A dimming method, device, electronic device and storage medium

By collecting and verifying the grayscale uniformity data of the test image in the dark field optical system and automatically adjusting the light source equipment, the problem of poor consistency in the imaging effect of the dark field optical system is solved, and the accuracy and efficiency of defect detection are improved.

CN119300215BActive Publication Date: 2025-03-25HANGZHOU BAIZIJIAN TECH CO LTD
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Patent Information

Application Number
CN202411834708.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-12-13
Publication Date
2025-03-25
Estimated Expiration
2044-12-13

AI Technical Summary

Technical Problem

The existing dark field optical system cannot automatically adjust the light source equipment, resulting in poor consistency of imaging effects and affecting the accuracy of defect detection.

Method used

By collecting grayscale uniformity data of the test image in the dark field optical system, verifying its consistency. If it fails, the target parameters will be determined based on the current equipment parameters and grayscale data, and the light source device will be automatically adjusted until the grayscale uniformity requirement is met.

Benefits of technology

It realizes automatic adjustment of the light source equipment of the dark field optical system, improves the consistency of imaging effects, and enhances the accuracy and efficiency of defect detection.

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Abstract

The present invention discloses a dimming method, device, electronic device and storage medium. The method includes: obtaining a test image, determining the grayscale uniformity data of the test image, the test image includes image test areas corresponding to light beams emitted by multiple first light source devices respectively; determining the verification result of the grayscale uniformity data; when the verification result is a verification failure, determining the target device parameters corresponding to each first light source device respectively based on the current device parameters corresponding to each first light source device and the grayscale data of each image test area, and adjusting the corresponding light source device through the target device parameters; obtaining the test images corresponding to the multiple adjusted first light source devices, returning to execute and determine the verification result of the corresponding grayscale uniformity data, until the verification result of the grayscale uniformity data of the current test image is a verification success, and completing the dimming operation. This scheme realizes the automatic adjustment of the light source device and improves the grayscale uniformity of the test image.
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Description

Technical Field

[0001] The present invention relates to the field of data processing technology, and in particular to a dimming method, device, electronic equipment and storage medium. Background Art

[0002] At present, defects on thin film materials can be detected by a dark field optical system. Specifically, the dark field optical system is used to collect images of the thin film material to be detected, and then the collected images are processed to obtain defect detection results. However, the adjustment of the existing dark field optical system is often done manually and cannot be completed automatically. It should be noted that the accuracy of the adjustment of the light source equipment of the dark field optical system seriously affects the consistency of the imaging effect. Therefore, it is necessary to adjust the consistency of the imaging effect corresponding to the dark field optical system before defect detection. The existing technology lacks the adjustment and calibration of the consistency of the imaging effect corresponding to the dark field optical system, which leads to the problem of poor accuracy of subsequent defect detection. Summary of the invention

[0003] The present invention provides a dimming method, device, electronic device and storage medium to solve the problem that a light source device in a dark field optical system cannot be automatically adjusted and the problem that the imaging effect corresponding to the dark field optical system has poor consistency.

[0004] According to one aspect of the present invention, a dimming method is provided, which is applied to a dark field optical system, wherein the dark field optical system comprises: a plurality of first light source devices, an optical lens, and a camera device, wherein a calibration detection object is arranged between the optical lens and the camera device, and the camera device collects a test image formed by light beams emitted by the plurality of first light source devices passing through the optical lens and the calibration detection object in sequence;

[0005] Methods include:

[0006] Acquire a test image and determine grayscale uniformity data of the test image, wherein the test image includes an image test area corresponding to light beams respectively emitted by a plurality of first light source devices;

[0007] Verify the grayscale uniformity data and determine the verification result;

[0008] When the verification result is a verification failure, determining target device parameters respectively corresponding to the multiple first light source devices based on current device parameters respectively corresponding to the multiple first light source devices and grayscale data of each image test area, and adjusting the multiple first light source devices based on the target device parameters respectively corresponding to the multiple first light source devices;

[0009] Acquire test images corresponding to the multiple first light source devices after adjustment, return to execute re-verification of the test images corresponding to the multiple first light source devices after adjustment, until the verification result of the grayscale uniformity data corresponding to the test images corresponding to the multiple first light source devices after adjustment is successful, and complete the dimming operation of the multiple first light source devices.

[0010] Optionally, determining the grayscale uniformity data of the test image includes: determining maximum grayscale data, minimum grayscale data and average grayscale data based on the grayscale data corresponding to the test image; and determining grayscale uniformity data based on the maximum grayscale data, minimum grayscale data and average grayscale data.

[0011] Optionally, grayscale uniformity data is determined based on maximum grayscale data, minimum grayscale data and average grayscale data, including: determining first grayscale deviation data between the maximum grayscale data and the minimum grayscale data, calculating the ratio of the first grayscale deviation data to the average grayscale data, and determining the grayscale uniformity data of the test image based on the ratio.

[0012] Optionally, the grayscale uniformity data is verified to determine the verification result, including: determining whether the grayscale uniformity data meets a preset uniformity threshold; if the grayscale uniformity data meets the preset uniformity threshold, determining the verification result is a successful verification; if the grayscale uniformity data does not meet the preset uniformity threshold, determining the verification result is a failed verification.

[0013] Optionally, target device parameters corresponding to multiple first light source devices are determined based on current device parameters corresponding to multiple first light source devices and grayscale data of each image test area, including: determining second grayscale deviation data corresponding to each image test area based on grayscale data corresponding to each image test area and average grayscale data of the test image; determining device parameter adjustment data of the first light source device corresponding to each image test area based on the second grayscale deviation data corresponding to each image test area and a preset adjustment coefficient, to obtain device parameter adjustment data corresponding to each first light source device; determining target device parameters corresponding to multiple first light source devices based on current device parameters corresponding to multiple first light source devices and device parameter adjustment data corresponding to each first light source device.

[0014] Optionally, the multiple first light source devices also include a control unit; after determining the target device parameters corresponding to the multiple first light source devices respectively based on the current device parameters corresponding to the multiple first light source devices respectively and the grayscale data of each image test area, it includes: transmitting the target device parameters corresponding to the multiple first light source devices respectively to the control units corresponding to the multiple first light source devices respectively, so that the control units corresponding to the multiple first light source devices respectively adjust the corresponding first light source devices.

[0015] Optionally, the dark field optical system also includes: a shielding component and a second light source device, wherein the shielding component is located above the second light source device and below the optical lens, the plane of the calibrated detection object is located below the camera device, the camera device defines a camera scanning area on the plane of the calibrated detection object, the second light source device and multiple first light source devices emit light beams, the light beams sent by the second light source device blocked by the shielding component form a dark field area in the camera scanning area, and the light beams emitted by the multiple first light source devices that are not blocked by the shielding component reach the camera scanning area through the optical lens; the camera device obtains test images corresponding to the multiple first light source devices based on the light beams reaching the camera scanning area.

[0016] According to another aspect of the present invention, a dimming device is provided for use with a plurality of first light source devices in a dark field optical system, comprising:

[0017] A grayscale uniformity data determination module, used to obtain a test image and determine grayscale uniformity data of the test image, wherein the test image includes an image test area corresponding to light beams respectively emitted by a plurality of first light source devices;

[0018] A verification result determination module is used to verify the grayscale uniformity data and determine the verification result;

[0019] a target device parameter determination module, for determining target device parameters respectively corresponding to the plurality of first light source devices based on current device parameters respectively corresponding to the plurality of first light source devices and grayscale data of each image test area when the verification result is a verification failure;

[0020] A light source device adjustment module is used to adjust the multiple first light source devices based on the target device parameters respectively corresponding to the multiple first light source devices; obtain the test images corresponding to the multiple first light source devices after adjustment, return to execute re-verification of the test images corresponding to the multiple first light source devices after adjustment, until the verification result of the grayscale uniformity data corresponding to the test images corresponding to the multiple first light source devices after adjustment is successful, thereby completing the dimming operation of the multiple first light source devices.

[0021] According to another aspect of the present invention, an electronic device is provided, the electronic device comprising:

[0022] at least one processor; and

[0023] a memory communicatively connected to at least one processor; wherein,

[0024] The memory stores a computer program that can be executed by at least one processor. The computer program is executed by the at least one processor so that the at least one processor can execute the dimming method of any embodiment of the present invention.

[0025] According to another aspect of the present invention, a computer-readable storage medium is provided. The computer-readable storage medium stores computer instructions. The computer instructions are used to enable a processor to implement the dimming method of any embodiment of the present invention when executed.

[0026] The technical solution of the embodiment of the present invention is to collect a test image formed by light beams emitted by multiple first light source devices passing through an optical lens and a calibrated detection object in sequence through a camera device in a dark-field optical system, and determine grayscale uniformity data of the test image, wherein the test image includes image test areas corresponding to the light beams respectively emitted by the multiple first light source devices; verify the grayscale uniformity data to determine a verification result; when the verification result is a verification failure, determine the target device parameters respectively corresponding to the multiple first light source devices based on the current device parameters respectively corresponding to the multiple first light source devices and the grayscale data of each image test area, and adjust the multiple first light source devices based on the target device parameters respectively corresponding to the multiple first light source devices; obtain the test images corresponding to the adjusted multiple first light source devices, and return to execute re-verification of the test images corresponding to the adjusted multiple first light source devices until the verification result of the grayscale uniformity data corresponding to the test images corresponding to the adjusted multiple first light source devices is a verification success, thereby completing the dimming operation of the multiple first light source devices. This solution processes test images corresponding to multiple first light source devices, determines the target device parameters corresponding to each first light source device, and adjusts the corresponding first light source devices based on the target device parameters corresponding to each first light source device, so that the verification result of the grayscale uniformity data corresponding to the obtained test image is a successful verification, that is, it realizes automatic adjustment of each first light source device based on the test image, ensures that the grayscale uniformity data of the corresponding test image meets the grayscale uniformity requirement, solves the problem that the light source device in the dark field optical system cannot be automatically adjusted and the problem of poor consistency of the imaging effect corresponding to the dark field optical system, improves the efficiency of the adjustment of the light source device, and enables the dark field optical system to meet the imaging effect consistency requirement.

[0027] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0029] Figure 1is a flow chart of a dimming method provided by Embodiment 1 of the present invention;

[0030] Figure 2 is a schematic structural diagram of a dark field optical system applicable to an embodiment of the present invention;

[0031] Figure 3 is a structural schematic diagram of a dimming device provided in Embodiment 2 of the present invention;

[0032] Figure 4 It is a structural schematic diagram of an electronic device for implementing the dimming method according to an embodiment of the present invention. DETAILED DESCRIPTION

[0033] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0034] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0035] Embodiment 1

[0036] Figure 1 This is a flow chart of a dimming method provided in Embodiment 1 of the present invention. This embodiment is applicable to the case of adjusting a light source device. The method can be executed by a dimming device. The dimming device can be implemented in the form of hardware and / or software. The dimming device can be configured in electronic devices such as computers and servers, as well as light source devices to be adjusted.

[0037] like Figure 1 As shown, the method includes:

[0038] S110 , acquiring a test image, and determining grayscale uniformity data of the test image, wherein the test image includes an image test area corresponding to light beams respectively emitted by a plurality of first light source devices.

[0039] It should be noted that the dimming method proposed in this embodiment is applied to a dark field optical system, which includes: a plurality of first light source devices, an optical lens and a camera device, wherein the calibration detection object is arranged between the optical lens and the camera device, and the camera device collects the test images formed by the light beams emitted by the plurality of first light source devices passing through the optical lens and the calibration detection object in sequence. Optionally, the dark field optical system further includes: a shielding component and a second light source device, wherein the shielding component is located above the second light source device and below the optical lens, the plane of the calibration detection object is located below the camera device, the camera device defines a camera scanning area on the plane of the calibration detection object, the second light source device and the plurality of first light source devices emit light beams, the light beams emitted by the second light source device shielded by the shielding component form a dark field area in the camera scanning area, and the light beams emitted by the plurality of first light source devices not shielded by the shielding component pass through the optical lens to reach the camera scanning area; the camera device obtains the test images corresponding to the plurality of first light source devices based on the light beams reaching the camera scanning area.

[0040] like Figure 2 As shown, the dark field optical system includes a plurality of first light source devices, such as Figure 2Each light source device in the 701 and 703 devices, as well as the optical lens 8 and the camera device 1, exemplarily, each light source device is specifically a lamp bead that can independently emit a light beam; the calibration detection object 3 is set between the optical lens 8 and the camera device 1, and the camera device 1 collects the test image formed by the light beams emitted by multiple first light source devices passing through the optical lens 8 and the calibration detection object 3 in sequence. Among them, the calibration detection object 3 can be specifically understood as an object with certain diffuse scattering properties, and the camera field of view of the camera device 1 is filled by the calibration detection object 3. Exemplarily, white paper can be used as the calibration detection object 3. Since the white paper itself has a certain light transmittance, the gray value distribution after imaging in the camera device 1 can characterize the distribution degree of the intensity of the light cluster of the corresponding light source device. The triangular area 2 formed by the camera device 1 as the vertex and the two end points of the calibration detection object 3 as the vertices is the field of view of the camera device 1. The dark field optical system also includes: a shielding component 9 and a second light source device, a second light source device 702, wherein the various light source devices in 702 can be regarded as a whole, collectively referred to as the second light source device 702, and the light source devices 701 and 703 are distributed on both sides of the second light source device 702, wherein the shielding component 9 is located above the second light source device and below the optical lens 8, the plane of the calibration detection object 3 is located below the camera device 1, and the camera device 1, the calibration detection object 3, the optical lens 8, the shielding component 9 and the second light source device 702 are located on the same central axis 100. The camera device 1 defines a camera scanning area on the plane of the calibration detection object 3, and the second light source device and multiple first light source devices emit light beams. The light beam sent by the second light source device blocked by the shielding component 9 fails to enter the camera device 1 and cannot directly participate in the lighting and imaging, thereby forming a dark field area in the camera scanning area, which is equivalent to providing a dark background for the camera device. It is formed by the dark area 90 formed on the lower surface of the lens by the shielding component 9 blocking the light beam emitted by the second light source device 702; the light beams emitted by the multiple first light source devices that are not blocked by the shielding component 9 reach the camera scanning area through the optical lens 8, and can all participate in the lighting and imaging in the camera scanning area; it should be noted that if there are no defects on the calibration detection object 3, The propagation direction of the light beam emitted by the light source device will not change after passing through the calibration detection object 3, and the light beam cannot enter the camera device. The image formed in the camera device usually presents a lower grayscale. If there is a defect on the calibration detection object, after the light beam passes through the defect on the calibration detection object 3, the light beam that originally did not enter the camera device 1 will enter the camera device 1, thereby presenting a higher grayscale on the image after imaging, thereby realizing the detection of defects. However, if the dark field optical system itself has the problem of imaging inconsistency, the grayscale data presented by the image formed in the photographic device after the light beam emitted by the light source device passes through the calibration detection object 3 does not meet the grayscale value requirements for defect detection, and there is a problem that defects cannot be detected.It should also be noted that, for the brightness of the light zone generated by the light beams emitted by the first light source devices 701 and 703, there is an overall downward trend from the center of the light zone to the edge of the light zone, which will also affect the grayscale uniformity data of the test image. In this embodiment, before defect detection, a material with uniformly distributed defects is used as a calibration detection object, and then the light source device is dimmed so that the test image formed by the light beam emitted by the light source device after passing through the calibration detection object 3 meets the imaging consistency requirement, so as to improve the accuracy of subsequent defect detection. Specifically, the camera device 1 scans the camera scanning area after the light beams emitted by the multiple first light source devices reach the camera scanning area, thereby obtaining the test images corresponding to the multiple first light source devices.

[0041] It should be noted that the number of multiple first light source devices is less than the number of pixels in the test image, and the test image needs to be sampled according to the distribution of the light beams emitted by the multiple first light source devices in the camera scanning area to achieve dimensionality reduction processing of the test image, so that the number of image test areas obtained by the sampling processing is equal to the number of first light source devices, that is, the light beams emitted by the multiple first light source devices correspond to an image test area respectively. Grayscale uniformity data represents the uniformity of the spatial distribution of the grayscale values ​​of each pixel in the test image, and is an indicator data used to determine the consistency of imaging. The grayscale data of each pixel in the test image can be processed by a pre-built grayscale uniformity algorithm to obtain the grayscale uniformity data corresponding to the test image.

[0042] Specifically, after the light beams emitted by the multiple first light source devices reach the camera scanning area, the camera device in the dark field optical system performs an image scan on the camera scanning area to obtain test images corresponding to the multiple first light source devices, and a pre-built grayscale uniformity calculation method is called to process the grayscale data of each pixel in the test image to obtain the grayscale uniformity data corresponding to the test image, wherein the test image includes image test areas corresponding to the light beams emitted by the multiple first light source devices, that is, each first light source device corresponds to an image test area.

[0043] Optionally, determining the grayscale uniformity data of the test image includes: determining maximum grayscale data, minimum grayscale data and average grayscale data based on the grayscale data corresponding to the test image; and determining grayscale uniformity data based on the maximum grayscale data, minimum grayscale data and average grayscale data.

[0044] Specifically, the test image can be processed by an image processing tool to extract the image grayscale distribution data, and the maximum grayscale data, minimum grayscale data and average grayscale data in the grayscale data of each pixel in the test image can be identified according to the image grayscale distribution data. Further, the grayscale uniformity data can be determined according to the maximum grayscale data, the minimum grayscale data and the average grayscale data.

[0045] Optionally, grayscale uniformity data is determined based on maximum grayscale data, minimum grayscale data and average grayscale data, including: determining first grayscale deviation data between the maximum grayscale data and the minimum grayscale data, calculating the ratio of the first grayscale deviation data to the average grayscale data, and determining the grayscale uniformity data of the test image based on the ratio.

[0046] Specifically, the difference between the maximum grayscale data and the minimum grayscale data is calculated, and the obtained difference is used as the first grayscale deviation data. The first grayscale deviation data is divided by the average grayscale data to obtain the ratio of the first grayscale deviation data to the average grayscale data, and the obtained ratio is used as the grayscale uniformity data of the test image. Grayscale uniformity data The calculation formula is as follows:

[0047]

[0048] in, is the maximum grayscale data of each pixel in the test image, is the minimum grayscale data of each pixel in the test image, is the average grayscale data of the test image.

[0049] S120, verifying the grayscale uniformity data and determining the verification result.

[0050] Among them, the verification of grayscale uniformity data is specifically used to verify whether the acquired test image meets the imaging consistency requirements. The corresponding uniformity threshold can be set according to the imaging consistency requirements, and the grayscale uniformity data of the test image is determined according to the set uniformity threshold. It can be set that when the grayscale uniformity data of the test image meets the preset uniformity threshold, it is determined that the verification is successful, otherwise, the verification is unsuccessful. Preferably, the set uniformity threshold can be stored in the configuration information, which can be directly read when performing the verification. Exemplarily, the uniformity threshold can be set to 0.1.

[0051] Specifically, the uniformity threshold is read from the configuration information, and the grayscale uniformity data of the test image is compared with the uniformity threshold to obtain a comparison result. If the comparison result is that the grayscale uniformity data of the test image is less than or equal to the uniformity threshold, then the verification result can be determined to be a successful verification. If the comparison result is that the grayscale uniformity data of the test image is greater than the uniformity threshold, then the verification result can be determined to be a failed verification.

[0052] Optionally, the grayscale uniformity data is verified to determine the verification result, including: determining whether the grayscale uniformity data meets a preset uniformity threshold; if the grayscale uniformity data meets the preset uniformity threshold, determining the verification result is a successful verification; if the grayscale uniformity data does not meet the preset uniformity threshold, determining the verification result is a failed verification.

[0053] Specifically, a uniformity threshold can be pre-set through an interactive interface, and the preset uniformity threshold can be read from the interactive interface. It is determined whether the gray uniformity data meets the preset uniformity threshold. If the judgment result is that the gray uniformity data meets the preset uniformity threshold, the verification result is determined to be a successful verification. If the judgment result is that the gray uniformity data does not meet the preset uniformity threshold, the verification result is determined to be a failed verification. Exemplarily, the preset uniformity threshold can be set to 0.1. If the judgment result is that the gray uniformity data is less than or equal to 0.1, the verification result is determined to be a successful verification. If the judgment result is that the gray uniformity data is greater than 0.1, the verification result is determined to be a failed verification.

[0054] In this embodiment, the grayscale uniformity data is verified to obtain a verification result, which is used to provide a basis for subsequent adjustment of the light source device, helps to achieve automatic adjustment of the light source device, helps to improve the efficiency of adjustment of the light source device, eliminates the need for human intervention, and reduces adjustment errors.

[0055] S130. When the verification result is a verification failure, determine the target device parameters corresponding to the multiple first light source devices respectively based on the current device parameters corresponding to the multiple first light source devices respectively and the grayscale data of each image test area, and adjust the multiple first light source devices based on the target device parameters corresponding to the multiple first light source devices respectively.

[0056] Among them, the target device parameters can be specifically understood as parameters that affect the brightness of the light beam emitted by the first light source device, including but not limited to voltage parameters and current parameters. Preferably, the purpose of dimming the power supply device can be achieved by adjusting the current parameters.

[0057] Specifically, when the verification result is a verification failure, the current device parameters of the corresponding first light source device are collected by the detection device corresponding to each first light source device, including but not limited to the current voltage parameters and the current current parameters, and the pre-built target device parameter determination algorithm is called to process the current device parameters corresponding to the multiple first light source devices and the grayscale data of each image test area, so as to determine the device parameter adjustment amount of each first light source device.

[0058] Optionally, target device parameters corresponding to multiple first light source devices are determined based on current device parameters corresponding to multiple first light source devices and grayscale data of each image test area, including: determining second grayscale deviation data corresponding to each image test area based on grayscale data corresponding to each image test area and average grayscale data of the test image; determining device parameter adjustment data of the first light source device corresponding to each image test area based on the second grayscale deviation data corresponding to each image test area and a preset adjustment coefficient, to obtain device parameter adjustment data corresponding to each first light source device; determining target device parameters corresponding to multiple first light source devices based on current device parameters corresponding to multiple first light source devices and device parameter adjustment data corresponding to each first light source device.

[0059] Among them, the device parameter adjustment data can be specifically understood as the parameter adjustment amount that characterizes the light source device, which can be determined based on the deviation value of the average grayscale data of each image test area relative to the average grayscale data of the test image. The parameter adjustment amounts corresponding to different deviation values ​​are different. The corresponding parameter adjustment amounts are determined specifically according to the deviation value to ensure that the average grayscale data of each image test area can quickly reach the average grayscale data of the test image.

[0060] Specifically, the deviation data between the average grayscale data corresponding to the image test area corresponding to each first power supply device and the average grayscale data of the test image are calculated as the second grayscale deviation data corresponding to the image test area of ​​each first power supply device. In order to obtain suitable device parameter adjustment data more quickly so that the target device parameters in the automatic dimming process can converge quickly, the corresponding adjustment coefficient is set, and the second grayscale deviation data is adjusted according to the set adjustment coefficient to obtain the corresponding device parameter adjustment data. Furthermore, the current device parameters corresponding to each first light source device and the device parameter adjustment data corresponding to each first light source device are summed respectively, and each summation result is determined as the target device parameter corresponding to the corresponding first light source device, wherein the adjustment coefficient can be adjusted according to the actual adjustment situation. Target device parameter of the i-th first light source device The calculation formula is as follows:

[0061] ;

[0062] in, is the current device parameter corresponding to the i-th first light source device, is the preset adjustment coefficient, is the average grayscale data of the current image test area corresponding to the i-th first light source device, is the average grayscale data corresponding to the current test image.

[0063] Optionally, the multiple first light source devices also include a control unit; after determining the target device parameters corresponding to the multiple first light source devices respectively based on the current device parameters corresponding to the multiple first light source devices respectively and the grayscale data of each image test area, it includes: transmitting the target device parameters corresponding to the multiple first light source devices respectively to the control units corresponding to the multiple first light source devices respectively, so that the control units corresponding to the multiple first light source devices respectively adjust the corresponding first light source devices.

[0064] Specifically, a corresponding control unit is provided for each first light source device, and after the target device parameters corresponding to the plurality of first light source devices are determined based on the current device parameters corresponding to the plurality of first light source devices and the grayscale data of each image test area, the obtained target device parameters corresponding to the plurality of first light source devices are transmitted to the corresponding control unit to control the corresponding first light source device to perform dimming. Preferably, after the target device parameters corresponding to the plurality of first light source devices are determined based on the current device parameters corresponding to the plurality of first light source devices and the grayscale data of each image test area, it is possible to first determine whether there is a change in the target device parameters corresponding to the plurality of first light source devices, and the first light source devices with changes can be extracted, and only the target device parameters corresponding to the first light source devices with changes need to be transmitted to the control units corresponding to the corresponding first light source devices, and only the first light source devices with adjustment requirements are adjusted. The target device parameters corresponding to the plurality of first light source devices can also be simultaneously sent to the corresponding control unit to adjust the corresponding first light source devices.

[0065] In this embodiment, target device parameters respectively corresponding to the multiple first light source devices are determined according to current device parameters respectively corresponding to the multiple first light source devices and grayscale data of each image test area, and then the corresponding first light source devices are adjusted according to the target device parameters respectively corresponding to the multiple first light source devices. This realizes determining the target device parameters respectively corresponding to the first light source devices according to image information of the test image, and can effectively complete the dimming processing of the first light source devices according to the test image, so that the brightness of the light source emitted by the first light source device can meet the grayscale uniformity requirement of the test image, thereby ensuring the effectiveness and accuracy of subsequent defect detection results.

[0066] S140, obtaining the test images corresponding to the multiple first light source devices after adjustment, returning to execute re-verification of the test images corresponding to the multiple first light source devices after adjustment, until the verification result of the grayscale uniformity data corresponding to the test images corresponding to the multiple first light source devices after adjustment is successful, thereby completing the dimming operation of the multiple first light source devices.

[0067] Specifically, after adjusting the multiple first light source devices based on the target device parameters respectively corresponding to the multiple first light source devices, the test images corresponding to the adjusted multiple first light source devices are collected by the camera device, and the test images corresponding to the adjusted multiple first light source devices are returned to be verified again to determine the verification results. If the verification result of the grayscale uniformity data corresponding to the test images corresponding to the adjusted multiple first light source devices is a successful verification, the dimming operation of the multiple first light source devices is determined; if the verification result of the grayscale uniformity data corresponding to the test images corresponding to the adjusted multiple first light source devices is a failed verification, the multiple first light source devices need to be re-adjusted until the verification result of the grayscale uniformity data corresponding to the test images corresponding to the adjusted multiple first light source devices is a successful verification, and the dimming operation of the multiple first light source devices is completed.

[0068] In this embodiment, multiple first light source devices are adjusted and calibrated multiple times to ensure that the brightness of the light source emitted by each first light source device can meet the grayscale uniformity requirement of the test image, so as to improve the detection rate of the dark field optical system for defect detection, which helps to improve the accuracy of the detection results obtained by the dark field optical system in subsequent defect detection.

[0069] The technical solution of this embodiment is to collect a test image formed by light beams emitted by multiple first light source devices passing through an optical lens and a calibrated detection object in sequence through a camera device in a dark field optical system, and determine grayscale uniformity data of the test image, wherein the test image includes image test areas corresponding to the light beams emitted by the multiple first light source devices respectively; verify the grayscale uniformity data to determine a verification result; when the verification result is a verification failure, determine the target device parameters corresponding to the multiple first light source devices respectively based on the current device parameters corresponding to the multiple first light source devices respectively and the grayscale data of each image test area, and adjust the multiple first light source devices based on the target device parameters corresponding to the multiple first light source devices respectively; obtain the test images corresponding to the adjusted multiple first light source devices, and return to execute re-verification of the test images corresponding to the adjusted multiple first light source devices until the verification result of the grayscale uniformity data corresponding to the test images corresponding to the adjusted multiple first light source devices is a verification success, thereby completing the dimming operation of the multiple first light source devices. This solution processes test images corresponding to multiple first light source devices, determines the target device parameters corresponding to each first light source device, and adjusts the corresponding first light source devices based on the target device parameters corresponding to each first light source device, so that the verification result of the grayscale uniformity data corresponding to the obtained test image is a successful verification, that is, it realizes automatic adjustment of each first light source device based on the test image, ensures that the grayscale uniformity data of the corresponding test image meets the grayscale uniformity requirement, solves the problem that the light source device in the dark field optical system cannot be automatically adjusted and the problem of poor consistency of the imaging effect corresponding to the dark field optical system, improves the efficiency of the adjustment of the light source device, and enables the dark field optical system to meet the imaging effect consistency requirement.

[0070] Embodiment 2

[0071] Figure 3 Schematic diagram of a dimming device provided in Embodiment 2 of the present invention. The device is applied to a plurality of first light source devices in a dark field optical system, such as Figure 3 As shown, the device comprises:

[0072] A grayscale uniformity data determination module 310 is used to obtain a test image and determine grayscale uniformity data of the test image, wherein the test image includes an image test area corresponding to light beams respectively emitted by a plurality of first light source devices;

[0073] A verification result determination module 320 is used to verify the gray uniformity data and determine the verification result;

[0074] The target device parameter determination module 330 is used to determine the target device parameters corresponding to the plurality of first light source devices respectively based on the current device parameters corresponding to the plurality of first light source devices respectively and the grayscale data of each image test area when the verification result is a verification failure;

[0075] The light source device adjustment module 340 is used to adjust the multiple first light source devices based on the target device parameters respectively corresponding to the multiple first light source devices; obtain the test images corresponding to the multiple first light source devices after adjustment, and return to execute re-verification of the test images corresponding to the multiple first light source devices after adjustment until the verification result of the grayscale uniformity data corresponding to the test images corresponding to the multiple first light source devices after adjustment is successful, thereby completing the dimming operation of the multiple first light source devices.

[0076] The technical solution of this embodiment is to obtain a test image through a grayscale uniformity data determination module to determine the grayscale uniformity data of the test image, wherein the test image includes image test areas corresponding to light beams respectively emitted by multiple first light source devices; the verification result determination module verifies the grayscale uniformity data to determine the verification result; the target device parameter determination module determines the target device parameters respectively corresponding to the multiple first light source devices based on the current device parameters respectively corresponding to the multiple first light source devices and the grayscale data of each image test area when the verification result is a verification failure; the light source device adjustment module adjusts the multiple first light source devices based on the target device parameters respectively corresponding to the multiple first light source devices; obtains the test images corresponding to the adjusted multiple first light source devices, returns to execute re-verification of the test images corresponding to the adjusted multiple first light source devices, until the verification result of the grayscale uniformity data corresponding to the test images corresponding to the adjusted multiple first light source devices is a verification success, and the dimming operation of the multiple first light source devices is completed. This solution processes test images corresponding to multiple first light source devices, determines the target device parameters corresponding to each first light source device, and adjusts the corresponding first light source devices based on the target device parameters corresponding to each first light source device, so that the verification result of the grayscale uniformity data corresponding to the obtained test image is a successful verification, that is, it realizes automatic adjustment of each first light source device based on the test image, ensures that the grayscale uniformity data of the corresponding test image meets the grayscale uniformity requirement, solves the problem that the light source device in the dark field optical system cannot be automatically adjusted and the problem of poor consistency of the imaging effect corresponding to the dark field optical system, improves the efficiency of the adjustment of the light source device, and enables the dark field optical system to meet the imaging effect consistency requirement.

[0077] On the basis of the above embodiment, optionally, the grayscale uniformity data determination module 310 is specifically used to determine the maximum grayscale data, the minimum grayscale data and the average grayscale data based on the grayscale data corresponding to the test image; and determine the grayscale uniformity data based on the maximum grayscale data, the minimum grayscale data and the average grayscale data. The grayscale uniformity data determination module 310 is also specifically used to determine the first grayscale deviation data between the maximum grayscale data and the minimum grayscale data, calculate the ratio of the first grayscale deviation data to the average grayscale data, and determine the grayscale uniformity data of the test image based on the ratio.

[0078] Optionally, the verification result determination module 320 is specifically used to determine whether the grayscale uniformity data meets the preset uniformity threshold; if the grayscale uniformity data meets the preset uniformity threshold, the verification result is determined to be a successful verification; if the grayscale uniformity data does not meet the preset uniformity threshold, the verification result is determined to be a failed verification.

[0079] Optionally, the target device parameter determination module 330 is specifically used to determine second grayscale deviation data corresponding to each image test area based on the grayscale data corresponding to each image test area and the average grayscale data of the test image; determine device parameter adjustment data of the first light source device corresponding to each image test area based on the second grayscale deviation data corresponding to each image test area and a preset adjustment coefficient, and obtain device parameter adjustment data corresponding to each first light source device; determine target device parameters corresponding to multiple first light source devices based on current device parameters corresponding to multiple first light source devices and the device parameter adjustment data corresponding to each first light source device.

[0080] Optionally, the multiple first light source devices also include a control unit; after determining the target device parameters corresponding to the multiple first light source devices respectively based on the current device parameters corresponding to the multiple first light source devices respectively and the grayscale data of each image test area, the light source device adjustment module 340 is specifically used to transmit the target device parameters corresponding to the multiple first light source devices respectively to the control units corresponding to the multiple first light source devices respectively, so that the control units corresponding to the multiple first light source devices respectively adjust the corresponding first light source devices.

[0081] Optionally, the dark field optical system also includes: a shielding component and a second light source device, wherein the shielding component is located above the second light source device and below the optical lens, the plane of the calibrated detection object is located below the camera device, the camera device defines a camera scanning area on the plane of the calibrated detection object, the second light source device and multiple first light source devices emit light beams, the light beams sent by the second light source device blocked by the shielding component form a dark field area in the camera scanning area, and the light beams emitted by the multiple first light source devices that are not blocked by the shielding component reach the camera scanning area through the optical lens; the camera device obtains test images corresponding to the multiple first light source devices based on the light beams reaching the camera scanning area.

[0082] The dimming device provided in the embodiment of the present invention can execute the dimming method provided in any embodiment of the present invention, and has the corresponding functional modules and beneficial effects of the execution method.

[0083] Embodiment 3

[0084] Figure 4 1 is a schematic diagram of the structure of an electronic device provided in Embodiment 3 of the present invention. The electronic device 10 is intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device may also represent various forms of mobile devices, such as personal digital processing, cellular phones, smart phones, wearable devices (such as helmets, glasses, watches, etc.) and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely examples and are not intended to limit the implementation of the present invention described and / or required herein.

[0085] like Figure 4 As shown, the electronic device 10 includes at least one processor 11, and a memory connected to the at least one processor 11, such as a read-only memory (ROM) 12, a random access memory (RAM) 13, etc., wherein the memory stores a computer program that can be executed by at least one processor, and the processor 11 can perform various appropriate actions and processes according to the computer program stored in the read-only memory (ROM) 12 or the computer program loaded from the storage unit 18 to the random access memory (RAM) 13. In the RAM 13, various programs and data required for the operation of the electronic device 10 can also be stored. The processor 11, the ROM 12, and the RAM 13 are connected to each other through a bus 14. The input / output (I / O) interface 15 is also connected to the bus 14.

[0086] A number of components in the electronic device 10 are connected to the I / O interface 15, including: an input unit 16, such as a keyboard, a mouse, etc.; an output unit 17, such as various types of displays, speakers, etc.; a storage unit 18, such as a disk, an optical disk, etc.; and a communication unit 19, such as a network card, a modem, a wireless communication transceiver, etc. The communication unit 19 allows the electronic device 10 to exchange information / data with other devices through a computer network such as the Internet and / or various telecommunication networks.

[0087] The processor 11 may be a variety of general and / or dedicated processing components with processing and computing capabilities. Some examples of the processor 11 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various dedicated artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, a digital signal processor (DSP), and any appropriate processor, controller, microcontroller, etc. The processor 11 executes the various methods and processes described above, such as a dimming method.

[0088] In some embodiments, the dimming method may be implemented as a computer program, which is tangibly contained in a computer-readable storage medium, such as a storage unit 18. In some embodiments, part or all of the computer program may be loaded and / or installed on the electronic device 10 via the ROM 12 and / or the communication unit 19. When the computer program is loaded into the RAM 13 and executed by the processor 11, one or more steps of the dimming method described above may be performed. Alternatively, in other embodiments, the processor 11 may be configured to perform the dimming method in any other appropriate manner (e.g., by means of firmware).

[0089] Various implementations of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field programmable gate arrays (FPGAs), application specific integrated circuits (ASICs), application specific standard products (ASSPs), systems on chips (SOCs), load programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various implementations can include: being implemented in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which can be a special purpose or general purpose programmable processor that can receive data and instructions from a storage system, at least one input device, and at least one output device, and transmit data and instructions to the storage system, the at least one input device, and the at least one output device.

[0090] The computer program for implementing the dimming method of the present invention can be written in any combination of one or more programming languages. These computer programs can be provided to a processor of a general-purpose computer, a special-purpose computer or other programmable data processing device, so that when the computer program is executed by the processor, the functions / operations specified in the flow chart and / or block diagram are implemented. The computer program can be executed completely on the machine, partially on the machine, partially on the machine as an independent software package and partially on a remote machine, or completely on a remote machine or server.

[0091] Embodiment 4

[0092] Embodiment 4 of the present invention further provides a computer-readable storage medium, wherein the computer-readable storage medium stores computer instructions, and the computer instructions are used to enable a processor to execute a dimming method, the method comprising:

[0093] Acquire a test image and determine grayscale uniformity data of the test image, wherein the test image includes an image test area corresponding to light beams respectively emitted by a plurality of first light source devices;

[0094] Verify the grayscale uniformity data and determine the verification result;

[0095] When the verification result is a verification failure, determining target device parameters respectively corresponding to the multiple first light source devices based on current device parameters respectively corresponding to the multiple first light source devices and grayscale data of each image test area, and adjusting the multiple first light source devices based on the target device parameters respectively corresponding to the multiple first light source devices;

[0096] Acquire test images corresponding to the multiple first light source devices after adjustment, return to execute re-verification of the test images corresponding to the multiple first light source devices after adjustment, until the verification result of the grayscale uniformity data corresponding to the test images corresponding to the multiple first light source devices after adjustment is successful, and complete the dimming operation of the multiple first light source devices.

[0097] In the context of the present invention, a computer-readable storage medium may be a tangible medium that may contain or store a computer program for use by or in conjunction with an instruction execution system, device, or equipment. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, devices, or equipment, or any suitable combination of the foregoing. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. A more specific example of a machine-readable storage medium may include an electrical connection based on one or more lines, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.

[0098] To provide interaction with a user, the systems and techniques described herein may be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and a pointing device (e.g., a mouse or trackball) through which the user can provide input to the electronic device. Other types of devices may also be used to provide interaction with the user; for example, the feedback provided to the user may be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user may be received in any form (including acoustic input, voice input, or tactile input).

[0099] The systems and techniques described herein may be implemented in a computing system that includes backend components (e.g., as a data server), or a computing system that includes middleware components (e.g., an application server), or a computing system that includes frontend components (e.g., a user computer with a graphical user interface or a web browser through which a user can interact with implementations of the systems and techniques described herein), or a computing system that includes any combination of such backend components, middleware components, or frontend components. The components of the system may be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include: a local area network (LAN), a wide area network (WAN), a blockchain network, and the Internet.

[0100] A computing system may include a client and a server. The client and the server are generally remote from each other and usually interact through a communication network. The client and server relationship is generated by computer programs running on the corresponding computers and having a client-server relationship with each other. The server may be a cloud server, also known as a cloud computing server or cloud host, which is a host product in the cloud computing service system to solve the defects of difficult management and weak business scalability in traditional physical hosts and VPS services.

[0101] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0102] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A dimming method, characterized in that: Applied to a dark field optical system, the dark field optical system comprises: a plurality of first light source devices, an optical lens and a camera device, the calibration detection object is arranged between the optical lens and the camera device, and the camera device collects a test image formed by light beams emitted by the plurality of first light source devices passing through the optical lens and the calibration detection object in sequence; The method comprises: Acquire the test image, and determine grayscale uniformity data of the test image, wherein the test image includes an image test area corresponding to the light beams respectively emitted by the plurality of first light source devices; Verifying the grayscale uniformity data and determining a verification result; When the verification result is a verification failure, determining target device parameters respectively corresponding to the plurality of first light source devices based on current device parameters respectively corresponding to the plurality of first light source devices and the grayscale data of each of the image test areas, and adjusting the plurality of first light source devices based on the target device parameters respectively corresponding to the plurality of first light source devices; Acquire the test images corresponding to the plurality of first light source devices after adjustment, return to execute re-calibration of the test images corresponding to the plurality of first light source devices after adjustment, until the calibration result of the grayscale uniformity data corresponding to the test images corresponding to the plurality of first light source devices after adjustment is successful, and complete the dimming operation of the plurality of first light source devices; Among them, the dark field optical system also includes: a shielding component and a second light source device, wherein the shielding component is located above the multiple first light source devices and below the optical lens, the plane of the calibration detection object is located below the camera device, and the camera device defines a camera scanning area on the plane of the calibration detection object, the second light source device and the multiple first light source devices emit light beams, the light beams sent by the second light source device that are blocked by the shielding component form a dark field area in the camera scanning area, and the light beams emitted by the multiple first light source devices that are not blocked by the shielding component pass through the optical lens to reach the camera scanning area; the camera device obtains test images corresponding to the multiple first light source devices based on the light beams reaching the camera scanning area.

2. The method according to claim 1, characterized in that Determining the gray uniformity data of the test image includes: Determine maximum grayscale data, minimum grayscale data and average grayscale data based on the grayscale data corresponding to the test image; Grayscale uniformity data is determined based on the maximum grayscale data, the minimum grayscale data and the average grayscale data.

3. The method according to claim 2, characterized in that The determining of grayscale uniformity data based on the maximum grayscale data, the minimum grayscale data and the average grayscale data comprises: Determine first grayscale deviation data between the maximum grayscale data and the minimum grayscale data, calculate a ratio of the first grayscale deviation data to the average grayscale data, and determine grayscale uniformity data of the test image based on the ratio.

4. The method according to claim 1, characterized in that The step of verifying the grayscale uniformity data and determining a verification result includes: Determine whether the grayscale uniformity data meets a preset uniformity threshold; if the grayscale uniformity data meets the preset uniformity threshold, determine that the verification result is a successful verification; if the grayscale uniformity data does not meet the preset uniformity threshold, determine that the verification result is a failed verification.

5. The method according to claim 1, characterized in that The determining the target device parameters respectively corresponding to the plurality of first light source devices based on the current device parameters respectively corresponding to the plurality of first light source devices and the grayscale data of each of the image test areas comprises: Determine second grayscale deviation data corresponding to each of the image test areas based on the grayscale data corresponding to each of the image test areas and the average grayscale data of the test image; Determine the device parameter adjustment data of the first light source devices respectively corresponding to each of the image test areas based on the second grayscale deviation data respectively corresponding to each of the image test areas and the preset adjustment coefficient, and obtain the device parameter adjustment data respectively corresponding to each of the first light source devices; The target device parameters respectively corresponding to the plurality of first light source devices are determined based on the current device parameters respectively corresponding to the plurality of first light source devices and the device parameter adjustment data respectively corresponding to each of the first light source devices.

6. The method according to claim 1, characterized in that The plurality of first light source devices further include a control unit; After determining the target device parameters respectively corresponding to the plurality of first light source devices based on the current device parameters respectively corresponding to the plurality of first light source devices and the grayscale data of each of the image test areas, the method includes: The target device parameters respectively corresponding to the plurality of first light source devices are transmitted to the control units respectively corresponding to the plurality of first light source devices, so that the control units respectively corresponding to the plurality of first light source devices adjust the corresponding first light source devices.

7. A dimming device, characterized in that: A plurality of first light source devices used in a dark field optical system, including: a grayscale uniformity data determination module, configured to acquire a test image and determine grayscale uniformity data of the test image, wherein the test image includes an image test area corresponding to the light beams respectively emitted by the plurality of first light source devices; A verification result determination module, used to verify the gray uniformity data and determine the verification result; a target device parameter determination module, configured to determine target device parameters respectively corresponding to the plurality of first light source devices based on current device parameters respectively corresponding to the plurality of first light source devices and grayscale data of each of the image test areas when the verification result is a verification failure; A light source device adjustment module, configured to adjust the plurality of first light source devices based on target device parameters respectively corresponding to the plurality of first light source devices; obtain test images corresponding to the plurality of first light source devices after adjustment, and return to perform re-verification of the test images corresponding to the plurality of first light source devices after adjustment, until the verification result of the grayscale uniformity data corresponding to the test images corresponding to the plurality of first light source devices after adjustment is successful, thereby completing the dimming operation of the plurality of first light source devices; Wherein, the dark field optical system comprises: a plurality of first light source devices, an optical lens and a camera device, the calibration detection object is arranged between the optical lens and the camera device, and the camera device collects a test image formed by the light beams emitted by the plurality of first light source devices passing through the optical lens and the calibration detection object in sequence; The dark field optical system also includes: a shielding component and a second light source device, wherein the shielding component is located above the multiple first light source devices and below the optical lens, the plane of the calibration detection object is located below the camera device, and the camera device defines a camera scanning area on the plane of the calibration detection object, the second light source device and the multiple first light source devices emit light beams, the light beams sent by the second light source device that are shielded by the shielding component form a dark field area in the camera scanning area, and the light beams emitted by the multiple first light source devices that are not shielded by the shielding component pass through the optical lens to reach the camera scanning area; the camera device obtains test images corresponding to the multiple first light source devices based on the light beams reaching the camera scanning area.

8. An electronic device, characterized in that: The electronic device comprises: at least one processor; and a memory communicatively connected to the at least one processor; wherein, The memory stores a computer program executable by the at least one processor, and the computer program is executed by the at least one processor so that the at least one processor can perform the dimming method according to any one of claims 1 to 6.

9. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer instructions, and the computer instructions are used to enable a processor to implement the dimming method according to any one of claims 1 to 6 when executed.

Citation Information

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