Workpiece conveying device and workpiece inspection device

Abstract

Provided is a workpiece inspection device that can avoid upsizing even when a large-scale inspector is used, and a workpiece transport device that increases the degree of freedom in designing and layout of the workpiece inspection device. The workpiece transport device (10) includes: a transport-in mechanism (15) that transports in a pallet (26) in which a workpiece (30) before inspection is arranged; a first transfer section (11) that transfers the transported-in pallet (26) in a first direction (21) to direct the workpiece (30) toward a first inspection area (17a); a second transfer section (12) that transfers the pallet (26) in a second direction (22) orthogonal to the first direction (21) to direct the workpiece (30) toward a second inspection area (17b); a third transfer section (13) that transfers a pallet (26) in which a workpiece (30) after inspection is arranged in a third direction (23) orthogonal to the second direction (22); and a transport-out mechanism (16) that transports out the pallet (26).

Description

Technical Field

[0001] The present invention relates to a pallet-mounted workpiece conveying device and a workpiece inspection device for inspecting workpieces while they are arranged on a pallet. Background Technology

[0002] Inspection of chips and the like, which are cut from semiconductor packages or wafers, is generally divided into two types. The first type is the in-tray method, in which the workpiece is placed in a tray on which it is to be inspected (e.g., Patent Document 1). The second type is the pick-and-place method, in which the workpiece is transported from the tray and placed on an inspection table for inspection, and then transported back onto the tray after inspection (e.g., Patent Document 2).

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2009-295814

[0006] Patent Document 2: Japanese Patent Application Publication No. 2003-114251 Summary of the Invention

[0007] The problem that the invention aims to solve

[0008] Incidentally, the pick-and-place method requires a changeover operation to move the workpiece to / from the pallet for inspection. This changeover operation is time-consuming, leading to a decrease in production volume. In contrast, the pallet-based method overcomes these drawbacks of the pick-and-place method.

[0009] The prior art tray-based method involves sweeping an inspector suspended from an XY table fixed to the ceiling to inspect workpieces. However, if the inspector is large / heavy, it becomes difficult to suspend it from the ceiling.

[0010] Therefore, in cases where the inspector becomes larger / heavier, placing the inspector on an XY stage fixed to the ground was investigated. However, in this case, the XY stage is fixed to the ground to the side of the pallet conveyor line, subjecting the inspector, which sweeps directly above the conveyor line, to a large bending moment. For such a bending moment, the support structure of the XY stage fixed to the ground needs to be robust, inevitably leading to the challenge of increasing the size of the workpiece inspection device. If the workpiece inspection device is larger, the conveyor line needs to be designed to be correspondingly longer.

[0011] Furthermore, the pallet-based method includes a workpiece inspection area along the pallet's transport path. In conventional workpiece transport devices, the linear transport path presents significant limitations in the design and layout of the device.

[0012] The present invention was made in consideration of such circumstances, and its purpose is to provide a workpiece inspection device that can avoid large-scale workpieces even when using large inspection equipment, and a workpiece conveying device that increases the freedom of design and layout of the workpiece inspection device.

[0013] Methods used to solve problems

[0014] The workpiece conveying apparatus of the present invention includes: an infeed mechanism for infeeding a tray containing a workpiece to be inspected; a first transfer unit for transferring the infeeding tray in a first direction so that the workpiece is facing a first inspection area; a second transfer unit for transferring the tray in a second direction orthogonal to the first direction so that the workpiece is facing a second inspection area; a third transfer unit for transferring the tray containing the inspected workpiece in a third direction orthogonal to the second direction; and an outfeed mechanism for outfeeding the tray.

[0015] Invention Effects

[0016] This invention provides a workpiece inspection device that avoids large-scale operation even when using large inspection equipment, and a workpiece conveying device that increases the design and layout freedom of the workpiece inspection device. Attached Figure Description

[0017] Figure 1 This is a Y-X top view showing the workpiece conveying device according to the first embodiment of the present invention.

[0018] Figure 2 (A) is a Y-X top view illustrating the operation of the workpiece conveying device according to the first embodiment. Figure 2 (B) is its Z-X front view. Figure 2 (C) is its Y-Z side view.

[0019] Figure 3 (A) is a Y-X top view illustrating the operation of the workpiece conveying device according to the first embodiment. Figure 3 (B) is its Z-X front view. Figure 3 (C) is its Y-Z side view.

[0020] Figure 4 (A) is a Y-X top view illustrating the operation of the workpiece conveying device according to the first embodiment. Figure 4 (B) is its Z-X front view. Figure 4 (C) is its Y-Z side view.

[0021] Figure 5 (A) is a Y-X top view illustrating the operation of the workpiece conveying device according to the first embodiment. Figure 5(B) is its Z-X front view. Figure 5 (C) is its Y-Z side view.

[0022] Figure 6 (A) is a front view showing the state in which the force applied to the bottom surface is released and the pallet is detached from the inspection area. Figure 6 (B) is an enlarged view of the perimeter of the locating pin of the pallet.

[0023] Figure 7 (A) is a front view showing the state of the pallet positioned in the inspection area when force is applied to its bottom surface. Figure 7 (B) is an enlarged view of the perimeter of the locating pin of the pallet.

[0024] Figure 8 It is an X-Y bottom view of the framework defining the first and second inspection areas.

[0025] Figure 9 This is a Y-X top view showing the workpiece inspection apparatus according to the second embodiment of the present invention.

[0026] Figure 10 This is a Y-Z side view showing the workpiece inspection apparatus according to the second embodiment of the present invention.

[0027] Figure 11 This is a Y-X top view showing the workpiece conveying device according to the third embodiment of the present invention.

[0028] Figure 12 (A) is a top perspective view of a multilayer wiring board with bumps arranged on its upper surface, which is used as a workpiece in this embodiment. Figure 12 (B) is a side perspective view of an LSI package with an LSI chip mounted on a multilayer wiring board. Detailed Implementation

[0029] (First Embodiment)

[0030] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Figure 1This is a top view showing the workpiece conveying device 10A (10) according to the first embodiment of the present invention. The workpiece conveying device 10A includes: an infeed mechanism 15 for infeeding a tray 26 containing a workpiece 30 to be inspected; a first transfer unit 11 for transferring the infeeding tray 26 in a first direction 21, and orienting the tray 26 containing the workpiece 30 toward a first inspection area 17a; a second transfer unit 12 for transferring the tray 26 in a second direction 22 orthogonal to the first direction 21, and orienting the tray 26 containing the workpiece 30 toward a second inspection area 17b; a third transfer unit 13 for transferring the tray 26 containing the inspected workpiece 30 in a third direction 23 orthogonal to the second direction 22; and an outfeed mechanism 16 for outfeeding the tray 26.

[0031] Figure 2 (A) Figure 5 (A) is a Y-X top view illustrating the operation of the workpiece conveying device 10A according to the first embodiment. Figure 2 (B) Figure 5 (B) is its Z-X front view. Figure 2 (C)~ Figure 5 (C) is its Y-Z side view.

[0032] The first transfer unit 11 and the third transfer unit 13 share a common structure, including a conveyor 41 that moves the pallet 26 from one end to the other and a trolley 42 that moves the conveyor 41 toward either the first inspection area 17a or the second inspection area 17b. The first transfer unit 11, thus configured, moves the pallet 26, on which the workpiece 30 is placed before inspection and is transported in from the infeeding mechanism 15, toward the first inspection area 17a, and directs the pallet 26 containing the workpiece 30 toward the first inspection area 17a. Conversely, the third transfer unit 13 moves and transports the pallet 26, on which the workpiece 30 is placed after inspection and has been removed from the second inspection area 17b, toward the third direction 23.

[0033] The conveyor 41 is configured in two rows by arranging carriers made of belts or plastic chains. The pallets 26, on which the workpieces 30 are arranged in two dimensions, are supported at both ends by the conveyor 41 and move.

[0034] The infeed mechanism 15 and the outfeed mechanism 16 share a common structure. The infeed mechanism 15 transports a pallet 26 containing workpieces 30 to be inspected to one end of the first transfer section 11. The outfeed mechanism 16 receives a pallet 26 containing workpieces 30 to be inspected from the third transfer section 13 and transports it out. While a belt conveyor is exemplified as the infeed mechanism 15 and the outfeed mechanism 16, there is no particular limitation, and manual operation is also possible.

[0035] Second transfer unit 12 Figure 5As shown, it includes: a first force-applying mechanism 31 that applies force to the bottom surface to move the tray 26 from the first transfer section 11 to the first inspection area 17a; a moving mechanism 44 that carries the tray 26, now free of force, moving it from the first inspection area 17a toward the second inspection area 17b; and a second force-applying mechanism 32 that applies force to the bottom surface to move the tray 26 from the moving mechanism 44 to the second inspection area 17b. Furthermore, as... Figure 2 (C)~ Figure 5 As shown in (C), the first force-applying mechanism 31 and the second force-applying mechanism 32 apply force to the corresponding tray 26 and release the force at the same time.

[0036] In addition to carrying the tray 26 and transferring it from the first inspection area 17a to the second inspection area 17b in a second direction 22, the second transfer unit 12 is also returned from the second inspection area 17b in the opposite direction to the second direction 22 of the first inspection area 17a when empty. Furthermore, a frame 45 dividing the first inspection area 17a and the second inspection area 17b is provided on the upper side of the second transfer unit 12.

[0037] Figure 6 (A) is a front view showing the state in which the force applied to the bottom surface is released and the tray 26 is detached from the inspection area 17. Figure 6 (B) is an enlarged view of the periphery of the locating pin 43 of the tray 26. Figure 7 (A) is a front view showing the state in which force is applied to the bottom surface of the tray 26 and it is positioned in the inspection area 17. Figure 7 (B) is an enlarged view of the periphery of the locating pin 43 of the tray 26.

[0038] A notch 49 is formed on the frame 45 to specify the height position of the tray 26 in the first inspection area 17a or the second inspection area 17b. Furthermore, a plurality of pins 43 are provided on the frame 45 to position the tray 26.

[0039] Furthermore, the pin 43 has: a body portion 46, which is connected to the frame 45 and has a fixed outer diameter, with its side circumferential surface abutting against the periphery of the tray 26 to define its planar position; and a cone portion 47, which is formed by reducing the outer diameter from the body portion 46 toward the front end, with its conical surface slidingly contacting the periphery of the tray 26 and guiding it toward the inspection area 17.

[0040] Figure 8This is an X-Y bottom view of the frame 45 that defines the inspection areas 17 (first inspection area 17a and second inspection area 17b). Thus, the locating pins 43 of the tray 26 are arranged to surround the outer periphery of the first inspection area 17a and the second inspection area 17b. Furthermore, the notches 49 defining the height position of the tray 26 do not need to be evenly distributed on the outer periphery of the inspection areas 17 (17a, 17b); they can be located near the locating pins 43 or integrated with the locating pins 43.

[0041] Figure 9 This is a Y-X top view showing the workpiece inspection apparatus 50 according to the second embodiment of the present invention. Figure 10 This is its Y-Z side view. Thus, the workpiece inspection device 50 includes: a first inspector 51 for inspecting workpieces 30 in a first inspection area 17a and a second inspector 52 for inspecting workpieces 30 in a second inspection area 17b; a housing 55 that houses the first inspector 51 and the second inspector 52 at the same arrangement interval as the first inspection area 17a and the second inspection area 17b; a platform 56 that allows the housing 55 to be displaced at a distance equal to the arrangement interval of the workpieces 30 in the tray 26; and a support 57 that supports the platform 56 and is fixed relative to the ground 58.

[0042] Furthermore, in the workpiece inspection device 50, the support column 59, which fixes the support body 57 to the ground 58, is asymmetrically arranged on the first transfer section 11 side and the third transfer section 13 side, with more columns on one side of the second transfer section 12. Additionally, the transfer direction of the second transfer section 12, which reciprocates between the first inspection area 17a and the second inspection area 17b, is perpendicular to the first transfer section 11 and the third transfer section 13. This allows for the miniaturization of the support body 57 and the table 56 while increasing rigidity. Consequently, it helps to reduce the width of the workpiece inspection device 50, which is not directly opposite the transfer direction (X direction) of the pallet 26 being transported in / out.

[0043] Here, back to Figures 2-5 This section explains the operation of the workpiece conveying device 10 and the workpiece inspection device 50 according to the relevant embodiments. First, as... Figure 2 As shown, in the first inspection area 17a and the second inspection area 17b, the first inspector 51 and the second inspector 52 ( Figure 9 , Figure 10 The workpiece 30 is inspected by moving at a distance equal to the arrangement interval of the workpiece 30. At this time, the second transfer unit 12 raises the force application mechanisms 31 and 32, applies force to the tray 26 and positions it relative to the first inspection area 17a and the second inspection area 17b.

[0044] Furthermore, the pallet 26 containing the workpiece 30 to be inspected is transported to one end of the first transfer unit 11 via the conveyor 15. The first transfer unit 11 then uses the conveyor 41 to move the pallet 26 from one end to the other. At the other end of the first transfer unit 11, the pallet 26 remains in a standby state until the inspection of the workpiece 30 in the pallet 26 of the inspection area 17 is completed.

[0045] Next, as Figure 3 As shown, at the end of the inspection of tray 26 in inspection area 17 (or before the end), the third transfer unit 13 is moved in the opposite direction to the third direction 23, so that the empty conveyor 41 is positioned below the second inspection area 17b. Next, the force-applying mechanisms 31 and 32 are lowered to release the force, causing tray 26 to detach from inspection areas 17 (17a, 17b). Thus, tray 26 in the first inspection area 17a is placed on the moving mechanism 44, and tray 26 in the second inspection area 17b is placed on the conveyor 41 of the third transfer unit 13.

[0046] Next, as Figure 4 As shown, the third transfer unit 13 is moved in the third direction 23, bringing it close to the delivery mechanism 16. Simultaneously, the moving mechanism 44 moves the tray 26 from directly below the first inspection area 17a towards the second direction 22 to directly below the second inspection area 17b. Furthermore, simultaneously, the first transfer unit 11 is moved in the first direction 21, positioning the conveyor 41 carrying the tray 26 containing the workpiece 30 to be inspected below the first inspection area 17a. These three actions are performed simultaneously, from... Figure 3 Instantly switch to Figure 4 The state.

[0047] Next, as Figure 5 As shown, in the second transfer section 12, the force application mechanisms 31 and 32 are raised to apply force to the tray 26 and position it relative to the first inspection area 17a and the second inspection area 17b. At this time, the positioning pin 43 ( Figure 6 , Figure 7 The function of the tray 26 is to correctly and stably position the tray 26 in both height and planar position relative to the first inspection area 17a and the second inspection area 17b, respectively.

[0048] Next, the first transfer unit 11 is moved in the opposite direction to the first direction 21, bringing the empty conveyor 41 close to the infeed mechanism 15. Simultaneously, in the second transfer unit 12, the moving mechanism 44, in an empty state, moves from the second inspection area 17b in the direction opposite to the second direction 22 (see reference 15). Figure 4The machine moves in the opposite direction, returning to the position of the first inspection area 17a. The third transfer unit 13 activates the conveyor 41, transferring and transporting the tray 26, which has detached from the second inspection area 17b and contains the inspected workpieces 30, in the third direction 23. These three actions are performed simultaneously. Figure 5 Instantly switch to Figure 2 The state. Thus, repeatedly based on... Figures 2-5 The described actions involve sequentially moving the tray 26, which holds the workpiece 30 to be inspected, into, inspecting, and removing it.

[0049] Figure 11 This is a Y-X top view showing the workpiece conveying device 10B(10) according to the third embodiment of the present invention. The difference from the workpiece conveying device 10A according to the first embodiment is that the third transfer unit 13 moves the third direction 23 of the pallet 26 in the opposite direction.

[0050] In this way, the workpiece conveying device 10 (10A, 10B) can make the conveying path of the pallet 26 more varied, such as curved or reversed. As a result, compared with the case where the conveying path is straight, the design and layout of the workpiece inspection device 50 can be more flexible.

[0051] Figure 12 (A) is a top perspective view of a multilayer wiring board 38 with bumps 37 arranged on its upper surface, which is used as the workpiece 30 in this embodiment. Figure 5 Image (B) is a side perspective view of an LSI package in which an LSI chip 36 is mounted on the multilayer wiring board 38. In this LSI package, the electrodes of the multilayer wiring board 38 and the electrodes of the LSI chip 36 are electrically connected by bumps 37. Furthermore, the LSI package is encapsulated in resin for degradation and thermal countermeasures. This method of electrical connection using ball-shaped bumps 37 is called flip-chip mounting.

[0052] Flip-chip mounting requires the height alignment of the bumps 37 to ensure direct overlap between the electrodes of the multilayer wiring board 38 and the electrodes of the LSI chip 36. This is because any discrepancy in the height of the bumps 37 will result in poor connection. In addition, it is necessary to inspect for defects such as bump position, bump diameter, abnormal bump shape, and foreign matter on the substrate. Furthermore, while the workpiece 30 is illustrated as an LSI package in this embodiment, it is not limited to this; any component capable of being placed on the tray 26 is acceptable.

[0053] In this case, the first inspector 51 measures the relative height of the multilayer wiring board 38. Furthermore, the second inspector 52 is a measuring / inspection device that measures the various dimensions of the bumps 37 arranged on the upper surface of the multilayer wiring board 38 or detects foreign objects. Specifically, it is a surface shape measuring machine and an image measuring machine that apply light, or a measuring / inspection machine that possesses both functions and is capable of measuring surface bump information.

[0054] Furthermore, the height variation of the upper surface of the multilayer wiring board 38 is generally much greater than the size variation of the bumps 37. Therefore, the measuring range of the first inspector 51 is set to be larger than that of the second inspector 52. Therefore, an adjustment mechanism (not shown) is provided in the height direction of the adjustment frame 45 to ensure that the second inspection area 17b does not deviate from the measuring range of the second inspector 52. In addition, the inspectors 51 and 52 are not particularly limited, and can be either contact or non-contact types, as long as they are used to inspect the workpiece 30.

[0055] Label Explanation

[0056] 10 (10A, 10B)...Workpiece conveying device; 11...First transfer section; 12...Second transfer section; 13...Third transfer section; 15...Inbound mechanism; 16...Outbound mechanism; 17...Inspection area; 17a...First inspection area; 17b...Second inspection area; 21...First direction; 22...Second direction; 23...Third direction; 26...Pattern; 30...Workpiece; 31...First force application mechanism; 32...Second... Force application mechanism; 36…LSI chip; 37…bump; 38…multilayer wiring board; 41…conveyor; 42…trolley; 43…positioning pin; 44…moving mechanism; 45…frame; 46…body; 47…cone; 49…notch; 50…workpiece inspection device; 51…first inspector; 52…second inspector; 55…box; 56…table; 57…support; 58…ground; 59…support column.

Claims

1. A workpiece inspection apparatus characterized by comprising: a workpiece conveying device including: a carrying-in mechanism that carries in a tray in which a workpiece before inspection is arranged; a first transfer section that transfers the carried-in tray to a first direction to direct the workpiece toward a first inspection area; a second transfer section that transfers the tray to a second direction orthogonal to the first direction to direct the workpiece toward a second inspection area; a third transfer section that transfers the tray in which the workpiece after inspection is arranged to the same direction as the first direction; and a carrying-out mechanism that carries out the tray; a first inspector that inspects the workpiece in the first inspection area and a second inspector that inspects the workpiece in the second inspection area; a case that houses the first inspector and the second inspector at the same arrangement interval as the first inspection area and the second inspection area; a table that displaces the case at the same interval as the arrangement interval of the workpiece of the tray; and a support body that supports the table and is fixed with respect to the ground.

2. The workpiece inspection apparatus according to claim 1, characterized in that at least one of the first transfer section and the third transfer section includes a conveyor that transfers the tray from one end to the other end and a trolley that moves the conveyor to the direction of the first inspection area or the second inspection area.

3. The workpiece inspection apparatus according to claim 1 or 2, characterized in that the second transfer section has: a first force application mechanism that applies force to a bottom surface to position the tray from the first transfer section into the first inspection area; a moving mechanism that places the tray after the force is released to direct it from the first inspection area toward the second inspection area; and a second force application mechanism that applies force to the bottom surface to position the tray from the moving mechanism into the second inspection area.

4. The workpiece inspection apparatus according to claim 1 or 2, characterized in that a support column that fixes the support body to the ground is asymmetrically arranged on the first transfer section side and the third transfer section side by being more provided on one side of the second transfer section.

5. A workpiece conveying device characterized by comprising: a carrying-in mechanism that carries in a tray in which a workpiece before inspection is arranged; a first transfer section that transfers the carried-in tray to a first direction to direct the workpiece toward a first inspection area; a second transfer section that transfers the tray to a second direction orthogonal to the first direction to direct the workpiece toward a second inspection area; a third transfer section that transfers the tray in which the workpiece after inspection is arranged to the same direction as the first direction; and a carrying-out mechanism that carries out the tray, the second transfer section has: a first force application mechanism that applies force to a bottom surface to position the tray from the first transfer section into the first inspection area; a moving mechanism that places the tray after the force is released to direct it from the first inspection area toward the second inspection area; and a second force application mechanism that applies force to the bottom surface to position the tray from the moving mechanism into the second inspection area. ​ ​ The first force applying mechanism and the second force applying mechanism synchronize the timing of the respective force application and release to the corresponding tray.

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