A stabilizing mechanism for working platform of exposure machine

Abstract

The present invention relates to the field of exposure machines, and in particular to a stabilizing mechanism for a working platform of an exposure machine. The technical problem to be solved by the present invention is that the exposure machine may be disturbed by a variety of vibration sources during operation. These vibrations are transmitted to the exposure machine through the soil and the plant structure, which may affect its stability and exposure accuracy. The exposure machine is connected to the mounting holes or mounting surfaces on the shock-absorbing platform through fasteners such as bolts, and the installation steps are complicated and the assembly efficiency is low. It includes a support plate, four stabilizing mechanisms are arranged on the lower surface of the support plate, two shock-absorbing mechanisms are arranged between two stabilizing mechanisms, supporting feet are arranged on the lower surface of the stabilizing mechanism, a fixed frame is arranged on the upper surface of the support plate, an exposure machine is arranged on the upper surface of the fixed frame, and a clamping mechanism is arranged inside the fixed frame. By setting the shock-absorbing mechanism and the stabilizing mechanism, the two adjusting nuts and the locking nut are rotated to reciprocate, and the reciprocating movement of the two locking nuts drives the two limit rings to reciprocate.

Description

[0001] The invention relates to the field of exposure machines, and in particular to a stabilizing mechanism for a working platform of an exposure machine. Background Art

[0002] The main function of the exposure machine is to accurately expose the photosensitive material through the light source and transfer the graphics or patterns to the surface of the photosensitive material. This function is widely used in many fields such as circuit board manufacturing, semiconductor manufacturing, flat panel display production, etc., and is of great significance to promoting the development and progress of related industries. With the continuous advancement of science and technology and the continuous growth of market demand, the application field of exposure machines will continue to expand and deepen.

[0003] The main application areas of the exposure machine include circuit board manufacturing, semiconductor manufacturing, flat panel display production, micro-electromechanical systems, nanotechnology research, and biochip production. In the prior art, the exposure machine is placed directly on the ground during use. Due to the different accuracy of the ground level, it is easy to cause the four legs to not be on the same horizontal plane, which directly affects the exposure accuracy and stability of the exposure machine. Moreover, when the exposure machine is placed directly on the ground, the levelness of the four legs cannot be accurately adjusted, and the adjustment steps are cumbersome. The exposure machine will be disturbed by various vibration sources during operation. These vibrations are transmitted to the exposure machine through the soil and the plant structure, affecting the stability and exposure accuracy of the exposure machine. The exposure machine is connected to the mounting holes or mounting surfaces on the shock-absorbing platform through fasteners such as bolts, and the installation steps are complicated and the assembly efficiency is low. Summary of the invention

[0004] In order to overcome the problem that the exposure machine may be disturbed by various vibration sources during operation, these vibrations are transmitted to the exposure machine through the soil and the factory structure, which may affect its stability and exposure accuracy; the exposure machine is connected to the mounting holes or mounting surfaces on the shock-absorbing platform by fasteners such as bolts, and the installation steps are complicated and the assembly efficiency is low. The technical problem to be solved by the present invention is to provide a stabilizing mechanism for the working platform of the exposure machine.

[0005] In order to solve the above technical problems, the present invention provides a stabilizing mechanism for a working platform of an exposure machine, comprising a support plate, four stabilizing mechanisms are arranged on the lower surface of the support plate, two shock-absorbing mechanisms are arranged between every two stabilizing mechanisms, a supporting foot is arranged on the lower surface of the stabilizing mechanism, a fixing frame is arranged on the upper surface of the support plate, the exposure machine is arranged on the upper surface of the fixing frame, a clamping mechanism is arranged inside the fixing frame, and a locking mechanism is arranged above the clamping mechanism, the stabilizing mechanism comprises a stabilizing frame, the upper surface of the stabilizing frame is fixedly connected to the lower surface of the support plate, a T-shaped slide groove is provided on the inner side surface of the stabilizing frame, two stabilizing plates are slidably connected in the T-shaped slide groove, a compression spring is fixedly connected to the opposite side surfaces of the stabilizing plate and the stabilizing frame, two tension springs are fixedly connected to the side surfaces of the two stabilizing plates through a fixing block, and symmetrical inclined surfaces are provided at the lower ends of the two stabilizing plates, and inclined T-shaped slide grooves are provided in the inclined surfaces.

[0006] Preferably, the stabilizing mechanism also includes a guide block, which is slidably connected in an inclined T-shaped groove of the inclined surface of the stabilizing plate, and a stabilizing block is fixedly connected to the other side of the guide block, and the upper end of the stabilizing block is provided with an inclined surface that matches the inclined surface of the lower end of the stabilizing plate.

[0007] Preferably, the lower surface of the stabilizing block is fixedly connected to the supporting foot, and the cross-section of the supporting foot is L-shaped.

[0008] Preferably, the shock absorbing mechanism includes two groups of connecting seats, one group of the connecting seats is fixedly connected to the lower surface of the support plate, and the other group of the connecting seats is fixedly connected to the upper surface of the support foot. The two groups of connecting seats are rotatably connected to the connecting plates through a rotating shaft, and the opposite sides of the two connecting plates are fixedly connected to adjusting shafts. The outer sides of the adjusting shafts are threadedly connected to locking nuts and adjusting nuts. The outer sides of the locking nuts and adjusting nuts are hexagonal. A limiting ring is slidably connected to the outer side of the adjusting shaft and located between the locking nuts and the adjusting nuts. An annular groove is provided on the opposite sides of the two limiting rings, and a shock absorbing spring is rotatably connected in the annular groove.

[0009] Preferably, the clamping mechanism includes a clamping shaft, which is rotatably connected to the fixed frame, and the outer side of the clamping shaft is provided with two clockwise threads and one counterclockwise thread, the clamping shaft passes through the fixed frame and extends to the end outside the fixed frame and is fixedly connected to a twist handle, and a clamping gear is fixedly connected between the fixed frame and the twist handle and located on the outside of the clamping shaft.

[0010] Preferably, the locking mechanism includes a limiting sleeve, which is fixedly connected to the outer side surface of the fixing frame, an elliptical through hole is provided inside the limiting sleeve, a locking shaft is slidably connected in the elliptical through hole, a protrusion is fixedly connected below the limiting sleeve and located on the outer side of the locking shaft, the cross-section of the protrusion is elliptical, a locking handle is fixedly connected to the upper end of the locking shaft, a return spring is provided between the locking handle and the limiting sleeve and located on the outer side of the locking shaft, and an annular groove is provided at the lower end of the locking shaft.

[0011] Preferably, the locking mechanism also includes a locking block, the upper surface of the locking block is provided with a T-shaped groove, the locking shaft is rotatably connected in the T-shaped groove, the lower surface of the locking block is provided with an arc surface, the arc surface is provided with a plurality of tooth grooves, and the locking block is meshed and connected with the clamping gear through the tooth grooves.

[0012] Preferably, the fixing frame is fixedly connected to the upper surface of the supporting plate, a cross-shaped sliding groove is provided inside the fixing frame, and a cross-section of the sliding groove is in the shape of a 20.

[0013] Preferably, a pulling plate is slidably connected in the sliding groove, and the pulling plate is rotatably connected to the clamping shaft through a clockwise thread, and the upper surface of the pulling plate is fixedly connected to the clamping plate. A pushing block is also slidably connected in the sliding groove, and the pushing block is rotatably connected to the clamping shaft through a counterclockwise thread, and the upper surface of the pushing block is fixedly connected to the pushing plate. There are also two follower blocks slidably connected in the sliding groove, and the upper surface of the follower block is fixedly connected to the follower plate.

[0014] Preferably, the two sides of the pushing block are rotatably connected to a driven rod via a rotating shaft, the other end of the driven rod is rotatably connected to an active rod via a rotating shaft, the other end of the active rod is rotatably connected to a synchronous block via a rotating shaft, the synchronous block is rotatably connected to the clamping shaft via a clockwise thread, the synchronous block is slidably connected in the sliding groove, the side of the synchronous block is also rotatably connected to a pulling rod via a rotating shaft, and the pulling rod is rotatably connected to the follower block via a rotating shaft.

[0015] Compared with the prior art, the present invention has the following advantages:

[0016] 1. By setting a shock-absorbing mechanism and a stabilizing mechanism, the two adjusting nuts and the locking nuts are rotated to reciprocate, the reciprocating movement of the two locking nuts pushes the two limit rings to reciprocate, and the reciprocating movement of the two limit rings compresses and stretches the shock-absorbing spring. At this time, the length change of the shock-absorbing mechanism drives the support plate to reciprocate up and down, the reciprocating movement of the support plate drives the reciprocating movement of the stabilizing frame, the reciprocating movement of the stabilizing frame pulls the two stabilizing plates to slide back and forth, the compression spring and the tension spring release pressure to push the two stabilizing plates to slide back and forth, and under the action of the guide block, the two stabilizing plates slide toward each other to push the stabilizing block up and down to reciprocate, so as to adjust the fixed frame to the horizontal level, and absorb the interference of the vibration source at the same time, to ensure the stability and exposure accuracy of the exposure machine;

[0017] 2. By setting a clamping mechanism and a fixed frame, twisting the handle to rotate drives the clamping shaft to rotate, and through two clockwise threads and one counterclockwise thread on the outer side of the clamping shaft, the pulling plate, the synchronous block and the pushing block are driven to reciprocate, and the pulling plate drives the clamping plate to contact with the exposure machine. Under the action of the pulling rod, the synchronous block drives the two follower blocks to reciprocate, and the reciprocating motion of the two follower blocks drives the two follower plates to contact with the exposure machine. The reciprocating motion of the synchronous block and the pushing block drives the hinged ends of the active rod and the driven rod to reciprocate to the side, and the pushing block drives the pushing plate to contact with the exposure machine, which simplifies the installation steps of the exposure machine and improves the assembly efficiency of the exposure machine.

[0018] 3. By setting a locking mechanism, the locking handle is rotated 90 degrees, and the locking handle is pressed to move downward. The locking handle moves downward to compress the reset spring, and the locking handle moves downward to push the locking shaft downward. The locking shaft moves downward to drive the locking block downward. The locking block moves downward and engages with the clamping gear. The locking shaft moves downward to drive the protrusion downward. When the protrusion moves to the bottom of the limit sleeve, the locking handle is rotated 90 degrees again to prevent the clamping mechanism from failing to fix the exposure machine, resulting in a negative impact on the performance of the exposure machine, the accuracy and repeatability of the production results, and the overall stability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0020] Figure 2 It is a schematic diagram of the fixing frame structure of the present invention;

[0021] Figure 3 It is a schematic diagram of the structure of the stabilizing mechanism of the present invention;

[0022] Figure 4 is a cross-sectional view of a stabilizing frame of the present invention;

[0023] Figure 5 It is a schematic diagram of the structure of the clamping mechanism of the present invention;

[0024] Figure 6is a cross-sectional view of a clamping plate of the present invention;

[0025] Figure 7 is a cross-sectional view of a fixing frame of the present invention;

[0026] Figure 8 It is a schematic diagram of the synchronization block structure of the present invention;

[0027] Fig. 9 is a cross-sectional view of a follower plate of the present invention;

[0028] Fig.10 It is a schematic diagram of the locking mechanism structure of the present invention.

[0029] The markings in the attached drawings are: 1-exposure machine, 2-stabilizing mechanism, 201-stabilizing frame, 202-stabilizing plate, 203-compression spring, 204-tension spring, 205-guide block, 206-stabilizing block, 3-shock absorbing mechanism, 301-connecting seat, 302-connecting plate, 303-locking nut, 304-adjusting shaft, 305-adjusting nut, 306-limiting ring, 307-shock absorbing spring, 4-fixed frame, 401-sliding groove, 402-clamping plate, 403-pulling plate, 404-push block, 405-synchronizing block, 406-pull rod, 407-follower block, 408-active rod, 409-driven rod, 410-push plate, 411-follower plate, 5-support plate, 6-support foot, 7-clamping mechanism, 701-twist handle, 702-clamping gear, 703-clamping shaft, 8-locking mechanism, 801-locking handle, 802-reset spring, 803-limiting sleeve, 804-locking shaft, 805-bump, 806-locking block. DETAILED DESCRIPTION

[0030] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0031] Embodiment 1: A stabilizing mechanism for a working platform of an exposure machine, such as Figure 1-Figure 4As shown, it includes a support plate 5, and four stabilizing mechanisms 2 are arranged on the lower surface of the support plate 5. By arranging the stabilizing mechanisms 2, the interference of the vibration source is offset to prevent the stability and exposure accuracy of the exposure machine 1 from being affected. Two shock-absorbing mechanisms 3 are arranged between every two stabilizing mechanisms 2. By arranging the shock-absorbing mechanisms 3, the vibration of the equipment is absorbed and offset to ensure the smooth operation of the equipment. Support feet 6 are arranged on the lower surface of the stabilizing mechanisms 2, and a fixing frame 4 is arranged on the upper surface of the support plate 5. By arranging the fixing frame 4, the exposure machine 1 can be quickly positioned to improve the installation efficiency of the exposure machine 1. The exposure machine 1 is arranged on the upper surface of the fixing frame 4, and a clamping mechanism 7 is arranged inside the fixing frame 4. By arranging the clamping mechanism 7, the installation steps of the exposure machine 1 are simplified and the assembly efficiency of the exposure machine 1 is improved. A locking mechanism 8 is arranged above the clamping mechanism 7. By arranging the locking mechanism 8, the clamping mechanism 7 is prevented from failing to fix the exposure machine 1, thereby ensuring the performance of the exposure machine 1 and the quality of the production results. In order to ensure the accuracy and overall stability of the equipment, the stabilizing mechanism 2 includes a stabilizing frame 201, the upper surface of the stabilizing frame 201 is fixedly connected to the lower surface of the supporting plate 5, a T-shaped slot is provided on the inner side surface of the stabilizing frame 201, and two stabilizing plates 202 are slidably connected in the T-shaped slot, and the cross-section of the stabilizing plate 202 is a right-angled trapezoid, and the stabilizing plate 202 is fixedly connected to the opposite side of the stabilizing frame 201 with a compression spring 203, and the sides of the two stabilizing plates 202 are fixedly connected with two tension springs 204 through a fixed block, and the lower ends of the two stabilizing plates 202 are provided with symmetrical inclined surfaces, and an inclined T-shaped slot is provided in the inclined surface, and a guide block 205 is slidably connected in the inclined T-shaped slot, and the guide block 205 is composed of two T-shaped blocks crossed, and a stabilizing block 206 is fixedly connected to the other side of the guide block 205, and an inclined surface is provided on the upper end of the stabilizing block 206 to match the inclined surface of the lower end of the stabilizing plate 202, and the lower surface of the stabilizing block 206 is fixedly connected to the supporting foot 6, and the cross-section of the supporting foot 6 is L-shaped.

[0032] like Figure 3 As shown, the shock absorbing mechanism 3 includes two groups of connecting seats 301, one group of connecting seats 301 is fixedly connected to the lower surface of the support plate 5, and the other group of connecting seats 301 is fixedly connected to the upper surface of the support foot 6. The two groups of connecting seats 301 are rotatably connected to the connecting plate 302 through a rotating shaft, and the opposite sides of the two connecting plates 302 are fixedly connected to the adjusting shaft 304. The outer side of the adjusting shaft 304 is threadedly connected with a locking nut 303 and an adjusting nut 305. The outer side surfaces of the locking nut 303 and the adjusting nut 305 are hexagonal. A limiting ring 306 is slidably connected to the outer side of the adjusting shaft 304 and located between the locking nut 303 and the adjusting nut 305. The opposite sides of the two limiting rings 306 are provided with annular grooves, and a shock absorbing spring 307 is rotatably connected in the annular grooves.

[0033] like Figure 5 , Figure 7As shown, the clamping mechanism 7 includes a clamping shaft 703, which is rotatably connected to the fixed frame 4. The outer side of the clamping shaft 703 is provided with two clockwise threads and one counterclockwise thread. The clamping shaft 703 passes through the fixed frame 4 and is fixedly connected to the end portion extending to the outside of the fixed frame 4 with a twist handle 701. A clamping gear 702 is fixedly connected between the fixed frame 4 and the twist handle 701 and located on the outside of the clamping shaft 703.

[0034] like Fig.10 As shown, the locking mechanism 8 includes a limiting sleeve 803, which is fixedly connected to the outer side surface of the fixed frame 4. An elliptical through hole is provided inside the limiting sleeve 803, and a locking shaft 804 is slidably connected in the elliptical through hole. A protrusion 805 is fixedly connected below the limiting sleeve 803 and located on the outer side of the locking shaft 804. The cross-section of the protrusion 805 is elliptical. A locking handle 801 is fixedly connected to the upper end of the locking shaft 804. A reset spring 802 is provided between the locking handle 801 and the limiting sleeve 803 and located on the outer side of the locking shaft 804. An annular groove is provided at the lower end of the locking shaft 804, and a locking block 806 is rotatably connected in the annular groove. A T-shaped groove is provided on the upper surface of the locking block 806, and an arc surface is provided on the lower surface of the locking block 806. A plurality of tooth grooves are provided on the arc surface, and the locking block 806 is meshed and connected with the clamping gear 702 through the tooth groove.

[0035] like Figure 5-Figure 9 As shown, the fixed frame 4 is fixedly connected to the upper surface of the support plate 5, a cross-shaped sliding groove 401 is provided inside the fixed frame 4, the cross section of the sliding groove 401 is in the shape of a twenty, a pulling plate 403 is slidably connected in the sliding groove 401, the pulling plate 403 is rotatably connected to the clamping shaft 703 through a clockwise thread, a clamping plate 402 is fixedly connected to the upper surface of the pulling plate 403, a pushing block 404 is also slidably connected in the sliding groove 401, the pushing block 404 is rotatably connected to the clamping shaft 703 through a counterclockwise thread, a pushing plate 410 is fixedly connected to the upper surface of the pushing block 404, and a pushing plate 410 is also slidably connected in the sliding groove 401 There are two follower blocks 407, and a follower plate 411 is fixedly connected to the upper surface of the follower block 407. The two sides of the push block 404 are rotatably connected to the driven rod 409 through a rotating shaft. The other end of the driven rod 409 is rotatably connected to the active rod 408 through a rotating shaft. The other end of the active rod 408 is rotatably connected to the synchronous block 405 through a rotating shaft. The synchronous block 405 is rotatably connected to the clamping shaft 703 through a clockwise thread. The synchronous block 405 is slidably connected in the sliding groove 401. The side of the synchronous block 405 is also rotatably connected to the pulling rod 406 through a rotating shaft. The pulling rod 406 is rotatably connected to the follower block 407 through a rotating shaft.

[0036] Embodiment 2: Working principle: When the mechanism is used, a spirit level is used to level the upper surface of the fixed frame 4, and the height of the stabilizing mechanism 2 is adjusted by adjusting the length of the shock absorbing mechanism 3. After the upper surface of the fixed frame 4 is adjusted to be horizontal, the exposure machine 1 is placed on the upper surface of the fixed frame 4, and the clamping mechanism 7 is used to push the fixed frame 4 to clamp and fix the exposure machine 1. After the exposure machine 1 is clamped and fixed, the locking mechanism 8 is used to lock the clamping mechanism 7 to prevent the clamping mechanism 7 from failing to fix, which would have a negative impact on the performance of the exposure machine 1, the accuracy and repeatability of the production results, and the overall stability of the equipment. The shock absorbing mechanism 3 and the stabilizing mechanism 2 absorb the interference caused by the vibration source to ensure its stability and exposure accuracy.

[0037] The height of the stabilizing mechanism 2 can be adjusted by adjusting the length of the shock absorbing mechanism 3, firstly, the two adjusting nuts 305 are rotated, and the two adjusting nuts 305 move toward each other, and then the two locking nuts 303 are rotated to move toward each other, and the two locking nuts 303 move toward each other, and the two limiting rings 306 move toward each other, and the two limiting rings 306 move toward each other and compress the shock absorbing spring 307. At this time, the length of the shock absorbing mechanism 3 increases and pushes the support plate 5 to move upward, and the upward movement of the support plate 5 drives the stabilizing frame 201 to move upward, and the upward movement of the stabilizing frame 201 pulls the two stabilizing plates 202 to slide toward each other, and the compression spring 203 and the tension spring 204 release the pressure to push the two stabilizing plates 202 to slide toward each other, and under the action of the guide block 205, the two stabilizing plates 202 slide toward each other and move upward along the stabilizing block 206. At this time, the height of the stabilizing mechanism 2 increases. 3 and thus reduce the height of the stabilizing mechanism 2, first rotate the two adjusting nuts 305, the two adjusting nuts 305 move in the opposite direction, then rotate the two locking nuts 303 in the opposite direction, the two adjusting nuts 305 move in the opposite direction to push the two limit rings 306 to move in the opposite direction, the two limit rings 306 move in the opposite direction to release the pressure of the shock absorbing spring 307 to extend, at this time, the length of the shock absorbing mechanism 3 is reduced to pull the support plate 5 to move downward, the support plate 5 moves downward to drive the stabilizing frame 201 to move downward, the stabilizing frame 201 moves downward to push the two stabilizing plates 202 to slide in the opposite direction, the two stabilizing plates 202 slide in the opposite direction to squeeze the compression spring 203 and stretch the tension spring 204, under the action of the guide block 205, the two stabilizing plates 202 slide in the opposite direction and move downward along the stabilizing block 206, at this time, the height of the stabilizing mechanism 2 is reduced, so as to adjust the fixed frame 4 to a horizontal level.

[0038] When the clamping mechanism 7 is used to push the fixed frame 4 to clamp the exposure machine 1, the twisting handle 701 is turned, and the rotation of the twisting handle 701 drives the clamping shaft 703 to rotate, and the pulling plate 403, the synchronous block 405 and the pushing block 404 are driven to move toward each other through two clockwise threads and one counterclockwise thread on the outer side of the clamping shaft 703. The pulling plate 403 drives the clamping plate 402 to contact with the exposure machine 1. Under the action of the pulling rod 406, the synchronous block 405 drives the two follower blocks 407 to move toward each other, and the two follower blocks 407 move toward each other to drive the two follower plates 411 to contact with the exposure machine 1. The synchronous block 405 and the pushing block 404 move toward each other to push the hinged ends of the active rod 408 and the driven rod 409 to move to both sides, and the pushing block 404 drives the pushing plate 410 to contact with the exposure machine 1. At this time, the clamping mechanism 7 pushes the fixed frame 4 to clamp the exposure machine 1. When the clamping mechanism 7 is used, When the holding mechanism 7 pushes the fixed frame 4 to release the exposure machine 1, the twist handle 701 is rotated in the opposite direction. The reverse rotation of the twist handle 701 drives the clamping shaft 703 to rotate in the opposite direction, and drives the pulling plate 403, the synchronization block 405 and the pushing block 404 to move in the opposite direction through two clockwise threads and one counterclockwise thread on the outer side of the clamping shaft 703. The pulling plate 403 drives the clamping plate 402 to break contact with the exposure machine 1. Under the action of the pulling rod 406, the synchronization block 405 drives the two follower blocks 407 to move in the opposite direction. The two follower blocks 407 move in the opposite direction and drive the two follower plates 411 to break contact with the exposure machine 1. The synchronization block 405 and the pushing block 404 move in the opposite direction to push the hinged ends of the active rod 408 and the driven rod 409 to move inward, and the pushing block 404 drives the pushing plate 410 to break contact with the exposure machine 1. At this time, the clamping mechanism 7 pushes the fixed frame 4 to release the exposure machine 1.

[0039] After the clamping mechanism 7 clamps and fixes the exposure machine 1, the locking mechanism 8 is used to lock the clamping mechanism 7, the locking handle 801 is rotated 90 degrees, and the locking handle 801 is pressed to move downward. The locking handle 801 moves downward to compress the reset spring 802, and the locking handle 801 moves downward to push the locking shaft 804 to move downward. The locking shaft 804 moves downward to drive the locking block 806 to move downward. The locking block 806 moves downward to mesh with the clamping gear 702. The locking shaft 804 moves downward to drive the protrusion 805 to move downward. When the protrusion 805 moves to the bottom of the limit sleeve 803, the locking handle 801 is rotated 90 degrees again. At this time, the locking The mechanism 8 locks the clamping mechanism 7; when the locking mechanism 8 unlocks the clamping mechanism 7, the locking handle 801 is rotated 90 degrees, the reset spring 802 releases the pressure to push the locking handle 801 to move upward, the locking handle 801 moves upward to pull the locking shaft 804 to move upward, the locking shaft 804 moves upward to drive the locking block 806 to move upward, the locking block 806 moves upward to disengage from the clamping gear 702, the locking shaft 804 moves upward to drive the protrusion 805 to move upward, when the protrusion 805 moves to above the limit sleeve 803, the locking handle 801 is rotated 90 degrees again, and at this time the locking mechanism 8 unlocks the clamping mechanism 7.

[0040] The above-mentioned embodiments only express the preferred implementation modes of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present invention. It should be pointed out that, for a person skilled in the art, several modifications, improvements and substitutions can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention patent shall be subject to the attached claims.

Claims

1. A stabilizing mechanism for a working platform of an exposure machine, characterized in that: The invention comprises a support plate (5), wherein four stabilizing mechanisms (2) are arranged on the lower surface of the support plate (5), two shock absorbing mechanisms (3) are arranged between every two of the stabilizing mechanisms (2), a supporting foot (6) is arranged on the lower surface of the stabilizing mechanism (2), a fixing frame (4) is arranged on the upper surface of the support plate (5), an exposure device (1) is arranged on the upper surface of the fixing frame (4), a clamping mechanism (7) is arranged inside the fixing frame (4), a locking mechanism (8) is arranged above the clamping mechanism (7), and the stabilizing mechanism (2) comprises a stabilizing frame (2 01), the upper surface of the stabilizing frame (201) is fixedly connected to the lower surface of the support plate (5), the inner side surface of the stabilizing frame (201) is provided with a T-shaped slide groove, two stabilizing plates (202) are slidably connected in the T-shaped slide groove, the stabilizing plates (202) and the opposite sides of the stabilizing frame (201) are fixedly connected with a compression spring (203), the sides of the two stabilizing plates (202) are fixedly connected with two tension springs (204) through a fixing block, and the lower ends of the two stabilizing plates (202) are provided with symmetrical inclined surfaces, and inclined T-shaped slide grooves are provided in the inclined surfaces.

2. The exposure machine working platform stabilization mechanism according to claim 1, characterized in that: The stabilizing mechanism (2) further comprises a guide block (205), the guide block (205) being slidably connected in an inclined T-shaped slide groove on the inclined surface of the stabilizing plate (202), a stabilizing block (206) being fixedly connected to the other side of the guide block (205), and an inclined surface matching the inclined surface at the lower end of the stabilizing plate (202) being formed at the upper end of the stabilizing block (206).

3. The exposure machine working platform stabilization mechanism according to claim 2, characterized in that: The lower surface of the stabilizing block (206) is fixedly connected to the supporting foot (6), and the cross-section of the supporting foot (6) is L-shaped.

4. The exposure machine working platform stabilization mechanism according to claim 1, characterized in that: The shock absorbing mechanism (3) comprises two groups of connection seats (301), one group of the connection seats (301) is fixedly connected to the lower surface of the support plate (5), and the other group of the connection seats (301) is fixedly connected to the upper surface of the support foot (6). The two groups of the connection seats (301) are rotatably connected to the connection plates (302) via a rotating shaft. The opposite sides of the two connection plates (302) are fixedly connected to an adjustment shaft (304). The outer side of the adjustment shaft (304) is threadedly connected to a locking nut (303) and an adjustment nut (305). The outer side surfaces of the locking nut (303) and the adjustment nut (305) are hexagonal. A limiting ring (306) is slidably connected to the outer side of the adjustment shaft (304) and located between the locking nut (303) and the adjustment nut (305). The opposite sides of the two limiting rings (306) are provided with an annular groove, and a shock absorbing spring (307) is rotatably connected in the annular groove.

5. The exposure machine working platform stabilization mechanism according to claim 1, characterized in that: The clamping mechanism (7) comprises a clamping shaft (703), the clamping shaft (703) being rotatably connected to the fixed frame (4), the outer side surface of the clamping shaft (703) being provided with two clockwise threads and one counterclockwise thread, the clamping shaft (703) passing through the fixed frame (4) and the end portion extending to the outside of the fixed frame (4) being fixedly connected to a twist handle (701), and a clamping gear (702) being fixedly connected between the fixed frame (4) and the twist handle (701) and located on the outer side of the clamping shaft (703).

6. The exposure machine working platform stabilization mechanism according to claim 1, characterized in that: The locking mechanism (8) comprises a limiting sleeve (803), the limiting sleeve (803) being fixedly connected to the outer side surface of the fixing frame (4), an elliptical through hole being provided inside the limiting sleeve (803), a locking shaft (804) being slidably connected inside the elliptical through hole, a protrusion (805) being fixedly connected below the limiting sleeve (803) and located on the outer side of the locking shaft (804), the cross section of the protrusion (805) being elliptical, a locking handle (801) being fixedly connected to the upper end of the locking shaft (804), a return spring (802) being provided between the locking handle (801) and the limiting sleeve (803) and located on the outer side of the locking shaft (804), and an annular sliding groove being provided at the lower end of the locking shaft (804).

7. The exposure machine working platform stabilization mechanism according to claim 5, characterized in that: The locking mechanism (8) further comprises a locking block (806), the upper surface of the locking block (806) being provided with a T-shaped groove, the locking shaft (804) being rotatably connected in the T-shaped groove, the lower surface of the locking block (806) being provided with an arc surface, the arc surface being provided with a plurality of tooth grooves, the locking block (806) being meshedly connected with the clamping gear (702) via the tooth grooves.

8. The exposure machine working platform stabilization mechanism according to claim 1, characterized in that: The fixing frame (4) is fixedly connected to the upper surface of the support plate (5); a cross-shaped sliding groove (401) is provided inside the fixing frame (4); and the cross section of the sliding groove (401) is in the shape of a figure twenty.

9. The exposure machine working platform stabilization mechanism according to claim 5, characterized in that: A pulling plate (403) is slidably connected in the sliding groove (401), and the pulling plate (403) is rotatably connected to the clamping shaft (703) via a clockwise thread. The upper surface of the pulling plate (403) is fixedly connected to the clamping plate (402). A pushing block (404) is also slidably connected in the sliding groove (401), and the pushing block (404) is rotatably connected to the clamping shaft (703) via a counterclockwise thread. The upper surface of the pushing block (404) is fixedly connected to a pushing plate (410). Two follower blocks (407) are also slidably connected in the sliding groove (401), and the upper surface of the follower block (407) is fixedly connected to a follower plate (411).

10. The exposure machine working platform stabilizing mechanism according to claim 9, characterized in that: The two sides of the pushing block (404) are rotatably connected to driven rods (409) via a rotating shaft, the other end of the driven rod (409) is rotatably connected to an active rod (408) via a rotating shaft, the other end of the active rod (408) is rotatably connected to a synchronous block (405) via a rotating shaft, the synchronous block (405) is rotatably connected to the clamping shaft (703) via a clockwise thread, the synchronous block (405) is slidably connected in the sliding groove (401), the side of the synchronous block (405) is also rotatably connected to a pulling rod (406) via a rotating shaft, and the pulling rod (406) is rotatably connected to the follower block (407) via a rotating shaft.

Images