A sports device

Abstract

The present application provides a motion device, including a base, first and second linear motors, first and second flexible components, and a middle beam structure. The base has a surface extending along the x direction and along the y direction, and the z direction is perpendicular to the surface of the base. The first and second linear motors are installed on the surface of the base parallel to the x direction. The first end of the middle beam structure is connected to the mover of the first linear motor through a first flexible member, and the second end is connected to the mover of the second linear motor through a second flexible member. The first flexible member has flexibility in the Rz direction, rigidity for suppressing movement in the x direction, rigidity for suppressing movement in the z direction, rigidity for suppressing movement in the Rx direction, and rigidity for suppressing movement in the Ry direction. The second flexible member has flexibility in the Rz direction, flexibility in the y direction, rigidity for suppressing movement in the x direction, rigidity for suppressing movement in the z direction, and rigidity for suppressing movement in the Ry direction. The motion device of the present application can reduce the stagnation of parallel drive movement, compensate for the thermal deformation of the middle beam structure in the y direction, reduce the Abbe error, and improve the acceleration performance in the x direction.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular, to a motion device for semiconductor manufacturing. Background Art

[0002] With the continuous advancement of semiconductor manufacturing technology, higher requirements are placed on the accuracy, response speed and operating efficiency of motion platforms. In semiconductor manufacturing, motion platforms play a vital role. They are responsible for carrying workpieces such as silicon wafers and performing precise positioning and movement to achieve key steps in semiconductor production and manufacturing.

[0003] The accuracy and stability of the motion stage directly affect the quality of semiconductor product manufacturing and determine the yield and performance of the device. Therefore, the motion stage not only needs to have high-precision positioning capabilities, but also needs to have fast response and good dynamic performance to meet the strict requirements of speed and accuracy in the semiconductor manufacturing process.

[0004] In order to improve acceleration, traditional X-axis or XY-axis motion platforms often use multiple sets of drive devices to drive in parallel. However, if this parallel drive is not synchronized, it will cause motion stagnation and may even cause the guide device to deform, thus affecting the accuracy of the entire motion platform. In addition, traditional motion platforms are often unable to effectively solve the problem of deformation of components caused by heat or other factors, resulting in reduced motion accuracy. Summary of the invention

[0005] The purpose of the present application is to provide a motion device that can reduce or even eliminate the motion jamming caused by parallel drive, reduce the deformation of the guide components caused by the asynchronous parallel drive, and compensate for the thermal deformation of the center beam structure along the y direction, while reducing the Abbe error of the motion device, improving the motion accuracy, and helping to improve the acceleration performance of the motion device along the x direction.

[0006] The present application provides a motion device, which includes a base, a first linear motor, a second linear motor, a flexible component and a middle beam structure.

[0007] The base has a surface extending along the x direction and the y direction; wherein the direction perpendicular to the base surface is the z direction, the direction of rotation around the axis along the z direction is the Rz direction, the direction of rotation around the axis along the x direction is the Rx direction, and the direction of rotation around the axis along the y direction is the Ry direction. The first linear motor and the second linear motor are installed on the surface of the base in a manner parallel to the x direction and separated by a predetermined distance, and the flexible component includes a first flexible member and a second flexible member. The first end of the middle beam structure is connected to the mover of the first linear motor through the first flexible member, and the second end is connected to the mover of the second linear motor through the second flexible member.

[0008] The first flexible member has flexibility for movement in the Rz direction, rigidity for inhibiting movement in the x direction, rigidity for inhibiting movement in the z direction, rigidity for inhibiting movement in the Rx direction, and rigidity for inhibiting movement in the Ry direction. The second flexible member has flexibility for movement in the Rz direction, flexibility for movement in the y direction, rigidity for inhibiting movement in the x direction, rigidity for inhibiting movement in the z direction, and rigidity for inhibiting movement in the Ry direction.

[0009] In an implementable solution, the first flexible member includes an A1 mounting portion, an A2 mounting portion and a first flexible connection portion. The A1 mounting portion and the A2 mounting portion are arranged opposite to each other, and the first flexible connection portion is between the A1 mounting portion and the A2 mounting portion, and is located at the center position of the first flexible member along the x direction. The first flexible connection portion includes a central body and a plurality of flexible springs, and the plurality of flexible springs are distributed around the central body and extend along the z direction. All flexible springs are divided into a first group and a second group, the first group of flexible springs connects the central body and the A1 mounting portion, and the second group of flexible springs connects the central body and the A2 mounting portion; wherein the number of flexible springs in each group is greater than or equal to two. A plane parallel to the yOz plane and passing through the center of the central body is defined as a first center plane, and the first flexible connection portion is symmetrically structured with respect to the first center plane. A plane parallel to the xOz plane and passing through the center of the central body is defined as a second center plane, and the first flexible connection portion is symmetrically structured with respect to the second center plane.

[0010] In an operative solution, the first group of flexible reeds includes a first y-direction flexible reed extending along the y-direction. The second group of flexible reeds includes a flexible reed extending along the y-direction, called a second y-direction flexible reed. The extension direction of the first y-direction flexible reed and the second y-direction flexible reed along the y-direction overlap.

[0011] In an implementable solution, the first end of the A1 mounting portion is opposite to the first end of the A2 mounting portion, and the second end of the A1 mounting portion is opposite to the second end of the A2 mounting portion. The first end of the A1 mounting portion is provided with an A1 extension portion extending toward the first end of the A2 mounting portion; the second end of the A2 mounting portion is provided with an A2 extension portion extending toward the second end of the A1 mounting portion. The first group of flexible springs includes a first x-direction flexible spring extending along the x-direction, the first x-direction flexible spring connects the central body and the A1 extension portion, and the two sides of the first x-direction flexible spring respectively form a groove-shaped structure extending along the x-direction between the A1 mounting portion and the A2 mounting portion. The second group of flexible springs includes a second x-direction flexible spring extending along the x-direction, the second x-direction flexible spring connects the central body and the A2 extension portion, and the two sides of the second x-direction flexible spring also respectively form a groove-shaped structure extending along the x-direction between the A1 mounting portion and the A2 mounting portion. The extension direction of the first x-direction flexible spring and the second x-direction flexible spring in the x-direction overlap.

[0012] In an implementable solution, the central body is a strip structure extending along the x direction, one side of the strip structure along the y direction is connected to the A1 mounting portion through a first group of flexible springs, and the other side of the strip structure along the y direction is connected to the A2 mounting portion through a second group of flexible springs. The extending direction of each flexible spring forms a predetermined angle with the y direction.

[0013] In an implementable solution, the second flexible member includes a B1 mounting portion, a B2 mounting portion, and a second flexible connection portion. The B1 mounting portion is arranged opposite to the B2 mounting portion, and the second flexible connection portion is located between the B1 mounting portion and the B2 mounting portion. The first end of the B1 mounting portion is opposite to the first end of the B2 mounting portion, and the second end of the B1 mounting portion is opposite to the second end of the B2 mounting portion. The first end of the B1 mounting portion is provided with a B11 extension portion extending toward the first end of the B2 mounting portion; the second end of the B2 mounting portion is provided with a B21 extension portion extending toward the second end of the B1 mounting portion. One end of the second flexible connection portion is connected to the B11 extension portion, and the other end is connected to the B21 extension portion. The second flexible connection portion includes at least one or more sections of a reed structure perpendicular to the y direction and extending along the x direction.

[0014] In an implementable solution, the second flexible connection portion includes a multi-section spring structure and a multi-section transition body, and the multi-section spring structure and the multi-section transition body are alternately connected.

[0015] In an implementable solution, the second flexible connection portion includes a whole section of sheet-shaped reed structure, one end of the reed structure is connected to the B11 extension portion, and the other end is connected to the B21 extension portion.

[0016] In an implementable solution, the second end of the B1 mounting portion is provided with a B12 extension portion extending toward the first end of the B2 mounting portion; the first end of the B2 mounting portion is provided with a B22 extension portion extending toward the first end of the B1 mounting portion. Along the x direction, the B11 extension portion and the B21 extension portion are located between the B22 extension portion and the B12 extension portion. A limiting structure is provided between the B11 extension portion and the B22 extension portion, and a limiting structure is also provided between the B12 extension portion and the B21 extension portion. The limiting structure has a preset displacement amount for forward and backward movement along the y direction, which is used to limit the deformation amount of the second flexible member along the y direction.

[0017] In an implementable solution, the limiting structure includes a groove and a protrusion. Between the B11 extension and the B22 extension, one of the B11 extension and the B22 extension is provided with a groove, and the other is provided with a protrusion. Between the B12 extension and the B21 extension, one of the B12 extension and the B21 extension is provided with a groove, and the other is provided with a protrusion. In each limiting structure, the protrusion is inserted into the groove, and there is a preset gap between the protrusion and the inner wall of the groove on both sides along the y direction.

[0018] In an implementable solution, the first linear motor and the second linear motor have the same structure, the stator includes a fixed guide rail, and the mover is an air-floating slider disposed on the fixed guide rail.

[0019] In an implementable solution, the middle beam structure is a third linear motor, a first end of a stator of the third linear motor is connected to a mover of the first linear motor via a first flexible member, and a second end of the stator is connected to a mover of the second linear motor via a second flexible member. The third linear motor has the same structure as the first linear motor and the second linear motor.

[0020] In an implementable solution, the fixed guide rail is suspended and fixed, and the air-floating slider is sleeved on the fixed guide rail. The air-floating slider is formed by splicing a top air-floating block, a bottom air-floating block, a first lateral air-floating block, and a second lateral air-floating block. The top air-floating block is located on the upper side of the fixed guide rail, the bottom air-floating block is located on the lower side of the fixed guide rail, and the first lateral air-floating block and the second lateral air-floating block are respectively located on both sides of the fixed guide rail.

[0021] In an implementable solution, the surface of the top air flotation block facing the fixed guide rail is provided with an air flotation surface and a vacuum preload surface; the surface of the bottom air flotation block facing the fixed guide rail is provided with an air flotation surface and a vacuum preload surface. The air flotation surface and the vacuum preload surface of the top air flotation block are symmetrically distributed with the air flotation surface and the vacuum preload surface of the bottom air flotation block. The surface of the first lateral air flotation block facing the fixed guide rail is provided with an air flotation surface and a vacuum preload surface; the surface of the second lateral air flotation block facing the fixed guide rail is provided with an air flotation surface and a vacuum preload surface. The air flotation surface and the vacuum preload surface of the first lateral air flotation block are symmetrically distributed with the air flotation surface and the vacuum preload surface of the second lateral air flotation block.

[0022] In an implementable solution, the extension direction of the fixed guide rail is defined as the m direction, and the direction perpendicular to the m direction and parallel to the surface of the fixed guide rail is defined as the n direction. A straight line along the m direction and passing through the center position of the top air-floating block along the n direction is defined as the structural center line L. The top air-floating block includes a first area and a second area symmetrically distributed about the structural center line L, and the first area and the second area respectively include air-floating surfaces and vacuum pre-loading surfaces alternately distributed along the m direction; in the n direction, the air-floating surface of the first area is opposite to the vacuum pre-loading surface of the second area, and the vacuum pre-loading surface of the first area is opposite to the air-floating surface of the second area. The structure of the bottom air-floating block is the same as that of the top air-floating block. The first lateral air-floating block includes a vacuum pre-loading surface located in the middle and air-floating surfaces located on both sides of the vacuum pre-loading surface along the m direction, and the structure of the second lateral air-floating block is the same as that of the first lateral air-floating block.

[0023] Compared with the prior art, the beneficial effects of the present application include at least the following:

[0024] In the motion device of the present application, the first end of the center beam structure is connected to the mover of the first linear motor through the first flexible member, and the second end is connected to the mover of the second linear motor through the second flexible member. The first and second linear motors drive the center beam structure to move in the x direction in parallel. Since the first and second flexible members are both flexible in the Rz direction, the flexible deformation of the first and second flexible members in the Rz direction can be used to buffer the asynchronous motion in the parallel drive, reduce the motion jamming caused by the asynchronous parallel drive, and also reduce the deformation problem caused by the guide components in the first and second linear motors, while reducing the impact on the center beam structure and ensuring the motion accuracy of the motion device.

[0025] Furthermore, since the second flexible part is also flexible enough to move along the y direction, it can absorb the thermal deformation of the center beam structure along the y direction, and reduce the influence of the thermal deformation of the center beam structure on the guide components of the first linear motor and the second linear motor, so as to ensure the guiding accuracy in the x direction.

[0026] At the same time, the first flexible member and the second flexible member can buffer the rotation or twisting of the center beam structure through flexible deformation in the Rz direction, and the second flexible member can compensate for the thermal deformation of the center beam structure by flexible deformation along the y direction, thereby reducing the Abbe error to a certain extent.

[0027] In addition, since the first flexible member has the rigidity to suppress movement along the x-direction, and the second flexible member has the rigidity to suppress movement along the x-direction, it is equivalent to ensuring the rigidity along the x-direction. Therefore, even after adding the first flexible member and the second flexible member with a decoupling effect, the natural frequency of the motion device along the x-direction can still be guaranteed, and the movement of the middle beam structure driven by the first and second linear motors along the x-direction can have better acceleration performance, which helps to achieve large acceleration and deceleration movements along the x-direction and improve the motion stability and motion accuracy of the motion device. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 This is a structural diagram of a motion device shown in an embodiment of the present application.

[0030] Figure 2 This is a structural diagram of the first type of first flexible member shown in an embodiment of the present application.

[0031] Figure 3 This is a structural diagram of the second first flexible member shown in an embodiment of the present application.

[0032] Figure 4 This is a structural diagram of the third first flexible member shown in an embodiment of the present application.

[0033] Figure 5 This is a structural diagram of the fourth first flexible member shown in an embodiment of the present application.

[0034] Figure 6 This is a structural diagram of the first type of second flexible member shown in an embodiment of the present application.

[0035] Figure 7 This is a structural diagram of a second type of second flexible member according to an embodiment of the present application.

[0036] Figure 8 for Figure 6 A magnified view of the local structure at point A.

[0037] Fig. 9 This is a structural diagram from a top side view of a linear motor shown in an embodiment of the present application.

[0038] Fig.10 for Fig. 9 The structural diagram of the linear motor from the bottom view.

[0039] Fig.11 for Fig. 9 Distribution diagram of positive pressure and vacuum area of ​​the lateral air flotation block of the middle air flotation slider.

[0040] Fig.12 for Fig. 9 Distribution diagram of positive pressure and vacuum area of ​​the top or bottom air flotation block of the medium air flotation slider.

[0041] In the figure: 1, base; 2, first linear motor; 3, second linear motor; 101, fixed guide rail; 102, air-floating slider; 1021, top air-floating block; 1022, bottom air-floating block; 1023, first lateral air-floating block; 1024, second lateral air-floating block; S1, air-floating surface; S2, vacuum preload surface; M1, first zone; M2, second zone; 103, driving component; 104, gantry column; 105, load plate; 4, first flexible member; 41, A1 mounting portion; 411, A1 extension portion; 42, A2 mounting portion; 421, A2 extension portion; 43, first flexible connection Part; 431, central body; 432, flexible reed; Y1, first y-direction flexible reed; Y2, second y-direction flexible reed; X1, first x-direction flexible reed; X2, second x-direction flexible reed; 433, groove structure; 5, second flexible part; 51, B1 mounting part; 511, B11 extension; 512, B12 extension; 52, B2 mounting part; 521, B21 extension; 522, B22 extension; 53, second flexible connecting part; 531, reed structure; 532, transition body; 54, limiting structure; 541, groove; 542, protrusion; 6, middle beam structure. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0043] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0044] like Figure 1 As shown, the present application provides a motion device, including a base 1, a first linear motor 2, a second linear motor 3, a flexible component and a middle beam structure 6.

[0045] The base 1 has a surface extending along the x direction and the y direction; wherein the direction perpendicular to the surface of the base 1 is the z direction, the direction of rotation around the axis along the z direction is the Rz direction, the direction of rotation around the axis along the x direction is the Rx direction, and the direction of rotation around the axis along the y direction is the Ry direction. The first linear motor 2 and the second linear motor 3 are installed on the surface of the base 1 in a manner parallel to the x direction and spaced by a predetermined distance, and the flexible component includes a first flexible member 4 and a second flexible member 5.

[0046] The first end of the middle beam structure 6 is connected to the mover of the first linear motor 2 through the first flexible member 4, and the second end thereof is connected to the mover of the second linear motor 3 through the second flexible member 5. The first flexible member 4 has flexibility for movement in the Rz direction, rigidity for suppressing movement in the x direction, rigidity for suppressing movement in the z direction, rigidity for suppressing movement in the Rx direction, and rigidity for suppressing movement in the Ry direction. The second flexible member 5 has flexibility for movement in the Rz direction, flexibility for movement in the y direction, rigidity for suppressing movement in the x direction, rigidity for suppressing movement in the z direction, and rigidity for suppressing movement in the Ry direction.

[0047] In the motion device of the present application, the first linear motor 2 and the second linear motor 3 realize parallel driving of the center beam structure 6. When the first linear motor 2 and the second linear motor 3 move asynchronously, since the first flexible member 4 and the second flexible member 5 have the flexibility to move along the Rz direction, the asynchronous movement can be buffered by means of the flexible deformation of the first flexible member 4 and the second flexible member 5 along the Rz direction, thereby greatly reducing the motion jamming caused by the asynchronous movement of the first and second linear motors, and also reducing the deformation problem caused by the guide components in the first and second linear motors, while reducing the impact on the center beam structure 6, and ensuring the motion accuracy of the motion device.

[0048] Moreover, when the middle beam structure 6 undergoes thermal deformation along the y direction, since the second flexible component 5 also has the flexibility to move along the y direction, it can absorb the deformation of the middle beam structure 6 and reduce the influence of the thermal deformation of the middle beam structure 6 on the movers of the first linear motor 2 and the second linear motor 3, so as to ensure the guiding accuracy in the x direction.

[0049] At the same time, the first flexible member 4 and the second flexible member 5 can buffer the rotation or twisting of the middle beam structure 6 through flexible deformation in the Rz direction, and the second flexible member 5 can compensate for the thermal deformation of the middle beam structure 6 along the y direction by flexible deformation along the y direction, thereby reducing the Abbe error (Absolute Between Bands Error, Abbe error) to a certain extent.

[0050] In addition, since the first flexible member 4 has the rigidity to suppress movement along the x-direction, and the second flexible member 5 has the rigidity to suppress movement along the x-direction, it is equivalent to ensuring the rigidity along the x-direction. Therefore, even after adding the first flexible member 4 and the second flexible member 5 with a decoupling effect, the natural frequency of the motion device along the x-direction can still be guaranteed, and the movement of the first and second linear motors driving the middle beam structure 6 along the x-direction can have better acceleration performance, which helps to achieve large acceleration and deceleration movements along the x-direction and improve the motion stability and motion accuracy of the motion device.

[0051] In order to explain the structure and working principle of the sports device of the present application in more detail, the present application provides the following embodiments. It should be noted that the technical features and technical solutions in the following embodiments can be used in combination with each other without conflict. Embodiment 1

[0052] This embodiment provides a sports device, such as Figure 1 As shown, it includes a base 1, a first linear motor 2, a second linear motor 3, a flexible component and a middle beam structure 6.

[0053] The base 1 has a surface extending along the x direction and the y direction; wherein the direction perpendicular to the surface of the base 1 is the z direction, the direction of rotation around the axis along the z direction is the Rz direction, the direction of rotation around the axis along the x direction is the Rx direction, and the direction of rotation around the axis along the y direction is the Ry direction. The first linear motor 2 and the second linear motor 3 are installed on the surface of the base 1 in a manner parallel to the x direction and spaced by a predetermined distance, and the flexible component includes a first flexible member 4 and a second flexible member 5.

[0054] The first end of the middle beam structure 6 is connected to the mover of the first linear motor 2 through the first flexible member 4, and the second end thereof is connected to the mover of the second linear motor 3 through the second flexible member 5. The first flexible member 4 has flexibility for movement in the Rz direction, rigidity for suppressing movement in the x direction, rigidity for suppressing movement in the z direction, rigidity for suppressing movement in the Rx direction, and rigidity for suppressing movement in the Ry direction. The second flexible member 5 has flexibility for movement in the Rz direction, flexibility for movement in the y direction, rigidity for suppressing movement in the x direction, rigidity for suppressing movement in the z direction, and rigidity for suppressing movement in the Ry direction.

[0055] The linear motions of the first linear motor 2 and the second linear motor 3 can be controlled separately to achieve synchronous operation, or the first linear motor 2 is active and the second linear motor 3 is driven to achieve synchronous operation of the two. However, no matter how the first linear motor 2 and the second linear motor 3 drive the center beam structure 6 in parallel, it is inevitable that the parallel drive will be slightly out of sync during long-term use.

[0056] In the motion device of this embodiment, the first and second linear motors drive the central beam structure 6 in parallel to move along the x direction. Since the first and second flexible parts are both flexible enough to move along the Rz direction, the flexible deformation of the first and second flexible parts along the Rz direction can be used to buffer the asynchronous motion in the parallel drive, thereby reducing the motion jamming caused by the asynchronism of the parallel drive, and also reducing the deformation problem of the guide components in the first and second linear motors caused by the asynchronism of the parallel drive. At the same time, the impact on the central beam structure 6 is reduced, thereby ensuring the motion accuracy of the motion device.

[0057] In this embodiment, the middle beam structure 6 can be a structural beam without displacement capability, used to carry materials, that is, the motion device can only carry materials to perform displacement movement along the x direction. The heat of the materials or other components may be transferred to the middle beam structure 6, causing the middle beam structure 6 to produce a certain degree of thermal deformation.

[0058] Or, in this embodiment, if Figure 1 As shown, the middle beam structure 6 can be a third linear motor, on which a load plate 105 for carrying materials is installed. The first end of the stator of the third linear motor is connected to the mover of the first linear motor 2 through the first flexible member 4, and the second end of the stator is connected to the mover of the second linear motor 3 through the second flexible member 5, that is, the motion device can carry the material to perform displacement movement along the x-direction and the y-direction. The third linear motor has the same structure as the first linear motor 2 and the second linear motor 3. The third linear motor generates heat during operation, which may cause thermal deformation of the middle beam structure 6.

[0059] However, in this embodiment, since the second flexible member 5 also has the flexibility to move along the y direction, it can bear the thermal deformation of the middle beam structure along the y direction, and reduce the influence of the thermal deformation of the middle beam structure on the guide components of the first linear motor and the second linear motor, so as to ensure the guiding accuracy in the x direction. If there is no second flexible member 5 to alleviate the thermal deformation of the middle beam structure along the y direction, the thermal deformation of the middle beam structure 6 along the y direction may cause deformation to the guide components in the first and second linear motors at both ends.

[0060] In the gantry motion table of the prior art, Abbe error may occur. Abbe error is mainly caused by the fact that the measuring axis does not coincide with the reference axis or is not on its extension line during the measurement or processing. In the existing gantry motion table, the linear motor and the center beam structure are generally rigidly connected. Once the movement of the two linear motors is not synchronized, it may cause unnecessary rotation or distortion of the center beam during movement. Since the push-pull force application point of the linear motor does not completely coincide with the center of the center beam, this offset may amplify the angle error during the processing or measurement process, thereby generating Abbe error. In addition, the center beam will undergo thermal expansion or contraction under temperature changes, which may cause the relative position between the crossbeam and the linear motor to change, thereby affecting the accuracy of measurement or processing. If the thermal deformation of the crossbeam is not properly compensated, it may cause Abbe error.

[0061] In the technical solution of this embodiment, on the one hand, the first flexible member 4 and the second flexible member 5 have the flexibility to move along the Rz direction. Therefore, when the first and second linear motors move asynchronously and cause the middle beam structure 6 to rotate or twist in the Rz direction, the first flexible member 4 and the second flexible member 5 can buffer the rotation or twist of the middle beam structure through flexible deformation in the Rz direction, thereby reducing the Abbe error to a certain extent. On the other hand, since the second flexible member 5 also has the flexibility to move along the y direction, when the middle beam structure 6 undergoes thermal deformation, the second flexible member 5 undergoes flexible deformation along the y direction to compensate for the thermal deformation of the middle beam structure 6, thereby also reducing the Abbe error to a certain extent.

[0062] Furthermore, the first flexible member 4 also has the rigidity for suppressing movement along the x direction, the rigidity for suppressing movement along the z direction, the rigidity for suppressing movement along the Rx direction, and the rigidity for suppressing movement along the Ry direction, and the second flexible member 5 also has the rigidity for suppressing movement along the x direction, the rigidity for suppressing movement along the z direction, and the rigidity for suppressing movement along the Ry direction. Therefore, the natural frequency of the entire motion device can be improved to a certain extent, thereby improving the acceleration performance of the motion device.

[0063] In particular, the first and second linear motors drive the middle beam structure 6 to move along the x-direction. Since the first flexible member 4 has the rigidity to suppress the movement along the x-direction, and the second flexible member 5 has the rigidity to suppress the movement along the x-direction, it is equivalent to ensuring the rigidity along the x-direction. Therefore, even after adding the first flexible member 4 and the second flexible member 5 with decoupling effect, the natural frequency of the motion device along the x-direction can still be guaranteed, and then the first and second linear motors can drive the movement of the middle beam structure 6 along the x-direction to have better acceleration performance, which is helpful to achieve large acceleration and deceleration movement along the x-direction, and improve the motion stability and motion accuracy of the motion device.

[0064] In this embodiment, if Figure 2 As shown, the first flexible member 4 may include an A1 mounting portion 41, an A2 mounting portion 42 and a first flexible connection portion 43. The A1 mounting portion 41 and the A2 mounting portion 42 are arranged opposite to each other, and the first flexible connection portion 43 is located between the A1 mounting portion 41 and the A2 mounting portion 42, and is located at the center of the first flexible member 4 along the x direction. The first flexible connection portion 43 includes a central body 431 and a plurality of flexible springs 432, and the plurality of flexible springs 432 are distributed around the central body 431 and extend along the z direction, so that the first flexible member 4 has flexibility to move along the Rz direction, and also has rigidity to inhibit movement along the z direction, rigidity to inhibit movement along the Rx direction, and rigidity to inhibit movement along the Ry direction. Figure 2The central body 431 shown in the figure is a six-sided star-shaped prism structure, and the central body 431 can also be other regular polygonal prism structures or cylindrical structures, etc. And the flexible spring 432 can be a symmetrical arc-shaped spring, that is, the thickness of the flexible spring 432 decreases from its two ends to the middle.

[0065] Among them, all flexible springs 432 are divided into a first group and a second group. The first group of flexible springs 432 connects the central body 431 and the A1 mounting portion 41, and the second group of flexible springs 432 connects the central body 431 and the A2 mounting portion 42. The number of flexible springs 432 in each group is greater than or equal to two.

[0066] A plane parallel to the yOz plane and passing through the center of the center body 431 is defined as the first center plane. The first flexible connection portion 43 has a symmetrical structure about the first center plane, which not only enables the first flexible member 4 to have the rigidity to suppress movement along the x direction, but also enhances the rigidity of the first flexible member 4 along the x direction through the symmetrical structure.

[0067] In this embodiment, a plane parallel to the xOz plane and passing through the center of the center body 431 is defined as the second center plane, and the first flexible connection portion 43 is symmetrical about the second center plane, so that when the first flexible member 4 moves along the Rz direction, the deformation of the A1 mounting portion 41 and the A2 mounting portion 42 along the Rz direction can be kept as symmetrical as possible.

[0068] In this embodiment, if Figure 2 As shown, the first group of flexible reeds 432 may include a first y-direction flexible reed Y1 extending along the y-direction, and the second group of flexible reeds 432 may include a second y-direction flexible reed Y2 extending along the y-direction, and the extension direction of the first y-direction flexible reed Y1 coincides with the extension direction of the second y-direction flexible reed Y2 along the y-direction, thereby making the first flexible member 4 have rigidity that inhibits movement along the y-direction.

[0069] In this embodiment, if Figure 6 As shown, the second flexible member 5 includes a B1 mounting portion 51, a B2 mounting portion 52 and a second flexible connecting portion 53. The B1 mounting portion 51 is arranged opposite to the B2 mounting portion 52, and the second flexible connecting portion 53 is located between the B1 mounting portion 51 and the B2 mounting portion 52. The first end of the B1 mounting portion 51 is opposite to the first end of the B2 mounting portion 52, and the second end of the B1 mounting portion 51 is opposite to the second end of the B2 mounting portion 52.

[0070] The first end of the B1 mounting portion 51 is provided with a B11 extension portion 511 extending toward the first end of the B2 mounting portion 52, and the second end of the B2 mounting portion 52 is provided with a B21 extension portion 521 extending toward the second end of the B1 mounting portion 51. One end of the second flexible connection portion 53 is connected to the B11 extension portion 511, and the other end is connected to the B21 extension portion 521. The second flexible connection portion 53 includes at least one or more sections of a leaf spring structure 531 perpendicular to the y direction and extending along the x direction, so that the second flexible member 5 has flexibility in moving along the Rz direction and flexibility in moving along the y direction, and also has rigidity in suppressing movement along the x direction, rigidity in suppressing movement along the z direction, and rigidity in suppressing movement along the Ry direction.

[0071] In this embodiment, if Figure 6 As shown, the second flexible connection portion 53 may include multiple sections of spring structures 531 and multiple sections of transition bodies 532, which are alternately connected. The spring structures 531 are preferably symmetrical arc-shaped springs, that is, the thickness of the spring structures 531 decreases from both ends to the middle.

[0072] In this embodiment, the length of the reed structure 531 of the second flexible connection portion 53 along the x direction can be smaller than the length of the transition body 532 along the x direction, and the thickness of the reed structure 531 along the y direction is smaller than the thickness of the transition body 532 along the y direction, so that deformation is concentrated at the reed structure 531. Embodiment 2

[0073] This embodiment provides a motion device. Different from the first embodiment, the first flexible member 4 of this embodiment has better flexibility in moving along the Rz direction than the first flexible member 4 of the first embodiment.

[0074] Specifically, Figure 3 As shown, the first end of the A1 mounting portion 41 is opposite to the first end of the A2 mounting portion 42, and the second end of the A1 mounting portion 41 is opposite to the second end of the A2 mounting portion 42. The first end of the A1 mounting portion 41 is provided with an A1 extension portion 411 extending toward the first end of the A2 mounting portion 42; the second end of the A2 mounting portion 42 is provided with an A2 extension portion 421 extending toward the second end of the A1 mounting portion 41.

[0075] The first group of flexible reeds 432 includes a first x-direction flexible reed X1 extending along the x-direction, the first x-direction flexible reed X1 connects the central body 431 and the A1 extension portion 411, and the two sides of the first x-direction flexible reed X1 respectively form a slot structure 433 extending along the x-direction between the A1 mounting portion 41 and the A2 mounting portion 42. The second group of flexible reeds 432 includes a second x-direction flexible reed X2 extending along the x-direction, the second x-direction flexible reed X2 connects the central body 431 and the A2 extension portion 421, and the two sides of the second x-direction flexible reed X2 also respectively form a slot structure 433 extending along the x-direction between the A1 mounting portion 41 and the A2 mounting portion 42. The extension direction of the first x-direction flexible reed X1 and the second x-direction flexible reed X2 in the x-direction overlaps.

[0076] Among them, the first x-direction flexible reed X1 and the second x-direction flexible reed X2 are equivalent to extended versions of flexible reeds, and groove structures 433 extending along the x-direction are formed on both sides of the first x-direction flexible reed X1, and groove structures 433 extending along the x-direction are formed on both sides of the second x-direction flexible reed X2, providing more sufficient deformation space for the deformation of the first flexible part 4 along the Rz direction, thereby increasing the flexibility of the first flexible part 4 moving along the Rz direction.

[0077] In addition, the groove structure 433 can also limit the maximum amount of flexible deformation of the first flexible member 4 along the Rz direction, thereby preventing excessive deformation of the first flexible member 4 along the Rz direction.

[0078] Furthermore, the first x-direction flexible spring piece X1 and the second x-direction flexible spring piece X2 overlap in their extending directions along the x-direction, thereby still ensuring strong rigidity in the x-direction.

[0079] In this embodiment, if Figure 3 As shown, the first x-direction flexible reed X1 may include a strip portion extending along the x-direction, one end of the strip portion is connected to the A1 extension portion 411 through a flexible reed along the x-direction, and the other end is also connected to the central body 431 through a flexible reed along the x-direction. The second x-direction flexible reed X2 has the same structure as the first x-direction flexible reed X1, and also includes a strip portion extending along the x-direction, one end of the strip portion is connected to the A2 extension portion 421 through a flexible reed along the x-direction, and the other end is also connected to the central body 431 through a flexible reed along the x-direction. Embodiment 3

[0080] This embodiment provides a motion device. Different from the first embodiment, the first flexible member 4 of this embodiment has better flexibility in moving along the Rz direction than the first flexible member 4 of the first embodiment.

[0081] Specifically, Figure 4 and Figure 5As shown, the central body 431 may be a strip structure extending along the x direction, one side of the strip structure along the y direction is connected to the A1 mounting portion 41 through a first group of flexible springs 432, and the other side of the strip structure along the y direction is connected to the A2 mounting portion 42 through a second group of flexible springs 432. The structure of the flexible springs 432 in the first embodiment is different from that in the first embodiment, where the flexible springs 432 are arc-shaped springs with a symmetrical structure, while the flexible springs 432 in this embodiment are sheet-shaped springs, thus further reducing the stiffness of the first flexible member 4 along the Rz direction to a certain extent, and even making the first flexible member 4 have better flexibility in moving along the Rz direction.

[0082] In this embodiment, if Figure 4 As shown, the extension direction of each flexible spring piece 432 forms a predetermined angle with the y direction, so that while ensuring that the first flexible component 4 has great rigidity along the X direction, along the Z direction, along the Rx direction, and along the Ry direction, the first flexible component 4 can also have a smaller rigidity along the y direction, that is, the first flexible component 4 has the flexibility to move along the y direction, thereby the first flexible component 4 can also buffer the thermal deformation of the center beam structure 6 along the y direction.

[0083] In this embodiment, if Figure 5 As shown, the first group of flexible reeds 432 may include a first y-direction flexible reed Y1 extending along the y-direction, and the second group of flexible reeds 432 may include a second y-direction flexible reed Y2 extending along the y-direction, and the extension direction of the first y-direction flexible reed Y1 coincides with the extension direction of the second y-direction flexible reed Y2 along the y-direction, thereby making the first flexible member 4 have rigidity that inhibits movement along the y-direction. Embodiment 4

[0084] This embodiment provides a motion device. Different from any one of the first to third embodiments, the second flexible member 5 of this embodiment can also have the flexibility to move along the Rx direction.

[0085] Specifically, Figure 7 As shown, the second flexible connection portion 53 of the second flexible member 5 includes a whole section of sheet-shaped reed structure 531, one end of the reed structure 531 is connected to the B11 extension portion 511, and the other end is connected to the B21 extension portion 521. The whole section of sheet-shaped reed structure 531 not only enables the second flexible member 5 to have greater flexibility in moving along the Rz direction and the y direction, but also enables the second flexible member 5 to have less rigidity in the Rx direction, that is, the second flexible member 5 has slight flexibility in moving along the Rx direction.

[0086] In this embodiment, if Figure 7As shown, the thickness of the reed structure 531 can decrease from both ends to the middle, with the middle position being the thinnest part, so as to make the flexible deformation along the Rz direction, the flexible deformation along the y direction, and the flexible deformation along the Rx direction as centrally symmetrical as possible about the center position of the reed structure 531 to make the deformation more coordinated. Embodiment 5

[0087] This embodiment provides a motion device. Different from the first or fourth embodiment, the second flexible member 5 of this embodiment is provided with a special structure for limiting the maximum deformation along the y direction and limiting the maximum deformation along the Rz direction.

[0088] Specifically, Figure 6 and Figure 7 As shown, the second end of the B1 mounting portion 51 of the second flexible member 5 is provided with a B12 extension portion 512 extending toward the first end of the B2 mounting portion 52; the first end of the B2 mounting portion 52 is provided with a B22 extension portion 522 extending toward the first end of the B1 mounting portion 51. Along the x direction, the B11 extension portion 511 and the B21 extension portion 521 are located between the B22 extension portion 522 and the B12 extension portion 512.

[0089] A limiting structure 54 is provided between the B11 extension 511 and the B22 extension 522, and a limiting structure 54 is also provided between the B12 extension 512 and the B21 extension 521. The limiting structure 54 has a preset displacement along the y direction, and is used to limit the deformation of the second flexible member 5 along the y direction.

[0090] In this embodiment, if Figure 8 As shown, the limiting structure 54 may include a groove 541 and a protrusion 542. Between the B11 extension 511 and the B22 extension 522, one of the B11 extension 511 and the B22 extension 522 is provided with a groove 541, and the other is provided with a protrusion 542. Between the B12 extension 512 and the B21 extension 521, one of the B12 extension 512 and the B21 extension 521 is provided with a groove 541, and the other is provided with a protrusion 542. In each limiting structure 54, the protrusion 542 is inserted into the groove 541, and there is a preset gap between the protrusion 542 and the inner wall of the groove 541 on both sides along the y direction.

[0091] The gap between the protrusion 542 and the groove 541 of the limiting structure 54 along the y direction limits the maximum deformation of the second flexible member 5 along the y direction and the maximum deformation of the second flexible member 5 along the Rz direction, thereby preventing the second flexible member 5 from excessively deforming along the y direction and the Rz direction. Embodiment 6

[0092] This embodiment provides a motion device, which is different from any one of the first to fifth embodiments in that the movers and stators of the first linear motor 2 and the second linear motor 3 of this embodiment are connected by air floating.

[0093] Specifically, Figure 1 , Fig. 9 and Fig.10 As shown, the first linear motor 2 and the second linear motor 3 have the same structure, the stator includes a fixed guide rail 101, the mover is an air-floating slider 102 arranged on the fixed guide rail 101, and a driving component 103 is installed on the stator for driving the mover to move along the stator.

[0094] In this embodiment, if Figure 1 As shown, the fixed guide rail 101 is suspended and fixed by the gantry column 104. Fig. 9 and Fig.10 As shown, the air-floating slider 102 is sleeved on the fixed guide rail 101, and the air-floating slider 102 is formed by splicing a top air-floating block 1021, a bottom air-floating block 1022, a first lateral air-floating block 1023, and a second lateral air-floating block 1024. The top air-floating block 1021 is located on the upper side of the fixed guide rail 101, the bottom air-floating block 1022 is located on the lower side of the fixed guide rail 101, and the first lateral air-floating block 1023 and the second lateral air-floating block 1024 are respectively located on both sides of the fixed guide rail 101, that is, the air-floating slider 102 composed of four air-floating blocks is distributed in a "U" shape with the fixed guide rail 101.

[0095] In this embodiment, if Fig.12 As shown, the surface of the top air flotation block 1021 facing the fixed guide rail 101 is provided with an air flotation surface S1 and a vacuum preload surface S2; the surface of the bottom air flotation block 1022 facing the fixed guide rail 101 is provided with an air flotation surface S1 and a vacuum preload surface S2. The air flotation surface S1 and the vacuum preload surface S2 of the top air flotation block 1021 are symmetrically distributed with the air flotation surface S1 and the vacuum preload surface S2 of the bottom air flotation block 1022.

[0096] In this embodiment, if Fig.11 As shown, the surface of the first lateral air floating block 1023 facing the fixed guide rail 101 is provided with an air floating surface S1 and a vacuum pre-loading surface S2; the surface of the second lateral air floating block 1024 facing the fixed guide rail 101 is provided with an air floating surface S1 and a vacuum pre-loading surface S2. The air floating surface S1 and the vacuum pre-loading surface S2 of the first lateral air floating block 1023 are symmetrically distributed with the air floating surface S1 and the vacuum pre-loading surface S2 of the second lateral air floating block 1024.

[0097] In this embodiment, the air-bearing slider 102 and the fixed guide rail 101 are distributed in a "return" shape. At the same time, the air-bearing surface S1 and the vacuum preloading surface S2 of the top air-bearing block 1021 are symmetrically distributed with the air-bearing surface S1 and the vacuum preloading surface S2 of the bottom air-bearing block 1022, and the air-bearing surface S1 and the vacuum preloading surface S2 of the first lateral air-bearing block 1023 are symmetrically distributed with the air-bearing surface S1 and the vacuum preloading surface S2 of the second lateral air-bearing block 1024. Therefore, the pressures of the top air-bearing block 1021 and the bottom air-bearing block 1022 on the fixed guide rail 101 cancel each other out, and the pressures of the first lateral air-bearing block 1023 and the second lateral air-bearing block 1024 on the fixed guide rail 101 cancel each other out, which helps to solve the deformation problem of the air-bearing guide rail structure.

[0098] In this embodiment, as Figures 9 to 12 shown, the extending direction of the fixed guide rail 101 is defined as the m direction, the direction perpendicular to the m direction and parallel to the surface of the fixed guide rail 101 is defined as the n direction, and the straight line along the m direction and passing through the central position of the top air-bearing block 1021 along the n direction is defined as the structural center line L.

[0099] Among them, as Fig.12 shown, the top air-bearing block 1021 may include a first region M1 and a second region M2 that are symmetrically distributed with respect to the structural center line L. Both the first region M1 and the second region M2 respectively include the air-bearing surface S1 and the vacuum preloading surface S2 that are alternately distributed along the m direction. In the n direction, the air-bearing surface S1 of the first region M1 is opposite to the vacuum preloading surface S2 of the second region M2, and the vacuum preloading surface S2 of the first region M1 is opposite to the air-bearing surface S1 of the second region M2. The structure of the bottom air-bearing block 1022 is the same as that of the top air-bearing block 1021. That is, the air-bearing surface S1 and the vacuum preloading surface S2 on the top air-bearing block 1021 and the bottom air-bearing block 1022 are respectively distributed in an approximate "pin" shape. The setting of this uniformly distributed positive pressure and vacuum region also helps to reduce the local deformation of the air-bearing guide rail structure.

[0100] As Fig.11 shown, the first lateral air-bearing block 1023 may include a vacuum preloading surface S2 in the middle and air-bearing surfaces S1 on both sides of the vacuum preloading surface S2 along the m direction. The structure of the second lateral air-bearing block 1024 is the same as that of the first lateral air-bearing block 1023.

[0101] The above are only some embodiments of the present application and are not used to limit the present application. For those skilled in the art, the present application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A sports device, characterized in that: include: A base (1) having a surface extending in the x direction and in the y direction; wherein the direction perpendicular to the surface of the base (1) is the z direction, the direction rotating around the axis in the z direction is the Rz direction, the direction rotating around the axis in the x direction is the Rx direction, and the direction rotating around the axis in the y direction is the Ry direction; A first linear motor (2) and a second linear motor (3) are mounted on the surface of the base (1) in a manner parallel to the x-direction and spaced apart by a predetermined distance; A flexible component, comprising a first flexible member (4) and a second flexible member (5); a middle beam structure (6), a first end of which is connected to the mover of the first linear motor (2) via the first flexible member (4), and a second end of which is connected to the mover of the second linear motor (3) via the second flexible member (5); The first flexible member (4) has flexibility for movement in the Rz direction, rigidity for inhibiting movement in the x direction, rigidity for inhibiting movement in the z direction, rigidity for inhibiting movement in the Rx direction, and rigidity for inhibiting movement in the Ry direction; The second flexible member (5) has flexibility for movement along the Rz direction, flexibility for movement along the y direction, rigidity for inhibiting movement along the x direction, rigidity for inhibiting movement along the z direction, and rigidity for inhibiting movement along the Ry direction.

2. The exercise device according to claim 1, characterized in that The first flexible member (4) comprises an A1 mounting portion (41), an A2 mounting portion (42) and a first flexible connecting portion (43); The A1 mounting portion (41) and the A2 mounting portion (42) are arranged opposite to each other, and the first flexible connection portion (43) is located between the A1 mounting portion (41) and the A2 mounting portion (42), and is located at a central position of the first flexible member (4) along the x-direction; The first flexible connection portion (43) comprises a central body (431) and a plurality of flexible reeds (432), wherein the plurality of flexible reeds (432) are distributed around the central body (431) and extend along the z direction; All the flexible reeds (432) are divided into a first group and a second group, the first group of flexible reeds (432) connecting the central body (431) and the A1 mounting portion (41), and the second group of flexible reeds (432) connecting the central body (431) and the A2 mounting portion (42); wherein the number of the flexible reeds (432) in each group is greater than or equal to two; A plane parallel to the yOz plane and passing through the center of the central body (431) is defined as a first central plane, and the first flexible connection portion (43) is symmetrically structured with respect to the first central plane; A plane parallel to the xOz plane and passing through the center of the central body (431) is defined as a second central plane, and the first flexible connecting portion (43) is symmetrically structured with respect to the second central plane.

3. The exercise device according to claim 2, characterized in that: The first group of flexible reeds (432) comprises a first y-direction flexible reed (Y1) extending along the y-direction; The second group of flexible reeds (432) includes a flexible reed extending along the y direction, referred to as a second y-direction flexible reed (Y2); The first y-direction flexible reed (Y1) and the second y-direction flexible reed (Y2) overlap in their extension direction along the y direction.

4. The sports device according to claim 2 or 3, characterized in that: The first end of the A1 mounting portion (41) is opposite to the first end of the A2 mounting portion (42), and the second end of the A1 mounting portion (41) is opposite to the second end of the A2 mounting portion (42); The first end of the A1 mounting portion (41) is provided with an A1 extension portion (411) extending towards the first end of the A2 mounting portion (42); the second end of the A2 mounting portion (42) is provided with an A2 extension portion (421) extending towards the second end of the A1 mounting portion (41); The first group of flexible reeds (432) comprises a first x-direction flexible reed (X1) extending along the x-direction, the first x-direction flexible reed (X1) connecting the central body (431) and the A1 extension portion (411), and two sides of the first x-direction flexible reed (X1) respectively forming a groove structure (433) extending along the x-direction between the A1 mounting portion (41) and the A2 mounting portion (42); The second group of flexible reeds (432) includes a second x-direction flexible reed (X2) extending along the x-direction, the second x-direction flexible reed (X2) connecting the central body (431) and the A2 extension portion (421), and the two sides of the second x-direction flexible reed (X2) respectively form a groove structure (433) extending along the x-direction between the A1 mounting portion (41) and the A2 mounting portion (42); The first x-direction flexible reed (X1) and the second x-direction flexible reed (X2) overlap in their extension direction along the x direction.

5. The exercise device according to claim 2, characterized in that: The central body (431) is a strip-shaped structure extending along the x-direction; one side of the strip-shaped structure along the y-direction is connected to the A1 mounting portion (41) via a first group of flexible spring sheets (432); and the other side of the strip-shaped structure along the y-direction is connected to the A2 mounting portion (42) via a second group of flexible spring sheets (432); Wherein, the extension direction of each flexible spring sheet (432) forms a predetermined angle with the y direction.

6. The exercise device according to claim 1, characterized in that: The second flexible member (5) comprises a B1 mounting portion (51), a B2 mounting portion (52) and a second flexible connecting portion (53); The B1 mounting portion (51) and the B2 mounting portion (52) are arranged opposite to each other, and the second flexible connection portion (53) is located between the B1 mounting portion (51) and the B2 mounting portion (52); The first end of the B1 mounting portion (51) is opposite to the first end of the B2 mounting portion (52), and the second end of the B1 mounting portion (51) is opposite to the second end of the B2 mounting portion (52); The first end of the B1 mounting portion (51) is provided with a B11 extension portion (511) extending towards the first end of the B2 mounting portion (52); the second end of the B2 mounting portion (52) is provided with a B21 extension portion (521) extending towards the second end of the B1 mounting portion (51); One end of the second flexible connection portion (53) is connected to the B11 extension portion (511), and the other end is connected to the B21 extension portion (521); The second flexible connection portion (53) comprises at least one or more sections of spring leaf structures (531) perpendicular to the y-direction and extending along the x-direction.

7. The exercise device according to claim 6, characterized in that The second flexible connection portion (53) comprises multiple sections of leaf spring structures (531) and multiple sections of transition bodies (532), and the multiple sections of leaf spring structures (531) and the multiple sections of transition bodies (532) are alternately connected.

8. The exercise device according to claim 6, characterized in that: The second flexible connection portion (53) comprises a whole section of sheet-shaped reed structure (531), one end of the reed structure (531) being connected to the B11 extension portion (511) and the other end being connected to the B21 extension portion (521).

9. The sports device according to any one of claims 6 to 8, characterized in that The second end of the B1 mounting portion (51) is provided with a B12 extension portion (512) extending towards the first end of the B2 mounting portion (52); the first end of the B2 mounting portion (52) is provided with a B22 extension portion (522) extending towards the first end of the B1 mounting portion (51); Along the x direction, the B11 extension portion (511) and the B21 extension portion (521) are located between the B22 extension portion (522) and the B12 extension portion (512); A limiting structure (54) is provided between the B11 extension portion (511) and the B22 extension portion (522), and a limiting structure (54) is also provided between the B12 extension portion (512) and the B21 extension portion (521); The limiting structure (54) has a preset displacement amount for moving forward and backward along the y direction, and is used to limit the deformation amount of the second flexible member (5) along the y direction.

10. The exercise device according to claim 9, characterized in that The limiting structure (54) comprises a groove and a protrusion; Between the B11 extension portion (511) and the B22 extension portion (522), one of the B11 extension portion (511) and the B22 extension portion (522) is provided with the groove, and the other is provided with the protrusion; Between the B12 extension portion (512) and the B21 extension portion (521), one of the B12 extension portion (512) and the B21 extension portion (521) is provided with the groove, and the other is provided with the protrusion; Wherein, in each of the limiting structures (54), the protrusion is inserted into the groove, and a preset gap exists between the protrusion and the inner wall of the groove on both sides along the y direction.

11. The exercise device according to claim 1, characterized in that: The first linear motor (2) and the second linear motor (3) have the same structure, the stator comprises a fixed guide rail (101), and the mover is an air-floating slider (102) arranged on the fixed guide rail (101).

12. The exercise device according to claim 11, characterized in that The middle beam structure (6) is a third linear motor, the first end of the stator of the third linear motor is connected to the mover of the first linear motor (2) through the first flexible member (4), and the second end of the stator is connected to the mover of the second linear motor (3) through the second flexible member (5); The third linear motor has the same structure as the first linear motor (2) and the second linear motor (3).

13. The exercise device according to claim 11 or 12, characterized in that: The fixed guide rail (101) is suspended and fixed, and the air-floating slider (102) is sleeved on the fixed guide rail (101); The air-floating slider (102) is formed by splicing a top air-floating block (1021), a bottom air-floating block (1022), a first lateral air-floating block (1023), and a second lateral air-floating block (1024); The top air floating block (1021) is located on the upper side of the fixed guide rail (101), the bottom air floating block (1022) is located on the lower side of the fixed guide rail (101), and the first lateral air floating block (1023) and the second lateral air floating block (1024) are respectively located on both sides of the fixed guide rail (101).

14. The exercise device according to claim 13, characterized in that The surface of the top air flotation block (1021) facing the fixed guide rail (101) is provided with an air flotation surface (S1) and a vacuum preload surface (S2); the surface of the bottom air flotation block (1022) facing the fixed guide rail (101) is provided with an air flotation surface (S1) and a vacuum preload surface (S2); The air flotation surface (S1) and the vacuum preload surface (S2) of the top air flotation block (1021) are symmetrically distributed with the air flotation surface (S1) and the vacuum preload surface (S2) of the bottom air flotation block (1022); The surface of the first lateral air flotation block (1023) facing the fixed guide rail (101) is provided with an air flotation surface (S1) and a vacuum preload surface (S2); the surface of the second lateral air flotation block (1024) facing the fixed guide rail (101) is provided with an air flotation surface (S1) and a vacuum preload surface (S2); The air flotation surface (S1) and the vacuum preload surface (S2) of the first lateral air flotation block (1023) are symmetrically distributed with the air flotation surface (S1) and the vacuum preload surface (S2) of the second lateral air flotation block (1024).

15. The exercise device according to claim 14, characterized in that The extending direction of the fixed guide rail (101) is defined as the m direction, and the direction perpendicular to the m direction and parallel to the surface of the fixed guide rail (101) is defined as the n direction; A straight line along the m direction and passing through the center position of the top air flotation block (1021) along the n direction is defined as a structural center line L; The top air-floating block (1021) comprises a first area (M1) and a second area (M2) which are symmetrically distributed about the structural center line L, and the first area (M1) and the second area (M2) respectively comprise an air-floating surface (S1) and a vacuum pre-loading surface (S2) which are alternately distributed along the m direction; in the n direction, the air-floating surface (S1) of the first area (M1) is opposite to the vacuum pre-loading surface (S2) of the second area (M2), and the vacuum pre-loading surface (S2) of the first area (M1) is opposite to the air-floating surface (S1) of the second area (M2); The structure of the bottom air flotation block (1022) is the same as that of the top air flotation block (1021); The first lateral air floating block (1023) comprises the vacuum pre-loading surface (S2) located in the middle and the air floating surfaces (S1) located on both sides of the vacuum pre-loading surface (S2) along the m direction; The structure of the second lateral air floating block (1024) is the same as the structure of the first lateral air floating block (1023).

Images