An interference system

Abstract

The present application discloses an interference system, which includes a reference seat, a measuring objective lens, a dichroic prism, a first adjustment component, a reference objective lens, a second adjustment component, a reflector mounting seat, a reference reflector and a third adjustment component. The measuring objective lens is connected to the reference seat, and the dichroic prism is movably arranged in the reference seat. The second adjustment component is movably arranged in the reference seat, and the second adjustment component includes an objective lens rotation adjustment member, and the reference objective lens is connected to the objective lens rotation adjustment member. One side of the objective lens rotation adjustment member has a rotating arc surface, and the objective lens rotation adjustment member can rotate around the center of the rotating arc surface and drive the reference objective lens to rotate to adjust the direction of the reference objective lens. The objective lens rotation adjustment member realizes the adjustment of the rotational freedom of the reference objective lens by rotating the arc surface. Compared with the traditional solution of using the position change of multiple support points to drive the rotation of the adjustment plate, the structure is more concise and compact.

Description

Technical Field

[0001] The present application relates to the technical field of optical instruments, and in particular to an interference system. Background Art

[0002] In the Linnik interferometer system, the alignment of the optical path and the control of the optical path difference between the main objective lens and the reference objective lens are crucial. When adjusting the optical path of the Linnik interferometer system, it is usually necessary to precisely adjust the position of the lens, generally including the adjustment of the X, Y, Z, Tx, Ty and other dimensions, and the adjusted position needs to be fixed after the adjustment. In addition, due to the limitations of the equipment space, the lens adjustment device should also be compact. Therefore, designing a compact multi-dimensional lens adjustment device is very important for the debugging of the Linnik interferometer system. Summary of the invention

[0003] The main object of the present invention is to provide an interferometric system which is compact and capable of adjusting a lens in multiple translational and rotational dimensions.

[0004] In one embodiment, an interference system is provided, comprising:

[0005] Base seat;

[0006] A measuring objective lens, the measuring objective lens being connected to the reference seat;

[0007] A beam splitter prism, the beam splitter prism is movably disposed in the reference seat;

[0008] A first adjustment component, the first adjustment component is used to drive the beam splitter prism to move linearly to adjust the position of the beam splitter prism, and drive the beam splitter prism to rotate to adjust the direction of the beam splitter prism;

[0009] Reference objective lens;

[0010] a second adjusting component, the second adjusting component being movably arranged on the reference seat, the second adjusting component comprising an objective lens rotation adjusting member, the reference objective lens being connected to the objective lens rotation adjusting member, one side of the objective lens rotation adjusting member having a rotating arc surface, the objective lens rotation adjusting member being able to rotate around the center of the rotating arc surface and drive the reference objective lens to rotate so as to adjust the orientation of the reference objective lens;

[0011] Reflector mount;

[0012] A reference reflector, the reference reflector is movably disposed on the reflector mounting seat and is disposed opposite to the reference objective lens;

[0013] and a third adjusting component, wherein the third adjusting component is used to drive the reference reflector to move linearly to adjust the position of the reference reflector, and to drive the reference reflector to rotate to adjust the orientation of the reference reflector.

[0014] In one embodiment, the first axis, the second axis and the third axis are three axes perpendicular to each other in space, the dichroic prism and the measuring objective lens are arranged along the first axis, and the dichroic prism and the reference objective lens are arranged along the second axis;

[0015] The objective lens rotation adjustment member includes a first objective lens rotation adjustment member and a second objective lens rotation adjustment member, the first objective lens rotation adjustment member and the second objective lens rotation adjustment member are arranged in sequence along the second axis, the reference objective lens is connected to a side of the first objective lens rotation adjustment member away from the second objective lens rotation adjustment member, the rotation axis of the first objective lens rotation adjustment member is parallel to the first axis, and the rotation axis of the second objective lens rotation adjustment member is parallel to the third axis.

[0016] In one embodiment, the second adjustment assembly further includes an objective lens translation adjustment member, and the objective lens translation adjustment member and the objective lens rotation adjustment member are sequentially arranged along the second axis, and the translation adjustment member is used to drive the reference objective lens to translate along the first axis and / or the third axis.

[0017] In one embodiment, the objective lens translation adjustment member has a first side and a second side that are relatively arranged, the first side is provided with a fixed pin, and the second side is provided with two relatively arranged objective lens translation fine-adjustment screws; the objective lens translation fine-adjustment screws are used to drive the objective lens translation adjustment member to rotate around the fixed pin, so as to drive the middle part of the objective lens translation adjustment member to translate along the first axis and / or the third axis, and to position the objective lens translation fine-adjustment screws.

[0018] In one embodiment, the objective lens translation adjustment member includes a first objective lens translation adjustment member and a second objective lens translation adjustment member, and the first objective lens rotation adjustment member, the second objective lens rotation adjustment member, the first objective lens translation adjustment member and the second objective lens translation adjustment member are stacked in sequence along the second axis; the first objective lens translation adjustment member is used to drive the reference objective lens to translate along the third axis, and the second objective lens translation adjustment member is used to drive the reference objective lens to translate along the first axis.

[0019] In one embodiment, the second adjustment component also includes an objective lens rotation fine-adjustment screw, and the objective lens rotation fine-adjustment screw is provided on opposite sides of the rotating arc surface, so as to drive the objective lens rotation adjustment member to rotate around the center of the rotating arc surface and position the objective lens rotation adjustment member.

[0020] In one embodiment, the first axis, the second axis and the third axis are three axes perpendicular to each other in space, the dichroic prism and the measuring objective lens are arranged along the first axis, and the dichroic prism and the reference objective lens are arranged along the second axis;

[0021] The first adjustment component can drive the beam splitter prism to move linearly along the first axis, and drive the beam splitter prism to rotate around the first axis, the second axis and the third axis.

[0022] In one embodiment, the first adjustment component includes a prism translation adjustment member, a prism translation fine adjustment screw, and a precision electric translation stage; the beam splitter prism is connected to the precision electric translation stage, and the precision electric translation stage is connected to the prism translation adjustment member; the precision electric translation stage is used to drive the beam splitter prism to translate along the first axis;

[0023] The reference seat has a first guide groove and a second guide groove, both of which are parallel to the first axis, the cross-section of the first guide groove is a rectangle, and the cross-section of the second guide groove is an inverted triangle; the prism translation adjustment member has a first protrusion and a second protrusion, the first protrusion matches the shape of the first guide groove and is movably arranged in the first guide groove, the second protrusion matches the shape of the second guide groove and is movably arranged in the second guide groove, so as to guide the dichroic prism to translate along the first axis.

[0024] In one embodiment, the first axis, the second axis and the third axis are three axes perpendicular to each other in space, the dichroic prism and the measuring objective lens are arranged along the first axis, and the dichroic prism and the reference objective lens are arranged along the second axis;

[0025] The third adjustment component can drive the reference reflector to move linearly along the second axis, and drive the reference reflector to rotate around the first axis and the third axis.

[0026] In one embodiment, the third adjustment component includes a reflector translation adjustment member, a reflector rotation adjustment member, a reflector translation fine adjustment screw, a reflector rotation fine adjustment screw and a pre-tension spring, the reflector translation adjustment member is movably arranged on the reflector mounting seat, and the reflector translation fine adjustment screw is used to drive the reflector translation adjustment member to translate along the second axis on the reflector mounting seat;

[0027] The reference reflector is connected to the reflector rotation adjustment member, and the reflector rotation adjustment member is movably arranged on the reflector translation adjustment member. The reflector rotation adjustment member is triangular in shape, and there are three reflector rotation fine-adjustment screws, which are respectively arranged corresponding to the three vertices of the reflector rotation adjustment member to drive the corresponding vertices to move closer to and away from the reflector translation adjustment member; the pre-tension spring is used to provide a pre-tensioning force to the reflector rotation adjustment member so that the reflector rotation adjustment member and the reflector rotation fine-adjustment screw are pressed tightly.

[0028] According to the interference system of the above embodiment, the interference system includes a reference seat, a measuring lens, a dichroic prism, a first adjustment component, a reference lens, a second adjustment component, a reflector mounting seat, a reference reflector and a third adjustment component. The measuring lens is connected to the reference seat, and the dichroic prism is movably arranged in the reference seat. The first adjustment component is used to drive the dichroic prism to move linearly to adjust the position of the dichroic prism, and to drive the dichroic prism to rotate to adjust the direction of the dichroic prism. The second adjustment component is movably arranged on the reference seat, and the second adjustment component includes an objective lens rotation adjustment member, and the reference objective lens is connected to the objective lens rotation adjustment member. One side of the objective lens rotation adjustment member has a rotating arc surface, and the objective lens rotation adjustment member can rotate around the center of the rotating arc surface, and drive the reference objective lens to rotate to adjust the direction of the reference objective lens. The reference reflector is movably arranged on the reflector mounting seat and is arranged opposite to the reference objective lens. The third adjustment component is used to drive the reference reflector to move linearly to adjust the position of the reference reflector, and to drive the reference reflector to rotate to adjust the direction of the reference reflector. When adjusting the reference mirror adjustment mechanism, the staff can adjust the position and orientation of the beam splitter prism through the first adjustment component, adjust the orientation of the reference objective lens through the second adjustment component, and adjust the position and orientation of the reference reflector through the third adjustment component. When the staff uses the second adjustment component to adjust the orientation of the reference objective lens, the objective lens rotation adjustment member can be rotated around the center of the rotating arc surface, thereby driving the reference objective lens to rotate, and then adjusting the orientation of the reference objective lens. On the one hand, the cooperation of the first adjustment component, the second adjustment component and the third adjustment component realizes multi-dimensional adjustment of the beam splitter prism, the reference objective lens and the reference reflector. On the other hand, the objective lens rotation adjustment member realizes the adjustment of the rotational freedom of the reference objective lens by rotating the arc surface. Compared with the traditional solution of using the position change of multiple support points to drive the rotation of the adjustment plate, the structure is more simple and compact. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic structural diagram of an interference system from one perspective in an embodiment of the present application;

[0030] Figure 2 This is a schematic structural diagram of an interference system from another perspective in an embodiment of the present application;

[0031] Figure 3 A cross-sectional view of an interference system from a top view in an embodiment of the present application;

[0032] Figure 4 This is a schematic diagram of the structure of a prism translation adjustment member and a prism rotation adjustment member in a top-down perspective in one embodiment of the present application;

[0033] Figure 5 This is a schematic structural diagram of a prism translation adjustment member, a precision electric translation stage, and a beam splitter prism in one embodiment of the present application;

[0034] Figure 6 This is a schematic diagram of the structure of the prism translation adjustment member and the reference seat slidingly cooperating in one embodiment of the present application;

[0035] Figure 7 This is a schematic structural diagram of the stereoscopic viewing angle of a reference objective lens and a second adjustment component in one embodiment of the present application;

[0036] Figure 8 This is a schematic structural diagram of the reference objective lens and the front view angle of the second adjustment component in one embodiment of the present application;

[0037] Fig. 9 This is a schematic diagram of the working principle of the objective lens translation adjustment member in one embodiment of the present application;

[0038] Fig.10 This is a schematic diagram of the working principle of the objective lens rotation adjustment member in one embodiment of the present application;

[0039] Fig.11 This is a schematic structural diagram of a reflector mounting seat and a third adjustment assembly in one embodiment of the present application;

[0040] Fig.12 This is a schematic structural diagram of a reflector mounting seat, a reference reflector, and a third adjustment component in one embodiment of the present application;

[0041] Reference numerals: 100, reference seat; 110, first guide groove; 120, second guide groove; 200, measuring objective lens; 300, dichroic prism; 400, first adjustment assembly; 410, prism translation adjustment member; 411, first protrusion; 412, second protrusion; 420, prism translation fine adjustment screw; 430, precision electric displacement stage; 440, prism rotation adjustment member; 450, first prism rotation fine adjustment screw; 460, second prism rotation fine adjustment screw; 500, reference objective lens; 600, second adjustment assembly; 610, objective lens rotation adjustment member; 611, rotating arc surface; 612, second protrusion; 613, second prism rotation fine adjustment screw; 614, second prism rotation fine adjustment screw; 615, second prism rotation fine adjustment screw; 616, second prism rotation fine adjustment screw; 617, second prism rotation fine adjustment screw; 618, second prism rotation fine adjustment screw; 619, second prism rotation fine adjustment screw; 620, second prism rotation fine adjustment screw; 621, second prism rotation fine adjustment screw; 622, second prism rotation fine adjustment screw; 623, second prism rotation fine adjustment screw; 624, second prism rotation fine adjustment screw; 625, second prism rotation fine adjustment screw; 626, second prism rotation fine adjustment screw; 627, second prism rotation fine adjustment screw; 628, second prism rotation fine adjustment screw; 629, second prism rotation fine adjustment screw; 630, second prism rotation fine adjustment screw; 631, second prism rotation fine adjustment screw; 632, second prism rotation fine adjustment screw; 633, second prism rotation fine adjustment screw; 634, second prism rotation fine 2. First objective lens rotation adjustment member; 613. Second objective lens rotation adjustment member; 620. Objective lens translation adjustment member; 621. First objective lens translation adjustment member; 622. Second objective lens translation adjustment member; 630. Fixed pin; 640. Objective lens translation fine-tuning screw; 650. Objective lens rotation fine-tuning screw; 700. Reflector mounting seat; 800. Reference reflector; 900. Third adjustment assembly; 910. Reflector translation adjustment member; 920. Reflector rotation adjustment member; 930. Reflector translation fine-tuning screw; 940. Reflector rotation fine-tuning screw; 950. Pre-tightening tension spring; 1000. Measured object. DETAILED DESCRIPTION

[0042] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are for making the present application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different situations, or can be replaced by other elements, materials, methods. In some cases, some operations related to the present application are not shown or described in the specification, this is to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0043] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0044] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0045] This embodiment provides an interference system.

[0046] Please refer to Figure 1-12 In one embodiment, the interference system includes a reference seat 100, a measuring objective lens 200, a beam splitter prism 300, a first adjustment component 400, a reference objective lens 500, a second adjustment component 600, a reflector mount 700, a reference reflector 800 and a third adjustment component 900.

[0047] The measuring objective lens 200 is connected to the reference seat 100, and the beam splitter prism 300 is movably arranged in the reference seat 100. The first adjustment component 400 is used to drive the beam splitter prism 300 to move linearly to adjust the position of the beam splitter prism 300, and to drive the beam splitter prism 300 to rotate to adjust the direction of the beam splitter prism 300. The second adjustment component 600 is movably arranged on the reference seat 100, and the second adjustment component 600 includes an objective lens rotation adjustment member 610, and the reference objective lens 500 is connected to the objective lens rotation adjustment member 610. One side of the objective lens rotation adjustment member 610 has a rotating arc surface 611. The objective lens rotation adjustment member 610 can rotate around the center of the rotating arc surface 611 and drive the reference objective lens 500 to rotate to adjust the direction of the reference objective lens 500. The reference reflector 800 is movably arranged on the reflector mounting seat 700, and is arranged opposite to the reference objective lens 500. The third adjustment component 900 is used to drive the reference reflector 800 to move linearly to adjust the position of the reference reflector 800 , and to drive the reference reflector 800 to rotate to adjust the orientation of the reference reflector 800 .

[0048] Please refer to Figure 1-37-10, when adjusting the interference system, the staff can adjust the position and orientation of the beam splitter prism 300 through the first adjustment component 400, adjust the orientation of the reference objective lens 500 through the second adjustment component 600, and adjust the position and orientation of the reference reflector 800 through the third adjustment component 900. When the staff uses the second adjustment component 600 to adjust the orientation of the reference objective lens 500, the objective lens rotation adjustment member 610 can be rotated around the center of the rotating arc surface 611, thereby driving the reference objective lens 500 to rotate, and then adjusting the orientation of the reference objective lens 500. On the one hand, the multi-dimensional adjustment of the beam splitter prism 300, the reference objective lens 500 and the reference reflector 800 is achieved through the cooperation of the first adjustment component 400, the second adjustment component 600 and the third adjustment component 900. On the other hand, the objective lens rotation adjustment member 610 achieves the adjustment of the rotational freedom of the reference objective lens 500 through the rotating arc surface 611. Compared with the traditional solution of driving the rotation of the adjustment plate by the position change of multiple support points, the structure is more concise and compact.

[0049] Specifically, please refer to Figure 3 In actual application scenarios, the measuring lens 200 is used to face the measured object 1000. Please refer to Fig.10 , the optical axis of the light passing through the reference objective lens 500 is L, and the center of the rotating arc surface 611 is Q. It can be seen that the center of the rotating arc surface 611 is configured to coincide with the optical axis L of the light, which is beneficial to improving the centering effect of the rotating arc surface 611 on the one hand, and on the other hand, it is also beneficial for the user to adjust the center of the reference objective lens 500 to coincide with the optical path by rotating the arc surface 611.

[0050] Please refer to Figure 1-6 In one embodiment, the first axis, the second axis and the third axis are three axes perpendicular to each other in space, the beam splitter 300 and the measuring objective lens 200 are arranged along the first axis, and the beam splitter 300 and the reference objective lens 500 are arranged along the second axis. The objective lens rotation adjustment member 610 includes a first objective lens rotation adjustment member 612 and a second objective lens rotation adjustment member 613, the first objective lens rotation adjustment member 612 and the second objective lens rotation adjustment member 613 are sequentially arranged along the second axis, the reference objective lens 500 is connected to the side of the first objective lens rotation adjustment member 612 away from the second objective lens rotation adjustment member 613, the rotation axis of the first objective lens rotation adjustment member 612 is parallel to the first axis, and the rotation axis of the second objective lens rotation adjustment member 613 is parallel to the third axis.

[0051] When the first objective lens rotation adjusting member 612 rotates, the reference objective lens 500 can be driven to rotate around the first axis, and when the second objective lens rotation adjusting member 613 rotates, the reference objective lens 500 can be driven to rotate around the third axis. It should be noted that, in this embodiment, the first axis is Figure 1 The X axis in the figure, the second axis is Figure 1The Z axis in the diagram, the third axis is Figure 1 That is, the first objective lens rotation adjusting member 612 is used to adjust the rotational freedom RX of the reference objective lens 500 around the X axis, and the second objective lens rotation adjusting member 613 is used to adjust the rotational freedom RY of the reference objective lens 500 around the Y axis.

[0052] Since any one of the first objective lens rotation adjustment member 612 and the second objective lens rotation adjustment member 613 can only be used to adjust a single rotational degree of freedom of the reference objective lens 500, the user can adjust the single rotational degree of freedom of the reference objective lens 500 more specifically, which is beneficial to improve the accuracy of the adjustment.

[0053] At the same time, the stacked multiple objective lens rotation adjustment members 610 also ensure that the user can adjust the reference objective lens 500 in multiple rotation directions, thereby ensuring the comprehensiveness of the rotation adjustment direction of the reference objective lens 500. Of course, the stacked number of objective lens rotation adjustment members 610 is not limited to the first objective lens rotation adjustment member 612 and the second objective lens rotation adjustment member 613 described above, for example, a third objective lens rotation adjustment member can also be stacked.

[0054] In addition, since each stacked objective lens rotation adjustment member 610 can be adjusted independently, the user can flexibly select one or more corresponding objective lens rotation adjustment members 610 according to actual needs to realize the rotation adjustment of the reference objective lens 500, which is beneficial to improve the user's operational flexibility and adaptability to different application scenarios.

[0055] Please refer to Figure 1-3 And 7-10, in one embodiment, the second adjustment component 600 also includes an objective lens translation adjustment member 620, and the objective lens translation adjustment member 620 and the objective lens rotation adjustment member 610 are arranged in sequence along the second axis, and the translation adjustment member is used to drive the reference objective lens 500 to translate along the first axis and / or the third axis.

[0056] Since the objective lens translation adjustment member 620 is added, the reference objective lens 500 can be driven to translate along the first axis and / or the third axis by the objective lens translation adjustment member 620. That is, the translational degree of freedom dx of the reference objective lens 500 along the X axis and / or the translational degree of freedom dy of the reference objective lens 500 along the Y axis can be adjusted by the objective lens translation adjustment member 620. Specifically, the objective lens translation adjustment member 620 can be configured to translate only along the first axis, the objective lens translation adjustment member 620 can also be configured to translate only along the second axis, and the objective lens translation adjustment member 620 can also be configured to have displacement on both the first axis and the third axis.

[0057] Please refer to Figure 1-37-9, in one embodiment, the objective lens translation adjustment member 620 has a first side and a second side that are arranged opposite to each other, the first side is provided with a fixed pin 630, and the second side is provided with two objective lens translation fine adjustment screws 640 that are arranged opposite to each other. The objective lens translation fine adjustment screws 640 are used to drive the objective lens translation adjustment member 620 to rotate around the fixed pin 630, so as to drive the middle part of the objective lens translation adjustment member 620 to translate along the first axis and / or the third axis, and to position the objective lens translation fine adjustment screws 640.

[0058] When it is necessary to drive the reference objective lens 500 to move in translation, the staff can use the objective lens translation fine-tuning screw 640 to drive the objective lens translation adjustment member 620 to rotate around the fixed pin 630 as the rotation center, thereby driving the middle part of the objective lens translation adjustment member 620 to move in translation. And because the middle part of the objective lens translation adjustment member 620 is usually used to connect with the reference objective lens 500, it can drive the reference objective lens 500 to move in translation. It should be noted that in this embodiment, the translational movement of the middle part of the objective lens translation adjustment member 620 on the first axis and the third axis is coupled, that is, the middle part of the objective lens translation adjustment member 620 moves on both the first axis and the third axis. For details, please refer to Fig. 9 , when the motion trajectory of the second side of the objective lens translation adjustment member 620 is A-A', the middle part of the objective lens translation adjustment member 620 will produce a displacement of O-O'. However, considering that in actual application scenarios, when the motion arc of the middle part of the objective lens translation adjustment member 620 is shorter and the arc is smaller, the movement of the middle part of the objective lens translation adjustment member 620 can be approximately regarded as a linear motion, that is, the movement of the middle part of the objective lens translation adjustment member 620 can be approximately regarded as a translational motion only along the first axis or the third axis.

[0059] Compared with the traditional translation adjustment structure, the objective lens translation adjustment member 620 in this embodiment is more compact and has higher precision. In particular, considering that the reference objective lens 500 needs to be adjusted in a smaller range, the objective lens translation adjustment member 620 in this embodiment is more suitable for adjusting the reference objective lens 500 in the translation direction. Of course, in other embodiments, the objective lens translation adjustment member 620 can also use conventional solutions, for example, screws are set around the plate-shaped adjustment member to promote the translation movement of the plate-shaped adjustment member. Please refer to Figure 1-3 7-10, in one embodiment, the objective lens translation adjustment member 620 includes a first objective lens translation adjustment member 621 and a second objective lens translation adjustment member 622, and the first objective lens rotation adjustment member 612, the second objective lens rotation adjustment member 613, the first objective lens translation adjustment member 621 and the second objective lens translation adjustment member 622 are sequentially stacked along the second axis. The first objective lens translation adjustment member 621 is used to drive the reference objective lens 500 to translate along the third axis, and the second objective lens translation adjustment member 622 is used to drive the reference objective lens 500 to translate along the first axis.

[0060] When the translation position of the reference objective lens 500 needs to be adjusted, the reference objective lens 500 is mainly driven to translate along the third axis by the first objective lens translation adjustment member 621, and the reference objective lens 500 is mainly driven to translate along the first axis by the second objective lens translation adjustment member 622, thereby realizing the translation position adjustment of the reference objective lens 500 in two dimensions of the first axis and the third axis.

[0061] Since the first objective lens translation adjustment member 621 and the second objective lens translation adjustment member 622 can be adjusted independently, the user can flexibly select one or more corresponding objective lens translation adjustment members 620 according to actual needs to achieve translation adjustment of the reference objective lens 500, which is beneficial to improving the flexibility of user operation and adaptability to different application scenarios.

[0062] At the same time, the stacked multiple objective lens translation adjustment members 620 also ensure that the user can adjust the reference objective lens 500 in multiple translation directions, thereby ensuring the comprehensiveness of the translation adjustment direction of the reference objective lens 500. Of course, the stacked number of objective lens translation adjustment members 620 is not limited to the first objective lens translation adjustment member 621 and the second objective lens translation adjustment member 622 described above, for example, a third objective lens translation adjustment member may also be stacked.

[0063] Please refer to Figure 1-3 And 7-10, in one embodiment, the second adjustment component 600 also includes an objective lens rotation fine-tuning screw 650, and objective lens rotation fine-tuning screws 650 are provided on opposite sides of the rotating arc surface 611 to drive the objective lens rotation adjustment member 610 to rotate around the center of the rotating arc surface 611 and position the objective lens rotation adjustment member 610.

[0064] When it is necessary to adjust the rotational freedom of the reference objective lens 500, the staff can turn the objective lens rotation fine adjustment screws 650 on opposite sides of the rotating arc surface 611, and drive the objective lens rotation adjustment member 610 to rotate around the center of the rotating arc surface 611 through the objective lens rotation fine adjustment screws 650, thereby driving the reference objective lens 500 to rotate. The objective lens rotation fine adjustment screws 650 have high precision and good stability, and can not only accurately and stably drive the reference objective lens 500 to rotate, but also can be used to position the reference objective lens 500 rotated to a suitable angle.

[0065] Please refer to Figure 1-6 In one embodiment, the first axis, the second axis and the third axis are three axes perpendicular to each other in space, the beam splitter prism 300 and the measuring objective lens 200 are arranged along the first axis, and the beam splitter prism 300 and the reference objective lens 500 are arranged along the second axis. The first adjustment component 400 can drive the beam splitter prism 300 to move linearly along the first axis, and drive the beam splitter prism 300 to rotate around the first axis, the second axis and the third axis.

[0066] The staff can drive the beam splitter prism 300 to move linearly along the first axis through the first adjustment component 400 to adjust the translation position of the beam splitter prism 300 along the first axis, and the staff can drive the beam splitter prism 300 to rotate around the first axis, the second axis and the third axis through the first adjustment component 400 to achieve the adjustment of the three rotational degrees of freedom of the beam splitter prism 300. It should be noted that in this embodiment, the first axis is Figure 1 The X axis in the figure, the second axis is Figure 1 The Z axis in the diagram, the third axis is Figure 1 That is, the first adjustment component 400 is used to adjust the translational freedom dx of the beam splitter 300 along the X axis, and the first adjustment component 400 is used to adjust the rotational freedom RX around the X axis, the rotational freedom RZ around the Z axis, and the rotational freedom RY around the Y axis of the beam splitter 300.

[0067] Please refer to Figure 1-6 In one embodiment, the first adjustment component 400 includes a prism translation adjustment member 410, a prism translation fine adjustment screw 420 and a precision electric translation stage 430. The beam splitter 300 is connected to the precision electric translation stage 430, and the precision electric translation stage 430 is connected to the prism translation adjustment member 410. The precision electric translation stage 430 is used to drive the beam splitter 300 to translate along the first axis. The reference seat 100 has a first guide groove 110 and a second guide groove 120, both of which are parallel to the first axis, the cross section of the first guide groove 110 is a rectangle, and the cross section of the second guide groove 120 is an inverted triangle. The prism translation adjustment member 410 has a first protrusion 411 and a second protrusion 412. The first protrusion 411 matches the shape of the first guide groove 110 and is movably disposed in the first guide groove 110. The second protrusion 412 matches the shape of the second guide groove 120 and is movably disposed in the second guide groove 120 to guide the dichroic prism 300 to translate along the first axis.

[0068] On the one hand, when it is necessary to adjust the translation position of the beam splitter 300 on the first axis, the beam splitter 300 can be driven to translate along the first axis by the precision electric translation stage 430. The cooperation between the first protrusion 411 and the first guide groove 110 and the cooperation between the second protrusion 412 and the second guide groove 120 guides the translation of the beam splitter 300 along the first axis, thereby facilitating the improvement of the linearity of the movement of the beam splitter 300. On the other hand, the selection of a rectangular cross section of the first guide groove 110 and the first protrusion 411 is conducive to ensuring the stability of the active cooperation between the first protrusion 411 and the first guide groove 110, thereby facilitating the improvement of the stability of the beam splitter 300 when it translates along the first axis. The selection of an inverted triangular cross section of the second guide groove 120 and the second protrusion 412 is conducive to improving the accuracy of the center positioning of the second protrusion 412 and the second guide groove 120, thereby facilitating the improvement of the movement accuracy and linearity of the beam splitter 300 when it translates along the first axis.

[0069] Please refer to Figure 1-6 In one embodiment, the first adjustment component 400 also includes two prism translation fine-tuning screws 420, and the two prism translation fine-tuning screws 420 are respectively arranged on opposite sides of the prism translation adjustment member 410 along the first axis to drive the prism translation adjustment member 410 to move linearly along the first axis.

[0070] The staff can drive the prism translation adjustment member 410 to translate along the first axis through the two prism translation fine adjustment screws 420, thereby achieving manual adjustment of the translation freedom dx of the beam splitter prism 300 along the X axis.

[0071] Please refer to Figure 1-6 In one embodiment, the first adjustment assembly 400 further includes a prism rotation adjustment member 440, three first prism rotation fine adjustment screws 450 and two second prism rotation fine adjustment screws 460, and the beam splitter 300 is connected to the prism rotation adjustment member 440. The three first prism rotation fine adjustment screws 450 are distributed in a triangular shape on the prism rotation adjustment member 440 to drive the prism rotation adjustment member 440 to rotate around the first axis and the second axis. The two second prism rotation fine adjustment screws 460 are distributed on one side of the prism rotation adjustment member 440 to drive the prism rotation adjustment member 440 to rotate around the third axis.

[0072] The staff can drive the beam splitter prism 300 to rotate by cooperating the three first prism rotation fine adjustment screws 450 with the prism rotation adjustment member 440, thereby adjusting the beam splitter prism 300 in the rotational freedom RX around the X axis and the rotational freedom RZ around the Z axis. The staff can drive the beam splitter prism 300 to rotate by cooperating the two second prism rotation fine adjustment screws 460 with the prism rotation adjustment member 440, thereby adjusting the beam splitter prism 300 in the rotational freedom RY around the Y axis.

[0073] Please refer to Figure 1-3 , 11 and 12, in one embodiment, the first axis, the second axis and the third axis are three axes perpendicular to each other in space, the beam splitter prism 300 and the measuring objective lens 200 are arranged along the first axis, and the beam splitter prism 300 and the reference objective lens 500 are arranged along the second axis. The third adjustment component 900 can drive the reference reflector 800 to move linearly along the second axis, and drive the reference reflector 800 to rotate around the first axis and the third axis.

[0074] The staff can drive the reference reflector 800 to move linearly along the second axis through the third adjustment component 900 to adjust the translation position of the reference reflector 800 along the second axis, and the staff can drive the reference reflector 800 to rotate around the first axis and the third axis through the third adjustment component 900 to achieve the adjustment of the two rotational degrees of freedom of the reference reflector 800. It should be noted that in this embodiment, the first axis is Figure 1 The X axis in the figure, the second axis is Figure 1 The Z axis in the figure, the third axis is Figure 1 That is, the third adjustment component 900 is used to adjust the translational freedom dz of the reference reflector 800 along the Z axis, and the third adjustment component 900 is used to adjust the rotational freedom RX of the reference reflector 800 around the X axis and the rotational freedom RY around the Y axis.

[0075] Please refer to Figure 1-3, 11 and 12, in one embodiment, the third adjustment assembly 900 includes a reflector translation adjustment member 910, a reflector rotation adjustment member 920, a reflector translation fine adjustment screw 930, a reflector rotation fine adjustment screw 940 and a pre-tension spring 950, the reflector translation adjustment member 910 is movably disposed on the reflector mounting seat 700, and the reflector translation fine adjustment screw 930 is used to drive the reflector translation adjustment member 910 to translate along the second axis on the reflector mounting seat 700. The reference reflector 800 is connected to the reflector rotation adjustment member 920, and the reflector rotation adjustment member 920 is movably disposed on the reflector translation adjustment member 910. The reflector rotation adjustment member 920 is triangular, and the reflector rotation fine adjustment screw 940 is configured in three numbers, and is respectively disposed corresponding to the three vertices of the reflector rotation adjustment member 920, so as to drive the corresponding vertices to move close to and away from the reflector translation adjustment member 910. The pre-tightening tension spring 950 is used to provide a pre-tightening tension to the reflector rotation adjusting member 920 , so that the reflector rotation adjusting member 920 and the reflector rotation fine adjustment screw 940 are pressed tightly.

[0076] When it is necessary to adjust the translational freedom dz of the reference reflector 800 along the Z axis, the staff can turn the reflector translation fine adjustment screw 930, and drive the reflector translation adjustment member 910 to move along the second axis on the reflector mounting seat 700 through the reflector translation fine adjustment screw 930, thereby driving the reference reflector 800 to make a linear motion along the second axis. When it is necessary to adjust the rotational freedom RX around the X axis and the rotational freedom RY around the Y axis of the reference reflector 800, the staff can respectively turn the three reflector rotation fine adjustment screws 940 to drive the three corresponding vertices of the reflector rotation adjustment member 920 to move closer to and away from the reflector translation adjustment member 910, thereby realizing the adjustment of the reflector rotation adjustment member 920 in the two rotational freedoms RX and RY, and then driving the reference reflector 800 to realize the adjustment in the two rotational freedoms RX and RY through the reflector rotation adjustment member 920.

[0077] The above specific examples are used to illustrate the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For those skilled in the art, according to the concept of the present invention, some simple deductions, modifications or substitutions can be made.

Claims

1. An interference system, characterized in that: include: Base seat; A measuring objective lens, the measuring objective lens being connected to the reference seat; A beam splitter prism, the beam splitter prism is movably disposed in the reference seat; A first adjustment component, the first adjustment component is used to drive the beam splitter prism to move linearly to adjust the position of the beam splitter prism, and drive the beam splitter prism to rotate to adjust the direction of the beam splitter prism; Reference objective lens; a second adjusting component, the second adjusting component being movably arranged on the reference seat, the second adjusting component comprising an objective lens rotation adjusting member, the reference objective lens being connected to the objective lens rotation adjusting member, one side of the objective lens rotation adjusting member having a rotating arc surface, the objective lens rotation adjusting member being able to rotate around the center of the rotating arc surface and drive the reference objective lens to rotate so as to adjust the orientation of the reference objective lens; Reflector mount; A reference reflector, the reference reflector is movably disposed on the reflector mounting seat and is disposed opposite to the reference objective lens; and a third adjusting component, the third adjusting component being used to drive the reference reflector to move linearly to adjust the position of the reference reflector, and to drive the reference reflector to rotate to adjust the orientation of the reference reflector; The first axis, the second axis and the third axis are three axes perpendicular to each other in space, the dichroic prism and the measuring objective lens are arranged along the first axis, and the dichroic prism and the reference objective lens are arranged along the second axis; The objective lens rotation adjustment member includes a first objective lens rotation adjustment member and a second objective lens rotation adjustment member, the first objective lens rotation adjustment member and the second objective lens rotation adjustment member are arranged in sequence along the second axis, the reference objective lens is connected to a side of the first objective lens rotation adjustment member away from the second objective lens rotation adjustment member, the rotation axis of the first objective lens rotation adjustment member is parallel to the first axis, and the rotation axis of the second objective lens rotation adjustment member is parallel to the third axis.

2. The interference system according to claim 1, characterized in that The second adjustment assembly also includes an objective lens translation adjustment member, which is arranged in sequence with the objective lens rotation adjustment member along the second axis, and the translation adjustment member is used to drive the reference objective lens to translate along the first axis and / or the third axis.

3. The interference system according to claim 2, characterized in that The objective lens translation adjustment member has a first side and a second side that are relatively arranged, the first side is provided with a fixed pin, and the second side is provided with two relatively arranged objective lens translation fine-adjustment screws; the objective lens translation fine-adjustment screws are used to drive the objective lens translation adjustment member to rotate around the fixed pin, so as to drive the middle part of the objective lens translation adjustment member to translate along the first axis and / or the third axis, and to position the objective lens translation fine-adjustment screws.

4. The interference system according to claim 2, characterized in that The objective lens translation adjustment member includes a first objective lens translation adjustment member and a second objective lens translation adjustment member, and the first objective lens rotation adjustment member, the second objective lens rotation adjustment member, the first objective lens translation adjustment member and the second objective lens translation adjustment member are stacked in sequence along the second axis; the first objective lens translation adjustment member is used to drive the reference objective lens to translate along the third axis, and the second objective lens translation adjustment member is used to drive the reference objective lens to translate along the first axis.

5. The interference system according to claim 1, characterized in that The second adjustment component also includes an objective lens rotation fine adjustment screw, which is provided on opposite sides of the rotating arc surface to drive the objective lens rotation adjustment member to rotate around the center of the rotating arc surface and position the objective lens rotation adjustment member.

6. The interference system according to any one of claims 1 to 5, characterized in that: The first axis, the second axis and the third axis are three axes perpendicular to each other in space, the dichroic prism and the measuring objective lens are arranged along the first axis, and the dichroic prism and the reference objective lens are arranged along the second axis; The first adjustment component can drive the beam splitter prism to move linearly along the first axis, and drive the beam splitter prism to rotate around the first axis, the second axis and the third axis.

7. The interference system according to claim 6, characterized in that The first adjustment component includes a prism translation adjustment member, a prism translation fine adjustment screw and a precision electric translation stage; the beam splitter prism is connected to the precision electric translation stage, and the precision electric translation stage is connected to the prism translation adjustment member; the precision electric translation stage is used to drive the beam splitter prism to translate along the first axis; The reference seat has a first guide groove and a second guide groove, both of which are parallel to the first axis, the cross-section of the first guide groove is a rectangle, and the cross-section of the second guide groove is an inverted triangle; the prism translation adjustment member has a first protrusion and a second protrusion, the first protrusion matches the shape of the first guide groove and is movably arranged in the first guide groove, the second protrusion matches the shape of the second guide groove and is movably arranged in the second guide groove, so as to guide the dichroic prism to translate along the first axis.

8. The interference system according to any one of claims 1 to 5, characterized in that: The first axis, the second axis and the third axis are three axes perpendicular to each other in space, the dichroic prism and the measuring objective lens are arranged along the first axis, and the dichroic prism and the reference objective lens are arranged along the second axis; The third adjustment component can drive the reference reflector to move linearly along the second axis, and drive the reference reflector to rotate around the first axis and the third axis.

9. The interference system according to claim 8, characterized in that The third adjustment assembly comprises a reflector translation adjustment member, a reflector rotation adjustment member, a reflector translation fine adjustment screw, a reflector rotation fine adjustment screw and a pre-tension spring, the reflector translation adjustment member is movably arranged on the reflector mounting seat, and the reflector translation fine adjustment screw is used to drive the reflector translation adjustment member to translate along the second axis on the reflector mounting seat; The reference reflector is connected to the reflector rotation adjustment member, and the reflector rotation adjustment member is movably arranged on the reflector translation adjustment member. The reflector rotation adjustment member is triangular in shape, and there are three reflector rotation fine-adjustment screws, which are respectively arranged corresponding to the three vertices of the reflector rotation adjustment member to drive the corresponding vertices to move closer to and away from the reflector translation adjustment member; the pre-tension spring is used to provide a pre-tensioning force to the reflector rotation adjustment member so that the reflector rotation adjustment member and the reflector rotation fine-adjustment screw are pressed tightly.

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