Coil connection, electrode coil connection structure, and semiconductor process equipment

Abstract

The application provides a coil connecting piece, an electrode coil connecting structure and a semiconductor process equipment, and the coil connecting piece comprises: a plurality of supporting arms; a current equalizing part, the current equalizing part has a first end and a second end arranged oppositely, and the second end of the supporting arm is connected to the second end of the current equalizing part; the current equalizing part further has an outer peripheral wall, the outer peripheral wall of the current equalizing part extends from the first end to the second end of the current equalizing part, and all the supporting arms are distributed along the outer peripheral wall of the current equalizing part in a circumferential direction, and the current equalizing part is used for dispersing the current output by the radio frequency source so that the current is uniformly distributed to the supporting arms. The coil connecting piece of the application is provided with the current equalizing part, the distance between the current equalizing part and each supporting arm is basically the same, so that the current can be uniformly distributed to each supporting arm, and the uniformity of the electrode coil current part is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, and more specifically, to a coil connector, an electrode coil connection structure, and semiconductor process equipment. Background Technology

[0002] Deep silicon etching has important applications in integrated circuits, microelectromechanical systems (MEMS), and advanced packaging, and is a crucial process in industrial production. With the rapid development of semiconductor device manufacturing processes, the requirements for device performance and integration are becoming increasingly stringent. Inductively coupled plasma (ICP) sources, with their advantages of high selectivity, high anisotropy, and high etching rate, are widely used in microelectronics processing.

[0003] In existing technology, the upper electrode coil of the etching machine uses an inner and outer double-layer coil to provide radio frequency current, and the double-layer coil structure is located above the ceramic window surface. The upper electrode coil and the matching device are connected by an electrode coil connection structure, which is used to connect the coil and the upper electrode.

[0004] The existing upper electrode coil connection structure uses coil connector 10' to form four links to connect the matching device 1 to the electrode coil. For example... Figure 1 As shown, the matching unit 1 is connected to the inner coil 4 through the first link 2 and the second link 3 to form a loop, and the matching unit 1 is connected to the outer coil 7 through the third link 5 and the fourth link 6 to form a loop.

[0005] like Figure 2 The schematic diagram of the four coil connectors 10' shown illustrates that the four coil connectors 10' form four links. Each coil connector includes one main arm 11' and four branch arms 12'. The main arm 11' is connected to the input or output terminal of the matching unit 1, and the four branch arms 12' are connected to the corresponding electrode coils to achieve RF current shunting. That is, after the RF current flows out from the output interface of the matching unit 1, it is divided into four branch arms 12' symmetrically flowing into the coil assembly via the main arm 11'.

[0006] However, due to the unreasonable design of the coil connectors in the existing technology, the current flowing into the electrode coil is asymmetrical, ultimately causing asymmetrical plasma etching. Therefore, how to distribute the current more evenly to each arm 12' is a problem that urgently needs to be solved in this field. Summary of the Invention

[0007] The present invention aims to solve the problem in the prior art that when current is diverted to the electrode coil, the current in the branch arm closer to the main arm is greater, resulting in uneven current flowing into the electrode coil.

[0008] To address the aforementioned problems, according to a first aspect of the present invention, a coil connector is disclosed for connecting a radio frequency (RF) source and an electrode coil. The coil connector includes: multiple support arms, each with a first end for electrical connection to the electrode coil; a current equalization section having a first end and a second end disposed opposite to each other, the first end of the current equalization section for electrical connection to the RF source, and the second ends of the support arms all connected to the second end of the current equalization section; the current equalization section further has an outer peripheral wall, and all the support arms are circumferentially spaced along the outer peripheral wall of the current equalization section. The current equalization section is used to disperse the current output by the RF source so that the current is evenly distributed to the support arms.

[0009] Furthermore, the flow equalization section is cylindrical, and the axis of the flow equalization section is perpendicular to all the support arms.

[0010] Furthermore, the second ends of all the said arms converge at the second end of the flow equalization section.

[0011] Furthermore, the flow equalization section has a through clearance channel along its axial direction, and the extensions of all the support arms converge on the axis of the flow equalization section.

[0012] Furthermore, the coil connector further includes a main current arm, which is connected to the first end of the current equalization section, and the current equalization section is electrically connected to the radio frequency source through the main current arm.

[0013] Furthermore, the included angles formed between all adjacent arms are equal.

[0014] According to a second aspect of the present invention, an electrode coil connection structure is also disclosed, comprising: the coil connector described above; a shielding shell having a receiving cavity, the shielding shell being electrically connected to the return end of the radio frequency source, and the coil connector being disposed within the receiving cavity.

[0015] Furthermore, the electrode coil includes a first electrode coil, and the coil connector includes: a first coil connector disposed within the receiving cavity, the first coil connector being used to connect the first output terminal of the RF source to the receiving terminal of the first electrode coil; the electrode coil connection structure further includes: a first plug-in post passing through the shielding shell, the first coil connector being electrically connected to the first plug-in post, the first coil connector being electrically connected to the receiving terminal of the first electrode coil through the first plug-in post; a second plug-in post being electrically connected to the shielding shell, the second plug-in post being used to electrically connect to the output terminal of the first electrode coil, and the RF source forming a current loop with the first electrode coil through the first coil connector, the first plug-in post, the second plug-in post, and the shielding shell.

[0016] Furthermore, the first coil connector includes: a first arm, the first end of which is electrically connected to the first plug-in post; a first current equalization section, which is cylindrical, the first end of which is electrically connected to the first output terminal of the radio frequency source, and the second end of the first arm is connected to the second end of the first current equalization section.

[0017] Furthermore, the shielding shell includes a cylindrical body, the first end of which is electrically connected to the return end of the radio frequency source; a shielding plate connected to the second end of the cylindrical body, the cylindrical body and the shielding plate forming the receiving cavity, the shielding plate being electrically connected to the cylindrical body, the first insertion post passing through the shielding plate, and the second insertion post being electrically connected to the shielding plate.

[0018] Furthermore, the electrode coil further includes a second electrode coil, with the first electrode coil located inside the second electrode coil. The coil connector further includes a second coil connector for connecting the second output terminal of the RF source to the receiving terminal of the second electrode coil. The electrode coil connection structure further includes a third plug-in post, which passes through the shielding shell. The second coil connector is electrically connected to the third plug-in post, and the second coil connector is electrically connected to the receiving terminal of the second electrode coil through the third plug-in post. The second plug-in post is also used to connect the return terminal of the RF source to the output terminal of the second electrode coil, so that a current loop is formed between the RF source and the second electrode coil through the second coil connector, the third plug-in post, the second plug-in post, and the shielding shell.

[0019] Furthermore, the second coil connector includes: a second arm, the first end of which is electrically connected to the third plug-in post; a second current equalization section, which is cylindrical, the first end of which is electrically connected to the second output terminal of the RF source, and the second end of the second arm is connected to the second end of the second current equalization section; the second current equalization section is sleeved outside the first current equalization section, and a gap is formed between the second current equalization section and the first current equalization section.

[0020] Furthermore, the electrode coil connection structure further includes: a mounting base, which passes through and is connected to the shielding shell; the first plug-in post passes through both the mounting base and the shielding shell; the first plug-in post is connected to the mounting base; and the first plug-in post and the shielding shell are insulated from each other by the mounting base.

[0021] Furthermore, the electrode coil includes a first electrode coil, and the coil connector includes: a first coil connector for connecting the first output terminal of the radio frequency source to the receiving terminal of the first electrode coil; and a third coil connector for connecting the return terminal of the radio frequency source to the output terminal of the first electrode coil, so that a current loop is formed between the radio frequency source and the first electrode coil.

[0022] Furthermore, the first coil connector includes: a first arm, the first end of which is electrically connected to the receiving end of the first electrode coil; a first current sharing section, which is cylindrical, the first end of which is electrically connected to the first output end of the radio frequency source, and the second end of the first arm is connected to the second end of the first current sharing section.

[0023] Furthermore, the third coil connector includes: a third arm, the first end of which is electrically connected to the output end of the first electrode coil; a third current equalization section, which is cylindrical, the first end of which is electrically connected to the return end of the radio frequency source, and the second end of the third arm is connected to the second end of the third current equalization section; the third current equalization section is sleeved outside the first current equalization section, and a gap is formed between the third current equalization section and the first current equalization section.

[0024] Furthermore, the electrode coil further includes a second electrode coil, with the first electrode coil located inside the second electrode coil. The coil connector further includes a second coil connector for connecting the second output terminal of the RF source to the receiving terminal of the second electrode coil, with the first electrode coil located inside the second electrode coil. The third coil connector is also used to connect the return terminal of the RF source to the output terminal of the second electrode coil, so that a current loop is formed between the RF source and the second electrode coil.

[0025] Further, the second coil connector includes: a second arm, the first end of which is electrically connected to the receiving end of the second electrode coil; a second current equalization section, which is cylindrical, the first end of which is electrically connected to the second output of the radio frequency source, and the second end of the second arm is connected to the second end of the second current equalization section; the second current equalization section is sleeved outside the third current equalization section, and a gap is formed between the second current equalization section and the third current equalization section; the first end of the third arm is also electrically connected to the output end of the second electrode coil.

[0026] According to a third aspect of the present invention, a semiconductor process apparatus is also disclosed, comprising: a housing having a mounting cavity; and the aforementioned electrode coil connection structure disposed within the mounting cavity.

[0027] The coil connector of the present invention, by providing a current equalization section, allows the radio frequency current output from the radio frequency source to flow from the first end to the second end of the current equalization section after the coil connector is assembled. Due to the skin effect, the radio frequency current will also diffuse along the outer peripheral wall of the current equalization section during the process of flowing to the second end. Moreover, since each arm is connected to the second end of the current equalization section and is arranged circumferentially on the outer peripheral wall of the current equalization section, the distance between the current equalization section and each arm is basically the same, thereby allowing the current to be evenly distributed to each arm and improving the uniformity of the current portion of the electrode coil. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the electrode coil connection structure in the prior art;

[0029] Figure 2 This is a schematic diagram of the structure of a coil connector in the prior art;

[0030] Figure 3 This is an assembly drawing of the electrode coil connection structure in the prior art;

[0031] Figure 4 This is a current distribution diagram for coil connectors in the prior art;

[0032] Figure 5 This is a schematic diagram of the coil connector according to Embodiment 1 of the present invention;

[0033] Figure 6 This is a schematic diagram of the coil connector according to Embodiment 2 of the present invention;

[0034] Figure 7 This is a top view of the coil connector according to Embodiment 2 of the present invention;

[0035] Figure 8 This is a schematic diagram of the electrode coil connection structure according to Embodiment 3 of the present invention;

[0036] Figure 9 This is a schematic diagram of the electrode coil connection structure according to Embodiment 4 of the present invention;

[0037] Figure 10 This is an exploded view of the electrode coil connection structure of Embodiment 4 of the present invention;

[0038] Figure 11 This is an assembly diagram of the cylindrical body and shielding plate of the electrode coil connection structure according to Embodiment 4 of the present invention;

[0039] Figure 12 This is an assembly drawing of the shielding plate, mounting base, and coil connector of the electrode coil connection structure according to Embodiment 4 of the present invention;

[0040] Figure 13 This is a cross-sectional view of the electrode coil connection structure according to Embodiment 4 of the present invention, and an assembly diagram of the shielding plate, mounting base, first plug-in post, second plug-in post, and third plug-in post.

[0041] Figure 14 This is an equivalent circuit diagram of the electrode coil connection structure in Embodiment 4 of the present invention;

[0042] Figure 15 This is a cross-sectional view of the electrode coil connection structure according to Embodiment 4 of the present invention;

[0043] Figure 16a This refers to etching rate data for existing etching machines.

[0044] Figure 16b This is a graph showing the etching rate of a semiconductor process apparatus employing the electrode coil connection structure of Embodiment 4 of the present invention.

[0045] Figure 17a This refers to the eccentricity data of etching machines in existing technologies;

[0046] Figure 17b This refers to the eccentricity data of a semiconductor process equipment employing the electrode coil connection structure of Embodiment 4 of the present invention;

[0047] Figure 18 This is a schematic diagram of the electrode coil connection structure according to Embodiment 5 of the present invention;

[0048] Figure 19 This is a schematic diagram of the electrode coil connection structure according to Embodiment Six of the present invention;

[0049] List of reference numerals in the attached diagram:

[0050] 10. Coil connector; 11. Support arm; 12. Current equalization section; 121. Clearance channel; 13. Main current arm; 10a. First coil connector; 11a. First support arm; 12a. First current equalization section; 10b. Second coil connector; 11b. Second support arm; 12b. Second current equalization section; 121b. Second clearance channel; 13b. Second main current arm; 10c. Third coil connector; 11c. Third support arm; 12c. Third current equalization section; 121c. Third clearance channel; 20. Matching device; 30. Electrode coil; 31. First electrode coil; 32. Second electrode coil; 40. Shielding shell; 41. Cylinder; 42. Shielding plate; 50. First insertion post; 60. Second insertion post; 70. Third insertion post; 80. Mounting base. Detailed Implementation

[0051] To enable those skilled in the art to better understand the technical solutions of the present invention, the coil connector, electrode coil connection structure, and semiconductor process equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0052] The existing upper electrode coil connection structure uses coil connectors to form four links to connect the matching device 1 to the electrode coil. For example... Figure 1 As shown, the matching unit 1 is connected to the inner coil 4 through the first link 2 and the second link 3 to form a loop, and the matching unit 1 is connected to the outer coil 7 through the third link 5 and the fourth link 6 to form a loop.

[0053] Figure 2 The system consists of four coil connectors 10' forming four links, with each coil connector 10' forming one link. Each coil connector includes one main arm 11' and four branch arms 12'. The main arm 11' is connected to the input or output of the matching unit 1, and the four branch arms 12' are respectively connected to the corresponding electrode coils to achieve uniform current shunting. After the RF current flows out from the output interface of the matching unit 1, it is divided into four branch arms 12' and flows symmetrically into the coil assembly via the main arm 11'. However, due to the unreasonable setting of the coil connectors in the prior art, the current flowing into the coil is asymmetrical, ultimately causing asymmetry in plasma etching.

[0054] Research has revealed that the unreasonable design of the coil connector 10' in the existing technology is due to the following reasons: Figure 3 As shown, during assembly, the coil connectors need to be stacked. To avoid interfering with other coil connectors 10', the main arm 11' is offset to one side. This results in the main arm 11' having different distances from the four support arms 12'. In other words, as shown... Figure 4 As shown, when the main arm 11' is biased to one side, it will be closer to two of the four supporting arms 12' and farther away from the other two. In this case, when the current flowing out of the output port of the matching unit 1 is shunted to the supporting arms 12' through the main arm 11', the two supporting arms 12' closer to the main arm 11' will have more current, while the two supporting arms 12' farther from the main arm 11' will have less current. This results in an asymmetry in the current flowing into the coil, ultimately causing asymmetry in plasma etching.

[0055] To solve the above problems, such as Figure 5 and Figure 6 As shown, the present invention discloses a coil connector for connecting a radio frequency source and an electrode coil.

[0056] The coil connector includes a support arm 11 and a current sharing section 12. There are multiple support arms 11, and the first end of each support arm 11 is used for electrical connection with the electrode coil 30; the current sharing section 12 has a first end and a second end disposed opposite to each other, the first end of the current sharing section 12 is used for electrical connection with the radio frequency source, and the second end of the support arm 11 is connected to the second end of the current sharing section 12.

[0057] The current equalization section 12 also has an outer peripheral wall that extends from the first end to the second end of the current equalization section 12. All the arms 11 are circumferentially distributed along the outer peripheral wall of the current equalization section 12. The current equalization section 12 is used to disperse the current output by the radio frequency source so that the current is evenly distributed to the arms 11.

[0058] like Figure 5 and Figure 6 As shown, after the coil connector is assembled, the radio frequency current output by the radio frequency source enters the current equalization section 12 and flows from the first end to the second end of the current equalization section 12. Moreover, since each support arm 11 is connected to the second end of the current equalization section 12 and is arranged circumferentially on the outer peripheral wall of the current equalization section 12, the distance between the current equalization section 12 and each support arm 11 is basically the same, so that the current can be evenly distributed to each support arm 11, thereby improving the uniformity of the current portion of the electrode coil 30.

[0059] The coil connector of the present invention will be described in detail below with reference to specific embodiments.

[0060] like Figure 5 The first embodiment of the present invention, as shown, discloses a coil connector comprising: a support arm 11 and a current sharing section 12. The current sharing section 12 is cylindrical, having a first end and a second end disposed opposite to each other. The first end of the cylindrical current sharing section 12 is electrically connected to a matching device 20 and is connected to an RF source via the matching device 20. The second end is used to connect to the support arm 11. There are four support arms 11. The first end of each support arm 11 is electrically connected to an electrode coil 30, and the second end of each support arm 11 is connected to the second end of the cylindrical current sharing section 12. The support arms 11 are spaced apart along the outer side wall of the cylindrical current sharing section 12, and each support arm 11 is perpendicular to the current sharing section 12. In other words, the second ends of the four support arms 11 converge at the second end of the current sharing section 12, forming an X-shaped structure. The axis of the current sharing section 12 is perpendicular to the plane containing the X-shaped structure, thereby reducing the generation of displacement current components and improving the uniformity of current shunting. Moreover, in order to ensure that the current enters the electrode coil more evenly, the arms are arranged symmetrically.

[0061] like Figure 6The second embodiment of the present invention also discloses a coil connector, which is basically the same as that in the first embodiment, except that, in this embodiment, although the current equalization section 12 is also cylindrical, it is thicker than the current equalization section 12 in the first embodiment, and the current equalization section 12 has a through clearance channel 121 along its axial direction. In other words, it can also be understood that in this embodiment, the current equalization section 12 is cylindrical, and its interior has a through clearance channel 121. Figure 7 As shown, four support arms 11 are arranged circumferentially on the outer wall of the cylindrical flow equalization section 12. At the same time, the axis of the flow equalization section 12 is perpendicular to all the support arms 11, and the extension lines of all the support arms 11 intersect on the axis of the flow equalization section 12.

[0062] In addition, in this embodiment, the coil connector also includes a main arm 13, such as... Figure 6 The main flow arm 13 is connected to the first end of the flow equalization section 12, and the flow equalization section 12 is electrically connected to the matching device 20 through the main flow arm 13.

[0063] After assembly, the radio frequency current flows into the current equalization section 12 along the main current arm 13, and flows from the first end to the second end of the cylindrical current equalization section 12. The axis of the current equalization section 12 is perpendicular to all the support arms 11, and the extension lines of all the support arms 11 intersect on the axis of the current equalization section 12, making the distance between the current equalization section 12 and each support arm 11 basically the same, thus improving the uniformity of current distribution. This allows the current to be evenly distributed to each support arm 11, improving the uniformity of the current portion of the electrode coil 30. In addition, by providing the avoidance channel 121, other current equalization sections 12 can be avoided during assembly, thereby preventing mutual interference.

[0064] It should be noted that, in order to minimize the generation of displacement current components, in this embodiment, the axial length of the current equalization section 12 should be at least three times the radial cross-sectional diameter of the current equalization section 12, so as to ensure that the current can have sufficient axial distance to diffuse evenly on the outer peripheral wall surface of the current equalization section 12.

[0065] Furthermore, in the above embodiment, the number of support arms 11 is four, and they are symmetrically distributed. However, this is not limiting. The number of support arms 11 can be any number from three to six, and they do not necessarily have to be symmetrical. For example, when there are six support arms 11, the included angle between adjacent support arms 11 is 60°, and the support arms 11 are symmetrical. However, when there are three support arms 11, the included angle between adjacent support arms 11 is 120°, and the support arms 11 are no longer symmetrical. For another example, the number of support arms 11 can also be five, in which case the included angle between adjacent support arms 11 is 72°, which is also asymmetrical. In other words, to ensure that the current enters the electrode coil more evenly, the situation where the included angles formed between all adjacent support arms 11 are equal can also be understood as all support arms 11 being evenly spaced along the circumferential direction of the outer peripheral wall of the current equalization section 12. Therefore, as long as the included angles formed between all adjacent support arms 11 are equal, it is within the protection scope of this invention.

[0066] It should also be noted that in the above embodiment two, the flow equalization section 12 is electrically connected to the matching device 20 through the main flow arm 13. However, this is not limiting. In some other embodiments not shown in the figure, the flow equalization section 12 can be directly electrically connected to the matching device 20. That is to say, as long as it is directly or indirectly connected to the matching device 20 through the flow equalization section 12, it is within the protection scope of this invention.

[0067] According to a second aspect of the present invention, an electrode coil connection structure is also disclosed, including the above-described coil connector and shielding shell 40, the shielding shell 40 having a receiving cavity, the shielding shell 40 being electrically connected to the return end of the radio frequency source, and the coil connector being disposed within the receiving cavity.

[0068] The electrode coil connection structure will be further explained below with reference to specific embodiments.

[0069] like Figure 8 The third embodiment of the present invention shown discloses an electrode coil connection structure, mainly used for, for example... Figure 8 The electrode coil 30 shown is the case of a single first electrode coil 31.

[0070] In this embodiment, the coil connector 10 includes a first coil connector 10a, and the electrode coil connection structure further includes a shielding shell 40, a first plug-in post 50, and a second plug-in post 60.

[0071] The shielding shell 40 has a receiving cavity and is electrically connected to the return terminal of the matching device 20. The first coil connector 10a is disposed in the receiving cavity and is used to connect the first output terminal of the matching device 20 to the receiving terminal of the first electrode coil 31.

[0072] The first plug post 50 is inserted through the shielding shell 40. The first coil connector 10a is electrically connected to the first plug post 50. The first coil connector 10a is electrically connected to the receiving end of the first electrode coil 31 through the first plug post 50.

[0073] The second plug 60 is electrically connected to the shielding shell 40. The second plug 60 is used to electrically connect to the output terminal of the first electrode coil 31. The matching device 20 forms a current loop with the first electrode coil 31 through the first coil connector 10a, the first plug 50, the second plug 60 and the shielding shell 40.

[0074] The electrode coil connection structure of the present invention electrically connects the second plug 60 to the shielding shell 40, and then electrically connects the shielding shell 40 to the return terminal of the matching device 20, so that the first electrode coil 31 and the matching device 20 are connected through the shielding shell 40. On the basis of the shielding effect of the shielding shell 40, it can also form part of the current loop, leading the current loop of the first electrode coil 31 back to the matching device 20, eliminating one link. Structurally, the electrode coil connection structure is simpler and is a typical example of one thing serving multiple purposes.

[0075] In this embodiment, the structure of the first coil connector 10a is the same as that of the coil connector 10 in Embodiment 1. That is, the first coil connector 10a includes a first support arm 11a and a first current equalization section 12a.

[0076] The first current equalization section 12a is cylindrical and has a first end and a second end disposed opposite to each other. The first end of the first current equalization section 12a is used for electrical connection with the first output terminal of the matching device 20. There are four first arms 11a. The first end of the first arm 11a is electrically connected to the first plug-in post 50, and the second end of the first arm 11a is connected to the second end of the first current equalization section 12a.

[0077] The first arms 11a are spaced apart along the outer wall of the first current equalization section 12a, and each first arm 11a is perpendicular to the current equalization section 12a. In other words, the second ends of the four first arms 11a converge at the second end of the first current equalization section 12a, forming an X-shaped structure. The axis of the first current equalization section 12a is perpendicular to the plane of the X-shaped structure, thereby reducing the generation of displacement current components and improving the uniformity of current shunting.

[0078] In this embodiment, the shielding shell 40 includes a cylindrical body 41 and a shielding plate 42. The first end of the cylindrical body 41 is electrically connected to the return end of the matching device 20. The shielding plate 42 is connected to the second end of the cylindrical body 41, and the cylindrical body 41 is fastened onto the shielding plate 42. The cylindrical body 41 and the shielding plate 42 form a receiving cavity. The shielding plate 42 is electrically connected to the cylindrical body 41. The first insertion post 50 passes through the shielding plate 42, and the second insertion post 60 is electrically connected to the shielding plate 42. By using the cylindrical body 41 to symmetrically lead the current loop of the first electrode coil 31 back to the matching device 20, one layer of the link is eliminated, making the electrode coil connection structure simpler from a structural perspective. This is a typical example of a single device serving multiple purposes.

[0079] It should be noted that in this embodiment, the cross-section of the cylinder 41 is circular, but this is not limiting. In some other embodiments not shown in the figure, the cross-section of the cylinder can also be rectangular, polygonal, or other structures. As long as it can cooperate with the second plug post 60 to allow the current to flow back evenly, it is within the protection scope of this invention.

[0080] like Figures 9 to 14 The fourth embodiment of the present invention shown also discloses an electrode coil connection structure, mainly used for, for example... Figure 9 The two electrode coils 30 shown are: a first electrode coil 31 and a second electrode coil 32, with the first electrode coil 31 located inside the second electrode coil 32. The first output terminal of the matching device 20 is electrically connected to the receiving terminal of the first electrode coil 31, and the second output terminal of the matching device 20 is electrically connected to the receiving terminal of the second electrode coil 32.

[0081] like Figure 9 As shown, in this embodiment, the coil connector 10 includes: a first coil connector 10a and a second coil connector 10b; the electrode coil connection structure includes: a shielding shell 40, a first plug-in post 50, a second plug-in post 60, a third plug-in post 70, and a mounting base 80.

[0082] The shielding housing 40 has a receiving cavity, and the shielding housing 40 is electrically connected to the return terminal of the matching device 20. Specifically, as shown... Figure 10 As shown, the shielding shell 40 includes a cylindrical body 41 and a shielding plate 42, with the first end of the cylindrical body 41 ( Figure 10 The upper end of the cylinder 41 is electrically connected to the return end of the matching device 20; the shielding plate 42 is connected to the second end of the cylinder 41, that is, as shown in the figure. Figure 11 As shown, the cylinder 41 is fastened to the shielding plate 42, and the cylinder 41 and the shielding plate 42 form a receiving cavity. The shielding plate 42 is electrically connected to the cylinder 41.

[0083] like Figure 12 and Figure 13As shown, the mounting base 80 passes through the shielding plate 42 and is fixedly connected to the shielding plate 42. The second insertion post 60 is located outside the receiving cavity. Its first end is inserted into the mounting base 80 and fixed by the mounting base 80. At the same time, the first end of the second insertion post 60 is electrically connected to the shielding plate 42. The second end of the second insertion post 60 is divided into two connection ends. One connection end is used to electrically connect to the output end of the first electrode coil 31, and the other connection end is used to electrically connect to the output end of the second electrode coil 32.

[0084] It can be seen that, as Figure 14 As shown, output1 represents the first output terminal of the matching device 20, and output2 represents the second output terminal of the matching device 20. The first output terminal of the matching device 20 is electrically connected to the receiving terminal of the first electrode coil 31, and the second output terminal of the matching device 20 is electrically connected to the receiving terminal of the second electrode coil 32. The shielding plate 42 is electrically connected to both the output terminals of the first electrode coil 31 and the second electrode coil 32 via the second insertion post 60. When the cylinder 41 is fastened onto the shielding plate 42, the output terminal of the first electrode coil 31 is connected to the return terminal of the matching device 20 sequentially through the second insertion post 60, the shielding plate 42, and the cylinder 41. Similarly, the output terminal of the second electrode coil 32 is connected to the return terminal of the matching device 20 sequentially through the second insertion post 60, the shielding plate 42, and the cylinder 41, forming a connection as shown in the diagram. Figure 14 The equivalent circuit diagram is shown.

[0085] The electrode coil connection structure of the present invention electrically connects the second plug 60 to the shielding shell 40, enabling conduction between the first electrode coil 31 and the matching device 20, and between the second electrode coil 32 and the matching device 20, through the shielding shell 40. This allows the radio frequency current of the first electrode coil 31 and the second electrode coil 32 to be symmetrically guided back to the matching device 20 via the shielding shell 40. It can be seen that the shielding shell 40 of the present invention, in addition to its shielding function, can also serve as part of the current loop, eliminating one layer of the link and making the electrode coil connection structure more concise, representing a typical example of a multi-purpose device.

[0086] like Figure 15 As shown, the first plug-in post 50 is used to connect the first coil connector 10a to the receiving end of the first electrode coil 31, and the second plug-in post 60 is used to connect the second coil connector 10b to the receiving end of the second electrode coil 32.

[0087] The first plug-in post 50 and the third plug-in post 70 both penetrate the mounting base 80 and the shielding shell 40. The first plug-in post 50 and the third plug-in post 70 are fixedly connected to the mounting base 80. In this embodiment, the mounting base 80 is made of insulating material (e.g., rubber). Therefore, the first plug-in post 50 is insulated from the shielding plate 42 through the mounting base 80, and the third plug-in post 70 is also insulated from the shielding plate 42 through the mounting base 80. In other words, the mounting base 80 has both fixing and insulating functions, which is a typical example of a multi-purpose device.

[0088] like Figure 15 As shown, the first coil connector 10a is disposed within the receiving cavity. The first coil connector 10a is used to connect the first output terminal of the matching device 20 to the receiving terminal of the first electrode coil 31. The first coil connector 10a is electrically connected to the first plug-in post 50, and the first coil connector 10a is electrically connected to the receiving terminal of the first electrode coil 31 through the first plug-in post 50.

[0089] The matching unit 20 forms a current loop with the first electrode coil 31 through the first coil connector 10a, the first plug 50, the second plug 60 and the shield 40.

[0090] In this embodiment, the structure of the first coil connector 10a is the same as that of the coil connector 10 in Embodiment 1. That is, the first coil connector 10a includes a first support arm 11a and a first current equalization section 12a. The first current equalization section 12a is cylindrical and has a first end and a second end disposed opposite to each other. The first end of the first current equalization section 12a is used for electrical connection with the first output terminal of the matching device 20. There are four first support arms 11a, such as... Figure 14 As shown, the first end of the first arm 11a is electrically connected to the first plug post 50, and the second end of the first arm 11a is connected to the second end of the first current equalization section 12a.

[0091] The first arms 11a are spaced apart along the outer wall of the first current equalization section 12a, and each first arm 11a is perpendicular to the first current equalization section 12a. In other words, the second ends of the four first arms 11a converge at the second end of the first current equalization section 12a, forming an X-shaped structure. The axis of the first current equalization section 12a is perpendicular to the plane of the X-shaped structure, thereby reducing the generation of displacement current components and improving the uniformity of current distribution.

[0092] like Figure 15 As shown, in this embodiment, the second coil connector 10b is disposed within the receiving cavity. The second coil connector 10b is used to connect the second output terminal of the matching device 20 to the receiving terminal of the second electrode coil 32. It should be noted that the second coil connector 10b is electrically connected to the third plug-in post 70, and the second coil connector 10b is electrically connected to the receiving terminal of the second electrode coil 32 through the third plug-in post 70.

[0093] The matching device 20 and the second electrode coil 32 form a current loop through the second coil connector 10b, the third plug 70, the second plug 60 and the shield 40.

[0094] In this embodiment, the structure of the second coil connector 10b is the same as that of the coil connector 10 in Embodiment 2. That is, the second coil connector 10b includes: a second support arm 11b, a second current equalization section 12b, and a second main current arm 13b.

[0095] like Figure 15 As shown, the second current equalization section 12b is cylindrical, and the cylindrical second current equalization section 12b has a first end and a second end that are arranged opposite to each other. The first end of the second current equalization section 12b is connected to the second main current arm 13b, and is electrically connected to the second output end of the matching device 20 through the second main current arm 13b. There are four second support arms 11b. The first end of the second support arm 11b is electrically connected to the third plug post 70, and the second end of the second support arm 11b is connected to the second end of the second current equalization section 12b.

[0096] The second arms 11b are spaced apart along the outer wall of the second flow equalization section 12b, and each second arm 11b is perpendicular to the axis of the second flow equalization section 12b. In other words, four second arms 11b are spaced apart circumferentially on the outer wall of the cylindrical section 12b. At the same time, the axis of the second flow equalization section 12b is perpendicular to all the second arms 11b, and the extension lines of all the second arms 11b intersect on the axis of the second flow equalization section 12b, thereby improving the uniformity of the flow distribution.

[0097] like Figure 15 As shown, the second flow equalization section 12b is sleeved outside the first flow equalization section 12a, and a gap is formed between the second flow equalization section 12b and the first flow equalization section 12a. In other words, the second flow equalization section 12b has a second clearance channel 121b that runs from the first end to the second end, and the first flow equalization section 12a is disposed through the second clearance channel 121b.

[0098] The electrode coil connection structure of the present invention, by providing a second current equalization section 12b, after assembly, not only serves to connect the matching device 20 and the first electrode coil 31, but also avoids interference with the first current equalization section 12a through the second clearance channel 121b. This ensures that the distance between the first current equalization section 12a and each of the first arms 11a is equal, thereby guaranteeing the uniformity of the current in the first electrode coil 31 and the second electrode coil 32. This effectively solves the problem of etching rate eccentricity differences caused by the electrode coil connection structure.

[0099] like Figure 16a and Figure 16b As shown, in Figure 16a16b is the etching rate data of an etching machine in the prior art, and 16b is the etching rate data of a semiconductor process equipment (etching machine) using the electrode coil structure of the present invention.

[0100] Figure 16a and Figure 16b The sampling methods are the same, with multiple sampling points distributed on the wafer. Except for the central sampling point, the other sampling points are divided into three groups, arranged in a ring from the inside out. Within the same group, the sampling points are equidistant from the wafer center. In other words, each group of sampling points reflects whether the etching rate is uniform in the circumferential direction, given that the distances from the wafer center are equal. Ideally, the more uniform the circumferential etching rate, the easier it is to control, and the better the etching effect in the circumferential direction.

[0101] Taking the sampling point within the annular region A as an example, region A is located within the etching range of the first electrode coil 31, such as... Figure 16a As shown, due to the uneven current distribution in the electrode coil structure used in the prior art, the current distribution in the first electrode coil 31 is also uneven, resulting in different etching rates at different positions in the circumferential direction of region A. Figure 16a It is clear from the image that the etching rate in the upper left part of region A is significantly greater than that in the lower right part.

[0102] like Figure 16b As shown, due to the electrode coil structure of the present invention, the current can be evenly distributed to the first electrode coil 31 through the first coil connector 10a, thereby making the etching rate distribution more uniform, and thus enabling... Figure 16b The etching rate in region A is basically the same as that in region B. From Figure 16b It can be clearly seen that the etching rate in the upper left part of region A is basically the same as that in the lower right part, and the uniformity of the etching rate has been significantly improved.

[0103] To more clearly demonstrate the improvement effect of this invention on etching rate, this invention also provides, as follows: Figure 17a and Figure 17b The eccentric data plot shown Figure 17a 17b is the eccentricity data of an etching machine in the prior art, and 17b is the eccentricity data of a semiconductor process equipment (etching machine) using the electrode coil structure of the present invention.

[0104] and Figure 16a and Figure 16b The sampling methods are the same. Figure 17a and Figure 17b Multiple sampling points are distributed on the wafer. Besides the central sampling point, the other sampling points are divided into three groups, arranged in a ring from the inside out. Within the same group, the sampling points are all equidistant from the wafer center. Furthermore, in... Figure 16a and Figure 16b Based on this, the data from all sampling points are summed to calculate the average etching rate. The etching rate of each sampling point is then subtracted from the average etching rate to obtain the final etching rate. Figure 17a and Figure 17b The data, that is to say, Figure 17a and Figure 17b It can show the difference between the etching rate of each sampling point and the average etching rate. Ideally, the smaller the difference, the better.

[0105] like Figure 17a As shown, due to the uneven current distribution in the electrode coil structure used in the prior art, the current distribution in the first electrode coil 31 is also uneven, which in turn leads to different etching rates at different positions in the circumferential direction of region A. Moreover, the difference between each sampling point and the average etching rate is large, ranging from -4 to 4.

[0106] like Figure 17b As shown, due to the electrode coil structure of the present invention, the current can be evenly distributed to the first electrode coil 31 through the first coil connector 10a, thereby making the etching rate distribution more uniform, and thus enabling... Figure 17b The etching rate in region A is basically the same as that in region B. Moreover, the difference between each sampling point and the average etching rate is small, ranging from -1 to 1.

[0107] from Figure 16a and Figure 16b The comparison and Figure 17a and Figure 17b The comparison shows that the electrode coil connection structure of the present invention can not only make the etching rate more uniform, but also greatly reduce the eccentricity difference, thereby significantly improving the etching effect and increasing the yield.

[0108] like Figure 18 Embodiment 5 of the present invention, as shown, also discloses an electrode coil connection structure, mainly used for, for example... Figure 18 The electrode coil 30 shown is the case of a single first electrode coil 31.

[0109] In this embodiment, the shielding shell 40 has a receiving cavity, and the shielding shell 40 is electrically connected to the return terminal of the RF source. The coil connector is disposed within the receiving cavity. The coil connector 10 includes a first coil connector 10a and a third coil connector 10c. The first coil connector 10a is used to connect the first output terminal of the matching device 20 to the receiving terminal of the first electrode coil 31. The third coil connector 10c is used to connect the return terminal of the matching device 20 to the output terminal of the first electrode coil 31, so that a current loop is formed between the matching device 20 and the first electrode coil 31.

[0110] In this embodiment, the structure of the first coil connector 10a is the same as that of the coil connector 10 in Embodiment 1. That is, the first coil connector 10a includes a first support arm 11a and a first current equalization section 12a.

[0111] The first current equalization section 12a is cylindrical and has a first end and a second end disposed opposite to each other. The first end of the first current equalization section 12a is used for electrical connection with the first output terminal of the matching device 20. There are four first arms 11a. The first end of the first arm 11a is electrically connected to the first plug-in post 50, and the second end of the first arm 11a is connected to the second end of the first current equalization section 12a.

[0112] The first arms 11a are spaced apart along the outer wall of the first current equalization section 12a, and each first arm 11a is perpendicular to the current equalization section 12a. In other words, the second ends of the four first arms 11a converge at the second end of the first current equalization section 12a, forming an X-shaped structure. The axis of the first current equalization section 12a is perpendicular to the plane of the X-shaped structure, thereby reducing the generation of displacement current components and improving the uniformity of current shunting.

[0113] In this embodiment, the structure of the third coil connector 10c is the same as that of the coil connector 10 in Embodiment 2. That is, the third coil connector 10c includes a third support arm 11c and a third current equalization section 12c.

[0114] The third current equalization section 12c is cylindrical, and the cylindrical third current equalization section 12c has a first end and a second end that are arranged opposite to each other. The first end of the third current equalization section 12c is used to electrically connect to the return end of the matching device 20. There are four third arms 11c. The first end of the third arm 11c is used to electrically connect to the output end of the first electrode coil 31, and the second end of the third arm 11c is connected to the second end of the third current equalization section 12c.

[0115] It can be seen that the first output terminal of the matching device 20 is electrically connected to the receiving terminal of the first electrode coil 31 through the first coil connector 10a, and the output terminal of the first electrode coil 31 is electrically connected to the return terminal of the matching device 20 through the third coil connector 10c, thereby forming a current loop between the matching device 20 and the first electrode coil 31.

[0116] The third arms 11c are spaced apart along the outer wall of the third current equalization section 12c, and each third arm 11c is perpendicular to the axis of the third current equalization section 12c. In other words, the four arms 11 are spaced apart circumferentially on the outer wall of the cylindrical section 12c. At the same time, the axis of the third current equalization section 12c is perpendicular to all the third arms 11c, and the extension lines of all the third arms 11c intersect on the axis of the third current equalization section 12c, thereby reducing the generation of displacement current components and improving the uniformity of current distribution.

[0117] To avoid interference between the first current equalization section 12a and the third current equalization section 12c, the third current equalization section 12c is sleeved outside the first current equalization section 12a, and a gap is formed between the third current equalization section 12c and the first current equalization section 12a. In other words, the third current equalization section 12c has a third clearance channel 121c that runs through from the first end to the second end, and the first current equalization section 12a is disposed through the third clearance channel 121c. By providing the third current equalization section 12c, the electrode coil connection structure of the present invention, after assembly, allows the third current equalization section 12c to function as a conductor connecting the matching device 20 and the first electrode coil 31, while also avoiding interference with the first current equalization section 12a through the third clearance channel 121c. This ensures that the distance between the first current equalization section 12a and each of the first arms 11a is equal, thereby guaranteeing the uniformity of the current in the first electrode coil 31 and the third electrode coil 30.

[0118] like Figure 14 Embodiment 6 of the present invention also discloses an electrode coil connection structure, mainly used for, for example Figure 14 The two electrode coils 30 shown are, in other words, the electrode coil 30 includes a first electrode coil 31 and a second electrode coil 32, with the first electrode coil 31 located inside the second electrode coil 32.

[0119] In this embodiment, the electrode coil connection structure is basically the same as in embodiment five. The difference is that the coil connector 10 further includes a second coil connector 10b, which is used to connect the second output terminal of the matching device 20 to the receiving terminal of the second electrode coil 32. The first electrode coil 31 is located inside the second electrode coil 32.

[0120] The third coil connector 10c is also used to connect the return terminal of the matching device 20 to the output terminal of the second electrode coil 32. That is, the first end of the third arm 11c of the third coil connector 10c is also used to electrically connect to the output terminal of the second electrode coil 32 so that a current loop is formed between the matching device 20 and the second electrode coil 32.

[0121] In this embodiment, the structure of the second coil connector 10b is the same as that of the coil connector 10 in Embodiment 2. That is, the second coil connector 10b includes: a second support arm 11b and a second current equalization section 12b.

[0122] The second current equalization section 12b is cylindrical and has a first end and a second end that are disposed opposite to each other. The first end of the second current equalization section 12b is used to electrically connect to the second output end of the matching device 20. There are four second arms 11b. The first end of the second arm 11b is used to electrically connect to the receiving end of the second electrode coil 32, and the second end of the second arm 11b is connected to the second end of the second current equalization section 12b.

[0123] The second arms 11b are spaced apart along the outer wall of the second current equalization section 12b, and each second arm 11b is perpendicular to the axis of the second current equalization section 12b. In other words, four second arms 11b are spaced apart circumferentially on the outer wall of the cylindrical section 12b. At the same time, the axis of the second current equalization section 12b is perpendicular to all the second arms 11b, and the extension lines of all the second arms 11b intersect on the axis of the second current equalization section 12b, thereby reducing the generation of displacement current components and improving the uniformity of current distribution.

[0124] It can be seen that the second output terminal of the matching device 20 is electrically connected to the receiving terminal of the second electrode coil 32 through the second coil connector 10b, and the output terminal of the second electrode coil 32 is electrically connected to the return terminal of the matching device 20 through the third coil connector 10c, thereby forming a current loop between the matching device 20 and the first electrode coil 31.

[0125] To avoid interference between the second flow equalization section 12b and the third flow equalization section 12c, the second flow equalization section 12b is sleeved on the outside of the third flow equalization section 12c, and a gap is formed between the second flow equalization section 12b and the third flow equalization section 12c. In other words, the second flow equalization section 12b has a second clearance channel 121b that runs from the first end to the second end, and the third flow equalization section 12c is disposed through the second clearance channel 121b.

[0126] The electrode coil connection structure of the present invention, by setting a second current equalization part 12b, after assembly, the second current equalization part 12b can not only serve to connect the matching device 20 and the first electrode coil 31, but also avoid the third current equalization part 12c through the second avoidance channel 121b, thereby avoiding mutual interference with the third current equalization part 12c, and making the distance between the third current equalization part 12c and each of the first arms 11a equal, thereby ensuring uniform current return.

[0127] The electrode coil connection structure of the present invention includes a second coil connector 10b and a third coil connector 10c, with the third current equalization section 12c disposed inside the second current equalization section 12b, thereby avoiding mutual interference between the second coil connector 10b and the third coil connector 10c. The third coil connector 10c enables conduction between the output terminal of the first electrode coil 31 and the return terminal of the matching unit 20, and between the output terminal of the second electrode coil 32 and the return terminal of the matching unit 20. This allows the RF current of the first electrode coil 31 and the second electrode coil 32 to be symmetrically returned to the matching unit 20 via the third coil connector 10c. It can be seen that through the above structure, the present invention merges the original two return links into one return link, eliminating one link layer and making the electrode coil connection structure more concise, representing a typical example of multi-purpose functionality.

[0128] It should be noted that in embodiments one to six above, the radio frequency source is the matching unit 20, and the return terminal of the matching unit 20 is its housing. However, this is not limiting. In some other embodiments not shown in the figures, the radio frequency source can be a power divider, and the matching unit is connected to the power divider, which distributes the radio frequency current of the matching unit to the two electrode coils 30. In other words, any device that can output radio frequency energy is within the scope of protection of this invention.

[0129] According to another aspect of the present invention, a semiconductor process apparatus is also disclosed, comprising: a housing and the above-described electrode coil connection structure, wherein the housing is provided with a mounting cavity; and the electrode coil connection structure is disposed within the mounting cavity.

[0130] It is understood that in the above embodiments, the semiconductor process equipment is an etching machine. The etching machine of the present invention, by employing the aforementioned electrode coil connection structure, not only enables a more uniform etching rate but also significantly reduces eccentricity differences, thereby greatly improving the etching effect and increasing the yield.

[0131] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. An electrode coil connection structure, characterized in that, include: A coil connector for connecting a radio frequency source and an electrode coil (30) includes: multiple support arms (11), each support arm (11) having a first end for electrical connection to the electrode coil (30); and a current equalization section (12) having a first end and a second end disposed opposite to each other, the first end of the current equalization section (12) for electrical connection to the radio frequency source, and the second ends of the support arms (11) being connected to the second end of the current equalization section (12); wherein the current equalization section (12) further has an outer peripheral wall, all the support arms (11) being circumferentially spaced along the outer peripheral wall of the current equalization section (12), and the current equalization section (12) for dispersing the current output by the radio frequency source so that the current is evenly distributed to the support arms (11); and A shielding shell (40) has a receiving cavity, and the shielding shell (40) is electrically connected to the return terminal of the radio frequency source. The coil connector is disposed within the receiving cavity. The electrode coil (30) includes a first electrode coil (31). The coil connector (10) includes a first coil connector (10a), which is disposed in the receiving cavity and is used to connect the first output terminal of the radio frequency source to the receiving terminal of the first electrode coil (31). The electrode coil connection structure further includes: The first plug-in post (50) is installed on the shielding shell (40), the first coil connector (10a) is electrically connected to the first plug-in post (50), and the first coil connector (10a) is electrically connected to the receiving end of the first electrode coil (31) through the first plug-in post (50). The second plug (60) is electrically connected to the shielding shell (40) and is used to be electrically connected to the output end of the first electrode coil (31). The radio frequency source forms a current loop between the first coil connector (10a), the first plug (50), the second plug (60), the shielding shell (40), and the first electrode coil (31).

2. The electrode coil connection structure according to claim 1, characterized in that, The flow equalization section (12) is cylindrical, and the axis of the flow equalization section (12) is perpendicular to all the support arms (11).

3. The electrode coil connection structure according to claim 2, characterized in that, The second ends of all the arms (11) converge at the second end of the flow equalization section (12).

4. The electrode coil connection structure according to claim 2, characterized in that, The flow equalization section (12) has a through clearance channel (121) along its axial direction, and the extensions of all the arms (11) converge on the axis of the flow equalization section (12).

5. The electrode coil connection structure according to claim 1, characterized in that, The coil connector (10) further includes: Mainstream arm (13) is connected to the first end of the current equalization section (12), and the current equalization section (12) is electrically connected to the radio frequency source through the mainstream arm (13).

6. The electrode coil connection structure according to claim 1, characterized in that, The included angles formed between all adjacent arms (11) are equal.

7. The electrode coil connection structure according to claim 1, characterized in that, The first coil connector (10a) includes: The first arm (11a) has its first end electrically connected to the first plug-in post (50); The first current equalization section (12a) is cylindrical. The first end of the first current equalization section (12a) is used to be electrically connected to the first output end of the radio frequency source. The second end of the first support arm (11a) is connected to the second end of the first current equalization section (12a).

8. The electrode coil connection structure according to claim 1, characterized in that, The shielding shell (40) includes The first end of the cylindrical body (41) is electrically connected to the return end of the radio frequency source; A shielding plate (42) is connected to the second end of the cylindrical body (41). The cylindrical body (41) and the shielding plate (42) form the receiving cavity. The shielding plate (42) is electrically connected to the cylindrical body (41). The first plug-in post (50) passes through the shielding plate (42). The second plug-in post (60) is electrically connected to the shielding plate (42).

9. The electrode coil connection structure according to claim 7, characterized in that, The electrode coil (30) further includes a second electrode coil (32), with the first electrode coil (31) located inside the second electrode coil (32). The coil connector (10) further includes: The second coil connector (10b) is used to connect the second output terminal of the radio frequency source to the receiving terminal of the second electrode coil (32); The electrode coil connection structure further includes: The third plug-in post (70) is inserted through the shielding shell (40), the second coil connector (10b) is electrically connected to the third plug-in post (70), and the second coil connector (10b) is electrically connected to the receiving end of the second electrode coil (32) through the third plug-in post (70); The second plug (60) is also used to connect the return terminal of the radio frequency source to the output terminal of the second electrode coil (32), so that a current loop is formed between the radio frequency source and the second electrode coil (32) through the second coil connector (10b), the third plug (70), the second plug (60) and the shielding shell (40).

10. The electrode coil connection structure according to claim 9, characterized in that, The second coil connector (10b) includes: The second arm (11b) has a first end for electrical connection with the third plug-in post (70); The second current equalization section (12b) is cylindrical. The first end of the second current equalization section (12b) is used to be electrically connected to the second output end of the radio frequency source. The second end of the second support arm (11b) is connected to the second end of the second current equalization section (12b). The second flow equalization section (12b) is sleeved outside the first flow equalization section (12a), and a gap is formed between the second flow equalization section (12b) and the first flow equalization section (12a).

11. The electrode coil connection structure according to claim 1, characterized in that, The electrode coil connection structure further includes: Mounting base (80) is mounted on and connected to the shielding shell (40). The first plug-in post (50) passes through both the mounting base (80) and the shielding shell (40). The first plug-in post (50) is connected to the mounting base (80). The first plug-in post (50) and the shielding shell (40) are insulated from each other by the mounting base (80).

12. A semiconductor process apparatus, characterized in that, include: A housing, wherein the housing is provided with a mounting cavity; The electrode coil connection structure according to any one of claims 1 to 11, wherein the electrode coil connection structure is disposed within the mounting cavity.

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