A sampling cylinder cleaning device and method for polysilicon production

Abstract

The application provides a sampling cylinder cleaning device and method for polysilicon production, which comprises a cabin body, a lifting plate is arranged on the top surface of the cabin body, a motor is arranged on the lifting plate, the main bearing of the motor extends into the cabin body through the top surface, a sealing joint is movably connected to the top end of the main bearing, high-purity water is introduced, and the cost is reduced; a first conveying belt and a second conveying belt extend into the cabin body through two adjacent side surfaces of the cabin body respectively, first sliding rails and second sliding rails are arranged in the cabin body in parallel with the first conveying belt and the second conveying belt respectively; first fixers and second fixers are slidably arranged on the first sliding rails and the second sliding rails respectively; wherein the motor comprises a first motor and a second motor, hollow brushes and liquid nozzles are connected to the bottom ends of the main bearings of the first motor and the second motor respectively, the brushes and the liquid nozzles are arranged above the first conveying belt in parallel, and a plurality of water outlets are arranged on the side surfaces of the brushes and the liquid nozzles; the sampling cylinder is washed and flushed by the high-speed rotating brushes and liquid nozzles, and the cleaning effect is better.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of polycrystalline silicon production, and in particular to a sampling cylinder cleaning device and method for polycrystalline silicon production. BACKGROUND

[0002] At present, in the polycrystalline silicon industry, in order to meet the quality requirements of solar cells and related devices in large-scale integrated circuits, the quality of silicon material will directly affect the crystal structure and electrical properties. Therefore, the purity of the polysilicon material is increasingly required in the production process, and the cleanliness of the sampling cylinder for storing the polysilicon material is also higher.

[0003] In the production process of polycrystalline silicon, the cleaning of the existing sampling cylinder is mainly completed by manual operation. However, manual cleaning has the problems of incomplete cleaning and low efficiency, which affects the purity of the polysilicon material and reduces the production efficiency. In addition, the commonly used cleaning medium is an acid solution, which can cause a large amount of acid consumption and high cost.

[0004] Therefore, it is necessary to develop a sampling cylinder cleaning device and method for polycrystalline silicon production which is clean and has low cost to solve the above problems. SUMMARY

[0005] The present application relates to the technical field of polycrystalline silicon production, and in particular to a sampling cylinder cleaning device and method for polycrystalline silicon production.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical solutions:

[0007] A sampling cylinder cleaning device for polycrystalline silicon production, comprising:

[0008] A cabin body comprising a first side, a second side, a third side, a fourth side, a top surface and a bottom surface;

[0009] A lifting plate is provided on the top surface, and a motor is provided on the lifting plate. The main bearing of the motor extends through the top surface to the inside of the cabin body, and a sealing joint is movably connected to the top end of the main bearing;

[0010] A transmission unit comprising a first conveyor belt, a second conveyor belt, a first sliding rail and a second sliding rail, wherein the first conveyor belt and the second conveyor belt extend through the first side and the second side, respectively, and extend into the inside of the cabin body, and the first sliding rail and the second sliding rail are arranged in the inside of the cabin body parallel to the first conveyor belt and the second conveyor belt, respectively;

[0011] The fixing device comprises a first fixing device and a second fixing device respectively slidingly mounted on the first sliding rail and the second sliding rail;

[0012] Wherein,

[0013] The motor comprises a first motor and a second motor, hollow brushes and liquid nozzles are connected to bottom ends of main bearings of the first motor and the second motor respectively, the brushes and the liquid nozzles are arranged side by side above the first conveying belt, and a plurality of water outlets are arranged on side surfaces of the brushes and the liquid nozzles.

[0014] The horizontal height of the first sliding rail is higher than that of the second sliding rail.

[0015] Preferably, the fixing device further comprises:

[0016] A guide rail is vertically arranged on the rear side of the lifting plate and used to drive the lifting plate to lift and lower;

[0017] An air blowing pipe extends through the top surface to the inside of the cabin, and a gas pipe interface is connected to the top end of the air blowing pipe.

[0018] A drain pipe is arranged on the bottom surface, and a drain valve is arranged on the drain pipe.

[0019] A hatch is arranged on the third side surface and the fourth side surface, and a handle is arranged on the hatch.

[0020] A control unit is used to control the progress of the first conveying belt, the second conveying belt, the first motor, the second motor, the first fixing device, the second fixing device and the lifting plate.

[0021] Preferably, the air blowing pipe is located above the second conveying belt, and an electromagnetic valve is arranged on the air blowing pipe.

[0022] Preferably, the guide rail comprises a first guide rail, a second guide rail and a third guide rail which are slidingly connected to both ends and the middle part of the back plate of the lifting plate, wherein a limiting block is arranged on the third guide rail, and the limiting block comprises an upper limiting block and a lower limiting block.

[0023] Preferably, sensors are arranged on the air blowing pipe, the first fixing device, the second fixing device, the upper limiting block and the lower limiting block, and the sensors are connected to the control unit.

[0024] Preferably, the fixing device comprises a sliding block and a fixing clamp.

[0025] The fixing clamp is designed to be opened and closed, and a buffer pad and an anti-skid layer are arranged on the inner side of the fixing clamp.

[0026] The fixing clamps of the first fixing device and the second fixing device respectively make linear motion above the first conveying belt and the second conveying belt.

[0027] Preferably, the transmission unit further comprises a support seat and a driver;

[0028] The support seat comprises a first support seat and a second support seat, which are respectively arranged at the bottom end of the first conveying belt and the second conveying belt at the outer side portion of the cabin body.

[0029] The driver comprises a first driver arranged at one side of the first support seat and a second driver arranged at one side of the second support seat.

[0030] Preferably, the first motor and the second motor are both air motors, and the main bearing is an air bearing.

[0031] Preferably, the air bearing has a hollow structure, and a gas pipe joint is arranged on the shell; one end of the hollow structure is in communication with the sealing joint, and the other end is in communication with the hollow part of the brush or the liquid spray head.

[0032] Preferably, the first conveying belt, the second conveying belt, the first sliding rail, the second sliding rail, the first fixer and the second fixer are all made of corrosion-resistant materials.

[0033] A cleaning method of a sampling cylinder for polysilicon production, using the sampling cylinder cleaning device for polysilicon production according to any one of the above, the first conveying belt transports the sampling cylinder from the outside of the cabin body to the first fixer, the first fixer clamps and fixes the sampling cylinder, the lifting plate is lowered to make the brush extend into the sampling cylinder, and the first motor is started to drive the brush to rotate to wash the sampling cylinder; after washing, the lifting plate is raised, the first fixer drives the sampling cylinder to slide on the first sliding rail to below the liquid spray head, the lifting plate is lowered to make the liquid spray head extend into the sampling cylinder, and the second motor is started to drive the liquid spray head to rotate to spray and flush the sampling cylinder; after flushing, the first fixer releases the sampling cylinder, the second fixer clamps and fixes the sampling cylinder and drives it to slide on the second sliding rail to the air blowing position for air blowing treatment; after air blowing, the second fixer releases the sampling cylinder and places it on the second conveying belt, and the second conveying belt transports the sampling cylinder out of the cabin body; wherein the sealing joints of the first motor and the second motor are connected with a high-purity water inlet pipe, the total mass concentration of metal impurities in the high-purity water flowing into the high-purity water inlet pipe is less than 0.1 ppbw, and the high-purity water pressure is controlled at 0.1-0.5mpa.

[0034] Compared with the prior art, the present application has the following advantages:

[0035] I. The sampling cylinder is transported by the conveying belt, clamped and fixed by the fixer after being in place, rotated by the brush provided with a water outlet hole connected with the water inlet pipe to realize washing of the inside of the sampling cylinder, and then sprayed and flushed by the liquid spray head to make the cleaning effect better.

[0036] II. To prevent water accumulation in the sampling cylinder, the inside of the sampling cylinder after the spray flushing is completed is jetted through the air pipe, and the water accumulated in the sampling cylinder can be blown out;

[0037] III. The cleaning of the sampling cylinder is completed through the device, the whole cleaning operation process is controlled by the control unit, the time-consuming and laborious and low efficiency of manual cleaning is avoided, and the poor effect of manual cleaning is improved;

[0038] IV. The high-purity water is used as the cleaning medium to replace the expensive acid steam cleaning, and the cost is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0040] Figure 1 It is a schematic diagram of the overall structure of the embodiment of the present application.

[0041] Figure 2 It is a schematic diagram of the brush working in the embodiment of the present application.

[0042] Figure 3 It is a schematic diagram of the liquid spray head working in the embodiment of the present application.

[0043] Figure 4 It is a top view of the embodiment of the present application.

[0044] Figure 5 It is a schematic diagram of the structure of the motor in the embodiment of the present application.

[0045] Reference signs:

[0046] 10, cabin; 101, first side; 102, second side; 103, third side; 104, fourth side;

[0047] 20, lifting plate;

[0048] 30, motor; 301, sealing joint; 302, first motor; 3021, brush; 303, second motor; 3031, liquid spray head; 304, main bearing; 3041, air pipe joint;

[0049] 40, transmission unit; 401, first conveying belt; 402, second conveying belt; 403, first sliding rail; 404, second sliding rail; 405, driver; 4051, first driver; 4052, second driver;

[0050] 50, holder; 501, first holder; 502, second holder; 503, sliding block; 504, fixing clamp;

[0051] 60, guide rail; 601, first guide rail; 602, second guide rail; 603, third guide rail;

[0052] 70, air blowing pipe; 701, gas pipe interface;

[0053] 80, drain pipe; 801, drain valve. DETAILED DESCRIPTION

[0054] Hereinafter, only certain exemplary embodiments are simply described. As can be appreciated by those skilled in the art, the described embodiments can be modified in various different manners without departing from the spirit or scope of the present application. Therefore, the drawings and descriptions are to be regarded as illustrative in nature rather than restrictive.

[0055] In the description of the present application, it needs to be understood that the terms "upper", "lower", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the present application is used, or the orientation or positional relationship commonly understood by those skilled in the art, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0056] In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0057] In the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" and the like should be understood broadly, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be directly connected, or can be indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0058] The disclosure below provides many different embodiments or examples for implementing different structures of the application. For the purpose of simplification of the present disclosure, the description below refers to specific examples. Of course, they are merely examples and the purpose is not to limit the application. In addition, the application can refer to the same reference numerals and / or reference letters in different examples, which are repeated for the purpose of simplification and clarity, which in itself does not indicate a relationship between the various embodiments and / or arrangements discussed. In addition, the application provides examples of various specific processes and materials, but a person of ordinary skill in the art can realize the application of other processes and / or the use of other materials.

[0059] The embodiments of the application will be described in detail below with reference to the accompanying drawings.

[0060] As Figures 1-4 shown, the embodiment of the application provides a sampling cylinder cleaning device for polysilicon production, comprising:

[0061] The cabin body 10 comprises a first side surface 101, a second side surface 102, a third side surface 103, a fourth side surface 104, a top surface and a bottom surface;

[0062] The lifting plate 20 is arranged on the top surface, and a motor 30 is arranged on the lifting plate 20. The main bearing 304 of the motor 30 extends through the top surface to the inside of the cabin body 10, and the top end of the main bearing 304 is movably connected with a sealing joint 301;

[0063] The transmission unit 40 comprises a first conveying belt 401, a second conveying belt 402, a first sliding rail 403 and a second sliding rail 404. The first conveying belt 401 and the second conveying belt 402 extend through the first side surface 101 and the second side surface 102, respectively, to the inside of the cabin body 10. The first sliding rail 403 and the second sliding rail 404 are arranged in the cabin body 10 in parallel with the first conveying belt 401 and the second conveying belt 402, respectively;

[0064] The fixing device 50 comprises a first fixing device 501 and a second fixing device 502 which are slidably arranged on the first sliding rail 403 and the second sliding rail 404, respectively;

[0065] The motor 30 comprises a first motor 302 and a second motor 303, and the bottom end of the main bearing 304 of the first motor 302 and the second motor 303 is connected with a hollow brush 3021 and a hollow liquid nozzle 3031, respectively. The brush 3021 and the liquid nozzle 3031 are arranged side by side above the first conveying belt 401, and each side is provided with a plurality of water outlets;

[0066] The horizontal height of the first sliding rail 403 is higher than that of the second sliding rail 404. In this embodiment, the first fixing device 501 grasps the one-third of the sampling cylinder, and the second fixing device 502 grasps the two-thirds of the sampling cylinder.

[0067] Specifically, the first motor 302 and the second motor 303 are both air motors, and the main bearing 304 is an air bearing; the first conveying belt 401 and the second conveying belt 402 are respectively located obliquely below the first sliding rail 403 and the second sliding rail 404.

[0068] More specifically, as shown in the figure, the air bearing is in a hollow structure, and the outer shell is provided with an air pipe joint 3041; one end of the hollow structure is in communication with the sealing joint 301, and the other end is in communication with the hollow part of the brush 3021 or the liquid spray head 3031. Figure 5

[0069] In order to facilitate maintenance, the brush 3021 is sleeved with a sponge, which can contact the inner wall and bottom of the sampling cylinder, and the operator can replace the sponge according to the use condition.

[0070] It should be noted that in the non-use state, the first fixer 501 is parked at one end of the first sliding rail 403 close to the first conveying belt 401, and the second fixer 502 is parked at one end of the second sliding rail 404 away from the second conveying belt 402; the lifting plate 20 drives the brush 3021 and the liquid spray head 3031 to be in the raised state.

[0071] In order to facilitate later maintenance and improve the convenience of use, the sampling cylinder cleaning device for polysilicon production further comprises:

[0072] The guide rail 60 is vertically arranged on the rear side of the lifting plate 20, and is used to drive the lifting plate 20 to rise and fall;

[0073] The air blowing pipe 70 extends through the top surface to the inside of the cabin body 10, and the air blowing pipe 70 is connected with a gas pipe interface 701 at the top end;

[0074] The drain pipe 80 is arranged on the bottom surface, and a drain valve 801 is arranged thereon;

[0075] The hatch is arranged on the third side face 103 and the fourth side face 104, which is convenient for maintaining and repairing the parts inside the cabin body 10, and a handle is arranged on the hatch, which is convenient for opening the hatch;

[0076] The control unit is used to control the progress of the first conveying belt 401, the second conveying belt 402, the first motor 302, the second motor 303, the first fixer 501, the second fixer 502 and the lifting plate 20; avoids the time-consuming and laborious situation of manual cleaning, improves the low efficiency, and also improves the poor problem of manual cleaning effect;

[0077] Among them, the air blowing pipe 70 is located directly above the second conveying belt 402, and an electromagnetic valve is arranged on the pipe.

[0078] ​Specifically, the guide rail 60 comprises a first guide rail 601, a second guide rail 602 and a third guide rail 603 which are respectively slidably connected with the back plate of the lifting plate 20 at both ends and the middle part, wherein the third guide rail 603 is provided with a limiting block, and the limiting block comprises an upper limiting block and a lower limiting block; the air blowing pipe 70, the first fixer 501, the second fixer 502, the upper limiting block and the lower limiting block are all provided with sensors, and the sensors are connected with a control unit; the control unit controls the air blowing of the air blowing pipe 70, the fixing of the sampling cylinder by the first fixer 501 and the second fixer 502 and the lifting height of the lifting plate 20 through the signals of the sensors; in the embodiment, the control unit comprises a PLC (Programmable Logic Controller) and an HMI (Human Machine Interface).

[0079] It should be noted that the nozzle of the air blowing pipe 70 is at the sampling port of the sampling cylinder and does not extend into the interior of the sampling cylinder.

[0080] Before use, the high-pressure water inlet pipe is connected with the sealing joint 301, and the air inlet pipe is connected with the gas pipeline interface 701. During use, the sampling cylinder to be cleaned is placed on the first conveying belt 401, the first conveying belt 401 conveys the sampling cylinder to the position where the first fixer 501 is parked, the first fixer 501 clamps and fixes the sampling cylinder, the lifting plate 20 drives the brush 3021 to descend, the brush 3021 falls into the interior of the sampling cylinder, high-purity water is introduced and the first motor 302 is started to drive the brush 3021 provided with a sponge to rotate, the high-purity water is sprayed out through the water outlet holes on the side of the brush 3021 under the centrifugal action, so as to realize the washing and brushing of the interior of the sampling cylinder; after the washing and brushing is completed, the lifting plate 20 drives the brush 3021 and the liquid jet head 3031 to ascend, the first fixer 501 drives the sampling cylinder to slide on the first slide rail 403 to below the liquid jet head 3031, the lifting plate 20 drives the brush 3021 and the liquid jet head 3031 to descend, the liquid jet head 3031 falls into the interior of the sampling cylinder, high-purity water is introduced and the second motor 303 is started to drive the liquid jet head 3031 to rotate, the high-purity water is sprayed out through the water outlet holes on the side of the liquid jet head 3031 under the centrifugal action, so as to realize the flushing of the interior of the sampling cylinder; after the flushing is completed, the second fixer 502 drives the sampling cylinder to slide on the second slide rail 404 to below the air blowing pipe 70, the sensor senses that the sampling cylinder is in place, and the control unit controls the opening of the electromagnetic valve to spray air to the sampling cylinder, so as to blow out the accumulated water in the sampling cylinder, and the second fixer 502 drives the sampling cylinder to slide on the second slide rail 404 to the end of the second conveying belt 402, places the sampling cylinder on the second conveying belt 402 and conveys the sampling cylinder out of the cabin body 10, so the cleaning of the sampling cylinder is completed. After use, the drain valve 801 is opened, so that the accumulated water in the cabin body 10 can be drained out through the drain pipe 80.

[0081] The sampling cylinder is transported by the first conveying belt 401, and after the sampling cylinder is in place, the sampling cylinder is clamped and fixed by the fixator 50, the brush 3021 provided with a water outlet hole is driven to rotate by the motor 30 connected with a water inlet pipe, washing and brushing of the inside of the sampling cylinder is realized, then the sampling cylinder after washing and brushing is sprayed and washed by the liquid spray head 3031, so that the cleaning effect is better.

[0082] Further, the fixator 50 comprises a sliding block 503 and a fixed clamp 504; wherein the fixed clamp 504 is designed to be opened and closed, and the inner side of the fixed clamp 504 is provided with a buffer pad and an anti-skid layer; the fixed clamps 504 of the first fixator 501 and the second fixator 502 respectively make linear motion directly above the first conveying belt 401 and the second conveying belt 402.

[0083] Specifically, the angle of the fixed clamp 504 is 180° when the fixed clamp 504 is opened, and the angle of the fixed clamp 504 is 90° when the fixed clamp 504 is closed. The fixed clamp 504 is in an opened state by default, and when the sensor on the fixator 50 senses that the sampling cylinder is in place, the control unit controls the fixed clamp 504 to be closed to clamp and fix the sampling cylinder.

[0084] Further, the transmission unit 40 further comprises a support seat and a driver 405; the support seat comprises a first support seat and a second support seat, and the first support seat and the second support seat are respectively arranged at the bottom end of the first conveying belt 401 and the second conveying belt 402 located at the outer side portion of the cabin body 10, and are used to support the first conveying belt 401 and the second conveying belt 402; the driver 405 comprises a first driver 4051 arranged on one side of the first support seat and a second driver 4052 arranged on one side of the second support seat, and is used to provide power for the first conveying belt 401 and the second conveying belt 402.

[0085] In order to prevent the cleaning liquid from corroding the device parts, affecting the operation of the device and even increasing the maintenance cost, the first conveying belt 401, the second conveying belt 402, the first sliding rail 403, the second sliding rail 404, the first fixator 501 and the second fixator 502 are all made of anti-corrosion materials.

[0086] The application also provides a sampling cylinder cleaning device for polysilicon production, and the sampling cylinder cleaning device is used in the sampling cylinder cleaning method for polysilicon production.

[0087] The high-purity water contains fifteen metal elements. Since the current requirement for the cleanliness of the crystalline silicon material is higher, the metal impurity content is basically in the order of ppbw, so the metal impurity content of the high-purity water as a cleaning medium also needs to be controlled. In the embodiment, the total metal impurity mass concentration of the high-purity water is controlled within 0.1 ppbw to ensure the cleanliness of the sampling cylinder after cleaning.

[0088] In addition, since the water pressure of the high-purity water is positively correlated with the cleanliness achieved by cleaning, in the embodiment, the water pressure within the range of 0.1-0.5 Mpa can achieve the desired cleanliness. If the water pressure is lower than 0.1 Mpa, it may lead to poor cleaning effect, and if the water pressure is higher than 0.5 Mpa, it will have higher requirements for the pressure bearing of the water inlet pipe, resulting in higher cost. Therefore, 0.1-0.5 Mpa is the optimal water pressure range of the high-purity water.

[0089] The above specific embodiments further illustrate the purposes, technical solutions and beneficial effects of the present application. It should be understood that the above description is only a specific embodiment of the present application and is not used to limit the protection scope of the present application. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A sampling cylinder cleaning device for polysilicon production, characterized by, The utility model relates to a kind of automatic cleaning device for food and beverage industry, including: Cabin (10), including first side (101), second side (102), third side (103), fourth side (104), top surface and bottom surface; Lifting plate (20), is located in the top surface, motor (30) is equipped on the lifting plate (20), the main bearing (304) of the motor (30) extends to the inside of cabin (10) through the top surface, the top end of the main bearing (304) is movably connected with sealing joint (301); Transmission unit (40), including first conveyor belt (401), second conveyor belt (402), first slide rail (403) and second slide rail (404), the first conveyor belt (401) and second conveyor belt (402) are respectively vertically extended to the inside of cabin (10) through the first side (101) and second side (102), the first slide rail (403) and second slide rail (404) are respectively parallel to the first conveyor belt (401) and second conveyor belt (402) and are equipped in the inside of cabin (10); Fixer (50), including first fixer (501) and second fixer (502) that are respectively slidably installed on the first slide rail (403) and second slide rail (404); Guide rail (60), vertically equipped in the back side of the lifting plate (20), for driving the lifting plate (20) to lift; Air blowing pipe (70), extends to the inside of cabin (10) through the top surface, the top end of the air blowing pipe (70) is connected with gas pipeline interface (701); Control unit; Wherein, The motor (30) includes first motor (302) and second motor (303), the bottom end of the main bearing (304) of the first motor (302) and second motor (303) is respectively connected with hollow brush (3021) and hollow liquid spray head (3031), the brush (3021) and liquid spray head (3031) are side by side and equipped above the first conveyor belt (401), and the side is equipped with a plurality of water outlets; The first motor (302) and second motor (303) are pneumatic motors, and the main bearing (304) is an air bearing; The air bearing is a hollow structure, and a gas pipe joint (3041) is arranged on the shell;One end of the hollow structure is communicated with the sealing joint (301), and the other end is communicated with the hollow part of the brush (3021) or the liquid spray head (3031); The horizontal height of the first slide rail (403) is higher than that of the second slide rail (404); The guide rail (60) includes first guide rail (601), second guide rail (602) and third guide rail (603) that are slidably connected with the back plate of the lifting plate (20) two ends and middle part respectively, wherein, the third guide rail (603) is equipped with limit block, and the limit block includes upper limit block and lower limit block; Sensor is arranged on the air blowing pipe (70), the first fixer (501), the second fixer (502), the upper limit block and the lower limit block, and the sensor is connected with the control unit. The control unit is used for controlling the processes of the first conveying belt (401), the second conveying belt (402), the first motor (302), the second motor (303), the first fixer (501), the second fixer (502) and the lifting plate (20).

2. The sampling cylinder cleaning apparatus for polysilicon production according to claim 1, wherein Further comprising: A drain pipe (80) is arranged on the bottom surface, and a drain valve (801) is arranged on the drain pipe (80); A hatch is arranged on the third side (103) and the fourth side (104), and a handle is arranged on the hatch; The blowing pipe (70) is located directly above the second conveying belt (402), and an electromagnetic valve is arranged on the blowing pipe (70).

3. The sampling cylinder cleaning apparatus for polysilicon production according to claim 1, characterized by: The fixer (50) comprises a sliding block (503) and a fixing clamp (504); The fixing clamp (504) is designed to be opened and closed, and a buffer pad and an anti-skid layer are arranged on the inner side of the fixing clamp (504); The fixing clamps (504) of the first fixer (501) and the second fixer (502) respectively make linear motion directly above the first conveying belt (401) and the second conveying belt (402).

4. The sampling cylinder cleaning apparatus for polysilicon production according to claim 1, characterized by: The transmission unit (40) further comprises a support seat and a driver (405); The support seat comprises a first support seat and a second support seat, and the first support seat and the second support seat are respectively arranged at the bottom ends of the first conveying belt (401) and the second conveying belt (402) located at the outer side portions of the cabin body (10); The driver (405) comprises a first driver (4051) arranged on one side of the first support seat and a second driver (4052) arranged on one side of the second support seat.

5. The sampling cylinder cleaning apparatus for polysilicon production according to claim 1, characterized by: The first conveying belt (401), the second conveying belt (402), the first sliding rail (403), the second sliding rail (404), the first fixer (501) and the second fixer (502) are all made of corrosion-resistant materials.

6. A cleaning method for a sampling cylinder used in polycrystalline silicon production, using the cleaning device for the sampling cylinder used in polycrystalline silicon production according to any one of claims 1-5, characterized in that: The first conveying belt (401) conveys the sampling cylinder from the outside of the cabin body (10) to the first fixer (501), the first fixer (501) clamps and fixes the sampling cylinder, the lifting plate (20) is lowered to make the brush (3021) extend into the sampling cylinder, and the first motor (302) is started to drive the brush (3021) to rotate to wash the sampling cylinder; After washing, the lifting plate (20) is raised, the first fixer (501) drives the sampling cylinder to slide on the first sliding rail (403) to below the liquid spray head (3031), the lifting plate (20) is lowered to make the liquid spray head (3031) extend into the sampling cylinder, and the second motor (303) is started to drive the liquid spray head (3031) to rotate to spray and flush the sampling cylinder; After flushing, the first fixer (501) releases the sampling cylinder, the second fixer (502) clamps and fixes the sampling cylinder and drives it to slide on the second sliding rail (404) to the blowing position for air blowing treatment; After the ejection is completed, the second holder (502) releases the sampling cylinder and places it on the second conveying belt (402), and the sampling cylinder is transported out of the cabin (10) by the second conveying belt (402); The sealing joints (301) of the first motor (302) and the second motor (303) are connected with high-purity water inlet pipes, the total metal impurity mass concentration of the high-purity water in the high-purity water inlet pipes is less than 0.1 ppbw, and the high-purity water pressure is controlled to be 0.1-0.5mpa.

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