Vortex type flow regulating valve

Abstract

A vortex-type flow rate control valve (11) includes: a volute chamber (27) defined by a cylindrical peripheral side wall (13), and a first end wall (15) and a second end wall (17) provided at both ends thereof; an inlet flow path (19) extending along an inlet flow path central axis (P1) and opening to the peripheral side wall (13); and an outlet flow path (21) extending along an outlet flow path central axis (P2) and opening to the first end wall (15). The inlet flow path (19) is provided so that the center axis (P1) of the inlet flow path passes through a position deviating from the center axis (O) of the volute chamber and the center axis (P2) of the outlet flow path, the second end wall (17) is configured so as to be moved closer to and away from the first end wall (15) by a drive unit, and the flow rate of the fluid flowing out from the outlet flow path is adjusted in accordance with the amount of movement of the second end wall (17) with respect to the first end wall (15).

Description

Technical Field

[0001] The present invention relates to a flow rate regulating valve for a fluid conveying pipeline used in various industrial fields such as a chemical plant, a semiconductor manufacturing field, a liquid crystal manufacturing field, and a food field. Background Art

[0002] Needle valves are generally used for flow regulation in various industrial fields. For example, according to Patent Document 1, a needle valve is a valve body having a through hole, and the conical front end of the valve body, called a valve needle, is inserted into a valve seat having a through hole, so that the peripheral surface of the front end of the valve needle moves closer to or farther from the valve seat, thereby changing the gap between the valve needle and the valve seat, thereby regulating the flow of the fluid flowing through the gap between the valve needle and the valve seat. In order to be able to fine-tune the flow rate, the gap between the valve needle and the valve seat in the needle valve is narrower than other flow paths. In particular, near the lower limit of the needle valve's operating flow range, the gap between the valve needle and the valve seat is very narrow.

[0003] [Prior art literature] [Patent Literature] [Patent Document 1] Japanese Patent No. 5144880 [Patent Document 2] Japanese Utility Model Publication No. 59-5209 Summary of the invention

[0004] [Problems to be solved by the invention] As mentioned above, in a needle valve, the gap between the valve needle and the valve seat is narrow, especially near the lower limit of the flow range of the needle valve, the gap between the valve needle and the valve seat is very narrow. Therefore, once the coaxiality of the valve needle and the valve seat deteriorates, when adjusting to a low flow rate, the valve needle and the valve seat, which should not be in contact, will contact and slide, causing wear of the valve needle and the valve seat. Once such wear occurs, the gap between the valve needle and the valve seat, that is, the relationship between the opening of the needle valve and the flow rate, changes, making it difficult to adjust to the correct flow rate. In addition, particles generated by wear will mix into the fluid. Such mixing of particles in the fluid will cause major problems, especially in the field of semiconductor manufacturing. In the case of using an electric actuator to drive the valve needle and frequently adjusting the flow rate by feedback control, the above-mentioned problem will be particularly significant because the valve needle will often move back and forth. In addition, once the relationship between the opening of the needle valve and the flow rate changes, the control parameters in feedback control, etc. must be readjusted. In such cases, the life span is often regarded as substantially expired and the components are replaced, resulting in an increase in maintenance costs.

[0005] As a method to avoid sliding between the valve body and the valve seat, for example, the method of using a vortex-type fluid assembly using a swirl is described in Patent Document 2. The vortex-type fluid assembly described in Patent Document 2 includes a vortex chamber having an output port in the center, an input nozzle connected to the outer periphery of the vortex chamber and limiting the direction of the fluid from the input port toward the output port, and a control nozzle for spraying the fluid ejected from the input nozzle near the outlet of the vortex chamber to form a vortex in the vortex chamber, wherein the control flow ejected from the control nozzle is deflected from the jet ejected from the input nozzle in the interference area to collide with the jet ejected from the input nozzle to generate a vortex in the vortex chamber. By generating a vortex, a pressure difference is generated between the interference area and the output port to increase the flow resistance, thereby controlling the output flow. However, in such a vortex-type fluid assembly, although there will be no contact between the valve body and the valve seat, in order to control the flow, the flow of the control flow ejected from the control nozzle must be adjusted. Therefore, the flow adjustment of the control flow must have a flow regulating valve, and as a result, there is still a concern that particles are mixed into the control flow.

[0006] Therefore, an object of the present invention is to provide a flow control valve in which a valve body and a valve seat do not come into contact in a region contacting a fluid to be controlled, so as to solve the problems existing in the prior art.

[0007] [Technical means to solve the problem] In view of the above-mentioned purpose, the present invention provides a vortex type flow control valve, comprising: a vortex chamber, which is defined by a cylindrical circumferential side wall and a first end wall and a second end wall which are arranged at both ends of the circumferential side wall and are opposite to each other and extend along a central axis of the vortex chamber; an inlet flow path, which extends along a central axis of the inlet flow path and opens at the circumferential side wall; and an outlet flow path, which extends along a central axis of the outlet flow path and opens at the first end wall, so that the fluid flowing in from the inlet flow path forms a vortex in the vortex chamber and flows out from the outlet flow path, wherein the inlet flow path is arranged so that the central axis of the inlet flow path passes through a position deviating from the central axis of the vortex chamber and the central axis of the outlet flow path, and the second end wall is configured to move in a manner of approaching and moving away from the first end wall by a driving portion, and the flow rate of the fluid flowing out of the outlet flow path is adjusted according to the movement amount of the second end wall relative to the first end wall.

[0008] In the above-mentioned vortex type flow control valve, a vortex chamber extending along the central axis of the vortex chamber is defined by a cylindrical circumferential side wall and a first end wall and a second end wall arranged at both ends of the circumferential side wall and facing each other, and an inlet flow path is set in a manner that the central axis of the inlet flow path of the inlet flow path opening in the circumferential side wall passes through a position deviating from the central axis of the vortex chamber and the central axis of the outlet flow path, and an outlet flow path is opened in the first end wall. Therefore, the fluid flowing in from the inlet flow path forms a vortex in the vortex chamber, and after flowing into a vortex, it flows out from the outlet flow path. As a result, pressure loss is generated according to the length of the vortex from the inlet flow path to the outlet flow path (that is, the length of the streamline of the vortex) and the flow rate. Furthermore, when the second end wall defining the vortex chamber moves relative to the first end wall by the driving unit and approaches and moves away, the height of the space (the distance between the first end wall and the second end wall) through which the vortex in the vortex chamber can flow changes, thereby increasing or decreasing the area that can flow. As a result, the flow rate of the vortex in the vortex chamber changes and increases or decreases. As mentioned above, the pressure loss of the fluid flowing from the inlet flow path to the outlet flow path in the vortex chamber is related to the length and flow velocity of the streamline of the vortex (eddy current) flowing from the inlet flow path to the outlet flow path. Therefore, when the flow velocity of the eddy current of the fluid in the vortex chamber increases, the pressure loss generated between the flow of the fluid from the inlet flow path to the outlet flow path increases, and the flow rate flowing out of the outlet flow path decreases. On the other hand, when the flow velocity of the eddy current of the fluid in the vortex chamber decreases, the pressure loss generated between the flow of the fluid from the inlet flow path to the outlet flow path decreases, and the flow rate flowing out of the outlet flow path increases. By utilizing such characteristics, a drive unit is used to move the second end wall closer to or farther from the first end wall, thereby adjusting the flow rate of the fluid flowing out of the outlet flow path.

[0009] In the above-mentioned vortex flow control valve, the second end wall can be formed by a diaphragm that moves relative to the first end wall by a driving unit. By forming the second end wall with such a diaphragm, there is no need to set a sliding or approaching and moving part, and the second end wall can be moved relative to the first end wall with a simple structure.

[0010] In this case, the diaphragm may include a movable part moved by the driving part and a supporting part connected to the outer peripheral edge of the movable part and supporting the movable part and capable of elastic deformation, or may include a movable part moved by the driving part and a supporting part connected to the outer peripheral edge of the movable part and supporting the movable part and capable of deflection or bending.

[0011] Furthermore, it is preferred that the outlet flow path is arranged so that the central axis of the outlet flow path extends in line with the central axis of the vortex chamber.

[0012] Furthermore, in the above-mentioned vortex flow control valve, a protrusion protruding toward the diaphragm can be provided on the first end wall. By providing the protrusion, the protrusion hinders the vortex, so that the fluid can easily flow to the outlet flow path, and the distance that the fluid flows from the inlet flow path to the outlet flow path becomes shorter and the pressure loss is reduced, so that the effect of increasing the flow rate can be exerted.

[0013] The first end wall and the second end wall are preferably circular or elliptical. In such a case, the vortex chamber becomes cylindrical or elliptical, so that the fluid flowing into the vortex chamber from the inlet flow path flows along the peripheral side wall, and becomes easy to form a vortex.

[0014] [Comparison with the efficacy of existing technologies] According to the present invention, a vortex is generated in the vortex chamber, and the second end wall is moved closer to or farther from the first end to change the area through which the vortex can flow, thereby increasing or decreasing the flow rate of the vortex in the vortex chamber. By utilizing such characteristics, a driving unit is used to move the second end wall closer to or farther from the first end wall, thereby changing the pressure loss generated between the flow of the fluid from the inlet flow path to the outlet flow path and adjusting the flow rate of the fluid flowing out of the outlet flow path. Therefore, when using the vortex flow control valve of the present invention, it is not necessary to set a valve body and a valve seat in the area in contact with the fluid to be controlled, and the contact portion between the valve body and the valve seat can be eliminated. As a result, it is not necessary to reset the parameters for flow control due to the wear of the valve body and the valve seat, and further, it is also possible to suppress the mixing of particles into the fluid. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] [ Figure 1 ] is a partial cross-sectional stereoscopic view showing the overall structure of the vortex type flow control valve according to the present invention, with a portion of the cross section being visible.

[0016] [ Figure 2 ]from Figure 1 View from above Figure 1 A top view of a vortex type flow control valve is shown.

[0017] [ Figure 3 ]from Figure 1 Side view Figure 1 A side view of a vortex type flow control valve is shown.

[0018] [ Figure 4 ]express Figure 1 Schematic diagram of the flow direction in the vortex chamber of the vortex type flow control valve shown.

[0019] [ Figure 5A ]A schematic diagram showing the operation of the vortex type flow control valve of the first embodiment.

[0020] [ Figure 5B ]A schematic diagram showing the operation of the vortex type flow control valve of the first embodiment.

[0021] [ Figure 5C ]A schematic diagram showing the operation of the vortex type flow control valve of the first embodiment.

[0022] [ Fig. 6A ]A schematic diagram showing the operation of the vortex type flow control valve of the second embodiment.

[0023] [ Figure 6B ]A schematic diagram showing the operation of the vortex type flow control valve of the second embodiment.

[0024] [ Figure 6C ]A schematic diagram showing the operation of the vortex type flow control valve of the second embodiment.

[0025] [ Fig. 7A ]A schematic diagram showing the operation of a modified example of the vortex type flow control valve of the second embodiment.

[0026] [ Figure 7B ]A schematic diagram showing the operation of a modified example of the vortex type flow control valve of the second embodiment.

[0027] [ Figure 7C ]A schematic diagram showing the operation of a modified example of the vortex type flow control valve of the second embodiment.

[0028] [ Fig. 8A ]A schematic diagram illustrating the structure and dimensions of the vortex type flow control valve used in the numerical simulation, wherein the vortex type flow control valve is shown as viewed from above with the upper end wall (second end wall) removed.

[0029] [ Figure 8B ]A schematic diagram illustrating the structure and dimensions of the vortex type flow control valve used in the numerical simulation, which shows the state of the vortex type flow control valve viewed from the side.

[0030] [ Fig. 9 ] will use Fig. 8A and Figure 8B The graph is a line graph showing the measurement results of the relationship between the movement distance of the diaphragm from the initial position toward the first end wall and the flow rate Q when the position of the inlet flow path is changed in the numerical simulation of the vortex type flow control valve.

[0031] [ Fig.10 ] will use Fig. 8A and Figure 8B The graph is a line graph showing the relationship between the position of the inlet flow path obtained by numerical simulation of the vortex type flow control valve and the flow rate difference ΔQ (the amount of change in the flow rate from the outlet flow path) when the movement distance of the diaphragm is changed from 0.5 mm to 5.5 mm.

[0032] [ Fig.11 ] is a schematic diagram showing a vortex type flow rate regulating valve according to a third embodiment of the present invention.

[0033] [ Fig. 12A ] is a schematic diagram of a vortex type flow control valve according to a fourth embodiment of the present invention, in which the second end wall is arranged in an initial position.

[0034] [ Fig. 12B ] is a schematic diagram of a vortex type flow control valve according to a fourth embodiment of the present invention, which shows a state in which the second end wall moves toward the first end wall. DETAILED DESCRIPTION

[0035] The following describes an implementation of a vortex type flow control valve according to the present invention with reference to the accompanying drawings.

[0036] First, refer to Figures 1 to 3 , illustrating the overall structure of the vortex type flow control valve 11 according to the present invention.

[0037] The vortex flow control valve 11 includes: a cylindrical peripheral wall 13 extending along the central axis, a first end wall 15 and a second end wall 17 arranged at both ends of the peripheral wall 13 in the central axis direction in a manner opposite to each other, an inlet flow path 19 and an outlet flow path 21, and the second end wall 17 can be approached and separated relative to the first end wall 15. The first end wall 15 and the second end wall 17 are arranged to close the ends of the peripheral wall 13 in the central axis direction, and the space surrounded by the peripheral wall 13, the first end wall 15 and the second end wall 17 constitutes a cylindrical vortex chamber 27 extending along the central axis O of the vortex chamber. The central axis O of the vortex chamber coincides with the central axis of the peripheral wall 13. In addition, in this specification, "center" means the center of gravity of the cross section, and the central axis of the vortex chamber means the axis passing through the center of gravity position of each cross section of the vortex chamber 27 perpendicular to the central axis O of the vortex chamber. In the embodiment shown in the drawings, the first end wall 15 and the second end wall 17 are circles of the same size, the peripheral side wall 13 is cylindrical, and the vortex chamber central axis O extends in a manner connecting the center (center of gravity) of the first end wall 15 and the center (center of gravity) of the second end wall 17. However, the shapes of the first end wall 15 and the second end wall 17 are not limited to circles, and can be elliptical or any other shapes such as triangles, quadrilaterals, etc. as long as vortexes can be generated in the vortex chamber 27. Furthermore, the first end wall 15 and the second end wall 17 are not limited to planes, and can also be formed by, for example, curved surfaces.

[0038] The inlet flow path 19 extends along the inlet flow path center axis P1 perpendicular to the vortex chamber center axis O and opens at the peripheral side wall 13. The inlet flow path center axis P1 extends in a manner passing through the center of the cross section of the inlet flow path 19. Furthermore, the outlet flow path 21 extends along the outlet flow path center axis P2 from the vortex chamber 27 toward the outside and parallel to the vortex chamber center axis O, and opens at the first end wall 15 of the vortex chamber 27. The outlet flow path center axis P2 extends in a manner passing through the center of the cross section of the outlet flow path 21. In the embodiment shown in the accompanying drawings, the inlet flow path 19 and the outlet flow path 21 are both composed of a circular tube with a circular cross-sectional shape. However, the cross section of the inlet flow path 19 and the outlet flow path 21 is not limited to a circle, but may also be an elliptical shape or a polygonal shape such as a quadrilateral. Furthermore, in the embodiment shown in the accompanying drawings, the inlet flow path 19 is composed of a straight circular tube, but as long as the fluid can flow into the vortex chamber 27, it may also be other shapes such as a nozzle shape.

[0039] The inlet flow path 19 is arranged so that the central axis P1 of the inlet flow path passes through an eccentric position deviating from the central axis O of the vortex chamber. Therefore, the fluid flowing in from the inlet flow path 19 hits the peripheral side wall 13 in the vortex chamber 27 and flows along the peripheral side wall 13 to generate a swirl flow and form a vortex flow, and flows out from the outlet flow path 21 toward the outlet flow path 21. In order to easily generate a swirl flow, the inlet flow path 19 is preferably arranged in a manner that the fluid flowing into the vortex chamber 27 from the inlet flow path 19 flows along the peripheral side wall 13. On the other hand, as long as the fluid flowing into the vortex chamber 27 from the inlet flow path 19 can flow out from the outlet flow path 21 after the vortex flow is generated, the outlet flow path 21 can be arranged at any position of the first end wall 15. That is, as long as the fluid flowing into the vortex chamber 27 from the inlet flow path 19 is not allowed to flow out directly from the outlet flow path 21, the outlet flow path 21 is arranged so that the central axis P2 of the outlet flow path extends through a position away from the central axis P1 of the inlet flow path.

[0040] In the embodiment shown in the drawings, the inlet flow path 19 is connected to the cylindrical peripheral side wall 13 in a manner that the inlet flow path center axis P1 is parallel to the tangent, so that the fluid flows from the inlet flow path 19 to the peripheral side wall 13 in a substantially tangential direction into the vortex chamber 27. Furthermore, the outlet flow path 21 is configured to open at the first end wall 15 and to make the outlet flow path center axis P2 pass through the center of the first end wall 15, that is, the outlet flow path center axis P2 extends on the vortex chamber center axis O. With such a configuration, the fluid flowing in from the inlet flow path 19 flows along the peripheral side wall 13 in the vortex chamber 27 to generate a swirl flow, gradually approaches the center, and flows toward the outlet flow path 21 in a vortex shape.

[0041] At least a portion of the second end wall 17 is driven by the driving unit 25 and can move relative to the first end wall 15 in the vortex chamber 27 along a moving axis extending parallel to the central axis O of the vortex chamber. The driving unit 25 can use a suitable mechanism such as an electric actuator as long as it can move the second end wall 17. Furthermore, the driving unit 25 can adopt various driving methods such as manual, pneumatic, and electric. The driving unit 25 is used to move at least a portion of the second end wall 17 in the vortex chamber 27, thereby changing the distance (i.e., the gap) between the first end wall 15 and the second end wall 17. As a result, the volume of the space where the fluid flows changes, and the flow area of ​​the fluid can be increased or decreased. In addition, Figure 1 In the figure, the driving unit 25 is omitted for easy viewing.

[0042] In the vortex flow control valve 11, the second end wall 17 can be composed of a diaphragm including a movable portion 17a that is moved by the driving portion 25 and a supporting portion 17b that is connected and supports the movable portion 17a in a manner extending between the end of the peripheral side wall 13 in the direction of the central axis O of the vortex chamber and the outer peripheral edge of the movable portion 17a and is elastically deformable. For example, as a first embodiment of the vortex flow control valve 11, the supporting portion 17b of the diaphragm constituting the second end wall 17 can be formed of an elastic material, so that the supporting portion 17b is elastically deformed, and the movable portion 17a can be moved relative to the first end wall 15 (see FIG. 5A to FIG. 5C ). In this case, in order to facilitate the manufacture of the diaphragm, it is preferred that the movable portion 17a and the supporting portion 17b are formed of the same type of elastic material. However, as long as the supporting portion 17b is formed of an elastic material, the movable portion 17a can move, so the movable portion 17a can of course be formed of different types of elastic materials or non-elastic materials. Furthermore, as a second embodiment of the vortex type flow control valve 11, the supporting portion 17b of the diaphragm constituting the second end wall 17 can also be formed of a flexible material, so that the supporting portion 17b can be flexed or bent, and the movable portion 17a can be moved relative to the first end wall 15. In this case, in the initial position described later, the supporting portion 17b can be configured in a manner that is bent into a convex shape protruding toward the first end wall 15 (refer to FIG. 6A to FIG. 6C ), the support portion 17b may also be configured in a manner that is bent into a convex shape that protrudes in a direction away from the first end wall 15 (see 7A to 7C ).

[0043] Furthermore, in the embodiment shown in the drawings, a push rod driven by an electric actuator is used as the driving part 25, and the push rod pushes the movable part 17a to deform the support part 17b supporting the movable part 17a, so that the movable part 17a of the diaphragm can be moved relative to the first end wall 15. However, as long as the driving part 25 can move the movable part 17a relative to the first end wall 15, it is not limited to the push rod driven by the electric actuator. For example, as the driving part 25, a push rod driven manually or pneumatically can also be used. Furthermore, as long as it can push the movable part 17a of the diaphragm to deform the support part 17b, other mechanisms such as a piston cylinder can also be used as the driving part 25.

[0044] Next, taking the vortex flow control valve 11 of the first embodiment as an example, referring to Figure 4 5, the function of the vortex type flow control valve 11 of the present invention will be described.

[0045] As described above, the inlet flow path 19 is arranged so that the inlet flow path center axis P1 passes through an eccentric position away from the vortex chamber center axis O. Therefore, the fluid flowing in from the inlet flow path 19, such as Figure 4 As shown in FIG. 1 , a swirl flow is generated in the swirl chamber 27 and swirls into a vortex, and flows toward the outlet flow path 21 and out of the outlet flow path 21. The diaphragm as the second end wall 17 is located in a state where it is not pushed by the driving part 25. Figure 5A From this state, as shown in Figure 5B As shown, when the second end wall 17 (the movable portion 17a in the first embodiment) is pushed by the driving portion 25 and approaches the first end wall 15 provided with the outlet flow path 21, the distance between the first end wall 15 and the second end wall 17 is shortened, so that the gap becomes smaller. FIG. 5A to FIG. 5C In the first embodiment shown, the support portion 17b is elastically deformed by the push of the movable portion 17a caused by the driving portion 25, and at least the distance between the movable portion 17a and the first end wall 15 is shortened. As a result, the area through which the fluid of the vortex generated in the vortex chamber 27 can pass becomes smaller, so that the flow rate of the vortex increases. The fluid that flows into the vortex chamber 27 from the inlet flow path 19 and forms a vortex and flows toward the outlet flow path 21 and out of the outlet flow path 21 generates pressure loss according to the distance it flows and the flow rate. Therefore, as described above, when the second end wall 17 approaches the first end wall 15, it is Figure 5A Compared with the state shown in FIG. 1 , the flow velocity increases and the pressure loss increases. As a result, the flow rate of the fluid flowing out of the outlet flow path 21 decreases. Figure 5B In the state shown in FIG. 1 , the second end wall 17 (in the first embodiment, the movable portion 17a thereof) is further pushed by the driving portion 25. Figure 5C As shown in the figure, as the first end wall 15 is approached further, the velocity of the vortex is further increased, resulting in greater pressure loss. Figure 5BCompared with the state shown in FIG. 1 , the flow rate of the fluid flowing out of the outlet flow path 21 is further reduced.

[0046] Thus, in the vortex flow control valve 11, the second end wall 17 is moved in the direction approaching the first end wall 15, and the gap between the first end wall 15 and the second end wall 17 is reduced, so that the pressure loss of the fluid flowing from the inlet flow path 19 to the outlet flow path 21 increases, and the flow rate of the fluid flowing out of the outlet flow path 21 decreases. That is, the moving distance of the second end wall 17 from the initial position to the direction approaching the first end wall 15 is increased, and the area through which the fluid of the vortex generated in the vortex chamber 27 can pass is reduced, thereby increasing the pressure loss of the fluid flowing from the inlet flow path 19 to the outlet flow path 21, and the flow rate of the fluid flowing out of the outlet flow path 21 can be reduced. On the other hand, the moving distance of the second end wall 17 from the initial position to the direction approaching the first end wall 15 is shortened, and the area through which the fluid of the vortex generated in the vortex chamber 27 can pass is increased, thereby reducing the pressure loss of the fluid flowing from the inlet flow path 19 to the outlet flow path 21, and the flow rate of the fluid flowing out of the outlet flow path 21 can be increased. Therefore, by moving or deforming the second end wall 17 relative to the first end wall 15 in such a way that the gap between the first end wall 15 and the second end wall 17 changes, it is possible to adjust the flow rate of the fluid flowing out of the outlet flow path 21 and perform the function of a flow regulating valve without providing an abutment portion at the portion in contact with the target fluid. FIG. 6A to FIG. 6C and 7A to 7C It goes without saying that the same is true for the vortex type flow rate control valve 11 of the second embodiment shown.

[0047] As known from the above description, in the vortex-type flow control valve 11, as long as the gap between the first end wall 15 and the second end wall 17 can be changed, the flow rate of the fluid flowing out of the outlet flow path 21 can be changed, and therefore the present invention is not limited to the embodiment shown in the drawings. That is, the vortex-type flow control valve 11 according to the present invention can have various deformations. For example, the second end wall 17 can move closer to or further away from the first end wall 15 as long as the movable portion 17a is pushed to deform the supporting portion 17b, and the movable portion 17a does not need to be located in the center of the second end wall 17. Furthermore, it can also be as follows Fig.11The vortex flow control valve 11' of the third embodiment shown in the figure has a protrusion 29 provided on the first end wall 15 and the second end wall 17 is moved closer to or further away from the protrusion 29, thereby changing the gap between the top of the protrusion 29 and the second end wall 17. Furthermore, the vortex flow control valve 11' of the fourth embodiment shown in FIG12 may also be configured such that, instead of causing the second end wall 17 to move closer to or further away from the first end wall 15 by deformation, the second end wall 17' is moved along the circumferential side wall 13, from the initial position shown in FIG12 (a) to the second end wall 17' as shown in FIG12 (b), thereby changing the gap between the first end wall 15 and the second end wall 17'.

[0048] in addition, Fig.11 And in Figure 12, for Figure 1 The components common to the components of the vortex flow control valve 11 of the embodiment shown are assigned the same component symbols. Furthermore, in the vortex flow control valve 11' and the vortex flow control valve 11", the second end wall 17 or the second end wall 17' is close to and away from the first end wall 15. Figure 1 The vortex flow control valve 11 of the illustrated embodiment is similar in that the flow rate is adjusted by changing the distance (gap) between the first end wall 15 and the second end wall 17. Therefore, detailed description of the structure and operation will be omitted here.

[0049] The following instructions are based on Figure 1 The relationship between the movement distance of the diaphragm constituting the second end wall 17 from the initial position, the position of the inlet flow path 19 relative to the outlet flow path 21, and the flow rate and flow rate change amount of the fluid obtained by numerical simulation (hereinafter referred to as simulation) of a vortex type flow rate control valve having the same structure as the vortex type flow rate control valve 11 of the embodiment shown. In the following description, for easy understanding, the same component symbols as those of the vortex type flow rate control valve 11 are given to each structure of the vortex type flow rate control valve used in the simulation.

[0050] In the following description, unless otherwise specified, Fig. 8A and Figure 8BAs shown, the simulation is carried out under the condition that the vortex chamber 27 has a cylindrical shape with a diameter of 30 mm and a height of 7.5 mm, and the inlet flow path 19 in the shape of a straight circular tube with a diameter of 3.5 mm is connected to the peripheral wall 13 in a manner that the central axis P1 of the inlet flow path passes from a position at 1 / 2 of the height of the vortex chamber 27 (i.e., the distance between the first end wall 15 and the second end wall 17) toward a position 1.5 mm away from the first end wall 15, i.e., a position 2.25 mm away from the first end wall 15, and the outlet flow path 21 in the shape of a circular tube with a diameter of 3.5 mm and a length of 10 mm extends along the central axis O of the vortex chamber and is connected to the first end wall 15 in a manner that the central axis P2 of the outlet flow path passes through the center of the first end wall 15, and the circular area in diameter of 14 mm concentric with the second end wall 17 is pushed and moved by the driving unit 25. Furthermore, the position of the inlet flow path 19 relative to the outlet flow path 21 is defined as the ratio (%) of the distance between the center of the vortex chamber 27 (i.e., the outlet flow path center axis P2 of the outlet flow path 21) and the inlet flow path center axis P1 of the inlet flow path 19 relative to the value of the difference between the diameter of the cylindrical vortex chamber 27 and the diameter of the circular tube-shaped inlet flow path 19 divided by 2. This is because the inlet flow path 19 must be located away from the center of the vortex chamber 27 by a position where its inlet flow path center axis P1 is at least away from the peripheral side wall 13 by the radius of the inlet flow path 19.

[0051] First, the relationship between the movement distance (mm) of the diaphragm constituting the second end wall 17 from the initial position and the flow rate Q of the fluid flowing out of the outlet flow path 21 was confirmed. Here, the initial position of the diaphragm refers to the position of the diaphragm when it is not pushed by the driving unit 25. The simulation was performed for various positions of the inlet flow path 19 relative to the outlet flow path 21.

[0052] Fig. 9 This is a line graph that plots the relationship between the movement distance (mm) of the diaphragm (second end wall 17) from the initial position and the flow rate Q (L / min) of the fluid flowing out of the outlet flow path 21, obtained by simulation, for situations where the position of the inlet flow path 19 relative to the outlet flow path 21 is 0%, 25%, 50%, 62%, 75% and 100%. Fig. 9In the figure, the symbol "●" indicates the position of the inlet flow path 19 relative to the outlet flow path 21 is 0%, the symbol "▲" indicates the position of the inlet flow path 19 relative to the outlet flow path 21 is 25%, the symbol "■" indicates the position of the inlet flow path 19 relative to the outlet flow path 21 is 50%, the symbol "×" indicates the position of the inlet flow path 19 relative to the outlet flow path 21 is 762%, the symbol "*" indicates the position of the inlet flow path 19 relative to the outlet flow path 21 is 75%, and the symbol "◆" indicates the position of the inlet flow path 19 relative to the outlet flow path 21 is 100%, which shows the relationship between the moving distance (mm) of the diaphragm (second end wall 17) from the initial position and the flow rate Q (L / min) of the fluid flowing out of the outlet flow path 21.

[0053] from Fig. 9 It is confirmed that, except for the case where the inlet flow path 19 is located at the 0% position relative to the outlet flow path 21, the greater the distance that the diaphragm as the second end wall 17 moves from the initial position toward the first end wall 15, that is, the closer the distance between the first end wall 15 and the second end wall 17, the smaller the flow rate Q of the fluid flowing out of the outlet flow path 21. This is presumed to be because when the distance of movement of the diaphragm from the initial position becomes longer, the area through which the fluid can pass becomes narrower and the flow rate increases, and when a vortex is generated in the vortex chamber 27, the streamline from the inlet flow path 19 to the outlet flow path becomes longer, and thus the pressure loss is likely to increase with the increase in flow rate. Specifically, when the inlet flow path center axis P1 is in a positional relationship that does not intersect with the outlet flow path center axis P2, the fluid flowing in from the inlet flow path 19 collides with the peripheral wall 13 in the vortex chamber 27, flows along the peripheral wall 13, and becomes a vortex and flows toward the outlet flow path 21. Therefore, the length of the streamline from the inlet flow path 19 to the outlet flow path 21 becomes longer. Furthermore, when the diaphragm as the second end wall 17 moves from the initial position toward the first end wall 15, the distance between the first end wall 15 and the second end wall 17 becomes shorter, the flow velocity of the vortex in the vortex chamber 27 increases, and the pressure loss increases. As a result of the increase in pressure loss, the flow rate of the fluid flowing out of the outlet flow path 21 decreases.

[0054] Furthermore, from Fig. 9 It is known that the flow rate Q of the fluid flowing out of the outlet flow path 21 decreases as the inlet flow path 19 is set so that the inlet flow path center axis P1 passes through a position away from the outlet flow path center axis P2. This is presumed to be because the streamline of the vortex from the inlet flow path 19 to the outlet flow path 21 becomes longer and the pressure loss becomes greater as the inlet flow path center axis P1 passes through a position away from the outlet flow path center axis P2.

[0055] In this way, when the inlet flow path 19 is arranged so that the inlet flow path center axis P1 passes through a position away from the outlet flow path center axis P2, the flow rate Q of the fluid flowing out of the outlet flow path 21 changes according to the moving distance of the second end wall 17 from the initial position, and there is a correlation between the moving distance of the second end wall 17 from the initial position and the flow rate Q. Therefore, the flow rate Q can be adjusted and controlled by changing the moving distance of the second end wall 17 from the initial position to change the flow rate Q.

[0056] Next, the influence of the position of the inlet flow path 19 in the vortex chamber 27 was confirmed by simulation. Here, under the condition that the position of the outlet flow path 21 is connected to the first end wall 15 in a manner extending from the center of the vortex chamber 27, simulations were performed for the cases where the position of the inlet flow path 19 relative to the outlet flow path 21 was 0%, 25%, 50%, 62%, 75% and 100%.

[0057] Fig.10 This is a line graph plotting the relationship between the position of the inlet flow path 19 relative to the outlet flow path 21 and the flow rate difference ΔQ (L / min) when the movement distance of the diaphragm as the second end wall 17 from the initial position toward the first end wall 15 is changed from 0.5 mm to 5.5 mm. Fig.10 It is known that under the condition that the position of the outlet flow path 21 is connected to the first end wall 15 in a manner extending from the center of the vortex chamber 27, regardless of the position of the inlet flow path 19 relative to the outlet flow path 21, a flow difference ΔQ can be generated according to the moving distance of the second end wall 17. Therefore, regardless of the position of the inlet flow path 19 relative to the outlet flow path 21, the flow rate of the fluid flowing out of the outlet flow path 21 can be adjusted by moving the second end wall 17 of the vortex type flow control valve 11. Furthermore, it is known that the maximum flow difference ΔQ is generated when the position of the inlet flow path 19 relative to the outlet flow path 21 is 50%, and a wider range of flow adjustment can be performed. Therefore, when a wide range of flow adjustment is necessary, it is better to set the inlet flow path 19 in a manner that the position of the inlet flow path 19 relative to the outlet flow path 21 is 50%.

[0058] The vortex type flow control valve according to the present invention has been described above with reference to the embodiments shown in the drawings, but the present invention is not limited to the embodiments shown in the drawings. For example, in the embodiments shown in the drawings, although a cylindrical vortex chamber 27 is used, an elliptical or polygonal cylindrical vortex chamber may also be used as long as a vortex can be generated in the vortex chamber 27. Furthermore, the flow rate Q can be changed by moving the second end wall 17 relative to the first end wall 15 to change the gap, so it is also possible to change the flow rate Q as shown in the embodiment shown in the drawings. Fig.11In the third embodiment shown, a protrusion 29 is provided on the first end wall 15. Furthermore, as shown in the fourth embodiment of FIG. 12 , the second end wall 17' can be moved along the peripheral wall 13 toward the first end wall 15, thereby changing the distance between the first end wall 15 and the second end wall 17.

[0059]

Explanation of symbols

Claims

1. A vortex flow control valve, comprising: A vortex chamber is defined by a cylindrical peripheral side wall and a first end wall and a second end wall disposed at both ends of the peripheral side wall and facing each other and extending along the central axis of the vortex chamber; an inlet flow path extending along a central axis of the inlet flow path and opening at the peripheral side wall; as well as An outlet flow path extends along the central axis of the outlet flow path and opens to the first end wall, so that the fluid flowing in from the inlet flow path forms a vortex in the vortex chamber and flows out from the outlet flow path, In which, the inlet flow path is configured so that the central axis of the inlet flow path passes through a position deviating from the central axis of the vortex chamber and the central axis of the outlet flow path, and the second end wall is configured to move in a manner close to or away from the first end wall by a driving portion, and the flow rate of the fluid flowing out of the outlet flow path is adjusted according to the movement amount of the second end wall relative to the first end wall.

2. The vortex type flow control valve as claimed in claim 1, wherein the second end wall is composed of a diaphragm that moves toward and away from the first end wall by a driving unit.

3. The vortex type flow control valve as claimed in claim 2, wherein the diaphragm includes a movable portion moved by the driving portion and a supporting portion connected to an outer peripheral edge portion of the movable portion and supporting the movable portion so as to be elastically deformable.

4. The vortex type flow control valve as claimed in claim 2, wherein the diaphragm includes a movable portion moved by the driving portion and a supporting portion connected to an outer peripheral edge portion of the movable portion and supporting the movable portion so as to bend or bend. 5 . The vortex type flow control valve as claimed in claim 1 , wherein the outlet flow path is arranged so that a central axis of the outlet flow path extends in line with a central axis of the vortex chamber. 6 . The vortex type flow control valve as claimed in claim 1 , wherein a protrusion protruding toward the diaphragm is provided on the first end wall. 7 . The vortex-type flow control valve according to claim 1 , wherein the first end wall and the second end wall are circular or elliptical.

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