Temperature control system, temperature control method and processing equipment

Abstract

The invention relates to a temperature control system, a temperature control method and processing equipment, the temperature control system comprises a control unit, a temperature processing unit, a temperature detection unit, a heating control unit and a heating piece, and the heating control unit is connected with the control unit, the heating piece and the temperature processing unit. The temperature processing unit is connected with the temperature detection unit and the control unit; the control unit sets an expected temperature value SV; the temperature detection unit detects the temperature PV of the heating element and transmits the temperature PV to the temperature processing unit, the temperature processing unit calculates a control quantity by using a difference value between an expected temperature value SV and a measured temperature value PV, and the heating control unit controls the power of the heating element according to the control quantity; the control unit stores template data, and the template data comprises a temperature value T and a corresponding heating duration t; the control unit positions a corresponding template data temperature value T according to the temperature value PV corresponding heating duration t1, subtracts the PV difference value delta T from T and compares the difference value delta T with a threshold value a; if delta Tgt; and a, the control unit controls to increase the power of the heating element.

Description

Technical Field

[0001] The present application belongs to the field of temperature control technology, and more specifically, to a temperature control system, a temperature control method and processing equipment. Background Art

[0002] With the development of science and technology, the operation of various equipment is gradually moving towards full automation to liberate labor and improve production efficiency.

[0003] Currently, the relevant technology discloses an automatic temperature control solution. However, due to the unreasonable setting of the temperature control solution, the heating components or temperature sensing components in actual equipment gradually age with use and cannot meet the precise temperature control requirements. Summary of the invention

[0004] The present application provides a temperature control system that can improve temperature control accuracy.

[0005] The technical solution adopted in the present application is: to provide a temperature control system, including a control unit, a temperature processing unit, a temperature detection unit, a heating control unit and a heating element, wherein the control unit is electrically connected to the temperature processing unit and the heating control unit, the temperature detection unit is electrically connected to the temperature processing unit, and the heating control unit is electrically connected to the heating element; the control unit is used to set a desired temperature value (SV) as a target value of the heating element; the temperature detection unit is used to detect the temperature of the heating element or the temperature of the area heated by the heating element, and the measured temperature value (PV) detected by the temperature detection unit can be fed back to the temperature processing unit, and the temperature processing unit can calculate the corresponding control amount according to the difference between the desired temperature value (SV) and the measured temperature value (PV) through a PID algorithm, and the heating control unit The unit can adjust the current according to the control amount to control the heating power of the heating element; wherein the control unit stores template data of at least one temperature control process, and each of the template data includes multiple temperature values ​​(T) and a heating time (t) to reach the temperature value (T); the temperature processing unit can feed back the measured temperature value (PV) to the control unit, and the control unit can locate the temperature value (T) corresponding to the heating time (t) equal to the heating time (t1) in the template data of the corresponding process according to the heating time (t1) corresponding to the measured temperature value (PV) of the current process, and compare the difference (ΔT) obtained by subtracting the measured temperature value (PV) from the temperature value (T) with a preset threshold (a); if ΔT>a, the control unit can control the heating control unit to compensate the current of the heating element to increase the heating power of the heating element.

[0006] Furthermore, each of the template data also includes the current value (I) of the heating element corresponding to each temperature value (T); if ΔT>a, the control unit can control the heating control unit to increase the current of the heating element to the current value (I) corresponding to the temperature value (T) to increase the heating power of the heating element.

[0007] Furthermore, the temperature detection unit may perform detection once at intervals of a preset time (Δt).

[0008] The present application also provides a temperature control method applicable to any of the above temperature control system embodiments, characterized in that it comprises the steps of:

[0009] The control unit sets the template data;

[0010] The control unit sets a desired temperature value (SV) and a threshold value (a);

[0011] The temperature detection unit detects the temperature of the heating element or the temperature of the area heated by the heating element, obtains a measured temperature value (PV), and feeds it back to the temperature processing unit;

[0012] The temperature processing unit obtains the difference between the desired temperature value (SV) and the measured temperature value (PV), and calculates the corresponding control amount through the PID algorithm. At the same time, the temperature processing unit continues to feed back the measured temperature value (PV) to the control unit;

[0013] The heating control unit adjusts the current according to the control amount and controls the heating power of the heating element;

[0014] The control unit locates the temperature value (T) corresponding to the heating time (t) equal to the heating time (t1) in the template data of the corresponding process according to the heating time (t1) corresponding to the measured temperature value (PV) of the current process, and subtracts the measured temperature value (PV) from the temperature value (T) to obtain the difference (ΔT), and then determines whether ΔT is greater than a;

[0015] If ΔT>a, the control unit controls the heating control unit to compensate the current of the heating element to increase the heating power of the heating element.

[0016] Furthermore, the “temperature detection unit detects the temperature of the heating element or the temperature of the area heated by the heating element, obtains a measured temperature value (PV), and feeds it back to the temperature processing unit” includes the steps of:

[0017] The temperature detection unit detects once every preset time interval (Δt);

[0018] The temperature detection unit feeds back the measured temperature value (PV) obtained each time to the temperature processing unit.

[0019] Further, the template data in the statement "the control unit locates the temperature value (T) corresponding to the heating duration (t) equal to the heating duration (t1) in the template data of the corresponding process according to the heating duration (t1) corresponding to the measured temperature value (PV) of the current process, subtracts the measured temperature value (PV) from the temperature value (T) to obtain a difference (ΔT), and then determines whether ΔT is greater than a" further includes the current value (I) of the heating element corresponding to each temperature value (T); the statement "if ΔT > a, the control unit controls the heating control unit to compensate the current of the heating element to increase the heating power of the heating element" includes the steps:

[0020] The control unit controls the heating control unit to use the current value (I) corresponding to the temperature value (T) in the template data as the compensation current of the heating element.

[0021] Further, the statement "the control unit sets the template data" includes the steps:

[0022] Obtain a data set;

[0023] Set the data set that meets the preset criteria as the template data of the control unit;

[0024] The statement "obtain a data set" includes the steps:

[0025] The heating element performs a temperature control process in a preset state;

[0026] Obtain the data sets of the heating element at different durations respectively, and each data set includes the temperature value corresponding to the heating element, the heating duration corresponding to rising to this temperature value, and the current value corresponding to rising to this temperature value.

[0027] Further, the statement "the control unit sets the template data" further includes the steps:

[0028] In the template data, draw a duration-temperature curve as a template curve according to the data sets of the heating element obtained at different durations;

[0029] The "temperature control method" further includes the steps:

[0030] Draw a duration-temperature measured curve based on the measured temperature value (PV) obtained according to the process corresponding to the template data, the heating duration (t1) corresponding to rising to this temperature value (PV), and the current value (i) corresponding to rising to this temperature value (PV);

[0031] Fit and compare the measured curve with the template curve.

[0032] Further, if ΔT < a, the control unit subtracts the next received measured temperature value (PV) from the temperature value (T) to obtain a difference (ΔT), and continues to determine whether ΔT is greater than a.

[0033] The present application also provides a processing equipment, including a processing device provided with a heating chamber and a temperature control system as described above, wherein the temperature control system can execute any temperature control method as described above, the heating element is arranged in the heating chamber of the processing device, and the temperature detection unit is arranged in the processing device and is configured to detect the temperature of the heating element or the temperature of the heating chamber.

[0034] In the temperature control system provided by the present application, before the temperature control system executes the temperature control process, the control unit sets the expected temperature value (SV) as the target value of the actual heating of the heating element. After the temperature control process is started, the temperature detection unit starts to detect the temperature of the heating element or the temperature of the area heated by the heating element to obtain the measured temperature value (PV), which is then fed back to the temperature processing unit. The temperature processing unit calculates the corresponding control quantity using the PID algorithm according to the difference between the set expected temperature value (SV) and the measured temperature value (PV) (since the temperature control process is generally a heating process, that is, the measured temperature value (PV) generally does not exceed the expected temperature value (SV), the difference between the expected temperature value (SV) and the measured temperature value (PV) is generally the value of the expected temperature value (SV) minus the measured temperature value (PV)), and then transmits the control quantity to the heating control unit, which adjusts the current according to the control quantity to control the heating power of the heating element. This is one of the temperature control operation principles of the temperature control system of the present application.

[0035] Furthermore, the control unit is electrically connected to the heating control unit so that the control unit can directly control the heating control unit, thereby achieving the effect of compensating the current of the heating element. The principle is: after the temperature processing unit receives the measured temperature value (PV) fed back by the temperature detection unit, the temperature processing unit also feeds back the measured temperature value (PV) to the control unit, and the control unit compares the received measured temperature value (PV) with the template data stored in the control unit, wherein the template data includes multiple temperature values ​​(T), which can be understood as being used as a template for comparison with the actual measured values. At the same time, the template data also stores the heating time (t) corresponding to each temperature value (T) to reach the temperature value (T). The control unit uses the corresponding heating time (t1) of the measured temperature value (PV) to locate the equal heating time (t) in the template data. The corresponding temperature value (T) is obtained, thereby subtracting the measured temperature value (PV) from the temperature value (T) in the template data with the same corresponding heating time. Since the temperature control process is generally a heating process, that is, the measured temperature value (PV) generally does not exceed the temperature value (T) in the template data with the same corresponding heating time. The difference between the measured temperature value (PV) and the temperature value (T) in the template data with the same corresponding heating time is ΔT=T-PV; then the control unit compares the set threshold value (a) with ΔT. If ΔT>a, it can be understood that the temperature of the heating element or the temperature of the area heated by the heating element at this time differs from the corresponding temperature data in the template by more than the allowable value, that is, the threshold value (a). Then the control unit controls the heating control unit to compensate the current of the heating element to increase the heating power of the heating element so that the subsequent temperature detection analysis can meet the standard.

[0036] The operating principle of the temperature control system of the present application can be understood as follows: with the template data as a reference, when the difference between the measured temperature value (PV) and the temperature value (T) in the template data with the same heating time is less than or equal to the threshold value (a), the control unit will not control the heating control unit to compensate the current of the heating element, and the heating of the heating element is performed by the temperature processing unit according to the difference between the expected temperature value (SV) and the measured temperature value (PV), and the corresponding control quantity is calculated by the PID algorithm, and then the heating control unit adjusts the current according to the control quantity to control the heating power of the heating element. When the difference between the measured temperature value (PV) and the temperature value (T) in the template data with the same heating time is greater than the threshold value (a), then on the basis of "the temperature processing unit calculates the corresponding control quantity according to the difference between the expected temperature value (SV) and the measured temperature value (PV), and the heating control unit adjusts the current according to the control quantity to control the heating power of the heating element", the control unit will control the heating control unit to compensate the current of the heating element to increase the heating power of the heating element.

[0037] Therefore, even in the case where the heating element or the temperature detection unit gradually ages with use, causing the current of the heating element to gradually deviate and the heating power to fail to meet the requirements, the temperature control system of the present application can still automatically control the setting of the heating element compensation current by the heating control unit through the control unit, so that the heating element generates heat at the required power. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0039] Figure 1 A schematic diagram of the structure of a temperature control system provided in an embodiment of the present application;

[0040] Figure 2 A flow chart of a temperature control method provided in an embodiment of the present application;

[0041] Figure 3 For Figure 2 A flow chart of a temperature control method further refining step S1 based on the above;

[0042] Figure 4 For Figure 3 A flow chart of a temperature control method further refining step S8 based on the above;

[0043] Figure 5 A flow chart of a specific temperature control method provided in an embodiment of the present application;

[0044] Figure 6 A schematic diagram of fitting the template data curve and the measured data curve provided in the embodiment of the present application;

[0045] Figure 7 A schematic diagram of the structure of the processing equipment provided in an embodiment of the present application.

[0046] Among them, the reference numerals in the figure are:

[0047] 10. Temperature control system; 101. Control unit; 102. Temperature processing unit; 103. Temperature detection unit; 104. Heating control unit; 105. Heating element; 20. Processing equipment; 201. Processing device; 202. Heating chamber. DETAILED DESCRIPTION

[0048] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0049] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0050] It should be understood that the orientation or positional relationship indicated by the terms "length", "width", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0051] See also Figure 1 and Figure 6, the temperature control system 10 provided in the embodiment of the present application is now described. The temperature control system 10 provided in the embodiment of the present application includes a control unit 101, a temperature processing unit 102, a temperature detection unit 103, a heating control unit 104 and a heating element 105. The control unit 101 is electrically connected to the temperature processing unit 102 and the heating control unit 104, the temperature detection unit 103 is electrically connected to the temperature processing unit 102, and the heating control unit 104 is electrically connected to the heating element 105; the control unit 101 is used to set the expected temperature value (SV) as the target value of the heating element 105; the temperature detection unit 103 is used to detect the temperature of the heating element 105 or the temperature of the area heated by the heating element 105, and the measured temperature value (PV) detected by the temperature detection unit 103 can be fed back to the temperature processing unit 102, and the temperature processing unit 102 can calculate the desired temperature value (SV) and the measured temperature value (PV) according to the difference between the expected temperature value (SV) and the measured temperature value (PV) through the PID algorithm. The heating control unit 104 can adjust the current according to the control amount to control the heating power of the heating element 105; wherein, the control unit 101 stores at least one template data of a temperature control process, and each template data includes multiple temperature values ​​(T) and a heating time (t) to reach the temperature value (T); the temperature processing unit 102 can feed back the measured temperature value (PV) to the control unit 101, and the control unit 101 can locate the temperature value (T) corresponding to the heating time (t) equal to the heating time (t1) in the template data of the corresponding process according to the heating time (t1) corresponding to the measured temperature value (PV) of the current process, and compare the difference (ΔT) between the temperature value (T) and the measured temperature value (PV) with the preset threshold (a); if ΔT>a, the control unit 101 can control the heating control unit 104 to compensate the current of the heating element 105 to increase the heating power of the heating element 105.

[0052] In the temperature control system 10 provided in the embodiment of the present application, before the temperature control system 10 executes the temperature control process, the control unit 101 sets the expected temperature value (SV) as the target value for the actual heating of the heating element 105. After the temperature control process is started, the temperature detection unit 103 starts to detect the temperature of the heating element 105 or the temperature of the area heated by the heating element 105 to obtain the measured temperature value (PV), which is then fed back to the temperature processing unit 102. The temperature processing unit 102 calculates the corresponding control amount based on the difference between the set expected temperature value (SV) and the measured temperature value (PV) (since the temperature control process is generally a heating process, that is, the measured temperature value (PV) generally does not exceed the expected temperature value (SV), the difference between the expected temperature value (SV) and the measured temperature value (PV) is generally the value of the expected temperature value (SV) minus the measured temperature value (PV)) using the PID algorithm, and then transmits the control amount to the heating control unit 104. The heating control unit 104 adjusts the current based on the control amount to control the heating power of the heating element 105. This is a part of the temperature control operating principle of the temperature control system 10 of the embodiment of the present application. The temperature control operating principle of this part and the coordination of the corresponding units can be understood as the existing settings in the field. The PID algorithm is also well known in the field and will not be elaborated here.

[0053] Furthermore, the control unit 101 is electrically connected to the heating control unit 104 so that the control unit 101 can directly control the heating control unit 104, thereby achieving the effect of compensating the current of the heating element 105. The principle is as follows: after the temperature processing unit 102 receives the measured temperature value (PV) fed back by the temperature detection unit 103, the temperature processing unit 102 also feeds back the measured temperature value (PV) to the control unit 101, and the control unit 101 compares the received measured temperature value (PV) with the template data stored in the control unit 101, wherein the template data includes a plurality of temperature values ​​(T), which can be understood as being used as a template for comparison with the actual measured values. At the same time, the template data also stores the heating time (t) corresponding to each temperature value (T) to reach the temperature value (T). The control unit 101 uses the corresponding heating time (t1) of the measured temperature value (PV) to locate the corresponding temperature value in the template data. The temperature value (T) corresponding to the equal heating time (t) is obtained, thereby subtracting the measured temperature value (PV) from the temperature value (T) in the template data with the same corresponding heating time. Since the temperature control process is generally a heating process, that is, the measured temperature value (PV) generally does not exceed the temperature value (T) in the template data with the same corresponding heating time. The difference between the measured temperature value (PV) and the temperature value (T) in the template data with the same corresponding heating time is ΔT=T-PV; then the control unit 101 compares the set threshold (a) with ΔT. If ΔT>a, it can be understood that the temperature of the heating element 105 or the temperature of the area heated by the heating element 105 at this time is different from the corresponding temperature data in the template by more than the allowable value, that is, the threshold (a). Then the control unit 101 controls the heating control unit 104 to compensate the current of the heating element 105 to increase the heating power of the heating element 105, so that the subsequent temperature detection analysis can meet the standard.

[0054] The operating principle of the temperature control system 10 of the embodiment of the present application can be understood as follows: with the template data as a reference, when the difference between the measured temperature value (PV) and the temperature value (T) in the template data with the same corresponding heating time is less than or equal to the threshold value (a), the control unit 101 will not control the heating control unit 104 to compensate the current of the heating element 105, and the heating of the heating element 105 is achieved through the temperature processing unit 102 according to the difference between the expected temperature value (SV) and the measured temperature value (PV), and the corresponding control quantity is calculated through the PID algorithm, and then the heating control unit 104 adjusts the current according to the control quantity to control the heating power of the heating element 105. When the difference between the measured temperature value (PV) and the temperature value (T) in the template data with the same heating time is greater than the threshold value (a), the control unit 101 will control the heating control unit 104 to compensate the current of the heating element 105 to increase the heating power of the heating element 105, based on the fact that "the temperature processing unit 102 calculates the corresponding control quantity based on the difference between the expected temperature value (SV) and the measured temperature value (PV) through the PID algorithm, and then the heating control unit 104 adjusts the current based on the control quantity to control the heating power of the heating element 105".

[0055] Therefore, even in the case where the heating element 105 or the temperature detection unit 103 gradually ages with use, causing the current of the heating element 105 to gradually deviate and the heating power cannot meet the requirements, specifically, when the heating element 105 is oxidized and the resistance value increases, the current of the heating element 105 decreases when the voltage applied to both ends of the heating element 105 does not change, so that the heating power of the heating element 105 decreases and cannot meet the heating temperature requirements. However, the temperature control system 10 of the embodiment of the present application can still automatically control the setting of the compensation current of the heating element 105 by the heating control unit 104 through the control unit 101, so that the heating element 105 generates heat at the required power.

[0056] It should be noted that the above-mentioned expected temperature value (SV) and threshold value (a) are both set values, which can be determined according to needs. Of course, other set values ​​or process, step and other parameters can also be set. For example, the temperature detection unit 103 can be set to detect once every preset time interval (Δt), that is, every Δt period, the temperature of the heating element 105 or the temperature of the area heated by the heating element 105 is detected once. The Δt value can be determined according to needs. The embodiment of the present application takes the temperature detection unit 103 detecting the temperature of the heating element 105 as an example.

[0057] Each template data in the above embodiment may also include a current value (I) of the heating element 105 corresponding to each temperature value (T); if ΔT>a, the control unit 101 may control the heating control unit 104 to increase the current of the heating element 105 to the current value (I) corresponding to the corresponding temperature value (T) to increase the heating power of the heating element 105.

[0058] In the embodiment of the present application, the template data can be understood as a database, in which multiple data groups are stored. Each data group includes a temperature value (T), a corresponding heating time (t) to reach the temperature value (T), and a corresponding current value (I) of the heating element 105 to reach the temperature value (T). Of course, other data may also be included, depending on needs. Therefore, when compared with each other, different data groups in the template data can be considered to be distinguished according to different heating time lengths (t). In this way, when compared with the measured temperature value (PV), the data group in the template data corresponding to the heating time length is located based on the condition of equal heating time length, and then the measured temperature value (PV) is subtracted from the temperature value (T) in the corresponding data group by ΔT and then compared with the threshold value (a). When ΔT>a, the control unit 101 controls the heating control unit 104 to compensate the current of the heating element 105. Specifically, the embodiment of the present application uses the current value (I) in the corresponding data group as the target current, so that the heating element 105 after the current compensation is heated with the current value (I) in the corresponding data group. Of course, other current value compensation methods can also be used to meet the needs of increasing the heating power of the heating element 105, and then make the ΔT obtained in the subsequent process less than or equal to a.

[0059] See also Figure 2 The present application also provides a temperature control method applicable to the temperature control system described in any of the above embodiments, comprising the steps of:

[0060] S1, control unit sets template data;

[0061] S2, the control unit sets the desired temperature value (SV) and the threshold value (a);

[0062] S3, the temperature detection unit detects the temperature of the heating element or the temperature of the area heated by the heating element, obtains a measured temperature value (PV), and feeds it back to the temperature processing unit;

[0063] S4, the temperature processing unit obtains the difference between the desired temperature value (SV) and the measured temperature value (PV), and calculates the corresponding control amount through the PID algorithm. At the same time, the temperature processing unit continues to feed back the measured temperature value (PV) to the control unit;

[0064] S5, the heating control unit adjusts the current according to the control amount and controls the heating power of the heating element;

[0065] S6. The control unit locates the temperature value (T) corresponding to the heating time (t) equal to the heating time (t1) in the template data of the corresponding process according to the heating time (t1) corresponding to the measured temperature value (PV) of the current process, and subtracts the measured temperature value (PV) from the temperature value (T) to obtain a difference (ΔT);

[0066] S7. Determine whether ΔT is greater than a;

[0067] S8. If ΔT > a, the control unit controls the heating control unit to compensate the current of the heating element to increase the heating power of the heating element.

[0068] In the embodiment of the present application, before the temperature control system performs heating on the heating element, the template data, the desired temperature value (SV), and the threshold value (a) are set first. Of course, the value of the interval detection duration (Δt) of the temperature detection unit can also be set, and then the heating process for the heating element can be started. Among them, steps S1 and S2 can be executed regardless of the order.

[0069] As the heating element generates heat, the temperature detection unit measures the temperature of the heating element at the set detection time interval and feeds the measured temperature value (PV) back to the temperature processing unit; the temperature processing unit calculates the corresponding control quantity through the PID algorithm based on the difference obtained by subtracting the measured temperature value (PV) from the desired temperature value (SV), and the heating control unit adjusts the current according to the control quantity and controls the heating power of the heating element. This is the prior art in this field and will not be elaborated here.

[0070] Meanwhile, the temperature processing unit also feeds the measured temperature value (PV) back to the control unit. The control unit locates the data group in the template data corresponding to the current process according to the heating-up duration (t1) corresponding to the measured temperature value (PV) of the current process. Specifically, it is located according to the heating-up duration (t) equal to the heating-up duration (t1) to find the temperature value (T) corresponding to the heating-up duration (t), and subtracts the measured temperature value (PV) from the temperature value (T) to obtain the difference (ΔT). Then, it is determined whether ΔT is greater than a. If ΔT > a, the control unit controls the heating control unit to compensate the current of the heating element to increase the heating power of the heating element.

[0071] Please refer to Figure 2 , the above embodiment may further include the steps:

[0072] S9. If ΔT < a, the control unit subtracts the received next measured temperature value (PV) from the temperature value (T) to obtain the difference (ΔT), and continues to determine whether ΔT is greater than a.

[0073] It can be understood that if ΔT < a, the control unit will not control the heating control unit to compensate the current of the heating element, which means that the temperature reached by the current heating element at the corresponding heating-up duration (t1) meets the requirements, and the current heating mode can be continued until ΔT > a, and then the control unit will control the heating control unit to compensate the current of the heating element.

[0074] Please refer to Figure 2 and Figure 3 , where step S1 may include the steps:

[0075] S10, obtaining a data group;

[0076] S11, setting the data group that meets the preset standard as the template data of the control unit;

[0077] Step S10 includes the steps of:

[0078] S101, the heating element performs a temperature control process in a preset state;

[0079] S102, obtaining data groups of the heating element at different time lengths, each data group comprising a temperature value (T) corresponding to the heating element, a heating time (t) corresponding to the temperature value, and a current value (I) corresponding to the temperature value.

[0080] In the embodiment of the present application, the acquisition of template data can be understood as selecting from actual data that meets the requirements, that is, when the heating element performs the temperature control process in a state that meets the requirements, the temperature control process parameters corresponding to different heating times are saved, multiple data groups are established according to different heating times, and the required data groups are selected from the multiple data groups as template data and stored in the control unit for the above reference. Among them, each data group includes but is not limited to the temperature value (T) corresponding to the heating element, the heating time (t) corresponding to the temperature value, and the current value (I) corresponding to the temperature value.

[0081] See also Figures 2 to 4 Further, step S8 may include the steps of:

[0082] S81. The control unit controls the heating control unit to use the current value (I) corresponding to the temperature value (T) in the template data as the heating element compensation current.

[0083] In the embodiment of the present application, the current value (I) corresponding to the temperature value (T) in the template data is used as the compensation current of the heating element. It can be understood that the current of the heating element is compensated to the current value (I). According to Q=I 2 Rt, when the resistance of the heating element increases due to oxidation, the heat generated when the current of the heating element is compensated to the current value (I) will be greater than the heat generated when the heating element is not oxidized. Therefore, the heating element with compensated current can actually heat up faster.

[0084] Of course, it should be noted that when the temperature of the heating element finally reaches the desired temperature value (SV), the temperature control system stops heating the heating element to maintain it within a certain range of the desired temperature value (SV), which can also be set. This is a conventional setting in the field and will not be described in detail. During the heating process of the heating element, if the current compensation causes the measured temperature value (PV) corresponding to a certain heating time to be greater than the temperature value (T) in the corresponding data group or exceeds a certain range of the temperature value (T), of course, the range can also be set as a parameter, then the temperature control system also stops heating the heating element.

[0085] See also Figures 2 to 6 Further, step S1 may also include the steps of:

[0086] S12. In the template data, according to the data groups of the heating element respectively obtained at different time lengths, a time length-temperature curve is drawn as a template curve.

[0087] The temperature control method of the above embodiment may further include the following steps:

[0088] S9a, drawing a time-temperature measured curve according to the measured temperature value (PV) obtained by the process corresponding to the template data, the temperature rise time (t1) corresponding to the temperature value (PV), and the current value (i) corresponding to the temperature value (PV);

[0089] S9b, compare the measured curve with the template curve fitting.

[0090] Step S12 may be to complete the preparation of the time-temperature template curve simultaneously with the determination of the template data. Similarly, step S9a may be to synchronously prepare the time-temperature measured curve as the measurement data is gradually collected. With the completion of the corresponding heating process, the control unit can display a comparison chart of the measured curve and the template curve fitting. Of course, the control unit in the embodiment of the present application takes a screen capable of human-computer interaction as an example, so that the actual heating process temperature curve of the heating element and the curve of the template data can be clearly observed and compared, which helps to understand the process status and facilitate subsequent debugging. Figure 6 Curve c in the figure represents the template data curve, and curve d represents the measured curve.

[0091] See also Figure 1 and Figure 7 The embodiment of the present application also provides a processing equipment 20, including a processing device 201 provided with a heating chamber 202 and a temperature control system 10 as described in any of the above embodiments, and the temperature control system 10 can execute the temperature control method as described in any of the above embodiments, the heating element 105 is arranged in the heating chamber 202 of the processing device 201, and the temperature detection unit 103 is arranged in the processing device 201, and is configured to detect the temperature of the heating element 105 or the temperature of the heating chamber 202.

[0092] The processing equipment 20 of the embodiment of the present application, since it includes the temperature control system 10 in any of the above embodiments, has the beneficial effects brought by the temperature control system 10 in any of the above embodiments, which will not be described in detail here. Similarly, since the temperature control system 10 can execute the temperature control method in any of the above embodiments, it has the beneficial effects brought by the temperature control method in any of the above embodiments, which will not be described in detail here.

[0093] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A temperature control system, It is characterized in that The device comprises a control unit, a temperature processing unit, a temperature detection unit, a heating control unit and a heating element, wherein the control unit is electrically connected to the temperature processing unit and the heating control unit, the temperature detection unit is electrically connected to the temperature processing unit, and the heating control unit is electrically connected to the heating element; The control unit is used to set a desired temperature value (SV) as a target value of the heating element; The temperature detection unit is used to detect the temperature of the heating element or the temperature of the area heated by the heating element. The measured temperature value (PV) detected by the temperature detection unit can be fed back to the temperature processing unit. The temperature processing unit can calculate the corresponding control amount according to the difference between the expected temperature value (SV) and the measured temperature value (PV) through the PID algorithm. The heating control unit can adjust the current according to the control amount to control the heating power of the heating element; Wherein, the control unit stores at least one template data of a temperature control process, each of the template data includes a plurality of temperature values ​​(T) and a heating time (t) to reach the temperature value (T); The temperature processing unit may feed back the measured temperature value (PV) and the corresponding heating time (t1) to the measured temperature value (PV) to the control unit, and the control unit may locate the temperature value (T) corresponding to the heating time (t) equal to the heating time (t1) in the template data of the corresponding process according to the heating time (t1) corresponding to the measured temperature value (PV) of the current process, and compare the difference (ΔT) obtained by subtracting the measured temperature value (PV) from the temperature value (T) with the preset threshold value (a); If ΔT>a, the control unit may control the heating control unit to compensate the current of the heating element to increase the heating power of the heating element.

2. The temperature control system according to claim 1, It is characterized in that Each of the template data further includes a current value (I) of the heating element corresponding to each temperature value (T); If ΔT>a, the control unit can control the heating control unit to increase the current of the heating element to a current value (I) corresponding to the temperature value (T) so as to increase the heating power of the heating element.

3. The temperature control system according to claim 1 or 2, It is characterized in that The temperature detection unit may detect once every preset time interval (Δt).

4. A temperature control method, applied to the temperature control system according to any one of claims 1 to 3, It is characterized in that Includes steps: The control unit sets the template data; The control unit sets a desired temperature value (SV) and a threshold value (a); The temperature detection unit detects the temperature of the heating element or the temperature of the area heated by the heating element, obtains a measured temperature value (PV), and feeds it back to the temperature processing unit; The temperature processing unit obtains the difference between the desired temperature value (SV) and the measured temperature value (PV), and calculates the corresponding control amount through the PID algorithm. At the same time, the temperature processing unit continues to feed back the measured temperature value (PV) to the control unit; The heating control unit adjusts the current according to the control amount and controls the heating power of the heating element; The control unit determines the heating time (t 1 ), locate the template data of the corresponding process and the heating time (t 1 ) The temperature value (T) corresponding to the same heating time (t) as a, and the temperature value (T) minus the measured temperature value (PV) to obtain the difference (ΔT), and then determine whether ΔT is greater than a; If ΔT>a, the control unit controls the heating control unit to compensate the current of the heating element to increase the heating power of the heating element.

5. The temperature control method according to claim 4, It is characterized in that The “temperature detection unit detects the temperature of the heating element or the temperature of the area heated by the heating element, obtains a measured temperature value (PV), and feeds it back to the temperature processing unit” includes the following steps: The temperature detection unit detects once every preset time interval (Δt); The temperature detection unit feeds back the measured temperature value (PV) obtained each time to the temperature processing unit.

6. The temperature control method according to claim 4, It is characterized in that The template data in the "control unit locates the temperature value (T) corresponding to the heating time (t) equal to the heating time (t1) in the template data of the corresponding process according to the heating time (t1) corresponding to the measured temperature value (PV) of the current process, and subtracts the measured temperature value (PV) from the temperature value (T) to obtain a difference (ΔT), and then determines whether ΔT is greater than a" also includes the current value (I) of the heating element corresponding to each temperature value (T); The “if ΔT>a, the control unit controls the heating control unit to compensate the current of the heating element to increase the heating power of the heating element” includes the following steps: The control unit controls the heating control unit to use the current value (I) corresponding to the temperature value (T) in the template data as the heating element compensation current.

7. The temperature control method according to claim 6, It is characterized in that The "control unit setting template data" includes the steps of: Get data set; Setting the data group that meets the preset standard as the template data of the control unit; The "obtaining data set" comprises the steps of: The heating element performs the temperature control process in a preset state; Data groups of the heating element are obtained at different time lengths, each data group comprising a temperature value corresponding to the heating element, a heating time corresponding to the temperature value, and a current value corresponding to the temperature value.

8. The temperature control method according to claim 7, It is characterized in that The "control unit sets template data" also includes the steps of: In the template data, a time-temperature curve is drawn as a template curve according to the data groups of the heating element respectively obtained at different time lengths; The "temperature control method" also includes the steps of: A time-temperature measured curve is drawn based on the measured temperature value (PV) obtained from the process corresponding to the template data, the heating time (t1) corresponding to the temperature value (PV) and the current value (i) corresponding to the temperature value (PV); Compare the measured curve with the template curve fitting.

9. The temperature control method according to any one of claims 4 to 8, It is characterized in that If ΔT < a, the control unit subtracts the next measured temperature value (PV) received from the temperature value (T) to obtain a difference (ΔT), and continues to determine whether ΔT is greater than a.

10. A processing device characterized in that the processing device includes a processing device provided with a heating chamber and the temperature control system according to any one of claims 1-3, the temperature control system can execute the temperature control method according to any one of claims 4-9, the heating element is arranged in the heating chamber of the processing device, and the temperature detection unit is arranged on the processing device and is arranged to detect the temperature of the heating element or the temperature of the heating chamber.

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