Covering track detection device and detection method based on defective chip

Abstract

The present invention discloses a covering track detection device based on defective chips and a detection method thereof, which relates to the field of chip detection technology, and includes: a support seat, and two groups of chip detection devices assembled on the support seat and symmetrically arranged; each group of the chip detection devices includes a disc spiral mechanism, a switching module is arranged at the bottom of the disc spiral mechanism, and a chip detection head is arranged on the switching module; when the disc spiral mechanism is running, the chip detection head is driven to run progressively in a spiral line track, so that the chip detection head covers the outline of the chip in a range detection method of edge and point search; the chip detection head includes a rotating shaft, and a light detection head, a thermal infrared detection head and a SEM detection head distributed circumferentially on the rotating shaft. The present invention drives the chip detection head to perform detection through the motion characteristics of the disc spiral mechanism, and the detection track adopts a spiral line track to run progressively, with wide coverage and high detection efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of chip detection, and in particular to a covering track detection device based on defective chips and a detection method thereof. Background Art

[0002] The specific process of chip contour detection includes the following steps: first, the image of the chip surface is captured by a high-resolution camera; then, the image is pre-processed, feature extracted and defect identified using an image processing algorithm; finally, through defect identification, the algorithm compares and analyzes the image pixel by pixel or region by region, marking and recording potential defects;

[0003] However, in actual use, due to the different sizes of the chip itself, the position of its boundary contour is also different. In order to obtain a higher resolution image, the optical lens or industrial camera can only be replaced, which will waste time and cost.

[0004] Therefore, a covering detection device with dynamic trajectory and a detection method thereof are designed. Summary of the invention

[0005] The purpose of the present invention is to provide a covering track detection device based on defective chips and a detection method thereof, which drives the chip detection head to perform detection through the motion characteristics of the disc spiral mechanism, and the detection track adopts a spiral line track to run progressively.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a covering trajectory detection device based on defective chips, comprising: a support base, and two groups of chip detection devices assembled on the support base and symmetrically arranged; each group of the chip detection devices comprises a disc spiral mechanism, a switching module is arranged at the bottom of the disc spiral mechanism, and a chip detection head is arranged on the switching module; when the disc spiral mechanism is running, it drives the chip detection head to run progressively in a spiral line trajectory, so that the chip detection head covers the contour of the chip in a range detection manner of edge and point searching; the chip detection head comprises a rotating shaft, and an optical detection head, a thermal infrared detection head and a SEM detection head distributed circumferentially on the rotating shaft, and when the switching module is working, it is used to switch the optical detection, thermal infrared detection and SEM detection of the chip; and a conveying device, which can be used for intermittent transportation of chips.

[0007] Preferably, the disc-type spiral mechanism includes a frame body, a differential gear assembly arranged at the end of the frame body, a transmission disc and a long frame are respectively installed at the bottom of the differential gear assembly; a transmission groove is opened on the lower surface of the transmission disc, the transmission groove is a spiral structure, and there is a fixed seat fixed at the end of the long frame, and a transmission bar slidably installed at the lower part of the long frame, a limiting column is fixed on the upper surface of the transmission bar, and a long groove is opened on the long frame, the limiting column extends through the long groove to the inside of the transmission groove and is installed with it in a limited position, and the switching module is arranged on the lower surface of the transmission bar; when the differential gear assembly is running, it is used to drive the transmission disc and the long frame to rotate at different speeds, and under the limiting action of the transmission groove and the limiting column, the switching module where the transmission bar is located is driven to run progressively in a spiral line trajectory; the frame body includes a cylinder, and an executing end arranged at the top of the cylinder, a connecting frame is vertically connected to the executing end, and the differential gear assembly is arranged at the end of the connecting frame.

[0008] Preferably, the differential gear assembly comprises a support plate, a rotatable connecting shaft is installed at the end of the support plate, the connecting shaft is provided with a first step portion, a second step portion and a third step portion in sequence from top to bottom, and a first movable gear, a second movable gear and a third movable gear fixed on the outer walls of the first step portion, the second step portion and the third step portion from top to bottom, the radius of the first movable gear, the second movable gear and the third movable gear increases in sequence; and a first spline shaft installed at the bottom of the connecting shaft, the outer wall of the first spline shaft is spline-connected with a first spline sleeve, the outer wall of the first spline sleeve is fixed with a fourth movable gear, a fifth movable gear and a sixth movable gear in sequence from top to bottom, the radius of the fourth movable gear, the fifth movable gear and the sixth movable gear decreases in sequence, a first electric telescopic rod is installed at the bottom of the third step portion, the output end of the first electric telescopic rod acts on the top of the first spline sleeve to drive the first spline sleeve to adjust the height position; and a column vertically distributed with the support plate, a mounting sleeve is rotatably installed at the bottom of the column, and the transmission disc is fixed at the bottom of the mounting sleeve, The outer wall of the mounting sleeve is fixed with a first driven tooth, a second driven tooth and a third driven tooth in sequence from bottom to top; and a second spline shaft rotatably mounted on the top of the support plate, an extension shaft penetrating the mounting sleeve is mounted at the bottom of the second spline shaft, the extension shaft passes through the circular hole on the long strip frame and is fixedly connected to the fixing seat, a second spline sleeve is spline-connected to the outer wall of the second spline shaft, and a fourth driven tooth, a fifth driven tooth and a sixth driven tooth are arranged on the second spline sleeve from bottom to top, the radius of the fourth driven tooth, the fifth driven tooth and the sixth driven tooth increases in sequence, and the fourth driven tooth, the fifth driven tooth and the sixth driven tooth are respectively meshed and transmitted with the corresponding third driven gear, the second driven gear and the first driven gear, a mounting step plate is rotatably mounted at the bottom of the second spline sleeve, and a second electric telescopic rod fixed around the top of the mounting sleeve, the output end of the second electric telescopic rod acts on the bottom of the mounting step plate to drive the second spline sleeve to move up and down as a whole; a first motor is also mounted on the support plate, and the output shaft of the first motor passes through the through hole on the support plate and is connected to the top of the connecting shaft.

[0009] Preferably, the switching module includes an installation frame, which is slidably mounted on the lower surface of the transmission bar, an end plate is fixed to the end of the transmission bar, and a third electric telescopic rod is fixed to the end plate, the output end of the third electric telescopic rod acts on the end of the installation frame to change the starting position of the inner circle of the vortex line trajectory; and a second motor is mounted on the side wall of the installation frame, the output shaft of the second motor extends to the interior of the installation frame and is equipped with a rotating shaft.

[0010] Preferably, the optical detection head, thermal infrared detection head and SEM detection head are distributed around the rotating shaft in sequence, and the first image processing system, the second image processing system and the third image processing system are arranged at the end of the long frame. The first image processing system, the second image processing system and the third image processing system are connected to the corresponding optical detection head, the thermal infrared detection head and the SEM detection head respectively through the first wire, the second wire and the third wire.

[0011] Preferably, light panels with an angle of 45° relative to each other are provided on both sides of the long frame for lighting the light box during detection.

[0012] Preferably, the transmission groove includes a vortex groove and a transition groove, the transition groove is connected at the front and rear ends of the vortex groove, and a contact sensor is arranged at the front end of the vortex groove; it also includes a single-chip microcomputer, when the limit column moves inside the vortex groove to the front end of the vortex groove, the contact sensor is triggered and generates a first signal transmitted to the single-chip microcomputer, so that the single-chip microcomputer controls the intermittent operation of the transmission device when receiving the first signal.

[0013] Preferably, when an abnormal alarm occurs in the first image processing system or the second image processing system, the first image processing system or the second image processing system generates a second signal to be sent to the single-chip microcomputer, so that the single-chip microcomputer controls the second motor to switch to the SEM detection head working state when receiving the second signal, and controls the first motor to rotate in the opposite direction.

[0014] A covering track detection method for defective chips is applied to the aforementioned covering track detection device based on defective chips, and the detection method comprises:

[0015] S1: Under the action of the switching module, the chip detection device on the left can be set to work as an optical detection head, that is, to perform optical track detection, and the chip detection device on the right can be set to work as a thermal infrared detection head, that is, to perform thermal infrared detection;

[0016] S2: Under the motion characteristics of the disc spiral mechanism, the optical inspection and thermal infrared inspection are completed in sequence with the progressive operation of the spiral line trajectory. When both are qualified, the chip is a qualified product;

[0017] S3: When the above abnormality is detected, the drive switching module runs to SEM detection, and at the same time controls the disc spiral mechanism to run in reverse to perform a secondary detection on the abnormal point position.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] The present invention uses the motion characteristics of the disc spiral mechanism to drive the chip detection head to perform detection. The detection trajectory adopts a spiral line trajectory to run progressively, that is, a progressive detection is extended from the inside to the surroundings in circles, thereby achieving a range detection method of edge and point searching to cover the outline of the chip.

[0020] The present invention uses two groups of chip detection devices that are symmetrically arranged, and on this basis, a detection method can be further extended, in which optical detection and thermal infrared detection are completed in sequence by progressive operation of a spiral line trajectory. When both are qualified, the chip is a qualified product; when any of the above detects an abnormality, the drive switching module runs to SEM detection, and the position of the abnormal point is secondary detected, and the morphology and size of the abnormal point are observed through its high-resolution microscope to determine the cause of its formation. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the assembly structure of the chip detection device and the transmission device of the present invention;

[0022] Figure 2 This is a schematic diagram of the three-dimensional structure of the chip detection device of the present invention from a first viewing angle;

[0023] Figure 3 for Figure 2 A schematic diagram of the front view structure of

[0024] Figure 4 for Figure 2 A schematic diagram of a second perspective stereoscopic structure;

[0025] Figure 5 for Figure 1 A side view structural schematic diagram of;

[0026] Figure 6 It is a partial enlarged structural schematic diagram of the differential gear assembly of the present invention;

[0027] Figure 7 for Figure 6 A side view structural schematic diagram of;

[0028] Figure 8 for Figure 6 Schematic diagram of the disassembled structure;

[0029] Fig. 9 It is a schematic diagram of a partially enlarged structure of the assembly of the long strip frame and the chip detection head of the present invention;

[0030] Fig.10 for Fig. 9 Another perspective structural diagram of;

[0031] Fig.11 for Fig.10 A is an enlarged structural diagram of FIG.

[0032] In the figure: 1011, a conveying device;

[0033] 111, support base; 112, cylinder; 113, actuator end; 114, connecting frame;

[0034] 2. Differential gear assembly;

[0035] 211, support plate; 212, column; 213, first motor;

[0036] 2131, first step portion; 2132, second step portion; 2133, third step portion;

[0037] 2141, a first moving gear; 2142, a second moving gear; 2143, a third moving gear;

[0038] 215. first electric telescopic rod;

[0039] 216, first spline shaft;

[0040] 217, connecting shaft;

[0041] 218, first spline sleeve; 2181, fourth driven gear; 2182, fifth driven gear; 2183, sixth driven gear; 220, mounting sleeve; 2201, first driven tooth; 2202, second driven tooth; 2203, third driven tooth;

[0042] 224, transmission groove; 2241, vortex groove; 2242, transition groove; 2243, contact sensor;

[0043] 230, second spline shaft; 2301, extension shaft;

[0044] 240, second electric telescopic rod;

[0045] 250, second spline sleeve; 2511, mounting step plate; 2501, fourth driven tooth; 2502, fifth driven tooth; 2503, sixth driven tooth;

[0046] 2211, transmission plate;

[0047] 2311, long frame; 2312, fixed seat; 2314, third electric telescopic rod;

[0048] 2330, round hole; 2332, long slot;

[0049] 2611, end plate; 2612, transmission bar; 2614, limit column;

[0050] 2711, a first image processing system; 2712, a second image processing system; 2713, a third image processing system;

[0051] 2811, first wire; 2812, second wire; 2813, third wire;

[0052] 2911, mounting frame; 2912, rotating shaft; 2913, second motor; 2914, optical detection head; 2915, thermal infrared detection head; 2916, SEM detection head;

[0053] 311, light board;

[0054] 4. Disc type spiral mechanism. DETAILED DESCRIPTION

[0055] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. The following describes various embodiments of the present invention in detail in conjunction with the drawings. Example 1

[0056] See also Figures 1 to 11 The present invention preferably provides a technical solution: a covering trajectory detection device based on defective chips, comprising: a support base 111, and two groups of chip detection devices assembled on the support base 111 and symmetrically arranged; each group of chip detection devices comprises a disc spiral mechanism 4, a switching module is arranged at the bottom of the disc spiral mechanism 4, and a chip detection head is arranged on the switching module; when the disc spiral mechanism 4 is running, it drives the chip detection head to run progressively in a spiral line trajectory, so that the chip detection head covers the contour of the chip in a range detection manner of edge and point searching; the chip detection head comprises a rotating shaft 2912, and an optical detection head 2914, a thermal infrared detection head 2915 and a SEM detection head 2916 circumferentially distributed on the rotating shaft 2912, when the switching module is working, it is used to switch the chip between optical detection, thermal infrared detection and SEM detection; and a conveying device 1011, which can be used for intermittent transportation of chips.

[0057] In this application, the design is based on the disc spiral mechanism 4 of a specific machine, and the motion characteristics of the disc spiral mechanism 4 are used to drive the chip detection head to perform detection. The detection trajectory adopts a spiral line trajectory to run progressively, that is, a progressive detection is extended from the inside to the surroundings in circles, thereby achieving a range detection method of edge and point search to cover the outline of the chip;

[0058] As a preferred embodiment of the above embodiment, Figure 1 and2 As shown, through the two groups of chip detection devices arranged symmetrically, a detection method can be further extended on this basis, S1: under the action of the switching module, the chip detection device on the left can be set to work as the optical detection head 2914, that is, optical track detection is performed, and the chip detection device on the right can be set to work as the thermal infrared detection head 2915, that is, thermal infrared detection is performed. Under the motion characteristics of the disc spiral mechanism 4, the optical detection and thermal infrared detection are completed in sequence by progressive operation of the spiral line trajectory. When both are qualified, the chip is a qualified product; S2: when any of the above detects an abnormality, the switching module is driven to run to SEM detection, and the disc spiral mechanism 4 is controlled to run in reverse, and the position of the abnormal point is secondary detected, and the morphology and size of the abnormal point are observed by its equal high-resolution microscope to determine the cause of its formation;

[0059] The above-mentioned optical detection head 2914, thermal infrared detection head 2915 and SEM detection head 2916 correspond to optical detection, thermal infrared detection and SEM detection, which are all existing mature technologies. The principle of optical detection is: optical detection is a non-destructive detection method, which detects scratch defects by observing the optical properties of the sample surface through the reflection or transmission of light irradiated on the sample surface. Optical detection mainly has two key steps, namely image acquisition and image analysis. Image acquisition can be performed using a high-resolution camera, and image analysis can be performed through a computer vision algorithm to automatically identify and locate defects; thermal infrared detection is a method of detecting defects by detecting infrared radiation on the surface of an object. Since the infrared radiation of an object is related to its temperature, when the defect causes a temperature change, thermal infrared detection can be detected by measuring the change in infrared radiation; SEM uses secondary electrons and backscattered electrons to form an image, and uses the secondary electron and backscattered electron signals received from the sample surface, and amplifies these signal intensities to convert them into a grayscale value and display them on the display device, which can specifically include morphological analysis and cause analysis.

[0060] Furthermore, the disc-type spiral mechanism 4 includes a frame, a differential gear assembly 2 arranged at the end of the frame, a transmission disc 2211 and a long frame 2311 are respectively installed at the bottom of the differential gear assembly 2; a transmission groove 224 is opened on the lower surface of the transmission disc 2211, and the transmission groove 224 is a spiral structure, and a fixed seat 2312 is fixed at the end of the long frame 2311, and a transmission bar 2612 is slidably installed at the lower part of the long frame 2311, and a limiting column 2614 is fixed on the upper surface of the transmission bar 2612 , and a long slot 2332 is provided on the long frame 2311, the limiting column 2614 passes through the long slot 2332 and extends to the inside of the transmission slot 224 and is installed with it, and the switching module is arranged on the lower surface of the transmission bar 2612; when the differential gear assembly 2 is running, it is used to drive the transmission plate 2211 and the long frame 2311 to rotate at different speeds, and under the limiting action of the transmission slot 224 and the limiting column 2614, the switching module where the transmission bar 2612 is located is driven to run progressively in a spiral line trajectory.

[0061] By setting the disc screw mechanism 4, as Figure 6 , 8 As shown, under the action of the differential gear assembly 2, the transmission plate 2211 and the long frame 2311 rotate at different speeds. The transmission bar 2612 is slidably installed at the lower part of the long frame 2311, and the limiting column 2614 is fixed on the upper surface of the transmission bar 2612. The limiting column 2614 can move within the transmission groove 224, thereby driving the rotating chip detection head to gradually produce radial horizontal movement, and then produce a progressive vortex line trajectory.

[0062] Furthermore, the frame body includes a cylinder 112 and an execution end 113 disposed on the top of the cylinder 112 , a connecting frame 114 is vertically connected to the execution end 113 , and the differential gear assembly 2 is disposed at the end of the connecting frame 114 . Example 2

[0063] As another embodiment of the present invention, the differential gear assembly 2 includes a support plate 211, a rotatable connecting shaft 217 is installed at the end of the support plate 211, and the connecting shaft 217 is provided with a first step portion 2131, a second step portion 2132 and a third step portion 2133 from top to bottom, and a first moving gear 2141, a second moving gear 2142 and a third moving gear 2143 fixed on the outer walls of the first step portion 2131, the second step portion 2132 and the third step portion 2133 from top to bottom, and the radius of the first moving gear 2141, the second moving gear 2142 and the third moving gear 2143 increases in sequence; and a first spline shaft 216 installed at the bottom of the connecting shaft 217, the first spline shaft 216 The outer wall spline is connected with a first spline sleeve 218, and the outer wall of the first spline sleeve 218 is fixed with a fourth moving gear 2181, a fifth moving gear 2182 and a sixth moving gear 2183 from top to bottom. The radius of the fourth moving gear 2181, the fifth moving gear 2182 and the sixth moving gear 2183 decreases in sequence. The bottom of the third step portion 2133 is installed with a first electric telescopic rod 215, and the output end of the first electric telescopic rod 215 acts on the top of the first spline sleeve 218 to drive the first spline sleeve 218 to adjust the height position; and a column 212 vertically distributed with the support plate 211, the bottom of the column 212 is rotatably installed with a mounting sleeve 220, and the transmission disc 2211 is fixed at the bottom of the mounting sleeve 220. The outer wall of the sleeve 220 is fixed with a first driven tooth 2201, a second driven tooth 2202 and a third driven tooth 2203 from bottom to top; and a second spline shaft 230 is rotatably mounted on the top of the support plate 211, and an extension shaft 2301 that penetrates the mounting sleeve 220 is installed at the bottom of the second spline shaft 230. The extension shaft 2301 passes through the round hole 2330 on the long strip frame 2311 and is fixedly connected to the fixing seat 2312. The outer wall of the second spline shaft 230 is spline-connected with a second spline sleeve 250, and the second spline sleeve 250 is provided with a fourth driven tooth 2501, a fifth driven tooth 2502 and a sixth driven tooth 2503 from bottom to top. The fourth driven tooth 2501, the fifth driven tooth 2502 and the sixth driven tooth 2503 are arranged on the second spline sleeve 250 from bottom to top. The radius of 503 increases successively, and the fourth driven tooth 2501, the fifth driven tooth 2502 and the sixth driven tooth 2503 are respectively meshed with the corresponding third driven gear 2143, the second driven gear 2142 and the first driven gear 2141 for transmission. The bottom of the second spline sleeve 250 is rotatably installed with a mounting step plate 2511, and a second electric telescopic rod 240 fixed around the top of the mounting sleeve 220. The output end of the second electric telescopic rod 240 acts on the bottom of the mounting step plate 2511 to drive the second spline sleeve 250 to move up and down as a whole; a first motor 213 is also installed on the support plate 211, and the output shaft of the first motor 213 passes through the through hole on the support plate 211 and is connected to the top of the connecting shaft 217.

[0064] In this embodiment, a differential gear assembly 2 is provided, which can be combined in various ways to generate various differential states, and thus generate vortex line trajectories in various states to adapt to different detection environments; Figure 6 , 7 8, in this state, the third driven gear 2143 is connected with the fourth driven gear 2501 for meshing, and the sixth driven gear 2183 is connected with the first driven gear 2201 for meshing transmission. When the first motor 213 is working, the extension shaft 2301 where the second spline shaft 230 is located can be driven to rotate under the action of the third driven gear 2143 and the fourth driven gear 2501, thereby driving the long strip frame 2311 to rotate, and the installation sleeve 220 can be driven under the action of the sixth driven gear 2183 and the first driven gear 2201. The transmission plate 2211 rotates, and due to the radius difference between the third driven gear 2143 and the fourth driven tooth 2501, it is equivalent to a speed-increasing process for the extension shaft 2301, and the sixth driven gear 2183 at the lower part is meshed with the first driven tooth 2201 for transmission, and the radius of the sixth driven gear 2183 is larger than that of the sixth driven gear 2183, which is equivalent to a speed-decelerating process for the transmission plate 2211. In this state, the speed difference between the extension shaft 2301 and the transmission plate 2211 is the largest, and the corresponding degree of the generated vortex line trajectory is the largest;

[0065] When the second electric telescopic rod 240 remains stationary, the extension of the first electric telescopic rod 215 is controlled, such as Figure 6 and 7 As shown, the sixth driven gear 2183 is disengaged from the first driven gear 2201, and the meshing switching between the second driven gear 2202 and the fifth driven gear 2182, and the fourth driven gear 2181 and the third driven gear 2203 is realized to control the speed change of the transmission plate 2211. Similarly, when the first electric telescopic rod 215 remains stationary at a certain position, the second electric telescopic rod 240 is controlled to shorten, and the meshing switching between the second driven gear 2142 and the fifth driven gear 2502, and the first driven gear 2141 and the sixth driven gear 2503 is realized to change the speed change of the long strip frame 2311. When the extension shaft 2301 and the transmission plate 2211 are changed and combined with each other, a variety of different speed differences can be generated, corresponding to the generation of vortex line trajectories of different degrees;

[0066] In S1: under the motion characteristics of the disc spiral mechanism 4, optical detection and thermal infrared detection are completed in sequence by progressive operation of the vortex line trajectory. A vortex line trajectory with a larger degree of change and a faster speed can be set to quickly determine the abnormal position point in a wide range; in S2, the SEM performs a secondary detection on the position of the abnormal point, and a vortex line trajectory with a smaller degree of change and a slower speed can be set to analyze the abnormal results more finely. Example 3

[0067] As another embodiment of the present invention, the switching module includes a mounting frame 2911, the mounting frame 2911 is slidably mounted on the lower surface of the transmission bar 2612, the end of the transmission bar 2612 is fixed with an end plate 2611, and a third electric telescopic rod 2314 is fixed on the end plate 2611, the output end of the third electric telescopic rod 2314 acts on the end of the mounting frame 2911 to change the inner circle starting position of the vortex line trajectory; and a second motor 2913 mounted on the side wall of the mounting frame 2911, the output shaft of the second motor 2913 extends to the inside of the mounting frame 2911 and is installed with a rotating shaft 2912;

[0068] Furthermore, the optical detection head 2914, the thermal infrared detection head 2915 and the SEM detection head 2916 are distributed in sequence at 90° around the rotating shaft 2912, as well as the first image processing system 2711, the second image processing system 2712 and the third image processing system 2713 arranged at the end of the long frame 2311. The first image processing system 2711, the second image processing system 2712 and the third image processing system 2713 are connected to the corresponding optical detection head 2914, the thermal infrared detection head 2915 and the SEM detection head 2916 respectively through the first wire 2811, the second wire 2812 and the third wire 2813.

[0069] In this embodiment, if Figure 8 , 9 , 10 and 11, the switching module is controlled by the second motor 2913, and the rotation angle is preferably 90°, which can correspondingly switch the optical detection head 2914, the thermal infrared detection head 2915 and the SEM detection head 2916, and then perform the switching action of optical detection, thermal infrared detection and SEM detection;

[0070] Furthermore, under the action of the third electric telescopic rod 2314, the starting position of the installation frame 2911 relative to the transmission bar 2612 can be changed, that is, the starting position of the inner circle of the corresponding vortex line trajectory, so as to meet different detection conditions. Example 4

[0071] As another embodiment of the present invention, light panels 311 are provided at two sides of the long frame 2311 at an angle of 45° relative to each other for lighting the light box during detection. Example 5

[0072] As other embodiments of the present invention, the transmission groove 224 includes a vortex groove 2241, a transition groove 2242, the transition groove 2242 is connected to the head and tail ends of the vortex groove 2241, and a contact sensor 2243 is arranged at the head end of the vortex groove 2241; it also includes a single-chip microcomputer. When the limit column 2614 moves inside the vortex groove 2241 to the head end of the vortex groove 2241, the contact sensor 2243 is triggered and set to a first signal. The first signal is transmitted to the single-chip microcomputer, and the single-chip microcomputer controls and drives the conveying device 1011 to run intermittently once, that is, to perform detection of the next workstation. Example 6

[0073] As other embodiments of the present invention, when an abnormal alarm occurs in the first image processing system 2711 or the second image processing system 2712, the first image processing system 2711 or the second image processing system 2712 generates a second signal to be sent to the single-chip microcomputer, so that the single-chip microcomputer controls the second motor 2913 to switch to the working state of the SEM detection head 2916 when receiving the second signal, and controls the first motor 213 to rotate in the opposite direction.

[0074] In this embodiment, as a preferred detection method of the device, when the second signal is triggered, the driving switching module runs to SEM detection, and at the same time controls the disc spiral mechanism 4 to run in reverse, performs secondary detection on the position of the abnormal point, and observes the morphology and size of the abnormal point through its high-resolution microscope to determine the cause of its formation.

[0075] A covering track detection method for defective chips is applied to the aforementioned covering track detection device based on defective chips, and the detection method comprises:

[0076] S1: Under the action of the switching module, the chip detection device on the left can be set to work as the optical detection head 2914, that is, optical track detection is performed, and the chip detection device on the right can be set to work as the thermal infrared detection head 2915, that is, thermal infrared detection is performed;

[0077] S2: Under the motion characteristics of the disc spiral mechanism 4, the optical detection and thermal infrared detection are completed in sequence in a progressive operation of the spiral line trajectory. When both are qualified, the chip is a qualified product;

[0078] S3: When an abnormality is detected, the drive switching module runs to SEM detection, and at the same time controls the disc spiral mechanism 4 to run in reverse to perform a secondary detection on the abnormal point position.

[0079] In the present invention, unless otherwise clearly specified and limited, terms such as "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection. There are many ways of detachable installation, for example, it can be through the method of plug-in and snap-fit, or through the method of bolt connection, etc.

[0080] The specific description of the present invention in the above embodiments is only used to further illustrate the present invention and cannot be understood as limiting the scope of protection of the present invention. Technical engineers in this field may make some non-essential improvements and adjustments to the present invention based on the contents of the above invention, which fall within the scope of protection of the present invention.

Claims

1. A covering track detection device based on defective chips, characterized in that: include: A support base (111), and two sets of chip detection devices mounted on the support base (111) and arranged symmetrically; Each group of the chip detection devices comprises a disc-type spiral mechanism (4), a switching module is arranged at the bottom of the disc-type spiral mechanism (4), and a chip detection head is arranged on the switching module; When the disc-type spiral mechanism (4) is in operation, it drives the chip detection head to move progressively along a spiral line trajectory, so that the chip detection head covers the contour of the chip in a range detection manner of edge-finding and point-finding; The chip detection head comprises a rotating shaft (2912), and an optical detection head (2914), a thermal infrared detection head (2915), and a SEM detection head (2916) circumferentially distributed on the rotating shaft (2912), and when the switching module is working, it is used to switch between optical detection, thermal infrared detection, and SEM detection of the chip; and a conveying device (1011), wherein the conveying device (1011) can be used for intermittent conveyance of chips; The disc-type screw mechanism (4) comprises a frame, a differential gear assembly (2) arranged at the end of the frame, and a transmission disc (2211) and a long strip frame (2311) are respectively installed at the bottom of the differential gear assembly (2); The lower surface of the transmission plate (2211) is provided with a transmission groove (224), the transmission groove (224) being a spiral structure, and a fixing seat (2312) fixed at the end of the long frame (2311), and a transmission bar (2612) slidably mounted on the lower part of the long frame (2311), a limiting column (2614) being fixed on the upper surface of the transmission bar (2612), and a long groove (2332) formed on the long frame (2311), the limiting column (2614) passing through the long groove (2332) extends to the inside of the transmission groove (224) and is fixed thereto in a limiting manner, and the switching module is arranged on the lower surface of the transmission bar (2612); When the differential gear assembly (2) is in operation, it is used to drive the transmission plate (2211) and the long strip frame (2311) to rotate at different speeds, and under the limiting action of the transmission groove (224) and the limiting column (2614), it drives the switching module where the transmission bar (2612) is located to run progressively along a spiral line trajectory; The frame body comprises a cylinder (112) and an actuating end (113) arranged at the top of the cylinder (112); a connecting frame (114) is vertically connected to the actuating end (113); and the differential gear assembly (2) is arranged at the end of the connecting frame (114); The switching module comprises a mounting frame (2911), the mounting frame (2911) being slidably mounted on the lower surface of a transmission bar (2612), an end plate (2611) being fixed to the end of the transmission bar (2612), and a third electric telescopic rod (2314) being fixed to the end plate (2611), and an output end of the third electric telescopic rod (2314) acting on the end of the mounting frame (2911) to change the starting position of the inner circle of the vortex line trajectory; and a second motor (2913) mounted on a side wall of the mounting frame (2911), wherein an output shaft of the second motor (2913) extends into the interior of the mounting frame (2911) and is mounted with a rotating shaft (2912); The optical detection head (2914), thermal infrared detection head (2915) and SEM detection head (2916) are distributed in sequence at 90 degrees around the rotating shaft (2912), and the first image processing system (2711), the second image processing system (2712) and the third image processing system (2713) are arranged at the end of the long strip frame (2311). The first image processing system (2711), the second image processing system (2712) and the third image processing system (2713) are connected to the corresponding optical detection head (2914), the thermal infrared detection head (2915) and the SEM detection head (2916) respectively through the first wire (2811), the second wire (2812) and the third wire (2813).

2. The defective chip-based covering track detection device according to claim 1, characterized in that: The differential gear assembly (2) comprises a support plate (211), an end of the support plate (211) being mounted with a rotatable connecting shaft (217), the connecting shaft (217) being provided with a first step portion (2131), a second step portion (2132) and a third step portion (2133) in sequence from top to bottom, and a first moving gear (2141), a second moving gear (2142) and a third moving gear (2143) fixed on the outer walls of the first step portion (2131), the second step portion (2132) and the third step portion (2133) in sequence from top to bottom, wherein the radii of the first moving gear (2141), the second moving gear (2142) and the third moving gear (2143) are increased in sequence; and a first spline shaft (216) mounted at the bottom of the connecting shaft (217); the outer wall of the first spline shaft (216) is spline-connected to a first spline sleeve (218); a fourth moving gear (2181), a fifth moving gear (2182) and a sixth moving gear (2183) are fixed to the outer wall of the first spline sleeve (218) in sequence from top to bottom; the radii of the fourth moving gear (2181), the fifth moving gear (2182) and the sixth moving gear (2183) decrease in sequence; and a first electric telescopic rod (215) is mounted at the bottom of the third step portion (2133). , the output end of the first electric telescopic rod (215) acts on the top of the first spline sleeve (218) to drive the first spline sleeve (218) to adjust the height position; and a column (212) vertically distributed with the support plate (211), the bottom of the column (212) being rotatably mounted with a mounting sleeve (220), the transmission plate (2211) being fixed to the bottom of the mounting sleeve (220), and the outer wall of the mounting sleeve (220) being fixed with a first driven tooth (2201), a second driven tooth (2202) and a third driven tooth (2203) in sequence from bottom to top; and a second spline shaft (230) rotatably mounted on the top of the support plate (211); an extension shaft (2301) penetrating the mounting sleeve (220) is mounted on the bottom of the second spline shaft (230); the extension shaft (2301) passes through a circular hole (2330) on the long frame (2311) and is fixedly connected to a fixing seat (2312); a second spline sleeve (250) is spline-connected to the outer wall of the second spline shaft (230); a fourth driven tooth (2501), a fifth driven tooth (2502) and a sixth driven tooth (2503) are arranged on the second spline sleeve (250) from bottom to top; the radii of the fourth driven tooth (2501), the fifth driven tooth (2502) and the sixth driven tooth (2503) increase in sequence, and the fourth driven tooth (2501) The first driven tooth (2502) and the second driven tooth (2503) are respectively meshed with the corresponding third moving gear (2143), the second moving gear (2142) and the first moving gear (2141) for transmission; the bottom of the second spline sleeve (250) is rotatably mounted with a mounting step plate (2511) and a second electric telescopic rod (240) fixed around the top of the mounting sleeve (220); the output end of the second electric telescopic rod (240) acts on the bottom of the mounting step plate (2511) to drive the second spline sleeve (250) to move up and down as a whole; the support plate (211) is also mounted with a first motor (213); the output shaft of the first motor (213) passes through a through hole on the support plate (211) and is connected to the top of the connecting shaft (217).

3. The defective chip-based covering track detection device according to claim 1, characterized in that: Light panels (311) are also provided on both sides of the long strip frame (2311) at an angle of 45° relative to each other, and are used for lighting the light box during detection.

4. The defective chip-based covering track detection device according to claim 1, characterized in that: The transmission groove (224) comprises a vortex groove (2241), a transition groove (2242), the transition groove (2242) being connected to the head and tail ends of the vortex groove (2241), and a contact sensor (2243) arranged at the head end of the vortex groove (2241); and also comprises a single chip microcomputer, when the limit column (2614) moves inside the vortex groove (2241) to the head end of the vortex groove (2241), the contact sensor (2243) is triggered and generates a first signal transmitted to the single chip microcomputer, so that the single chip microcomputer controls the transmission device (1011) to operate intermittently when receiving the first signal.

5. The defective chip-based covering track detection device according to claim 1, characterized in that: When an abnormal alarm occurs in the first image processing system (2711) or the second image processing system (2712), the first image processing system (2711) or the second image processing system (2712) generates a second signal to be sent to the single-chip microcomputer, so that the single-chip microcomputer controls the second motor (2913) to switch to the SEM detection head (2916) working state when receiving the second signal, and controls the first motor (213) to rotate in the opposite direction.

6. A covering track detection method for defective chips, applied to the covering track detection device based on defective chips according to any one of claims 1 to 5, characterized in that: The detection method comprises: S1: Under the action of the switching module, the chip detection device on the left side can be set to work as the optical detection head (2914), that is, optical track detection is performed, and the chip detection device on the right side can be set to work as the thermal infrared detection head (2915), that is, thermal infrared detection is performed; S2: Under the motion characteristics of the disc-type spiral mechanism (4), the optical inspection and the thermal infrared inspection are completed in sequence in a progressive operation along a spiral line trajectory. When both inspections are qualified, the chip is a qualified product; S3: When the above abnormality is detected, the drive switching module is operated to SEM detection, and the disc spiral mechanism (4) is controlled to run in reverse to perform a secondary detection on the abnormal point position.

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