Optical bench with breadboard active damping

Abstract

The application provides an optical platform with breadboard active damping, comprising: a platform unit, the platform unit comprising a top plate, a platform inner core and a platform bottom plate, the platform inner core being arranged between the platform top plate and the platform bottom plate; an active damping component, the active damping component being arranged on the platform unit, the active damping component being provided with a sensor module and a driver module; and a feedback unit, the sensor module being electrically connected with the feedback unit, vibration signals collected by the sensor module being collected, analyzed and processed by the feedback unit to obtain input signals, and the driver module generating vibration according to data of the input signals to offset vibration of an external environment. The application utilizes an active balancing mode to maximize the offset of the influence of platform bending vibration, improves the accuracy of alignment of optical equipment installed on the workbench, and thus improves the precision in the process of optical performance testing.

Description

Technical Field

[0001] This invention belongs to the field of optical platform technology, and particularly relates to an optical platform with active damping via a breadboard. Background Technology

[0002] An optical platform is a rigid platform used to support vibration-sensitive equipment. A typical optical stage consists of two panels and a lightweight honeycomb core, forming a sandwich structure. Due to their high stiffness-to-weight ratio, these platforms are widely used in optical research and high-precision manufacturing, often in conjunction with flexible pneumatic vibration isolators.

[0003] Currently, these systems can effectively isolate floor vibrations, but at the natural frequency of their platform bending vibrations, the platform deviates from ideal rigid body behavior. These platform bending vibrations can affect the alignment of optical equipment mounted on the worktable, thereby degrading optical performance. Summary of the Invention

[0004] This invention provides an optical platform with active damping via a breadboard, which aims to solve the problem that bending vibrations of the current platform can affect the alignment of optical equipment mounted on the worktable, thereby reducing optical performance.

[0005] This invention is implemented as follows: an optical platform with breadboard active damping, comprising:

[0006] A platform unit, comprising a top plate, a platform core, and a platform bottom plate, wherein the platform core is disposed between the platform top plate and the platform bottom plate;

[0007] An active damping component is mounted on the platform unit and includes a sensor module and a driver module.

[0008] The sensor module is electrically connected to the feedback unit. The vibration signal collected by the sensor module is processed by the feedback unit to obtain the input signal. The driver module generates vibration based on the data of the input signal to counteract the vibration of the external environment.

[0009] Preferably, the number of active damping components is two sets, and the active damping components are arranged in different areas of the platform unit.

[0010] Turn on one set of active damping components and continuously increase the gain slightly until the system becomes unstable. Record the maximum gain S1 before the system becomes unstable. Turn on another set of active damping components and continuously increase the gain slightly until the system becomes unstable. Record the maximum gain S2 before the system becomes unstable.

[0011] Simultaneously activate two sets of active damping components and continuously increase the gain by a small amount at a growth rate between S1 and S2 until the system becomes unstable. Record the maximum gain S3 before instability. S3 is the most effective gain sought.

[0012] Preferably, the active damping component includes two sets of first active damping components, which are disposed between the platform top plate and the platform bottom plate.

[0013] Preferably, the active damping component includes two sets of second active damping components, which are disposed on the end face of the platform top plate away from the platform bottom plate.

[0014] Preferably, the first active damping component includes a first sensor module and a first driver module; the feedback unit is electrically connected to the first sensor module and the first driver module respectively;

[0015] The first sensor module includes a first sensor and a sensor housing. The first sensor is disposed inside the sensor housing and senses vibration through the connection between the sensor housing and the top plate of the platform.

[0016] The first driver module includes an active damping component housing and a brake; the two ends of the active damping component housing are respectively connected to the platform top plate and the platform bottom plate, the brake is disposed inside the active damping component housing, and the feedback unit causes the brake to vibrate according to the input signal to counteract the vibration of the platform top plate and the platform bottom plate.

[0017] Preferably, the brake includes a first magnetic mass block, a first drive coil, and a first elastic sheet; the first magnetic mass block is connected to the housing of the active damping component via the first elastic sheet;

[0018] The first drive coil generates a magnetic field that causes the first magnetic mass block to vibrate. The vibration of the first magnetic mass block acts on the outer shell of the active damping component through the first elastic sheet.

[0019] Preferably, the second active damping component includes a second sensor module and a second driver module;

[0020] The second sensor module includes a detachable lower housing and a second sensor. The second sensor is located inside the detachable lower housing. Both the detachable lower housing and the second sensor are connected to the platform top plate. The second driver module acts on the detachable lower housing.

[0021] Preferably, the second driver module includes a detachable upper housing, a second magnetic mass block, a second drive coil, and a second elastic sheet. The second drive coil is arranged around the second magnetic mass block. The second magnetic mass block is connected to the detachable upper housing via the second elastic sheet. The second drive coil generates a magnetic field that causes the second magnetic mass block to vibrate. The vibration of the second magnetic mass block acts on the detachable upper housing through the second elastic sheet.

[0022] Preferably, the feedback unit includes a connector, a preamplifier, a bandpass filter, and a phase corrector;

[0023] The connector collects vibration signals from the active damping component. The vibration signals are first amplified by a preamplifier, and then filtered by a bandpass filter to retain signals in the 100Hz to 400Hz frequency band. The signals in the 100Hz to 400Hz frequency band are adjusted to a 1 / 2π phase by a phase corrector to obtain a frequency-modulated signal. The frequency-modulated signal is multiplied by a gain factor K and then noise is eliminated by the driver to form an input signal. The input signal is then sent to the driver module.

[0024] Compared with the prior art, the embodiments of this application have the following main advantages:

[0025] The optical platform with active damping provided by this invention obtains the state information of the platform's bending vibration through the sensor module in the active damping component, and then actively uses the driver module to cancel the vibration. By using an active balancing method, the influence of the platform's bending vibration is offset to the greatest extent, thereby improving the alignment accuracy of the optical equipment mounted on the workbench and thus improving the precision in the optical performance testing process. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of an optical platform with active damping on a breadboard provided by the present invention.

[0027] Figure 2 This is a schematic diagram of the first active damping component of an optical platform with breadboard active damping provided by the present invention.

[0028] Figure 3 This is a schematic diagram of the second active damping component of an optical platform with breadboard active damping provided by the present invention.

[0029] Figure 4 This is a schematic diagram of the control flow chart in an optical platform with active damping on a breadboard provided by the present invention.

[0030] Figure 5This is a schematic diagram of the spectrum of an optical platform with active damping via a breadboard in both stable and unstable states, provided by the present invention.

[0031] Figure 6 This is a schematic diagram of the FFT spectrum of the initial acceleration of an optical platform with active damping on a breadboard, provided by the present invention.

[0032] Figure 7 This is a schematic diagram of the FFT spectrum of acceleration in a state after applying a tuning effect to an optical platform with active damping on a breadboard, provided by the present invention.

[0033] Explanation of reference numerals in the attached figures:

[0034] 1. Platform top plate; 2. Platform bottom plate; 3. First active damping component; 4. Second active damping component; 5. Connector; 6. Data transmission channel; 7. Controller; 8. Platform side plate; 9. Platform inner core;

[0035] 31. First sensor; 32. Sensor housing; 33. Active damping component housing; 35. First magnetic mass block; 36. First drive coil; 37. First elastic sheet; 38. Brake; 39. First data transmission line;

[0036] 41. Lower housing of the detachable component; 42. Second magnetic mass block; 43. Upper housing of the detachable component; 44. Second drive coil; 45. Second elastic sheet; 46. Second data transmission line; 47. Second sensor. Detailed Implementation

[0037] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, not to describe a particular order.

[0038] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0039] This invention provides an optical platform with breadboard active damping, such as... Figures 1-7 As shown, the optical platform with breadboard active damping includes:

[0040] The platform unit includes a top plate 1, a platform core 9, and a platform bottom plate 2, wherein the platform core 9 is disposed between the platform top plate 1 and the platform bottom plate 2.

[0041] An active damping component is mounted on the platform unit and includes a sensor module and a driver module.

[0042] The feedback unit includes a connector 5, a data transmission channel 6, and a controller 7. The sensor module is electrically connected to the connector 5. The data transmission channel 6 transmits the data from the connector 5 to the controller 7. The vibration signal collected by the sensor module is analyzed and processed by the controller 7 to obtain the input signal.

[0043] The working principle of the active damping component is as follows: the sensor module collects vibration signal data, and the feedback unit analyzes and adjusts the input signal. Then, based on the input signal data, it transmits the required vibration amplitude signal to the active damping component. In this embodiment, the current signal is used to control the magnetic field amplitude to make the driver module generate vibration amplitude. Here, the current signal data is transmitted back to the connector 5 through the data transmission channel 6. The connector 5 then distributes the current signal data to different driver modules, enabling the driver modules to generate a specified vibration amplitude to counteract the vibration of the external environment.

[0044] The active damping components are in two sets, and are located in different areas of the platform unit. One set of active damping components is turned on individually and the gain is continuously increased slightly until the system becomes unstable. The maximum gain S1 before instability is recorded. The other set of active damping components is turned on individually and the gain is continuously increased slightly until the system becomes unstable. The maximum gain S2 before instability is recorded. Both sets of active damping components are turned on simultaneously and the gain is continuously increased slightly at a rate between S1 and S2 until the system becomes unstable. The maximum gain S3 before instability is recorded. S3 is the most effective gain.

[0045] like Figure 5 As shown, the system is in an unstable state when the acceleration changes drastically, for example... Figure 5 When the acceleration changes significantly within 5 to 10 seconds, the system is in an unstable state.

[0046] In a preferred embodiment of this invention, the controller 7 includes a preamplifier, a bandpass filter, and a phase corrector. The preamplifier, bandpass filter, and phase corrector are connected in series. The vibration signal collected by the connector 5 is first amplified by the preamplifier. After amplification, the vibration signal is filtered by the bandpass filter to retain the signal in the 100Hz to 400Hz frequency band. The signal in the 100Hz to 400Hz frequency band is adjusted to a 1 / 2π phase by the phase corrector to obtain a frequency-modulated signal. The frequency-modulated signal is multiplied by a gain factor K and then noise is eliminated by the driver to form the input signal.

[0047] like Figure 6 and Figure 7 As shown, Figure 6 The FFT spectrum of the acceleration in the initial state, the Figure 7 The FFT spectrum of acceleration under the state after applying the tuning effect shows that the fluctuation range of acceleration data is significantly reduced after the tuning process.

[0048] In this embodiment, the preamplifier, bandpass filter, and phase corrector are existing technology devices, and the gain factor K also adopts existing technology parameters;

[0049] In a preferred embodiment of this invention, the active damping component includes a first active damping component 3 and a second active damping component 4.

[0050] The first active damping component 3 includes a first sensor module and a first driver module; the first sensor module and the first driver module are electrically connected to the connector 5, and the signal data of the connector 5 interacts with the first sensor module and the first driver module respectively through the first data transmission line 39 provided on the first active damping component 3;

[0051] The first sensor module includes a first sensor 31 and a sensor housing 32. The first sensor 31 is disposed inside the sensor housing 32 and senses the vibration state through the connection between the sensor housing 32 and the platform top plate 1.

[0052] The first driver module includes an active damping component housing 33 and a brake 38. The active damping component housing 33 is connected at both ends to the platform top plate 1 and the platform bottom plate 2, respectively. The brake 38 is disposed inside the active damping component housing 33. The brake 38 includes a first magnetic mass block 35, a first drive coil 36, and a first elastic sheet 37. The first magnetic mass block 35 is connected to the active damping component housing 33 through the first elastic sheet 37. The first drive coil 36 generates a magnetic field that causes the first magnetic mass block 35 to vibrate. The vibration of the first magnetic mass block 35 acts on the active damping component housing 33 through the first elastic sheet 37.

[0053] The second active damping component 4 includes a second sensor module, a second driver module, and a second data transmission line 46; the second data transmission line 46 is electrically connected to the second sensor module, the second driver module, and the connector, respectively.

[0054] The second sensor module includes a detachable lower housing 41 and a second sensor 47. The second sensor 47 is located inside the detachable lower housing 41 and is connected to the platform top plate 1.

[0055] The second driver module includes a detachable upper housing 43, a second magnetic mass block 42, a second drive coil 44, and a second elastic sheet 45. The second drive coil 44 is arranged around the second magnetic mass block 42. The second magnetic mass block 42 is connected to the detachable upper housing 43 via the second elastic sheet 45. The second drive coil 44 generates a magnetic field that causes the second magnetic mass block 42 to vibrate. The vibration of the second magnetic mass block 42 acts on the detachable upper housing 43 through the second elastic sheet 45.

[0056] In a further preferred embodiment of the present invention, two sets of first active damping components 3 are respectively disposed between the platform top plate 1 and the platform bottom plate 2;

[0057] In this embodiment, the active damping component uses two sets of first active damping components 3 disposed between the platform top plate 1 and the platform bottom plate 2 as damping devices to counteract external environmental vibrations; the first active damping components 3 are pre-arranged inside the platform top plate 1 and the platform bottom plate 2, making them difficult to disassemble;

[0058] In a further preferred embodiment of the present invention, two sets of second active damping components 4 are disposed on the end face of the platform top plate 1 away from the platform bottom plate 2;

[0059] In this embodiment, the active damping component uses two sets of second active damping components 4 on the outside of the platform top plate 1 as damping devices to counteract external environmental vibrations; since the second active damping components 4 are directly installed on the platform top plate 1, the active damping components can be removed when not needed.

[0060] In a preferred embodiment of this invention, a platform side plate 8 is provided between the platform top plate 1 and the platform bottom plate 2; the controllers 7 in the feedback unit are all located on the platform side plate 8.

[0061] It should be noted that, for the sake of simplicity, the foregoing embodiments are all described as a series of actions. However, those skilled in the art should understand that the present invention is not limited to the described order of actions, as some steps may be performed in other orders or simultaneously according to the present invention. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions and modules involved are not necessarily essential to the present invention.

[0062] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit the scope of protection of the invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art can still combine, add, delete, or otherwise adjust the features of the various embodiments of the present invention according to the circumstances without conflict or creative effort, thereby obtaining different technical solutions that do not fundamentally depart from the concept of the present invention. These technical solutions are also within the scope of protection of the present invention.

Claims

1. An optical platform with active damping via a breadboard, characterized in that, include: A platform unit, comprising a top plate, a platform core, and a platform bottom plate, wherein the platform core is disposed between the platform top plate and the platform bottom plate; An active damping component is mounted on the platform unit and includes a sensor module and a driver module. The sensor module is electrically connected to the feedback unit. The vibration signal collected by the sensor module is processed by the feedback unit to obtain the input signal. The driver module generates vibration based on the data of the input signal to counteract the vibration of the external environment. The active damping components are in two sets and are located in different areas of the platform unit. One set of active damping components is turned on and the gain is continuously increased slightly until the system becomes unstable. The maximum gain S1 before instability is recorded. The other set of active damping components is turned on and the gain is continuously increased slightly until the system becomes unstable. The maximum gain S2 before instability is recorded. Both sets of active damping components are turned on at the same time and the gain is continuously increased slightly at a rate between S1 and S2 until the system becomes unstable. The maximum gain S3 before instability is recorded. S3 is the most effective gain.

2. The optical platform with breadboard active damping as described in claim 1, characterized in that, The active damping component includes two sets of first active damping components, which are disposed between the platform top plate and the platform bottom plate.

3. The optical platform with active damping via a breadboard as described in claim 1, characterized in that, The active damping component includes two sets of second active damping components, which are disposed on the end face of the platform top plate away from the platform bottom plate.

4. The optical platform with active damping via a breadboard as described in claim 2, characterized in that, The first active damping component includes a first sensor module and a first driver module; The feedback unit is electrically connected to the first sensor module and the first driver module, respectively; The first sensor module includes a first sensor and a sensor housing. The first sensor is disposed inside the sensor housing and senses vibration through the connection between the sensor housing and the top plate of the platform. The first driver module includes an active damping component housing and a brake; the two ends of the active damping component housing are respectively connected to the platform top plate and the platform bottom plate, the brake is disposed inside the active damping component housing, and the feedback unit causes the brake to vibrate according to the input signal to counteract the vibration of the platform top plate and the platform bottom plate.

5. An optical platform with active damping via a breadboard as described in claim 4, characterized in that, The brake includes a first magnetic mass block, a first drive coil, and a first elastic sheet; the first magnetic mass block is connected to the housing of the active damping component through the first elastic sheet. The first drive coil generates a magnetic field that causes the first magnetic mass block to vibrate. The vibration of the first magnetic mass block acts on the outer shell of the active damping component through the first elastic sheet.

6. The optical platform with breadboard active damping as described in claim 3, characterized in that, The second active damping component includes a second sensor module and a second driver module; The second sensor module includes a detachable lower housing and a second sensor. The second sensor is located inside the detachable lower housing. Both the detachable lower housing and the second sensor are connected to the platform top plate. The second driver module acts on the detachable lower housing.

7. An optical platform with active damping via a breadboard as described in claim 6, characterized in that, The second driver module includes a detachable upper housing, a second magnetic mass block, a second drive coil, and a second elastic sheet. The second drive coil is arranged around the second magnetic mass block. The second magnetic mass block is connected to the detachable upper housing via the second elastic sheet. The second drive coil generates a magnetic field that causes the second magnetic mass block to vibrate. The vibration of the second magnetic mass block acts on the detachable upper housing through the second elastic sheet.

8. An optical platform with active damping via a breadboard as described in claim 5 or 7, characterized in that, The feedback unit includes a connector, a preamplifier, a bandpass filter, and a phase corrector; The connector collects vibration signals from the active damping component. The vibration signals are first amplified by a preamplifier, and then filtered by a bandpass filter to retain signals in the 100Hz~400Hz frequency band. The signals in the 100Hz~400Hz frequency band are adjusted to a 1 / 2π phase by a phase corrector to obtain a frequency-modulated signal. The frequency-modulated signal is multiplied by a gain factor K and then noise is eliminated by the driver to form an input signal. The input signal is then sent to the driver module.

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