Model conversion method and device and electronic equipment
By converting the 2D device geometry model into a hexahedral mesh suitable for 3D, the problems of long modeling time and high development cost are solved, and efficient construction and simulation of 3D device geometry model is achieved.
Patent Information
- Application Number
- CN202411115503.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-14
- Publication Date
- 2024-12-24
AI Technical Summary
When converting the existing 2D device geometry model into a 3D device geometry model, the modeling time is long and the development cost is high, so it is impossible to effectively simulate the device electrical characteristics under advanced processes.
By obtaining the 2D device geometric model, it is converted into a triangle mesh, and then converted into a quadrilateral mesh, and appropriately encrypting or deleting free data based on the mesh density detection results, it is finally converted into a suitable 3D device geometric model through a stretching tool. Hexahedral mesh.
It shortens the modeling time of 3D device geometric models, reduces development costs, and improves the accuracy of simulation results.
Smart Images
Figure CN119180924A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of computer technology, and in particular to a model conversion method, a model conversion device and an electronic device. Background Art
[0002] TCAD stands for Technology Computer Aided Design, which refers to semiconductor process simulation and device simulation tools. TCAD simulation software needs to input the geometric model of the device when performing device electrical simulation. The geometric model of the device is usually obtained with the help of the process simulation module in the TCAD simulation software. The geometric model of the semiconductor device is simulated by inputting the process steps and process conditions in the actual semiconductor production and manufacturing process. Since the 2D device geometric model cannot effectively simulate the electrical characteristics of the device under advanced processes, major EDA manufacturers have turned to developing 3D solvers for advanced processes in recent years. However, the original legacy 2D device geometric model is not suitable for 3D solvers. If the existing 2D device geometric model is abandoned and the 3D device geometric model is re-modeled, there will be problems such as long modeling time and high development cost. Summary of the invention
[0003] The purpose of the embodiments of the present invention is to provide a model conversion method, device and electronic device to solve the current problem of abandoning the 2D device geometry model and re-modeling the 3D geometry model, which has the defects of long modeling time and high development cost.
[0004] In order to achieve the above object, an embodiment of the present invention provides a model conversion method, including:
[0005] Obtain 2D device geometry model;
[0006] Converting the triangular mesh of the 2D device geometric model into a quadrilateral mesh based on a mesh type conversion tool, and determining a mesh density detection result of the quadrilateral mesh;
[0007] When the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirement, converting the quadrilateral mesh into a hexahedral mesh based on the mesh type conversion tool, and deleting free geometric data in the hexahedral mesh;
[0008] In response to the stretching parameter configuration instruction, the stretching parameters are obtained, and the hexahedral mesh is stretched into a 3D device geometric model based on the stretching parameters by a stretching tool.
[0009] Optionally, the method also includes: when the grid density detection result indicates that the grid density of the quadrilateral mesh does not meet the requirements, locally encrypting the interface area and / or carrier transport area of the triangular mesh of the 2D device geometric model by a mesh encryption tool until the grid density detection result indicates that the grid density of the quadrilateral mesh meets the requirements.
[0010] Optionally, deleting free geometric data in the hexahedral mesh includes:
[0011] The data set whose set name includes valid data keywords in the hexahedral grid is filtered out through the Python function library,
[0012] The data sets in the hexahedral grid are deleted except for the data sets whose set names include data valid keywords.
[0013] Optionally, the stretching parameters include a stretching length and a mesh granularity in a stretching direction, and the stretching of the hexahedral mesh into a 3D device geometric model based on the stretching parameters by a stretching tool includes:
[0014] The sweeping partitioning mode in the stretching tool is called to stretch the hexahedral mesh into a 3D device geometry model based on the stretching length and the mesh granularity in the stretching direction.
[0015] On the other hand, an embodiment of the present invention further provides a model conversion device, comprising:
[0016] A data acquisition module, used to acquire a 2D device geometry model;
[0017] A first conversion module, configured to convert the triangular mesh of the 2D device geometric model into a quadrilateral mesh based on a mesh type conversion tool, and determine a mesh density detection result of the quadrilateral mesh;
[0018] A second conversion module is used for converting the quadrilateral mesh into a hexahedral mesh based on the mesh type conversion tool when the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirement, and deleting free geometric data in the hexahedral mesh;
[0019] The stretching module is used to obtain the stretching parameters in response to the stretching parameter configuration instruction, and to stretch the hexahedral mesh into a 3D device geometric model based on the stretching parameters by a stretching tool.
[0020] Optionally, the device further comprises:
[0021] A mesh encryption module is used to locally encrypt the interface area and / or carrier transport area of the triangular mesh of the 2D device geometric model through a mesh encryption tool when the mesh density detection result indicates that the mesh density of the quadrilateral mesh does not meet the requirements, until the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirements.
[0022] Optionally, deleting free geometric data in the hexahedral mesh includes:
[0023] The data set whose set name includes valid data keywords in the hexahedral grid is filtered out through the Python function library,
[0024] The data sets in the hexahedral grid are deleted except for the data sets whose set names include data valid keywords.
[0025] Optionally, the stretching parameters include a stretching length and a mesh granularity in a stretching direction, and the stretching of the hexahedral mesh into a 3D device geometric model based on the stretching parameters by a stretching tool includes:
[0026] The sweeping partitioning mode in the stretching tool is called to stretch the hexahedral mesh into a 3D device geometry model based on the stretching length and the mesh granularity in the stretching direction.
[0027] On the other hand, the present invention also provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the above-mentioned model conversion method when executing the program.
[0028] On the other hand, the present invention also provides a machine-readable storage medium having a computer program stored thereon, and the computer program implements the above-mentioned model conversion method when executed by a processor.
[0029] Through the above technical solution, the triangular mesh of the original 2D device geometric model is converted into a quadrilateral mesh, and then the quadrilateral mesh is converted into a hexahedral mesh adapted to the 3D device geometric model, and then the hexahedral mesh is stretched into the 3D device geometric model. The present invention converts the 2D device geometric model into the 3D device geometric model, thereby shortening the modeling time of the 3D device geometric model in device simulation and reducing the development cost.
[0030] Other features and advantages of the embodiments of the present invention will be described in detail in the subsequent detailed description. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] The accompanying drawings are used to provide a further understanding of the embodiments of the present invention and constitute a part of the specification. Together with the following specific implementations, they are used to explain the embodiments of the present invention, but do not constitute a limitation on the embodiments of the present invention. In the accompanying drawings:
[0032] Figure 1 It is one of the flow diagrams of the model conversion method provided by the present invention;
[0033] Figure 2 This is the second flow chart of the model conversion method provided by the present invention;
[0034] Figure 3 is a schematic diagram of a triangular mesh of a 2D device geometric model after local encryption provided by the present invention;
[0035] Figure 4 It is a structural schematic diagram of the model conversion device provided by the present invention;
[0036] Figure 5 It is a structural schematic diagram of the electronic device provided by the present invention. DETAILED DESCRIPTION
[0037] The specific implementation of the embodiment of the present invention is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described here is only used to illustrate and explain the embodiment of the present invention, and is not used to limit the embodiment of the present invention.
[0038] Method Embodiment
[0039] Please refer to Figure 1 , an embodiment of the present invention proposes a model conversion method, including:
[0040] Step 100: Obtain a 2D device geometric model.
[0041] The electronic device obtains a 2D device geometry model obtained by a process simulation module in the TCAD simulation software. For example, a user inputs the process steps and process conditions in the actual semiconductor manufacturing process to simulate and obtain a 2D device geometry model. The 2D device geometry model may be an optoelectronic device, etc. The 2D device geometry model has a triangular mesh.
[0042] Step 300: converting the triangular mesh of the 2D device geometric model into a quadrilateral mesh based on a mesh type conversion tool, and determining a mesh density detection result of the quadrilateral mesh.
[0043] In one embodiment, the mesh type conversion tool of the embodiment of the present invention can use Sentaurus Mesh. The user can convert the triangular mesh of the 2D device geometric model into a quadrilateral mesh by selecting the mesh type conversion function provided by Sentaurus Mesh. In other embodiments, the mesh type conversion tool can also be Silvaco's Athena tool.
[0044] Users can convert the triangular mesh of the 2D device geometry model into a quadrilateral mesh by selecting the mesh type conversion function provided by Sentaurus Mesh. Since the mesh density requirements of the 3D device geometry model are different from those of the 2D device geometry model, if the density of the quadrilateral mesh directly converted by Sentaurus Mesh is insufficient, the mesh will deviate greatly from the original 2D device geometry model in the device simulation results. It should be noted that when using the mesh type conversion function provided by Sentaurus Mesh, Sentaurus Mesh will automatically output the mesh density detection results of the converted quadrilateral mesh. For example, if the mesh density of the quadrilateral mesh meets the requirements, Sentaurus Mesh will display that the mesh density of the converted quadrilateral mesh meets the requirements and the conversion is successful; otherwise, Sentaurus Mesh will display that the mesh density of the converted quadrilateral mesh does not meet the requirements and the conversion fails.
[0045] Step 500: When the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirement, the quadrilateral mesh is converted into a hexahedral mesh based on the mesh type conversion tool, and free geometric data in the hexahedral mesh is deleted.
[0046] Since the 3D device geometry model uses a hexahedral mesh, when the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirement, the quadrilateral mesh needs to be converted into a hexahedral mesh. In the embodiment of the present invention, the quadrilateral mesh of the 2D device geometry model can be converted into a hexahedral mesh by selecting the mesh type conversion function provided by Sentaurus Mesh.
[0047] In order to improve the quality of the converted 3D device geometric model, the free geometric data in the converted hexahedral mesh can be deleted. In some embodiments, the user uses the geometry cleaning function provided in the Sentaurus Mesh menu to clean up or delete the free geometric data (points, lines and surfaces), and the electronic device can delete the free geometric data in the hexahedral mesh in response to the user's operation on the free geometric data using the geometry cleaning function provided in the Sentaurus Mesh menu.
[0048] Step 700: In response to a stretching parameter configuration instruction, a stretching parameter is obtained, and the hexahedral mesh is stretched into a 3D device geometric model based on the stretching parameter by a stretching tool.
[0049] The stretching parameters in the embodiment of the present invention include the stretching length in the process of converting the 2D device geometric model into the 3D device geometric model and the mesh granularity in the stretching direction. The user can input the stretching parameter configuration instruction on the electronic device, and the electronic device responds to the stretching parameter configuration instruction to obtain the stretching length in the process of converting the 2D device geometric model into the 3D device geometric model and the mesh granularity in the stretching direction. The mesh granularity refers to the size and dimension of the mesh.
[0050] Electronic devices can use hexahedral meshes as 2D cross-sections and use the stretching function of Sentaurus Mesh to stretch the hexahedral meshes into 3D device geometry models based on the stretching length and mesh granularity in the stretching direction.
[0051] The embodiment of the present invention converts the triangular mesh of the original 2D device geometric model into a quadrilateral mesh, then converts the quadrilateral mesh into a hexahedral mesh adapted to the 3D device geometric model, and then stretches the hexahedral mesh into a 3D device geometric model. The present invention converts the 2D device geometric model into a 3D device geometric model, thereby shortening the modeling time of the 3D device geometric model in device simulation and reducing the development cost.
[0052] For other aspects of the embodiments of the present invention, please refer to Figure 2 , the model conversion method further comprises:
[0053] Step 400: When the mesh density detection result indicates that the mesh density of the quadrilateral mesh does not meet the requirement, locally encrypt the interface area and / or the carrier transport area of the triangular mesh of the 2D device geometric model by using a mesh encryption tool until the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirement.
[0054] If the density of the quadrilateral mesh directly converted by Sentaurus Mesh is insufficient, the mesh will have a large deviation from the original 2D device geometry model in the device simulation results. Therefore, when the mesh density detection result indicates that the mesh density of the quadrilateral mesh does not meet the requirements, the triangular mesh of the 2D device geometry model needs to be locally encrypted. For example, in an embodiment of the present invention, important areas of the triangular mesh of the 2D device geometry model, such as the interface area and / or the carrier transport area, can be locally encrypted until the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirements.
[0055] Specifically, the interface region in the triangular mesh of the 2D device geometry model can be locally encrypted, or the carrier transport region in the triangular mesh of the 2D device geometry model can be locally encrypted, or both the interface region and the carrier transport region can be locally encrypted. Figure 3 , Figure 3 It is a schematic diagram of the triangular mesh of the 2D device geometric model after local encryption provided by the present invention, wherein the darker color is the triangular mesh of the 2D device geometric model after local encryption. In order to improve the quality of the 3D device geometric model formed by the conversion, in an embodiment of the present invention, the user can click the mesh encryption command in Sentaurus Mesh to locally encrypt the interface area and carrier transport area of the triangular mesh of the 2D device geometric model, and the power equipment responds to the mesh encryption command to locally encrypt the interface area and carrier transport area of the triangular mesh of the 2D device geometric model. If the mesh density of the quadrilateral mesh after local encryption still does not meet the requirements, then continue to locally encrypt the interface area and carrier transport area of the triangular mesh of the 2D device geometric model until the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirements.
[0056] Among them, the interface region usually refers to the boundary between different materials or different physical properties. In semiconductor device simulation, the interface can refer to the contact between the semiconductor and the metal, insulator or other semiconductor. These interface regions play a key role in the transport of carriers (electrons and holes). The carrier transport region refers to the space in the semiconductor material where electrons and holes can move. In a triangular grid, these regions are usually divided into a series of triangular units. Each unit has its own physical properties, such as potential, electron concentration, hole concentration, etc., which affect the transport behavior of carriers in this area.
[0057] In other aspects of the embodiments of the present invention, the deleting of free geometric data in the hexahedral mesh includes: filtering out data sets in the hexahedral mesh whose set names include valid data keywords through a Python function library, and deleting data sets in the hexahedral mesh except the data sets whose set names include valid data keywords.
[0058] Specifically, for free geometric data in a hexahedral mesh, an embodiment of the present invention can use a Python script to remove useless free geometric data. For example, the h5py function library in the Python function library can be used to access all data sets in the [state] set under the [geometry] set to filter out data sets whose set names include data valid keywords. For example, the set name can be data valid keywords such as [DopingConcentration] and [Active]. It should be noted that the data set whose set name includes data valid keywords stores connected mesh data. Therefore, by deleting the data sets in the hexahedral mesh except for the data sets whose set names include data valid keywords, the free geometric data in the hexahedral mesh can be deleted, thereby improving the quality of the 3D device geometric model formed by the conversion. The embodiment of the present invention uses a Python script to filter out the free geometric data generated during the conversion process.
[0059] In other aspects of the embodiments of the present invention, the stretching parameters include the stretching length and the mesh granularity in the stretching direction. Step 700, stretching the hexahedral mesh into a 3D device geometric model based on the stretching parameters through a stretching tool, includes: calling the sweeping partitioning mode in the stretching tool, and stretching the hexahedral mesh into a 3D device geometric model based on the stretching length and the mesh granularity in the stretching direction.
[0060] Specifically, in the embodiment of the present invention, a script based on Sentaurus Mesh can be used to expand the hexahedral mesh belonging to the 2D device geometry model into a 3D device geometry model. The implementation process of the Sentaurus Mesh script is as follows: first, call the IO control module to set the input file (*.tdr) and the output file (*.tdr); then call the tool module (i.e., the stretching tool), set the sweeping mesh (SweepMesh) mode, use the hexahedral mesh as a 2D cross section, set the stretching length in the process of converting the 2D device geometry model to the 3D device geometry model, and the mesh granularity in the stretching direction, so as to achieve the stretching of the hexahedral mesh into a 3D device geometry model.
[0061] In one embodiment, the script for Sentaurus Mesh is as follows:
[0062]
[0063] In summary, the embodiments of the present invention shorten the modeling time of the 3D device geometry model in device simulation and reduce the development cost by stretching the 2D device geometry model of the original TCAD simulation software into a 3D device geometry model without abandoning the 2D device geometry model.
[0064] Device Embodiment
[0065] Please refer to Figure 4 On the other hand, an embodiment of the present invention further provides a model conversion device, comprising:
[0066] A data acquisition module 401 is used to acquire a 2D device geometric model;
[0067] A first conversion module 402 is used to convert the triangular mesh of the 2D device geometric model into a quadrilateral mesh based on a mesh type conversion tool, and determine a mesh density detection result of the quadrilateral mesh;
[0068] A second conversion module 403 is used to convert the quadrilateral mesh into a hexahedral mesh based on the mesh type conversion tool when the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirement, and delete free geometric data in the hexahedral mesh;
[0069] The stretching module 404 is used to obtain stretching parameters in response to the stretching parameter configuration instruction, and to stretch the hexahedral mesh into a 3D device geometric model based on the stretching parameters by a stretching tool.
[0070] Optionally, the device further comprises:
[0071] A mesh encryption module is used to locally encrypt the interface area and / or carrier transport area of the triangular mesh of the 2D device geometric model through a mesh encryption tool when the mesh density detection result indicates that the mesh density of the quadrilateral mesh does not meet the requirements, until the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirements.
[0072] Optionally, deleting free geometric data in the hexahedral mesh includes:
[0073] The data set whose set name includes valid data keywords in the hexahedral grid is filtered out through the Python function library,
[0074] The data sets in the hexahedral grid are deleted except for the data sets whose set names include data valid keywords.
[0075] Optionally, the stretching parameters include a stretching length and a mesh granularity in a stretching direction, and the stretching of the hexahedral mesh into a 3D device geometric model based on the stretching parameters by a stretching tool includes:
[0076] The sweeping partitioning mode in the stretching tool is called to stretch the hexahedral mesh into a 3D device geometry model based on the stretching length and the mesh granularity in the stretching direction.
[0077] The model conversion device includes a processor and a memory. The data acquisition module 401, the first conversion module 402, the second conversion module 403 and the stretching module 404 are all stored in the memory as program units, and the processor executes the program units stored in the memory to realize corresponding functions.
[0078] The processor includes a kernel, which calls the corresponding program unit from the memory. There can be one or more kernels.
[0079] The memory may include non-permanent memory in a computer-readable medium, random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM, and the memory includes at least one memory chip.
[0080] Figure 5 An example of a physical structure diagram of an electronic device is shown in FIG. Figure 5 As shown, the electronic device may include: a processor 510, a communication interface 520, a memory 530 and a communication bus 540, wherein the processor 510, the communication interface 520 and the memory 530 communicate with each other through the communication bus 540. The processor 510 may call the logic instructions in the memory 530 to execute the model conversion method, which includes: obtaining a 2D device geometric model; converting the triangular mesh of the 2D device geometric model into a quadrilateral mesh based on a mesh type conversion tool, and determining a mesh density detection result for the quadrilateral mesh; when the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirement, converting the quadrilateral mesh into a hexahedral mesh based on the mesh type conversion tool, and deleting the free geometric data in the hexahedral mesh; in response to the stretching parameter configuration instruction, obtaining the stretching parameter, and stretching the hexahedral mesh into a 3D device geometric model based on the stretching parameter by the stretching tool.
[0081] In addition, the logic instructions in the above-mentioned memory 530 can be implemented in the form of a software functional unit and can be stored in a computer-readable storage medium when it is sold or used as an independent product. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art or the part of the technical solution, can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk, etc. Various media that can store program codes.
[0082] On the other hand, the present invention also provides a machine-readable storage medium having a computer program stored thereon, which is implemented when the processor executes a model conversion method, the method comprising: obtaining a 2D device geometric model; converting the triangular mesh of the 2D device geometric model into a quadrilateral mesh based on a mesh type conversion tool, and determining a mesh density detection result for the quadrilateral mesh; when the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirements, converting the quadrilateral mesh into a hexahedral mesh based on the mesh type conversion tool, and deleting free geometric data in the hexahedral mesh; in response to a stretching parameter configuration instruction, obtaining stretching parameters, and stretching the hexahedral mesh into a 3D device geometric model based on the stretching parameters through a stretching tool.
[0083] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Those of ordinary skill in the art may understand and implement it without creative work.
[0084] Through the description of the above implementation methods, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a necessary general hardware platform, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solution is essentially or the part that contributes to the prior art can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a disk, an optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.
[0085] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims
1. A model conversion method, characterized in that: include: Obtain 2D device geometry model; Converting the triangular mesh of the 2D device geometric model into a quadrilateral mesh based on a mesh type conversion tool, and determining a mesh density detection result of the quadrilateral mesh; When the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirement, converting the quadrilateral mesh into a hexahedral mesh based on the mesh type conversion tool, and deleting free geometric data in the hexahedral mesh; In response to the stretching parameter configuration instruction, the stretching parameters are obtained, and the hexahedral mesh is stretched into a 3D device geometric model based on the stretching parameters by a stretching tool.
2. The model conversion method according to claim 1, characterized in that: The method also includes: when the mesh density detection result indicates that the mesh density of the quadrilateral mesh does not meet the requirement, locally encrypting the interface area and / or the carrier transport area of the triangular mesh of the 2D device geometric model by a mesh encryption tool until the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirement.
3. The model conversion method according to claim 1, characterized in that: The deleting of free geometric data in the hexahedral mesh includes: The data set whose set name includes valid data keywords in the hexahedral grid is filtered out through the Python function library, The data sets in the hexahedral grid are deleted except for the data sets whose set names include data valid keywords.
4. The model conversion method according to claim 1, characterized in that: The stretching parameters include a stretching length and a mesh granularity in a stretching direction, and the stretching tool is used to stretch the hexahedral mesh into a 3D device geometric model based on the stretching parameters, including: The sweeping partitioning mode in the stretching tool is called to stretch the hexahedral mesh into a 3D device geometry model based on the stretching length and the mesh granularity in the stretching direction.
5. A model conversion device, characterized in that: include: A data acquisition module, used to acquire a 2D device geometry model; A first conversion module, configured to convert the triangular mesh of the 2D device geometric model into a quadrilateral mesh based on a mesh type conversion tool, and determine a mesh density detection result of the quadrilateral mesh; A second conversion module is used for converting the quadrilateral mesh into a hexahedral mesh based on the mesh type conversion tool when the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirement, and deleting free geometric data in the hexahedral mesh; The stretching module is used to obtain the stretching parameters in response to the stretching parameter configuration instruction, and to stretch the hexahedral mesh into a 3D device geometric model based on the stretching parameters by a stretching tool.
6. The model conversion device according to claim 5, characterized in that: The device also includes: A mesh encryption module is used to locally encrypt the interface area and / or carrier transport area of the triangular mesh of the 2D device geometric model through a mesh encryption tool when the mesh density detection result indicates that the mesh density of the quadrilateral mesh does not meet the requirements, until the mesh density detection result indicates that the mesh density of the quadrilateral mesh meets the requirements.
7. The model conversion device according to claim 5, characterized in that: The deleting of free geometric data in the hexahedral mesh includes: The data set whose set name includes valid data keywords in the hexahedral grid is filtered out through the Python function library, The data sets in the hexahedral grid are deleted except for the data sets whose set names include data valid keywords.
8. The model conversion device according to claim 5, characterized in that: The stretching parameters include a stretching length and a mesh granularity in a stretching direction, and the stretching tool is used to stretch the hexahedral mesh into a 3D device geometric model based on the stretching parameters, including: The sweeping partitioning mode in the stretching tool is called to stretch the hexahedral mesh into a 3D device geometry model based on the stretching length and the mesh granularity in the stretching direction.
9. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein: When the processor executes the program, the model conversion method according to any one of claims 1 to 4 is implemented.
10. A machine-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the model conversion method according to any one of claims 1 to 4 is implemented.