Preparation method of wear-resistant corrosion-resistant hydrophobic titanium alloy surface with micro-nano structure

Abstract

The application discloses a preparation method of a wear-resistant corrosion-resistant hydrophobic titanium alloy surface with a micro-nano structure. The method comprises the following steps: firstly, imprinting micron-scale pits on a pretreated titanium alloy surface by using spherical tungsten carbide particles; preparing an iron layer on the titanium alloy surface with the pits by using a surface treatment process; then, performing high-temperature heat treatment and carburizing treatment, so that a titanium carbide layer with a micro-nano secondary rough structure is obtained near the interface between the iron layer and the titanium alloy; subsequently, immersing the surface into a corrosion liquid to remove the surface iron layer; finally, performing low-surface-energy modification by using a fluorosilane solution, so that a wear-resistant corrosion-resistant hydrophobic titanium alloy surface with a micro-nano structure is finally obtained. The titanium alloy surface prepared by the method has excellent hardness, wear resistance, film-substrate adhesion, hydrophobicity and corrosion resistance.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of titanium alloy, and relates to a preparation method of a wear-resistant and corrosion-resistant hydrophobic titanium alloy surface with a micro-nano structure. BACKGROUND

[0002] Titanium alloy is widely used in aviation, biomedical, mechanical industry and other fields due to its high strength, corrosion resistance and good biocompatibility. However, its poor corrosion resistance and wear resistance limit its application in some complex service environments. For example, titanium alloy used in the hull of a ship faces a complex marine working environment with erosion and corrosion, and higher requirements are put forward for the wear resistance and corrosion resistance of the titanium alloy surface.

[0003] Preparation of a ceramic layer on the surface of titanium alloy is an effective method to improve its wear resistance and corrosion resistance. The preparation methods of the surface ceramic layer mainly include spraying, physical vapor deposition and laser cladding. However, the above methods are difficult to prepare a surface ceramic layer with high ceramic volume fraction and high film-substrate adhesion, which restricts the hardness and wear resistance of the titanium alloy surface. At the same time, the poor hydrophobicity of the ceramic layer limits the further improvement of the corrosion resistance. Studies have shown that reducing the surface energy and increasing the surface roughness are necessary conditions to improve the hydrophobicity. Therefore, preparing a rough structure of micro-nano scale on the surface of the ceramic layer on the titanium alloy and preparing a hydrophobic substance on the surface are common methods to improve the corrosion resistance. The methods for preparing a rough surface ceramic layer on the surface of titanium alloy include laser etching, anodic oxidation, chemical / electrochemical etching, template method and sol-gel method. Common hydrophobic film substances include perfluorodecyltriethoxysilane, 1H, 1H, 2H, 2H perfluorodecyltriethoxysilane and (3, 3, 3 trifluoropropyl) methyl dimethoxysilane.

[0004] However, the current preparation method of the rough surface ceramic layer is difficult to obtain a ceramic layer with high volume fraction and high film-substrate adhesion, and the preparation method of the surface rough structure is high in cost and usually has a certain degree of damage to the ceramic layer. Therefore, the surface performance is difficult to stably maintain under the action of seawater immersion and erosion, which reduces the wear resistance and corrosion resistance of the surface. Therefore, in order to improve the durability of the corrosion resistance and wear resistance of the surface of titanium alloy material, it is necessary to explore a new surface treatment method. SUMMARY

[0005] The purpose of the present application is to provide a preparation method of a titanium alloy surface with a micro-nano scale rough structure and wear-resistant, corrosion-resistant and hydrophobic properties, which solves the problem that the titanium alloy surface is difficult to have wear-resistant, corrosion-resistant and hydrophobic properties in the prior art.

[0006] The technical scheme of the preparation method of the wear-resistant and corrosion-resistant hydrophobic titanium alloy surface with a micro-nano structure adopted by the present application is implemented according to the following steps:

[0007] Step 1, take titanium alloy for surface pretreatment, then prepare micron-sized pits on the surface of the titanium alloy after surface pretreatment by using the tungsten carbide particle embossing method;

[0008] Step 2, prepare an iron layer on the titanium alloy surface with micron-sized pits by using a surface treatment process to obtain a titanium alloy with an iron layer;

[0009] Step 3, high-temperature heat treatment of the titanium alloy with an iron layer to form an iron-titanium diffusion layer between the iron layer and the titanium alloy;

[0010] Step 4, carburizing treatment of the titanium alloy treated in step 3 to obtain a titanium alloy with an iron layer and a titanium carbide ceramic layer with a micro-nano hierarchical rough structure;

[0011] Step 5, removing the iron layer of the titanium alloy treated in step 4 by an etching solution to form a titanium alloy with a titanium carbide ceramic layer with a micro-nano hierarchical rough structure;

[0012] Step 6, preparing a fluorosilane solution with low surface energy, soaking the titanium alloy treated in step 5 in the fluorosilane solution, then taking out the soaked titanium alloy and placing it in an oven for constant temperature baking to finally obtain a micro-nano structured wear-resistant corrosion-resistant hydrophobic titanium alloy surface.

[0013] The present application also has the following characteristics:

[0014] The pretreatment in step 1 is polishing and polishing of the titanium alloy surface;

[0015] The tungsten carbide particle embossing method in step 1 is to use spherical tungsten carbide particles to form micron-sized pits on the titanium alloy surface under a pressure range of 60MPa-100MPa;

[0016] In step 2, the surface treatment process is one of physical vapor deposition, chemical vapor deposition, electroplating, and chemical plating;

[0017] The iron layer in step 2 has an iron element mass fraction range of 98%-99.9999% and an iron layer thickness of 1μm-30μm;

[0018] The high-temperature heat treatment in step 3 has a temperature range of 800℃-1100℃ and a holding time of 2h-8h;

[0019] In step 4, the carburizing treatment is any one of solid carburizing, gas carburizing, vacuum carburizing, and plasma carburizing, and the carburizing treatment has a temperature range of 850℃-1100℃ and a carburizing treatment time of 3h-10h;

[0020] The etching solution in step 5 is specifically a hydrochloric acid solution or a sulfuric acid solution, the mass fraction of hydrochloric acid in the hydrochloric acid solution is 18%-28%, and the mass fraction of sulfuric acid in the sulfuric acid solution is 45%-60%;

[0021] The fluorosilane solution in step 6 is any one of a perfluorodecyltriethoxysilane solution, an ethanol solution of 1H, 1H, 2H, 2H perfluorodecyltriethoxysilane, or a (3,3,3 trifluoropropyl) methyl dimethoxysilane solution, the concentration of the fluorosilane solution is 0.5wt%-5wt%, the soaking time is 1h-2h, the baking time is 20min-30min, and the oven temperature is 100℃-120℃.

[0022] The beneficial effects of the present application are:

[0023] (1) The micron-scale rough structure is realized by the method of particle imprinting, and has the advantages of high efficiency, low cost and convenient operation;

[0024] (2) The preparation of the nano-scale rough structure is realized by the principle of in-situ growth of dendritic TiC in the Ti-Fe element interdiffusion zone during carburizing. The surface dendritic TiC has good bonding force with the titanium alloy surface titanium carbide layer;

[0025] (3) The present application converts the titanium alloy surface into a ceramic layer by carburizing, so that the ceramic phase is precipitated in-situ, and the ceramic layer grows inwardly, having high bonding strength with the matrix;

[0026] (4) The titanium alloy surface generates a micro-nano rough structure composed of titanium carbide, which greatly improves the hydrophobic performance of the titanium alloy surface, realizes super-hydrophobicity, effectively improves the wear resistance and corrosion resistance of the titanium alloy surface, can be applied to special environments and fields, and has wide application prospects. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 is the preparation flow chart of the preparation method of the wear-resistant and corrosion-resistant hydrophobic titanium alloy surface with micro-nano structure of the present application.

[0028] Figure 2 is a schematic diagram of the titanium alloy surface after carburide particle imprinting in the preparation method of the wear-resistant and corrosion-resistant hydrophobic titanium alloy surface with micro-nano structure of the present application.

[0029] Figure 3 is a schematic diagram of the titanium alloy cross-sectional structure after carburide particle imprinting in the preparation method of the wear-resistant and corrosion-resistant hydrophobic titanium alloy surface with micro-nano structure of the present application.

[0030] Figure 4 is a schematic diagram of the titanium alloy cross-sectional structure after imprinting in the preparation method of the wear-resistant and corrosion-resistant hydrophobic titanium alloy surface with micro-nano structure of the present application.

[0031] Figure 5 is a titanium alloy cross-sectional structure schematic diagram after heat preservation treatment in the preparation method of the micro-nano structured wear-resistant corrosion-resistant hydrophobic titanium alloy surface of the present application.

[0032] Figure 6 is a titanium alloy cross-sectional structure schematic diagram after carburizing treatment in the preparation method of the micro-nano structured wear-resistant corrosion-resistant hydrophobic titanium alloy surface of the present application.

[0033] Figure 7 is a titanium alloy cross-sectional structure schematic diagram after corrosion removal of the iron layer in the preparation method of the micro-nano structured wear-resistant corrosion-resistant hydrophobic titanium alloy surface of the present application. DETAILED DESCRIPTION

[0034] The present application will be described in detail below in conjunction with the drawings and specific embodiments.

[0035] The preparation method of the micro-nano structured wear-resistant corrosion-resistant hydrophobic titanium alloy surface of the present application is specifically implemented according to the following steps:

[0036] Step 1, take titanium alloy for surface pretreatment, then use tungsten carbide particle embossing method to form micron-sized pits on the surface of the titanium alloy after surface pretreatment, to obtain titanium alloy with pits on the surface, specifically, a 10 μm thick PET double-sided adhesive is pasted on the surface of the titanium alloy, a layer of spherical tungsten carbide particles with a particle size of 50 μm-150 μm is adhered on the double-sided adhesive, and a tablet press is used to press under a pressure of 60 MPa-100 MPa. Then the surface tungsten carbide particles and PET adhesive are cleaned with alcohol to obtain titanium alloy with pits on the surface;

[0037] Step 2, use surface treatment process to prepare an iron layer on the titanium alloy with pits on the surface to obtain titanium alloy with pits and iron layer on the surface, the surface treatment process is one of physical vapor deposition, chemical vapor deposition, electroplating, and electroless plating, the mass fraction of iron in the iron layer ranges from 98% to 99.9999%, and the thickness of the iron layer ranges from 1 μm to 30 μm;

[0038] Step 3, high-temperature heat treatment is performed on the titanium alloy with pits and iron layer on the surface to diffuse titanium elements into the iron layer. The high-temperature heat treatment temperature ranges from 800℃ to 1100℃, and the heat preservation time ranges from 2h to 8h;

[0039] Step 4, carburizing treatment is performed on the titanium alloy with pits and iron layer on the surface after high-temperature heat treatment to obtain titanium alloy with iron layer and micro-nano hierarchical rough structure of titanium carbide ceramic layer; the carburizing temperature ranges from 850℃ to 1100℃, the carburizing time ranges from 3h to 10h, and preferably, the carburizing method adopts gas carburizing or solid carburizing, and the carburizing treatment temperature ranges from 950℃ to 1100℃;

[0040] Step 5, removing the surface iron layer obtained in step 4 by using an etching solution to obtain a titanium carbide ceramic layer with a micro-nano hierarchical rough structure on the titanium alloy surface. The etching solution is selected from hydrochloric acid solution and sulfuric acid solution, the mass fraction of hydrochloric acid in the hydrochloric acid solution is 18%-28%, and the mass fraction of sulfuric acid in the sulfuric acid solution is 45%-60%;

[0041] Step 6, preparing a fluorosilane solution with low surface energy, and immersing the titanium alloy with the titanium carbide ceramic layer having a micro-nano hierarchical rough structure on the surface in the fluorosilane solution for 1h-2h, and then placing it in a constant temperature oven for baking for 20min-30min, and the oven temperature is in the range of 100℃-120℃. The fluorosilane solution is one of perfluorodecyltriethoxysilane solution, 1H, 1H, 2H, 2H perfluorodecyltriethoxysilane ethanol solution, and (3, 3, 3-trifluoropropyl) methyl dimethoxysilane solution, the concentration of the fluorosilane solution is 0.5-5wt%, and the preferred fluorosilane solution is perfluorodecyltriethoxysilane solution.

[0042] In the present application, in step 1, the spherical structure and high hardness of tungsten carbide particles are utilized to adhere a single layer of particles on the titanium alloy surface by using PET double-sided tape, and a micron-level rough structure is formed under the action of pressure. In the high-temperature heat treatment process of step 3, titanium and iron elements fully diffuse to form a titanium-iron interdiffusion layer, and titanium elements are distributed in the iron layer in a gradient distribution. In the subsequent carburizing process of step 4, in the interdiffusion layer with a gradient distribution of titanium element concentration, titanium and carbon react in situ to grow titanium carbide with a dendritic micro-nano structure, and titanium in the substrate also reacts in situ to form a dense titanium carbide layer, realizing a rough surface with a micro-nano secondary structure. Moreover, the iron layer can improve the absorption efficiency of surface active carbon atoms and prevent oxidation during the gas / solid carburizing process.

[0043] Example 1:

[0044] The present example includes the following steps:

[0045] Step 1, prepare a Ti6Al4V titanium alloy substrate, first pretreat the titanium alloy surface, and then use tungsten carbide particle embossing method to prepare micron-level pits on the titanium alloy surface, specifically, attach a 10μm thick PET double-sided tape to the titanium alloy sample, adhere a layer of spherical tungsten carbide particles with a particle size of 50μm on the double-sided tape, and use a tablet press to press under a pressure of 60MPa for 10min. Then clean the surface of the tungsten carbide particles and PET glue with alcohol;

[0046] Step 2, use magnetron sputtering to prepare an iron layer on the titanium alloy surface with micron-level pits, the mass fraction of iron in the iron layer is 99.9999%, and the thickness of the iron layer is 1μm;

[0047] Step 3, high temperature heat treatment is performed on the titanium alloy with the pits and the iron layer on the surface, so that the titanium element diffuses into the iron layer. The high temperature heat treatment temperature is 800℃, and the holding time is 2h;

[0048] Step 4, carburizing treatment is performed on the titanium alloy with the pits and the iron layer on the surface after high temperature heat treatment, and the carburizing method is solid carburizing. The carburizing temperature is 850℃, and the carburizing time is 3h;

[0049] Step 5, the workpiece obtained in step 4 is immersed in a hydrochloric acid solution, and when there is no bubble, the workpiece is taken out, the iron layer is completely removed, and the ceramic layer is exposed on the surface, and finally a titanium carbide ceramic layer with a micro-nano hierarchical rough structure is obtained;

[0050] Step 6, a 0.5wt% perfluorodecyltriethoxysilane solution is prepared, the titanium alloy with the titanium carbide ceramic layer with a micro-nano hierarchical rough structure on the surface is soaked in the solution for 1h, and then it is placed in a constant temperature oven for baking for 20min, and the oven temperature is 100℃.

[0051] Example 2:

[0052] This example includes the following steps:

[0053] Step 1, a Ti6Al4V titanium alloy substrate is prepared, and the titanium alloy is first subjected to surface pretreatment. Micron-level pits are prepared on the surface of the titanium alloy after surface pretreatment by using a tungsten carbide particle embossing method. Specifically, a 10μm thick PET double-sided adhesive is attached to the titanium alloy sample, and a layer of spherical tungsten carbide particles with a particle size of 150μm is adhered on the double-sided adhesive. A tablet press is used to press under a pressure of 100MPa for 10min. Then the surface tungsten carbide particles and PET adhesive are cleaned with alcohol;

[0054] Step 2, an iron layer is prepared on the titanium alloy surface with micron-level pits by electroplating method. The mass fraction of iron element in the iron layer is 98%, and the thickness of the iron layer is 30μm;

[0055] Step 3, high temperature heat treatment is performed on the titanium alloy with the pits and the iron layer on the surface, so that the titanium element diffuses into the iron layer. The high temperature heat temperature is 1100℃, and the holding time is 8h;

[0056] Step 4, the workpiece after high temperature heat treatment is placed in a carburizing furnace, and carburizing medium kerosene, toluene, methanol, ethanol gas is introduced, and carburizing treatment is performed. The carburizing temperature is 1100℃, and the carburizing time is 10h;

[0057] Step 5, the workpiece obtained in step 4 is immersed in a hydrochloric acid solution, and when there is no bubble, the workpiece is taken out, the iron layer is completely removed, and the ceramic layer is exposed on the surface, and finally a titanium carbide ceramic layer with a micro-nano hierarchical rough structure is obtained;

[0058] Step 6, prepare a 5wt% solution of 1H, 1H, 2H, 2H perfluorodecyltriethoxysilane in ethanol, immerse the titanium alloy with the titanium carbide ceramic layer having a micro-nano hierarchical rough structure on the surface in the solution for 2h, and then place it in a constant temperature oven for baking for 30min, with the oven temperature being 120℃.

[0059] Example 3:

[0060] The present example includes the following steps:

[0061] Step 1, prepare a Ti substrate, first perform surface pretreatment, and then use a tungsten carbide particle embossing method to prepare micro-scale pits on the titanium surface after surface pretreatment, specifically, attach a 10μm thick PET double-sided adhesive to the titanium alloy sample, and then adhere a layer of spherical tungsten carbide particles with a particle size of 100μm on the double-sided adhesive, and then use a tablet press to press under a pressure of 80MPa for 10min. Subsequently, use alcohol to clean the surface of the tungsten carbide particles and the PET adhesive;

[0062] Step 2, use an electroplating method to prepare an iron layer on the titanium alloy surface with micro-scale pits, with the mass fraction of iron in the iron layer being 98%, and the thickness of the iron layer being 20μm;

[0063] Step 3, perform high-temperature heat treatment on the titanium alloy with pits and an iron layer on the surface, so that titanium elements diffuse into the iron layer. The high-temperature heat treatment temperature is 950℃, and the holding time is 4h;

[0064] Step 4, perform carburizing treatment on the titanium alloy with pits and an iron layer on the surface after high-temperature heat treatment, and the carburizing method is solid carburizing, with the carburizing temperature being 950℃ and the carburizing time being 5h;

[0065] Step 5, immerse the workpiece obtained in step 4 in a hydrochloric acid solution, and when no bubbles come out, take out the workpiece, the iron layer is completely removed, and the ceramic layer is exposed on the surface, and finally a titanium carbide ceramic layer having a micro-nano hierarchical rough structure is obtained;

[0066] Step 6, prepare a 2wt% perfluorodecyltriethoxysilane solution, immerse the titanium alloy with the titanium carbide ceramic layer having a micro-nano hierarchical rough structure on the surface in the solution for 1.5h, and then place it in a constant temperature oven for baking for 25min, with the oven temperature being 110℃.

[0067] Example 4:

[0068] The present example includes the following steps:

[0069] Step 1, a piece of Ti-3Al-2V substrate is prepared, the titanium alloy is first surface pretreated, and a microscale pit is prepared on the surface of the surface pretreated titanium alloy by using a tungsten carbide particle embossing method. Specifically, a 10 μm thick PET double-sided adhesive is attached to the titanium alloy sample, a layer of spherical tungsten carbide particles with a particle size of 100 μm is adhered on the double-sided adhesive, and a tablet press is used under the action of a pressure of 80 MPa for 10 min. Then the surface tungsten carbide particles and PET glue are cleaned with alcohol;

[0070] Step 2, an iron layer is prepared on the titanium alloy surface with microscale pits by using an electroplating method, the mass fraction of iron element in the iron layer is 98%, and the thickness of the iron layer is 20 μm;

[0071] Step 3, the titanium alloy with pits and iron layer on the surface is subjected to high temperature heat treatment, so that the titanium element diffuses into the iron layer. The high temperature heat treatment temperature is 950℃, and the holding time is 4h;

[0072] Step 4, the titanium alloy with pits and iron layer on the surface after high temperature heat treatment is subjected to carburizing treatment, the carburizing method adopts solid carburizing, the carburizing temperature is 950℃, and the carburizing time is 5h;

[0073] Step 5, the workpiece obtained in step 4 is immersed in a hydrochloric acid solution, and when there is no bubble, the workpiece is taken out, the iron layer is completely removed, the ceramic layer is exposed on the surface, and finally a titanium carbide ceramic layer with micro-nano hierarchical rough structure is obtained;

[0074] Step 6, a 3wt% perfluorodecyltriethoxysilane solution is prepared, the titanium alloy with micro-nano hierarchical rough structure on the surface of the titanium carbide ceramic layer is soaked in the solution for 2h, and then it is placed in a constant temperature oven for baking for 30 min, and the oven temperature is 120℃.

[0075] Example 5:

[0076] The present example includes the following steps:

[0077] Step 1, a piece of Ti-6Al-4V substrate is prepared, the titanium alloy is first surface pretreated, and a microscale pit is prepared on the surface of the surface pretreated titanium alloy by using a tungsten carbide particle embossing method. Specifically, a 10 μm thick PET double-sided adhesive is attached to the titanium alloy sample, a layer of spherical tungsten carbide particles with a particle size of 50 μm is adhered on the double-sided adhesive, and a tablet press is used under the action of a pressure of 60 MPa for 10 min. Then the surface tungsten carbide particles and PET glue are cleaned with alcohol;

[0078] Step 2, an iron layer is prepared on the titanium alloy surface with microscale pits by using an electroplating method, the mass fraction of iron element in the iron layer is 98%, and the thickness of the iron layer is 20 μm;

[0079] Step 3, high-temperature heat treatment is performed on the titanium alloy with the pits and the iron layer on the surface, so that the titanium element diffuses into the iron layer. The high-temperature heat treatment temperature is 1000℃, and the holding time is 4h;

[0080] Step 4, the titanium alloy with the pits and the iron layer on the surface after high-temperature heat treatment is subjected to carburizing treatment, the carburizing method adopts solid carburizing, the carburizing temperature is 1000℃, and the carburizing time is 5h;

[0081] Step 5, the workpiece obtained in step 4 is immersed in a hydrochloric acid solution, and when no bubbles come out, the workpiece is taken out, the iron layer is completely removed, the ceramic layer is exposed on the surface, and finally a titanium carbide ceramic layer with a micro-nano hierarchical rough structure is obtained;

[0082] Step 6, a 4wt% perfluorodecyltriethoxysilane solution is prepared, the titanium alloy with the titanium carbide ceramic layer with a micro-nano hierarchical rough structure on the surface is soaked in the solution for 2h, and then is placed in a constant-temperature oven for baking for 20min, and the oven temperature is 120℃.

[0083] Performance test:

[0084] (1) Hardness: the microhardness of the above case is determined by Vickers microhardness. Among them, the load is 50g, the indenter is a conical indenter, and the holding time is 10s;

[0085] (2) Contact angle: the contact angle of the sample surface is tested by using a contact angle measuring instrument, and the droplet volume is 5μL;

[0086] (3) Salt spray resistance: according to GB / T17712007, the concentration of sodium chloride is 60g / L, the temperature is 35℃, and the pH is 7.

[0087] The titanium alloy surface with micro-nano structure and wear-resistant hydrophobic prepared in the embodiments 1-5 is subjected to related performance test, and the test results are as follows:

[0088] Item Surface hardness Contact angle (°) Salt spray resistance (60 d) Example 1 2300 HV 162 No rusting Example 2 2550 HV 152 No rusting Example 3 2450 HV 157 No rusting Example 4 2400 HV 158 No rusting Example 5 2450 HV 160 No rusting

[0089] The preparation method of the titanium alloy surface with micro-nano structure, wear-resistant and corrosion-resistant and hydrophobic prepared by the application can prepare a titanium alloy with a durable super-hydrophobic surface. The micro-nano structure titanium carbide surface obtained by embossing combined with carburizing has an average hardness of 2400HV, and the hardness is greatly improved, so that good wear-resistant effect can be achieved. The water contact angle of the prepared titanium alloy surface is greater than 150°, which has excellent hydrophobic performance. And the dense titanium carbide has good corrosion resistance, and no rust phenomenon appears in the test.

Claims

1. A method for preparing a wear-resistant corrosion-resistant hydrophobic titanium alloy surface with micro-nano structures, characterized in that, The method is implemented according to the following steps: Step 1, taking a titanium alloy for surface pretreatment, and then preparing an iron layer on the surface of the titanium alloy after surface pretreatment Micron-sized pits are prepared by a tungsten carbide particle embossing method. Step 2, an iron layer is prepared on the titanium alloy surface with micron-sized pits by a surface treatment process to obtain a titanium alloy with an iron layer; Step 3, the titanium alloy with the iron layer is subjected to high-temperature heat treatment to form an iron-titanium diffusion layer between the iron layer and the titanium alloy; Step 4, the titanium alloy after step 3 is subjected to carburizing treatment to obtain a titanium alloy with an iron layer and a titanium carbide ceramic layer with a micro-nano hierarchical rough structure; Step 5, the titanium alloy after step 4 is removed from the iron layer by an etching solution to form a titanium alloy with a titanium carbide ceramic layer with a micro-nano hierarchical rough structure; Step 6, a fluorosilane solution with low surface energy is prepared, the titanium alloy after step 5 is soaked in the fluorosilane solution, then the soaked titanium alloy is taken out and placed in an oven for constant temperature baking, and finally a titanium alloy surface with micro-nano structure, wear resistance, corrosion resistance and hydrophobicity is obtained; The etching solution in step 4 is specifically a hydrochloric acid solution or a sulfuric acid solution, the mass fraction of hydrochloric acid in the hydrochloric acid solution is 18%-28%, and the mass fraction of sulfuric acid in the sulfuric acid solution is 45%-60%. The fluoro-silane solution described in Step 6 is a perfluorodecyltriethoxysilane solution, a 1H, 1H, 2H, 2H one of a perfluorodecyltriethoxysilane solution in ethanol, a (3,3,3-trifluoropropyl)methyldimethoxysilane solution, the fluoro-silane solution having a concentration of 0.5 wt% to 5 wt%, the soaking time being 1 h to 2 h, the temperature of the constant temperature baking being in the range of 100°C to 120°C, and the constant temperature baking time being 20 min to 30 min.

2. The method for preparing the wear-resistant and corrosion-resistant hydrophobic titanium alloy surface with micro-nano structures according to claim 1, characterized in that, The surface pretreatment in step 1 is polishing and polishing of the titanium alloy surface.

3. The method for preparing a wear-resistant, corrosion-resistant, hydrophobic titanium alloy surface with a micro / nano structure according to claim 1, characterized in that, The tungsten carbide particle embossing method in step 1 is specifically that a 10 μm thick PET double-sided adhesive is attached to the titanium alloy surface, a layer of spherical tungsten carbide particles with a particle size of 50 μm-150 μm is adhered on the double-sided adhesive, and a tablet press is used to press under a pressure of 60 MPa-100 MPa, and then the surface is cleaned with alcohol to remove the tungsten carbide particles and PET adhesive, and a titanium alloy with pits on the surface is obtained.

4. The method for preparing the wear-resistant and corrosion-resistant hydrophobic titanium alloy surface with micro-nano structures according to claim 1, characterized in that, In step 2, the surface treatment process is one of physical vapor deposition, chemical vapor deposition, electroplating, and chemical plating.

5. The method for preparing the wear-resistant and corrosion-resistant and hydrophobic titanium alloy surface with micro-nano structures according to claim 1, characterized in that, The mass fraction of iron in the iron layer in step 2 is 98%-99.9999%, and the thickness of the iron layer is 1 μm-30 μm.

6. The method for preparing the wear-resistant and corrosion-resistant and hydrophobic titanium alloy surface with micro-nano structures according to claim 1, characterized in that, The high-temperature heat treatment temperature in step 3 is 800℃-1100℃, and the high-temperature heat treatment time is 2h-8h.

7. The method for preparing the wear-resistant and corrosion-resistant and hydrophobic titanium alloy surface with micro-nano structures according to claim 1, characterized in that, The carburizing treatment in step 3 is any one of solid carburizing, gas carburizing, vacuum carburizing, and plasma carburizing, the carburizing treatment temperature is 850℃-1100℃, and the carburizing treatment time is 3h-10h.

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