Optical scanning device, manufacturing method thereof, micro display and micro imaging system

Abstract

The invention provides an optical scanning device. The optical scanning device comprises a substrate, an actuating piece, a connecting piece and a waveguide. The substrate comprises two setting parts and a connecting part. The setting part comprises two free ends and two fixed ends, and one of the two free ends is opposite to one of the two fixed ends. The connecting part is connected with the two fixing ends of the two setting parts. The two actuating members are arranged in parallel on the two setting parts respectively. The connecting piece is connected with the two setting parts. The waveguide is arranged between the two actuating pieces and penetrates through the connecting piece. The two actuating members actuate simultaneously in the same phase or different phases along a dimension, and further drive the waveguide to vibrate along two dimensions to generate a scanning pattern.

Description

Technical Field

[0001] This disclosure relates to a scanning device and its manufacturing method, a microdisplay and a microimaging system, and particularly to an optical scanning device and its manufacturing method, a microdisplay and a microimaging system. Background Technology

[0002] Miniaturized scanners have been widely used in handheld projection systems and microdisplays. Among the various types of scanners, microelectromechanical systems (MEMS) are the most widely used. MEMS consist of miniature mechanisms and electromechanical components based on integrated circuit (IC) batch processing technology.

[0003] Existing micro-scanners use microelectromechanical system (MEMS) scanning mirrors, which are complex in structure and require precision components. In addition, since MEMS scanners use scanning mirrors as actuation and yaw elements, the scanning mirrors must be larger than the diameter of the incident beam to avoid excessive output signal distortion or additional diffraction.

[0004] However, the size of existing microdisplays is proportional to the device's resolution and field of view (FOV). In other words, the larger the microdisplay, the better its resolution and FOV. Therefore, the resolution and FOV of a microdisplay are limited by its size.

[0005] In conclusion, the development of an optical scanning device that uses resonant optical fibers or microfiber waveguides to replace scanning mirrors, as well as its manufacturing method, microdisplay, and microimaging system, has indeed garnered high public anticipation and become the goal and direction of related industries. Summary of the Invention

[0006] According to one embodiment of the structural configuration disclosed herein, an optical scanning device is provided, comprising a substrate, two actuators, a connector, and a waveguide. The substrate includes two mounting portions and a connecting portion. Each mounting portion includes two free ends and two fixed ends, one of the free ends facing the other of one of the fixed ends, the two free ends being close to each other, and the two fixed ends being close to each other. The connecting portion connects to the two fixed ends of the mounting portions. The two actuators are respectively arranged side-by-side in the two mounting portions. The connector connects to the two mounting portions and is disposed between the two actuators. The waveguide is disposed between the two actuators and passes through the connector. One end of the waveguide is connected to the connecting portion and is adjacent to the two fixed ends of the mounting portions, and the other end of the waveguide is adjacent to the two free ends of the mounting portions. The two actuators are actuated simultaneously in phase or out of phase along one dimension, thereby causing the waveguide to vibrate along two dimensions to generate a scanning pattern.

[0007] Another embodiment of the structural form described herein provides a microdisplay comprising the optical scanning device as described above. The microdisplay is one of an eyeglasses device, an automated diagnostic display, a surgical vital signs display, and a head-mounted display for fighter pilots.

[0008] According to another embodiment of the structural pattern disclosed herein, a miniature imaging system is provided, comprising a light source, a 2 1. An optical fiber coupler, an optical scanning device as described above, and a photosensor. A light source is used to emit a light beam. 2. 1. The fiber optic coupler includes two input channels. These two input channels couple to a light source and are used to receive light. The aforementioned optical scanning device and 2. A fiber optic coupler is used to couple and scan light rays, which are coupled from one of the two input channels to form a scan pattern on a surface. A photosensor is arranged parallel to the light source and connected to the other of the two input channels, and is used to receive the scan pattern through an optical scanning device.

[0009] According to another embodiment of the structural configuration disclosed herein, an optical scanning device is provided, comprising a substrate, two actuators, a connector, and a waveguide. The substrate includes two mounting portions and a connecting portion. Each mounting portion includes two free ends and two fixed ends, one of the two free ends facing another of the two fixed ends, the two free ends being close to each other, and the two fixed ends being far apart. The connecting portion connects to the two fixed ends of the two mounting portions. The two actuators are facing each other and respectively disposed in the two mounting portions. The connector connects to the two mounting portions and is disposed between the two actuators. The waveguide is disposed between the two actuators and passes through the connector. One end of the waveguide is connected to the connecting portion of the substrate and is adjacent to one of the two fixed ends of the two mounting portions, while the other end of the waveguide is adjacent to the other of the two fixed ends of the two mounting portions. The two actuators are actuated simultaneously in phase or out of phase along one dimension, thereby causing the waveguide to vibrate along two dimensions to generate a scanning pattern.

[0010] According to another embodiment of the structural pattern disclosed herein, a microdisplay is provided, comprising the optical scanning device as described above. The microdisplay is one of an eyeglass device, an automatic diagnostic display, a surgical vital signs display, and a head-mounted display for fighter pilots.

[0011] According to another embodiment of the structural pattern disclosed herein, a miniature imaging system is provided, comprising a light source, a 2 1. An optical fiber coupler, an optical scanning device as described above, and a photosensor. A light source is used to emit a light beam. 2. 1. The fiber optic coupler includes two input channels. These two input channels couple to a light source and are used to receive light. The aforementioned optical scanning device and 2. A fiber optic coupler is used to couple and scan light rays, which are coupled from one of the two input channels to form a scan pattern on a surface. A photosensor is arranged parallel to the light source and connected to the other of the two input channels, and is used to receive the scan pattern through an optical scanning device.

[0012] According to another embodiment of the structural pattern disclosed herein, a miniature imaging system is provided, comprising a light source, an optical scanning device as described above, and a photosensor. The light source emits light onto a surface to form an image. The aforementioned optical scanning device scans the surface to generate a scanned pattern. The photosensor is connected to the optical scanning device and is used to receive the scanned pattern through the optical scanning device.

[0013] According to another embodiment of the structural pattern disclosed herein, a miniature imaging system is provided, comprising a light source, the aforementioned optical scanning device, and a photosensor. The aforementioned optical scanning device is connected to the light source, wherein the light source emits light onto a surface through the optical scanning device to form a scan pattern. The photosensor is used to receive the scan pattern.

[0014] According to one embodiment of the method described herein, a method for manufacturing an optical scanning device is provided, comprising providing a substrate, performing an actuator setting step, a connector setting step, and a tapered waveguide setting step. The substrate includes two setting portions and a connecting portion. The actuator setting step sets two actuators on the two setting portions using an aerosol deposition method. The connector setting step sets a connector between the two actuators. The tapered waveguide setting step sets a waveguide between the two actuators to form an optical scanning device. One end of the waveguide is connected to the connecting portion, and the other end of the waveguide passes through the connector. The two actuators are actuated simultaneously in phase or out of phase along one dimension, thereby causing the waveguide to vibrate along two dimensions to generate a scanning pattern. Attached Figure Description

[0015] This disclosure can be more fully understood by reading the following detailed description of the embodiments and in conjunction with the accompanying drawings.

[0016] Figure 1 A schematic diagram of an optical scanning apparatus according to a first embodiment of the present disclosure is shown.

[0017] Figure 2 Drawing according to Figure 1 The schematic diagrams of the response curves of the optical scanning device in the embodiment for horizontal vibration (UX plane) and vertical vibration (UZ plane) when the actuator is operated in the same phase and out of phase are shown.

[0018] Figure 3 Drawing according to Figure 1 A schematic diagram of the scan pattern generated by the Lissajous scanning of the optical scanning device in the embodiment.

[0019] Figure 4 Drawing according to Figure 1 The actuator of the optical scanning device in the embodiment operates in phase to generate a scanning pattern by circular scanning.

[0020] Figure 5 Drawing according to Figure 1 A schematic diagram of the scanning pattern when the actuator of the optical scanning device of the embodiment operates in phase and performs amplitude modulation.

[0021] Figure 6A Drawing according to Figure 1 A schematic diagram of a scanning pattern generated by circular scanning when the actuator of the optical scanning device of the embodiment operates in phase.

[0022] Figure 6B Drawing according to Figure 1 The optical scanning device in this embodiment generates a scan pattern using circular scanning to dynamically capture an image.

[0023] Figure 6C Drawing according to Figure 6B A side view of the scan pattern generated by the optical scanning device of the embodiment using circular scanning.

[0024] Figure 6D Drawing according to Figure 1 A schematic diagram of a scanning pattern generated by elliptical scanning when the actuator of the optical scanning device of the embodiment operates in phase and performs amplitude modulation.

[0025] Figure 7 A schematic diagram of an optical scanning apparatus according to a second embodiment of the present disclosure is shown.

[0026] Figure 8 Drawing according to Figure 7 The schematic diagrams of the response curves of the optical scanning device in the embodiment for horizontal vibration (UX plane) and vertical vibration (UZ plane) when the actuator is operated in the same phase and out of phase are shown.

[0027] Figure 9 Drawing according to Figure 8 A magnified schematic diagram of the resonant response of the optical scanning device in the frequency range between 8000 Hz and 9400 Hz.

[0028] Figure 10 Drawing according to Figure 7 The image of a nonlinear scanning pattern generated when the actuator of the optical scanning device in the embodiment operates in phase and the frequency is between 5000Hz and 6000Hz in the frequency divergence region.

[0029] Figure 11 Drawing according to Figure 7A schematic diagram of the scanning pattern generated by the two actuators of the optical scanning device of the embodiment operating in phase and performing amplitude modulation.

[0030] Figure 12 A flowchart illustrating a method for manufacturing an optical scanning device according to a third embodiment of the present disclosure is shown.

[0031] Figure 13 A flowchart illustrating a method for manufacturing an optical scanning apparatus according to the fourth embodiment of this disclosure is shown.

[0032] Figure 14A A schematic diagram of a substrate for an optical scanning device is shown.

[0033] Figure 14B Drawing according to Figure 13 A schematic diagram of the actuator setting step in the manufacturing method of the optical scanning device of the embodiment.

[0034] Figure 14C Drawing according to Figure 13 A schematic diagram of the PZT thin film setting step in the manufacturing method of the optical scanning device of the embodiment.

[0035] Figure 14D Drawing according to Figure 13 A schematic diagram of the connector setting steps and the tapered waveguide setting steps in the manufacturing method of the optical scanning device of the embodiment.

[0036] Figure 15A A schematic diagram of the optical scanning apparatus according to the fifth embodiment of the present disclosure is shown.

[0037] Figure 15B Drawing according to Figure 15A A schematic diagram of the substrate of the optical scanning device in the embodiment.

[0038] Figure 15C Drawing according to Figure 15A A schematic diagram of the actuator setting step in the manufacturing method of the optical scanning device of the embodiment.

[0039] Figure 15D Drawing according to Figure 15A A schematic diagram of another actuator setting step in the manufacturing method of the optical scanning device of the embodiment.

[0040] Figure 15E Drawing according to Figure 15A A schematic diagram of the PZT thin film setting step in the manufacturing method of the optical scanning device of the embodiment.

[0041] Figure 15F Drawing according to Figure 15A A schematic diagram of another PZT thin film setting step in the manufacturing method of the optical scanning device of the embodiment.

[0042] Figure 15G Drawing according to Figure 15A A schematic diagram of the overall optical scanning device in the embodiment.

[0043] Figure 15H Drawing according to Figure 15G The optical scanning device of the embodiment is shown in the schematic diagram of the horizontal vibration response and vertical vibration response curves when the fixed end and the free end are fixed.

[0044] Figure 15I Drawing according to Figure 15G The optical scanning device of the embodiment is shown in the schematic diagram of the horizontal vibration response and vertical vibration response curves when the fixed end is fixed and the free end is not fixed.

[0045] Figure 16 A schematic diagram of a microdisplay according to the sixth embodiment of the present disclosure is shown.

[0046] Figure 17A Drawing according to Figure 16 A schematic diagram of the scan pattern generated by the optical scanning device of the microdisplay in the embodiment using raster scanning.

[0047] Figure 17B Drawing according to Figure 16 A schematic diagram of the scanning pattern generated by the optical scanning device of the microdisplay in the embodiment using spiral scanning.

[0048] Figure 17C Drawing according to Figure 16 A schematic diagram of the scanning pattern generated by the optical scanning device of the microdisplay in the embodiment using Lissajous scanning.

[0049] Figure 17D Drawing according to Figure 16 Another schematic diagram of the scanning pattern generated by the optical scanning device of the microdisplay in the embodiment using Lissajous scanning.

[0050] Figure 18A A schematic diagram of a miniature imaging system according to the seventh embodiment of the present disclosure is shown.

[0051] Figure 18B A schematic diagram of the miniature imaging system according to the eighth embodiment of the present disclosure is shown.

[0052] Figure 18C A schematic diagram of a miniature imaging system according to the ninth embodiment of this disclosure is shown.

[0053] Figure 19 Drawing according to Figure 18A A schematic diagram of a scan pattern generated by a circular scan using the miniature imaging system of the embodiment. Detailed Implementation

[0054] Several embodiments of this disclosure will be described below with reference to the accompanying drawings. For clarity, many practical details will be set forth in the following description. However, it should be understood that these practical details should not be used to limit the scope of this disclosure. That is, in some embodiments of this disclosure, these practical details are not essential. Furthermore, for the sake of simplicity in the drawings, some conventional structures and elements will be illustrated in a simple schematic manner; and repeated elements may be denoted by the same reference numerals.

[0055] It should be understood that when a component (or device) is "connected" to another component, it can mean that the component is directly connected to the other component, or it can mean that the component is indirectly connected to the other component, that is, there is another component between the component and the other component. Conversely, only when it is explicitly stated that a component is "directly connected" to another component does it mean that there is no other component between the component and the other component. In addition, the terms "first," "second," "third," etc., are only used to describe different components and are not limiting to the components themselves. Therefore, the first component or part discussed below can be called the second component or part.

[0056] Please see Figure 1 . Figure 1 A schematic diagram of an optical scanning apparatus 100 according to a first embodiment of the present disclosure is shown. The optical scanning apparatus 100 includes a substrate 110, two actuators 120a and 120b, a connector 130, and a waveguide 140. The substrate 110 includes two mounting portions 111 and 112 and a connecting portion 113. The two mounting portions 111 and 112 include two free ends 111a and 112a and two fixed ends 111b and 112b. One of the two free ends 111a and 112a faces one of the two fixed ends 111b and 112b, and the two free ends 111a and 112a are close to each other, and the two fixed ends 111b and 112b are close to each other. The connecting portion 113 connects the two fixed ends 111b and 112b of the two mounting portions 111 and 112. The two actuators 120a and 120b are respectively arranged side by side in the two mounting portions 111 and 112. Connector 130 connects to two mounting portions 111 and 112 and is positioned between two actuators 120a and 120b. Waveguide 140 is positioned between the two actuators 120a and 120b and passes through connector 130. One end 140a of waveguide 140 is connected to connecting portion 113 and is adjacent to the two fixed ends 111b and 112b of the two mounting portions 111 and 112, while the other end 140b of waveguide 140 is adjacent to the two free ends 111a and 112a of the two mounting portions 111 and 112. The two actuators 120a and 120b are actuated simultaneously in phase or out of phase along one dimension, thereby causing waveguide 140 to vibrate along two dimensions to generate a scanning pattern.

[0057] In other words, the setting part 111 includes a free end 111a and a fixed end 111b. The setting part 112 includes a free end 112a and a fixed end 112b. The fixed ends 111b and 112b are provided in the connecting part 113. The connecting member 130 connects the free ends 111a and 112a. When two driving signals are applied to the two actuators 120a and 120b, the actuators 120a and 120b vibrate along the z-axis to drive the setting parts 111 and 112 to bend, and the connecting member 130 and the waveguide 140 provided between the setting parts 111 and 112 are also driven by the setting parts 111 and 112. Specifically, when a driving signal is applied to each of the two actuators 120a and 120b, the waveguide 140 is driven to vibrate along one of the two dimensions. That is, when the driving signals applied to the two actuators 120a and 120b are the same, the waveguide 140 moves along the Z-axis (i.e., one dimension).

[0058] When one of two driving signals with a phase difference is applied to one of the two actuators 120a, and the other of the two driving signals is applied to the other of the two actuators 120b, the waveguide 140 is driven to vibrate along two dimensions. These two dimensions include a vertical dimension and a horizontal dimension. In other words, when the phase, voltage, or frequency of the driving signals applied to the two actuators 120a and 120b is different, the waveguide 140 moves along the XZ plane (two dimensions). Thus, the optical scanning device 100 of this disclosure can be actuated along one dimension (the Z-axis direction) and generate a scanning pattern in two dimensions.

[0059] Furthermore, the substrate 110 can be a stainless steel substrate, and each of the two actuators 120a and 120b can be made of a double-layer lead zirconate titanate (PZT) film, and the waveguide 140 can be a tapered-tipped optical fiber, but this disclosure is not limited thereto. Therefore, the optical scanning device 100 of this disclosure uses a stainless steel substrate 110 to obtain a better scanning range. In addition, the optical scanning device 100 of this disclosure can generate different scanning patterns by adjusting the phase, frequency, and voltage amplitude of the drive signals of the actuators 120a and 120b.

[0060] Please refer to Figure 1 and Figure 2 . Figure 2 Drawing according to Figure 1 Schematic diagrams of the response curves of the actuators 120a and 120b of the optical scanning device 100 in this embodiment when operating in-phase and out-of-phase conditions, showing their response to horizontal vibration (UX plane) and vertical vibration (UZ plane). Figure 2In this context, "UX plane (in phase)" indicates the displacement of waveguide 140 along the X-axis when the drive signals of actuators 120a and 120b are in phase. "UZ plane (in phase)" indicates the displacement of waveguide 140 along the Z-axis when the drive signals of actuators 120a and 120b are in phase. "UX plane (out of phase)" indicates the displacement of waveguide 140 along the X-axis when the drive signals of actuators 120a and 120b are out of phase. "UZ plane (out of phase)" indicates the displacement of waveguide 140 along the Z-axis when the drive signals of actuators 120a and 120b are out of phase. "In phase" indicates that actuators 120a and 120b move synchronously along the Z-axis. "Out of phase" indicates that actuators 120a and 120b move in opposite directions along the Z-axis. For example, when actuators 120a and 120b are out of phase, when actuator 120a moves to the upper side, actuator 120b is on the lower side. Furthermore, the frequency of the drive signal matches the resonant frequency of waveguide 140. Figure 2 In the process, the third resonant frequency of waveguide 140 and the second resonant frequency of the driving signals of actuators 120a and 120b are both 8860Hz. The out-of-phase frequency of 8860Hz has a horizontal vibration amplitude (along the X-axis) of 0.382 mm and a vertical vibration amplitude (along the Z-axis) of less than 10. m, with an aspect ratio of approximately 38. A high aspect ratio indicates that the horizontal and vertical vibrations of the actuators 120a and 120b can be independently controlled. Therefore, the optical scanning device 100 of this disclosure can perform raster scanning, Lissajous scanning, and spiral scanning.

[0061] Please refer to Figure 1 and Figure 3 . Figure 3 Drawing according to Figure 1 A schematic diagram of the scan pattern generated by the Lissajous scanning of the optical scanning device 100 of the embodiment. Figure 3 The diagram shows the transient analysis results of the Lissajous scan pattern of the optical scanning device 100 within 20 milliseconds. Among them, the "UZ plane ( "m)" represents the displacement of waveguide 140 along the Z-axis; "UX plane ( “m)” represents the displacement of waveguide 140 along the X-axis. When each of the two driving signals is applied to each of the two actuators 120a and 120b, the scanning pattern generated by waveguide 140 is a Lissajous scanning pattern. When actuators 120a and 120b move in phase, waveguide 140 vibrates along the vertical dimension. When actuators 120a and 120b move out of phase, waveguide 140 vibrates along the horizontal dimension.

[0062] In other words, for the optical scanning device 100 to generate a Lissajous scan pattern, the waveguide 140 needs to be displaced along both the X-axis and Z-axis directions. The displacement along the X-axis can be generated by the out-of-phase movement of actuators 120a and 120b, while the displacement along the Z-axis can be generated by the in-phase movement of actuators 120a and 120b. Figure 3 In this system, vertical displacement is generated by applying two in-phase drive signals with a frequency of 1430Hz and a voltage of 2V, while horizontal displacement is generated by applying two out-of-phase drive signals with a frequency of 8860Hz and a voltage of 20V.

[0063] Please refer to Figure 1 and Figure 4 . Figure 4 Drawing according to Figure 1 The actuators 120a and 120b of the optical scanning device 100 in the embodiment operate in phase to generate a scanning pattern by circular scanning. Figure 4 The transient analysis results of the circular scan pattern of the optical scanning device 100 within 0.56 milliseconds are shown. The X-axis displacement of the circular scan pattern is generated by a 20V drive signal, and the Z-axis displacement of the circular scan pattern is generated by a 10V drive signal. The aforementioned drive signals have a frequency of 8860Hz and a phase shift of 0.6π.

[0064] Please refer to Figure 1 and Figure 5 . Figure 5 Drawing according to Figure 1 A schematic diagram of the scanning pattern when the actuators 120a and 120b of the optical scanning device 100 of the embodiment operate in phase and perform amplitude modulation. Figure 5 The transient analysis results of the helical scanning pattern of the optical scanning device 100 at a drive signal frequency of 8600 Hz are illustrated. Two drive signals are applied to two actuators 120a and 120b, respectively, and the scanning pattern generated by the waveguide 140 is a helical scanning pattern. The frequency of one drive signal is the same as that of the other drive signal, and the phase difference between them is greater than 85 degrees and less than 95 degrees. The radius of the helical scanning pattern varies with the time-varying drive amplitude of each of the two drive signals. Ideally, the phase difference between the two drive signals should be 90 degrees. However, in practice, the phase difference between the two drive signals can be adjusted to be greater than or less than 90 degrees to compensate for mechanical delay, electrical delay, or impedance mismatch between the two actuators 120a and 120b and the waveguide 140.

[0065] Please refer to Figure 1 , Figure 6A , Figure 6B , Figure 6C and Figure 6D . Figure 6A Drawing according to Figure 1A schematic diagram of the scanning pattern generated by circular scanning when the actuators 120a and 120b of the optical scanning device 100 of the embodiment are operating in phase. Figure 6B Drawing according to Figure 1 The optical scanning device 100 of the embodiment uses a circular scanning pattern to dynamically capture an image. Figure 6C Drawing according to Figure 6B A side view of the scan pattern generated by the optical scanning device 100 of the embodiment using circular scanning. Figure 6D Drawing according to Figure 1 This is a schematic diagram of the scanning pattern generated by elliptical scanning when the actuators 120a and 120b of the optical scanning device 100 of the embodiment operate in phase and perform amplitude modulation. Figure 6A , Figure 6B and Figure 6C In this case, circular scanning is achieved when the two driving signals of the optical scanning device 100 are operated at the same frequency and have a phase difference. More specifically, the frequency of the two driving signals is 6360Hz. (The angle is missing from the original text.) This represents the displacement angle of waveguide 140°. Figure 6D The scanning graphic image system is an optical scanning device 100 operated under the condition that the frequency of the two driving signals is modulated at 10Hz.

[0066] Please refer to Figure 7 . Figure 7A schematic diagram of an optical scanning apparatus 200 according to a second embodiment of the present disclosure is shown. The optical scanning apparatus 200 includes a substrate 210, two actuators 220a and 220b, a connector 230, and a waveguide 240. The substrate 210 includes two mounting portions 211 and 212 and a connecting portion 213. The two mounting portions 211 and 212 include two free ends 211a and 212a and two fixed ends 211b and 212b. One of the two free ends 211a and 212a is opposite to one of the two fixed ends 211b and 212b. The two free ends 211a and 212a are close to each other, while the two fixed ends 211b and 212b are far apart from each other. The connecting portion 213 connects the two fixed ends 211b and 212b of the two mounting portions 211 and 212. The two actuators 220a and 220b are respectively arranged side by side in the two mounting portions 211 and 212. Connector 230 connects the two mounting portions 211 and 212 and is disposed between the two actuators 220a and 220b. Waveguide 240 is disposed between the two actuators 220a and 220b and passes through connector 230. One end 240a of waveguide 240 is connected to the connecting portion 213 of substrate 210 and is adjacent to the two fixed ends 211b and 212b of the two mounting portions 211 and 212. The other end 240b of waveguide 240 is adjacent to the other of the two fixed ends 211b and 212b of the two mounting portions 211 and 212. The two actuators 220a and 220b are actuated simultaneously in phase or out of phase along one dimension, thereby causing waveguide 240 to vibrate in two dimensions to generate a scanning pattern.

[0067] In detail, the connecting portion 213 includes a long side L1 and two short sides L2 and L3. The two short sides L2 and L3 are perpendicular to the long side L1 and are disposed at opposite ends of the long side L1. Two mounting portions 211 and 212 are respectively connected to the two short sides L2 and L3 and are parallel to the long side L1. The connecting member 230 is connected between the two free ends 211a and 212a of the two mounting portions 211 and 212. One end 240a of the waveguide is adjacent to the fixed end 211b, and the other end 240b of the waveguide is adjacent to the fixed end 212b and is connected to the short side L3 of the connecting portion 213. When the connecting member 230 is twisted, the center of its top surface rotates around the Z-axis, while the center of its bottom surface rotates in the opposite direction. In this way, the optical scanning device 200 of this disclosure can obtain the maximum amplitude of the waveguide 240 by diagonally arranging the actuators 220a and 220b so that the two ends of the connecting member 230 generate opposite rotation angles.

[0068] Furthermore, the material of the substrate 210, the two actuators 220a, 220b and the waveguide 240 may be the same as the material of the substrate 110, the two actuators 120a, 120b and the waveguide 140 in the first embodiment, but this disclosure is not limited thereto.

[0069] Please refer to Figure 7 , Figure 8 and Figure 9 . Figure 8 Drawing according to Figure 7 The schematic diagram shows the response curves of the actuators 220a and 220b of the optical scanning device 200 in the embodiment when they are in phase and out of phase, respectively, in the horizontal vibration (UX plane) and vertical vibration (UZ plane). Figure 9 Drawing according to Figure 8 A magnified schematic diagram of the resonant response of an optical scanning device in the frequency range between 8000 Hz and 9400 Hz. Figure 8 In this design, the lengths of the two actuators 220a and 220b can be matched to the resonant mode of waveguide 240. The driving signal is in phase, and its horizontal vibration (i.e., the amplitude in the UX plane) can be three times larger than its vertical vibration (i.e., the amplitude in the UZ plane). When waveguide 240 is excited and vibrates linearly, its scanning pattern is a linear scanning pattern. When waveguide 240 is excited and vibrates nonlinearly, its scanning pattern is an elliptical scanning pattern. Figure 9 In this context, the frequency range between 8000Hz and 9400Hz is considered the frequency divergence region or the nonlinear vibration region. Figure 9 The scanning path of waveguide 240 at frequency resonance is also illustrated, particularly the portion of the frequency bifurcation region where the horizontal displacement is greater than or equal to the vertical displacement. The shape and direction of the scanning path change when the phase difference between the two directions changes. When the frequency of the driving signal applied to the two actuators 220a and 220b is 8860Hz, the amplitudes in the UX and UZ planes are the same, resulting in a circular scanning pattern. When the frequency of the driving signal applied to the two actuators 220a and 220b is between 8700Hz and 9260Hz, the scanning pattern is either a linear or elliptical scanning pattern.

[0070] Please refer to Figure 7 and Figure 10 . Figure 10 Drawing according to Figure 7 The image of a nonlinear scanning pattern generated when the actuators 220a and 220b of the optical scanning device 200 of the embodiment operate in phase and at frequencies between 5000Hz and 6000Hz, in the frequency divergence region. Figure 10 In this process, when the frequency of the drive signal applied to the two actuators 220a and 220b is between 5060Hz and 5910Hz, the scanning pattern can be a linear scanning pattern or an elliptical scanning pattern.

[0071] Please refer to Figure 11 . Figure 11 Drawing according to Figure 7 A schematic diagram of the scanning pattern generated by the two actuators 220a and 220b of the optical scanning device 200 of the embodiment operating in phase and performing amplitude modulation. Figure 11The transient analysis results of the spiral scanning pattern of the optical scanning device 200 when the driving signal is in phase, the frequency is 8600Hz, and the voltage is 36V are shown.

[0072] Please refer to Figure 1 , Figure 7 and Figure 12 . Figure 12 A flowchart illustrating a method S0 for manufacturing an optical scanning device according to a third embodiment of this disclosure is provided. The method S0 includes execution steps S01, actuator placement step S03, connector placement step S05, and tapered waveguide placement step S07. Step S01 involves providing a substrate. Actuator placement step S03 involves placing two actuators on two placement portions using an aerosol deposition method. Connector placement step S05 involves placing a connector between the two actuators. Tapered waveguide placement step S07 involves placing a waveguide between the two actuators to form an optical scanning device. In this third embodiment, the optical scanning device may be either the optical scanning device 100 of the first embodiment or the optical scanning device 200 of the second embodiment, but this disclosure is not limited thereto.

[0073] In the tapered waveguide fabrication step S07, the waveguide is immersed in a hydrofluoric acid buffer solution and slowly removed to form a tapered-tipped optical fiber. Alternatively, the waveguide can be fabricated using a carbon dioxide laser fusion pulling technique. Therefore, the optical scanning device manufacturing method S0 of this disclosure places the actuator on the substrate to drive the waveguide instead of a scanning mirror, reducing the size of the optical scanning device while maintaining resolution and field of view. In other embodiments of this disclosure, the tapered optical fiber can be replaced by a waveguide structure fabricated using microfabrication processes.

[0074] Please refer to Figure 12 , Figure 13 , Figure 14A , Figure 14B , Figure 14C and Figure 14D . Figure 13 A flowchart illustrating the manufacturing method S1 of the optical scanning device 100a according to the fourth embodiment of this disclosure is shown. Figure 14A A schematic diagram of a substrate 110 of an optical scanning device 100a is shown. Figure 14B Drawing according to Figure 13 A schematic diagram of the actuator setting step S13 in the manufacturing method S1 of the optical scanning device 100a of the embodiment. Figure 14C Drawing according to Figure 13 A schematic diagram of the PZT thin film setting step S14 in the manufacturing method S1 of the optical scanning device 100a of the embodiment. Figure 14D Drawing according to Figure 13A schematic diagram of the connector setting step S15 and the tapered waveguide setting step S17 of the manufacturing method S1 of the optical scanning device 100a of the embodiment. Figure 13 In the manufacturing method S1 of the optical scanning device 100a, the steps include execution step S11, actuator setting step S13, lead zirconate titanate (PZT) thin film setting step S14, connector setting step S15, and tapered waveguide setting step S17. Figure 13 In the process, steps S11, S13 (actuator setting), S15 (connector setting), and S17 (tapered waveguide setting) can be respectively connected with... Figure 12 Steps S01, S03, S05, and S07 of the tapered waveguide setup are performed identically and will not be described again. Furthermore, the manufacturing method S1 of the optical scanning device 100a may further include performing a PZT thin film setup step S14, which is performed before the connector setup step S15. In the PZT thin film setup step S14, a lead dizirconate titanate (PZT) thin film layer 150 is set onto the two actuators 120a and 120b in a dual piezoelectric structure using an aerosol deposition method and a photolithography patterning process. Figure 14D In this embodiment, the optical scanning device 100a manufactured by manufacturing method S1 may be the same as the optical scanning device 100 of the first embodiment, but further includes a double PZT thin film layer 150 with a double piezoelectric structure disposed on the actuators 120a and 120b, or it may be the same as the optical scanning device 200 of the second embodiment, but further includes a double PZT thin film layer 150 with a double piezoelectric structure disposed on the actuators 220a and 220b. Therefore, the manufacturing method S1 of the optical scanning device 100a disclosed herein can increase the actuation amount of the actuators 120a and 120b by respectively disposing the PZT thin film layer 150 on the actuators 120a and 120b.

[0075] Please refer to Figure 13 , Figure 15A , Figure 15B , Figure 15C , Figure 15D , Figure 15E , Figure 15F , Figure 15G , Figure 15H and Figure 15I . Figure 15A A schematic diagram of the optical scanning apparatus 300 according to the fifth embodiment of the present disclosure is shown. Figure 15B Drawing according to Figure 15A A schematic diagram of the substrate 110 of the optical scanning device in the embodiment. Figure 15C Drawing according to Figure 15A A schematic diagram of the actuator setting step S13 in the manufacturing method S1 of the optical scanning device 300 of the embodiment. Figure 15D Drawing according to Figure 15AA schematic diagram of another actuator setting step S13 in the manufacturing method S1 of the optical scanning device 300 of the embodiment. Figure 15E Drawing according to Figure 15A A schematic diagram of the PZT thin film setting step S14 in the manufacturing method S1 of the optical scanning device 300 of the embodiment. Figure 15F Drawing according to Figure 15A A schematic diagram of another PZT thin film setting step S14 in the manufacturing method S1 of the optical scanning device 300 of the embodiment. Figure 15G Drawing according to Figure 15A A schematic diagram of the overall optical scanning device 300 of the embodiment. Figure 15H Drawing according to Figure 15G The optical scanning device 300 of the embodiment is shown in the schematic diagram of the horizontal vibration response and vertical vibration response curves when the fixed ends 111b, 112b and the free ends 111a, 112a are fixed. Figure 15I Drawing according to Figure 15G The optical scanning device 300 of the embodiment is shown in the schematic diagram of the horizontal vibration response and vertical vibration response curves when the fixed ends 111b and 112b are fixed and the free ends 111a and 112a are not fixed. Figure 15A and Figure 15G An optical scanning device 300 with a dual piezoelectric structure is illustrated, that is, the optical scanning device 300 has four actuators 120a and 120b disposed on opposite sides of a substrate 110. The optical scanning device 300 is achieved by performing the actuator placement step S13 twice on both sides of the substrate 110, and then performing the PZT thin film placement step S14 twice on both sides of the substrate 110. Figure 15G In the optical scanning device 300, the substrate 110 can be made of thin, patterned stainless steel, and the PZT thin film layer 150 can be made of a metal such as a gold-chromium (Au / Cr) alloy, but this disclosure is not limited thereto. When the boundary state of the optical scanning device 300 is a fixed-fixed state, that is, when the fixed ends 111b and 112b and the free ends 111a and 112a are all fixed, its horizontal vibration response and vertical vibration response can be as follows: Figure 15H As shown. When the boundary state of the optical scanning device 300 is a fixed-free state, that is, the fixed ends 111b and 112b are fixed, while the free ends 111a and 112a are not fixed, its horizontal vibration response and vertical vibration response can be as follows. Figure 15I As shown.

[0076] Please refer to Figure 16 . Figure 16A schematic diagram illustrating a microdisplay 10 according to a sixth embodiment of this disclosure is shown. The microdisplay 10 includes an optical scanning device 100b. The microdisplay 10 may be one of a pair of eyeglasses, an automatic diagnostic display, a surgical vital signs display, or a head-mounted display for fighter pilots, but this disclosure is not limited thereto. Figure 16 In this embodiment, the microdisplay 10 is an eyeglass device, and the optical scanning device 100b can be one of the optical scanning device 100 of the first embodiment, the optical scanning device 200 of the second embodiment, and the optical scanning device 100a of the fourth embodiment, but the present disclosure is not limited thereto. In other embodiments, the microdisplay 10 may further include a field programmable gate array (FPGA) controller, which is electrically connected to the optical scanning device to provide two driving signals to the actuator and to provide optical modulation to the waveguide of the optical scanning device.

[0077] Please refer to Figure 16 , Figure 17A , Figure 17B , Figure 17C and Figure 17D . Figure 17A Drawing according to Figure 16 A schematic diagram of the scan pattern generated by the optical scanning device 100b of the microdisplay 10 in the embodiment using raster scanning. Figure 17B Drawing according to Figure 16 A schematic diagram of the scanning pattern generated by the optical scanning device 100b of the microdisplay 10 in the embodiment using spiral scanning. Figure 17C Drawing according to Figure 16 A schematic diagram of the scan pattern generated by the optical scanning device 100b of the microdisplay 10 in the embodiment using Lissajous scanning. Figure 17D Drawing according to Figure 16 Another schematic diagram of the scan pattern generated by the optical scanning device 100b of the microdisplay 10 in this embodiment using Lissajous scanning. Figure 16 and Figure 17A In this design, the scanning pattern is a grating scan pattern. The frequency of the two driving signals of the optical scanning device 100b is 120Hz, and the voltage of the two driving signals is 10V. When the scanning pattern generated by the waveguide is a grating scan pattern, the frequencies of the two driving signals are the same, and they have a phase difference of 180 degrees. When the two driving signals operate at the first frequency, the waveguide vibrates along the vertical dimension. When the two driving signals operate at the second frequency, the waveguide vibrates along the vertical dimension, and the second frequency is at least 1000 times greater than the first frequency.

[0078] exist Figure 16 and Figure 17BIn the process, the scanning pattern is a spiral scanning pattern, and the frequencies of the two driving signals of the optical scanning device 100b are 95Hz and 10Hz, and the voltage of the two driving signals is 21V.

[0079] exist Figure 16 and Figure 17C In the process, the scan pattern is a Lissajous scan pattern, and the frequencies of the two drive signals of the optical scanning device 100b are 120Hz and 65Hz, and the voltage of the two drive signals is 10V.

[0080] exist Figure 16 and Figure 17D In the process, the scan pattern is a Lissajous scan pattern, and the frequencies of the two drive signals of the optical scanning device 100b are 7000Hz and 12500Hz.

[0081] Please refer to Figure 1 and Figure 18A , Figure 18A A schematic diagram of a miniature imaging system 30 according to the seventh embodiment of this disclosure is shown. The miniature imaging system 30 includes a light source 11, a light source 2... 1. Fiber optic coupler 12, optical scanning device 100, and a photosensor 13. Light source 11 is used to emit a light beam 20. 2. 1. Fiber optic coupler 12 includes two input channels 121 and 122. The two input channels 121 and 122 couple a light source 11 and are used to receive light 20. Optical scanning device 100 and 2... A fiber optic coupler 12 couples and is used to scan light beam 20, which is coupled through two input channels 122 to form a scanning pattern 21 on a surface 22. Alternatively, the optical scanning device 100 can be coupled to 2 by fiber optic fusion splicing. 1. Fiber optic coupler 12 couples the light source, but this disclosure is not limited thereto. Photosensor 13 is arranged parallel to the light source 11 and connected to input channel 121, and is used to receive scanned patterns through optical scanning device 100. Figure 18A In this embodiment, the optical scanning device 100 may be the same as the optical scanning device 100 in the first embodiment, but this disclosure is not limited thereto. In other embodiments of this disclosure, the optical scanning device may be the same as the optical scanning device 200 in the second embodiment.

[0082] The light 20 emitted from the light source 11 is coupled to 2 The input channel 122 of the fiber optic coupler 12 projects the scan pattern 21 onto the surface 22. The photosensor 13 is coupled to a surface 2 that is close to the optical scanning device 100. 1. Input channel 121 of fiber optic coupler 12. Herein, the miniature imaging system 30 of this disclosure can emit light 20 through a single optical fiber and detect scanned patterns 21.

[0083] Please refer to Figure 18A and Figure 18B . Figure 18B A schematic diagram of a miniature imaging system 40 according to the eighth embodiment of this disclosure is shown. The miniature imaging system 40 includes a light source 11, an optical scanning device 300, and a photosensor 13. The light source 11 emits a light 20 onto a surface 22 to form an image. The optical scanning device 300 scans the image on the surface 22 to obtain a scan pattern 21. The photosensor 13 is connected to the optical scanning device 300 and is used to receive the scan pattern 21 through the optical scanning device 300. Specifically, the light source 11 may be a ring light, ambient light, or other external light source that can be detected around the optical scanning device 100, but this disclosure is not limited thereto. The optical scanning device 300 may be the same as the optical scanning device 100 of the first embodiment, but this disclosure is not limited thereto.

[0084] Additionally, the light sensor 13 can be connected to a computer 15 via an Instruments Data Acquisition Card 14 to display the scanned image 21 on the computer 15. Therefore, the miniature imaging system 40 of this disclosure does not require the use of 2 1. Fiber optic coupler 12 can detect the scan pattern 21 and capture the reflection intensity of the image.

[0085] Please refer to Figure 18A , Figure 18B and Figure 18C . Figure 18C A schematic diagram of a miniature imaging system 50 according to a ninth embodiment of this disclosure is shown. The miniature imaging system 50 includes a light source 11, an optical scanning device 300, and a photosensor 13. The optical scanning device 300 is connected to the light source 11, and the light source 11 emits a light beam 20 onto a surface 22 through the optical scanning device 300 to form a scan pattern 21. The photosensor 13 receives the scan pattern 21. The scan pattern 21 can be scanned by pixel lamps and acquired by a ring fiber optic matrix connected to the photosensor 13. The photosensor 13 can be a miniature detector or a built-in detector located adjacent to the optical scanning device 300. Furthermore, the photosensor 13 can be connected to a computer 15 via an instrument data acquisition card 14 to display the scan pattern 21 on the computer 15. Thus, the miniature imaging system 50 of this disclosure can reconstruct an image (scan pattern 21) based on the collected light intensity.

[0086] Please refer to Figure 18A and Figure 19 . Figure 19 Drawing according to Figure 18A A schematic diagram of a scan pattern generated by the miniature imaging system 30 of the embodiment using circular scanning. Figure 19In the image, the scanned pattern is a concentric circle pattern of a sine curve, and the radius of the concentric circle changes according to a sine law rather than a nonlinear change.

[0087] As can be seen from the above embodiments, the present disclosure has the following advantages.

[0088] 1. The optical scanning device disclosed herein can be actuated along one dimension (i.e., the Z-axis direction) and produce scanning patterns in two dimensions.

[0089] 2. The optical scanning device disclosed herein uses a substrate made of stainless steel to obtain a better scanning range.

[0090] 3. The optical scanning device disclosed herein can generate different scanning patterns by adjusting the phase, frequency, and voltage amplitude of the drive signal of the actuator.

[0091] 4. The optical scanning device disclosed herein sets the actuators diagonally so that the two ends of the connector generate opposite rotation angles, thereby obtaining the maximum waveguide amplitude.

[0092] 5. The method for manufacturing the optical scanning device disclosed herein involves placing an actuator on a substrate to drive the waveguide instead of a scanning mirror, which can reduce the size of the optical scanning device while maintaining resolution and field of view.

[0093] 6. The method for manufacturing the optical scanning device disclosed herein can increase the actuation amount of the actuator by separately disposing PZT thin film layers on the actuator.

[0094] 7. The miniature imaging system disclosed herein can emit light through a single optical fiber and detect scanned patterns.

[0095] While this disclosure has been presented above with reference to embodiments, other embodiments are also possible. Therefore, the spirit and scope of the appended claims should not be limited to the description of the included embodiments.

[0096] Anyone skilled in this art may make various modifications and refinements without departing from the spirit and scope of this disclosure; therefore, the scope of protection of this disclosure shall be determined by the appended claims.

Claims

1. An optical scanning device, comprising: A substrate, comprising: The two mounting portions include two free ends and two fixed ends, one of the two free ends and one of the two fixed ends facing each other, the two free ends being close to each other, and the two fixed ends being close to each other; and A connecting part connects the two fixed ends of the two mounting parts; Two actuators are respectively arranged side by side in the two mounting portions; A connector, connecting the two mounting portions and disposed between the two actuators; and A waveguide is disposed between the two actuators and passes through the connector, wherein one end of the waveguide is connected to the connector and is adjacent to the two fixed ends of the two mounting portions, and the other end of the waveguide is adjacent to the two free ends of the two mounting portions; in, The two actuators actuate simultaneously or in phase along one dimension, thereby causing the waveguide to vibrate along two dimensions to generate a scanning pattern.

2. The optical scanning device as claimed in claim 1, wherein the substrate is a stainless steel substrate, each of the two actuators is made of a double-layer lead zirconate titanate (PZT) film, and the waveguide is a tapered-tipped optical fiber.

3. The optical scanning apparatus of claim 1, wherein when a driving signal is applied to each of the two actuators, the waveguide is driven to vibrate along one of the two dimensions.

4. The optical scanning apparatus of claim 3, wherein when the drive signal is applied to each of the two actuators, When the waveguide is excited and vibrates along a straight line, the scanning pattern of the waveguide is a linear scanning pattern; and When the waveguide is excited and vibrates nonlinearly, the scanning pattern of the waveguide is an elliptical scanning pattern. in, The frequency of the driving signal matches the resonant frequency of the waveguide.

5. The optical scanning apparatus of claim 1, wherein when a driving signal is applied to one of the two actuators and another driving signal is applied to the other of the two actuators, the waveguide is driven to vibrate along the two dimensions, wherein the two dimensions include a vertical dimension and a horizontal dimension, wherein the other driving signal has a phase difference with the driving signal.

6. The optical scanning device of claim 5, wherein the driving signal and the other driving signal are two driving signals, and when each of the driving signal and the other driving signal is applied to each of the two actuators, the scanning pattern generated by the waveguide is a spiral scanning pattern; in, The frequency of the driving signal is the same as the frequency of the other driving signal, and the phase difference is greater than 85 degrees and less than 95 degrees. The radius of the spiral scanning pattern varies with the time-varying driving amplitude of each of the two driving signals.

7. The optical scanning device as claimed in claim 5, wherein the driving signal and the other driving signal are two driving signals, and when each of the two driving signals is applied to each of the two actuators, the scanning pattern generated by the waveguide is a grating scanning pattern; in, The frequency of the driving signal is the same as the frequency of the other driving signal, and the phase difference is 180 degrees; When the two driving signals operate at a first frequency, the waveguide vibrates along the vertical dimension; when the two driving signals operate at a second frequency, the waveguide vibrates along the horizontal dimension, and the second frequency is at least 1000 times greater than the first frequency.

8. The optical scanning device of claim 5, wherein the driving signal and the other driving signal are two driving signals, and when each of the two driving signals is applied to each of the two actuators, the scanning pattern generated by the waveguide is a Lissajous scanning pattern; in, When the two actuators move in the same phase, the waveguide vibrates along the vertical dimension; when the two actuators move out of phase, the waveguide vibrates along the horizontal dimension.

9. The optical scanning device as claimed in claim 1, further comprising: The lead zirconate titanate thin film layer adopts a dual piezoelectric structure and is respectively disposed on the two actuators.

10. A microdisplay comprising: The optical scanning device as described in claim 1; in, The miniature display is one of an eyeglasses device, an automated diagnostic display, a surgical vital signs display, and a head-mounted display for fighter pilots.

11. The microdisplay of claim 10, further comprising: A Field Programmable Gate Array (FPGA) controller is electrically connected to the optical scanning device to provide two drive signals to the two actuators and to provide optical modulation to the waveguide of the optical scanning device.

12. A miniature imaging system, comprising: A light source, used to emit a ray of light; 12 1. Fiber optic coupler, comprising: Two input channels are coupled to the light source and used to receive the light; The optical scanning device as described in claim 1, and the 2 1. A fiber optic coupler is used to couple and scan the light beam, which is coupled by one of the two input channels to form the scan pattern on a surface; and A light sensor is arranged parallel to the light source and connected to the other of the two input channels, and is used to receive the scanned pattern through the optical scanning device.

13. An optical scanning device, comprising: A substrate, comprising: The two mounting portions include two free ends and two fixed ends, one of the two free ends and one of the two fixed ends facing each other, the two free ends being close to each other, and the two fixed ends being far apart from each other; and A connecting part connects the two fixed ends of the two mounting parts; Two actuators are positioned opposite each other and are respectively disposed in the two mounting portions; A connector, connecting the two mounting portions and disposed between the two actuators; and A waveguide is disposed between the two actuators and passes through the connector, wherein one end of the waveguide is connected to the connection portion of the substrate and is adjacent to one of the two fixed ends of the two mounting portions, and the other end of the waveguide is adjacent to the other of the two fixed ends of the two mounting portions; in, The two actuators actuate simultaneously or in phase along one dimension, thereby causing the waveguide to vibrate along two dimensions to generate a scanning pattern.

14. The optical scanning device of claim 13, wherein the substrate is a stainless steel substrate, each of the two actuators is made of a double-layer lead zirconate titanate film, and the waveguide is a tapered-tipped optical fiber.

15. The optical scanning apparatus of claim 13, wherein when a driving signal is applied to each of the two actuators, the waveguide is driven to vibrate along one of the two dimensions.

16. The optical scanning apparatus of claim 15, wherein a drive signal is applied to each of the two actuators; When the waveguide is excited and vibrates along a straight line, the scanning pattern of the waveguide is a linear scanning pattern; and When the waveguide is excited and vibrates nonlinearly, the scanning pattern of the waveguide is an elliptical scanning pattern. in, The frequency of the driving signal matches the resonant frequency of the waveguide.

17. The optical scanning apparatus of claim 13, wherein when a driving signal is applied to one of the two actuators and another driving signal is applied to the other of the two actuators, the waveguide is driven to vibrate along the two dimensions, the two dimensions including a vertical dimension and a horizontal dimension, wherein the other driving signal has a phase difference with the driving signal.

18. The optical scanning apparatus of claim 17, wherein the driving signal and the other driving signal are two driving signals, and when each of the driving signal and the other driving signal is applied to each of the two actuators, the scanning pattern generated by the waveguide is a spiral scanning pattern; in, The frequency of the driving signal is the same as the frequency of the other driving signal, and the phase difference is greater than 85 degrees and less than 95 degrees. The radius of the spiral scanning pattern varies with the time-varying driving amplitude of each of the two driving signals.

19. The optical scanning device of claim 17, wherein the driving signal and the other driving signal are two driving signals, and when each of the two driving signals is applied to each of the two actuators, the scanning pattern generated by the waveguide is a grating scanning pattern; in, The frequency of the driving signal is the same as the frequency of the other driving signal, and the phase difference is 180 degrees; When the two driving signals operate at a first frequency, the waveguide vibrates along the vertical dimension; when the two driving signals operate at a second frequency, the waveguide vibrates along the horizontal dimension, and the second frequency is at least 1000 times greater than the first frequency.

20. The optical scanning apparatus of claim 17, wherein the driving signal and the other driving signal are two driving signals, and when each of the two driving signals is applied to each of the two actuators, the scanning pattern generated by the waveguide is a Lissajous scanning pattern; in, When the two actuators move in the same phase, the waveguide vibrates along the vertical dimension; when the two actuators move out of phase, the waveguide vibrates along the horizontal dimension.

21. The optical scanning apparatus of claim 13, further comprising: The lead zirconate titanate thin film layer adopts a dual piezoelectric structure and is respectively disposed on the two actuators.

22. A microdisplay comprising: The optical scanning device as described in claim 13; in, The miniature display is one of an eyeglasses device, an automated diagnostic display, a surgical vital signs display, and a head-mounted display for fighter pilots.

23. The microdisplay of claim 22, further comprising: A Field Programmable Gate Array (FPGA) controller is electrically connected to the optical scanning device to provide two drive signals to the two actuators and to provide optical modulation to the waveguide of the optical scanning device.

24. A miniature imaging system, comprising: A light source, used to emit a ray of light; 12 1. Fiber optic coupler, comprising: Two input channels are coupled to the light source and used to receive the light; The optical scanning device as described in claim 13, and the 2 1. A fiber optic coupler is used to couple and scan the light beam, which is coupled by one of the two input channels to form the scan pattern on a surface; and A light sensor is arranged parallel to the light source. The light sensor is connected to the other of the two input channels and is used to receive the scanned pattern through the optical scanning device.

25. A miniature imaging system, comprising: A light source is used to emit a ray of light onto a surface to form an image; The optical scanning apparatus of claim 13 is used to scan the surface to generate the scan pattern; and A light sensor is connected to the optical scanning device and is used to receive the scanned pattern through the optical scanning device.

26. A miniature imaging system, comprising: One light source; The optical scanning apparatus of claim 13, connected to the light source, wherein the light source emits a light beam through the optical scanning apparatus onto a surface to form a scan pattern; and A light sensor is used to receive the scanned pattern.

27. A method for manufacturing an optical scanning device, comprising: A substrate is provided, wherein the substrate includes two disposed portions and a connecting portion; Perform a actuator setting step to set two actuators in the two setting parts by an aerosol deposition method; Perform a connector setting step to position a connector between the two actuators; and Perform a tapered waveguide placement step to place a waveguide between the two actuators to form an optical scanning device, wherein one end of the waveguide is connected to the connector and the other end of the waveguide passes through the connector; in, The two actuators actuate simultaneously or in phase along one dimension, thereby causing the waveguide to vibrate along two dimensions to generate a scanning pattern.

28. The method of manufacturing the optical scanning device as claimed in claim 27, further comprising: A lead zirconate titanate thin film setting step is performed to deposit two lead zirconate titanate thin film layers in a dual piezoelectric structure on the two actuators by means of aerosol deposition and a photolithography patterning process.

29. The method of manufacturing an optical scanning device as claimed in claim 27, wherein in the tapered waveguide setting step, the waveguide is immersed in a hydrofluoric acid buffer solution and slowly removed, and the waveguide is a tapered-tipped optical fiber.

30. The method of manufacturing an optical scanning device as claimed in claim 29, wherein in the tapered waveguide setting step, the tapered tip optical fiber is fabricated by a carbon dioxide laser fusion drawing technique.

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