Magnetic deflection control system and scanning electron microscope

By using a combination of a digital-to-analog conversion module, a control module, and a magnification modulation module in a scanning electron microscope, the scanning deflection control signal is directly output, which solves the problem of noise influence, realizes high-precision and high-speed scanning control, improves image quality, and expands the scanning range.

CN119132915BActive Publication Date: 2025-09-23DONGFANG JINGYUAN ELECTRON LTD
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Patent Information

Application Number
CN202411259327.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-09-09
Publication Date
2025-09-23
Estimated Expiration
2044-09-09

AI Technical Summary

Technical Problem

In the existing magnetic deflection scanning control circuit of the scanning electron microscope, noise exists in the signal controlling the scanning deflection, which causes the magnetic deflection coil to be unable to stably control the electron beam scanning, thereby affecting the imaging quality of the scanned image.

Method used

A magnetic deflection control system is adopted, including a digital-to-analog conversion module, a control module, an amplification factor modulation module and an output module. The scanning deflection control signal is directly transmitted to the output module to avoid the signal passing through the power amplifier. A 16-bit precision digital-to-analog conversion chip is used to achieve high-precision and high-speed digital-to-analog conversion. Combined with the amplification factor modulation module, diversified scanning control is realized.

Benefits of technology

It achieves high-precision and high-speed scanning of the scanning electron microscope, eliminates image distortion and noise, improves the imaging quality of the scanned image, and expands the scanning field of view.

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Abstract

The present invention relates to the field of detection technology, and in particular to a magnetic deflection control system and a scanning electron microscope. The magnetic deflection control system provided by the present invention includes a digital-to-analog conversion module, a control module, an amplification modulation module, and an output module; the control module includes a scanning deflection circuit and a scanning amplitude control circuit; the input end of the scanning deflection circuit and the input end of the scanning amplitude control circuit are respectively electrically connected to the output end of the digital-to-analog conversion module, and the output end of the scanning deflection circuit is electrically connected to the input end of the output module; the output end of the scanning amplitude control circuit is electrically connected to the input end of the amplification modulation module, and the output end of the amplification modulation module is electrically connected to the input end of the output module; the output end of the output module outputs a corresponding magnetic field to adjust the scanning path of the electron beam. The magnetic deflection control system of the present invention solves the problem of poor imaging quality of the scanned image ultimately obtained by the scanning electron microscope due to the presence of noise in the signal controlling the scanning deflection.
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Citation Information

Patent Citations

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