and a convex surface facing the object side; the third lens closest to the image side is a negative lens, with a concave surface facing the image side and a concave surface facing the object side; the concave surface of the first lens facing the object side and the convex surface of the second lens facing the image side are bonded together. The first lens and the second lens form a first cemented lens group, which is a positive lens. By combining the first cemented lens group and the third lens as positive lenses, the field curvature of the objective lens can be corrected, the field curvature of the lens can be reduced, and the lens resolution can be improved. This alleviates the technical problem of low resolution in the optical system. It can correct the spherical aberration and field curvature of the objective lens, improve the lens resolution, and realize a high-resolution microscope objective lens with a large working distance. It has the advantages of high magnification, long working distance, large numerical aperture, high resolution performance, fewer lenses, and simple processing. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of a microscope objective provided in an embodiment of this application;

[0024] Figure 2 A schematic diagram of the MTF curve provided in the embodiments of this application;

[0025] Figure 3 A schematic diagram of RMS Radius provided for an embodiment of this application;

[0026] Figure 4 A schematic diagram of the field curvature provided in the embodiments of this application;

[0027] Figure 5 This is a schematic diagram of the distortion of the objective lens provided in the embodiments of this application. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] The terms "comprising" and "having," and any variations thereof, used in the embodiments of this application, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the steps or units listed, but may optionally include other steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or devices.

[0030] Currently, traditional commercial microscopes suffer from technical limitations such as shallow depth of field, short working distance, limited planar observation capabilities, and insufficient image clarity for accurate sample observation, which have restricted their use in industrial production and scientific research. With rapid technological advancements, the types of microscopes used are becoming increasingly diverse, and the demand for observing the microscopic world is growing. High-definition digital microscopes offer advantages such as ease of operation, wide field of view, and long working distance, enabling three-dimensional measurement of complex geometric micro-devices and true-color 3D reconstruction. This allows for high-definition, true-color visualization of object outlines (such as biological samples and insects), and is increasingly being applied in high-precision inspection fields such as chip testing, integrated circuit testing, and automotive parts testing. In contrast, ordinary microscope objectives, even with high magnification and long working distances, suffer from problems such as small numerical aperture, low resolution, numerous lenses, and difficult manufacturing due to aberrations, failing to meet the demands of current high-definition digital microscopes.

[0031] It is evident that conventional microscope objectives suffer from problems such as large aberrations, small numerical aperture, low resolution, and a large number of lenses that are difficult to manufacture when the magnification is high and the working distance is long.

[0032] Based on this, the microscope objective and microscope objective architecture provided in this application alleviate the technical problems of large aberrations, small numerical aperture, low resolution, and large number of lenses that are difficult to process in the optical system of ordinary microscope objectives when the magnification is large and the working distance is long. It can correct the spherical aberration and field curvature of the objective, improve the lens resolution, and realize a microscope objective with high resolution over a long working distance. It has the advantages of high magnification, long working distance, large numerical aperture, high resolution performance, fewer lenses and simple processing.

[0033] To facilitate understanding of this embodiment, a microscope objective and its architecture disclosed in this application will be described in detail first.

[0034] Example 1:

[0035] Figure 1 This is a schematic diagram of the structure of a microscope objective provided in an embodiment of this application. This microscope objective can be a long working distance microscope objective. Figure 1 As shown, Figure 1 The left side of the image is shown, and the right side is the object side; this microscope objective includes:

[0036] Multiple lenses are arranged coaxially from the image side to the object side. The first lens, closest to the image side, has a concave surface facing both the object and image sides. The second lens, closest to the image side, has a convex surface facing both the image and object sides. The third lens, closest to the image side, is a negative lens, with a concave surface facing both the image and object sides. The concave surface of the first lens facing the object side and the convex surface of the second lens facing the image side are cemented together. The first lens and the second lens form a first cemented lens group, which is a positive lens. This combination of the first and third lenses, acting as positive lenses, can correct spherical aberration and field curvature of the objective lens, improving lens resolution.

[0037] In practical applications, the focal length of the first cemented lens group can be 20mm ≤ f ≤ 24mm. Optionally, the microscope objective lens consists of fourteen coaxially arranged lenses from the image side to the object side, such as... Figure 1 As shown, the first lens L1 has a concave surface facing both the image and object sides, while the second lens L2 has a convex surface facing both the image and object sides. The concave surface of the first lens L1 facing the object side and the convex surface of the second lens L2 facing the image side are cemented together. The first lens L1 and the second lens L2 form a first cemented lens group GL1, which is a positive lens. Specifically, the first lens L1 is a negative lens, with a concave surface facing the image side and a curvature direction towards the image plane. Simultaneously, the cemented lens group GL1 formed by L1 and L2 is a positive lens, which can correct the spherical aberration introduced by the negative lens on the image side, thus facilitating the enlargement of the numerical aperture.

[0038] The microscope objective provided in this application embodiment can be used as a high-definition digital microscope to achieve a high-resolution microscope objective with a large working distance. It has the advantages of high magnification, long working distance (4.6 mm), large numerical aperture (NA0.55), high resolution performance, fewer lenses and simple processing, and can meet the needs of high-definition digital microscope objectives.

[0039] In this embodiment, a lens structure with specific parameters is used to construct the microscope objective. Compared with conventional microscope objectives, it has the advantages of high magnification, long working distance (4.6 mm), large numerical aperture (NA 0.55), high resolution performance, fewer lenses, and simple processing. It can meet the needs of the field of high-definition digital microscopy imaging. The microscope objectives of this invention all use spherical lenses, which can be fully realized under the current processing and testing technology level, and are easy to manufacture, meeting the requirements of mass production.

[0040] In one possible implementation, the fourth lens, which is closer to the image side, has a concave surface facing the image side and a concave surface facing the object side; the fifth lens, which is closer to the image side, has a convex surface facing the image side and a convex surface facing the object side; the concave surface of the fourth lens facing the object side and the convex surface of the fifth lens facing the image side are cemented together, and the fourth lens and the fifth lens form a second cemented lens group, which is a negative lens.

[0041] In practical applications, the focal length of the third lens can be -12mm ≤ f ≤ -6mm; the focal length of the second cemented lens group can be -67mm ≤ f ≤ -64mm. For example... Figure 1 As shown, the third lens L3 has a concave surface facing both the image and object sides, making it a negative lens; the fourth lens L4 has a concave surface facing both the image and object sides; the fifth lens L5 has a convex surface facing both the image and object sides. The concave surface of the fourth lens L4 facing the object side and the convex surface of the fifth lens L5 facing the image side are cemented together. The fourth lens L1 and the fifth lens L5 form the second cemented lens group GL2, which is a negative lens.

[0042] In one possible implementation, the sixth lens, which is closest to the image, has a convex surface facing both the image and object sides; the seventh lens, which is closest to the image, has a concave surface facing both the image and object sides; the convex surface of the sixth lens facing the object side and the concave surface of the seventh lens facing the image side are cemented together, and the sixth lens and the seventh lens form a third cemented lens group, which can be either a positive lens or a negative lens.

[0043] like Figure 1 As shown, the sixth lens L6 is convex when facing the image side and convex when facing the object side, and the seventh lens L7 is concave when facing the image side and convex when facing the object side. The convex surface of the sixth lens L6 facing the object side and the concave surface of the seventh lens L7 facing the image side are cemented together. The sixth lens L6 and the seventh lens L7 form the third cemented lens group GL3, which can be a positive lens or a negative lens.

[0044] In practical applications, the focal length of the third cemented lens group is f≤-120mm or f≥120mm.

[0045] In one possible implementation, the eighth lens, which is closest to the image, is a positive lens with a concave surface facing the image and a convex surface facing the object; the ninth lens, which is closest to the image, has a convex surface facing the image and a concave surface facing the object; the tenth lens, which is closest to the image, has a convex surface facing both the image and the object; the concave surface of the ninth lens facing the object and the convex surface of the tenth lens facing the image are cemented together, and the ninth and tenth lenses form a fourth cemented lens group, which is a positive lens; the eleventh lens, which is closest to the image, is a negative lens with a concave surface facing the image and a convex surface facing the object.

[0046] In practical applications, the focal length of the eighth lens is 35mm≤f≤45mm; the focal length of the fourth cemented lens group is 25mm≤f≤35mm; and the focal length of the eleventh lens is -60mm≤f≤-55mm.

[0047] In this embodiment of the present disclosure, the fourth lens L4 to the eleventh lens L11 utilize multiple sets of cemented lens groups to achieve an effective correction of lens chromatic aberration, ensuring image clarity at different working wavelengths.

[0048] In one possible implementation, the twelfth lens, which is closest to the image side, has a convex surface facing both the image and object sides; the thirteenth lens, which is closest to the image side, has a concave surface facing both the image and object sides; the convex surface of the twelfth lens facing the object side and the concave surface of the thirteenth lens facing the image side are cemented together, and the twelfth and thirteenth lenses form a fifth cemented lens group. The fifth cemented lens group is a positive lens, which allows the beam with a large numerical aperture to be deflected and corrected, reduces the accumulation of spherical aberration caused by the large numerical aperture, improves resolution, and facilitates the assembly and adjustment of the microscope objective structure.

[0049] In practical applications, the focal length of the fifth cemented lens group is 25mm≤f≤32mm.

[0050] like Figure 1 As shown, the fourteenth lens, L14, which is closest to the image side, has a convex surface facing the image side and a concave surface facing the object side, making it a positive lens. The fourteenth lens L14 is bent towards the image side to increase the numerical aperture, increase the object-side working distance, and reduce the accumulation of spherical aberration caused by the large aperture, thereby improving the resolution of the microscope objective.

[0051] Compared with existing microscope objectives, the high-definition digital microscope objectives obtained by the above configuration are smaller in size and shorter in length. At the same time, the use of multiple cemented lenses can effectively correct the aberrations introduced by a single lens, giving the microscope system higher resolution and reducing the number of lenses used. By rationally allocating the concavity and convexity of each lens in the high-definition digital microscope objectives, the processing performance of each lens is simplified, making it easier to manufacture and meet the requirements of mass production.

[0052] In this embodiment of the disclosure, such as Figure 1 As shown, the left side of the first lens L1 is the image side, and the right side of the fourteenth lens L14 is the object side. Multiple lenses are arranged coaxially from the image side to the object side as follows: first lens L1, second lens L2, third lens L3, fourth lens L4, fifth lens L5, sixth lens L6, seventh lens L7, eighth lens L8, ninth lens L9, tenth lens L10, eleventh lens L11, twelfth lens L12, thirteenth lens L13, and fourteenth lens L14.

[0053] In practical applications, such as Figure 1As shown, in actual operation, the right side (to the right of the fourteenth lens L14) is the object side, used for light input, and the fourteenth lens L14 can control the beam aperture and incident angle; the left side (to the left of the first lens L1) is the image side, used for light output, and the first lens L1 can control the beam output direction. In this embodiment, the microscope objective can be an infinity-corrected microscope objective, and a tube lens is needed in the subsequent optical path to image the beam emitted from the microscope objective onto a CCD.

[0054] Therefore, the concave surface of the fourteenth lens faces the object plane. Specifically, the fourteenth lens is a meniscus lens, and its focal length can be positive or negative, with a maximum range of 23mm ≤ f ≤ 32mm. The concave surface of the fourteenth lens (L14) facing the object plane helps reduce the accumulation of spherical aberration caused by the large aperture, thereby improving the resolution of the microscope objective.

[0055] Based on the lens focal lengths provided above, the focal length f of the microscope objective can be 2.95mm ≤ f ≤ 3.05mm, and the total optical length TTL of the microscope objective can be TTL ≤ 76mm. However, the above focal length range is only one optional implementation of this application, and not a limitation thereof. The scope of protection of this application is not limited to this; that is, this application does not limit the lens focal length and the overall focal length of the microscope objective to the above fixed range, but can also use other focal length ranges. Of course, if the lens focal length changes, the focal length of the overall microscope objective will also be adjusted and scaled accordingly. In the embodiments of this application, the focal lengths described in the foregoing embodiments can be modified or changed, or some of the focal lengths can be equivalently replaced; and these modifications, changes, or replacements should all be covered within the scope of protection of this application.

[0056] Figure 2 This is a schematic diagram of the MTF curve provided in the embodiments of this application. Figure 3 This is a schematic diagram of RMSRadius provided in an embodiment of this application. Figure 4 This is a schematic diagram of the field curvature of the present invention. The vertical axis in the diagram represents the angle of the incident light, which can correspond to the field number of the objective lens, and the horizontal axis represents the magnitude of the field curvature. Figure 5 This is a schematic diagram of the distortion of the objective lens in an embodiment of the present invention. The vertical axis in the figure represents the angle of the incident light, which can correspond to the field of view of the objective lens, and the horizontal axis represents the magnitude of the distortion.

[0057] The following examples illustrate the fourteen lenses used in a microscope objective.

[0058] In a set of fourteen lenses arranged coaxially from image to object, there are a total of twenty-three surfaces. As shown in the table below, the first lens L1 corresponds to surfaces S1 and S2; the second lens L2 corresponds to surfaces S2 and S3; the cemented surface where the first lens L1 and the second lens L2 are bonded together is S2; the first cemented lens group GL1, composed of the first lens L1 and the second lens L2, corresponds to surfaces S1, S2, and S3; the third lens L3 corresponds to surfaces S4 and S5; the fourth lens L4 corresponds to surfaces S6 and S7; and the fifth lens L5 corresponds to surface S... The cemented surface of the fourth lens L4 and the fifth lens L5 is designated S7; the surfaces of the second cemented lens group GL2, formed by the fourth lens L1 and the fifth lens L5, are designated S6, S7, and S8; the surfaces of the sixth lens L6 are designated S9 and S10; the surfaces of the seventh lens L7 are designated S10 and S11; the cemented surface of the sixth lens L6 and the seventh lens L7 is designated S10; and the sixth lens L6 and the seventh lens L7 form the first cemented lens group G. The surface designations for L3 are S9, S10, and S11; the surface designations for the eighth lens L8 are S12 and S13; the surface designations for the ninth lens L9 are S14 and S15; the surface designations for the tenth lens L10 are S15 and S16; the surface designation for the cemented surface where the ninth and tenth lenses L9 and L10 are cemented together is S15; the surface designations for the fourth cemented lens group GL4, formed by the ninth and tenth lenses L9 and L10, are S14, S15, and S16; the eleventh lens L1... The surface numbers corresponding to the 1st lens are S17 and S18; the surface numbers corresponding to the twelfth lens L12 are S19 and S20; the surface numbers corresponding to the thirteenth lens L13 are S20 and S21; the surface number of the cemented surface where the twelfth lens L12 and the thirteenth lens L13 are cemented together is S20; the surface numbers corresponding to the fifth cemented lens group GL5 formed by the twelfth lens L12 and the thirteenth lens L13 are S19, S20 and S21; the surface numbers corresponding to the fourteenth lens L14 are S22 and S23.

[0059]

[0060]

[0061] Example 2:

[0062] This application provides a microscope objective architecture, which includes: a sample to be observed and a microscope objective as described in the above embodiment; the sample to be observed is disposed on the object side of the microscope objective.

[0063] The microscope objective structure provided in this application has the same technical features as the microscope objective provided in the above embodiments, so it can also solve the same technical problems and achieve the same technical effects.

[0064] Furthermore, in the description of the embodiments of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0065] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0066] In the embodiments provided in this application, it should be understood that the disclosed devices and systems can be implemented in other ways. The device embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the displayed or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0067] For example, the flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of apparatus and computer program products according to various embodiments of this application. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions marked in the blocks may occur in a different order than those marked in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in a block diagram and / or flowchart, and combinations of blocks in block diagrams and / or flowcharts, can be implemented using a dedicated hardware-based system that performs the specified function or action, or using a combination of dedicated hardware and computer instructions.

[0068] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0069] In addition, the functional units in the embodiments provided in this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0070] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the functions in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0071] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0072] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The protection scope of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the scope of the technology disclosed in this application; and these modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application. All should be covered within the protection scope of this application. Therefore, the protection scope of this application should be determined by the protection scope of the claims.

Claims

1. A microscope objective, characterized in that, include: Fourteen lenses are arranged coaxially from the image side to the object side; the first lens is concave towards the object side and concave towards the image side; the second lens is convex towards the image side and convex towards the object side; the third lens is a negative lens, with a concave surface towards both the image and object sides. The concave surface of the first lens facing the object side is cemented together with the convex surface of the second lens facing the image side. The first lens and the second lens form a first cemented lens group, which is a positive lens. The focal lengths of the second, fifth, eighth, ninth, tenth, twelfth, and fourteenth lenses are positive; the focal lengths of the first, third, fourth, sixth, seventh, eleventh, and thirteenth lenses are all negative.

2. The microscope objective according to claim 1, characterized in that, The fourth lens has a concave surface facing the image side and a concave surface facing the object side; the fifth lens has a convex surface facing the image side and a convex surface facing the object side; the concave surface of the fourth lens facing the object side and the convex surface of the fifth lens facing the image side are cemented together, and the fourth lens and the fifth lens form a second cemented lens group.

3. The microscope objective according to claim 1, characterized in that, The sixth lens has a convex surface facing both the image and object sides; the seventh lens has a concave surface facing both the image and object sides; the convex surface of the sixth lens facing the object side and the concave surface of the seventh lens facing the image side are cemented together, and the sixth lens and the seventh lens form a third cemented lens group.

4. The microscope objective according to claim 1, characterized in that, The eighth lens is a positive lens, with a concave surface facing the image and a convex surface facing the object; the ninth lens has a convex surface facing the image and a concave surface facing the object; the tenth lens has a convex surface facing both the image and object; the concave surface of the ninth lens facing the object and the convex surface of the tenth lens facing the image are cemented together, and the ninth lens and the tenth lens form a fourth cemented lens group, which is a positive lens; the eleventh lens is a negative lens, with a concave surface facing the image and a convex surface facing the object.

5. The microscope objective according to claim 1, characterized in that, The twelfth lens has a convex surface facing both the image and object sides; the thirteenth lens has a concave surface facing both the image and object sides; the convex surface of the twelfth lens facing the object side and the concave surface of the thirteenth lens facing the image side are cemented together, and the twelfth lens and the thirteenth lens form a fifth cemented lens group, which is a positive lens.

6. The microscope objective according to claim 5, characterized in that, The fourteenth lens has a convex surface facing the image side and a concave surface facing the object side.

7. The microscope objective according to claim 6, characterized in that, The concave surface of the fourteenth lens faces the object surface to enlarge the numerical aperture.

8. The microscope objective according to claim 1, characterized in that, The focal length of the third lens is -12mm≤f≤-6mm; the focal length of the first cemented lens group is 20mm≤f≤24mm.

9. The microscope objective according to claim 2, characterized in that, The focal length of the second cemented lens group is -67mm≤f≤-64mm.

10. The microscope objective according to claim 3, characterized in that, The focal length of the third cemented lens group is f≤-120mm or f≥120mm.

11. The microscope objective according to claim 4, wherein the focal length of the eighth lens is 35mm≤f≤45mm; the focal length of the fourth cemented lens group is 25mm≤f≤35mm; and the focal length of the eleventh lens is -60mm≤f≤-55mm.

12. The microscope objective according to claim 5, wherein the focal length of the fifth cemented lens group is 25mm≤f≤32mm.

13. The microscope objective according to claim 6, wherein the focal length of the fourteenth lens is 23mm≤f≤32mm.

14. The microscope objective according to claim 1, wherein the focal length f of the microscope objective is 2.95mm≤f≤3.05mm, and the total optical length TTL of the microscope objective is TTL≤76mm.

15. A microscope objective structure, characterized in that, include: The sample to be observed and the microscope objective as described in any one of claims 1-14; The sample to be observed is positioned on the object side of the microscope objective.

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