A method for the preparation of an interlayer for target welding

Abstract

The application provides a preparation method of an intermediate layer for target welding, which comprises the following steps: (I) laying a first adhesive layer on a workbench; (II) providing an intermediate workpiece, laying a second adhesive layer on the surface of the intermediate workpiece, and pasting the intermediate workpiece on the first adhesive layer from the side where the second adhesive layer is arranged, so that the intermediate workpiece is fixed on the workbench; (III) providing a strong magnetic assembly, and using the strong magnetic assembly to strengthen the fixation of the intermediate workpiece; (IV) then processing the intermediate workpiece once to obtain an intermediate blank; (V) after the intermediate blank is removed, the intermediate blank is turned over, steps (II) and (III) are repeated, and the intermediate blank is processed twice to obtain the intermediate layer. The application avoids the problems of deformation and deviation of the intermediate workpiece during processing, so that the unqualified rate of the workpiece is improved.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor target manufacturing technology, and relates to a method for preparing an intermediate layer for target welding. Background Technology

[0002] In the production of semiconductor targets, dissimilar metal welding technology plays a crucial role. Hot isostatic pressure diffusion welding is one of the more efficient and widely used dissimilar metal welding methods. To ensure the effectiveness of the weld, a compatible intermediate medium is added between the metal of a special material (target substrate) and the metal (backplate). This allows the molecules of the three metals to diffuse into each other under specific conditions, thereby achieving the purpose of welding the two different metals together. Due to the special nature of diffusion welding, the commonly used intermediate medium is characterized by its thinness, large diameter, and softness, which increases the machining difficulty of the intermediate medium.

[0003] After welding, the weld bonding rate between the backplate and the target substrate needs to be tested. The size and quality of the intermediate medium are crucial to the weld bonding rate; dimensional deviations in the intermediate medium can easily lead to welding failure and target failure. Due to the special nature of its material and process requirements, the intermediate medium is typically fixed in place using clamping tools before machining. However, existing clamping methods can easily damage the surface of the intermediate medium, causing deformation. Furthermore, as machining progresses, the intermediate medium may shift, resulting in dimensional deviations that fail to meet product requirements.

[0004] Therefore, improving the fixing method during intermediate medium processing is very important for improving the quality of manufactured products. Summary of the Invention

[0005] To address the shortcomings of existing technologies, the present invention aims to provide a method for preparing an intermediate layer for target welding, which solves the problem that workpieces are prone to deformation or displacement during processing, resulting in unqualified workpieces.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] This invention provides a method for preparing an intermediate layer for target welding, the method comprising:

[0008] (I) Lay the first adhesive layer on the workbench;

[0009] (II) Provide an intermediate workpiece, and provide a second adhesive layer on the surface of the intermediate workpiece. Place the intermediate workpiece on the first adhesive layer from the side where the second adhesive layer is provided, so that the intermediate workpiece is glued and fixed on the worktable.

[0010] (III) providing a strong magnetic assembly, and using the strong magnetic assembly to fix the intermediate workpiece;

[0011] (IV) processing the intermediate workpiece to obtain an intermediate blank;

[0012] (V) removing the intermediate blank, and repeating steps (II) and (III) to process the intermediate blank to obtain an intermediate layer.

[0013] It should be noted that after the processing of the present application, only the processing of one side surface of the intermediate workpiece is completed, and when processing the other side surface, the strong magnetic assembly needs to be removed first, then the intermediate blank is removed, and the original second adhesive layer is removed, then the intermediate blank is turned over, and steps (II) and (III) are repeated to re-set the second adhesive layer on the other side surface, and then the other side surface is processed by using the strong magnetic assembly for fixing.

[0014] As a preferred technical scheme of the present application, the area of the first adhesive layer is larger than the area of the second adhesive layer.

[0015] The first adhesive layer is formed by a plurality of first strip-shaped adhesive tapes arranged at intervals.

[0016] In the present application, the first adhesive layer should completely cover the second adhesive layer to avoid the displacement of the intermediate workpiece.

[0017] As a preferred technical scheme of the present application, the second adhesive layer is formed by a plurality of second strip-shaped adhesive tapes arranged at intervals, and the two ends of the second strip-shaped adhesive tapes respectively extend out of the intermediate workpiece.

[0018] Preferably, the second strip-shaped adhesive tape comprises a first bonding portion, a connecting portion and a second bonding portion arranged side by side in sequence, the first bonding portion and the second bonding portion are independently single-sided adhesive, and the connecting portion is double-sided adhesive, and the connecting portion is used to connect the first adhesive layer.

[0019] In the present application, the first bonding portion and the second bonding portion are adhered and fixed on the intermediate workpiece, one side of the connecting portion is adhered to the intermediate workpiece, and the other side is adhered to the first adhesive layer on the workbench surface, thereby achieving the preliminary fixation of the intermediate workpiece.

[0020] Preferably, the width of the second strip-shaped adhesive tape is smaller than the width of the first strip-shaped adhesive tape.

[0021] Preferably, after the intermediate workpiece is attached to the first adhesive layer, the first strip-shaped adhesive tape of the first adhesive layer and the second strip-shaped adhesive tape of the second adhesive layer are arranged at an angle.

[0022] Preferably, the first strip-shaped adhesive tape of the first adhesive layer and the second strip-shaped adhesive tape of the second adhesive layer are arranged vertically.

[0023] As a preferred technical solution of the present application, the strong magnetic assembly comprises at least one magnet and a third adhesive layer covering the magnet.

[0024] Preferably, a lifting ring is further arranged on the magnet.

[0025] Preferably, the reinforcing fixation comprises: placing the strong magnetic assembly on the surface of the intermediate workpiece, so that the intermediate workpiece is adsorbed on the workbench surface.

[0026] As a preferred technical solution of the present application, the preparation method further comprises: performing a first cleaning treatment on the workbench surface before arranging the first adhesive layer.

[0027] Preferably, the first cleaning treatment comprises: wiping the workbench surface with a cleaning agent to remove oil stains on the workbench surface.

[0028] Preferably, the cleaning agent comprises isopropyl alcohol and / or ethanol.

[0029] As a preferred technical solution of the present application, the preparation method further comprises: performing a second cleaning treatment on the intermediate workpiece or intermediate billet before arranging the second adhesive layer.

[0030] Preferably, the second cleaning treatment comprises: sequentially performing ultrasonic cleaning with an organic solvent and pure water, and then performing a drying treatment.

[0031] Preferably, the organic solvent comprises any one or a combination of at least two of isopropyl alcohol, ethanol or kerosene.

[0032] Preferably, the ultrasonic cleaning time is 120-240s, for example, it can be 120s, 130s, 140s, 150s, 160s, 170s, 180s, 190s, 200s, 210s, 220s, 230s or 240s, but it is not limited to the listed values, and other values not listed in this range are also applicable.

[0033] Preferably, the ultrasonic cleaning temperature is 20-30℃, for example, it can be 20℃, 21℃, 22℃, 23℃, 24℃, 25℃, 26℃, 27℃, 28℃, 29℃ or 30℃, but it is not limited to the listed values, and other values not listed in this range are also applicable.

[0034] As a preferred technical solution of the present application, the preparation method further comprises: performing a third cleaning treatment on the magnet before covering the third adhesive layer.

[0035] Preferably, the third cleaning treatment comprises: wiping the outer surface of the magnet with a cleaning agent to remove oil stains on the surface of the magnet.

[0036] Preferably, the cleaning agent comprises isopropyl alcohol and / or ethanol.

[0037] The present application removes dirt on the surface by cleaning the workbench, the intermediate workpiece and the strong magnetic assembly respectively, which is conducive to improving the firmness between the workbench and the intermediate workpiece, effectively avoiding the movement of the intermediate workpiece and ensuring the processing quality.

[0038] As a preferred technical solution of the present application, the preparation method further comprises: knocking the surface of the intermediate workpiece or the intermediate blank before the first processing treatment or the second processing treatment, so that the intermediate workpiece or the intermediate blank is completely attached to the workbench.

[0039] As a preferred technical solution of the present application, the first processing treatment comprises: sequentially performing cutting treatment and polishing treatment on the intermediate workpiece.

[0040] The present application performs cutting treatment on the intermediate workpiece to obtain the shape and size of the intermediate blank that can adapt to the target material welding, and performs polishing treatment to remove the concave-convex or defects on the surface of the intermediate blank, thereby ensuring the surface flatness.

[0041] Preferably, the second processing treatment comprises: performing polishing treatment on the intermediate blank.

[0042] Preferably, the intermediate layer is circular or rectangular.

[0043] Preferably, the thickness of the intermediate layer is 2.2-2.35 mm, for example, it can be 2.2 mm, 2.21 mm, 2.22 mm, 2.23 mm, 2.24 mm, 2.25 mm, 2.26 mm, 2.28 mm, 2.3 mm, 2.31 mm, 2.32 mm, 2.33 mm, 2.34 mm or 2.35 mm, but is not limited to the listed values, and other values not listed in this range are also applicable.

[0044] Preferably, the roughness of the intermediate layer is ≤1.6 μm.

[0045] Preferably, the flatness of the intermediate layer is ≤0.1 mm.

[0046] Preferably, after the second processing treatment is completed, the strong magnetic assembly is removed, and the first, second and third glue layers are removed.

[0047] As a preferred technical solution of the present application, the material of the intermediate workpiece is aluminum and / or titanium.

[0048] Preferably, the purity of the intermediate workpiece is ≥99.6%.

[0049] Exemplarily, the application provides a preparation method of an intermediate layer for target welding, which specifically comprises the following steps:

[0050] (1) performing a first cleaning treatment on the workbench, and then laying a first glue layer on the workbench;

[0051] (2) providing an intermediate workpiece, wherein the intermediate workpiece has opposite first and second surfaces;

[0052] (3) performing a second cleaning treatment on the intermediate workpiece, then laying a second glue layer on the first surface of the intermediate workpiece, and pasting the intermediate workpiece on the first glue layer from the side on which the second glue layer is laid, so that the intermediate workpiece is fixed on the workbench;

[0053] (4) providing at least one magnet, performing a third cleaning treatment on the magnet, then coating a third glue layer on the outer surface of the magnet to obtain a strong magnet assembly, placing the strong magnet assembly on the second surface of the intermediate workpiece, so that the intermediate workpiece is adsorbed on the workbench, and knocking the intermediate workpiece from the side of the second surface, so that the intermediate workpiece is completely pasted on the workbench;

[0054] (5) then performing a first machining treatment on the second surface of the intermediate workpiece on the workbench to obtain an intermediate blank;

[0055] (6) after the intermediate blank is taken down, turning it over, repeating steps (3) and (4), fixing the second surface of the intermediate blank on the workbench, and performing a second machining treatment on the first surface to obtain an intermediate layer.

[0056] The numerical range described in the application not only includes the point values exemplified above, but also includes any point values between the above numerical ranges which are not exemplified, and the specific point values included in the range are not listed in the application due to the length and the consideration of simplicity.

[0057] Compared with the prior art, the application has the following beneficial effects:

[0058] The application provides a preparation method of an intermediate layer for target welding, which improves the fixing mode of the intermediate workpiece, adopts a double fixing form of adhesive fixing and magnetic adsorption strengthening, avoids deformation or deviation of the workpiece during machining, improves the machining effect, reduces the workpiece failure rate, greatly improves the welding qualification rate of the target material, and is simple in process and convenient to operate. BRIEF DESCRIPTION OF DRAWINGS

[0059] Figure 1 It is a schematic view of the intermediate workpiece of embodiment 1 of the application fixed on the workbench;

[0060] Figure 2 It is a schematic view of the intermediate blank of embodiment 1 of the application fixed on the workbench;

[0061] Figure 3 A schematic diagram of the intermediate workpiece of the present application comparative example 1 fixed on the workbench surface;

[0062] Figure 4 A schematic diagram of the intermediate blank of the present application comparative example 1 fixed on the workbench surface;

[0063] Figure 5 A schematic diagram of the intermediate workpiece of the present application comparative example 2 fixed on the workbench surface;

[0064] Figure 6 A schematic diagram of the intermediate blank of the present application comparative example 2 fixed on the workbench surface.

[0065] Wherein, 1-workbench surface; 101-first glue layer; 2-intermediate workpiece; 201-second glue layer; 2011-first bonding part; 2012-connection part; 2013-second bonding part; 3-intermediate blank; 4-strong magnetic assembly; 401-third glue layer; 5-supporting table; 6-pressing plate. DETAILED DESCRIPTION

[0066] It should be understood that, in the description of the present application, the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second", and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0067] The technical solutions of the present application will be further described below in conjunction with the drawings and through specific embodiments.

[0068] In one specific embodiment, the present application provides a preparation method of an intermediate layer for target welding, which comprises:

[0069] (I) laying a first glue layer on a workbench surface;

[0070] (II) providing an intermediate workpiece, setting a second adhesive layer on a surface of the intermediate workpiece, and pasting the intermediate workpiece on the first adhesive layer from a side on which the second adhesive layer is set, so that the intermediate workpiece is fixed on the workbench surface;

[0071] (III) providing a strong magnetic assembly, and using the strong magnetic assembly to strengthen the fixation of the intermediate workpiece;

[0072] (IV) subsequently performing a first machining process on the intermediate workpiece to obtain an intermediate blank;

[0073] (V) after the intermediate blank is removed, the intermediate blank is flipped over, steps (II) and (III) are repeated, and a second machining process is performed on the intermediate blank to obtain an intermediate layer.

[0074] In step (I), the preparation method further comprises: before the first adhesive layer is set, performing a first cleaning process on the workbench surface. Specifically, the first cleaning process comprises: using a cleaning agent to wipe the workbench surface to remove oil stains on the workbench surface. The cleaning agent comprises isopropyl alcohol and / or ethanol.

[0075] The area of the first adhesive layer is greater than the area of the second adhesive layer, so as to completely cover the second adhesive layer.

[0076] Specifically, the first adhesive layer is formed by a plurality of first strip-shaped adhesive tapes which are arranged at intervals.

[0077] In step (II), the material of the intermediate workpiece is aluminum and / or titanium, and the purity of the intermediate workpiece is greater than or equal to 99.6%. Preferably, the intermediate workpiece is made of aluminum, specifically A1060.

[0078] In some embodiments, the second adhesive layer is formed by a plurality of second strip-shaped adhesive tapes which are arranged at intervals, and the two ends of the second strip-shaped adhesive tapes respectively extend out of the intermediate workpiece.

[0079] Further, the second strip-shaped adhesive tape comprises a first bonding portion, a connecting portion and a second bonding portion which are arranged side by side in sequence, the first bonding portion and the second bonding portion are independently single-sided adhesive tapes, the connecting portion is a double-sided adhesive tape, and the connecting portion is used to connect the first adhesive layer. The first bonding portion and the second bonding portion are fixedly bonded on the intermediate workpiece, one side of the connecting portion is bonded to the intermediate workpiece, and the other side of the connecting portion is bonded to the first adhesive layer on the workbench surface, so that the preliminary fixation of the intermediate workpiece is achieved.

[0080] Specifically, the width of the second strip-shaped adhesive tape is less than the width of the first strip-shaped adhesive tape.

[0081] In some embodiments, after the intermediate workpiece is pasted on the first adhesive layer, the first adhesive tape of the first adhesive layer is arranged at an angle with the second adhesive tape of the second adhesive layer. Preferably, the first adhesive tape of the first adhesive layer is arranged perpendicularly with the second adhesive tape of the second adhesive layer.

[0082] In some embodiments, the preparation method further comprises: before the second adhesive layer is arranged, performing a second cleaning treatment on the intermediate workpiece or the intermediate blank. Specifically, the second cleaning treatment comprises: sequentially performing ultrasonic cleaning with an organic solvent and pure water, and then performing a drying treatment. The organic solvent comprises any one or a combination of at least two of isopropyl alcohol, ethanol or kerosene. The ultrasonic cleaning time is 120-240 s, and the ultrasonic cleaning temperature is 20-30°C.

[0083] In step (III), the strong magnetic assembly comprises at least one magnet and a third adhesive layer covering the magnet. Specifically, a lifting ring is further arranged on the magnet, facilitating the operator to take and operate.

[0084] The reinforcing and fixing comprises: placing the strong magnetic assembly on the second surface of the intermediate workpiece, so that the intermediate workpiece is adsorbed on the workbench surface.

[0085] In some embodiments, the preparation method further comprises: before the third adhesive layer is arranged, performing a third cleaning treatment on the magnet. Specifically, the third cleaning treatment comprises: wiping the outer surface of the magnet with a cleaning agent to remove oil stains on the surface of the magnet. The cleaning agent comprises isopropyl alcohol and / or ethanol.

[0086] In step (IV), the primary machining treatment comprises: sequentially performing cutting treatment and polishing treatment on the intermediate workpiece.

[0087] In step (V), the secondary machining treatment comprises: performing polishing treatment on the intermediate blank.

[0088] In step (IV) or (V), the preparation method further comprises: before the primary machining treatment or the secondary machining treatment, knocking the intermediate workpiece or the intermediate blank, so that the intermediate workpiece or the intermediate blank is completely attached to the workbench surface.

[0089] In some embodiments, the intermediate layer is circular or rectangular, the thickness of the intermediate layer is 2.2-2.35 mm, the roughness of the intermediate layer is ≤1.6 μm, and the flatness of the intermediate layer is ≤0.1 mm.

[0090] In some embodiments, after the secondary machining treatment is completed, the strong magnetic assembly is removed, and the first adhesive layer, the second adhesive layer and the third adhesive layer are removed.

[0091] In another specific embodiment, the present application provides a method for target welding using the intermediate layer prepared by the method described in the specific embodiment, specifically comprising the following steps:

[0092] S1: providing a target material, an intermediate layer and a back plate, setting threads on the welding surfaces of the target material and the back plate respectively, pressing the threads on the target material welding surface into the intermediate layer, and then performing heat treatment to obtain an intermediate welding material;

[0093] S2: applying pressure to the intermediate welding material of step S1 to assemble the back plate and the intermediate welding material to obtain a target assembly;

[0094] S3: placing the target assembly of step S2 in a capsule for hot isostatic pressing welding.

[0095] Example 1

[0096] The present embodiment provides a method for preparing an intermediate layer for target welding, specifically comprising the following steps:

[0097] (1) Wipe the workbench surface with ethanol to remove oil stains on the workbench surface, then lay a first adhesive layer on the workbench surface, the first adhesive layer is formed by three first adhesive tapes arranged at intervals, and the width of each first adhesive tape is 220 mm;

[0098] (2) Provide an aluminum intermediate workpiece having opposite first and second surfaces;

[0099] (3) At 25°C, first clean the intermediate workpiece with isopropyl alcohol for 180 s, then clean it with pure water for 150 s, and dry it, then set a second adhesive layer on the first surface of the intermediate workpiece as shown in Figure 1 , and paste the first surface of the intermediate workpiece on the first adhesive layer so that the intermediate workpiece is fixed to the workbench, the second adhesive layer is formed by six second adhesive tapes arranged at intervals, and the two ends of the second adhesive tape extend out of the intermediate workpiece to completely cover it, the width of the second adhesive tape is 40 mm, and the second adhesive tape includes a first adhesive portion, a connecting portion and a second adhesive portion arranged side by side in sequence, the first and second adhesive portions are independently single-sided adhesive, and the connecting portion is double-sided adhesive;

[0100] (4) Provide two magnets, wipe the outer surface of the magnets with ethanol to remove oil stains on the surface of the magnets, then coat a third adhesive layer on the outer surface of the magnets to obtain a strong magnet assembly, place the strong magnet assembly on the second surface of the intermediate workpiece so that the intermediate workpiece is adsorbed on the workbench, knock the intermediate workpiece from the side of the second surface so that the intermediate workpiece is completely attached to the workbench, and then sequentially cut and polish the intermediate workpiece on the workbench;

[0101] (5) Remove the intermediate blank after removing the strong magnetic assembly, and shovel off the second glue layer on the first surface, repeat step (3), as shown in Figure 2 (4) to set the second glue layer on the second surface, and paste the second surface of the intermediate blank on the first glue layer, so that the intermediate blank is adhered and fixed on the workbench surface, the second glue layer is formed by six second strip-shaped tapes arranged at intervals, and the two ends of the second strip-shaped tape respectively extend out of the intermediate workpiece to completely cover, the width of the second strip-shaped tape is 40mm, the second strip-shaped tape includes first bonding part, connecting part and second bonding part arranged side by side in turn, the first bonding part and the second bonding part are independently single-sided adhesive, and the connecting part is double-sided adhesive.

[0102] (6) Again, place the strong magnetic assembly in step (4) on the first surface of the intermediate blank, so that the intermediate workpiece is adsorbed on the workbench surface, then knock the intermediate blank from the side of the first surface, so that the intermediate blank is completely attached to the workbench surface, and then polish the first surface to obtain the intermediate layer.

[0103] (7) Remove the strong magnetic assembly, and shovel off the first glue layer, the second glue layer and the third glue layer.

[0104] Example 2

[0105] The embodiment provides a preparation method of an intermediate layer for target material welding, and specifically includes the following steps:

[0106] (1) Wipe the workbench surface with ethanol to remove oil stains on the workbench surface, then lay a first glue layer on the workbench surface, and the first glue layer is formed by four first strip-shaped tapes arranged at intervals, and the width of each first strip-shaped tape is 150mm.

[0107] (2) Provide a titanium intermediate workpiece having opposite first and second surfaces.

[0108] (3) Under the condition of 30℃, first clean the intermediate workpiece with ethanol for 60s by ultrasonic cleaning, then clean the intermediate workpiece with pure water for 100s by ultrasonic cleaning, and then dry treatment, then set a second glue layer on the first surface of the intermediate workpiece, and paste the first surface of the intermediate workpiece on the first glue layer, so that the intermediate workpiece is adhered and fixed on the workbench surface, the second glue layer is formed by seven second strip-shaped tapes arranged at intervals, and the two ends of the second strip-shaped tape respectively extend out of the intermediate workpiece to completely cover, the width of the second strip-shaped tape is 40mm, the second strip-shaped tape includes first bonding part, connecting part and second bonding part arranged side by side in turn, the first bonding part and the second bonding part are independently single-sided adhesive, and the connecting part is double-sided adhesive.

[0109] (4) Provide two magnets, wipe the outer surface of the magnets with ethanol to remove the oil stains on the magnet surface, and then coat the outer surface of the magnets with a third adhesive layer to obtain a strong magnetic assembly. Place the strong magnetic assembly on the second surface of the intermediate workpiece so that the intermediate workpiece is attracted to the worktable. Tap the intermediate workpiece from one side of the second surface so that the intermediate workpiece is completely attached to the worktable. Then cut and polish the intermediate workpiece on the worktable in sequence.

[0110] (5) After removing the strong magnetic component, remove the intermediate blank and scrape off the second adhesive layer on the first surface. Repeat step (3) to set the second adhesive layer on the second surface and place the second surface of the intermediate blank on the first adhesive layer so that the intermediate blank is pasted and fixed on the workbench. The second adhesive layer is formed by seven spaced second strip tapes, and the two ends of the second strip tapes extend out of the intermediate workpiece to completely cover it. The width of the second strip tape is 40mm. The second strip tape includes a first adhesive part, a connecting part and a second adhesive part arranged in parallel. The first adhesive part and the second adhesive part are single-sided adhesives, and the connecting part is a double-sided adhesive.

[0111] (6) Then place the strong magnetic component from step (4) on the first surface of the intermediate blank, so that the intermediate workpiece is adsorbed on the worktable. Then, the intermediate blank is struck from one side of the first surface so that the intermediate blank is completely attached to the worktable. Then, the first surface is polished to obtain the intermediate layer.

[0112] (7) Remove the strong magnetic component and remove the first, second and third adhesive layers.

[0113] Example 3

[0114] This embodiment provides a method for preparing an intermediate layer for target welding, specifically including the following steps:

[0115] (1) Wipe the work surface with isopropyl alcohol to remove oil stains from the work surface, and then lay the first adhesive layer on the work surface. The first adhesive layer is formed by four spaced first strip tapes, each strip tape being 160mm wide.

[0116] (2) Provide an aluminum intermediate workpiece having opposing first and second surfaces;

[0117] (3) At 20°C, the intermediate workpiece is first ultrasonically cleaned with ethanol for 180s, then ultrasonically cleaned with pure water for 180s, and then dried. Then, a second adhesive layer is set on the first surface of the intermediate workpiece, and the first surface of the intermediate workpiece is placed on the first adhesive layer so that the intermediate workpiece is attached and fixed on the workbench. The second adhesive layer is formed by seven second strip tapes arranged at intervals, and the two ends of the second strip tapes extend out of the intermediate workpiece to completely cover it. The width of the second strip tape is 30mm. The second strip tape includes a first adhesive part, a connecting part and a second adhesive part arranged in parallel. The first adhesive part and the second adhesive part are single-sided adhesive, and the connecting part is double-sided adhesive.

[0118] (4) Provide two magnets, wipe the outer surface of the magnets with ethanol to remove the oil stains on the magnet surface, and then coat the outer surface of the magnets with a third adhesive layer to obtain a strong magnetic assembly. Place the strong magnetic assembly on the second surface of the intermediate workpiece so that the intermediate workpiece is attracted to the worktable. Tap the intermediate workpiece from one side of the second surface so that the intermediate workpiece is completely attached to the worktable. Then cut and polish the intermediate workpiece on the worktable in sequence.

[0119] (5) After removing the strong magnetic component, remove the intermediate blank and scrape off the second adhesive layer on the first surface. Repeat step (3) to set the second adhesive layer on the second surface and place the second surface of the intermediate blank on the first adhesive layer so that the intermediate blank is pasted and fixed on the workbench. The second adhesive layer is formed by seven spaced second strip tapes, and the two ends of the second strip tapes extend out of the intermediate workpiece to completely cover it. The width of the second strip tape is 30mm. The second strip tape includes a first adhesive part, a connecting part and a second adhesive part arranged in parallel. The first adhesive part and the second adhesive part are single-sided adhesives, and the connecting part is a double-sided adhesive.

[0120] (6) Then place the strong magnetic component from step (4) on the first surface of the intermediate blank, so that the intermediate workpiece is adsorbed on the worktable. Then, the intermediate blank is struck from one side of the first surface so that the intermediate blank is completely attached to the worktable. Then, the first surface is polished to obtain the intermediate layer.

[0121] (7) Remove the strong magnetic component and remove the first, second and third adhesive layers.

[0122] Comparative Example 1

[0123] This comparative example provides a method for preparing an intermediate layer for target welding, which differs from Example 1 in that: Figure 3 and Figure 4 As shown, no strong magnetic components were used to strengthen and fix the intermediate workpiece; the remaining preparation steps and process parameters were the same as in Example 1.

[0124] Comparative Example 2

[0125] The present comparative example provides a preparation method of an intermediate layer for target welding, specifically comprising the following steps:

[0126] (1) providing an aluminum intermediate workpiece having opposite first and second surfaces;

[0127] (2) providing a universal clamp, as shown in the figure, the universal clamp comprises a support table, two pressing plates are movably arranged on the support table, and the two pressing plates are symmetrically arranged; Figure 5

[0128] (3) wiping the workbench surface with isopropyl alcohol to remove oil stains on the workbench surface, and then fixing the universal clamp on the workbench surface;

[0129] (4) under the condition of 20℃, first ultrasonic cleaning the intermediate workpiece with ethanol for 180s, then ultrasonic cleaning with pure water for 150s, and drying treatment, then setting a glue layer on the first surface of the intermediate workpiece, the glue layer is formed by five interval arranged strip-shaped adhesive tapes;

[0130] (5) pasting the first surface of the intermediate workpiece on the support table, clamping and fixing the intermediate workpiece by the pressing plate, then sequentially cutting and polishing the intermediate workpiece on the workbench to obtain an intermediate blank;

[0131] (6) taking down the intermediate blank, repeating step (4) to set a glue layer on the second surface of the intermediate workpiece, as shown in the figure, and pasting the second surface of the intermediate blank on the support table, clamping and fixing the intermediate blank by the pressing plate, then polishing the first surface of the intermediate blank to obtain an intermediate layer. Figure 6

[0132] The intermediate layer prepared by the preparation method provided in examples 1-3, comparative examples 1 and 2 is used for target welding, and the target welding qualified rate is tested, and the results are shown in table 1.

[0133] The target welding specifically comprises the following steps:

[0134] S1: providing a target, an intermediate layer and a back plate, setting threads on the welding surfaces of the target and the back plate respectively, pressing the threads on the target welding surface into the intermediate layer, and then heat treating the target and the intermediate layer to obtain an intermediate welding material;

[0135] S2: applying pressure to the intermediate welding material of step S1 to assemble the back plate and the intermediate welding material to obtain a target assembly;

[0136] S3: placing the target assembly of step S2 in a package for hot isostatic pressing welding. ​​

[0137] Table 1

[0138] Number Example 1 Example 2 Example 3 Comparative Example 1 Comparative Example 2 Thickness 2.3 mm 2.26 mm 2.31 mm 2.3 mm 2.3 mm Roughness 1.5 μm 1.6 μm 1.5 μm 2.3 μm 2.1 μm Flatness ≤ 0.1 mm ≤ 0.1 mm ≤ 0.1 mm ≤ 0.8 mm ≤ 1.2 mm Welding Pass Rate 100％ 100％ 100％ 97.3％ 97％

[0139] As can be seen from Table 1, the roughness of the intermediate layer prepared by Examples 1-3 is low, and the surface is flat, and a higher target material welding rate is obtained. Compared with Example 1, the strong magnetic assembly is not used for strengthening and fixing in the preparation process of the intermediate layer in Comparative Example 1, which leads to the deviation of the workpiece in the machining process, reduces the flatness of the intermediate layer, and further affects the welding qualified rate of the target material and the back plate. Compared with Examples 1-3, the general clamp is used to clamp and fix the intermediate workpiece in Comparative Example 2, which causes the intermediate workpiece to deform slightly, reduces the quality of the intermediate layer, and reduces the welding qualified rate of the target material and the back plate.

[0140] The applicant declares that the above description is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. It should be understood by those skilled in the art that any changes or replacements within the technical scope disclosed by the present application can be easily thought out by those skilled in the art, and all fall within the protection scope and disclosure scope of the present application.

Claims

1. A method for preparing an intermediate layer for target welding, characterized in that, The preparation method includes: (I) Lay the first adhesive layer on the workbench; (II) Provide an intermediate workpiece made of aluminum and / or titanium with a purity of ≥99.6%, and provide a second adhesive layer on the surface of the intermediate workpiece. Place the intermediate workpiece on the first adhesive layer from the side where the second adhesive layer is provided, so that the intermediate workpiece is glued and fixed on the worktable. (III) Provide a strong magnetic component to strengthen and fix the intermediate workpiece; (IV) The intermediate workpiece is then processed once to obtain an intermediate blank; (V) After removing the intermediate blank, flip it over and repeat steps (II) and (III), and perform secondary processing on the intermediate blank to obtain an intermediate layer with a thickness of 2.2~2.35mm, a roughness of ≤1.6μm, and a flatness of ≤0.1mm; The strong magnetic component includes at least one magnet and a third adhesive layer covering the magnet; the magnet is also provided with a lifting ring; the strengthening fixation includes: placing the strong magnetic component on the surface of the intermediate workpiece, so that the intermediate workpiece is attracted to the worktable surface.

2. The preparation method according to claim 1, characterized in that, The area of ​​the first adhesive layer is larger than the area of ​​the second adhesive layer; The first adhesive layer is formed by a plurality of spaced-apart first strip tapes.

3. The preparation method according to claim 2, characterized in that, The second adhesive layer is formed by a plurality of spaced second strips of adhesive tape, with both ends of the second strips extending out of the intermediate workpiece.

4. The preparation method according to claim 3, characterized in that, The second strip tape includes a first adhesive portion, a connecting portion, and a second adhesive portion arranged side by side in sequence. The first adhesive portion and the second adhesive portion are each single-sided adhesive, and the connecting portion is double-sided adhesive. The connecting portion is used to connect the first pressure adhesive layer.

5. The preparation method according to claim 3, characterized in that, The width of the second strip of tape is smaller than the width of the first strip of tape.

6. The preparation method according to claim 3, characterized in that, After the intermediate workpiece is placed on the first adhesive layer, the first strip of adhesive tape of the first adhesive layer and the second strip of adhesive tape of the second adhesive layer are set at an angle.

7. The preparation method according to claim 6, characterized in that, The first strip of adhesive tape in the first adhesive layer is perpendicular to the second strip of adhesive tape in the second adhesive layer.

8. The preparation method according to claim 1, characterized in that, The preparation method further includes: performing a first cleaning treatment on the workbench surface before setting the first adhesive layer.

9. The preparation method according to claim 8, characterized in that, The first cleaning process includes wiping the work surface with a cleaning agent to remove oil stains from the work surface.

10. The preparation method according to claim 9, characterized in that, The cleaning agent includes isopropanol and / or ethanol.

11. The preparation method according to claim 1, characterized in that, The preparation method further includes: performing a second cleaning treatment on the intermediate workpiece or intermediate blank before setting the second adhesive layer.

12. The preparation method according to claim 11, characterized in that, The second cleaning process includes: ultrasonic cleaning with organic solvent and pure water in sequence, followed by drying.

13. The preparation method according to claim 12, characterized in that, The organic solvent includes any one or a combination of at least two of isopropanol, ethanol, or kerosene.

14. The preparation method according to claim 12, characterized in that, The ultrasonic cleaning time is 120~240s.

15. The preparation method according to claim 12, characterized in that, The temperature for ultrasonic cleaning is 20~30℃.

16. The preparation method according to claim 1, characterized in that, The preparation method further includes: performing a third cleaning treatment on the magnet before coating the third adhesive layer.

17. The preparation method according to claim 16, characterized in that, The third cleaning process includes wiping the outer surface of the magnet with a cleaning agent to remove oil stains from the magnet surface.

18. The preparation method according to claim 17, characterized in that, The cleaning agent includes isopropanol and / or ethanol.

19. The preparation method according to claim 1, characterized in that, The preparation method further includes: before the primary or secondary processing, tapping the surface of the intermediate workpiece or intermediate blank to make the intermediate workpiece or intermediate blank fully adhere to the worktable surface.

20. The preparation method according to claim 1, characterized in that, The primary processing includes: sequentially cutting and polishing the intermediate workpiece.

21. The preparation method according to claim 1, characterized in that, The secondary processing includes polishing the intermediate blank.

22. The preparation method according to claim 1, characterized in that, The intermediate layer is circular or rectangular.

23. The preparation method according to claim 1, characterized in that, After the secondary processing is completed, the strong magnetic component is removed, and the first, second, and third adhesive layers are scraped off.

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