An OLED substrate evaporation device

Abstract

The invention discloses an OLED substrate evaporation device, which relates to the technical field of display component manufacturing, and comprises an evaporation source, a supporting frame fixedly connected to the inner wall of an evaporation machine, a mask plate installed on the supporting frame, and a substrate body arranged on the mask plate; a connecting sleeve is fixedly installed around and in the central area of ​​the mask plate, a supporting foot is arranged inside the connecting sleeve, and a mounting shaft is installed inside the supporting foot, wherein a suction cup unit is arranged inside the mounting shaft, a circular disc rack is installed at one end of the mounting shaft, an electric magnetic plate is fixedly installed at the bottom of the connecting sleeve, and the surface of the circular disc rack close to the electric magnetic plate is a magnetic surface. The OLED substrate evaporation device controls the mounting shaft and the suction cup unit therein to adjust their positions through the magnetic relationship between the electric magnetic plate and the magnetic surface of the circular disc rack, thereby controlling the substrate body to adjust its position accordingly, so as to achieve the purpose of automatically adjusting the distance between the substrate body and the mask plate.

Description

Technical Field

[0001] The invention relates to the technical field of display component manufacturing, in particular to an OLED substrate evaporation device. Background Art

[0002] OLED substrate evaporation refers to the process of evaporating organic materials by heating in a vacuum environment and depositing them on the substrate to form a thin film. This process is a key link in the manufacture of OLED displays and directly affects the performance and quality of the display. First, the substrate needs to be cleaned and dried to remove dirt and impurities on the surface, and then a specific method (such as plasma treatment) is used to improve the performance of the substrate surface. The organic material is placed in the evaporation source and heated to an appropriate temperature to evaporate it. A precision metal mask (FMM) is used to ensure that the organic material is only deposited in a specific position to form the required pattern. The evaporated organic material molecular beam passes through the holes of the mask and is deposited on the substrate to form a thin film. Through multiple evaporation processes, multiple layers (such as hole injection layer, hole transport layer, light-emitting layer, electron transport layer, etc.) can be deposited in sequence to build a complete OLED structure.

[0003] After the substrate is processed, it is placed on the supporting feet using a robot. When the holes on the mask plate (for the organic material molecular beam to pass through) are precisely aligned with the pixel positions on the substrate, the evaporation source is heated. In the actual operation process, the distance between the mask plate and the substrate is a crucial parameter, which directly affects the deposition rate, uniformity and quality of the final product of the evaporated material. In order to ensure the stability of the substrate, the supporting feet used to support the substrate are usually fixed. However, during the evaporation process, different organic materials have different evaporation characteristics and deposition behaviors. For example, some materials may have a faster evaporation rate and a wider diffusion range, while other materials may be the opposite. In order to ensure the evaporation quality of the substrate, the staff often needs to adjust the distance between the substrate and the mask plate, that is, adjust the position of the supporting feet. The evaporation equipment needs to maintain a vacuum state, and then corresponding vacuum treatment needs to be performed after each adjustment, which affects the evaporation efficiency. For this reason, we propose an OLED substrate evaporation equipment. Summary of the invention

[0004] The object of the present invention is to provide an OLED substrate evaporation device to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an OLED substrate evaporation device, comprising an evaporation source fixedly installed inside the evaporation machine, a support frame fixedly connected to the inner wall of the evaporation machine, a mask plate located above the evaporation source installed on the support frame, and a substrate body arranged on the mask plate; a connecting sleeve is fixedly installed around and in the center of the mask plate, and a supporting foot is arranged inside the connecting sleeve, and one end of the supporting foot passes through the inner wall at the top of the connecting sleeve and extends to the outside, a plurality of supporting foot ends are used to support the substrate body, and a mounting shaft body slidably connected to the inner wall of the supporting foot is installed inside the supporting foot, wherein a suction cup unit is arranged inside the mounting shaft body, and the end of the suction cup unit is located inside the supporting foot and in contact with the surface of the substrate body; a circular disc rack is fixedly installed at one end of the mounting shaft body located inside the connecting sleeve, and an electric magnetic plate is fixedly installed on the inner wall at the bottom of the connecting sleeve, the electric magnetic plate is located below the circular disc rack, and the surface of the circular disc rack close to the electric magnetic plate is a magnetic surface;

[0006] A magnetic shaft is arranged inside each connecting sleeve around the mask plate, and the magnetic shaft is fixedly connected to the bottom of the circular disk frame. A transverse frame is fixedly installed at the bottom of each connecting sleeve around the mask plate, and a connecting outer frame is fixedly installed on the transverse frame, and the connecting outer frame is fixedly connected to the supporting frame, and the magnetic shaft can move into the inside of the transverse frame.

[0007] Preferably, a meshing gear is provided inside the transverse frame, and a transmission shaft body rotatably connected to the inner wall of the transverse frame is installed on the meshing gear, and the end of the transmission shaft body passes through the inner wall of the transverse frame and extends to the inside of the connecting outer frame, wherein a meshing tooth row slidably connected to the inner wall of the transverse frame is installed inside the transverse frame, wherein the meshing tooth row and the meshing gear are in a meshing state, and a driving shaft body is fixedly installed on the end of the meshing tooth row, and the end of the driving shaft body is a magnetic end and is located on the motion trajectory of the magnetic shaft body, and the magnetic shaft body generates an attractive force on the end of the driving shaft body located on the motion trajectory, wherein a reset spring is connected between the meshing tooth row and the inner wall of the transverse frame.

[0008] Preferably, an annular panel is fixedly mounted on the supporting foot, and the annular panel is located inside the connecting sleeve, and a rotating panel rotatably connected to the outer wall of the supporting foot is arranged below the annular panel, and a torsion spring is connected between the annular panel and the rotating panel, and sliding shafts are symmetrically mounted on the rotating panel and the outer wall of the circular disc rack, and a vertical sliding groove and a horizontal sliding groove are arranged on the inner wall of the connecting sleeve, the sliding shaft on the rotating panel can slide in the vertical sliding groove and the horizontal sliding groove, and the sliding shaft on the circular disc rack can only slide in the vertical sliding groove.

[0009] Preferably, the rotating panel is located above the circular disk rack, and plate magnets are symmetrically arranged on the side of the rotating panel close to the circular disk rack, and a columnar electromagnetic group is symmetrically installed on the side of the circular disk rack close to the rotating panel, wherein the plate magnet is located on the motion trajectory of the columnar electromagnetic group, and when the columnar electromagnetic group is energized, an attractive force is generated on the plate magnet on the motion trajectory.

[0010] Preferably, one end of the support leg used to support the substrate body is arranged in an arc shape, and a protrusion is arranged at the arc-shaped end of the support leg, and the protrusion is used to act on the end of the suction cup unit so that the end of the suction cup unit is tightly fitted with the surface of the substrate body.

[0011] Preferably, a constant force spring is connected between the circular disc rack and the bottom of the connecting sleeve.

[0012] Preferably, a worm is fixedly mounted on one end of the transmission shaft body located inside the connecting outer frame, and a worm wheel meshing with the worm is arranged inside the connecting outer frame, wherein a limiting sleeve is symmetrically installed on the outer wall of the connecting outer frame, wherein a rotating shaft body is fixedly mounted on the worm wheel, and the end of the rotating shaft body passes through the connecting outer frame and the inner wall of the limiting sleeve in sequence and extends to the outside, and a pressure plate is also arranged on the outside of the connecting outer frame, and the pressure plate and the rotating shaft body are fixedly connected by a connecting part.

[0013] Preferably, a damping rubber is fixedly mounted on the outer wall of the limiting sleeve, and a fixed disc rack is fixedly mounted on the rotating shaft, and a rubber shaft is fixedly mounted on the fixed disc rack, and the damping rubber is located on the movement track of the rubber shaft.

[0014] Preferably, a shielding sleeve is fixedly mounted on the inner wall of the bottom of each connecting sleeve around the mask plate, the end of the magnetic shaft enters into the transverse frame through the shielding sleeve, and the electrical magnetic plate is sleeved on the outside of the shielding sleeve.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] The present invention uses the magnetic relationship between the electric magnetic plate and the magnetic surface of the circular disk rack to make the circular disk rack control the installation shaft body and the suction cup unit inside it to adjust the position, thereby controlling the substrate body to make corresponding position adjustment, so as to achieve the purpose of automatically adjusting the distance between the substrate body and the mask plate, and adopts a method of increasing the contact area between the suction cup unit and the substrate body, so that the fixing range of the suction cup unit to the substrate body is increased, and the protrusion can be used to ensure that there is no gap in the area where the suction cup unit contacts the surface of the substrate body, thereby avoiding air leakage;

[0017] The present invention utilizes the magnetic relationship between the magnetic shaft and the driving shaft to make the meshing gear row mesh with the meshing gear, and under the action of the transmission shaft, the worm is meshed with the worm wheel, so that the worm wheel drives the rotating shaft to rotate, and under the action of the connecting part, the pressure plate can be adjusted at a corresponding angle, that is, the pressure plate acts on the substrate body, so that the pressure plate and the mask plate are closely fitted, thereby reducing display crosstalk and color deviation between adjacent sub-pixels. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 It is a front schematic diagram of the internal structure of the vapor deposition machine of the present invention;

[0020] Figure 3 This is a schematic diagram of the structure of the evaporation source, mask plate and substrate body of the present invention;

[0021] Figure 4 This is a schematic diagram of the support frame and mask plate structure of the present invention;

[0022] Figure 5 It is a schematic diagram of the structure of the substrate body and the mask plate of the present invention;

[0023] Figure 6 This is a schematic diagram of the internal structure of the connecting sleeve of the present invention;

[0024] Figure 7 This is a schematic diagram of the supporting foot structure of the present invention;

[0025] Figure 8 This is a schematic diagram of the separation of the rotating panel and the supporting foot structure of the present invention;

[0026] Fig. 9 This is a schematic diagram of the shaft structure installed in the present invention;

[0027] Fig.10 It is a schematic diagram of the local internal structure of the connecting sleeve of the present invention;

[0028] Fig.11 This is a schematic diagram of the structure in which the mask plate and the substrate body are closely fitted together according to the present invention;

[0029] Fig.12 It is a schematic diagram of the internal structure of the transverse frame and the connecting sleeve of the present invention;

[0030] Fig.13 It is a schematic diagram of the internal structure of the transverse frame and the connecting outer frame of the present invention;

[0031] Fig.14 This is a schematic diagram of the structure of the pressing plate and the connecting part of the present invention;

[0032] Fig.15For the present invention Fig.14 A magnified schematic diagram of the structure of the area at point A in the middle.

[0033] In the figure: 1-evaporation machine; 2-evaporation source; 3-support frame; 4-mask plate; 5-substrate body; 6-connecting sleeve; 61-support foot; 611-annular panel; 612-rotating panel; 613-torsion spring; 614-sliding shaft; 615-plate magnet; 616-protrusion; 62-installation shaft; 621-circular plate rack; 622-columnar electromagnetic group; 63-suction cup unit; 64-electric magnetic plate; 65-vertical slide groove; 6 6-transverse slide groove; 67-constant force spring; 68-magnetic shaft; 69-shielding sleeve; 7-transverse frame; 71-meshing gear; 72-transmission shaft; 721-worm; 73-meshing gear row; 74-driving shaft; 75-reset spring; 8-connecting outer frame; 81-worm wheel; 82-limiting sleeve; 821-damping rubber; 83-rotating shaft; 84-pressure plate; 85-connecting part; 86-fixed disc rack; 861-rubber shaft. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] See also Figure 1-15 The present invention provides a technical solution: an OLED substrate evaporation device. The present invention makes corresponding improvements to the technical problems in the background technology, including an evaporation source 2 fixedly installed inside an evaporation machine 1, a support frame 3 fixedly connected to the inner wall of the evaporation machine 1, and a mask plate 4 located above the evaporation source 2 is installed on the support frame 3, and a substrate body 5 is arranged on the mask plate 4; a connecting sleeve 6 is fixedly installed around and in the central area of ​​the mask plate 4, and a supporting foot 61 is arranged inside the connecting sleeve 6, and one end of the supporting foot 61 passes through the inner wall of the top of the connecting sleeve 6 and extends to the outside, and the ends of the multiple supporting feet 61 are used to support the substrate body 5, combined with the attached Figure 5 and attached Figure 7 As shown, one end of the support foot 61 used for supporting the substrate body 5 is arranged in an arc shape. This design can effectively increase the contact area with the substrate body 5, thereby playing a role in stabilizing the substrate body 5, and a mounting shaft 62 is installed inside the support foot 61 and is slidably connected to the inner wall thereof, wherein a suction cup unit 63 is arranged inside the mounting shaft 62, and the end of the suction cup unit 63 is located inside the support foot 61 and is in contact with the surface of the substrate body 5; Figure 6 and attached Figure 7As shown, the end of the suction cup unit 63 is located inside the end of the support foot 61, and the suction cup unit 63 is connected to the support foot 61. Figure 8 As shown, a protrusion 616 is provided at one end of the arc-shaped supporting foot 61, and the protrusion 616 acts on the end of the suction cup unit 63, so that the end of the suction cup unit 63 is closely fitted with the surface of the substrate body 5, and a circular disc frame 621 is fixedly installed at one end of the mounting shaft 62 located inside the connecting sleeve 6, and an electric magnetic plate 64 is fixedly installed on the inner wall of the bottom of the connecting sleeve 6, and the electric magnetic plate 64 is located below the circular disc frame 621, and the surface of the circular disc frame 621 close to the electric magnetic plate 64 is a magnetic surface. It should be noted that the magnetic pole of the electric magnetic plate 64 can be changed by adjusting the direction of the coil current, and a constant force spring 67 is connected between the circular disc frame 621 and the bottom of the connecting sleeve 6;

[0036] An annular panel 611 is fixedly mounted on the support foot 61, and the annular panel 611 is located inside the connecting sleeve 6, and a rotating panel 612 is arranged below the annular panel 611 and is rotatably connected to the outer wall of the support foot 61, and a torsion spring 613 is connected between the annular panel 611 and the rotating panel 612, and sliding shafts 614 are symmetrically mounted on the outer walls of the rotating panel 612 and the circular rack 621, and a vertical slide groove 65 and a horizontal slide groove 66 are arranged on the inner wall of the connecting sleeve 6, the sliding shaft 614 on the rotating panel 612 can slide in the vertical slide groove 65 and the horizontal slide groove 66, and the sliding shaft 614 on the circular rack 621 can only slide in the vertical slide groove 65. In the initial state, the sliding shaft 614 on the rotating panel 612 is located in the horizontal sliding groove 66, and the supporting foot 61 is in a fixed state. Then, the substrate body 5 is placed on the supporting foot 61 and is in a stable state. The rotating panel 612 is located above the circular disk rack 621, and plate magnets 615 are symmetrically arranged on one side of the rotating panel 612 close to the circular disk rack 621, and columnar electromagnetic groups 622 are symmetrically installed on one side of the circular disk rack 621 close to the rotating panel 612, wherein the plate magnets 615 are located on the motion trajectory of the columnar electromagnetic group 622, and the columnar electromagnetic group 622 is energized to generate an attractive force on the plate magnets 615 on the motion trajectory.

[0037] Combined with Figure 1 and attached Figure 2 As shown, a manipulator (not shown) is used to place the substrate body 5 on the supporting feet 61 and above the mask plate 4. The evaporation source 2 heats the organic material, so that the evaporated organic material molecular beam passes through the holes of the mask plate 4 and is deposited on the substrate body 5 to form a thin film. Through multiple evaporation processes, multiple layers such as a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, etc. can be deposited in sequence to construct a complete OLED structure;

[0038] Combined with Figure 3-5As shown, the manipulator places the substrate body 5 on the supporting foot 61. At this time, the end of the supporting foot 61 contacts the surface of the substrate body 5, and the suction cup unit 63 also contacts the surface of the substrate body 5. At this time, the substrate body 5 is in the highest position. In order to ensure the stability of the substrate body 5 when it is fixed, the present invention adopts a method of increasing the contact area between the suction cup unit 63 and the substrate body 5, so that the fixing range of the suction cup unit 63 on the substrate body 5 is increased, and the protrusion 616 can be used to ensure that there is no gap in the area where the suction cup unit 63 contacts the surface of the substrate body 5, thereby avoiding air leakage;

[0039] Combined with Figure 6-10 As shown, in the specific use process, the robot grasps the substrate body 5 and places it on the supporting foot 61, and then the electric magnetic plate 64 is energized to generate a repulsive force on the magnetic surface of the circular disk rack 621, and the columnar electromagnetic group 622 on the circular disk rack 621 is also energized. The circular disk rack 621 is subjected to the repulsive force of the electric magnetic plate 64 so that the mounting shaft 62 drives the suction cup unit 63 to move upward. Since the suction cup unit 63 is in contact with the surface of the substrate body 5 and is located inside the supporting foot 61, the suction cup unit 63 is moved upward. When the suction cup unit 63 moves upward, the end of the suction cup unit 63 is forced to expand outward, and the protrusion 616 at the end of the support foot 61 limits the expanded suction cup unit 63, so that the suction cup unit 63 is closely fitted with the surface of the substrate body 5. When the mounting shaft 62 moves upward with the circular disk frame 621, the columnar electromagnetic group 622 on it moves to the plate-shaped magnet 615 and generates an attraction force on the plate-shaped magnet 615, and the plate-shaped magnet 615 drives the rotating panel 61 2 moves, that is, the sliding shaft 614 on the rotating panel 612 moves from the horizontal slide groove 66 to the vertical slide groove 65, and the torsion spring 613 is deformed at this time; then the staff can adjust the position of the substrate body 5 to adapt to the evaporation conditions under different conditions. In the process of adjusting the position of the substrate body 5, the coil current direction of the electric magnetic plate 64 is changed to change the magnetic pole of the electric magnetic plate 64, so that the electric magnetic plate 64 is energized to generate an attractive force on the magnetic surface of the circular disk rack 621, that is, the circular disk rack 621 drives the mounting shaft 62 to descend, and the substrate body 5 will descend under the action of the suction cup unit 63, and the supporting foot 61 will synchronously descend under the action of the substrate body 5. The circular disk rack 621 will compress the constant force spring 67 during the descent process. After the substrate body 5 is adjusted to a suitable position, the staff stabilizes the current of the electric magnetic plate 64 so that the substrate body 5 is fixed at this position;

[0040] In actual use, in some OLED substrate evaporation processes, in order to ensure the accuracy of the evaporation pattern and the uniform deposition of organic materials, the mask plate 4 needs to be closely fitted to the substrate body 5. This can effectively avoid the "shadow" phenomenon that occurs during the evaporation process, that is, the area of ​​the organic material evaporated on the substrate is larger than the opening area of ​​the mask plate 4, thereby reducing the display crosstalk and color shift between adjacent sub-pixels. However, in some cases (for example, when the substrate body 5 is large in size or complex in shape), due to technical limitations or equipment characteristics, the mask plate 4 may not be able to achieve a completely close fit with the substrate body 5. In view of this, the present invention is carried out in the following way: The following design: a magnetic shaft 68 is provided inside each connecting sleeve 6 around the mask plate 4, and the magnetic shaft 68 is fixedly connected to the bottom of the circular disk frame 621, a transverse frame 7 is fixedly installed on the bottom of each connecting sleeve 6 around the mask plate 4, and a connecting outer frame 8 is fixedly installed on the transverse frame 7, and the connecting outer frame 8 is fixedly connected to the supporting frame 3, the magnetic shaft 68 can move to the inside of the transverse frame 7, and a shielding sleeve 69 is also fixedly installed on the inner wall of the bottom of each connecting sleeve 6 around the mask plate 4, the end of the magnetic shaft 68 enters into the inside of the transverse frame 7 through the shielding sleeve 69, and the electric magnetic plate 64 is sleeved on the outside of the shielding sleeve 69.

[0041] Combined with Fig.12As shown, it is mentioned above that in some evaporation processes, the mask plate 4 needs to be tightly fitted with the substrate body 5, and then the circular disc rack 621 needs to be lowered to the lowest point. When the circular disc rack 621 drops to the lowest point, the end of the magnetic shaft 68 will enter the inside of the transverse frame 7 through the shielding sleeve 69 to avoid the electrical magnetic plate 64 from interfering with the magnetic shaft 68; a meshing gear 71 is arranged inside the transverse frame 7, and a transmission shaft 72 rotatably connected to the inner wall of the transverse frame 7 is installed on the meshing gear 71, and the end of the transmission shaft 72 passes through the inner wall of the transverse frame 7 and extends to the inside of the connecting outer frame 8, wherein a meshing tooth row 73 slidably connected to the inner wall of the transverse frame 7 is installed inside the transverse frame 7, wherein the meshing tooth row 73 is in meshing state with the meshing gear 71, and a driving shaft 74 is fixedly installed at the end of the meshing tooth row 73, and the end of the driving shaft 74 is a magnetic end and is located on the movement trajectory of the magnetic shaft 68. The magnetic shaft 68 is located The end of the driving shaft 74 on the motion trajectory generates an attractive force, wherein a return spring 75 is connected between the meshing tooth row 73 and the inner wall of the transverse frame 7, and a worm 721 is fixedly installed at one end of the transmission shaft 72 located inside the connecting outer frame 8, and a worm wheel 81 meshing with the worm 721 is arranged inside the connecting outer frame 8, wherein a limiting sleeve 82 is symmetrically installed on the outer wall of the connecting outer frame 8, wherein a rotating shaft 83 is fixedly installed on the worm wheel 81, and the ends of the rotating shaft 83 successively penetrate the connecting outer frame 8 and the inner walls of the limiting sleeve 82 and extend to the outside, and a pressing plate 84 is also arranged on the outside of the connecting outer frame 8, and the pressing plate 84 is fixedly connected to the rotating shaft 83 through a connecting portion 85, a damping rubber 821 is fixedly installed on the outer wall of the limiting sleeve 82, and a fixed disc frame 86 is fixedly installed on the rotating shaft 83, and a rubber shaft 861 is fixedly installed on the fixed disc frame 86, and the damping rubber 821 is located on the motion trajectory of the rubber shaft 861.

[0042] Combined with Figure 3 and attached Figure 4 As shown, under normal circumstances, the mask plate 4 and the substrate body 5 are not attached to each other. Figure 3 and attached Figure 4 As shown in FIG. 1 , the position adjustment of the substrate body 5 will not be affected. When the substrate body 5 is tightly combined with the mask plate 4, the pressing plate 84 is as shown in FIG. Fig.11As shown, in the specific operation process, when the magnetic shaft 68 enters the interior of the transverse frame 7, the magnetic end of the end of the driving shaft 74 will be subjected to the attraction force of the magnetic shaft 68, that is, the driving shaft 74 drives the meshing gear row 73 to move in a directional manner in the transverse frame 7. During the movement, the meshing gear row 73 compresses the reset spring 75 and meshes with the meshing gear 71 during the movement, so that the meshing gear 71 drives the transmission shaft 72 to rotate. During the rotation of the transmission shaft 72, the worm 721 connected to its end will mesh with the worm wheel 81, and the worm wheel 81 is subjected to the force to drive the rotating shaft 83 to rotate. The rotating shaft 83 causes the pressing plate 84 to act on the upper surface of the substrate body 5 under the action of the connecting portion 85. Through multiple pressing plates 84, the substrate body 5 can be closely fitted with the mask plate 4. Fig.14 and attached Fig.15 As shown, when the pressure plate 84 is about to contact the surface of the substrate body 5, the rubber shaft 861 on the fixed disc frame 86 (on the rotating shaft 83) will contact the damping rubber 821 on the outer wall of the limiting sleeve 82, and the two will contact and deform to achieve a damping effect, thereby preventing the pressure plate 84 from applying excessive force to the surface of the substrate body 5 during rapid angle adjustment. At the same time, a buffer rubber pad is also installed at the contact point between the pressure plate 84 and the surface of the substrate body 5, thereby preventing the substrate body 5 from being deformed when being fixed by the pressure plate 84 body.

[0043] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0044] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An OLED substrate evaporation device, characterized in that: The invention comprises an evaporation source (2) fixedly installed inside an evaporation deposition machine (1), a support frame (3) fixedly connected to the inner wall of the evaporation deposition machine (1), a mask plate (4) located above the evaporation source (2) being installed on the support frame (3), and a substrate body (5) being arranged on the mask plate (4); a connecting sleeve (6) being fixedly installed around the periphery and the central area of ​​the mask plate (4), and a supporting foot (61) being arranged inside the connecting sleeve (6), and one end of the supporting foot (61) passing through the inner wall of the top of the connecting sleeve (6) and extending to the outside, and the ends of the plurality of supporting feet (61) being used to support the substrate body (5), and A mounting shaft (62) is installed inside the supporting foot (61) and is slidably connected to the inner wall thereof, wherein a suction cup unit (63) is arranged inside the mounting shaft (62), and the end of the suction cup unit (63) is located inside the supporting foot (61) and in contact with the surface of the substrate body (5); a circular disc frame (621) is fixedly installed on one end of the mounting shaft (62) located inside the connecting sleeve (6), and an electric magnetic plate (64) is fixedly installed on the inner wall of the bottom of the connecting sleeve (6), the electric magnetic plate (64) is located below the circular disc frame (621), and the surface of the circular disc frame (621) close to the electric magnetic plate (64) is a magnetic surface; A magnetic shaft (68) is arranged inside each connecting sleeve (6) around the mask plate (4), and the magnetic shaft (68) is fixedly connected to the bottom of the circular disk frame (621). A transverse frame (7) is fixedly installed at the bottom of each connecting sleeve (6) around the mask plate (4), and a connecting outer frame (8) is fixedly installed on the transverse frame (7), and the connecting outer frame (8) is fixedly connected to the support frame (3). The magnetic shaft (68) can move into the transverse frame (7), and a meshing gear (71) is arranged inside the transverse frame (7), and a transmission shaft (72) rotatably connected to the inner wall of the transverse frame (7) is installed on the meshing gear (71). The end of the transmission shaft (72) passes through the inner wall of the transverse frame (7) and extends to the inside of the connecting outer frame (8), wherein a meshing tooth row (73) slidably connected to the inner wall of the transverse frame (7) is installed inside the transverse frame (7), wherein the meshing tooth row (73) and the meshing gear (71) are in a meshing state, and a driving shaft (74) is fixedly installed at the end of the meshing tooth row (73), and the end of the driving shaft (74) is a magnetic end and is located on the motion trajectory of the magnetic shaft (68), and the magnetic shaft (68) generates an attractive force on the end of the driving shaft (74) located on the motion trajectory, wherein a reset spring (75) is connected between the meshing tooth row (73) and the inner wall of the transverse frame (7).

2. The OLED substrate evaporation device according to claim 1, characterized in that: An annular panel (611) is fixedly mounted on the support foot (61), and the annular panel (611) is located inside the connecting sleeve (6), and a rotating panel (612) rotatably connected to the outer wall of the support foot (61) is arranged below the annular panel (611), and a torsion spring (613) is connected between the annular panel (611) and the rotating panel (612), and sliding shafts (614) are symmetrically mounted on the outer wall of the rotating panel (612) and the circular disc rack (621), and a vertical sliding groove (65) and a horizontal sliding groove (66) are arranged on the inner wall of the connecting sleeve (6), and the sliding shaft (614) on the rotating panel (612) can slide in the vertical sliding groove (65) and the horizontal sliding groove (66), and the sliding shaft (614) on the circular disc rack (621) can only slide in the vertical sliding groove (65).

3. The OLED substrate evaporation device according to claim 2, characterized in that: The rotating panel (612) is located above the circular disk rack (621), and a plate-shaped magnet (615) is symmetrically arranged on one side of the rotating panel (612) close to the circular disk rack (621), and a columnar electromagnetic group (622) is symmetrically installed on one side of the circular disk rack (621) close to the rotating panel (612), wherein the plate-shaped magnet (615) is located on the motion track of the columnar electromagnetic group (622), and the columnar electromagnetic group (622) generates an attractive force on the plate-shaped magnet (615) on the motion track when it is energized.

4. The OLED substrate evaporation device according to claim 1, characterized in that: One end of the support leg (61) used for supporting the substrate body (5) is arranged in an arc shape, and a protrusion (616) is arranged at the arc-shaped end of the support leg (61), and the protrusion (616) is used to act on the end of the suction cup unit (63) so that the end of the suction cup unit (63) is tightly fitted with the surface of the substrate body (5).

5. The OLED substrate evaporation device according to claim 1, characterized in that: A constant force spring (67) is connected between the circular disc frame (621) and the bottom of the connecting sleeve (6).

6. The OLED substrate evaporation device according to claim 1, characterized in that: A worm (721) is fixedly mounted on one end of the transmission shaft (72) located inside the connecting outer frame (8), and a worm wheel (81) meshing with the worm (721) is arranged inside the connecting outer frame (8), wherein a limiting sleeve (82) is symmetrically mounted on the outer wall of the connecting outer frame (8), wherein a rotating shaft (83) is fixedly mounted on the worm wheel (81), and the end of the rotating shaft (83) passes through the connecting outer frame (8) and the inner wall of the limiting sleeve (82) in sequence and extends to the outside, and a pressure plate (84) is also arranged outside the connecting outer frame (8), and the pressure plate (84) and the rotating shaft (83) are fixedly connected via a connecting portion (85).

7. The OLED substrate evaporation device according to claim 6, characterized in that: A damping rubber (821) is fixedly mounted on the outer wall of the limiting sleeve (82), a fixed disc frame (86) is fixedly mounted on the rotating shaft (83), and a rubber shaft (861) is fixedly mounted on the fixed disc frame (86), and the damping rubber (821) is located on the movement track of the rubber shaft (861).

8. The OLED substrate evaporation device according to claim 6, characterized in that: A shielding sleeve (69) is also fixedly mounted on the inner wall of the bottom of each connecting sleeve (6) around the mask plate (4); the end of the magnetic shaft (68) enters the interior of the transverse frame (7) through the shielding sleeve (69), and the electric magnetic plate (64) is sleeved outside the shielding sleeve (69).

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