A vacuum isolation device for a charged particle movement channel
By designing a vacuum isolation device for the charged particle movement channel and using inert gas to drive the reciprocating movement of the piston and connecting rod, high vacuum isolation under high-precision conditions is achieved, solving the problem that existing vacuum isolation valves cannot meet the requirements of small volume and long valve stems. It is suitable for vacuum isolation of electron optical columns.
Patent Information
- Application Number
- CN202410880097.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-02
- Publication Date
- 2025-09-30
- Estimated Expiration
- 2044-07-02
AI Technical Summary
Existing vacuum isolation valves cannot meet the high vacuum isolation requirements under small volume, long valve stem and high precision conditions, which limits the development of high-precision instruments and equipment.
A vacuum isolation device including an auxiliary mounting seat, a main mounting seat, an isolation column, an isolation block, a connecting rod and a bellows was designed. The reciprocating movement of the piston and the connecting rod was driven by inert gas to achieve the conduction and blocking of the charged particle channel. The sealing isolation of the elastic connection component and the differential extraction block was used to meet the high vacuum isolation requirements.
It achieves high vacuum isolation with compact structure, simple operation and precise control, meets the sealing performance under high-precision conditions of small volume and long valve stem, and is suitable for vacuum isolation of electronic optical columns.
Smart Images
Figure CN118888416B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of vacuum isolation devices, and in particular to a vacuum isolation device for a charged particle movement channel. The present invention is particularly suitable for vacuum isolation of an electron optical column. Background Art
[0002] The development of the semiconductor industry is inseparable from advances in micro-nanofabrication technology. Advances in electron beam exposure and probing, and ion beam etching, have made significant contributions to the fabrication and quantitative measurement of optoelectronic components at the scale of 100 nanometers and below. High-energy electron beams, with their extremely small diffraction wavelengths, enable high-precision device processing and quantitative measurement at the nanometer scale, making them an indispensable component of the most advanced chip manufacturing process, rivaling the importance of photolithography machines. Electron beam exposure and probing, and ion beam etching, primarily utilize specialized power supplies to excite particle emission sources to generate charged particle beams. These beams, modulated by electromagnetic fields, pass through specialized channels, achieving high-precision exposure, etching, and probing.
[0003] The generation and use of both electron and ion beams require ultra-high vacuum conditions to prevent charged particles from colliding with gas molecules during their motion, enabling precise manipulation of the charged particles to form the desired beam spot. Controlling the charged particle beam spot requires maintaining a stable vacuum state in both the particle emission source and the path through which the particles travel. This requires both to be isolated and independently maintainable.
[0004] The charged particle motion channel is the core component of the electron beam and ion beam, and is surrounded by a supporting cavity. Compared to the supporting cavity, the charged particle motion channel is very small, requiring a vacuum isolation valve to accurately seal the charged particle motion channel. At the same time, the small motion channel means that the vacuum isolation valve must have a valve stem long enough to pass through the supporting cavity and maintain good sealing when switching the vacuum state. On the other hand, even in the non-isolated state, the vacuum degree requirements between the particle emission source and the motion channel are different, which requires the vacuum isolation valve to have a special sealing adapter design. In addition, the motion trajectory of the charged particles and the requirements of equipment integration determine that there is only a very small reserved space for the vacuum sealing valve.
[0005] At present, there is a lack of vacuum isolation valves that meet the above requirements on the market, which cannot meet the high vacuum isolation needs under high-precision conditions with small volume and long valve stem, seriously restricting the development of high-precision instruments and equipment such as electron beams and ion beams in my country. Summary of the Invention
[0006] The technical problem to be solved by the present invention is: Since the existing vacuum ion implantation device cannot meet the high vacuum isolation requirements under high-precision conditions of small volume and long valve stem, a vacuum isolation device with compact structure, small size and good sealing performance for the movement channel of charged particles is provided.
[0007] In order to solve the above technical problems, the technical solution adopted by the present invention is:
[0008] A vacuum isolation device for a charged particle movement channel, comprising: an auxiliary mounting seat, a main mounting seat, an isolation column, an isolation block, a differential extraction block, a connecting rod and a bellows; the auxiliary mounting seat, the main mounting seat and the isolation column are connected and fixed in sequence, the top of the isolation column is connected to a charged particle emission source, the top of the isolation column is provided with a differential extraction block, and the bottom of the isolation column is connected to a charged particle injection device; the connecting rod runs through the auxiliary mounting seat, the main mounting seat and the isolation column, one end of the connecting rod is fixed to the inner cavity of the isolation column through an elastic connecting component, and the end of the connecting rod is provided with a charged particle channel tube and an elastic isolation component in sequence, the other end of the connecting rod is movably arranged on the inner side of the auxiliary mounting seat, A bellows is welded on the outside of the connecting rod in the inner cavity of the column; a piston is provided in the inner cavity of the main mounting seat, and the connecting rod passes through the piston, and an air supply joint is provided on the side of the main mounting seat; inert gas is filled into the inner cavity of the main mounting seat through the air supply joint, and the piston is driven to move back and forth left and right in the inner cavity of the main mounting seat by relying on gas pressure, thereby driving the connecting rod and the bellows to move back and forth left and right. When the elastic connection component is in situ and the charged particle channel tube is coaxially aligned with the differential extraction block, the charged particles can move downward from the charged particle emission source through the isolation column. When the elastic connection component is in a stressed state and the elastic isolation component is coaxially aligned with the differential extraction block, the differential extraction block is sealed and isolated to achieve vacuum isolation.
[0009] As a further improvement of the present invention, the elastic connection assembly includes a spring sheet, a fixed pin and a fixed seat, the fixed seat is fixed to the inner cavity of the isolation column through the fixed pin, one end of the spring sheet is connected to the fixed seat through the fixed pin, and the other end of the spring sheet is provided with an opening to avoid horizontal movement of the charged particle channel tube; when the spring sheet is in the in-situ state, the charged particle channel tube is coaxially aligned with the differential extraction block, and when the spring sheet is in a stressed state, the elastic isolation assembly is coaxially aligned with the differential extraction block.
[0010] As a further improvement of the present invention, the elastic isolation assembly includes an isolation block, an isolation base, a compression spring, a spring base and a guide rod, the guide rod extends through the connecting rod in a vertical direction, the upper part of the guide rod is connected to the isolation block, the lower part of the guide rod is sleeved with a compression spring, the top of the compression spring is provided with an isolation base, and the bottom of the compression spring is provided with a spring base; when the connecting rod moves toward the fixed seat, it drives the isolation block to be coaxially aligned with the differential pumping block, and the spring sheets located on the upper and lower sides of the fixed seat respectively abut against the ends of the isolation block and the isolation base, and the spring sheets are deformed by force, pushing the isolation block to move upward and the isolation base to move downward, so as to achieve a close fit between the isolation block and the bottom of the differential pumping block.
[0011] As a further improvement of the present invention, an isolation top bead is provided on the connecting rod, and the isolation top bead is respectively located between the connecting rod and the isolation block, and between the connecting rod and the isolation base; when the isolation block is coaxially aligned with the differential block, the isolation top bead continues to move toward the fixed seat along the connecting rod, and the isolation top bead pushes the isolation block to move upward along the guide rod, and the isolation top bead pushes the isolation base to move downward along the guide rod.
[0012] As a further improvement of the present invention, a support spring is sleeved on the outside of the connecting rod, and the support spring is located on the inside of the bellows; one end of the support spring abuts against the connecting rod, and the other end of the support spring abuts against the end surface of the main mounting seat.
[0013] As a further improvement of the present invention, one end of the bellows is welded to the connecting rod, and the other end of the bellows is welded to the bellows seat. The bellows seat presses the sixth sealing ring on the outer end face of the isolation column, and the main mounting seat passes through the rear section of the connecting rod and presses the bellows seat; the piston is equipped with the fifth sealing ring and inserted into the main mounting seat, the inner cavity of the piston passes through the connecting rod and presses the third sealing ring, and the end face of the piston is fixed to the connecting rod by a retaining spring.
[0014] As a further improvement of the present invention, a position sensing nut is provided in the auxiliary mounting seat, the end of the connecting rod is connected to the position sensing nut, and a proximity switch is installed at a corresponding position on the position sensing nut.
[0015] As a further improvement of the present invention, the differential extraction block adopts a channel structure with a larger upper portion and a smaller lower portion.
[0016] As a further improvement of the present invention, the isolation column is made of soft magnetic alloy material.
[0017] As a further improvement of the present invention, the charged particle channel tube and the isolation block are both made of conductive materials, and the inner wall of the charged particle channel tube is plated with metal.
[0018] Compared with the prior art, the advantages of the present invention are:
[0019] The vacuum isolation device for the charged particle movement channel of the present invention forms the main structure of the vacuum isolation device by sequentially connecting and fixing an auxiliary mounting seat, a main mounting seat and an isolation column, and a differential pumping block is provided on the top of the isolation column, and a connecting rod is passed through between the auxiliary mounting seat, the main mounting seat and the isolation column, one end of the connecting rod is fixed to the inner cavity of the isolation column through an elastic connecting component, and the end of the connecting rod is sequentially provided with a charged particle channel tube and an elastic isolation component, and the other end of the connecting rod is movably provided on the inner side of the auxiliary mounting seat, which has the characteristics of compact structure and high space utilization; at the same time, a bellows is provided on the outer side of the connecting rod, and a piston is provided in the inner cavity of the main mounting seat to connect the connecting rod. The rod passes through the piston, and an air supply connector is provided on the side of the main mounting seat. Inert gas is filled into the inner cavity of the main mounting seat through the air supply connector, and the piston is driven to move back and forth left and right in the inner cavity of the main mounting seat by relying on gas pressure, thereby driving the connecting rod and the bellows to move back and forth left and right. When the connecting rod aligns the charged particle channel tube with the differential pumping block coaxially, the active channel of the charged particles is opened, and the charged particles can start from the charged particle emission source and move downward through the isolation column. When the connecting rod drives the elastic isolation component to align coaxially with the differential pumping block, the differential pumping block is sealed and separated, that is, the active channel of the charged particles is blocked, thus realizing vacuum isolation, which has the characteristics of simple operation and precise control. In the present invention, the design of the bellows and its connecting rod ensures that the rod of the isolation device can extend into any narrow and long channel area to seal the core area, and the bellows can ensure that the connecting rod maintains a good sealing effect when the state is switched, playing a dynamic sealing role, thereby sealing the charged particle movement channel; at the same time, the design of the differential pump block forms a vacuum degree between the particle emission source, the isolation device and the charged particle movement channel, meeting the high vacuum isolation requirements under high-precision conditions of a small volume and long valve stem. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 Schematic diagram of the structure principle of a vacuum isolation device for a charged particle movement channel in a specific embodiment of the present invention;
[0021] Figure 2 This is a schematic diagram of the position structure principle of the isolation block in a non-vacuum isolation state in a specific embodiment of the present invention;
[0022] Figure 3 A schematic diagram of the structural principle of state switching in a specific embodiment of the present invention;
[0023] Figure 4 This is a schematic diagram of the position structure principle of the isolation block when in a vacuum isolation state in a specific embodiment of the present invention;
[0024] Legend: 101. Auxiliary mounting seat; 102. Main mounting seat; 103. Piston; 104. Air supply connector; 105. Support spring; 106. Isolation column; 107. Isolation block; 108. First sealing ring; 109. Differential extraction block; 110. Second sealing ring; 111. Connecting rod; 112. Position sensing nut; 113. Circlip; 114. Third sealing ring; 115. Fifth sealing ring; 116. Bellows seat; 117. Sixth sealing ring; 118. Bellows; 119. Isolation base; 120. Compression spring; 121. Spring base; 122. Guide rod; 123. Charged particle channel tube; 124. Spring sheet; 125. Fixing pin; 126. Fixing seat; 201. Isolation bead. DETAILED DESCRIPTION
[0025] The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. Figures 1 to 4 The described embodiments are exemplary and intended to be used to explain the present invention, but should not be construed as limiting the present invention.
[0026] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "left", "right", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.
[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.
[0028] In the present invention, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," "fixed," and "mounted" should be understood broadly. For example, these terms may refer to fixed or detachable connections, or integration; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of these terms in the present invention based on specific circumstances.
[0029] Example
[0030] like Figures 1 to 4 As shown, the vacuum isolation device for a charged particle movement channel of the present invention includes: an auxiliary mounting base 101, a main mounting base 102, an isolation column 106, an isolation block 107, a differential extraction block 109, a connecting rod 111, and a bellows 118. The auxiliary mounting base 101, the main mounting base 102, and the isolation column 106 are sequentially connected and fixed. The top of the isolation column 106 is connected to a charged particle emission source, which is in an ultra-high vacuum environment. The top of the isolation column 106 is provided with a differential extraction block 109. The connection between the differential extraction block 109 and the isolation column 106 is provided with a second sealing ring 110 to achieve a sealed connection. The bottom of the isolation column 106 is connected to a charged particle injection device, which is in a high vacuum environment. Connecting rod 111 passes through auxiliary mounting base 101, main mounting base 102, and isolation column 106. The front end of connecting rod 111 is fixed to the inner cavity of isolation column 106 via an elastic connection assembly. The end of connecting rod 111 is sequentially provided with a charged particle passage tube 123 and an elastic isolation assembly. The rear end of connecting rod 111 is movably mounted inside auxiliary mounting base 101. A bellows 118 is welded to the outside of connecting rod 111 within the inner cavity of isolation column 106 to seal connecting rod 111. A piston 103 is provided within the inner cavity of main mounting base 102. The rear end of connecting rod 111 passes through piston 103. An air supply connector 104 is provided on the side of main mounting base 102. An inert gas such as nitrogen is filled into the inner cavity of the main mounting seat 102 through the gas supply connector 104, and the gas pressure is used to drive the piston 103 to move back and forth left and right in the inner cavity of the main mounting seat 102, thereby driving the connecting rod 111 and the bellows 118 to move back and forth left and right to switch the isolation state; when the elastic connection component is in the in-situ state and the charged particle channel tube 123 is coaxially aligned with the differential extraction block 109, the charged particles can move downward from the charged particle emission source through the isolation column 106; when the elastic connection component is in a stressed state and the elastic isolation component is coaxially aligned with the differential extraction block 109, the differential extraction block 109 is sealed and isolated to achieve vacuum isolation.
[0031] In this embodiment, the isolation column 106 is used to support the charged particle emission source and the supporting cavity of the charged particle channel tube 123, and the material of the isolation column 106 is a soft magnetic alloy material.
[0032] In this embodiment, the main structure of the vacuum isolation device is formed by sequentially connecting and fixing the auxiliary mounting seat 101, the main mounting seat 102 and the isolation column 106, and a differential extraction block 109 is provided on the top of the isolation column 106, and the connecting rod 111 is passed through the auxiliary mounting seat 101, the main mounting seat 102 and the isolation column 106. One end of the connecting rod 111 is fixed to the inner cavity of the isolation column 106 through an elastic connection component, and the end of the connecting rod 111 is sequentially provided with a charged particle channel tube 123 and an elastic isolation component, and the other end of the connecting rod 111 is movably provided on the inner side of the auxiliary mounting seat 101, which has the characteristics of compact structure and high space utilization. At the same time, a bellows 118 is welded to the outside of the connecting rod 111, a piston 103 is provided in the inner cavity of the main mounting seat 102, and the connecting rod 111 passes through the piston 103. An air supply connector 104 is provided on the side of the main mounting seat 102, and inert gas is filled into the inner cavity of the main mounting seat 102 through the air supply connector 104. The piston 103 is driven to move back and forth left and right in the inner cavity of the main mounting seat 102 by relying on gas pressure, thereby driving the connecting rod 111 and the bellows 118 to move back and forth left and right. When the connecting rod 111 aligns the charged particle channel tube 123 with the differential extraction block 109 coaxially, the active channel of the charged particles is opened, and the charged particles can start from the charged particle emission source and move downward through the isolation column 106. When the connecting rod 111 drives the elastic isolation component to align coaxially with the differential extraction block 109, the differential extraction block 109 is sealed and isolated, that is, the active channel of the charged particles is blocked, that is, vacuum isolation is achieved, which has the characteristics of simple operation and precise control. In this embodiment, the design of bellows 118 and connecting rod 111 ensures that the rod of the isolation device can extend into any narrow channel area, sealing the core area. Furthermore, bellows 118 ensures that connecting rod 111 maintains a good sealing effect during state switching, acting as a dynamic seal, thereby sealing the passage for charged particles. Furthermore, the design of differential pump block 109 creates a vacuum between the particle emission source, the isolation device, and the passage for charged particles, meeting the high-vacuum isolation requirements of a small, long valve stem with high precision.
[0033] like Figure 1 As shown, the elastic connection assembly includes a spring sheet 124, a fixed pin 125 and a fixed seat 126. The fixed seat 126 is fixed to the inner cavity of the isolation column 106 through the fixed pin 125. One end of the spring sheet 124 is connected to the fixed seat 126 through the fixed pin 125. The other end of the spring sheet 124 is provided with an opening to avoid the horizontal movement of the charged particle channel 123. The charged particle channel 123 is vertically sleeved on the front end of the connecting rod 111. When the connecting rod 111 is directed toward Figure 1 When the spring sheet 124 is in the original position, the charged particle channel 123 is coaxially aligned with the differential block 109, and the movement channel of the charged particles is open. Figure 3When the spring sheet 124 is in a stressed state, the elastic isolation component is coaxially aligned with the differential extraction block 109, and the movement channel of the charged particles is blocked.
[0034] In this embodiment, the differential block 109 is installed in the center of the isolation column 106 through the second sealing ring 110, and the fixing pin 125 installs the fixing seat 126 on the left side of the inner hole of the isolation column 106 and faces the end of the connecting rod 111. The spring sheet 124 is respectively placed on the upper and lower sides of the fixing seat 126.
[0035] like Figure 1 As shown, the elastic isolation assembly includes an isolation block 107, an isolation base 119, a compression spring 120, a spring base 121 and a guide rod 122. The guide rod 122 extends vertically through the connecting rod 111. The upper portion of the guide rod 122 is connected to the isolation block 107. The top of the isolation block 107 is provided with a first sealing ring 108. The lower portion of the guide rod 122 is sleeved with a compression spring 120. The top of the compression spring 120 is provided with an isolation base 119, and the bottom of the compression spring 120 is provided with a spring base 121. The isolation block 107 and the isolation base 119 are located above and below the connecting rod 111, respectively. Figure 4 As shown, when the connecting rod 111 moves leftward toward the fixed seat 126, it drives the isolation block 107 to align coaxially with the differential block 109. The spring pieces 124 located on the upper and lower sides of the fixed seat 126 respectively abut against the ends of the isolation block 107 and the isolation base 119 to limit the horizontal displacement of the isolation block 107 and the isolation base 119. The spring pieces 124 are pushed by the leftward movement of the connecting rod 111, which will produce force deformation, thereby pushing the isolation block 107 upward and the isolation base 119 downward. The spring pieces 124 are in a certain angle state to achieve a tight fit between the isolation block 107 and the bottom of the differential block 109. The first sealing ring 108 can also further improve the sealing and isolation effect between the isolation block 107 and the differential block 109.
[0036] like Figure 1 and Figure 4 As shown, a first sealing ring 108 is installed on top of the isolation block 107. A guide rod 122 passes through the isolation base 119 and clamps the mounting boss at the front end of the connecting rod 111 via a compression spring 120. Isolation beads 201 are mounted above and below the mounting bosses, and the ends of the mounting bosses secure the charged particle passage tube 123. Isolation beads 201 are positioned between the connecting rod 111 and the isolation block 107, and between the connecting rod 111 and the isolation base 119, respectively. When the isolation block 107 and the differential extraction block 109 are coaxially aligned, the isolation beads 201 continue to move toward the fixed seat 126 along with the connecting rod 111. The isolation beads 201 push the isolation block 107 upward along the guide rod 122, while the isolation beads 201 push the isolation base 119 downward along the guide rod 122. Furthermore, the diameter of the isolation beads 201 is approximately 3 mm.
[0037] In this embodiment, the relative position design of the isolation bead 201 and the isolation block 107 ensures precise sealing of the core area, thereby efficiently utilizing space, which is beneficial to improving the integration of the device and reducing the amount of material required in the core area.
[0038] like Figure 1 As shown, a support spring 105 is sleeved on the outside of the connecting rod 111, and the support spring 105 is located inside the bellows 118; one end of the support spring 105 abuts the connecting rod 111, and the other end of the support spring 105 abuts the end surface of the main mounting seat 102. With the assistance of the support spring 105, the reliability of the reciprocating movement of the connecting rod 111 and the bellows 118 is improved, thereby improving the accuracy of the isolation. In addition, in the event of an emergency such as a power outage or gas outage in the equipment, the support spring 105 can push the elastic isolation component to perform vacuum isolation or maintain the existing vacuum isolation state, preventing the vacuum at the bottom of the isolation column 106 from deteriorating and damaging the charged particle emission source in the ultra-high environment at the top of the isolation column 106.
[0039] like Figure 1 As shown, one end of the bellows 118 is welded to the connecting rod 111, and the other end of the bellows 118 is welded to the bellows seat 116. The bellows seat 116 presses the sixth sealing ring 117 against the outer end surface of the isolation column 106. The main mounting seat 102 passes through the rear section of the connecting rod 111 and presses the bellows seat 116. The piston 103 is equipped with the fifth sealing ring 115 and is inserted into the main mounting seat 102. The inner cavity of the piston 103 passes through the connecting rod 111 and presses the third sealing ring 114. The end surface of the piston 103 is fixed to the connecting rod 111 by a retaining ring 113.
[0040] like Figure 1 As shown, a position sensing nut 112 is provided in the auxiliary mounting seat 101 , the end of the connecting rod 111 is connected to the position sensing nut 112 , and a proximity switch is installed at the corresponding position on the position sensing nut 112 to accurately monitor the displacement state of the connecting rod 111 .
[0041] like Figure 1 and Figure 3 As shown, the differential extraction block 109 employs a channel structure with a larger upper portion and a smaller lower portion. When not isolated, the upper and lower regions of the isolation device are connected, with the upper region serving as the charged particle emission source and the lower region serving as the charged particle movement channel. This embodiment utilizes the volume difference between the upper and lower sides of the differential extraction block 109 to ensure a vacuum gradient from the particle emission source to the isolation valve.
[0042] The accumulation of charged particles changes the potential distribution in space, creating a potential difference and generating an electric field force, which affects the movement of charged particles. To reduce the accumulation of charged particles, the charged particle channel 123 and the isolation block 107 are both made of conductive materials, and the inner wall of the charged particle channel 123 is metal-plated.
[0043] like Figure 1 and Figure 2 As shown, in the non-isolated state, high-purity nitrogen enters the cavity between the main mounting seat 102 and the piston 103 from the gas supply connector 104, and the gas pressure pushes the connecting rod 111 and the bellows 118 to the right state, and the support spring 105 is in a stressed state.
[0044] At this time, the isolation block 107 is in a low position, the spring sheet 124 is in its original position, the charged particle channel tube 123 is opposite to the bottom of the differential extraction block 109, and the charged particles can move downward from the charged particle emission source through the isolation device. Since the reserved space in the middle of the differential extraction block 109 is a large upper and small lower structure, the probability of the gas molecules below the differential extraction block 109 moving upward through the hole is small, and the probability of the gas molecules above the differential extraction block 109 moving downward through the hole is high. Combined with the vacuum device, the high vacuum degree at the top can be maintained and the vacuum gradient from top to bottom can be maintained. Figure 2 As shown, in the non-isolated state, the center of the differential extraction block 109 is not coaxial with the isolation block 107.
[0045] like Figure 3 and Figure 4 As shown, in the vacuum isolation state, that is, after the nitrogen supply is stopped and the gas is released to normal pressure, the support spring 105 returns to its original length, causing the bellows 118 and the connecting rod 111 to move horizontally to the left, and driving the elastic isolation component to move upward to press the differential block 109 to form a seal.
[0046] like Figure 3 and Figure 4 As shown, when the connecting rod 111 moves horizontally to the left toward the fixed seat 126, the isolation block 107 and the isolation base 119 move to the relative position at the bottom of the differential extraction block 109 and contact the spring piece 124; the connecting rod 111 continues to move horizontally to the left, at this time, the spring piece 124 will limit the movement of the isolation block 107 and the isolation base 119 in the horizontal direction; the isolation top ball 201 continues to move with the connecting rod 111, pushing the isolation block 107 from the top surface of the connecting rod 111 to move upward along the guide rod 122, close to the differential extraction block 109 to achieve vacuum sealing isolation; the isolation base 119 is pushed downward along the guide rod 122 from the bottom surface of the connecting rod 111 (this movement is only used to ensure the movement consistency of the isolation component); during the above process, the spring piece 124 is deformed to compensate for the up and down movement stroke of the isolation component; as shown Figure 4 , it can be seen that the upper and lower spring pieces 124 form a certain angle.
[0047] like Figure 3 As shown, the long hole is designed on the connecting rod 111 so that when the spring sheet 124 restricts the isolation block 107 and the isolation base 119 in the horizontal direction, the connecting rod 111 continues to move horizontally to obtain relative movement space for the guide rod 122;
[0048] like Figure 4 As shown, the end surfaces of the isolation block 107 and the isolation base 119 that contact the spring sheet 124 are designed with up and down movement guiding inclined surfaces to guide the isolation sealing movement and avoid mechanical movement dead points.
[0049] After nitrogen is refilled and the isolation state is exited, the gas pressure drives the connecting rod 111 to overcome the support spring 105 and move to the right. At the same time, the spring sheet 124 releases the restriction on the isolation block 107 and the isolation base 119. The isolation top bead 201 moves back with the connecting rod 111 into the avoidance groove (not shown in the figure) of the isolation block 107 and the isolation base 119, so that the isolation block 107 moves downward along the guide rod 122 and the isolation base 119 moves upward along the guide rod 122, and the spring 120 is compressed to make the two close to the upper and lower surfaces of the connecting rod 111, and the device is restored. Figure 1 and Figure 2 shown.
[0050] In this embodiment, relying on the relative force relationship and ventilation state of the spring sheet 124 on the left side of the connecting rod 111 and the compression spring 120 on the right side of the connecting rod 111, this embodiment ensures the effective switching of the isolation state and meets the high vacuum isolation requirements under high-precision conditions of a small volume and long valve stem, and is particularly suitable for vacuum isolation of electronic optical columns.
[0051] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiment. All technical solutions based on the concept of the present invention are within the scope of protection of the present invention. It should be noted that for those skilled in the art, various improvements and modifications that do not depart from the principles of the present invention should also be considered within the scope of protection of the present invention.
Claims
1. A vacuum isolation device for a charged particle movement channel, characterized in that: include: An auxiliary mounting seat (101), a main mounting seat (102), an isolation column (106), an isolation block (107), a differential extraction block (109), a connecting rod (111) and a bellows (118); the auxiliary mounting seat (101), the main mounting seat (102) and the isolation column (106) are connected and fixed in sequence, the top of the isolation column (106) is connected to the charged particle emission source, the top of the isolation column (106) is provided with a differential extraction block (109), and the bottom of the isolation column (106) is provided with a differential extraction block (109). The connecting rod (111) is connected to the charged particle injection device; the connecting rod (111) runs through the auxiliary mounting seat (101), the main mounting seat (102) and the isolation column (106); one end of the connecting rod (111) is fixed to the inner cavity of the isolation column (106) through an elastic connection component, and the end of the connecting rod (111) is provided with a charged particle channel tube (123) and an elastic isolation component in sequence; the other end of the connecting rod (111) is movably arranged inside the auxiliary mounting seat (101) and is fixed to the isolation column In the inner cavity (106), a bellows (118) is welded to the outside of the connecting rod (111); a piston (103) is provided in the inner cavity of the main mounting seat (102), the connecting rod (111) passes through the piston (103), and a gas supply connector (104) is provided on the side of the main mounting seat (102); inert gas is filled into the inner cavity of the main mounting seat (102) through the gas supply connector (104), and the piston (103) is driven to move back and forth in the inner cavity of the main mounting seat (102) by the gas pressure. , thereby driving the connecting rod (111) and the bellows (118) to move back and forth left and right. When the elastic connection component is in the original position and the charged particle channel tube (123) is coaxially aligned with the differential extraction block (109), the charged particles can move downward from the charged particle emission source through the isolation column (106). When the elastic connection component is in a stressed state and the elastic isolation component is coaxially aligned with the differential extraction block (109), the differential extraction block (109) is sealed and isolated to achieve vacuum isolation. The elastic connection assembly comprises a spring sheet (124), a fixed pin (125) and a fixed seat (126); the fixed seat (126) is fixed to the inner cavity of the isolation column (106) via the fixed pin (125); one end of the spring sheet (124) is connected to the fixed seat (126) via the fixed pin (125); the other end of the spring sheet (124) is provided with an opening to avoid horizontal movement of the charged particle channel tube (123); when the spring sheet (124) is in an in-situ state, the charged particle channel tube (123) is coaxially aligned with the differential pumping block (109); when the spring sheet (124) is in a stressed state, the elastic isolation assembly is coaxially aligned with the differential pumping block (109); The elastic isolation assembly includes an isolation block (107), an isolation base (119), a compression spring (120), a spring base (121) and a guide rod (122), wherein the guide rod (122) extends vertically through the connecting rod (111), the upper portion of the guide rod (122) is connected to the isolation block (107), the lower portion of the guide rod (122) is sleeved with the compression spring (120), the top of the compression spring (120) is provided with an isolation base (119), and the bottom of the compression spring (120) is provided with a spring base (121). When the connecting rod (111) moves toward the fixed seat (126), the isolation block (107) is driven to align coaxially with the differential block (109), and the spring pieces (124) located on the upper and lower sides of the fixed seat (126) respectively abut against the ends of the isolation block (107) and the isolation base (119), and the spring pieces (124) are deformed by force, pushing the isolation block (107) to move upward and the isolation base (119) to move downward, so that the isolation block (107) and the bottom of the differential block (109) are tightly fitted.
2. The vacuum isolation device for a charged particle movement channel according to claim 1, characterized in that: An isolation top bead (201) is provided on the connecting rod (111), and the isolation top bead (201) is respectively located between the connecting rod (111) and the isolation block (107), and between the connecting rod (111) and the isolation base (119); when the isolation block (107) and the differential extraction block (109) are coaxially aligned, the isolation top bead (201) continues to move toward the fixed seat (126) along the connecting rod (111), and the isolation top bead (201) pushes the isolation block (107) to move upward along the guide rod (122), and the isolation top bead (201) pushes the isolation base (119) to move downward along the guide rod (122).
3. The vacuum isolation device for a charged particle movement channel according to claim 1, characterized in that: A support spring (105) is sleeved on the outside of the connecting rod (111), and the support spring (105) is located inside the bellows (118); one end of the support spring (105) abuts against the connecting rod (111), and the other end of the support spring (105) abuts against the end surface of the main mounting seat (102).
4. The vacuum isolation device for a charged particle movement channel according to claim 3, characterized in that: One end of the bellows (118) is welded to the connecting rod (111), and the other end of the bellows (118) is welded to the bellows seat (116). The bellows seat (116) presses the sixth sealing ring (117) on the outer end face of the isolation column (106). The main mounting seat (102) passes through the rear section of the connecting rod (111) and presses the bellows seat (116). The piston (103) is equipped with the fifth sealing ring (115) and is inserted into the main mounting seat (102). The inner cavity of the piston (103) passes through the connecting rod (111) and presses the third sealing ring (114). The end face of the piston (103) is fixed to the connecting rod (111) by a retaining ring (113).
5. The vacuum isolation device for a charged particle movement channel according to any one of claims 1 to 4, characterized in that: A position sensing nut (112) is provided in the auxiliary mounting seat (101), an end of the connecting rod (111) is connected to the position sensing nut (112), and a proximity switch is installed at a corresponding position on the position sensing nut (112).
6. The vacuum isolation device for a charged particle movement channel according to any one of claims 1 to 4, characterized in that: The differential extraction block (109) adopts a channel structure with a larger upper portion and a smaller lower portion.
7. The vacuum isolation device for a charged particle movement channel according to any one of claims 1 to 4, characterized in that: The isolation column (106) is made of soft magnetic alloy material.
8. The vacuum isolation device for a charged particle movement channel according to any one of claims 1 to 4, characterized in that: The charged particle channel tube (123) and the isolation block (107) are both made of conductive materials, and the inner wall of the charged particle channel tube (123) is plated with metal.