A fully-sealed low-temperature sensor and a vacuum pump based on the low-temperature sensor

Abstract

The present invention belongs to the technical field of cryogenic sensors, and particularly relates to a fully sealed cryogenic sensor and a vacuum pump based on the cryogenic sensor, including a main body, and an installation opening provided on the pump body; it further includes a fully sealed cryogenic sensor, which is fixedly connected to the installation opening through an aviation plug. The aviation plug is connected with a copper probe through a stainless steel capillary tube. A diode is fixedly encapsulated inside the copper probe. By extending the two poles of the diode and arranging a plastic hose sleeved outside the diode inside the stainless steel capillary tube, the copper probe and the stainless steel capillary tube are fixed through a fixing device. The present invention is provided with a fixing device, which can fix the copper probe in the sensor, ensure the accuracy during the cryogenic monitoring of the vacuum pump, and at the same time can quickly disassemble and install the sensor, which is beneficial to subsequent maintenance and repair replacement. By setting a conversion device, the signals in the sensor can be converted and optimized, and the stability and reliability of the signals can be improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of cryogenic sensors, and particularly relates to a fully sealed cryogenic sensor and a vacuum pump based on the cryogenic sensor. Background Art

[0002] A sensor is a complex device used to detect and respond to electrical or optical signals, converting physical parameters (such as temperature, blood pressure, humidity, speed, etc.) into signals that can be measured electrically. Among them, the working principle of the sensor is based on the process of converting non-electrical quantities into electrical quantities. This process generally involves a sensitive element, a conversion element, and a conversion circuit. The sensitive element directly senses the physical quantity to be measured and outputs a corresponding signal; the conversion element then converts this signal into an electrical signal; the conversion circuit processes these electrical signals for further transmission and processing. This complex conversion mechanism enables the sensor to accurately capture minute changes in the environment or system and convert them into electrical signals that are easy to understand and process.

[0003] Cryogenics belongs to extreme technology and is a special field. A cryogenic sensor, as the name implies, is a sensor that can operate normally at very low temperatures. The development of cryogenic temperature sensors to a certain extent represents the current high-precision and advanced technology level. With the continuous expansion of the application of cryogenics in military, aviation, aerospace, nuclear, energy, automation, medicine, biology, industrial and agricultural technologies, in various application scenarios, it is necessary to determine the cryogenic situation in a timely manner through cryogenic temperature sensors.

[0004] When installing existing cryogenic sensors, the cables connected to them are usually not fixed, and accidental pulling of the cables easily causes damage to the sensors, affecting their normal use. At the same time, sensors usually use cryogenic glue to paste the sensors on cryogenic containers. This installation method is restricted by the performance of the cryogenic glue and is not firmly fixed, or screws are used for fixed installation, resulting in more trouble during later maintenance and inconvenient replacement. Summary of the Invention

[0005] The purpose of the present invention is to provide a fully sealed cryogenic sensor and a vacuum pump based on the cryogenic sensor, which can effectively monitor the temperature inside the vacuum pump and ensure the safety and stability of the vacuum pump during cryogenic operation. Fixing the copper probe through a fixing device can ensure that there is no shaking during cryogenic monitoring, which may lead to inaccurate monitoring and may cause failures. It is also convenient to disassemble and install the sensor, which is beneficial for subsequent maintenance and repair and replacement. At the same time, setting a conversion device can convert and optimize the signals in the sensor to ensure that the transmitted signals are suitable for remote transmission, reduce delays and losses during data transmission, and improve the stability and reliability of the signals.

[0006] The technical solutions adopted by the present invention are specifically as follows:

[0007] A vacuum pump based on a cryogenic sensor, comprising a pump body, a shielding cover is arranged inside the pump body, a baffle is arranged above the shielding cover, and a secondary cold plate is fixedly arranged inside the shielding cover. A cryogenic cover is sleeved outside the secondary cold plate, an adsorption device is arranged between the cryogenic cover and the secondary cold plate, and a cold head is arranged at the bottom of the secondary cold plate. The cold head is fixedly arranged at the output end of a refrigerator;

[0008] Wherein, an installation opening is further formed on the pump body, a connecting flange is fixedly arranged at the installation opening, and an installation flange is fixedly sleeved above the pump body. The bottom of the pump body is connected to the refrigerator through a fixing flange, and the fixing flange is sleeved outside the bottom of the pump body and the outside of the refrigerator.

[0009] A fully sealed cryogenic sensor, comprising an aviation plug, a fastening flange is fixedly arranged outside the aviation plug, and the fastening flange is fixedly connected to the connecting flange fixedly arranged at the installation opening;

[0010] It further includes a copper probe, a diode is fixedly encapsulated inside the copper probe, and extension lines of two poles of the diode are welded to one end of the aviation plug located inside the pump body through a stainless steel capillary tube. The stainless steel capillary tube contains the extension lines of the two poles of the diode and a plastic hose sleeved outside the diode;

[0011] A fixing device, which can be fixedly connected to the baffle, the secondary cold plate and the cryogenic cover inside the vacuum pump, and the copper probe and the stainless steel capillary tube are arranged inside the fixing device;

[0012] Wherein, fastening holes are arranged in an array along the centers of the connecting flange, the installation flange, the fixing flange and the fastening flange respectively. The sizes and numbers of the fastening holes formed on the connecting flange and the fastening flange are equal. The stainless steel capillary tube and the aviation plug need to be specially welded, and the welding needs to withstand low temperature and vacuum environment.

[0013] Further, an installation hole is formed at one end of the aviation plug located outside the pump body, and a signal transmitter is fixedly arranged inside the installation hole. The signal transmitter is arranged in an array along the center of the installation hole.

[0014] Further, a limiting retaining ring is fixedly sleeved outside the aviation plug, the limiting retaining ring is arranged outside the installation hole, and a limiting pin column is further fixedly arranged outside the installation hole. The limiting pin column is located outside the limiting retaining ring.

[0015] Further, the fixing device includes a fixing plate which can be fixedly connected to the baffle plate, the secondary cold plate and the cryogenic cover respectively. The fixing plate is fixedly connected with a fixing component and a limiting component. The copper probe is fixedly installed in the fixing component, and the stainless steel capillary tube is slidably connected in the limiting component.

[0016] Further, the fixing component includes an installation cylinder fixedly arranged on the fixing plate. A fixing groove is formed in the installation cylinder. The copper probe is slidably arranged in the fixing groove. The bottom of the fixing groove is fixedly connected with a fixing seat through a buffer. The fixing seat is slidably connected with the fixing groove and is located at the bottom of the copper probe.

[0017] Wherein, a protection plate is hinged above the installation cylinder. The protection plate is located above the copper probe, and the protection plate is clamped and connected to the other side of the installation cylinder.

[0018] Further, the limiting component includes a limiting plate rotatably arranged on the fixing plate. A limiting groove is formed in the limiting plate, and a limiting buckle is rotatably connected to one end of the limiting plate. A limiting convex block adapted to the limiting groove is formed on the limiting buckle.

[0019] Wherein, the stainless steel capillary tube is arranged in the limiting groove. The limiting buckle drives the limiting convex block to limit the stainless steel capillary tube, and the other end of the limiting buckle is clamped and connected to the other end of the limiting plate.

[0020] Further, the aviation plug is detachably connected with a conversion device. The conversion device includes a signal receiver slidably connected to the installation hole. An installation ring is fixedly connected to the outside of the signal receiver. A sliding groove is formed in the installation ring, and a limiting pin is slidably connected in the sliding groove.

[0021] Further, the conversion device further includes a signal transmitter electrically connected to the signal receiver. The signal transmitter can be remotely connected to any one or more of an operator's computer or mobile phone.

[0022] The technical effects achieved by the present invention are as follows:

[0023] A fully sealed cryogenic sensor and a vacuum pump based on the cryogenic sensor of the present invention can achieve layer-by-layer cooling in the pump body by arranging a cold head, a secondary cold plate, a baffle plate and a shielding cover in the pump body, ensuring that the temperature in the vacuum pump can be effectively reduced step by step. By arranging the aviation plug of the cryogenic sensor on the pump body, the signal of the sensor can be received, and the stability during use can be ensured. By welding the stainless steel capillary tube welded to the aviation plug to the copper probe for encapsulating the diode, the temperature in the pump body can be effectively monitored.

[0024] A fully sealed cryogenic sensor of the present invention and a vacuum pump based on the cryogenic sensor are fixedly connected to components in the pump body through a fixing device to ensure the stability during the installation of the sensor. By placing a copper probe through a fixing component, it can effectively prevent measurement errors caused by vibrations or temperature fluctuations during the operation of the equipment, ensuring the stability of the copper probe and the reliability of the measurement. By providing a limiting component to limit the stainless steel capillary for placing the diode extension wire, it can prevent its displacement in extreme environments, thereby improving the working stability and reliability of the entire sensor system.

[0025] A fully sealed cryogenic sensor of the present invention and a vacuum pump based on the cryogenic sensor can convert and optimize the signals in the sensor through a conversion device to ensure that the transmitted signals are suitable for remote transmission, reduce delays and losses during data transmission, and improve the stability and reliability of the signals. By using the cooperation of the mounting ring in the conversion device and the limit pin on the aviation plug, it ensures the stability of the connection and makes maintenance and replacement simple and fast. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is an exploded schematic view of the overall structure of the present invention;

[0027] Figure 2 is a schematic view of the overall structure of the present invention;

[0028] Figure 3 is a sectional view of the overall structure of the present invention;

[0029] Figure 4 is of the present invention Figure 3 a magnified schematic view of the structure at A;

[0030] Figure 5 is a partial sectional view of the overall structure of the present invention;

[0031] Figure 6 is of the present invention Figure 5 a magnified schematic view of the structure at B;

[0032] Figure 7 is an exploded schematic view of the partial structure of the present invention;

[0033] Figure 8 is a schematic view of the structure of the aviation plug and the copper probe of the present invention;

[0034] Figure 9 is a schematic view of the structure of the copper probe and the fixing device of the present invention;

[0035] Figure 10 is an exploded schematic view of the fixing device of the present invention.

[0036] In the attached drawings, the list of components represented by each reference numeral is as follows:

[0037] 10. Pump body; 11. Shielding cover; 12. Baffle; 13. Secondary cold plate; 14. Low-temperature cover; 15. Adsorption device; 16. Cold head; 17. Refrigerator; 18. Installation port;

[0038] 20. Connecting flange; 21. Installation flange; 22. Fixed flange; 23. Fastening flange;

[0039] 30. Aviation plug; 31. Installation hole; 311. Signal transmitter; 32. Limit retaining ring; 33. Limit pin column;

[0040] 40. Copper probe; 41. Diode; 42. Stainless steel capillary;

[0041] 50. Fixing device; 51. Fixing plate; 52. Fixing component; 521. Installation cylinder; 522. Fixing groove; 523. Buffer; 524. Fixing seat; 525. Protection plate; 53. Limit component; 531. Limit plate; 532. Limit groove; 533. Limit buckle; 534. Limit projection;

[0042] 60. Conversion device; 61. Signal receiver; 62. Installation ring; 621. Sliding groove; 63. Signal transmitter. Detailed implementation manners

[0043] In order to make the purpose and advantages of the present invention clearer, the present invention will be specifically described below in conjunction with embodiments. It should be understood that the following text only describes one or several specific implementation manners of the present invention, and does not strictly limit the specific protection scope claimed by the present invention.

[0044] As Figures 1 - 5 shown, a vacuum pump based on a low-temperature sensor includes a pump body 10. Inside the pump body 10, there is a shielding cover 11. Above the shielding cover 11, there is a baffle 12. And inside the shielding cover 11, a secondary cold plate 13 is fixedly arranged. A low-temperature cover 14 is sleeved outside the secondary cold plate 13. An adsorption device 15 is arranged between the low-temperature cover 14 and the secondary cold plate 13. And at the bottom of the secondary cold plate 13, there is a cold head 16, and the cold head 16 is fixedly arranged at the output end of a refrigerator 17;

[0045] Among them, an installation port 18 is also opened on the pump body 10. At the installation port 18, a connecting flange 20 is fixedly arranged. And an installation flange 21 is fixedly sleeved above the pump body 10. The bottom of the pump body 10 is connected to the refrigerator 17 through a fixed flange 22, and the fixed flange 22 is sleeved outside the bottom of the pump body 10 and the outside of the refrigerator 17.

[0046] It should be noted that the adsorption device 15 includes activated carbon, zeolite, and silica gel. Among them, activated carbon has good adsorption performance and can adsorb organic vapors, hydrogen, and helium. Zeolite has the function of a molecular sieve and can be applied to separation and purification processes, selectively adsorbing molecules of a specific size. Silica gel can adsorb moisture, adjust the humidity inside the pump, and maintain a dry environment. The pump body 10 is also provided with a rough pumping port and a gas delivery port. The rough pumping port is fixedly connected to a rough pumping assembly through a control valve to preliminarily extract the gas in the vacuum pump, and the gas delivery port inputs and discharges the refrigerating gas through a control valve.

[0047] In this embodiment, the pump body 10 is the housing of the vacuum pump, which can provide protection and support for its internal components, ensuring the overall structural stability and sealing performance of the pump. A shield 11 is arranged inside the pump body 10, which can protect the internal sensitive components from pollutants and impurities, and at the same time can gradually shield the temperature inside the pump body. By arranging the baffle 12 above the shield 11, the gas flow inside the pump can be further isolated and controlled, improving the pumping efficiency. A secondary cold plate 13 is fixedly arranged inside the shield 11, which can adsorb gas molecules at low temperature to achieve low-temperature vacuum. By sleeving the low-temperature cover 14 outside the secondary cold plate 13 to achieve thermal insulation, layer-by-layer cooling can be realized to provide cold shielding. An adsorption device 15 is arranged between the low-temperature cover 14 and the secondary cold plate 13, which can adsorb gas physically or chemically and at the same time enhance the pumping ability of the pump. By arranging the cold head 16 at the bottom of the secondary cold plate 13 and directly connecting it to the output end of the refrigerator 17, the required low-temperature environment can be provided for the low-temperature vacuum pump. Among them, the refrigerator 17 is connected to the bottom of the pump body 10 through a fixed flange 22, which can generate and maintain a low-temperature environment and ensure stability and sealing performance during use. Specifically, an installation port 18 is opened on the pump body 10, and a connection flange 20 is arranged at the installation port 18, which is convenient for connecting the low-temperature sensor to ensure the stability during the monitoring of the low-temperature sensor. By fixedly arranging an installation flange 21 above the pump body 10, the pump body 10 can be effectively connected to other usage structures to achieve low-temperature vacuum operation.

[0048] As Figures 1 - 10 shown, a fully sealed low-temperature sensor includes an aviation plug 30. A fastening flange 23 is fixedly arranged outside the aviation plug 30, and the fastening flange 23 is fixedly connected to the connection flange 20 fixedly arranged at the installation port 18;

[0049] It also includes a copper probe 40. A diode 41 is fixedly encapsulated inside the copper probe 40. The extension lines of the two poles of the diode 41 are welded to one end of the aviation plug 30 located inside the pump body 10 through a stainless steel capillary 42. The stainless steel capillary 42 contains the extension lines of the two poles of the diode 41 and a plastic hose sleeved outside the diode 41;

[0050] The fixing device 50 can be fixedly connected to the baffle 12, the secondary cold plate 13 and the cryogenic cover 14 inside the vacuum pump, and the fixing device 50 is provided with a copper probe 40 and a stainless steel capillary 42;

[0051] Among them, the connecting flange 20, the mounting flange 21, the fixing flange 22 and the fastening flange 23 are all provided with fastening holes arrayed along their respective centers, and the sizes and numbers of the fastening holes opened on the connecting flange 20 and the fastening flange 23 are equal.

[0052] It should be noted that the fixing plate 51 is fixedly connected to the inside of the vacuum pump by special welding. The welding needs to withstand low temperature and vacuum environment. Protective pads are fixedly provided at the bottom of the protection plate 525 and above the fixing seat 524, and elastic protective pads are provided on both the limiting convex block 534 and the limiting groove 532, which can protect the copper probe 40 and the stainless steel capillary 42. Among them, the diode 41 is of a special type and can generate current conversion due to environmental temperature changes to obtain the environmental temperature, and the temperature range is capable of detecting 10K. Among them, the stainless steel capillary 42 needs to be annealed and softened to protect the internal circuit and maintain the vacuum environment. Among them, the welding joint of the stainless steel capillary 42 and the aviation plug 30 needs to adopt special welding technology to ensure good electrical connection and mechanical strength in extreme low temperature and vacuum environments.

[0053] In this embodiment, by connecting the aviation plug 30 to the mounting port 18 opened on the pump body 10, a highly reliable connection point can be provided, through which the signal of the sensor can be output to an external device or system, and a stable connection can be maintained. By fixing the fastening flange 23 on the outside of the aviation plug 30, it is ensured that the aviation plug 30 can be firmly connected to the pump body 10 through the fastening flange 23. Through the cooperation of the connection flange 20 provided at the mounting port 18 and the fastening flange 23, additional mechanical strength and stability can be provided to prevent the connection from loosening due to vibration or temperature changes. Among them, the copper probe 40 is arranged inside the pump body 10 for temperature monitoring. By fixedly encapsulating a diode 41 inside the copper probe 40, the temperature inside the pump body 10 can be monitored. Since the copper probe 40 has good thermal conductivity, it is selected as the encapsulation material. By cooperating with the diode 41, it can be directly arranged in the measurement environment and respond quickly and accurately to temperature changes. Among them, the diode 41 is used as a temperature sensing element, and the extension wires at both ends of it are protected by a stainless steel capillary 42 to ensure its functionality and reliability even in a harsh physical environment. By specially welding the two ends of the stainless steel capillary 42 to the copper probe 40 and the aviation plug 30 respectively, protection can be provided for the extension wires of the diode 41 inside it and the plastic hose sleeved outside the diode 41, corrosion resistance can be provided, the integrity of the extension wires of the diode 41 can be ensured, and it is ensured that the transmission performance will not be lost under low temperature or vacuum conditions. Among them, the plastic hose located inside the stainless steel capillary 42 can provide additional protection for the diode 41 to avoid affecting its measurement accuracy due to minor physical damage, and at the same time provide a certain degree of flexibility for the extension wires to reduce the risk of breakage caused by vibration or movement. The copper probe 40 is fixed by a fixing device 50 so that it can be stably installed at a designated position inside the vacuum pump, thereby ensuring the correct installation position and long-term stable operation of the sensor. Specifically, through the fastening holes opened on the flange, fasteners can be placed to fix the flange to ensure its use stability. Among them, the sizes and numbers of the fastening holes on the connection flange 20 and the fastening flange 23 match, ensuring the consistency and reliability of the installation of the aviation plug 30. Among them, the rough pumping port and the gas delivery port on the pump body 10 can realize the initial pumping of the gas inside the pump body 10 and the input and discharge of the refrigerating gas. By connecting a control valve to the rough pumping port to connect with the rough pumping assembly, it is ensured that the gas inside the vacuum pump can be initially pumped during the startup stage, which helps to quickly reduce the pressure inside the pump and create conditions for further fine pumping. By setting the gas ports for the input and discharge of the refrigerating gas, the input and discharge of the refrigerating gas can be controlled, which is convenient for capturing and condensing the gas molecules inside the pump. It can not only ensure the efficient operation of the cryopump, but also prevent equipment damage or performance degradation caused by refrigerating gas leakage or improper pressure.

[0054] Such as Figure 3 , Figure 5, Figure 7 As shown, the mounting hole 31 is formed at one end of the aviation plug 30 outside the pump body 10, which can provide a fixed position for the signal transmitter 311, ensure that the signal transmitter 311 can be correctly installed and protected from the external environment, and at the same time can be connected to the conversion device 60 to transmit the information monitored in the pump body 10. By fixing the signal transmitter 311 in the mounting hole 31 and arranging it in a central array along the mounting hole 31, it is beneficial to the stable transmission of signals. At the same time, the signal transmitter 311 is responsible for converting the temperature signal monitored by the sensor into an electrical signal and transmitting it to an external device or system through the conversion device 60 arranged in the mounting hole 31.

[0055] Preferably, by fixedly sleeving the limit retaining ring 32 outside the aviation plug 30, it can prevent the conversion device 60 from being inserted excessively during use, thereby protecting the connection stability between the signal transmitter 311 and the signal receiver 61. By arranging the limit pin 33 outside the mounting hole 31 and on the outside of the limit retaining ring 32, it can further ensure the stable connection between the conversion device 60 and the aviation plug 30, and avoid signal loss or poor contact caused by movement.

[0056] As Figure 2 , Figure 3 , Figure 6 As shown, the fixing plate 51 can ensure the stability of the entire sensor system through the fixed connection with the baffle 12, the secondary cold plate 13, and the low-temperature cover 14. It can prevent the displacement of the sensor caused by vibration or temperature difference in a vacuum environment and reduce the measurement error caused by improper installation. By setting the fixing component 52 above the fixing plate 51 and fixedly installing the copper probe 40 in the fixing component 52, the copper probe 40 can be firmly positioned at the best position to obtain the most accurate temperature measurement result, and at the same time, the stability and reliability of the copper probe 40 during the measurement process can be ensured. Among them, a limit component 53 is also fixedly arranged above the fixing plate 51. By placing the stainless steel capillary 42 in the limit component 53, it can ensure a stable connection between the stainless steel capillary 42 and the copper probe 40. It can prevent damage to the copper probe 40 caused by external force movement, thereby extending the service life of the sensor and ensuring the reliability of signal transmission. Specifically, the fixing device 50 is used in cooperation with the copper probe 40. By fixedly arranging multiple sensors inside the pump body 10, the temperature inside the pump body 10 can be effectively monitored at multiple levels. By setting sensors at different positions, the temperature distribution inside the pump body 10 can be monitored more comprehensively, which is for achieving precise temperature control.

[0057] As Figure 7 , Figure 9 , Figure 10As shown, the fixing component 52 can ensure the stable use of the copper probe 40, ensuring that the sensor can accurately measure the temperature in harsh low-temperature and vacuum environments. By fixing the mounting cylinder 521 on the fixing plate 51, a stable foundation is provided for fixing and protecting the internal sensor components. By opening a fixing groove 522 in the mounting cylinder 521, an installation path can be provided for the copper probe 40 to ensure its safety during use. At the same time, it helps to cope with the expansion and contraction caused by temperature changes, thereby reducing probe damage or measurement errors caused by physical deformation. By arranging a buffer 523 and a fixing seat 524 in the mounting cylinder 521, and through the cooperation of the buffer 523 and the fixing seat 524, additional support and buffering effects can be provided for the copper probe 40. Among them, the fixing seat 524 is slidably connected to the fixing groove 522 and is located at the bottom of the copper probe 40. By connecting the buffer 523 to the bottom of the fixing groove 522, the force generated by the vibration or impact of the pump body 10 can be absorbed and alleviated, protecting the copper probe 40 from damage. By hinging a protection plate 525 above the mounting cylinder 521, the copper probe 40 can be protected from the influence of the external environment such as dust, moisture and other potential damages. Among them, the protection plate 525 is snap-connected to the other side of the mounting cylinder 521, making it easy to open and close during maintenance and repair, and the copper probe 40 can be quickly accessed without using tools.

[0058] As Figure 4 , Figure 7 , Figure 9 As shown, the limiting component 53 can provide stable support for the stainless steel capillary 42 and limit its movement to protect the sensor and ensure measurement accuracy. By fixing the limiting plate 531 on the fixing plate 51, the stainless steel capillary 42 can be supported to ensure its stability during use. By opening a limiting groove 532 in the limiting plate 531, it is used to accommodate and limit the movement of the stainless steel capillary 42, and at the same time provide guidance and movement range limitation for the stainless steel capillary 42. It can effectively prevent the stainless steel capillary 42 from excessive movement or damage due to the vibration of the pump body 10 or other external forces, thereby protecting the integrity and measurement accuracy of the sensor. By rotatably connecting a limiting buckle 533 to one end of the limiting plate 531, a limiting protrusion 534 adapted to the limiting groove 532 is fixedly arranged above it. Among them, when the limiting buckle 533 drives the limiting protrusion 534 to close, the limiting protrusion 534 and the limiting groove 532 act together on the stainless steel capillary 42 to provide stability and limiting effects. At the same time, through snap connection, it can be quickly opened or closed for easy maintenance or adjustment, and at the same time ensure sufficient safety locking during operation, and an efficient and stable assembly effect can be achieved.

[0059] As Figure 3 , Figure 5 , Figure 7As shown, the conversion device 60 is mainly used for signal conversion and connection stability between the aviation plug 30 and external devices or systems. Among them, the signal receiver 61 slidably connected to the mounting hole 31 can receive signals from the aviation plug 30 and convert them into a format suitable for further transmission or processing, thereby optimizing the signal reception effect. By fixedly connecting the mounting ring 62 to the outside of the signal receiver 61, additional stability can be provided for the use of the conversion device 60, reducing displacement caused by vibration or external forces and protecting the stability of signal transmission. By providing a sliding groove 621 inside the mounting ring 62 and cooperating with the limit pin 33 through the sliding groove 621, locking can be achieved to ensure that the conversion device 60 will not disengage from the aviation plug 30 due to accidental operation during use. When disassembling, simply rotate the conversion device 60 to easily slide it, allowing the limit pin 33 to enter or exit the sliding groove 621, achieving fast and safe connection or disconnection.

[0060] Preferably, the conversion device 60 not only includes a signal receiver 61 but also integrates a signal transmitter 63, greatly expanding the usage functions of the device. By electrically connecting the signal transmitter 63 to the signal receiver 61, the signals processed by the signal receiver 61 can be directly transmitted, ensuring the efficiency and reliability of signal transmission. Among them, the signal transmitter 63 also has the ability of remote connection and can establish a remote connection with the operator's computer or mobile phone. Allowing the operator to remotely monitor the operating status through the computer or mobile phone, real-time data can be obtained, increasing the flexibility and convenience of the system.

[0061] The working principle of the present invention is as follows: When low-temperature monitoring of the vacuum pump is required, the aviation plug 30 in the fully sealed low-temperature sensor is fixedly arranged at the installation port 18 on the pump body 10, and is fixedly connected to the connecting flange 20 through the fastening flange 23 to complete the connection of the aviation plug 30 and the vacuum pump. Among them, the signal receiver 61 in the conversion device 60 is connected to the signal transmitter 311 arranged in the installation hole 31 of the aviation plug 30, which can effectively transmit the signals monitored by the sensor. At the same time, the received signals can be remotely transmitted to the operator's computer or mobile phone through the signal transmitter 63. By specially welding the fixing plate 51 in the fixing device 50 to the components in the pump body 10 that need to be monitored by the sensor, the stability of the fixing plate 51 in the vacuum pump can be ensured. The copper probe 40 in the sensor can be fixedly placed through the fixing component 52 above the fixing plate 51, and the temperature can be effectively measured by hermetically placing the diode 41 in the copper probe 40. Among them, by placing the copper probe 40 in the fixing groove 522 opened in the installation cylinder 521, the safety of the sensor during detection can be ensured. The buffer 523 and the fixing seat 524 arranged at the bottom of the copper probe 40 can further shock-absorb and protect the copper probe 40 to prevent the sensor from being damaged during use. The copper probe 40 can be further fixedly protected by the protection plate 525 hinged to the installation cylinder 521. At the same time, the fixing groove 522 can guide and place the stainless steel capillary 42 welded on the copper probe 40, so that the stainless steel diode 41 can be fixed and limited by the limiting component 53, ensuring the working stability and reliability of the sensor system. Among them, the stainless steel diode 41 can be limited and guided through the limiting plate 531 and the limiting groove 532 opened on the limiting plate 531, and the stainless steel capillary 42 can be fixed by driving the limiting protrusion 534 through the limiting buckle 533 rotatably connected to the limiting plate 531, ensuring that it will not move during signal conduction, resulting in breakage from the copper probe 40.

[0062] Among them, when the vacuum pump is used at low temperature, the gas in the pump body 10 is roughly pumped to make the environment in the pump body 10 meet the requirements for low-temperature environment use. The method of low-temperature condensation is used, and the pump body 10, the baffle 12, the shielding cover 11, the cold head 16, and the secondary cold plate 13 provide cold shielding layer by layer from outside to inside with decreasing temperature, without contacting each other and being thermally isolated from each other, ensuring an efficient cooling effect. Among them, the cold head 16, the shielding cover 11, and the baffle 12 can maintain the temperature in the pump body 10 at 80K, mainly for condensing water vapor. Among them, through the secondary cold plate 13, the low-temperature cover 14, and the adsorption device 15, they are used to solidify nitrogen, oxygen, and argon, and at the same time adsorb hydrogen, helium, and neon, reducing the temperature in the pump body 10 to 15K. By placing a low-temperature sensor in the pump body 10, the temperature in the vacuum pump can be monitored, facilitating the use of the vacuum pump.

[0063] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present invention. The structures, devices, and operation methods not specifically described and explained in the present invention are implemented by conventional means in the art without special explanation and limitation.

Claims

1. A fully sealed low temperature sensor, characterized in that: It includes a vacuum pump, which includes a pump body, a shielding cover is provided inside the pump body, a baffle is provided above the shielding cover, a secondary cold plate is fixedly provided inside the shielding cover, a low-temperature cover is provided outside the secondary cold plate, an adsorption device is provided between the low-temperature cover and the secondary cold plate, and the adsorption device includes activated carbon, zeolite and silica gel; a cold head is provided at the bottom of the secondary cold plate, and the cold head is fixed at the output end of the refrigerator; a mounting port is also provided on the pump body, a connecting flange is fixed at the mounting port, a mounting flange is fixedly provided above the pump body, the bottom of the pump body is connected to the refrigerator through a fixing flange, the fixing flange is sleeved on the bottom of the pump body and the outside of the refrigerator includes an aviation plug, a fastening flange is fixedly provided on the outside of the aviation plug, and the fastening flange is fixedly connected to the connecting flange fixedly provided at the mounting port; Copper probe, a diode is fixedly packaged inside the copper probe, the two-pole extension wire of the diode is welded to one end of the aviation plug located in the pump body through a stainless steel capillary, and the stainless steel capillary contains the two-pole extension wire of the diode and a plastic hose arranged outside the diode; A fixing device, which can be fixedly connected to a baffle, a secondary cold plate and a low-temperature cover in a vacuum pump, and is provided with a copper probe and a stainless steel capillary; The connecting flange, mounting flange, fixing flange and fastening flange are all provided with fastening holes along their respective center arrays. The size and number of the fastening holes on the connecting flange and the fastening flange are equal. The stainless steel capillary and the aviation plug require special welding, and the welding needs to withstand low temperature and vacuum environment; a mounting hole is provided at one end of the aviation plug outside the pump body, a signal transmitter is fixed in the mounting hole, and the signal transmitter is provided along the center array of the mounting holes; a limit stop ring is also fixedly provided on the outside of the aviation plug, the limit stop ring is arranged on the outside of the mounting hole, a limit pin is also fixedly provided on the outside of the mounting hole, and the limit pin is located on the outside of the limit stop ring.

2. A fully sealed low temperature sensor according to claim 1, characterized in that: The fixing device includes a fixing plate, which can be fixedly connected to the baffle, the secondary cold plate and the low-temperature cover respectively. A fixing component and a limit component are fixedly connected to the fixing plate. A copper probe is fixedly installed in the fixing component, and a stainless steel capillary is slidably connected in the limit component.

3. A fully sealed low temperature sensor according to claim 2, characterized in that: The fixing assembly includes a mounting tube fixedly mounted on the fixing plate, a fixing groove is provided in the mounting tube, the copper probe is slidably mounted in the fixing groove, a fixing seat is fixedly connected to the bottom of the fixing groove through a buffer, and the fixing seat is slidably connected to the fixing groove and is located at the bottom of the copper probe; A protection plate is hinged above the installation tube, the protection plate is located above the copper probe, and the protection plate is clamped and connected to the other side of the installation tube.

4. A fully sealed low temperature sensor according to claim 3, characterized in that: The limiting assembly includes a limiting plate rotatably arranged on the fixed plate, a limiting slot is arranged on the limiting plate, one end of the limiting plate is rotatably connected to a limiting buckle, and a limiting convex block matching the limiting slot is arranged on the limiting buckle; The stainless steel capillary is arranged in the limiting groove, the limiting buckle drives the limiting protrusion to limit the stainless steel capillary, and the other end of the limiting buckle is connected with the other end of the limiting plate.

5. A fully sealed low temperature sensor according to claim 4, characterized in that: The aviation plug is detachably connected with a conversion device, which includes a signal receiver slidably connected to the mounting hole, a mounting ring fixedly connected to the outer side of the signal receiver, a sliding groove is provided in the mounting ring, and a limit pin is slidably connected in the sliding groove.

6. A fully sealed low temperature sensor according to claim 5, characterized in that: The conversion device also includes a signal transmitter electrically connected to the signal receiver, and the signal transmitter can be remotely connected to any one or more of the operator's computer or mobile phone.

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