A storage device for semiconductor chips

Abstract

The application relates to a storage device for semiconductor chips, which comprises a box body provided with an air inlet and an exhaust outlet, two left and right storage cavities arranged in the box body, and an exhaust outlet communicated with the storage cavities; a plurality of sealing plates arranged in an up-down mode are sealingly arranged in the storage cavities to divide the storage cavities into a plurality of chambers in an up-down mode, and each chamber is provided with a sealing door; an exhaust passage and a pressure stabilizing passage are arranged in the sealing plate; a plurality of exhaust assemblies are sealingly fixed to the sealing plate; the exhaust assemblies are respectively communicated with the pressure stabilizing passage and the exhaust passage; when the pressure of the pressure stabilizing passage is smaller than that of the exhaust passage, the exhaust assemblies can control the nitrogen in the exhaust passage to be exhausted; and the application has the advantages of self-adaptive pressure adjustment and rapid removal of dust and moisture.

Description

Technical Field

[0001] This invention belongs to the technical field of semiconductor chip storage devices, and specifically relates to a storage device for semiconductor chips. Background Technology

[0002] Semiconductor chips are semiconductor devices that perform certain functions by etching and wiring on semiconductor wafers. They are not limited to silicon chips; common semiconductor materials include gallium arsenide, germanium, and others. When storing semiconductor chips, they need to be stored in a nitrogen cabinet to ensure that the performance and reliability of the chips are not compromised.

[0003] In the present technology, nitrogen cabinets are mostly used to store semiconductor chips. The nitrogen environment reduces the humidity inside the cabinet and prevents the semiconductor chips from oxidizing, getting damp or corroding. However, the nitrogen cabinets in the present technology cannot adaptively adjust the pressure of the nitrogen input during the storage of semiconductors, and cannot automatically release high-pressure nitrogen to blow away dust and achieve rapid dehumidification after the semiconductor chips are placed in, thus affecting the preservation effect of semiconductor chips. Summary of the Invention

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a semiconductor chip storage device with pressure adaptive adjustment and rapid removal of dust and moisture.

[0005] The technical solution of the present invention is as follows:

[0006] A semiconductor chip storage device includes a housing with an air inlet and an exhaust outlet. The housing has two storage chambers, left and right, connected to the exhaust outlet. Each storage chamber is sealed with multiple vertically arranged sealing plates to divide it into multiple upper and lower compartments, each compartment having a sealed door. The sealing plates have an exhaust channel and a pressure stabilizing channel inside. Multiple exhaust assemblies are sealed and fixed to the sealing plates, each exhaust assembly connected to the pressure stabilizing channel and the exhaust channel. When the pressure in the pressure stabilizing channel is less than the pressure in the exhaust channel, the exhaust assembly controls the discharge of nitrogen gas from the exhaust channel.

[0007] Between the two storage chambers, there are two nitrogen chambers and an intermediate chamber located on the casing. A driving assembly is installed within each nitrogen chamber, enabling the pressure in the two nitrogen chambers to be different (higher and lower). When the driving assembly is operating, the air inlet connects to the nitrogen chamber to replenish nitrogen. Each nitrogen chamber has a unidirectional air inlet channel that connects to the intermediate chamber, allowing nitrogen from the nitrogen chamber to enter the intermediate chamber. The intermediate chamber contains the same number of on / off control components as the sealing plates in one of the storage chambers. These on / off control components connect the intermediate chamber and the nitrogen chambers. When nitrogen from the intermediate chamber enters the lower-pressure nitrogen chamber via the on / off control components, the on / off control components open to connect the intermediate chamber to the exhaust channel. When the exhaust component closes, the on / off control components gradually close as the pressure in the exhaust channel increases. The sealing door is equipped with a detection component electrically connected to the exhaust component of the corresponding chamber.

[0008] Furthermore, the on / off control assembly includes two housings, a fan wheel rotatably connected inside the housings, a centrifugal assembly, and a damping component fixed inside the storage chamber. The two housings are mirror images of each other with the vertical center line of the intermediate chamber as the center. The housings are fixed inside the intermediate chamber. The outer circumferential side of the housings has two holes, one of which communicates with the intermediate chamber, and the other hole is unidirectionally connected to the low-pressure nitrogen chamber, so that the nitrogen in the intermediate chamber enters the low-pressure nitrogen chamber through the housing.

[0009] An air intake barrel is provided on one side of each of the two fan wheels. The air intake barrel is connected to the fan wheel. The adjacent sides of the two air intake barrels on the same on / off control component do not contact each other and are slidably connected by ball bearings.

[0010] The fan wheel is connected to the exhaust channel, and the centrifugal assembly is disposed inside the fan wheel. When the fan wheel rotates, the centrifugal assembly is displaced so that nitrogen gas enters the exhaust channel through the fan wheel.

[0011] The damping element is connected to the exhaust channel, and the damping element gradually controls the fan wheel to stop rotating based on the increase in pressure in the exhaust channel.

[0012] Furthermore, the fan wheel includes a rotating shaft that is rotatably and sealed to the housing and multiple fan blades arranged in a circular array with the shaft axis as the center. The fan blades are in sealed contact with the housing to form multiple chambers. The fan blades are provided with centrifugal grooves radially along the rotating shaft, and the left and right sides of the centrifugal grooves are respectively provided with connecting channels opened on the fan blades.

[0013] A polygonal chamber is provided at the center of the rotating shaft. The centrifugal assembly is disposed in the polygonal chamber and the centrifugal tank. The centrifugal assembly can be displaced along the centrifugal tank to control the connection of the two connecting channels. The polygonal chamber connects one of the connecting channels and the air inlet.

[0014] The rotating shaft has a connecting cavity that connects to another connecting channel and an exhaust channel.

[0015] Furthermore, the centrifuge assembly includes a polygonal cylinder sealed and fixed in a polygonal chamber, a fixed cylinder disposed inside the polygonal cylinder, a guide cylinder sealed and connected to the fixed cylinder, a guide rod elastically inserted into the guide cylinder, and a centrifuge block fixed on the guide rod. The polygonal cylinder is not connected to the connecting channel, the fixed cylinder is fixed inside the polygonal chamber, and the fixed cylinder is connected to the polygonal cylinder.

[0016] The guide cylinder is sealed through the polygonal cylinder, and the guide rod is provided with a displacement piston that is sealed and inserted into the guide cylinder. The guide rod passes through the fan blade and extends into the centrifugal tank.

[0017] The centrifuge block is slidably and sealed inside the centrifuge tank. The centrifuge block has a connecting hole that communicates with the connecting channel. When the centrifuge block moves centrifugally, the connecting hole gradually connects with the connecting channel. When the connecting hole and the connecting channel are in left and right positions, the centrifuge block can continue to move.

[0018] Furthermore, the damping component includes an annular mounting shell, an annular groove formed on the mounting shell, a displacement plate that is slidably connected in the annular groove, a damping cavity formed on the housing, and a damping plate, wherein the mounting shell is fixed to the sealing plate.

[0019] The annular groove is connected to an exhaust channel on the side away from the intermediate cavity. A reset spring is provided on the side of the displacement plate facing the intermediate cavity, which abuts against the mounting shell. A drain hole communicating with the damping cavity is provided on the lower side of the mounting shell.

[0020] The damping cavity is provided with a damping plate connected to the inner wall of the rotating shaft. An annular displacement cavity is provided on one side of the rotating shaft and is opened on the housing. The damping plate is located in the annular displacement cavity and the side of the damping plate can abut against the rotating shaft. The damping plate is provided with a transmission rod that is inserted into the mounting shell at one end. There is a gap between the transmission rod and the displacement plate.

[0021] Furthermore, the damping cavity is provided with multiple damping plates, and the side of the mounting shell is connected to multiple damping check valves that communicate with the damping cavity.

[0022] Furthermore, the exhaust assembly includes a nozzle sealed and fixed on a sealing plate, a guide cylinder sealed and fixed in an exhaust channel, a lifting ring sealed and inserted in the guide cylinder, a connecting cylinder sealed and fixed in the inner ring of the lifting ring, a sealing post sealed and inserted in the connecting cylinder, and an exhaust control assembly located on the lifting ring. The exhaust control assembly is connected to the guide cylinder, and the guide cylinder is connected to a pressure stabilizing channel.

[0023] The connecting cylinder is sealed and inserted into the nozzle. The connecting cylinder has an air inlet. The exhaust control component is sealed and abuts against the air inlet. When the connecting cylinder abuts against the upper side of the exhaust channel, the air inlet is in sealed contact with the sealing column.

[0024] Furthermore, the exhaust control assembly includes a displacement barrel fixed on the lifting ring, a sealing disc slidably connected inside the displacement barrel, a connecting column fixed on the sealing disc, and a contact head abutting against the air intake port. The displacement barrel is connected to a pressure stabilizing channel, the connecting column is inserted into the displacement barrel, the contact head is fixed on the connecting column, a magnetic suction plate is provided on the contact head, and an electromagnet is provided on the displacement barrel.

[0025] Furthermore, an infrared detection component is installed inside the nitrogen chamber above the control valve. The drive component includes a lifting rod rotatably installed inside the nitrogen chamber, a pressurizing piston connected to the lifting rod, a sealing tube sleeved on the lifting rod, and a motor fixed to the housing. The sealing tube is divided into upper and lower sections and is respectively sealed and connected to the pressurizing piston and the nitrogen chamber. The lifting rod is connected to a transmission wheel connected by a transmission belt, one of which is connected to the motor.

[0026] Furthermore, the detection component includes a button mounted on the housing, the button being electrically connected to an electromagnet.

[0027] Compared with the prior art, the beneficial effects of the present invention are:

[0028] 1. The present invention achieves nitrogen supply of the on / off control component through the cooperation of two nitrogen chambers and an intermediate chamber, and achieves adaptive pressure adjustment through the on / off control component, so that when the pressure of the intermediate chamber is high, the pressure of nitrogen discharged into the exhaust channel is still at a low pressure, thus avoiding excessive nitrogen consumption.

[0029] 2. This invention uses an exhaust assembly to control the entry of nitrogen into the chamber. By cooperating with the on / off control assembly, when the sealed door is opened, the exhaust channel stores high-pressure nitrogen, which allows the semiconductor chip to be purged after the exhaust assembly is opened, facilitating the removal of dust from the semiconductor chip. Furthermore, when high-pressure nitrogen enters, the air and moisture in the chamber are quickly discharged, thereby achieving rapid removal of moisture and ensuring the preservation of the semiconductor chip.

[0030] In summary, the present invention has the advantages of adaptive pressure adjustment and rapid removal of dust and moisture. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0032] Figure 2 For the present invention Figure 1A schematic diagram of the vertical cross-sectional structure in the middle section;

[0033] Figure 3 For the present invention Figure 1 Front view diagram;

[0034] Figure 4 For the present invention Figure 1 A magnified structural diagram of part A;

[0035] Figure 5 For the present invention Figure 4 A schematic diagram of the mounting shell structure;

[0036] Figure 6 For the present invention Figure 2 A schematic diagram of the enlarged structure of part C;

[0037] Figure 7 For the present invention Figure 1 A schematic diagram of the enlarged structure of part B;

[0038] Figure 8 For the present invention Figure 7 A magnified structural diagram of part D.

[0039] In the diagram, 1. Exhaust channel, 2. Housing, 3. Intermediate cavity, 4. On / off control assembly, 401. Housing, 402. Connecting channel, 403. Connecting hole, 404. Inlet barrel, 405. Centrifuge block, 406. Fan wheel, 407. Centrifuge tank, 408. Connecting cavity, 411. Polygonal cylinder, 412. Displacement piston, 413. Guide rod, 414. Guide cylinder, 415. Polygonal chamber, 416. Fixed cylinder, 421. Mounting shell, 422. Displacement plate, 423. Damping cavity, 424. Return spring, 425. Transmission rod, 426. Damping plate, 427. Damping check valve, 428. Damping disc, 429. Drain hole, 5. 195. Storage chamber; 6. Exhaust port; 7. Pressure stabilizing channel; 8. Infrared detection component; 9. Sealing tube; 10. Pressurizing piston; 11. Return air channel; 12. Inlet air channel; 13. Lifting rod; 14. Control valve; 15. Motor; 16. Transmission wheel; 17. Sealing door; 18. Sealing plate; 19. Nozzle; 191. Lifting ring; 192. Exhaust control component; 1921. Sealing disc; 1922. Displacement barrel; 1923. Electromagnet; 1924. Magnetic suction plate; 1925. Contact head; 193. Guide cylinder; 194. Connecting cylinder; 1941. Inlet port; 195. Sealing column; 20. Inlet; 21. Exhaust port; 22. Nitrogen chamber. Detailed Implementation

[0040] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0041] like Figure 1-8 As shown, a semiconductor chip storage device includes a housing 2 with an air inlet 20 and an exhaust outlet 21. The housing 2 has two storage chambers 5, one on the left and one on the right, which are connected to the exhaust outlet 21. The storage chambers 5 are sealed with multiple vertically arranged sealing plates 18 to divide the storage chambers 5 into multiple upper and lower chambers. Each chamber is provided with a sealing door 17. The chambers have multiple exhaust holes 6 that are connected to the exhaust outlet 21. The sealing plates 18 have an exhaust channel 1 and a pressure stabilizing channel 7 inside. The sealing plates 18 are sealed and fixed with multiple exhaust components. The exhaust components are connected to the pressure stabilizing channel 7 and the exhaust channel 1 respectively. When the pressure of the pressure stabilizing channel 7 is less than the pressure of the exhaust channel 1, the exhaust components can control the nitrogen in the exhaust channel 1 to be discharged.

[0042] Between the two storage chambers 5, there are two nitrogen chambers 22 and an intermediate chamber 3 located on the housing 2. A driving assembly is installed inside each nitrogen chamber 22, enabling the pressure in the two nitrogen chambers to be different (higher and lower). When the driving assembly is operating, the air inlet 20 connects to the nitrogen chamber 22 via a control valve 14 to replenish nitrogen. Each nitrogen chamber 22 has a unidirectional air inlet channel 12 that connects to the intermediate chamber 3, allowing nitrogen from the nitrogen chamber 22 to enter the intermediate chamber 3. The intermediate chamber 3 contains a connection to one of the nitrogen chambers. The number of on / off control components 4 in the sealing plates 18 of each storage chamber 5 is the same. The on / off control components 4 are connected to the intermediate chamber 3 and the nitrogen chamber 22. When the nitrogen in the intermediate chamber 3 enters the low-pressure nitrogen chamber 22 through the on / off control components 4, the on / off control components 4 are connected to the exhaust channel 1 to control the connection between the intermediate chamber 3 and the exhaust channel 1. When the exhaust components are closed, the on / off control components 4 are gradually closed as the pressure of the exhaust channel 1 increases. The sealing door 17 is equipped with a detection component that is electrically connected to the exhaust components of the corresponding chamber.

[0043] During use, the exhaust port 21 is connected to the exhaust gas storage device, the inlet 20 is connected to the nitrogen supply device, and the sealing door 17 is closed. At this time, because the sealing door 17 squeezes the detection component, the exhaust component can exhaust gas. The drive component controls the nitrogen pressure of the nitrogen cabinet to be high and low, and the high pressure nitrogen cabinet is higher than the pressure of the intermediate cavity 3, and the low pressure nitrogen cabinet is lower than the pressure of the intermediate cavity 3, so that the pressure of the nitrogen cabinet enters the intermediate cavity 3. Then, the nitrogen in the intermediate cavity 3 enters the on / off control component 4 corresponding to the sealing plate 18 of the exhaust component. The on / off control component 4 is opened, and part of the nitrogen in the intermediate cavity 3 is discharged into the cavity through the exhaust channel 1 and the exhaust component. During the operation of the drive component, the nitrogen supply device replenishes the pressure of the low pressure nitrogen cavity 22. Then, the drive device controls the pressure of the low pressure nitrogen cavity 22 to increase, thereby switching between low pressure and high pressure.

[0044] When the exhaust assembly is closed, the on / off control assembly 4 continues to exhaust gas into the exhaust channel 1. As the gas pressure in the exhaust channel 1 increases, the on / off control assembly 4 gradually closes, so that high-pressure nitrogen is stored in the exhaust channel 1.

[0045] When the sealing door 17 closes again, the exhaust assembly opens again and discharges the high-pressure nitrogen gas in the exhaust channel 1 to purge the semiconductor chip and quickly replenish the nitrogen gas in the chamber to achieve rapid replenishment of nitrogen gas in the chamber and rapid removal of moisture. The air and moisture in the chamber are discharged through the exhaust port 6 and the exhaust port 21.

[0046] In this embodiment, as Figure 1 , 2 As shown in Figures 4, 5, and 6, the on / off control assembly 4 includes two housings 401, a fan wheel 406 rotatably connected inside the housings 401, a centrifugal assembly, and a damping component fixed inside the storage chamber 5. The two housings 401 are mirror images of each other with the vertical center line of the intermediate chamber 3 as the center. The housings 401 are fixed inside the intermediate chamber 3. The outer circumferential side of the housings 401 has two holes, one of which communicates with the intermediate chamber 3. The intermediate chamber 3 is provided with a return gas channel 11 that communicates with the other hole through a one-way valve and a pipe, so that the nitrogen in the intermediate chamber 3 enters the low-pressure nitrogen chamber 22 through the housings 401.

[0047] Preferably, the hole on the housing 401 is not perpendicular to the fan wheel 406, so that nitrogen can drive the fan wheel 406 to rotate. The purging position of the fan wheel 406 can be referred to in terms of gas-driven rotating devices, such as gas vibrators.

[0048] An air inlet 404 is provided on one side of the two fan wheels 406 facing each other. The air inlet 404 is connected to the fan wheels 406. The adjacent sides of the two air inlets 404 on the same on / off control component 4 do not contact each other. The adjacent sides of the two air inlets 404 on the same on / off control component 4 are provided with circular grooves, and multiple balls are arranged in the two circular grooves.

[0049] The fan wheel 406 is connected to the exhaust channel 1. The centrifugal assembly is disposed inside the fan wheel 406 and when the fan wheel 406 rotates, the centrifugal assembly is displaced so that nitrogen gas enters the exhaust channel 1 through the fan wheel 406.

[0050] The damping element is connected to the exhaust channel 1, and the damping element gradually controls the fan wheel 406 to stop rotating based on the increase in pressure in the exhaust channel 1;

[0051] When in use, the exhaust assembly can discharge gas. At this time, the high-pressure nitrogen in the intermediate cavity 3 enters the housing 401 through one of the holes and is discharged into the low-pressure nitrogen chamber 22 through the other hole. At this time, the nitrogen blows the fan wheel 406 to rotate. As the speed of the fan wheel 406 increases, the centrifugal assembly gradually centrifuges. The nitrogen enters the exhaust channel 1 through the air inlet 404, the fan wheel 406 and the centrifugal assembly, and is discharged through the exhaust channel 1 and the exhaust assembly.

[0052] When the exhaust assembly is closed, the pressure in the exhaust channel 1 gradually increases, controlling the damping component to work. The damping component gradually controls the fan wheel 406 to stop rotating, and then the centrifugal assembly is reset. At this time, nitrogen cannot enter the exhaust channel 1. When the exhaust assembly is reopened, the high-pressure nitrogen in the exhaust channel 1 is discharged from the exhaust assembly to blow away the dust on the semiconductor chip and quickly replenish the chamber with nitrogen to remove the dust and moisture from the chamber.

[0053] In this embodiment, as Figure 4-6 As shown, the fan wheel 406 includes a rotating shaft that is rotatably and sealed to the housing 401 and multiple fan blades arranged in a circular array with the shaft axis as the center. The fan blades are in sealed contact with the housing 401 to form multiple chambers. The fan blades are radially provided with centrifugal grooves 407 along the rotating shaft. The centrifugal grooves 407 are respectively provided with connecting channels 402 on the fan blades on the left and right sides.

[0054] A polygonal chamber 415 is provided at the center of the rotating shaft. The centrifugal assembly is disposed in the polygonal chamber 415 and the centrifugal tank 407. The centrifugal assembly can be displaced along the centrifugal tank 407 to control the connection of the two connecting channels 402. The polygonal chamber 415 connects one of the connecting channels 402 and the air inlet 404.

[0055] The rotating shaft has a connecting cavity 408 that connects to another connecting channel 402 and the exhaust channel 1;

[0056] When in use, the fan blades and shaft rotate and generate centrifugal force. The centrifugal assembly gradually shifts as the centrifugal force increases until the two connecting channels 402 are connected. At this time, nitrogen can enter the exhaust channel 1 through the polygonal chamber 415, the connecting channel 402, the centrifugal assembly and the connecting chamber 408. When the shaft speed decreases and stops, the centrifugal force is small, the centrifugal assembly resets, the two connecting channels 402 are no longer connected, and the exhaust channel 1 is closed.

[0057] In this embodiment, as Figure 4-6 As shown, the centrifuge assembly includes a polygonal cylinder 411 sealed and fixed in a polygonal chamber 415, a fixed cylinder 416 disposed inside the polygonal cylinder 411, a guide cylinder sealed and connected to the fixed cylinder 416, a guide rod 413 elastically inserted into the guide cylinder by a spring, and a centrifuge block 405 fixed on the guide rod 413. The polygonal cylinder 411 is not connected to the connecting channel 402. The fixed cylinder 416 is fixed inside the polygonal chamber 415 and is connected to the polygonal cylinder 411 through multiple through holes.

[0058] The guide cylinder seal passes through the polygonal cylinder 411, and the guide rod 413 is provided with a displacement piston 412 that is sealed and inserted into the guide cylinder. The guide rod 413 passes through the fan blade and extends into the centrifugal tank 407. Preferably, the pressure inside the polygonal cylinder 411 is negative.

[0059] The centrifuge block 405 is slidably disposed in the centrifuge tank 407 by a sealing gasket. The centrifuge block 405 has a connecting hole 403 that communicates with the connecting channel 402. When the centrifuge block 405 moves centrifugally, the connecting hole 403 gradually connects with the connecting channel 402. When the connecting hole 403 and the connecting channel 402 are in the left and right positions respectively, the centrifuge block 405 can continue to move.

[0060] When the fan wheel 406 rotates, with the generation of centrifugal force, the centrifugal block 405 is displaced along the centrifugal groove 407. When the connecting hole 403 is connected to the connecting channel 402, nitrogen can enter the exhaust channel 1 through the connecting hole 403 and the connecting channel 402. As the overlapping area of ​​the connecting hole 403 and the connecting channel 402 increases, the amount of nitrogen entering gradually increases, so that when the pressure in the intermediate cavity 3 is suitable, a large amount of nitrogen can enter the exhaust channel 1. The standard for suitable pressure in the intermediate cavity 3 is the pressure required for nitrogen to enter the cavity normally. Based on different pressure requirements, the damping during sealing sliding, the hardness of the springs used in the guide cylinder and the plug rod, and the pressure in the polygonal cylinder 411 can be adjusted.

[0061] When the pressure in the intermediate cavity 3 exceeds the required pressure, the fan wheel 406 rotates too fast, and the centrifugal block 405 continues to move, causing the connecting hole 403 to be misaligned with the connecting channel 402, thus reducing the amount of nitrogen entering.

[0062] When the fan wheel 406 stops rotating, under the negative pressure of the polygonal cylinder 411 and the action of the spring, the guide rod 413 drives the centrifugal block 405 to reset, so that nitrogen no longer enters the exhaust channel 1.

[0063] In this embodiment, as Figure 4-6 As shown, the damping component includes an annular mounting shell 421, an annular groove formed on the mounting shell 421, a displacement plate 422 that is slidably connected in the annular groove, a damping cavity 423 formed on the housing 2, and a damping plate 428. The mounting shell 421 is sealed and fixed on the sealing plate 18.

[0064] The side of the annular groove away from the intermediate cavity 3 is connected to the exhaust channel 1. The side of the displacement plate 422 facing the intermediate cavity 3 is provided with a return spring 424 that abuts against the mounting shell 421. The lower side of the mounting shell 421 is provided with a drain hole 429 that communicates with the damping cavity 423.

[0065] A damping plate 426 connected to the inner wall of the rotating shaft is provided inside the damping cavity 423. An annular displacement cavity is provided on one side of the rotating shaft and opened on the housing 2. The damping plate 428 is located in the annular displacement cavity and the side of the damping plate 428 can abut against the rotating shaft. The damping plate 428 is provided with a transmission rod 425 with one end inserted into the mounting shell 421. There is a gap between the transmission rod 425 and the displacement plate 422.

[0066] Damping fluid is provided between the displacement plate 422 and the annular groove;

[0067] When the exhaust assembly is closed, the pressure in the exhaust channel 1 increases with the pressure in the intermediate cavity 3. As the pressure in the exhaust channel 1 increases, the displacement plate 422 moves and squeezes the damping fluid through the drain hole 429 into the damping cavity 423. As the damping fluid in the damping cavity 423 gradually increases, the rotation speed of the shaft decreases under the action of the damping plate 426. Then, the displacement plate 422 pushes the damping plate 428 to press on the shaft through the transmission rod 425, so that the shaft stops rotating or the rotation speed is reduced to the point that it cannot drive the centrifugal block 405 to centrifugal displacement.

[0068] When the exhaust assembly is opened, the pressure in the exhaust channel 1 decreases, the displacement plate 422 is reset under the action of the return spring 424, the damping plate 428 no longer squeezes the shaft, and the damping fluid is re-inhaled into the annular groove under the displacement action of the displacement plate 422, at which time the shaft can continue to rotate.

[0069] Preferably, the pressure in the intermediate cavity 3 is greater than the pressure required for the displacement plate 422 to push the damping plate 428 against the rotating shaft;

[0070] Preferably, the housing 2 has a vertical through hole that communicates with the upper side of the damping cavity 423 to discharge or allow air into the damping cavity 423. The transmission rod 425 is installed in the mounting shell 421 by a spring to drive the transmission rod 425 to reset. The damping fluid is a low viscosity liquid so that the damping fluid can enter the annular groove through the drain hole 429 located below.

[0071] In this embodiment, a plurality of damping plates 426 are provided inside the damping cavity 423, and a plurality of damping one-way valves 427 communicating with the damping cavity 423 are connected to the side of the mounting shell 421.

[0072] In use, the rotation and the damping plate 426 of the damping cavity 423 are used to reduce the rotation speed of the shaft to the maximum extent, which facilitates the deceleration of the shaft. The damping one-way valve 427 allows the damping fluid in the annular groove to be quickly discharged into the damping cavity 423, thereby ensuring the rapid deceleration of the shaft.

[0073] In this embodiment, as Figure 1 , 7 As shown in Figure 8, the exhaust assembly includes a nozzle 19 sealed and fixed on the sealing plate 18, a guide cylinder sealed and fixed in the exhaust channel 1, a lifting ring 191 sealed and inserted into the guide cylinder, a connecting cylinder 194 sealed and fixed in the inner ring of the lifting ring 191, a sealing column 195 sealed and inserted into the connecting cylinder 194, and an exhaust control assembly 192 located on the lifting ring 191. The exhaust control assembly 192 is connected to the guide cylinder, and the guide cylinder is connected to the pressure stabilizing channel 7.

[0074] The connecting cylinder 194 is sealed and inserted into the nozzle 19. The connecting cylinder 194 has an air inlet 1941. The exhaust control component 192 is sealed and abuts against the air inlet 1941. When the connecting cylinder 194 abuts against the upper side of the exhaust channel 1, the air inlet 1941 is in sealed contact with the sealing column 195.

[0075] When in use, the air pressure in the exhaust channel 1 is greater than the pressure in the pressure stabilizing channel 7. The lifting ring 191 descends and drives the connecting cylinder 194 to descend until the air inlet 1941 is no longer in contact with the sealing column 195. Nitrogen gas enters the nozzle 19 through the air inlet 1941 and the connecting cylinder 194 and is ejected. When it needs to be closed, the exhaust control component 192 abuts against the air inlet 1941, the air inlet 20 is closed, and the exhaust channel 1 cannot discharge nitrogen gas. At this time, the pressure in the exhaust channel 1 gradually increases.

[0076] In this embodiment, as Figure 7 , 8As shown, the exhaust control assembly 192 includes a displacement barrel 1922 fixed on the lifting ring 191, a sealing disc 1921 slidably connected in the displacement barrel 1922, a connecting post fixed on the sealing disc 1921, and a contact head 1925 abutting against the air inlet 1941. The displacement barrel 1922 is connected to the pressure stabilizing channel 7. The connecting post is inserted into the displacement barrel 1922. The contact head 1925 is fixed on the connecting post. A magnetic suction plate 1924 is provided on the contact head 1925. An electromagnet 1923 is provided on the displacement barrel 1922.

[0077] When nitrogen needs to be discharged, the electromagnet 1923 is energized and magnetically attracts the magnetic plate 1924. The magnetic plate 1924 moves the contact head 1925, and the air inlet 1941 opens, allowing the exhaust channel 1 to discharge. When it needs to be closed, the electromagnet 1923 is de-energized, and the air pressure in the pressure stabilizing channel 7 pushes the sealing plate 1921 to move until the contact head 1925 touches the air inlet 1941, and the air inlet 1941 closes.

[0078] Alternatively, the magnetic poles of electromagnet 1923 can be switched, in which case the magnetic poles of electromagnet 1923 and magnetic plate 1924 on opposite sides are the same, so as to ensure that contact head 1925 contacts air inlet 1941.

[0079] In this embodiment, as Figure 2 As shown, the nitrogen chamber 22 is equipped with an infrared detection component 8 located above the control valve 14. The drive component includes a lifting rod 13 rotatably installed in the nitrogen chamber 22, a pressure piston 10 connected to the lifting rod 13, a sealing tube 9 sleeved on the lifting rod 13, and a motor 15 fixed on the housing 2. The sealing tube 9 is divided into upper and lower parts and is respectively sealed and connected to the pressure piston 10 and the nitrogen chamber 22. The lifting rod 13 is connected to a transmission wheel 16 connected by a transmission belt, and one of the transmission wheels 16 is connected to the motor 15.

[0080] The lifting rod 13 is a screw or a reciprocating lead screw. The pressure piston 10 is connected through different connection methods depending on the type of the lifting rod 13. The connection relationship of the screw and the reciprocating lead screw are all existing technologies, so they will not be described in detail. The lifting directions of the two pressure pistons 10 are opposite. The infrared detection component 8 can detect the pressure piston 10 through an infrared beam sensor.

[0081] In use, the motor 15 drives the lifting rod 13 to rotate, and the lifting rod 13 drives the pressure piston 10 to move. Since the lifting directions of the two lifting rods 13 are opposite, when one pressure piston 10 presses down to increase pressure, the other pressure piston 10 moves up to decrease pressure, thereby ensuring the normal drive of the fan wheel 406. When the pressure piston 10 moves up to above the infrared detection component 8, based on the detection of the infrared detection component 8, the control valve 14 opens to replenish nitrogen to the nitrogen chamber 22, thereby ensuring use.

[0082] In this embodiment, as Figure 3 As shown, the detection component includes a button mounted on the housing 2. The button is electrically connected to the electromagnet 1923. The button is used to detect the opening and closing of the sealing door 17, thereby facilitating the control of the exhaust component based on the opening and closing of the sealing door 17. This makes it convenient to use and reduces the consumption of nitrogen.

[0083] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A storage device for semiconductor chips, comprising a housing having an air inlet and an exhaust outlet, characterized in that: The box contains two storage chambers, left and right, which are connected to the exhaust port. Each storage chamber is sealed with multiple vertically arranged sealing plates to divide it into multiple upper and lower chambers, and each chamber is equipped with a sealing door. The sealing plates have exhaust channels and pressure stabilizing channels inside. Multiple exhaust components are sealed and fixed to the sealing plates. The exhaust components are connected to the pressure stabilizing channels and the exhaust channels respectively. When the pressure in the pressure stabilizing channel is less than the pressure in the exhaust channel, the exhaust components can control the nitrogen in the exhaust channel to be discharged. Between the two storage chambers, there are two nitrogen chambers and an intermediate chamber located on the casing. A driving assembly is installed within each nitrogen chamber, enabling the pressure in the two nitrogen chambers to be different (higher and lower). When the driving assembly is operating, the air inlet connects to the nitrogen chamber to replenish nitrogen. Each nitrogen chamber has a unidirectional air inlet channel that connects to the intermediate chamber, allowing nitrogen from the nitrogen chamber to enter the intermediate chamber. The intermediate chamber contains the same number of on / off control components as the sealing plates in one of the storage chambers. These on / off control components connect the intermediate chamber and the nitrogen chambers. When nitrogen from the intermediate chamber enters the lower-pressure nitrogen chamber via the on / off control components, the on / off control components open to connect the intermediate chamber to the exhaust channel. When the exhaust component closes, the on / off control components gradually close as the pressure in the exhaust channel increases. The sealing door is equipped with a detection component electrically connected to the exhaust component of the corresponding chamber.

2. The semiconductor chip storage device according to claim 1, characterized in that: The on / off control assembly includes two housings, a fan wheel rotatably connected inside the housings, a centrifugal assembly, and a damping component fixed inside the storage chamber. The two housings are mirror images of each other with the vertical center line of the intermediate chamber as the center. The housings are fixed inside the intermediate chamber. The outer circumferential side of the housings has two holes, one of which communicates with the intermediate chamber and the other is unidirectionally connected to the low-pressure nitrogen chamber, so that the nitrogen in the intermediate chamber enters the low-pressure nitrogen chamber through the housing. An air intake barrel is provided on one side of each of the two fan wheels. The air intake barrel is connected to the fan wheel. The adjacent sides of the two air intake barrels on the same on / off control component do not contact each other and are slidably connected by ball bearings. The fan wheel is connected to the exhaust channel, and the centrifugal assembly is disposed inside the fan wheel. When the fan wheel rotates, the centrifugal assembly is displaced so that nitrogen gas enters the exhaust channel through the fan wheel. The damping element is connected to the exhaust channel, and the damping element gradually controls the fan wheel to stop rotating based on the increase in pressure inside the exhaust channel.

3. A storage device for semiconductor chips according to claim 2, characterized in that: The fan wheel includes a rotating shaft that is rotatably and sealed to the housing and multiple fan blades arranged in a circular array with the shaft axis as the center. The fan blades are in sealed contact with the housing to form multiple chambers. The fan blades have centrifugal grooves radially opened along the rotating shaft, and the left and right sides of the centrifugal grooves are respectively provided with connecting channels opened on the fan blades. A polygonal chamber is provided at the center of the rotating shaft. The centrifugal assembly is disposed in the polygonal chamber and the centrifugal tank. The centrifugal assembly can be displaced along the centrifugal tank to control the connection of the two connecting channels. The polygonal chamber connects one of the connecting channels and the air inlet. The rotating shaft has a connecting cavity that connects to another connecting channel and an exhaust channel.

4. A storage device for semiconductor chips according to claim 3, characterized in that: The centrifuge assembly includes a polygonal cylinder sealed and fixed in a polygonal chamber, a fixed cylinder disposed inside the polygonal cylinder, a guide cylinder sealed and connected to the fixed cylinder, a guide rod elastically inserted into the guide cylinder, and a centrifuge block fixed on the guide rod. The polygonal cylinder is not connected to the connecting channel, the fixed cylinder is fixed inside the polygonal chamber, and the fixed cylinder is connected to the polygonal cylinder. The guide cylinder is sealed through the polygonal cylinder, and the guide rod is provided with a displacement piston that is sealed and inserted into the guide cylinder. The guide rod passes through the fan blade and extends into the centrifugal tank. The centrifuge block is slidably and sealed inside the centrifuge tank. The centrifuge block has a connecting hole that communicates with the connecting channel. When the centrifuge block moves centrifugally, the connecting hole gradually connects with the connecting channel. When the connecting hole and the connecting channel are in left and right positions, the centrifuge block can continue to move.

5. A storage device for semiconductor chips according to claim 4, characterized in that: The damping component includes an annular mounting shell, an annular groove formed on the mounting shell, a displacement plate that is slidably connected in the annular groove, a damping cavity formed on the housing, and a damping plate. The mounting shell is fixed to the sealing plate. The annular groove is connected to an exhaust channel on the side away from the intermediate cavity. A reset spring is provided on the side of the displacement plate facing the intermediate cavity, which abuts against the mounting shell. A drain hole communicating with the damping cavity is provided on the lower side of the mounting shell. The damping cavity is provided with a damping plate connected to the inner wall of the rotating shaft. An annular displacement cavity is provided on one side of the rotating shaft and is opened on the housing. The damping plate is located in the annular displacement cavity and the side of the damping plate can abut against the rotating shaft. The damping plate is provided with a transmission rod that is inserted into the mounting shell at one end. There is a gap between the transmission rod and the displacement plate.

6. A storage device for semiconductor chips according to claim 5, characterized in that: The damping cavity is provided with multiple damping plates, and the side of the mounting shell is connected to multiple damping check valves that communicate with the damping cavity.

7. A storage device for semiconductor chips according to claim 6, characterized in that: The exhaust assembly includes a nozzle sealed and fixed on a sealing plate, a guide cylinder sealed and fixed in an exhaust channel, a lifting ring sealed and inserted in the guide cylinder, a connecting cylinder sealed and fixed in the inner ring of the lifting ring, a sealing column sealed and inserted in the connecting cylinder, and an exhaust control assembly located on the lifting ring. The exhaust control assembly is connected to the guide cylinder, and the guide cylinder is connected to a pressure stabilizing channel. The connecting cylinder is sealed and inserted into the nozzle. The connecting cylinder has an air inlet. The exhaust control component is sealed and abuts against the air inlet. When the connecting cylinder abuts against the upper side of the exhaust channel, the air inlet is in sealed contact with the sealing column.

8. A storage device for semiconductor chips according to claim 7, characterized in that: The exhaust control assembly includes a displacement barrel fixed on a lifting ring, a sealing disc slidably connected inside the displacement barrel, a connecting column fixed on the sealing disc, and a contact head abutting against the air inlet. The displacement barrel is connected to a pressure stabilizing channel, the connecting column is inserted into the displacement barrel, the contact head is fixed on the connecting column, a magnetic suction plate is provided on the contact head, and an electromagnet is provided on the displacement barrel.

9. A storage device for semiconductor chips according to claim 8, characterized in that: The nitrogen chamber is equipped with an infrared detection component located above the control valve. The drive component includes a lifting rod rotatably installed inside the nitrogen chamber, a pressure piston connected to the lifting rod, a sealing tube sleeved on the lifting rod, and a motor fixed to the housing. The sealing tube is divided into two parts, upper and lower, which are respectively sealed and connected to the pressure piston and the nitrogen chamber. The lifting rod is connected to a drive wheel connected by a drive belt, one of which is connected to the motor.

10. A storage device for semiconductor chips according to claim 9, characterized in that: The detection component includes a button mounted on the housing, which is electrically connected to an electromagnet.

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