Ozone pressure swing adsorption concentration method and system for semiconductor cleaning and etching

Abstract

The present application relates to the technical field of ozone compression, and in particular to an ozone pressure swing adsorption concentration method and system for semiconductor cleaning and etching, wherein the method comprises: gas compression: a mixed gas of ozone and oxygen is pressurized after dehydration to form a pressurized initial gas; adsorption separation: the pressurized initial gas is adjusted to be in uniform contact with the adsorbent layer, and then passes through the flowing adsorbent layer and the fixed adsorbent layer in sequence, and during adsorption, the direction of the gas blowing toward the fixed adsorbent layer is adjusted, and then the remaining gas is discharged; desorption: the ozone adsorbed by the adsorbent is separated from the adsorbent, and high-purity ozone concentrated gas is formed after compression. The system comprises: a pretreatment module for pretreatment of the mixed gas, a tower body, an adsorption layer arranged in the tower body, an air inlet pipe connecting the tower body and the pretreatment module and used for gas supply, an exhaust pipe arranged on the tower body for exhaust, and a desorption module arranged on the tower body for collecting ozone. The present application has the effect of improving the adsorption effect.

Description

Technical Field

[0001] The present application relates to the technical field of ozone compression, and in particular to an ozone pressure swing adsorption concentration method and system for semiconductor cleaning and etching. Background Art

[0002] At present, with the rapid development of semiconductor technology, chip process nodes are constantly shrinking, and the requirements for the cleanliness and process precision of the surface of semiconductor materials are getting higher and higher. In the semiconductor manufacturing process, cleaning and etching are key process steps, which directly affect the performance and yield of the chip; ozone, as an efficient oxidant, has been widely used in the cleaning and etching links in semiconductor manufacturing due to its strong oxidizing properties; however, ozone is extremely unstable and easy to decompose, which puts high demands on ozone separation and concentration technology. In recent years, pressure swing adsorption technology has received widespread attention and application in the field of gas separation due to its advantages such as high efficiency, environmental protection, and easy operation.

[0003] In the prior art, a Chinese patent with publication number CN118718662A discloses an energy-saving pressure swing adsorption air separation system, in which an adsorption tower comprises: a tower body, an adsorption chamber is formed inside; a first adsorbent layer is arranged in the adsorption chamber, and the adsorption chamber is divided into an air inlet chamber and an air exhaust chamber; a vent pipe is arranged on the tower body, and an air inlet hole connected to the air inlet chamber is provided; an air inlet pipe is arranged on the tower body, and is connected to the vent pipe; an exhaust pipe is arranged on the tower body, and is connected to the exhaust chamber; a sealing plate slides in the vent pipe, and is provided with a plurality of groups of blocking holes, and the air inlet holes at the bottom of the tower body are closed or opened with the sliding; a power assembly is arranged on the tower body, and is used to drive the sealing plate to slide back and forth; an exhaust module is connected to the air inlet chamber, and is used to evacuate and restore the adsorption effect of the first adsorbent layer; however, when the initial position of the gas in the fixed adsorbent layer is fixed, the gas contacts one side or one side of the adsorbent layer, resulting in uneven contact between the adsorbent and the gas, and easy adsorption saturation, resulting in poor adsorption effect. Summary of the invention

[0004] In order to improve the adsorption effect, the present application provides an ozone pressure swing adsorption concentration method and system for semiconductor cleaning and etching.

[0005] In the first aspect, the present application provides an ozone pressure swing adsorption concentration method for semiconductor cleaning and etching, which adopts the following technical solution:

[0006] An ozone pressure swing adsorption concentration method for semiconductor cleaning and etching comprises the following steps:

[0007] Gas compression: The mixed gas of ozone and oxygen is pressurized after dehydration to form a pressurized initial gas;

[0008] Adsorption separation: The concentration of the pressurized initial gas is adjusted so that the pressurized initial gas is in uniform contact with the adsorbent layer. The adsorbent layer adopts a combination of a fixed adsorbent layer and a flowing adsorbent layer, so that the pressurized initial gas first passes through the flowing adsorbent layer. The flow of the flowing adsorbent layer disturbs the passing gas and changes its direction. Then, the remaining gas after adsorption by the flowing adsorbent layer passes through the fixed adsorbent layer again. When passing through the fixed adsorbent layer, a guide module is set to change the direction of the gas blown to the fixed adsorbent layer. Finally, the remaining gas is discharged after adsorption by the fixed adsorbent layer.

[0009] Desorption: The ozone adsorbed by the adsorbent is separated from the adsorbent by vacuuming, and then compressed to form high-purity ozone concentrated gas.

[0010] By adopting the above technical solution, the traditional pressure swing adsorption concentration method mostly uses a single fixed adsorbent layer, which has limited adsorption efficiency and flexibility and is difficult to cope with mixed gases of different concentrations and flow rates; by introducing a mobile adsorbent layer combined with a fixed adsorbent layer, the mobile adsorbent layer can quickly respond to changes in gas concentration and provide preliminary ozone adsorption; while the fixed adsorbent layer performs deep adsorption to ensure the acquisition of high-purity ozone. This combination not only improves the adsorption efficiency, but also enhances the flexibility and adaptability of the system, and enables the gas to fully contact the adsorbent layer, so that the saturation rate of the adsorbent layer is consistent, thereby maintaining the adsorption effect, and at the same time can increase the contact area, thereby improving the adsorption effect; at the same time, the two-step adsorption method is adopted to make the ozone collection effect better.

[0011] Optionally, in the adsorptive separation step, the flow rate of the flowing adsorbent layer and / or the thickness of the fixed adsorbent layer are adjusted.

[0012] By adopting the above technical solution, the traditional pressure swing adsorption concentration method often adopts a fixed adsorbent layer flow rate and thickness, lacking adaptability to mixed gases of different concentrations and flow rates. This may lead to reduced adsorption efficiency under certain working conditions, or require additional pretreatment steps to adjust the gas concentration. By adjusting the flow rate of the flowing adsorbent layer and / or the thickness of the fixed adsorbent layer, the present technical solution can dynamically respond to changes in the concentration and flow rate of the mixed gas to ensure that the adsorption process is always in the optimal state; this flexibility improves the overall performance and efficiency of the system; the present technical solution realizes real-time control and optimization of the adsorption process by introducing a flow rate and thickness adjustment mechanism, which can not only improve the adsorption efficiency and purity of ozone, but also reduce unnecessary energy consumption and resource waste.

[0013] By adjusting the flow rate of the flowing adsorbent layer and / or the thickness of the fixed adsorbent layer, the present technical solution can ensure sufficient contact between the mixed gas and the adsorbent layer, thereby improving the adsorption efficiency of ozone; the adjustment of the flow rate and thickness helps to achieve more precise ozone separation, reduce impurities and residual unadsorbed gas, thereby improving the purity of concentrated ozone; the present technical solution introduces the adjustability of the flow rate and thickness, so that the system can more flexibly cope with mixed gases of different concentrations and flow rates, thereby improving the adaptability and stability of the system.

[0014] Optionally, a pre-treatment step is also included to remove dust and impurities from the mixed gas of ozone and oxygen before the gas is compressed.

[0015] By adopting the above technical scheme, the pretreatment step can remove dust and particulate matter in the mixed gas to prevent them from clogging the pores of the adsorbent, thereby ensuring the effective utilization of the adsorbent and improving the adsorption efficiency; by removing impurities, the pretreatment step can reduce the wear and clogging of the adsorbent, extend its service life, and reduce replacement and maintenance costs; the pure mixed gas helps to reduce fluctuations and interferences in the adsorption process and improve the stability and reliability of the system; optimize overall performance: the introduction of the pretreatment step can optimize the performance of the entire ozone pressure swing adsorption concentration process, improve the purity and recovery rate of ozone, and reduce energy consumption and costs.

[0016] In the second aspect, the present application provides a pressure swing adsorption concentration system, which adopts the following technical solution:

[0017] A pressure swing adsorption concentration system comprises the following modules:

[0018] A pre-processing module, used for pre-processing the mixed gas;

[0019] A tower body is formed with a working chamber;

[0020] An adsorption layer is arranged in the tower body, dividing the working chamber into an adsorption chamber and an exhaust chamber;

[0021] An air inlet pipe, one end of which is connected to the pretreatment module, the other end of which is connected to the tower body and extends into the adsorption chamber;

[0022] An exhaust pipe, arranged on the tower body and connected to the exhaust chamber;

[0023] The desorption module is connected to the adsorption chamber, and uses negative pressure desorption to reduce the adsorption layer and collect compressed ozone.

[0024] By adopting the above technical solution, the mixed gas first enters the pretreatment module, which is responsible for removing impurities such as dust, particulate matter, moisture, etc. in the gas to ensure the purity of the gas entering the subsequent adsorption process; the pretreated gas is guided to the adsorption chamber in the tower body through the air inlet pipe; in the adsorption chamber, the mixed gas contacts the adsorption layer, which is usually made of materials with high ozone adsorption capacity, such as activated carbon, zeolite molecular sieve, etc.; ozone molecules are captured by the adsorption layer, while the unadsorbed gas (mainly oxygen) is discharged through the exhaust pipe; as the adsorption process proceeds, the adsorption layer gradually becomes saturated and a desorption operation is required to restore its adsorption capacity; when the adsorption layer reaches a saturated state, the desorption module starts to work, which creates a negative pressure environment (i.e., an environment below atmospheric pressure) to desorb and release the ozone molecules on the adsorption layer; the released ozone gas is collected and compressed to form high-purity ozone concentrated gas; after the desorption is completed, the adsorption layer restores its adsorption capacity and prepares for the next round of adsorption operation.

[0025] Optionally, the adsorption layer comprises:

[0026] A fixing frame is arranged in the tower body and is provided with an installation cavity communicating with the adsorption cavity and the exhaust cavity;

[0027] A first frame is disposed in the installation cavity and is formed with a first adsorbent layer;

[0028] A second frame is slidably disposed in the installation cavity and is close to or away from the first frame;

[0029] A grid frame, which is elastic, connected to the second frame, and has a second adsorbent layer disposed therein;

[0030] The adjusting mechanism is arranged on the fixing frame and connected with the second frame, and is used for driving the second frame to slide.

[0031] By adopting the above technical solution, before the system is started, the second frame is positioned at a certain position in the installation cavity through the adjustment mechanism, maintaining a certain distance from the first frame, the grid frame maintains a certain shape due to its elasticity, and the second adsorbent layer is evenly distributed inside the grid frame; the mixed gas enters the adsorption cavity through the air inlet pipe, first contacts with the first adsorbent layer and performs preliminary adsorption; then, the gas passes through the space formed by the first frame and the second frame, further contacts with the second adsorbent layer, and performs deep adsorption; the gas that is not adsorbed is discharged from the system through the exhaust cavity and the exhaust pipe.

[0032] According to the concentration of the mixed gas, flow rate, saturation of the adsorption layer or during the adsorption process, the regulating mechanism can adjust the position of the second frame. The regulating mechanism pushes the second frame closer to the first frame to increase the contact area between the second adsorbent layer and the gas, improve the adsorption efficiency, and make the second adsorbent layer on the grid flow to form a flowing adsorbent layer, thereby realizing the combination of the flowing adsorbent layer and the fixed adsorbent layer, thereby increasing the adsorption efficiency.

[0033] The fixed adsorbent layer can provide a stable adsorption surface, ensuring sufficient contact time between gas molecules and the adsorbent, thereby achieving efficient adsorption; the mobile adsorbent layer can dynamically capture and separate target components in the gas, and its fluidity helps to increase the contact area between the adsorbent and the gas, further improving the adsorption efficiency.

[0034] Optionally, the grid is wavy in the vertical direction.

[0035] By adopting the above technical solution, when the gas passes through the wavy grid, the flow path of the gas is changed due to the wavy shape of the grid, forming more eddies and turbulence; these eddies and turbulence are conducive to the full contact and mixing between the gas molecules and the adsorbent particles, thereby improving the adsorption efficiency; under the guidance of the wavy grid, the gas molecules are in full contact with the second adsorbent layer (located inside the grid); the active sites on the surface of the adsorbent particles capture the target gas molecules to achieve adsorption separation; in the desorption stage, a negative pressure environment is created, and the gas molecules adsorbed on the adsorbent particles are released; the design of the wavy grid facilitates the uniform distribution and flow of the gas during the desorption process, thereby improving the desorption efficiency; by continuously repeating the process of adsorption, desorption and regeneration, the system achieves continuous concentration of the target gas.

[0036] The design of the wavy grid increases the surface area of ​​the adsorbent layer and provides more adsorption sites. At the same time, the formation of eddies and turbulence enhances the contact and mixing between gas molecules and adsorbent particles, further improving the adsorption efficiency. On the other hand, due to the elasticity of the grid, under the action of the airflow, the grid shakes and creates a sense of flow, further increasing the contact area, which has the effect of slowing down the gas and increasing the adsorption efficiency.

[0037] The wavy grid changes the flow path of the gas, reduces the flow dead zone, and improves the uniformity and mixing effect of the gas; this helps to ensure the uniform distribution of gas molecules throughout the adsorption layer and improves the utilization rate of the adsorption layer; the design of the wavy grid helps to disperse the impact of the airflow on the adsorption layer, reducing the risk of wear and blockage of the adsorption layer; this helps to extend the service life of the adsorption layer and improve the stability and reliability of the system; in the desorption stage, the design of the wavy grid helps to evenly distribute and flow the gas, making the desorption process more efficient; this helps to quickly release the gas molecules adsorbed on the adsorbent particles to prepare for the next round of adsorption process.

[0038] Optionally, a plurality of the second frames are provided, and all are connected to the grid frame.

[0039] By adopting the above technical solution and setting up multiple second frames, the stability of the grid is improved and excessive shaking of the grid is reduced.

[0040] Optionally, the adjustment mechanism comprises:

[0041] A sliding rod, slidably connected to the air inlet pipe and connected to the second frame;

[0042] A rotating blade, rotating in the air intake pipe;

[0043] A cam, disposed on the rotating leaf, abuts against the sliding rod and pushes the sliding rod to slide;

[0044] The reset member is arranged on the fixed frame and connected with the second frame, and is used for driving the second frame to approach the rotating blade.

[0045] By adopting the above technical solution, before the system is started, the second frame is kept in a position close to the rotating blade by the action of a reset member (such as a spring), and at this time, a certain gap is maintained between the sliding rod and the cam; when the mixed gas enters the adsorption chamber through the intake pipe, the airflow will impact the rotating blade, causing it to start rotating; the rotation of the rotating blade drives the cam to rotate together, and the contour design of the cam enables it to gradually contact the sliding rod and push it to slide during the rotation process; under the push of the cam, the sliding rod slides along the direction of the intake pipe, thereby driving the second frame connected to the sliding rod to move; the movement direction of the second frame depends on the rotation direction of the cam and the connection method of the sliding rod; usually, the design of the cam will make the second frame move in the gas flow. When the gas flow increases, it moves closer to the first frame to increase the adsorption area; when the gas flow decreases, it moves away from the first frame to reduce unnecessary energy consumption; when the gas flow decreases or stops, the rotating blade stops rotating, and the cam no longer pushes the sliding rod. At this time, the reset member (such as a spring) begins to play a role, driving the second frame to move to the initial position (i.e., the position close to the rotating blade); the reset member ensures that the second frame can stably return to the initial position when it is not needed, and prepare for the next adjustment; as the gas flow continues to change, a cyclic working process is formed between the rotating blade, the cam, the sliding rod and the reset member. This process ensures that the second frame can adjust its position in real time according to the change of gas flow, thereby optimizing the adsorption efficiency.

[0046] Optionally, the adsorption layer further comprises:

[0047] A guide plate is rotatably disposed on the fixed frame, with one end located at the second frame and the other end located at the first adsorbent layer;

[0048] The guide rod slides on the fixing frame, is connected with the second frame, and abuts against the guide plate to drive the guide plate to rotate.

[0049] By adopting the above technical solution, during the rotation of the rotating blades, the second frame slides, the second frame drives the guide rod to slide, the guide rod drives the guide plate to rotate, and the guide plate guides the pressurized initial gas, so that the direction of the gas blowing toward the first adsorbent layer changes, thereby increasing the adsorption efficiency and adsorption effect of the first adsorbent layer.

[0050] Optionally, two adjacent second frames are connected with a flexible chain.

[0051] By adopting the above technical solution, when a second frame slides, the flexible chain drives the connected second frame to slide slightly, so that the entire grid moves, the second adsorbent layer shakes, and the second adsorbent layer shakes as a whole, thereby increasing the adsorption effect.

[0052] In summary, the present application includes at least one of the following beneficial technical effects:

[0053] 1. It not only improves the adsorption efficiency, but also enhances the flexibility and adaptability of the system. It can make the gas fully contact with the adsorbent layer, so that the saturation rate of the adsorbent layer is consistent, thereby maintaining the adsorption effect, and at the same time, it can increase the contact area, thereby improving the adsorption effect; at the same time, the double adsorption method is adopted, which makes the ozone collection effect better;

[0054] 2. The wavy grid changes the flow path of the gas, reduces the dead zone of the flow, and improves the uniformity and mixing effect of the gas; this helps to ensure the uniform distribution of gas molecules throughout the adsorption layer and improves the utilization rate of the adsorption layer; the design of the wavy grid helps to disperse the impact of the airflow on the adsorption layer, reducing the risk of wear and blockage of the adsorption layer; this helps to extend the service life of the adsorption layer and improve the stability and reliability of the system; in the desorption stage, the design of the wavy grid helps the uniform distribution and flow of the gas, making the desorption process more efficient;

[0055] 3. During the rotation of the rotating blades, the second frame slides, the second frame drives the guide rod to slide, the guide rod drives the guide plate to rotate, the guide plate guides the pressurized initial gas, so that the direction of the gas blowing toward the first adsorbent layer changes, thereby increasing the adsorption efficiency and adsorption effect of the first adsorbent layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0056] Figure 1 is a flow chart of the pressure swing adsorption concentration method in an embodiment of the present application;

[0057] Figure 2 It is a structural schematic diagram of the tower body in the embodiment of the present application;

[0058] Figure 3 is a cross-sectional view of a tower body in an embodiment of the present application;

[0059] Figure 4 is a diagram showing the relative positions of the grid frame and the first frame in the embodiment of the present application;

[0060] Figure 5 yes Figure 3 A magnified view of middle;

[0061] Figure 6 yes Figure 3 Enlarged view of middle B;

[0062] Figure 7 yes Figure 3 Enlarged view of C in the middle.

[0063] Figure numerals: 100, tower body; 110, working chamber; 111, adsorption chamber; 112, exhaust chamber; 200, adsorption layer; 210, fixed frame; 220, first frame; 230, second frame; 240, grid; 250, adjustment mechanism; 251, sliding rod; 252, rotating blade; 253, cam; 254, reset member; 255, arc plate; 260, guide plate; 270, guide rod; 271, waist groove; 280, sliding rod; 300, air inlet pipe; 310, air inlet hole; 400, exhaust pipe; 500, sealing pipe; 510, connecting hole; 610, first protrusion; 620, second protrusion; 630, rotating ring; 640, reset spring; 650, jet pipe; 660, air supply pipe; 700, desorption module. DETAILED DESCRIPTION

[0064] The following combination Figures 1 to 7 This application is described in further detail.

[0065] This embodiment discloses an ozone pressure swing adsorption concentration method for semiconductor cleaning and etching.

[0066] Reference Figure 1 , an ozone pressure swing adsorption concentration method for semiconductor cleaning and etching, comprising the following steps:

[0067] Pretreatment: remove dust and impurities from the mixed gas of ozone and oxygen to obtain a cleaner mixed gas;

[0068] Gas compression: The mixed gas of ozone and oxygen is pressurized after dehydration to form a pressurized initial gas;

[0069] Adsorption separation: the concentration of the pressurized initial gas is adjusted so that the pressurized initial gas is in uniform contact with the adsorbent layer. The adsorbent layer adopts a combination of a fixed adsorbent layer and a flowing adsorbent layer. The thickness of the fixed adsorbent layer is adjusted according to the concentration, pressure, temperature or other requirements of the pressurized initial gas. The greater the concentration, the greater the pressure or the higher the temperature, the thicker the fixed adsorbent layer can be. During the adsorption process, the flow rate of the flowing adsorbent layer is adjusted; the pressurized initial gas first passes through the flowing adsorbent layer, and the flow of the flowing adsorbent layer disturbs the passing gas and changes its direction. Then, the remaining gas after adsorption by the flowing adsorbent layer passes through the fixed adsorbent layer again. When passing through the fixed adsorbent layer, a guide module is set to change the direction of the gas blown to the fixed adsorbent layer. Finally, the remaining gas is discharged after adsorption by the fixed adsorbent layer.

[0070] The flow rate of the flowing adsorbent layer can be adjusted by adjusting the pressure of the pressurized initial gas.

[0071] Desorption: The ozone adsorbed by the adsorbent is separated from the adsorbent by vacuuming. The separated ozone is stored and then compressed to form high-purity ozone concentrated gas for subsequent semiconductor cleaning and etching.

[0072] The embodiments of the present application also disclose a pressure swing adsorption concentration system.

[0073] Reference Figure 2 and Figure 3 The pressure swing adsorption concentration system includes the following modules: a pretreatment module for pretreatment of the mixed gas, a tower body 100 for providing a working space, an adsorption layer 200 arranged in the tower body 100, an air inlet pipe 300 arranged on the tower body 100 for connecting the tower body 100 and the processing module, an exhaust pipe 400 arranged on the tower body 100 for discharging the remaining gas, and a desorption module 700 arranged on the tower body 100 for separating and compressing the ozone adsorbed by the adsorption layer 200; when concentrating ozone, firstly, the mixed gas is subjected to impurity removal, dust removal, water removal and pressurization operations through the pretreatment module to form a pressurized initial gas, and then enters the tower body 100 through the air inlet pipe 300, the pressurized initial gas is adsorbed by the adsorption layer 200, and the remaining gas is discharged through the exhaust pipe 400, and after adsorption saturation, the ozone adsorbed by the adsorption layer 200 is released through the desorption module 700, and is compressed to form ozone concentrated gas.

[0074] The pretreatment module includes a filter, a dryer, a dust precision filter, an oil mist precision filter and an air compressor which are connected in sequence, and are used to remove impurities, dry, remove dust, remove oil mist, and compress and pressurize the mixed gas to form pressurized initial gas.

[0075] Reference Figure 3 and Figure 4A working chamber 110 is formed in the tower body 100, and the adsorption layer 200 includes a fixed frame 210 fixedly connected to the working chamber 110, the fixed frame 210 is an annular frame, and is arranged around the axis of the tower body 100; the fixed frame 210 divides the working chamber 110 into an adsorption chamber 111 and an exhaust chamber 112, and an installation chamber is opened on the fixed frame 210, and the two sides of the installation chamber correspond to and are connected with the adsorption chamber 111 and the exhaust chamber 112 one by one; a first frame 220 is detachably connected in the installation chamber, and a first adsorbent layer is formed on the first frame 220, and the first adsorbent layer is composed of multiple layers of adsorbent; a plurality of second frames 230 are slidably connected to the fixed frame 210, and the second frames 230 are vertically arranged and slide along the radial direction of the tower body 100; a grid frame 240 is detachably connected to the second frame 230, and the grid frame 2 40 is elastic and can be a flexible cloth. The grid 240 can be sewn by multiple layers of cloth or multiple layers of mesh material, and the second adsorbent layer is filled inside. The grid 240 is arranged in a wave shape along the vertical direction along the length direction of the second frame 230. Under the push of the pressurized initial gas, it can shake and form a fluid-like state, and the grids 240 on two adjacent second frames 230 have a margin to provide space for the second frames 230 to slide and pull. In order to facilitate the linkage sliding of multiple second frames 230, adjacent second frames 230 are connected by a flexible chain, one end of the flexible chain is connected to the end of the second frame 230, and the other end is connected to the middle of the adjacent second frame 230. An adjusting mechanism 250 is arranged on the fixed frame 210, and the adjusting mechanism 250 is connected to the second frame 230 and drives the second frame 230 to slide.

[0076] Reference Figure 3 and Figure 5 The air inlet pipe 300 is fixedly connected to the tower body 100 and is located on the inner side of the fixing frame 210, coincident with the axis of the tower body 100, and is provided with a plurality of air inlet holes 310, which are communicated with the adsorption chamber 111; an air supply pipe 660 is fixedly connected to the outer side of the tower body 100, the air supply pipe 660 is connected to the pretreatment module, and a plurality of jet tubes 650 are fixedly connected to one end of the air supply pipe 660 away from the pretreatment module, and one end of the jet tube 650 away from the air supply pipe 660 is arranged around the circumference of the air inlet pipe 300, and is connected to the air inlet pipe 300; the exhaust pipe 400 is fixedly connected to the tower body 100 and is formed with an annular pipe section, which is arranged around the bottom of the tower body 100 and is provided with a connecting hole communicated with the exhaust chamber 112.

[0077] Reference Figures 3 to 6The adjusting mechanism 250 includes a plurality of sliding rods 251 slidably connected to the fixing frame 210. The sliding rods 251 are arranged and slidably connected to the air inlet pipe 300. The sliding rods 251 correspond to the second frame 230 and are connected to the second frame 230. An arc plate 255 is formed at one end of the sliding rod 251 away from the second frame 230. The arc plate 255 is bent in the air inlet pipe 300. A rotating blade 252 is rotatably connected in the air inlet pipe. The jet pipe 650 faces the rotating blade 252, and the rotating blade 252 moves along with the jet. The rotating blade 252 rotates due to the air supply of the tube 650; the rotating blade 252 is coaxially fixedly connected with the cam 253, the cam 253 can abut against the arc plate 255, and separate from the arc plate 255 as it rotates; a reset member 254 is arranged on the fixed frame 210, the reset member 254 can be a spring, the spring is arranged on the fixed frame 210 and connected with the second frame 230, and pushes the second frame 230 to approach the air intake pipe 300; the reset member 254 cooperates with the flexible chain to reduce the vibration frequency of the second frame 230 when the reset member 254 is restored.

[0078] In order to facilitate the turbulence of the gas close to the first frame 220, a plurality of guide plates 260 are rotatably connected to the fixed frame 210, and the guide plates 260 are respectively located on both sides of the second frame 230, and one end of the guide plate 260 away from the second frame 230 is tilted away from the sliding axis of the second frame 230; two guide rods 270 are fixedly connected to the second frame 230, and the two guide rods 270 correspond to the guide plates 260 on both sides of the second frame 230 respectively, and a waist groove 271 is opened at one end of the guide rod 270 close to the guide plate 260, and the opening axis of the waist groove 271 is perpendicular to the sliding axis of the second frame 230, and a sliding rod 280 is slidably connected in the waist groove 271, and the sliding rod 280 is fixedly connected to the guide plate 260. As the second frame 230 slides, the guide plate 260 rotates through the cooperation of the waist groove 271 and the sliding rod 280.

[0079] In order to adjust the air supply concentration of the air inlet pipe 300 to the adsorption chamber 111 to be consistent, a sealing pipe 500 is slidably connected inside the air inlet pipe 300, and a plurality of connecting holes 510 are opened on the air duct, and the connecting holes 510 correspond to the air inlet holes 310; the connecting holes 510 increase from bottom to top, and the lowermost connecting hole 510 is the same size as the air inlet hole 310, and is completely staggered. As the sealing pipe 500 slides, the lower connecting hole 510 is completely connected with the air inlet hole 310; the difference between the length of the uppermost connecting hole 510 and the length of the lowermost connecting hole 510 is the sliding distance of the sealing pipe 500.

[0080] Reference Figure 5 and Figure 7In order to facilitate the sliding of the sealing tube 500, the rotating blade 252 is coaxially fixedly connected to a rotating ring 630, a first protrusion 610 is fixedly connected to the rotating ring 630, and a second protrusion 620 is fixedly connected to the sealing tube 500. The first protrusion 610 and the second protrusion 620 can abut against each other, and a protrusion is formed on the side close to each other, and the cross-sectional area of ​​the end close to each other is smaller than the cross-sectional area of ​​the end away from each other; in order to facilitate the resetting of the sealing tube 500, an installation groove is opened on the inner wall of the intake pipe 300, and a return spring 640 is arranged in the installation groove. The return spring 640 is connected to the sealing tube 500 and is used to drive the sealing tube 500 to approach the rotating ring 630.

[0081] The desorption module 700 includes a negative pressure tube fixedly connected to the tower body 100, the negative pressure tube is connected and communicated with the end of the adsorption chamber 111 close to the ground, a switch valve is provided on the negative pressure tube, the end of the negative pressure tube away from the tower body 100 is connected to a Roots vacuum pump, the air outlet end of the Roots vacuum pump is connected to an air compressor, and the air outlet end of the air compressor is connected to an air storage tank.

[0082] The implementation principle of a pressure swing adsorption concentration system in an embodiment of the present application is as follows: the mixed gas first passes through a pretreatment module, the filter is responsible for preliminarily removing impurities in the gas, the dryer is used to dry the gas to prevent moisture from affecting subsequent processes, the dust precision filter and the oil mist precision filter further remove tiny dust and oil mist; the air compressor compresses and pressurizes the gas to form pressurized initial gas.

[0083] The pre-treated pressurized initial gas enters the adsorption chamber 111 in the tower body 100 through the air inlet pipe 300. Under the push of the pressurized initial gas, the grid 240 on the second frame 230 will shake and form a fluid state, which is conducive to the uniform distribution and adsorption of the gas in the adsorption layer 200. At the same time, the pressurized initial gas pushes the rotating blade 252 to rotate, the rotating blade 252 drives the arc plate 255 to slide, the arc plate 255 drives the sliding rod 251 to slide, the sliding rod 251 drives the second frame 230 to slide, the second frame 230 drives the grid 240 to shake, and the sliding second frame 230 drives the adjacent second frame 230 to slide through the flexible chain; during the sliding process of the second frame 230, the guide plate 260 is driven to rotate through the guide rod 270 to change the gas flow direction; after the pressurized initial gas passes through the second adsorbent layer, it contacts the first adsorbent layer, and then after two adsorptions, the remaining gas will be discharged through the exhaust pipe 400.

[0084] When the adsorption layer 200 reaches a saturated state, the desorption module 700 starts to work; the desorption module 700 is connected to the end of the adsorption chamber 111 close to the ground through a negative pressure pipe, and a switch valve is provided on the negative pressure pipe. By opening the switch valve and starting the Roots vacuum pump, the ozone on the adsorption layer 200 can be extracted; the Roots vacuum pump further compresses the extracted ozone through an air compressor, and then sends it into a gas storage tank to form ozone concentrated gas.

[0085] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. An ozone pressure swing adsorption concentration method for semiconductor cleaning and etching, characterized in that: The following steps are involved: Gas compression: The mixed gas of ozone and oxygen is pressurized after dehydration to form a pressurized initial gas; Adsorption separation: The concentration of the pressurized initial gas is adjusted so that the pressurized initial gas is in uniform contact with the adsorbent layer. The adsorbent layer adopts a combination of a fixed adsorbent layer and a flowing adsorbent layer, so that the pressurized initial gas first passes through the flowing adsorbent layer. The flowing adsorbent layer is located inside the grid. The grid is elastic and wavy in the vertical direction. Under the push of the pressurized initial gas, it shakes to form a fluid. The flow of the flowing adsorbent layer disturbs the passing gas and changes its direction. Then, the remaining gas after adsorption by the flowing adsorbent layer passes through the fixed adsorbent layer again. When passing through the fixed adsorbent layer, a guide module is set to change the direction of the gas blown to the fixed adsorbent layer. Finally, after adsorption by the fixed adsorbent layer, the remaining gas is discharged; Desorption: The ozone adsorbed by the adsorbent is separated from the adsorbent by vacuuming, and then compressed to form high-purity ozone concentrated gas.

2. The ozone pressure swing adsorption concentration method for semiconductor cleaning and etching according to claim 1, characterized in that: In the adsorptive separation step, the flow rate of the flowing adsorbent layer and / or the thickness of the fixed adsorbent layer are adjusted.

3. The ozone pressure swing adsorption concentration method for semiconductor cleaning and etching according to claim 1 or 2, characterized in that: A pre-treatment step is also included to remove dust and impurities from the mixed gas of ozone and oxygen before the gas is compressed.

4. A pressure swing adsorption concentration system for implementing the ozone pressure swing adsorption concentration method for semiconductor cleaning and etching as claimed in any one of claims 1 to 3, characterized in that: Includes the following modules: A pre-processing module, used for pre-processing the mixed gas; A tower body (100) is formed with a working chamber (110); An adsorption layer (200) is arranged in the tower body (100) and divides the working chamber (110) into an adsorption chamber (111) and an exhaust chamber (112); An air inlet pipe (300), one end of which is connected to the pretreatment module, and the other end of which is connected to the tower body (100) and extends into the adsorption chamber (111); an exhaust pipe (400) disposed on the tower body (100) and connected to the exhaust chamber (112); A desorption module (700) is communicated with the adsorption chamber (111), uses negative pressure desorption to reduce the adsorption layer (200), and collects compressed ozone; The adsorption layer (200) comprises: A fixing frame (210) is arranged in the tower body (100) and is provided with an installation cavity communicating with the adsorption cavity (111) and the exhaust cavity (112); A first frame (220) is arranged in the installation cavity and is formed with a first adsorbent layer; A second frame (230) is slidably disposed in the installation cavity and is close to or away from the first frame (220); A grid frame (240) having elasticity, connected to the second frame (230), and having a second adsorbent layer disposed therein; An adjustment mechanism (250) is arranged on the fixing frame (210), connected to the second frame (230), and used for driving the second frame (230) to slide.

5. The pressure swing adsorption concentration system according to claim 4, characterized in that: The grid (240) is wavy in the vertical direction.

6. The pressure swing adsorption concentration system according to claim 4 or 5, characterized in that: A plurality of the second frames (230) are provided, and all are connected to the grid frame (240).

7. The pressure swing adsorption concentration system according to claim 5, characterized in that: The adjustment mechanism (250) comprises: A sliding rod (251) slidably connected to the air inlet pipe (300) and connected to the second frame (230); A rotating blade (252) rotates in the air intake pipe (300); A cam (253) is disposed on the rotating leaf (252), abutting against the sliding rod (251) and pushing the sliding rod (251) to slide; A reset member (254) is disposed on the fixed frame (210), connected to the second frame (230), and used for driving the second frame (230) to approach the rotating blade (252).

8. The pressure swing adsorption concentration system according to claim 5, characterized in that: The adsorption layer (200) further comprises: a guide plate (260) rotatably disposed on the fixed frame (210), with one end located at the second frame (230) and the other end located at the first adsorbent layer; A guide rod (270) slides on the fixing frame (210), is connected to the second frame (230), and abuts against the guide plate (260), so as to drive the guide plate (260) to rotate.

9. The pressure swing adsorption concentration system according to claim 4 or 5, characterized in that: Two adjacent second frames (230) are connected with a flexible chain.

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