A scanning electron microscope placement platform for adjusting the level of chip samples

Abstract

The present invention discloses a scanning electron microscope placement platform for adjusting the level of chip samples, comprising a workbench, a shell is placed on the upper end of the workbench, a pull-out box is slidably connected to one side of the lower part of the shell, a bottom plate is fixedly connected to the bottom of the inner cavity of the pull-out box, a placement platform for placing chip samples is arranged in the middle of the upper end of the bottom plate, a positioning mechanism for adjusting the position of the chip sample is symmetrically arranged on the upper end of the bottom plate, a driving mechanism for driving the positioning mechanism to move is arranged in the middle of the upper end of the bottom plate, and when the upper end of the driving mechanism rotates, the end of the positioning mechanism close to the placement platform is driven to move relative to the placement platform. The present invention drives the symmetrical driving rods to synchronously approach the placement platform through the rotating plate, and drives the silicone plate moving rods to synchronously approach the placement platform through the driving rod, so that the silicone plate can center the chip sample, and a three-dimensional chip sample image can be obtained through the cooperation of the driven rod, the moving plate and the driving slot.

Description

Technical Field

[0001] The invention relates to the technical field of chip testing, in particular to a scanning electron microscope placement platform for adjusting the level of chip samples. Background Art

[0002] After the chip is produced, it usually needs to be tested. During the chip detection and leveling process, a scanning electron microscope is usually used to scan the chip sample. The scanning electron microscope (SEM) is an observation method between a transmission electron microscope and an optical microscope. It uses a focused, narrow high-energy electron beam to scan the sample, and stimulates various physical information through the interaction between the beam and the material. This information is collected, amplified, and re-imaged to achieve the purpose of characterizing the microscopic morphology of the material. In order to achieve this goal, a chip test device is usually used, and a stage is installed on the chip test device.

[0003] When scanning a chip sample with an electron microscope, the mounting platform is usually taken out and the chip sample is fixed on the mounting platform. The mounting platform and the chip sample are then placed together under a scanning electron microscope for scanning. This may cause the chip to tilt during movement, resulting in a skewed image of the scanned chip sample, making it difficult to observe whether the chip is level. Summary of the invention

[0004] The object of the present invention is to provide a scanning electron microscope placement platform for adjusting the level of chip samples to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A scanning electron microscope placement platform for adjusting the level of chip samples comprises a workbench, a shell is placed on the upper end of the workbench, a pull-out box is slidably connected to one side of the lower part of the shell, a bottom plate is fixedly connected to the bottom of the inner cavity of the pull-out box, a placement platform for placing chip samples is arranged in the middle of the upper end of the bottom plate, a positioning mechanism for adjusting the position of the chip sample is symmetrically arranged on the upper end of the bottom plate, a driving mechanism for driving the positioning mechanism to move is arranged in the middle of the upper end of the bottom plate, and when the upper end of the driving mechanism rotates, the end of the positioning mechanism close to the placement platform is driven to move relative to the placement platform.

[0007] As a further solution of the present invention: a fixed table is fixedly connected to the middle of the upper end of the base plate, the driving mechanism includes a servo motor, the servo motor is fixedly connected to the upper part of the inner cavity of the fixed table, the output end of the servo motor is fixedly connected to a gear, a rotating plate is fitted on the upper end of the base plate, a through hole is opened in the middle of the upper end of the rotating plate, the diameter of the through hole is larger than the diameter of the fixed table, a lifting ring is fixedly connected to the lower part of the inner cavity of the through hole, the side of the lifting ring away from the rotating plate is rotatably connected to the outer wall of the fixed table, a gear ring is fixedly connected to the upper part of the inner cavity of the through hole, and the gear ring and the gear are meshed with each other.

[0008] As a further solution of the present invention: a ball head is arranged between the upper end of the fixed table and the placement platform, and a groove No. 1 and a groove No. 2 are sequentially opened on the outer wall of the ball head, and the groove No. 1 and the groove No. 2 are perpendicular to each other, and the upper end of the groove No. 2 and the lower end of the groove No. 1 are both slidably connected with a rotating plate, and a connecting rod is fixedly connected with the middle part of the side of the rotating plate away from the ball head, and the end of the connecting rod located at the top away from the ball head is fixedly connected to the middle part of the lower end of the placement platform, and the end of the connecting rod located at the bottom away from the ball head is fixedly connected to the middle part of the upper end of the fixed table.

[0009] As a further solution of the present invention: a first annular groove and a second annular groove are provided at the upper end of the rotating plate, the diameter of the second annular groove is larger than the diameter of the first annular groove, a guide groove which is centrally symmetrical about the center position of the fixed platform is provided between the second annular groove and the first annular groove, the inner cavity of the first annular groove is fixedly connected with a centrally symmetrical first arc block, the inner cavity of the second annular groove is fixedly connected with a centrally symmetrical second arc block, and the lower ends of the first arc block and the second arc block are both fixedly connected to the rotating plate.

[0010] As a further solution of the present invention: the first arc block is close to the connection between the guide groove and the first annular groove, the second arc block is close to the connection between the guide groove and the second annular groove, the first arc block has a first inclined surface on the upper end, the end of the first inclined surface close to the guide groove is higher than the end away from the guide groove, the second arc block has a second inclined surface on the upper end, the end of the second inclined surface close to the guide groove is higher than the end away from the guide groove.

[0011] As a further solution of the present invention: the positioning mechanism includes a bracket, the lower end of the bracket is fixedly connected to the base plate, the middle part of the upper end of the bracket is fixedly connected to a fixing rod, the lower end of the fixing rod is slidably connected to a driving rod, the middle part of the lower end of the driving rod is vertically slidably connected to an adapter rod, a protrusion is fixedly connected to the middle part of one end of the driving rod close to the bracket, a moving rod is horizontally slidably connected to the lower part of the inner cavity of the fixing rod, a card block is vertically slidably connected to the middle part of one end of the moving rod close to the bracket, and a plurality of card slots for cooperating with the card blocks are evenly arranged on the top of the inner cavity of the moving rod.

[0012] As a further solution of the present invention: a negative pressure hole is opened in the middle of the upper end of the placement platform, and a flexible air pipe is fixedly connected to the side of the inner cavity side wall of the negative pressure hole away from the gear, and the end of the flexible air pipe away from the negative pressure hole passes through the bottom of the placement platform and the upper end of the fixed platform and is connected to the air pump located in the inner cavity of the fixed platform.

[0013] As a further solution of the present invention: the upper end of the rotating plate is vertically slidably connected with a connecting ring, the outer wall of the rotating plate is fitted with a driven ring, the lower end of the driven ring is rotationally connected to the base plate, the lower end of the connecting ring is fixedly connected with a symmetrical pushing block on one side close to the driven ring, the pushing block is vertically slidably connected to the rotating plate, there is a gap between the top of the inner cavity of the connecting ring and the upper end surface of the rotating plate, and the top of the inner cavity of the driven ring is fixedly connected with symmetrical driven blocks.

[0014] As a further solution of the present invention: a driven rod is fixedly connected to one side of the lower end of the driven ring, and a third ring groove is provided on the upper end of the base plate for cooperating with the driven rod, and the end of the driven rod away from the driven ring slidably cooperates with the third ring groove, and a plurality of symmetrical movable plates are slidably connected to the upper end of the base plate, and a traction rope is fixedly connected to the lower end of the placement platform around, and symmetrical rope holes are provided on the upper end of the fixed table, and the end of the traction rope away from the placement platform passes through the rope holes and is fixedly connected to the middle part of the end of the movable plate close to the fixed table, and a driving groove is provided on the side of the upper end of the movable plate away from the fixed table, and symmetrical elastic telescopic rods are arranged on the upper end of the fixed table, and the end of the elastic telescopic rod away from the fixed table is in contact with the lower end surface of the placement platform.

[0015] As a further solution of the present invention: a display is fitted in the middle of the upper end of the workbench, a host is placed on the side of the display away from the shell, the shell and the host are electrically connected, and the host and the display are electrically connected.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The symmetrical driving rods are driven synchronously to approach the placement platform by the rotating plate, and the silicone plate moving rods are driven synchronously to approach the placement platform by the driving rods, so that the silicone plate contacts the chip sample on the placement platform, thereby centering the chip sample. After the symmetrical silicone plate is in contact with the chip sample, the driving rod will move away from the moving rod, and will no longer drive it to continue moving. After the driving rod is away from the end of the moving rod, the card block moves upward to cooperate with the card slot to limit and fix the moving rod. After the driving rod moves to the inner cavity of the first ring groove, it cooperates with the first arc block to fix the chip sample through the air pump and the negative pressure hole during the continuous clockwise rotation. After the rotating plate rotates counterclockwise, the driving rod will drive the silicone plate away from the chip sample, and drive the driven ring to rotate through the lifting ring. Through the cooperation of the driven rod, the moving plate and the driving slot, the symmetrical moving plates are driven away from the placement platform in turn, so that the placement platform is rotated by pulling the traction rope, thereby obtaining a three-dimensional chip sample image. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0019] Figure 2 It is a schematic diagram of the internal structure of the pull-out box in the present invention.

[0020] Figure 3 It is a structural schematic diagram of the placement platform in the present invention.

[0021] Figure 4 It is a schematic diagram of the structure of the rotating plate in the present invention.

[0022] Figure 5 It is a structural schematic diagram of the fixed platform in the present invention.

[0023] Figure 6 It is a structural schematic diagram of the positioning mechanism in the present invention.

[0024] Figure 7 For the present invention Figure 6 Schematic diagram of the structure of area B.

[0025] Figure 8 It is a schematic diagram of the structure of the lifting ring in the present invention.

[0026] Fig. 9 For the present invention Figure 8 Schematic diagram of the structure of area A.

[0027] Fig.10 It is a schematic diagram of the structure of the driven ring in the present invention.

[0028] Fig.11 It is a schematic diagram of the structure of the movable plate in the present invention.

[0029] Fig.12It is a schematic diagram of the structure of the ball head in the present invention.

[0030] In the figure: 1, workbench; 2, housing; 3, display; 4, host; 5, pull-out box; 6, placement platform; 7, negative pressure hole; 8, bottom plate; 9, bracket; 10, fixing rod; 11, driving rod; 12, adapter rod; 13, protrusion; 14, moving rod; 15, block; 16, slot; 17, silicone plate; 18, rotating plate; 19, lifting ring; 20, first ring groove; 21, second ring groove; 22, guide groove; 23, first arc shaped block; 24, the second arc-shaped block; 25, the connecting ring; 26, the pushing block; 27, the driven ring; 28, the driven block; 29, the driven rod; 30, the fixed platform; 31, the elastic telescopic rod; 32, the gear; 33, the traction rope; 34, the flexible air tube; 35, the ball head; 36, the moving plate; 37, the third ring groove; 38, the driving groove; 39, the gear ring; 40, the rope hole; 41, the No. 1 groove; 42, the No. 2 groove; 43, the rotating plate; 44, the connecting rod. DETAILED DESCRIPTION

[0031] See also Figure 1 In an embodiment of the present invention, a scanning electron microscope placement platform for adjusting the level of a chip sample comprises a workbench 1, a display 3 is fittedly arranged in the middle of the upper end of the workbench 1, a shell 2 is placed on one side of the display 3, a host 4 is placed on the side of the display 3 away from the shell 2, the shell 2 and the host 4 are electrically connected, and the host 4 and the display 3 are electrically connected, a pull-out box 5 is slidably connected to one side of the lower part of the shell 2, a bottom plate 8 is fixedly connected to the bottom of the inner cavity of the pull-out box 5, a scanning electron microscope for scanning chip samples is arranged on the upper part of the pull-out box 5, the scanning electron microscope is fixedly connected to the upper part of the inner cavity of the shell 2, a placement platform 6 for placing chip samples is arranged in the middle of the upper end of the bottom plate 8, a positioning mechanism for adjusting the position of the chip sample is symmetrically arranged on the upper end of the bottom plate 8, and a driving mechanism for driving the positioning mechanism to move is arranged in the middle of the upper end of the bottom plate 8, and when the upper end of the driving mechanism rotates, it will drive the positioning mechanism to approach the position of the placement platform 6.

[0032] See also Figure 2-3 and Fig.12The middle part of the upper end of the bottom plate 8 is fixedly connected with a fixed platform 30, the driving mechanism includes a servo motor, the servo motor is fixedly connected to the upper part of the inner cavity of the fixed platform 30, the output end of the servo motor is fixedly connected with a gear 32, the upper end of the bottom plate 8 is fitted with a rotating plate 18, the middle part of the upper end of the rotating plate 18 is provided with a through hole, the diameter of the through hole is larger than the diameter of the fixed platform 30, the lower part of the inner cavity of the through hole is fixedly connected with a lifting ring 19, the side of the lifting ring 19 away from the rotating plate 18 is rotatably connected to the outer wall of the fixed platform 30, and the upper part of the inner cavity of the through hole is fixedly connected The gear ring 39 is connected to the rotating plate 18, and the gear ring 39 and the gear 32 are meshed with each other. That is, when the servo motor drives the gear 32 to rotate clockwise, the gear ring 39 will be driven to rotate clockwise, thereby driving the rotating plate 18 to rotate clockwise. The upper end of the rotating plate 18 is provided with a first annular groove 20 and a second annular groove 21. The diameter of the second annular groove 21 is larger than that of the first annular groove 20. A guide groove 22 is provided between the second annular groove 21 and the first annular groove 20, which is symmetrical with respect to the center position of the fixed table 30. The guide groove 22 connects the first annular groove 20 and the second annular groove 21. A ball head 35 is arranged between the upper end of the fixed platform 30 and the placement platform 6, and a first groove 41 and a second groove 42 are sequentially provided on the outer wall of the ball head 35, and the first groove 41 and the second groove 42 are perpendicular to each other, and the upper end of the second groove 42 and the lower end of the first groove 41 are both slidably connected with a rotating plate 43, and a connecting rod 44 is fixedly connected to the middle of one side of the rotating plate 43 away from the ball head 35, and one end of the connecting rod 44 located at the top away from the ball head 35 is fixedly connected to the middle of the lower end of the placement platform 6, and the connecting rod 44 located at the bottom is away from the ball head 35. One end is fixedly connected to the middle part of the upper end of the fixed platform 30, that is, when the placement platform 6 is subjected to a force in the direction of the No. 2 groove 42, the rotating plate 43 located above will be driven to rotate around the center position of the ball head 35 in the inner cavity of the No. 2 groove 42 through the connecting rod 44. When the placement platform 6 is subjected to a force in the direction of the No. 1 groove 41, the rotating plate 43 and the No. 2 groove 42 cooperate to push and drive the ball head 35 to rotate synchronously, even if the rotating plate 43 located below rotates around the center position of the ball head 35 in the inner cavity of the No. 1 groove 41.

[0033] See also Figure 4-5The inner cavity of the first annular groove 20 is fixedly connected with a first arc block 23 which is symmetrical in center, and the inner cavity of the second annular groove 21 is fixedly connected with a second arc block 24 which is symmetrical in center. The first arc block 23 and the second arc block 24 are both symmetrically distributed about the center position of the fixed platform 30. The lower ends of the first arc block 23 and the second arc block 24 are both fixedly connected to the rotating plate 18. The first arc block 23 is located between the connection between the two adjacent guide grooves 22 and the first arc block 23, and the second arc block 24 is located between the connection between the two adjacent guide grooves 22 and the second annular groove 21. The first arc block 23 is close to the connection between the guide groove 22 and the first annular groove 20, and the second arc block 24 is close to the connection between the guide groove 22 and the second annular groove 21. 23 is close to the side of the inner cavity of the guide groove 22 close to the placement platform 6, and the second arc block 24 is close to the side of the inner cavity of the guide groove 22 away from the placement platform 6. The length of the first arc block 23 is less than the spacing between the connection between the two adjacent guide grooves 22 and the first annular groove 20. The curvature of the side wall of one end of the first arc block 23 close to the connection between the guide groove 22 and the first annular groove 20 is the same as the curvature of the side wall of the inner cavity of the guide groove 22. The plane where the upper end of the first arc block 23 close to the guide groove 22 is located is higher than the plane where the end of the first arc block 23 away from the guide groove 22 is located, that is, the upper end of the first arc block 23 is provided with a first inclined surface, and the upper end of the second arc block 24 is provided with a second inclined surface, and the end of the second inclined surface close to the guide groove 22 is higher than the end away from the guide groove 22.

[0034] See also Figure 6-7The positioning mechanism includes a bracket 9, the lower end of the bracket 9 is fixedly connected to the bottom plate 8, the middle part of the upper end of the bracket 9 is fixedly connected to a fixing rod 10, the lower end of the fixing rod 10 is slidably connected to a driving rod 11, and the outer wall of the end of the driving rod 11 away from the fixing rod 10 is slidably matched with the second annular groove 21, the guide groove 22 and the first arc block 23. When the driving rod 11 is in the initial position, that is, when the lower end of the driving rod 11 is located at the connection between the guide groove 22 and the second annular groove 21, that is, when the rotating plate 18 rotates clockwise with the gear ring 39, due to the first arc block 23 and the first arc block 23, the first arc block 23 and the second arc block 23 are slidably matched. The top of the second arc block 24 is higher than the bottom of the inner cavity of the first annular groove 20 and the second annular groove 21, so the outer wall of the lower end will contact the side wall of the second arc block 24. At this time, the second arc block 24 will block and guide the driving rod 11, so that the driving rod 11 will relatively enter the guide groove 22 and move horizontally toward the center position of the fixed platform 30. The lower part of the inner cavity of the fixed rod 10 is horizontally slidably connected to the moving rod 14, and the middle part of the end of the moving rod 14 close to the bracket 9 is vertically slidably connected to the block 15. The block 15 and the bottom of the inner cavity of the moving rod 14 are connected. The top of the inner cavity of the moving rod 14 is evenly provided with a plurality of card slots 16 for matching with the card block 15 through a spring elastic connection. A magnet is provided at the middle of the upper end of the driving rod 11. The card block 15 and the end of the moving rod 14 close to the bracket 9 are provided with iron sheets. When the driving rod 11 is relatively close to the placement platform 6, the moving rod 14 and the card block 15 are driven to move synchronously by magnetic force. The plane where the upper end of the driving rod 11 is located is lower than the plane where the lower end of the placement platform 6 is located. The end of the moving rod 14 away from the card block 15 is fixedly connected with a silicone plate 17. When the driving rod 11 is close to the placement platform 6, the moving rod 14 and the card block 15 are connected to the silicone plate 17. During the process of placing the platform 6, the silicone plate 17 will be driven close to the placing platform 6. Grooves are provided around the upper end of the placing platform 6 to cooperate with the movement of the moving rod 14, so as to adjust the position of the chip sample placed on the placing platform 6. Since the symmetrical driving rods 11 move synchronously, the silicone plate 17 located in the same vertical plane will approach the chip sample synchronously. At this time, if the position of the chip sample is offset, the symmetrical silicone plate 17 will simultaneously push the edges of the chip sample so that the center position of the chip sample coincides with the center position of the placing platform 6.

[0035] Since the sizes of chip samples are diverse, there will be synchronously moving silicone plates 17. When one group of symmetrical silicone plates 17 is attached to the chip sample, the other group of symmetrical silicone plates 17 has not yet contacted the side of the chip sample. At this time, as the driving rod 11 continues to move, the magnet will gradually move away from the iron sheet at the end of the moving rod 14, thereby no longer pushing the moving rod 14 and the silicone plate 17 to move horizontally. In the process of the driving rod 11 moving away from the end of the moving rod 14, the magnet will also lose its attraction to the block 15, so that the block 15 moves up under the action of elastic force and is engaged in the slot 16. The position of the silicone plate 17 is limited by the engagement limit of the block 15 and the slot 16, thereby preventing the chip sample from moving in a direction other than the moving direction of the contacting silicone plate 17 during the contact process, thereby centering the chip sample.

[0036] By setting the cooperation between the first annular groove 20 and the first arc block 23, during the clockwise rotation of the rotating plate 18, the driving rod 11 will eventually enter the first annular groove 20. After the driving rod 11 enters the inner cavity of the first annular groove 20, the centering of the chip sample has been completed. At this time, even if the servo motor is still driving the rotating plate 18 to rotate, it will not affect the driving rod 11. The middle part of the lower end of the driving rod 11 is vertically slidably connected with the adapter rod 12, and the top of the adapter rod 12 is elastically connected to the top of the inner cavity of the driving rod 11 through a spring. When the driving rod 11 is located in the first annular groove 20, if the rotating plate 18 continues to rotate clockwise, the adapter rod 12 will be relatively close to the end of the guide groove 22 away from the first arc block 23, that is, the adapter rod 12 will contact the lower end of the first inclined surface. In the process of the adapter rod 12 contacting the first inclined surface, the adapter rod 12 will be relatively squeezed upward, thereby crossing the first inclined surface, and rebounding after the adapter rod 12 is separated from the first inclined surface to contact the bottom of the inner cavity of the first annular groove 20 again. If the driving rod 11 is located in the first annular groove 20 and the rotating plate 18 is When rotating counterclockwise, the higher end of the first arc block 23 will block and guide the driving rod 11, so that the driving rod 11 enters the inner cavity of the guide groove 22 and moves toward the position of the bracket 9. During the resetting process of the driving rod 11, the magnet will approach the end of the moving rod 14 and the position of the block 15 again, thereby driving the block 15 away from the card slot 16 and driving the moving rod 14 away from the position of the placement platform 6, thereby driving the silicone plate 17 to separate from the chip sample. A negative pressure hole 7 is opened in the middle of the upper end of the placement platform 6, and the inner cavity side of the negative pressure hole 7 A flexible air pipe 34 is fixedly connected to the side of the wall away from the gear 32. One end of the flexible air pipe 34 away from the negative pressure hole 7 passes through the bottom of the placement platform 6 and the upper end of the fixing table 30 and is connected to the air pump located in the inner cavity of the fixing table 30. After the driving rod 11 is located in the inner cavity of the first annular groove 20, the air pump can be turned on to form a negative pressure in the negative pressure hole 7, thereby adsorbing and fixing the chip sample. At this time, the clockwise rotation of the rotating plate 18 will not affect the driving rod 11, so the staff has enough time to turn on the air pump and complete the fixation of the chip sample through negative pressure.

[0037] See also Figure 8-9The upper end of the rotating plate 18 is vertically slidably connected with a connecting ring 25, and the outer wall of the rotating plate 18 is fitted with a driven ring 27. The lower end of the driven ring 27 is rotatably connected to the bottom plate 8. A symmetrical pushing block 26 is fixedly connected to the lower end of the connecting ring 25 near the driven ring 27. The pushing block 26 is vertically slidably connected to the rotating plate 18. The outer wall of the rotating plate 18 is provided with a groove for matching the vertical movement of the pushing block 26. The lower end of the pushing block 26 is elastically connected to the bottom of the inner cavity of the groove by a spring. There is a gap between the top of the inner cavity of the connecting ring 25 and the upper end surface of the rotating plate 18. A protrusion 13 is fixedly connected to the middle part of the end of the driving rod 11 close to the bracket 9, and a third inclined surface is provided at the end of the protrusion 13 away from the driving rod 11. In the process of the driving rod 11 approaching the second annular groove 21, the end of the first inclined surface away from the driving rod 11 will be inserted into the gap between the connecting ring 25 and the rotating plate 18, thereby pushing the connecting ring 25 to move up until the upper end of the protrusion 13 is reached through the third inclined surface. The surface of the driven ring 27 is in contact with the top of the inner cavity of the connecting ring 25. When the driving rod 11 is located in the inner cavity of the second annular groove 21, the rotating plate 18 rotates counterclockwise, and the driving rod 11 will approach the second arc block 24 and the second inclined surface. Under the action of the adapter rod 12, the driving rod 11 will pass over the first inclined surface so that the second arc block 24 will not guide the position of the driving rod 11 when rotating counterclockwise. The top of the inner cavity of the driven ring 27 is fixedly connected with a symmetrical driven block 28. When the connecting ring 25 is not in contact with the driven ring 27, the driven ring 27 will be in contact with the second arc block 24 and the second inclined surface. When the connecting ring 25 moves upward, the upper end surface of the pushing block 26 is lower than the lower end surface of the driven block 28. In the process that the pushing block 26 rotates counterclockwise with the rotating plate 18, the pushing block 26 will not affect the position of the driven ring 27. When the connecting ring 25 moves upward, the upper end surface of the pushing block 26 is higher than the lower end surface of the driven block 28. In the process that the pushing block 26 rotates counterclockwise with the rotating plate 18, the pushing block 26 will contact the driven block 28, thereby driving the driven ring 27 to rotate counterclockwise synchronously.

[0038] See also Figure 10-11A driven rod 29 is fixedly connected to one side of the lower end of the driven ring 27, and a third annular groove 37 for cooperating with the driven rod 29 is provided at the upper end of the bottom plate 8. The end of the driven rod 29 away from the driven ring 27 is slidably matched with the third annular groove 37. A plurality of symmetrical movable plates 36 are slidably connected to the upper end of the bottom plate 8. The end of the movable plate 36 close to the fixed platform 30 is elastically connected to the inner cavity of the fixed platform 30 through a spring. A traction rope 33 is fixedly connected to the lower end of the placement platform 6 around the periphery. A symmetrical rope hole 40 is provided at the upper end of the fixed platform 30. The end of the traction rope 33 away from the placement platform 6 passes through the rope hole 40 and is fixedly connected to the middle part of the end of the movable plate 36 close to the fixed platform 30. When the connecting ring 25 drives the driven ring 27 to rotate counterclockwise through the pushing block 26, the connecting ring 25 rotates the driven ring 27 counterclockwise. During the rotation of the driven rod 29 counterclockwise, the driven rod 29 will rotate counterclockwise in the third annular groove 37 around the center of the fixed platform 30. A driving groove 38 is provided on the side of the upper end of the movable plate 36 away from the fixed platform 30. One end of the driving groove 38 is close to the fixed platform 30 and the other end is away from the fixed platform 30. The end away from the fixed platform 30 coincides with the third annular groove 37. During the counterclockwise rotation of the driven rod 29, it will move from the inner cavity of the third annular groove 37 to the driving groove 38, thereby driving the movable plate 36 away from the fixed platform 30 through the cooperation between the driven rod 29 and the driving groove 38, thereby driving the traction rope 33 connected thereto to move synchronously. Since only a single driven rod 29 is provided at the lower end of the driven ring 27, the symmetrical movable plates 36 will move away from the fixed platform 30 in sequence.

[0039] Symmetrical elastic telescopic rods 31 are provided at the upper end of the fixed table 30, and the symmetrical elastic telescopic rods 31 are used to support the placement platform 6 so as to keep it in a horizontal state. When the movable plate 36 is pushed by the driven rod 29, the traction rope 33 will be driven to move, and the ball head 35, the rotating plate 43, the second slot 42 and the first slot 41 will be cooperated to achieve that when the movable plate 36 is away from the fixed table 30, the side of the placement platform 6 close to the movable plate 36 will rotate downward, and the cooperation of the driven rod 29 and the symmetrical movable plate 36 can drive the four sides of the placement platform 6 to rotate downward in turn, so that the scanning electron microscope can scan and process the chip sample in all directions and angles, and the symmetrical elastic telescopic rods 31 can be used to reset the placement platform 6 to a horizontal position in time after the rotation, so as to facilitate the next rotation, and a three-dimensional chip sample image can be obtained during the scanning process, so as to facilitate the observation of the chip. Whether the chip sample has been leveled and whether the chip sample needs to be leveled again, when testing the chip sample, open the pull-out box 5 to place the chip sample on the placement platform 6, and then close the pull-out box 5, turn on the servo motor to drive the silicone plate 17 to approach the chip sample, so that the chip sample is centered. After the chip sample is centered, the chip sample is adsorbed and fixed on the placement platform 6 by the air pump, and then the servo motor drives the rotating plate 18 to rotate counterclockwise, thereby driving the silicone plate 17 away from the chip sample through the driving rod 11, and driving the silicone plate 17 counterclockwise through the cooperation of the protrusion 13 and the connecting ring 25, thereby driving the moving plate 36 to move through the cooperation of the driven rod 29 and the driving groove 38, and pulling the four sides of the placement platform 6 to rotate downward in turn through the traction rope 33, so that the scanning electron microscope can obtain a three-dimensional image of the chip sample, and present the image on the shell 2 through the host 4.

Claims

1. A scanning electron microscope placement platform for adjusting the level of a chip sample, comprising a workbench, characterized in that: A shell is placed on the upper end of the workbench, a pull-out box is slidably connected to one side of the lower part of the shell, a bottom plate is fixedly connected to the bottom of the inner cavity of the pull-out box, a placement platform for placing chip samples is arranged in the middle of the upper end of the bottom plate, a positioning mechanism for adjusting the position of the chip sample is symmetrically arranged on the upper end of the bottom plate, a driving mechanism for driving the positioning mechanism to move is arranged in the middle of the upper end of the bottom plate, when the upper end of the driving mechanism rotates, the end of the positioning mechanism close to the placement platform is driven to move relative to the placement platform, the middle of the upper end of the bottom plate is fixedly connected to a fixed platform, the driving mechanism includes a servo motor, and the servo motor The machine is fixedly connected to the upper part of the inner cavity of the fixed table, the output end of the servo motor is fixedly connected to a gear, the upper end of the bottom plate is fitted with a rotating plate, a through hole is opened in the middle of the upper end of the rotating plate, the diameter of the through hole is larger than the diameter of the fixed table, a lifting ring is fixedly connected to the lower part of the inner cavity of the through hole, the side of the lifting ring away from the rotating plate is rotatably connected to the outer wall of the fixed table, a gear ring is fixedly connected to the upper part of the inner cavity of the through hole, the gear ring and the gear are meshed with each other, the upper end of the rotating plate is opened with a first ring groove and a second ring groove, the diameter of the second ring groove is larger than the diameter of the first ring groove, the second ring groove and the first ring groove A guide groove is provided between the two rings, which is centrally symmetrical about the center position of the fixed table. The inner cavity of the first annular groove is fixedly connected with a first arc block which is centrally symmetrical. The inner cavity of the second annular groove is fixedly connected with a second arc block which is centrally symmetrical. The lower ends of the first arc block and the second arc block are fixedly connected to the rotating plate. The first arc block is close to the connection between the guide groove and the first annular groove, and the second arc block is close to the connection between the guide groove and the second annular groove. The upper end of the first arc block is provided with a first inclined surface, and the end of the first inclined surface close to the guide groove is higher than the end away from the guide groove. The upper end of the second arc block is provided with a second inclined surface. The end of the second inclined surface close to the guide groove is higher than the end away from the guide groove, and the positioning mechanism includes a bracket, the lower end of the bracket is fixedly connected to the bottom plate, the middle part of the upper end of the bracket is fixedly connected to a fixing rod, the lower end of the fixing rod is slidably connected to a driving rod, the middle part of the lower end of the driving rod is vertically slidably connected to an adapter rod, the middle part of the end of the driving rod close to the bracket is fixedly connected to a protrusion, the lower part of the inner cavity of the fixing rod is horizontally slidably connected to a moving rod, the middle part of the moving rod close to the bracket is vertically slidably connected to a card block, and the top of the inner cavity of the moving rod is evenly provided with a plurality of card slots for matching with the card blocks.

2. The scanning electron microscope placement platform for adjusting the level of chip samples according to claim 1, characterized in that: A ball head is arranged between the upper end of the fixed table and the placement platform, and a No. 1 groove and a No. 2 groove are sequentially provided on the outer wall of the ball head, and the No. 1 groove and the No. 2 groove are perpendicular to each other, and the upper end of the No. 2 groove and the lower end of the No. 1 groove are slidably connected with a rotating plate, and a connecting rod is fixedly connected with the middle part of a side of the rotating plate away from the ball head, and one end of the connecting rod located above and away from the ball head is fixedly connected with the middle part of the lower end of the placement platform, and one end of the connecting rod located below and away from the ball head is fixedly connected with the middle part of the upper end of the fixed table.

3. The SEM placement platform for chip sample leveling according to claim 2, characterized in that: A negative pressure hole is opened in the middle of the upper end of the placement platform, and a flexible air pipe is fixedly connected to the side of the inner cavity side wall of the negative pressure hole away from the gear. The end of the flexible air pipe away from the negative pressure hole passes through the bottom of the placement platform and the upper end of the fixed platform and is connected to the air pump located in the inner cavity of the fixed platform.

4. The scanning electron microscope placement platform for adjusting the level of a chip sample according to claim 1, characterized in that: The upper end of the rotating plate is vertically slidably connected with a connecting ring, the outer wall of the rotating plate is fitted with a driven ring, the lower end of the driven ring is rotationally connected to the bottom plate, a symmetrical pushing block is fixedly connected to the lower end of the connecting ring close to the driven ring, the pushing block is vertically slidably connected to the rotating plate, there is a gap between the top of the inner cavity of the connecting ring and the upper end surface of the rotating plate, and a symmetrical driven block is fixedly connected to the top of the inner cavity of the driven ring.

5. The scanning electron microscope placement platform for adjusting the level of chip samples according to claim 4, characterized in that: A driven rod is fixedly connected to one side of the lower end of the driven ring, and a third ring groove is provided on the upper end of the base plate for cooperating with the driven rod, and one end of the driven rod away from the driven ring slidably cooperates with the third ring groove, and a plurality of symmetrical movable plates are slidably connected to the upper end of the base plate, and a traction rope is fixedly connected to the lower end of the placement platform around, and symmetrical rope holes are provided on the upper end of the fixed table, and one end of the traction rope away from the placement platform passes through the rope holes and is fixedly connected to the middle part of one end of the movable plate close to the fixed table, and a driving groove is provided on the side of the upper end of the movable plate away from the fixed table, and a symmetrical elastic telescopic rod is arranged on the upper end of the fixed table, and one end of the elastic telescopic rod away from the fixed table is in contact with the lower end surface of the placement platform.

6. The scanning electron microscope placement platform for adjusting the level of a chip sample according to claim 1, characterized in that: A display is fitted in the middle of the upper end of the workbench, a host is placed on the side of the display away from the shell, the shell and the host are electrically connected, and the host and the display are electrically connected.

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