A zone melting furnace continuous crystal pulling device

Abstract

The present invention belongs to the technical field of crystal pulling in a zone melting furnace, and specifically is a continuous crystal pulling device for a zone melting furnace, comprising a lifting heater, a seed crystal is arranged at the lower end of a polycrystalline material, the seed crystal is mounted on the upper end of a base, a furnace top is movably mounted at the uppermost end of a zone melting furnace body, two auxiliary crystal pulling devices are installed inside the zone melting furnace body, a working chamber is opened inside the zone melting furnace body, and high-temperature gas passing through the top of the working chamber will enter the inner auxiliary chamber along the gap between the inner auxiliary chamber and the working chamber, at this time, the high-temperature gas is at the inner top of the inner auxiliary chamber, and the lifting component descends to press the high-temperature gas at the top of the inner auxiliary chamber down to a horizontal height position almost the same as the lifting heater, at this time, these high-temperature gases enter the working chamber through the air holes opened inside the integrated board, and the high-temperature gas passes through the lifting heater, and with the assistance of the high-temperature gas, the lifting heater can melt the polycrystalline material faster.

Description

Technical Field

[0001] The invention belongs to the field of zone melting furnace crystal pulling, in particular to a zone melting furnace continuous crystal pulling device. Background Art

[0002] Zone furnace crystal pulling technology is a mature technology used to produce high-purity single crystal materials, especially silicon, germanium and other materials in the semiconductor industry. When using a zone furnace for continuous crystal pulling, argon gas is introduced into the zone furnace based on the process of regional melting and recrystallization. The mobile heater is moved along the length of the polycrystalline material, so that the material is melted and crystallized in turn, and cooperates with the seed crystal below it to grow a single crystal.

[0003] A patent document with publication number CN212771039U discloses a zone melting furnace for semiconductor crystal rod pulling, including a fixing component for vertically suspending a quartz tube sealed with a semiconductor crystal rod; an annular heating component, which is provided with a through hole for the quartz tube to pass through, and the heating thickness of the heating component (14) in the vertical direction is, and a transmission component, which is used to drive the heating component to rise from the bottom of the quartz tube to the top at a uniform speed when the heating component is working.

[0004] In the above technical scheme, the heater is used to heat different positions on the outside of the polycrystalline material to cause the polycrystalline material to melt, and the seed crystal arranged below is rotationally pulled to prepare high-purity single crystal material below the melting zone. When the above technical scheme is implemented, the high temperature generated by the heater will gather at the top of the zone furnace, which makes it inconvenient to further enhance the heating effect of the heater through this part of the high temperature to improve the continuous crystal pulling efficiency of the zone furnace.

[0005] To this end, the present invention provides a zone melting furnace continuous crystal pulling device. Summary of the invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve the technical problem is as follows: a zone melting furnace continuous crystal pulling device described in the present invention comprises a lifting heater, a polycrystalline material is movably arranged inside the lifting heater, a seed crystal is arranged at the lower end of the polycrystalline material, and the seed crystal is installed at the upper end of the base, the polycrystalline material, the lifting heater, the seed crystal and the base are all installed inside the zone melting furnace body, a furnace top is movably installed at the uppermost end of the zone melting furnace body, two auxiliary crystal pulling devices are installed inside the zone melting furnace body, and a working chamber is opened inside the zone melting furnace body;

[0008] The auxiliary crystal pulling device includes a fixed motor fixedly installed on the outside of the zone melting furnace body and an integrated board fixedly installed inside the working chamber. The space between the integrated board and the working chamber is an inner auxiliary chamber. The inner auxiliary chamber is connected to the working chamber. A lifting component is installed inside the inner auxiliary chamber for lifting. A plurality of air holes are opened through the inside of the integrated board.

[0009] Preferably, a screw rod is fixedly installed at the lower end of the fixed motor, the screw rod is located inside the inner auxiliary cavity, the screw rod is threadedly connected to the lifting assembly, and one end of the screw rod is movably connected to the bottom of the working cavity.

[0010] Preferably, the integrated plate comprises two first arc-shaped plates fixedly connected to the inner wall of the working chamber, two second arc-shaped plates are fixedly connected between the two first arc-shaped plates, and a plurality of air holes are opened through the inside of the second arc-shaped plates.

[0011] Preferably, the plurality of ventilation holes are evenly distributed in an arrangement on the second arc-shaped plate, and the height of the second arc-shaped plate is lower than that of the first arc-shaped plate.

[0012] Preferably, an inclined groove is provided at the inner top of the inner auxiliary cavity, and the inclined groove is communicated with the working cavity.

[0013] Preferably, a movable extrusion ring is telescopically installed on the top of the lifting component, a plurality of L-shaped grooves are opened through the inside of the lifting component, and the movable extrusion ring is located inside the inclined groove.

[0014] Preferably, a spiral groove is provided through the interior of the lifting component, and a top arc block is fixedly mounted on the upper side of the lifting component.

[0015] Preferably, a plurality of spring guide columns are installed on the side of the movable extrusion ring facing the top arc block, a through groove is penetrated through the interior of the movable extrusion ring, the through groove and the spiral groove are on the same vertical line, and a round-head arc block is fixedly installed on the outer side of the movable extrusion ring facing the lifting assembly.

[0016] Preferably, a plurality of wind blocking components are fixedly installed inside the L-shaped groove, and the L-shaped groove is used to connect the working cavity and the inner auxiliary cavity.

[0017] Preferably, the wind-blocking component includes a plurality of first inclined plates and a plurality of second inclined plates fixedly mounted on the inner walls on both sides of the L-shaped groove, and the plurality of first inclined plates and second inclined plates are sequentially distributed inside the wind-blocking component, and the length of the second inclined plates is smaller than that of the first inclined plates.

[0018] The beneficial effects of the present invention are as follows:

[0019] 1. The present invention discloses a zone melting furnace continuous crystal pulling device, which allows the lifting heater to slowly move from the lower end of the polycrystalline material to the upper end of the polycrystalline material through a lifting structure. When the lifting heater is outside the polycrystalline material, the lifting heater will melt the polycrystalline material part inside it. At this time, the seed crystal contacts the melting area of ​​the polycrystalline material and melts. By raising the heating position of the lifting heater, the melting area of ​​the polycrystalline material is continuously moved upward. At the same time, with the cooperation of the base, the seed crystal slowly rotates and stretches downward to gradually form a single crystal material. By moving the lifting heater along the length direction of the material, the material is melted and crystallized in turn, thereby growing a single crystal. The crystals manufactured by this method are relatively pure and have a smaller diameter to meet the requirements for crystals of different diameters.

[0020] 2. In the zone melting furnace continuous crystal pulling device described in the present invention, the high-temperature gas at the top of the working chamber will enter the inner auxiliary chamber along the gap between the inner auxiliary chamber and the working chamber. At this time, the high-temperature gas is at the inner top of the inner auxiliary chamber. Driven by a fixed motor and with the cooperation of a driving source, the lifting assembly at the top of the inner auxiliary chamber cooperates with the lifting structure to descend, and the high-temperature gas at the top of the inner auxiliary chamber is pressed down to a horizontal height position similar to that of the lifting heater. At this time, the high-temperature gases enter the working chamber through the air holes opened in the integrated board, and the high-temperature gases pass through the lifting heater. With the assistance of the high-temperature gases, the lifting heater can melt the polycrystalline material faster.

[0021] 3. The zone melting furnace continuous crystal pulling device described in the present invention is fixedly installed inside the working chamber through an integrated plate. Because the horizontal height of the second curved plate is lower than that of the first curved plate, the gas inside the working chamber enters the inner auxiliary chamber through the top of the second curved plate. The air holes are arranged in rows inside the second curved plate, which can ensure that when the high-temperature gas goes out from the air holes in a row, it can act on the lifting heater more evenly. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention will be further described below in conjunction with the accompanying drawings.

[0023] Figure 1 It is an overall stereogram of the present invention;

[0024] Figure 2 is a schematic side plan view of the middle zone melting furnace of the present invention;

[0025] Figure 3 It is a side plan view schematic diagram of the lifting assembly and the auxiliary crystal pulling device in the present invention;

[0026] Figure 4 It is a three-dimensional schematic diagram of fixing the motor and the screw rod in the present invention;

[0027] Figure 5 It is a three-dimensional schematic diagram of the integrated components in the present invention;

[0028] Figure 6 It is a three-dimensional schematic diagram of the lifting assembly in the present invention;

[0029] Figure 7 It is a side plan view schematic diagram of the wind blocking component in the present invention.

[0030] In the figure: 1. zone melting furnace body; 11. working chamber; 2. auxiliary crystal pulling device; 21. fixed motor; 211. screw rod; 22. inner auxiliary chamber; 221. inclined groove; 23. integrated board; 231. first arc plate; 232. second arc plate; 24. air vent; 3. furnace top; 4. polycrystalline material; 5. seed crystal; 6. base; 7. lifting heater; 8. lifting assembly; 81. L-shaped groove; 82. movable extrusion ring; 821. spring guide column; 822. through groove; 823. round head arc block; 83. wind blocking member; 831. first inclined plate; 832. second inclined plate; 84. spiral groove; 85. top arc block. DETAILED DESCRIPTION

[0031] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods. Embodiment 1

[0032] like Figure 1-3 As shown, a zone melting furnace continuous crystal pulling device according to an embodiment of the present invention comprises a lifting heater 7, a polycrystalline material 4 is movably arranged inside the lifting heater 7, a seed crystal 5 is arranged at the lower end of the polycrystalline material 4, and the seed crystal 5 is installed at the upper end of a base 6, the polycrystalline material 4, the lifting heater 7, the seed crystal 5 and the base 6 are all installed inside a zone melting furnace body 1, a furnace top 3 is movably installed at the uppermost end of the zone melting furnace body 1, two auxiliary crystal pulling devices 2 are installed inside the zone melting furnace body 1, and a working chamber 11 is opened inside the zone melting furnace body 1;

[0033] The auxiliary crystal pulling device 2 includes a fixed motor 21 fixedly installed on the outside of the zone melting furnace body 1 and an integrated board 23 fixedly installed inside the working chamber 11. The distance between the integrated board 23 and the working chamber 11 is an inner auxiliary chamber 22. The inner auxiliary chamber 22 is connected to the working chamber 11. A lifting assembly 8 is installed inside the inner auxiliary chamber 22 for lifting. A plurality of air holes 24 are opened through the inside of the integrated board 23.

[0034] Specifically, firstly, the polycrystalline material 4 is placed inside the working chamber 11, at which time the polycrystalline material 4 is at the inner center position of the lifting heater 7, and the furnace roof 3 is covered to make the working chamber 11 in a closed space, and the air inside the working chamber 11 is extracted to make it in a vacuum state first, and then argon gas is introduced into the working chamber 11 to prevent the polycrystalline material 4 from reacting with oxygen or other reactive gases that may exist in the working chamber 11 at high temperature. When continuous crystal pulling is required, the lifting heater 7 is slowly moved from the lower end of the polycrystalline material 4 to the upper end of the polycrystalline material 4 through the lifting structure. When the lifting heater 7 is outside the polycrystalline material 4, the lifting heater 7 will melt the polycrystalline material 4 inside it. At this time, the seed crystal 5 contacts the molten area of ​​the polycrystalline material 4 and melts. By raising the heating position of the lifting heater 7, the molten area of ​​the polycrystalline material 4 is continuously moved upward. At the same time, with the cooperation of the base 6, the seed crystal 5 slowly rotates and stretches downward to gradually form a single crystal material. In this process, the lifting heater 7 should The material 4 is heated and melted at different positions, and the lifting heater 7 heats the inside of the working chamber 11. The heated gas continuously rises to the top of the working chamber 11, which will generate pressure on the furnace top 3. At this time, the high-temperature gas at the top of the working chamber 11 will enter the inner auxiliary chamber 22 along the gap between the inner auxiliary chamber 22 and the working chamber 11. At this time, the high-temperature gas is at the inner top of the inner auxiliary chamber 22. Driven by the fixed motor 21 and with the cooperation of the driving source, the lifting assembly 8 at the top of the inner auxiliary chamber 22 cooperates with the lifting structure to descend, and the high-temperature gas at the top of the inner auxiliary chamber 22 is pressed down to a horizontal height position similar to that of the lifting heater 7. At this time, these high-temperature gases enter the working chamber 11 through the air vents 24 opened in the integrated board 23, and the high-temperature gas passes through the lifting heater 7. With the assistance of the high-temperature gas, the lifting heater 7 can melt the polycrystalline material 4 faster. In this way, the gas pressure at the top of the working chamber 11 is reduced, and the melting efficiency of the lifting heater 7 can be further increased.

[0035] like Figure 3-4 As shown, a screw rod 211 is fixedly installed at the lower end of the fixed motor 21. The screw rod 211 is located inside the inner auxiliary cavity 22, and the screw rod 211 is threadedly connected to the lifting assembly 8. One end of the screw rod 211 is movably connected to the bottom of the working cavity 11.

[0036] Specifically, the fixed motor 21 can drive the screw rod 211 to rotate, and the lifting assembly 8 is slidably installed inside the inner auxiliary cavity 22. Therefore, through the spiral connection between the screw rod 211 and the lifting assembly 8, when the fixed motor 21 is driven to rotate the screw rod 211, the lifting assembly 8 can be driven to rise and fall, so that the lifting assembly 8 can drive the high-temperature gas to move.

[0037] like Figure 5 As shown, the integrated board 23 includes two first curved plates 231 fixedly connected to the inner wall of the working chamber 11, and two second curved plates 232 are fixedly connected between the two first curved plates 231. A plurality of air holes 24 are opened through the inside of the second curved plates 232, and the plurality of air holes 24 are evenly distributed in an arranged manner on the second curved plates 232. The height of the second curved plates 232 is lower than that of the first curved plates 231.

[0038] Specifically, the integrated board 23 is fixedly installed inside the working chamber 11. Since the horizontal height of the second curved plate 232 is lower than the horizontal height of the first curved plate 231, the gas inside the working chamber 11 enters the inner auxiliary chamber 22 through the top of the second curved plate 232. The air holes 24 are arranged in rows inside the second curved plate 232, which can ensure that when the high-temperature gas goes out from the air holes 24 in a row, it can act on the lifting heater 7 more evenly.

[0039] like Figure 2 and Figure 6 As shown, an inclined groove 221 is provided at the inner top of the inner auxiliary cavity 22, and the inclined groove 221 is communicated with the working cavity 11. A movable extrusion ring 82 is telescopically installed at the top of the lifting assembly 8. A plurality of L-shaped grooves 81 are provided throughout the interior of the lifting assembly 8, and the movable extrusion ring 82 is located inside the inclined groove 221.

[0040] Specifically, the inclined groove 221 at the inner top of the inner auxiliary chamber 22 can effectively increase the area of ​​the inner top of the inner auxiliary chamber 22. The larger area can accommodate more gas that rises due to high temperature. The lifting component 8 is slidably installed on the inner top of the inner auxiliary chamber 22. The high-temperature gas enters the inner auxiliary chamber 22 through the L-shaped groove 81 opened by the lifting component 8. When the gas enters the inner top of the inner auxiliary chamber 22 and the inclined groove 221, the lifting component 8 is driven to descend through the rotation of the screw rod 211. At this time, the movable extrusion ring 82 in the inclined groove 221 drives the high-temperature gas in the inclined groove 221 to descend, and during the descent process, the movable extrusion ring 82 slowly shrinks into the inner top of the lifting component 8, which does not affect the subsequent descent of the lifting component 8 in the inner auxiliary chamber 22. By setting the inclined groove 221 and the movable extrusion ring 82, more high-temperature gas can be driven downward by the lifting component 8, and then released to the position of the lifting heater 7.

[0041] like Figure 6As shown, a spiral groove 84 is formed inside the lifting component 8, a top arc block 85 is fixedly installed on the upper side of the lifting component 8, a plurality of spring guide columns 821 are installed on the side of the movable extrusion ring 82 facing the top arc block 85, a through groove 822 is formed inside the movable extrusion ring 82, the through groove 822 and the spiral groove 84 are on the same vertical line, and a round-head arc block 823 is fixedly installed on the movable extrusion ring 82 facing the outer side of the lifting component 8.

[0042] Specifically, the screw rod 211 is threadedly connected to the spiral groove 84, and the setting of the through groove 822 ensures that when the movable extrusion ring 82 moves, the connection between the spiral groove 84 and the screw rod 211 will not be affected. The setting of the spring guide column 821 allows the movable extrusion ring 82 to shrink to the upper end of the lifting assembly 8 to form a whole. When the lifting assembly 8 drives the movable extrusion ring 82 to descend, the movable extrusion ring 82 originally on the outside of the lifting assembly 8 shrinks to the top of the movable extrusion ring 82 through the spring guide column 821, so that the movable extrusion ring 82 can also be lifted and lowered inside the inner auxiliary cavity 22. The function of the round head arc block 823 is to alleviate the friction between the movable extrusion ring 82 and the inclined groove 221 during the process of the movable extrusion ring 82 descending and shrinking to the top of the lifting assembly 8, thereby reducing the damage to the movable extrusion ring 82. Embodiment 2

[0043] like Figure 6-7 As shown, compared with Example 1, another embodiment of the present invention is: a plurality of wind-blocking components 83 are fixedly installed inside the L-shaped groove 81, and the L-shaped groove 81 is used to connect the working chamber 11 and the inner auxiliary chamber 22. The wind-blocking component 83 includes a plurality of first inclined plates 831 and a plurality of second inclined plates 832 fixedly installed on the inner walls on both sides of the L-shaped groove 81, and the plurality of first inclined plates 831 and second inclined plates 832 are distributed in sequence inside the wind-blocking component 83, and the length of the second inclined plate 832 is smaller than the length of the first inclined plate 831.

[0044] Specifically, the high-temperature gas enters the inner top of the inner auxiliary chamber 22 from the inner top of the working chamber 11 through the L-shaped groove 81, so the gas will encounter the obstruction of the wind blocking member 83. When the gas enters the inside of the L-shaped groove 81 from the working chamber 11, the high-temperature gas will contact the first inclined plate 831 and the second inclined plate 832 inclined inwardly. Because the first inclined plate 831 is inclined inwardly, the high-temperature gas basically passes through the middle part of the wind blocking member 83. At this time, the setting of the wind blocking member 83 generally does not affect the high-temperature gas. In the process of entering the inner auxiliary chamber 22 from the working chamber 11 through the L-shaped groove 81, when the high-temperature gas enters the inner auxiliary chamber 22, the gas at the top of the inner auxiliary chamber 22 will accumulate more and more. However, the high-temperature gas wants to enter the working chamber 11 from the inner auxiliary chamber 22 through the L-shaped groove 81. At this time, the gas will contact the outwardly inclined first inclined plate 831 and the second inclined plate 832. When the gas enters along the two first inclined plates 831, part of the gas will flow along the gap between the second inclined plate 832 and the inner wall of the L-shaped groove 81. The air in the inner auxiliary chamber 22 is moved, and then a backflow is generated. This backflow collides with the gas entering the L-shaped groove 81, resulting in a slow flow rate and weak impact force. That is, the setting of the wind blocking component 83 makes it easier for the gas to enter the inner auxiliary chamber 22 from the working chamber 11, but it is not easy to return to the working chamber 11 from the inner auxiliary chamber 22. The air pressure at the top of the working chamber 11 is generally strong. When the air pressure at the top of the working chamber 11 is too high, the gas will continuously enter the inner auxiliary chamber 22. The lifting component 8 drives the high-temperature gas to descend together by descending. The bottom of the lifting component 8 is inclined. Due to the characteristic that the high-temperature gas will rise, when the lifting component 8 drives and moves to the side of a row of air holes 24, the gas rises at the bottom of the lifting component 8 and enters the air holes 24 along the inclined surface of the lifting component 8. After passing through the air holes 24, the gas is in a position below the lifting heater 7. In the process of the high-temperature gas rising, the heating temperature of the lifting heater 7 is increased to improve the continuous crystal pulling efficiency inside the zone melting furnace body 1.

[0045] Working principle: firstly, the polycrystalline material 4 is placed inside the working chamber 11. At this time, the polycrystalline material 4 is at the inner center position of the lifting heater 7. The furnace roof 3 is covered to make the working chamber 11 in a closed space. The air inside the working chamber 11 is extracted to make it in a vacuum state first, and then argon gas is introduced into the working chamber 11 to prevent the polycrystalline material 4 from reacting with oxygen or other reactive gases that may exist in the working chamber 11 at high temperature. When continuous crystal pulling is required, the lifting heater 7 is slowly moved from the lower end of the polycrystalline material 4 to the upper end of the polycrystalline material 4 through the lifting structure. When the lifting heater 7 is outside the polycrystalline material 4, the lifting heater 7 will melt the polycrystalline material 4 inside it. At this time, the seed crystal 5 contacts the melting area of ​​the polycrystalline material 4 and melts. By raising the heating position of the lifting heater 7, the melting area of ​​the polycrystalline material 4 is continuously moved upward. At the same time, with the cooperation of the base 6, the seed crystal 5 slowly rotates and stretches downward to gradually form a single crystal material. In this process, the lifting heater 7 must The high-temperature gas at the top of the working chamber 11 can be melted along the gap between the inner auxiliary chamber 22 and the working chamber 11. At this time, the high-temperature gas is at the inner top of the inner auxiliary chamber 22. Driven by the fixed motor 21 and with the cooperation of the driving source, the lifting assembly 8 at the top of the inner auxiliary chamber 22 cooperates with the lifting structure to descend, and the high-temperature gas at the top of the inner auxiliary chamber 22 is pressed down to a horizontal height position similar to that of the lifting heater 7. At this time, these high-temperature gases enter the working chamber 11 through the air holes 24 opened in the integrated board 23, and the high-temperature gases pass through the lifting heater 7. With the assistance of the high-temperature gas, the lifting heater 7 can melt the polycrystalline material 4 faster. In this way, the gas pressure at the top of the working chamber 11 is reduced, and the melting efficiency of the lifting heater 7 can be further increased.

[0046] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A zone melting furnace continuous crystal pulling device, comprising a lifting heater (7), wherein a polycrystalline material (4) is movably arranged inside the lifting heater (7), a seed crystal (5) is arranged at the lower end of the polycrystalline material (4), and the seed crystal (5) is mounted on the upper end of a base (6), characterized in that: The polycrystalline material (4), the lifting heater (7), the seed crystal (5) and the base (6) are all installed inside the zone melting furnace body (1); a furnace top (3) is movably installed at the top of the zone melting furnace body (1); two auxiliary crystal pulling devices (2) are installed inside the zone melting furnace body (1); and a working chamber (11) is opened inside the zone melting furnace body (1); The auxiliary crystal pulling device (2) comprises a fixed motor (21) fixedly mounted on the outside of the zone melting furnace body (1) and an integrated board (23) fixedly mounted inside the working chamber (11); the space between the integrated board (23) and the working chamber (11) is an inner auxiliary chamber (22); the inner auxiliary chamber (22) is connected to the working chamber (11); a lifting assembly (8) is installed inside the inner auxiliary chamber (22); and a plurality of air holes (24) are provided through the inside of the integrated board (23).

2. A zone melting furnace continuous crystal pulling device according to claim 1, characterized in that: A screw rod (211) is fixedly mounted at the lower end of the fixed motor (21); the screw rod (211) is located inside the inner auxiliary cavity (22), and the screw rod (211) is threadedly connected to the lifting assembly (8); one end of the screw rod (211) is movably connected to the bottom of the working cavity (11).

3. A zone melting furnace continuous crystal pulling device according to claim 1, characterized in that: The integrated plate (23) comprises two first curved plates (231) fixedly connected to the inner wall of the working chamber (11), two second curved plates (232) fixedly connected between the two first curved plates (231), and a plurality of air holes (24) are provided through the interior of the second curved plates (232).

4. A zone melting furnace continuous crystal pulling device according to claim 3, characterized in that: The plurality of vent holes (24) are evenly distributed in an array on the second curved plate (232), and the height of the second curved plate (232) is lower than the height of the first curved plate (231).

5. The zone melting furnace continuous crystal pulling device according to claim 1, characterized in that: An inclined groove (221) is provided at the inner top of the inner auxiliary cavity (22), and the inclined groove (221) is connected to the working cavity (11).

6. A zone melting furnace continuous crystal pulling device according to claim 5, characterized in that: A movable extrusion ring (82) is telescopically mounted on the top of the lifting component (8), a plurality of L-shaped grooves (81) are provided through the interior of the lifting component (8), and the movable extrusion ring (82) is located inside the inclined groove (221).

7. A zone melting furnace continuous crystal pulling device according to claim 6, characterized in that: A spiral groove (84) is provided through the interior of the lifting component (8), and a top arc block (85) is fixedly mounted on the upper side of the lifting component (8).

8. A zone melting furnace continuous crystal pulling device according to claim 7, characterized in that: A plurality of spring guide columns (821) are installed on the side of the movable extrusion ring (82) facing the top arc block (85); a through groove (822) is provided through the interior of the movable extrusion ring (82); the through groove (822) and the spiral groove (84) are located on the same vertical line; and a round-head arc block (823) is fixedly installed on the movable extrusion ring (82) facing the outside of the lifting assembly (8).

9. The zone melting furnace continuous crystal pulling device according to claim 6, characterized in that: A plurality of wind blocking components (83) are fixedly installed inside the L-shaped groove (81), and the L-shaped groove (81) is used to connect the working chamber (11) and the inner auxiliary chamber (22).

10. A zone melting furnace continuous crystal pulling device according to claim 9, characterized in that: The wind blocking component (83) comprises a plurality of first inclined plates (831) and a plurality of second inclined plates (832) fixedly mounted on inner walls on both sides of the L-shaped groove (81); the plurality of first inclined plates (831) and second inclined plates (832) are sequentially distributed inside the wind blocking component (83); and the length of the second inclined plates (832) is shorter than the length of the first inclined plates (831).

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