A magnetic domain imaging device and method

Abstract

The present invention discloses a magnetic domain imaging device and method, belonging to the technical field of magnetic domain imaging, and is used to solve the technical problem that the existing magnetic domain imaging equipment cannot meet the different detection requirements of the object to be measured. The device includes: a light source, a digital micromirror device, a polarizer, an analyzer, a camera, and a lens assembly; the light emitted from the light source is incident on the digital micromirror device; the light reflected from at least some of the preset reflection units of the digital micromirror device can be incident on different positions of the lens assembly; the polarizer is arranged in the optical path between the light source and the lens assembly; the measured surface of the object to be measured is located on the focal plane of the lens assembly; the lens assembly is arranged in the incident optical path and the reflection optical path of the object to be measured; the light reflected by the object to be measured enters the camera after passing through at least the lens assembly and the analyzer. In the optical path structure of the magnetic domain imaging device of the present invention, a DMD is added, and by adjusting the actual reflection area or reflection unit on the DMD, it is realized that the detection light reaches the object to be measured in different incident directions and incident angles.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetic domain imaging, and in particular, to a magnetic domain imaging device and method. Background Art

[0002] Magnetic domain imaging mainly detects the change in the polarization direction caused by the Kerr effect after a polarized light beam is reflected from the surface of the object to be measured, and observes the magnetic domain by detecting the change in the polarization direction. In current magnetic domain imaging devices, the detection light emitted from the light source passes through a polarizer, an objective lens and other lens groups and then reaches the object to be measured. The light reflected by the object to be measured passes through the objective lens and other lens groups and a analyzer and then enters the camera, so that the camera captures a magnetic domain image, and thus magnetic domain observation is carried out.

[0003] In some cases, for the magnetic domain state of the object to be measured, it is necessary to select to use the polar magneto-optical Kerr effect and the longitudinal magneto-optical Kerr effect to image the object to be measured. The polar magneto-optical Kerr effect requires the incident light to be perpendicularly incident on the object to be measured to obtain a better imaging effect, and the longitudinal Kerr effect requires the incident light to be obliquely incident on the object to be measured and the incident plane of the incident light to be parallel to the magnetic domain direction of the object to be measured to obtain a better imaging effect. When the magnetic domain state of the object to be measured is not clear, it is necessary to adjust the optical path of the incident light multiple times to meet the imaging requirements.

[0004] In the existing magnetic domain imaging devices, after the positions of the light source and the object to be measured are fixed, the detection light emitted by the light source can only reach the object to be measured in a fixed incident direction or incident plane, and cannot arbitrarily adjust or change the incident direction or incident angle of the detection light, and cannot meet the different detection requirements of the object to be measured. Even by adjusting the position of the light source to change the incident direction or incident angle, on the one hand, it is necessary to realign the optical path, the operation is complex, and the optical path alignment requires high precision and takes a long adjustment time. On the other hand, adjusting the position of the light source once can only change the incident plane or incident direction once. If it is necessary to continue to change, it is necessary to continue to adjust the position of the light source, resulting in low efficiency in changing the incident plane or incident method. Summary of the Invention

[0005] Embodiments of the present invention provide a magnetic domain imaging device and method, which are used to solve the following technical problems: the existing magnetic domain imaging devices cannot meet the different detection requirements of the object to be measured.

[0006] Embodiments of the present invention adopt the following technical solutions:

[0007] On the one hand, an embodiment of the present invention provides a magnetic domain imaging device, which includes: a light source, a digital micromirror device, a polarizer, an analyzer, a camera, and a lens assembly; the light emitted from the light source is incident on the digital micromirror device; the light reflected from at least some of the preset reflection units of the digital micromirror device can be incident on different positions of the lens assembly; the polarizer is disposed in the optical path between the light source and the lens assembly; the measured surface of the object to be measured is located in the focal plane of the lens assembly; the lens assembly is disposed in the incident optical path and the reflection optical path of the object to be measured; the light reflected by the object to be measured enters the camera after passing through at least the lens assembly and the analyzer.

[0008] In a feasible embodiment, the device further includes at least one of a prism assembly or a mirror assembly; the light emitted from the light source is reflected by at least one of the prism assembly or the mirror assembly to the digital micromirror device, or the light reflected by the digital micromirror device is reflected by at least one of the prism assembly or the mirror assembly to the lens assembly.

[0009] In a feasible embodiment, the device further includes a beam splitter disposed between the digital micromirror device and the lens assembly; the light reflected from the reflection unit of the digital micromirror device passes through the beam splitter and irradiates the lens assembly, and the light reflected by the object to be measured is reflected by the beam splitter to the camera on the split optical path.

[0010] In a feasible embodiment, the device further includes a light trap assembly, and the light reflected from at least some of the preset reflection units of the digital micromirror device enters the light trap assembly.

[0011] On the other hand, an embodiment of the present invention further provides a magnetic domain imaging method, which includes:

[0012] Incident the detection light generated by the light source on the digital micromirror device;

[0013] Adjust the digital micromirror device to reflect the detection light through different reflection units, so that at least some of the detection light is incident on different positions of the lens assembly, thereby reaching the object to be measured at different incident directions and / or different incident angles, and obtaining a magnetic domain image through the camera.

[0014] In a feasible implementation manner, the method further includes: adjusting the digital micromirror device to form a first reflection area, reflecting the detection light through the first reflection area, so that the detection light reaches the object to be measured by passing through the first position of the lens assembly at a first incident direction and a first incident angle; adjusting the digital micromirror device to form a second reflection area, where the first reflection area and the second reflection area at least partially do not overlap, reflecting the detection light through the second reflection area, so that the detection light reaches the object to be measured by passing through the second position of the lens assembly at a second incident direction and a second incident angle, the second position does not coincide with the first position, the second incident direction is different from the first incident direction, and the second incident angle is different from the first incident angle, so that the magnetic domain imaging device obtains magnetic domain images of the object to be measured at different incident directions and different incident angles.

[0015] In a feasible implementation manner, the method further includes: adjusting the digital micromirror device to reflect the detection light through a third reflection area, so that the detection light reaches the object to be measured at a first incident angle and a third incident direction, so that the magnetic domain imaging device obtains magnetic domain images of the object to be measured at the same incident angle and different incident directions; wherein, the third reflection area and the first reflection area at least partially do not overlap, and the third incident direction is different from the first incident direction.

[0016] In a feasible implementation manner, the method further includes: adjusting the digital micromirror device to reflect the detection light through a fourth reflection area, so that the detection light reaches the object to be measured at a first incident direction and a third incident angle, so that the magnetic domain imaging device obtains magnetic domain images of the object to be measured at the same incident direction and different incident angles; wherein, the fourth reflection area and the first reflection area at least partially do not overlap, and the third incident angle is different from the first incident angle.

[0017] In a feasible implementation manner, the method further includes: adjusting the digital micromirror device to reflect the detection light so that the incident surface of the detection light after reaching the object to be measured is parallel to the magnetic domain direction of the object to be measured.

[0018] In a feasible implementation manner, the method further includes: adjusting the lens assembly to at least change the numerical aperture of the lens assembly to adjust the incident angle of the detection light on the object to be measured. Specifically, by adjusting the numerical aperture of the lens assembly, a matching incident angle adjustment range can be formed, or the incident angle of the light incident on the object to be measured can be changed; after adjusting the numerical aperture, in some cases, it is also necessary to make corresponding adjustments to the overall optical path so that the light incident on the object to be measured can converge on the measured surface of the object to be measured.

[0019] Compared with the prior art, a magnetic domain imaging device and method provided by an embodiment of the present invention have the following beneficial effects:

[0020] 1) In the optical path structure of the magnetic domain imaging device, the present invention adds a digital micromirror device (DMD) and modifies the optical path structure. By adjusting the actual reflection area or reflection unit on the DMD for reflecting the detection light, it is possible to make the detection light reach the object to be measured at different incident directions and incident angles. This magnetic domain imaging device only needs to adjust the DMD to arbitrarily change the incident direction or incident angle of the detection light, so as to meet different detection requirements of the object to be measured, without adjusting the position of the light source and the position of the object to be measured.

[0021] 2) The digital micromirror device (DMD) is adopted in the present invention, making the optical path alignment faster and the alignment operation simpler. On the one hand, it is because the response speed of the digital micromirror device (DMD) is extremely fast, and it can quickly adjust and change the reflection area to align the optical path. On the second hand, when aligning the optical path, if the reflection area of the DMD is adjusted, there is no need to adjust other optical devices on the incident optical path of the DMD anymore. The alignment of the optical path can be achieved only by adjusting the DMD, and the operation is simpler and faster. On the third hand, the illumination optical path only needs to irradiate on the reflective surface of the DMD, without needing to align to a precise point, reducing the installation accuracy of the optical path.

[0022] 3) The detection light in the present invention can be adjusted within a certain range of incident angles and within any range of incident planes, improving the detectable range of magnetic domain imaging and enabling different types of imaging of the object to be measured without moving or rotating the object to be measured. Description of the Drawings

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments recorded in the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings. In the drawings:

[0024] Figure 1 It is a schematic diagram of the optical path structure of a magnetic domain imaging device provided by an embodiment of the present invention;

[0025] Figure 2 It is a schematic diagram of adjusting the incident angle provided by an embodiment of the present invention;

[0026] Figure 3 It is a schematic diagram of adjusting the incident direction provided by an embodiment of the present invention;

[0027] Figure 4 It is a flowchart of a magnetic domain imaging method provided by an embodiment of the present invention.

[0028] Description of the Reference Numerals:

[0029] 1. Light source; 2. Optical fiber; 3. Collimator; 4. Polarizer; 5. Digital micromirror device DMD; 6. Prism assembly; 7. Light trap; 8. Beam splitter; 9. Objective lens; 10. Object to be measured; 11. Analyzer; 12. Lens assembly; 13. Camera; 14. Detection light; 15. Exit light range of objective lens 9; 16. Illumination spot. Detailed implementation mode

[0030] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of this specification, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0031] The embodiment of the present invention provides a magnetic domain imaging device. Figure 1 For the optical path structure diagram of a magnetic domain imaging device provided by an embodiment of the present invention, as Figure 1 shown, the magnetic domain imaging device of the present invention at least includes: a light source 1, a digital micromirror device DMD 5, a polarizer 4, an analyzer 11, a camera 13, and a lens assembly.

[0032] Among them, the light source 1 is used to provide detection light for the magnetic domain imaging device. The lens assembly includes a beam splitter 8 and an objective lens 9.

[0033] The polarizer 4 is arranged in the optical path between the light source 1 and the lens assembly, and is used to convert the detection light emitted by the light source 1 into polarized light.

[0034] An optical fiber 2 and a collimator 3 are also arranged between the light source 1 and the polarizer 4. The optical fiber 2 is used to transmit the detection light and make the detection light exit at the output structure of the optical fiber 2. The collimator 3 is used to convert the light output by the optical fiber 2 into a parallel beam, ensuring that the light incident on the digital micromirror device DMD 5 is parallel light, so that the light reflected by different reflection regions of the digital micromirror device DMD 5 is substantially parallel to each other.

[0035] The digital micromirror device DMD 5 is used to reflect the detection light emitted from the light source 1 using different reflection units. The light reflected from at least part of the preset reflection units of the digital micromirror device DMD 5 can be incident on different positions of the lens assembly.

[0036] Specifically, the detection light output from the polarizer 4 (the detection light at this time is polarized light) is transmitted to the digital micromirror device DMD5. Specifically, at least one of the prism assembly 6 and the mirror assembly can be used to adjust the incident or outgoing light path of the digital micromirror device DMD5 to facilitate the layout of the light path. Specifically, the light emitted from the light source can be reflected to the digital micromirror device DMD5 by at least one of the prism assembly or the mirror assembly, or it can be configured that the light reflected by the digital micromirror device DMD5 is reflected to the lens assembly by at least one of the prism assembly 6 or the mirror assembly.

[0037] The digital micromirror device DMD5 is composed of many small reflective mirror surfaces, and each mirror surface is called a pixel. Each mirror surface can deflect ±12° around the diagonal of each small mirror in each positive direction. Through different control signals, the "on" and "off" states of each small reflective mirror surface on the digital micromirror device DMD5 can be controlled. Therefore, when a given control signal sequence is written into the circuit of the digital micromirror device DMD5, the position of the area on the digital micromirror device DMD5 that actually generates the reflection function can be controlled, so as to realize the reflection of the incident light to the lens assembly by the reflection units in the preset area, while other areas do not reflect or reflect in other directions.

[0038] The beam splitter 8 and the objective lens 9 can form a lens assembly arranged in the incident light path of the object to be measured. The light reflected from different reflection areas (the reflection area includes at least one reflection unit) of the digital micromirror device DMD5 is generally parallel and can be incident on different positions of the objective lens 9 respectively, so as to reach the substantially same position of the object to be measured 10 with different incident surfaces or incident directions.

[0039] In one embodiment, when performing magnetic domain imaging on the object to be measured 10, by adjusting and changing the reflection area on the digital micromirror device DMD5 for reflecting the detection light, the detection light can be incident on different positions of the objective lens 9, so as to realize that the detection light reaches the object to be measured 10 at different incident angles. Figure 2 It is a schematic diagram of adjusting the incident angle provided by the embodiment of the present invention. As Figure 2 shown, when the detection light 14 is reflected from the illustrated position of the digital micromirror device DMD5 and passes through the prism assembly 6 and the beam splitter 8 and is vertically incident on the illustrated position of the objective lens 9, the objective lens 9 is a convex lens. When the light falls on different positions of the objective lens 9, the refractive index of the lens is different, and the generated refraction angle is different, and the detection light will be refracted to the object to be measured 10 at different angles. Therefore, by adjusting the outgoing position of the detection light 14 on the digital micromirror device DMD5, the incident angle of the object to be measured can be changed.

[0040] It should be noted that the measured surface of the object to be measured 10 is located on the focal plane of the objective lens 9 in the lens assembly. No matter how the incident angle of the detection light 14 is adjusted, the detection light 14 can be focused on the object to be measured 10.

[0041] In another embodiment, Figure 3 FIG. is a schematic diagram of adjusting the incident direction provided by an embodiment of the present invention. As Figure 3 shown, the outgoing light range 15 of the objective lens 9 is a circular plane. L1, L2, L3, and L4 are respectively the refracted light rays of the detection light incident on different positions of the objective lens 9. Among them, L1 is vertically incident, L2 and L3 have the same incident direction but different incident angles, and L3 and L4 have different incident directions and incident angles. When these four light rays respectively form illumination spots 16 on the object to be measured, they have different incident directions and / or incident angles. Thus, it is possible to change the incident angle or the incident direction when the detection light 14 is incident on the object to be measured 10. Moreover, any adjustment of the incident angle or the incident direction can be achieved, so as to meet different detection requirements of the object to be measured 10. In addition, in the optical path structure of the present invention, due to the adoption of the digital micromirror device DMD5, the difficulty of optical path alignment can also be reduced. For the optical path before the digital micromirror device DMD5, it is only necessary to make the detection light output by the optical fiber 2 irradiate on the digital micromirror device DMD5, instead of manually adjusting the position of the light source and the corresponding optical devices to align the optical path like a traditional magnetic domain imaging device, which greatly reduces the difficulty of optical path alignment.

[0042] Furthermore, the magnetic domain imaging device further includes:

[0043] A polarizer 11, and the light reflected from the object to be measured 10 is incident on the polarizer 11 after passing through the objective lens 9 and the beam splitter 8. Finally, it enters the camera 13 through the lens assembly 12, and the magnetic domain image is obtained by the camera 13.

[0044] An optical trap 7, which is arranged on the outgoing optical path of the digital micromirror device DMD5, can be used to absorb the stray light reflected from other reflection regions / units of the digital micromirror device DMD5, so as to avoid the stray light acting on the object to be measured and affecting the imaging effect. Here, the other reflection regions / units refer to the remaining reflection regions / units in the digital micromirror device DMD5 except those set to reflect the detection light. Specifically, the optical trap assembly can be an independent optical trap device or component, or a structure arranged in the optical path structure to prevent light from entering the optical path from the light source to the camera, such as setting light-absorbing materials at positions such as the optical structure or the bracket, or realizing the approximate function of the optical trap by setting the position of the optical element. For example, making the stray light propagate into the environment outside the optical path.

[0045] In summary, in Figure 1 it is composed of a light source 1, an optical fiber 2, a collimator 3, a polarizer 4, a prism assembly 6, a digital micromirror device DMD5, a beam splitter 8, and an objective lens 9 to form the incident optical path of the object to be measured 10. The beam splitter 8 and the objective lens 9, the polarizer 11, the lens assembly 12, and the camera 13 form the outgoing optical path of the object to be measured 10.

[0046] The detection light emitted from the light source 1 is incident on the digital micromirror device DMD5 after passing through the optical fiber 2, the collimator 3, the polarizer 4, and the prism assembly 6. After being reflected by different reflection regions on the digital micromirror device DMD5, it is incident on different positions of the beam splitter 8 and the objective lens 9, and finally reaches the object to be measured 10 at different incident angles or incident directions. The light reflected from the object to be measured 10 passes through the objective lens 9 to reach the beam splitter 8, and after being split by the beam splitter 8, it reaches the analyzer 11 and the lens assembly 12 and then enters the camera 13, enabling the camera 13 to obtain magnetic domain images at different incident angles or incident directions, so as to meet various different detection requirements of the object to be measured 10.

[0047] It should be noted that Figure 1 The optical path structure shown in [the figure] is only for illustrative purposes and is not used to limit the optical path structure of the present invention. During actual use, the positions / orders of optical devices such as the optical fiber 2 and the polarizer 4 on the incident optical path of the object to be measured can be swapped, and the number or types of optical devices in the optical path structure can also be replaced or deleted according to actual situations, as long as it can ensure that the detection light emitted by the light source assembly is incident on the digital micromirror device DMD5, and is reflected by different reflection regions of the digital micromirror device DMD5 to different positions of the objective lens 9, so as to change the incident direction or incident plane of the object to be measured 10 and then be imaged by the camera 13.

[0048] Figure 4 This is a flowchart of a magnetic domain imaging method with light source coupling provided by the present invention. As Figure 4 shown, the magnetic domain imaging method in the present invention at least includes the following execution steps:

[0049] S101: Incident the detection light generated by the light source on the digital micromirror device.

[0050] S102: Adjust the digital micromirror device to reflect the detection light through different reflection units, so that at least part of the detection light passes through and is incident on different positions of the lens assembly, so as to reach the object to be measured at different incident directions and / or different incident angles.

[0051] S103: Obtain the magnetic domain image through the camera.

[0052] The detection light emitted from the light source 1 exits the optical fiber 2 and enters the collimator 3 and the polarizer 4, and then enters the digital micromirror device DMD5 through the prism assembly 6. After the detection light is reflected by different reflection regions on the digital micromirror device DMD5 (one reflection region includes at least one reflection unit, and here the reflection unit can be understood as the micro-reflection mirror surface on the digital micromirror device DMD5), the detection light enters the object to be measured 10 at different positions of the beam splitter 8 and the objective lens 9. When the detection light enters the objective lens 9 at different positions, the incident direction or the incident angle when the detection light enters the object to be measured 10 is different. The light reflected from the object to be measured 10 enters the camera 13 after passing through the objective lens 9, the beam splitter 8, the analyzer 11, and the lens assembly 12, enabling the camera 13 to obtain a magnetic domain image. During this process, the incident angle or the incident direction of the detection light when it enters the object to be measured 10 can be adjusted arbitrarily, and the detection light can be adjusted arbitrarily within a certain incident angle range and within an arbitrary incident plane range, improving the detectable range and meeting different detection requirements for the object to be measured 10.

[0053] In the first feasible implementation mode, as Figure 2 shown, the digital micromirror device DMD5 is adjusted to form a first reflection region, and the detection light is reflected by the first reflection region, so that the detection light reaches the object to be measured through the first position of the incident objective lens 9 with a first incident direction and a first incident angle, and the light reflected from the object to be measured 10 is received by the camera 13 to generate a first magnetic domain image. The digital micromirror device DMD5 is continuously adjusted to form a second reflection region, and at least part of the first reflection region does not coincide with the second reflection region. Then the detection light is reflected by the second reflection region, so that the detection light passes through the second position of the incident objective lens 9 and reaches the object to be measured with a second incident direction and a second incident angle, and the light reflected from the object to be measured 10 is received by the camera 13 to generate a second magnetic domain image. Among them, the second position does not coincide with the first position, the second incident direction is different from the first incident direction, and the second incident angle is different from the first incident angle. So that the magnetic domain imaging device obtains the first magnetic domain image and the second magnetic domain image of the object to be measured 10 at different incident directions and different incident angles.

[0054] In the second feasible implementation mode, as Figure 2As shown in the figure, the digital micromirror device DMD5 is adjusted to form a first reflection area. The detection light is reflected by the first reflection area, so that the detection light reaches the object to be measured through the first position of the incident objective lens 9 at a first incident direction and a first incident angle, and the light reflected by the object to be measured 10 is received by the camera 13 to generate a first magnetic domain image. The digital micromirror device DMD5 is continuously adjusted to reflect the detection light through a third reflection area, so that the detection light reaches the object to be measured at the first incident angle and a third incident direction, and the light reflected by the object to be measured 10 is received by the camera 13 to generate a third magnetic domain image. Among them, at least part of the third reflection area does not coincide with the first reflection area, and the third incident direction is different from the first incident direction. The magnetic domain imaging device obtains the first magnetic domain image and the third magnetic domain image of the object to be measured 10 at the same incident angle and different incident directions.

[0055] In the third feasible implementation mode, as Figure 2 shown in the figure, the digital micromirror device DMD5 is adjusted to form a first reflection area. The detection light is reflected by the first reflection area, so that the detection light reaches the object to be measured through the first position of the incident objective lens 9 at a first incident direction and a first incident angle, and the light reflected by the object to be measured 10 is received by the camera 13 to generate a first magnetic domain image. The digital micromirror device DMD5 is continuously adjusted to reflect the detection light through a fourth reflection area, so that the detection light reaches the object to be measured 10 at the first incident direction and a third incident angle, and the light reflected by the object to be measured 10 is received by the camera 13 to generate a fourth magnetic domain image. Among them, at least part of the fourth reflection area does not coincide with the first reflection area, and the third incident angle is different from the first incident angle. The magnetic domain imaging device obtains the first magnetic domain image and the fourth magnetic domain image of the object to be measured at the same incident direction and different incident angles.

[0056] In the fourth feasible implementation mode, the digital micromirror device DMD5 is adjusted to reflect the detection light, that is, the incident angle and incident direction of the detection light reaching the object to be measured 10 are adjusted until the incident plane of the detection light after reaching the object to be measured is parallel to the magnetic domain direction of the object to be measured, so as to realize the longitudinal magneto-optical Kerr effect. The digital micromirror device DMD5 is adjusted to reflect the detection light until the incident angle of the detection light reaching the object to be measured 10 is 90 degrees and perpendicularly incident on the object to be measured 10, so as to realize the polar magneto-optical Kerr effect.

[0057] It should be noted that the above four feasible implementation modes are only exemplary descriptions, which are related implementation modes listed for easy understanding, not an exhaustive list, nor are they used to limit the application scope of this solution. Those skilled in the art can adjust the reflection area of the digital micromirror device DMD at will according to actual needs, so as to obtain the desired incident angle and incident direction and obtain the required magnetic domain image.

[0058] It should also be noted that the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, commodity or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, commodity or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, commodity or device comprising said element.

[0059] Each embodiment in the present invention is described in a progressive manner. For the same or similar parts among the embodiments, reference can be made to each other, and the differences between each embodiment and other embodiments are emphasized. In particular, for the embodiments of the apparatus, device, and non-volatile computer storage medium, since they are basically similar to the method embodiments, the description is relatively simple, and reference can be made to the relevant parts of the method embodiments.

[0060] The specific embodiments of the present invention have been described above. Additionally, the processes depicted in the drawings do not necessarily require the specific order or sequential order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0061] The above are only the embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, various modifications and changes can be made to the embodiments of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the embodiments of the present invention shall be included within the protection scope of the present invention.

Claims

1. A magnetic domain imaging device, characterized in that, The device includes: a light source, a digital micromirror device, a polarizer, an analyzer, a camera, and a lens assembly; The light emitted from the light source is incident on the digital micromirror device; The light reflected from at least some of the preset reflection units of the digital micromirror device can be incident on different positions of the lens assembly, so as to reach the object to be measured in different incident directions and / or at different incident angles; The polarizer is disposed in the optical path between the light source and the lens assembly; The measured surface of the object to be measured is located in the focal plane of the lens assembly; the lens assembly is disposed in the incident optical path and the reflection optical path of the object to be measured; The light reflected by the object to be measured enters the camera after passing through at least the lens assembly and the analyzer; A beam splitter disposed between the digital micromirror device and the lens assembly, the light reflected from the reflection unit of the digital micromirror device is irradiated to the lens assembly through the beam splitter, and the light reflected from the object to be measured is reflected by the beam splitter to the camera on the split optical path; An optical fiber and a collimator are further disposed between the light source and the polarizer; the optical fiber is used to transmit the detection light and emit the detection light at the output structure of the optical fiber; the collimator is used to convert the light output from the optical fiber into a parallel beam to ensure that the light incident on the digital micromirror device is parallel light, so that the light reflected by different reflection regions of the digital micromirror device is parallel to each other; wherein, the reflection region includes at least one reflection unit; The device further includes a beam splitter and an objective lens, and the two constitute a lens assembly disposed in the incident optical path of the object to be measured; The device further includes a light trap assembly, and the light reflected from at least some of the preset reflection units of the digital micromirror device enters the light trap assembly.

2. The magnetic domain imaging device according to claim 1, characterized in that, The device further includes: a prism assembly disposed in the optical path between the light source and the digital micromirror device, and the light emitted from the light source is reflected to the digital micromirror device through the prism assembly.

3. A magnetic domain imaging method, which applies a magnetic domain imaging device as described in any one of claims 1-2, characterized in that The method includes: Incident the detection light generated by the light source on the digital micromirror device; Adjust the digital micromirror device to reflect the detection light through different reflection units, so that at least part of the detection light passes through different positions of the incident lens assembly, so as to reach the object to be measured in different incident directions and / or at different incident angles, and obtain a magnetic domain image through the camera.

4. A magnetic domain imaging method according to claim 3, characterized in that, The method further includes: Adjust the digital micromirror device to form a first reflection region, and reflect the detection light through the first reflection region, so that the detection light passes through the first position of the incident lens assembly and reaches the object to be measured at a first incident direction and a first incident angle; Adjust the digital micromirror device to form a second reflection region, at least part of the first reflection region and the second reflection region do not overlap, reflect the detection light through the second reflection region, so that the detection light passes through the second position of the incident lens assembly and reaches the object to be measured at a second incident direction and a second incident angle, the second position does not coincide with the first position, the second incident direction is different from the first incident direction, and the second incident angle is different from the first incident angle, so that the magnetic domain imaging device obtains magnetic domain images of the object to be measured at different incident directions and different incident angles.

5. A magnetic domain imaging method according to claim 3, characterized in that, The method further includes: Adjust the digital micromirror device to reflect the detection light through the third reflection area, so that the detection light reaches the object to be measured at the first incident angle and the third incident direction, and enable the magnetic domain imaging device to obtain magnetic domain images of the object to be measured at the same incident angle and different incident directions; wherein, the third reflection area does not at least partially coincide with the first reflection area, and the third incident direction is different from the first incident direction.

6. The magneto-domain imaging method according to claim 3, characterized in that The method further includes: Adjust the digital micromirror device to reflect the detection light through the fourth reflection area, so that the detection light reaches the object to be measured at the first incident direction and the third incident angle, and enable the magnetic domain imaging device to obtain magnetic domain images of the object to be measured at the same incident direction and different incident angles; wherein, the fourth reflection area does not at least partially coincide with the first reflection area, and the third incident angle is different from the first incident angle.

7. A magnetic domain imaging method according to claim 3, characterized in that, The method further includes: adjusting the digital micromirror device to reflect the detection light so that the incident plane after the detection light reaches the object to be measured is parallel to the magnetic domain direction of the object to be measured.

8. A magnetic domain imaging method according to claim 3, characterized in that, The method further includes: adjusting the incident angle of the detection light incident on the object to be measured by adjusting the lens assembly.

Images