Light control calibration device and light control dynamic calibration method

Abstract

The present application relates to a kind of light control calibration tool and light control dynamic calibration method.The light control calibration tool of the present application particularly includes controllable photoresistor branch, and by means of known resistance branch and voltage measurement branch, the controllable resistance value of controllable photoresistor branch can be accurately calculated, then using the characteristics that the resistance of photoresistor in controllable photoresistor branch is controllable under illumination, and its own resistance is stable, any required accurate resistance value for calibration is provided, without frequently replacing standard resistance sheet, avoid the damage of calibration instrument to improve safety, while also with high flexibility, the test of different range resistance value of the equipment to be measured can be completed, finally realizing the high safety, flexible and accurate dynamic calibration of the equipment to be measured.

Description

Technical Field

[0001] This invention relates to the field of calibration and testing technology, and in particular to a light-controlled calibration fixture and a light-controlled dynamic calibration method. Background Technology

[0002] Currently, the electrical performance of superconducting devices is often tested using the IV mode of a semi-automatic probe station. In the process of testing the electrical performance of superconducting devices, resistance measurement is particularly important in superconducting processes, and the stability and accuracy of the test results directly affect the yield of the tested product. Therefore, to ensure the reliability of the equipment's test results, the probe station needs to be calibrated with resistors of different resistance values ​​for different ranges before formally testing the device under test.

[0003] Currently, probe station calibration mainly relies on standard resistors. However, the existing standard resistors on the market have limited resistance values ​​and are inconsistent, resulting in insufficient calibration flexibility. Furthermore, the accuracy and specifications of existing standard resistors also have significant errors, leading to poor calibration precision. In addition, the specifications of existing standard resistors, especially their height, are not uniform. When using standard resistors with different resistance values ​​to calibrate the probe station, the equipment is easily damaged during the replacement of standard resistors due to differences in their specifications.

[0004] Therefore, current calibration schemes for probe stations suffer from insufficient safety, as well as inadequate calibration flexibility and accuracy. Summary of the Invention

[0005] In view of this, embodiments of the present invention provide a light-controlled calibration fixture and a light-controlled dynamic calibration method to solve the technical problems of insufficient security, inflexibility and accuracy of current calibration methods.

[0006] In a first aspect, a light-controlled calibration fixture is provided, comprising a power supply branch, a device under test (DUT) selection branch, a known resistance branch, a controllable photoresistor branch, a first voltage measurement branch, and a second voltage measurement branch.

[0007] The positive terminal of the power supply branch is connected to the input terminal of the selected branch of the device under test, the negative terminal of the power supply branch is grounded, the output terminal of the selected branch of the device under test is connected to the input terminal of the controllable photoresistor branch, the output terminal of the controllable photoresistor branch is connected to the input terminal of the known resistance branch, and the output terminal of the known resistance branch is grounded.

[0008] The second voltage measurement branch is connected in parallel with the controllable photoresistor branch, and the first voltage measurement branch is connected in parallel with the device under test selective connection branch.

[0009] Secondly, a dynamic optical calibration method for the aforementioned optical calibration fixture is provided, the method comprising:

[0010] The device under test is controlled to connect to the selected branch. Based on the power supply voltage of the power supply branch, the first voltage measured by the first voltage measurement branch, the second voltage measured by the second voltage measurement branch, and the resistance value of the known resistance branch, the loop current flowing through the known resistance branch is determined.

[0011] Based on the loop current and the second voltage, determine the controllable resistance value of the controllable photoresistor branch, and based on the loop current and the first voltage, determine the resistance of the device under test;

[0012] The controllable resistance value of the controllable photoresistor branch is changed, and the resistance of the device under test is determined accordingly after each change of the controllable resistance value of the controllable photoresistor branch, so as to complete the test of the resistance value of the device under test in different ranges.

[0013] The advantages of this invention compared to the prior art are:

[0014] The light-controlled calibration apparatus of this invention includes a power supply branch, a device under test (DUT) selection branch, a known resistance branch, a controllable photoresistor branch, a first voltage measurement branch, and a second voltage measurement branch. Utilizing the known resistance branch and the voltage measurement branch, the controllable resistance value of the controllable photoresistor branch can be accurately calculated. Then, taking advantage of the controllable resistance value of the photoresistor in the controllable photoresistor branch, which is controllable under light and has a stable resistance, the required accurate resistance value for calibration can be provided by adjusting the light intensity received by the photoresistor. This eliminates the need for frequent replacement of standard resistors as in existing technologies, avoiding damage to the calibration instrument and improving safety. Furthermore, it allows for highly flexible and accurate testing of different resistance ranges of the DUT, ultimately achieving highly safe, flexible, and accurate dynamic calibration of the DUT. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the circuit structure of a light-controlled calibration fixture provided in an embodiment of the present invention;

[0017] Figure 2 This is a schematic flowchart of a light-controlled dynamic calibration method provided in an embodiment of the present invention. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] It should be understood that the invention can be embodied in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, for clarity, the dimensions and relative dimensions of layers and regions may be exaggerated. The same reference numerals denote the same elements throughout.

[0020] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this invention, the first element, component, area, layer, or portion discussed below may be referred to as the second element, component, area, layer, or portion.

[0021] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below,” “under,” or “below” other elements or features will be oriented “above” other elements or features. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0022] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0023] To fully understand this invention, detailed structures and steps will be presented in the following description to illustrate the technical solution proposed by this invention. Preferred embodiments of the invention are described in detail below; however, in addition to these detailed descriptions, the invention may have other embodiments.

[0024] like Figure 1 The diagram shown is a schematic diagram of the circuit structure of a light-controlled calibration fixture provided in an embodiment of the present invention. It includes a power supply branch 101, a switch branch 102, a device under test selection branch 103, a known resistance branch 104, a controllable photoresistor branch 105, a first voltage measurement branch 106, and a second voltage measurement branch 107.

[0025] In this circuit, the negative terminal of the power supply branch 101 is grounded, the positive terminal of the power supply branch 101 is connected to one end of the switch branch 102, the other end of the switch branch 102 is connected to the input terminal of the device under test selection branch 103, the output terminal of the device under test selection branch 103 is connected to the input terminal of the controllable photoresistor branch 105, the output terminal of the controllable photoresistor branch 105 is connected to the input terminal of the known resistance branch 104, and the output terminal of the known resistance branch 104 is grounded.

[0026] In addition, the second voltage measurement branch 107 is connected in parallel with the controllable photoresistor branch 105, and the first voltage measurement branch 106 is connected in parallel with the device under test selection branch 103.

[0027] The light-controlled calibration fixture shown in this embodiment specifically includes a controllable photoresistor branch 105. Since the resistance of the photoresistor is directly affected by the intensity of light, it is controllable. Therefore, the resistance of the photoresistor can be purposefully changed by altering the light intensity received by the photoresistor. The overall loop current of the light-controlled calibration fixture is calculated using the known resistance value of the known resistance branch 104 and the voltage on the known resistance branch calculated from the power supply branch and two voltage measurement branches. The resistance value of the controllable photoresistor branch is then calculated using the loop current and the voltage measured by the second voltage measurement branch. This allows for the adjustment and modification of the resistance using the sensitivity and stability of the photoresistor, resulting in an ideal calibration resistor with a precisely known resistance value. Furthermore, when changing the resistance value required for calibration, it is not necessary to replace standard resistors with different resistance values ​​as in existing technologies; only the light intensity needs to be changed. This avoids the damage to the calibration instrument that may result from frequent replacement of standard resistors, improving safety, calibration flexibility, and calibration efficiency.

[0028] Since the function of the aforementioned switch branch 102 is only to control the power-on and power-off of the overall circuit of the calibration fixture, in other embodiments, the optical control calibration fixture may not include the aforementioned switch branch 102. In this case, the positive terminal of the power supply branch 101 is directly connected to the input terminal of the device under test selective connection branch 103.

[0029] This simplifies the overall structure of the optical calibration fixture, reducing costs while improving reliability.

[0030] In one embodiment, the controllable photoresistor branch 105 includes an adjustable current source, a light-emitting diode (LED), and a photoresistor. The output terminal of the adjustable current source is connected to the positive terminal of the LED, and the negative terminal of the LED is connected to the input terminal of the adjustable current source. The resistance value of the photoresistor is controlled by the light intensity of the LED. That is, the photoresistor is arranged adjacent to the LED, and the photoresistor receives the light emitted by the LED.

[0031] In this embodiment, by changing the magnitude of the current output by the adjustable current source, the light intensity emitted by the light-emitting diode can be changed. This change in light intensity allows control of the photoresistor's resistance, achieving flexible adjustment of the overall resistance of the controllable photoresistor branch. The adjustable current source in this embodiment includes, for example: Figure 1 The two current output levels shown are, in other words, current level I. source1 and current range I source2 In other embodiments, other adjustable current sources may be selected as needed, but this embodiment will not impose specific limitations.

[0032] Of course, in other embodiments, the controllable photoresistor branch 105 can also be configured as follows: Figure 1As shown, an optocoupler 1 is used to excite and generate light. Then, the light-receiving part in the optocoupler 1 controls the current flowing through the light-emitting diode, thereby controlling the light intensity received by the photoresistor. By using this light-electricity-light conversion process, the stability of the light intensity is improved, thereby improving the stability and accuracy of the resistance value of the controllable photoresistor branch 105 used for calibration, and improving the calibration effect.

[0033] Preferably, the optocoupler 1, the light-emitting diode, and the photoresistor are all housed in the light-shielding housing 2.

[0034] In one embodiment, the device under test (DUT) selection branch 103 includes a first single-pole double-throw (SPD) switch K2 and a second SPD switch K3. The moving end of the first SPD switch K2 is connected to the input end of the DUT selection branch 103, and the moving end of the second SPD switch K3 is connected to the output end of the DUT selection branch 103. The first stationary end of the first SPD switch K2 is connected to the first stationary end of the second SPD switch K3, i.e., as shown in the figure. Figure 1 The two ends of the switch K2 and switch K3 shown are directly connected, and the second stationary end of the first single-pole double-throw switch K2 is also as shown. Figure 1 As shown in the diagram, terminal c, and the second stationary terminal of the second single-pole double-throw switch K3, are also as shown in the diagram. Figure 1 The d-end shown is used to connect the device under test, i.e. Figure 1 The two ends of the DUT shown.

[0035] By using two single-pole double-throw switches to form the device under test (DUT) selection branch 103 as described above, the resistance value of the controllable photoresistor branch 105 can be adjusted in both cases, whether the DUT is connected or not, by simultaneously connecting both switches to the first stationary terminal or the second stationary terminal. This further improves the calibration flexibility of the light-controlled calibrator.

[0036] In one embodiment, the power supply branch 101 is as follows: Figure 1 The diagram includes a power supply U1, which is a probe station power supply. The positive terminal of the probe station power supply is connected to the positive terminal of the power supply branch, and the negative terminal of the probe station power supply is connected to the negative terminal of the power supply branch.

[0037] The excellent voltage stability of the probe station power supply can further ensure the accuracy of the resistance value of the controllable photoresistor branch 105 calculated using Ohm's law, thereby improving the calibration accuracy.

[0038] In one embodiment, the known resistance branch 104 includes, for example, Figure 1 The first resistor R1 is shown, and the resistance value of R1 is selected manually;

[0039] Furthermore, the first voltage measurement branch 106 includes a first voltmeter V1, and the second voltage measurement branch 107 includes a second voltmeter V2.

[0040] Furthermore, in a preferred embodiment, the second voltage measurement branch further includes a first on / off switch K4, which is connected in series with the second voltmeter V2 in the second voltage measurement branch.

[0041] Considering that the resistance of the photoresistor is inversely proportional to the light intensity, the resistance of the photoresistor is very high when the current source is not working because it is not exposed to light. At this time, the voltage across its two ends is very high. If the second voltmeter V2 and the photoresistor are always connected in parallel, the high voltage across the photoresistor may exceed the range of the second voltmeter V2 and damage it. Therefore, by using the additional first on / off switch K4, the connection between the second voltmeter V2 and the controllable photoresistor branch 105 can be controlled to avoid damage to the second voltmeter V2.

[0042] It should be noted that in the above embodiment, the first voltage measurement branch 106 is directly connected in parallel with the device under test selection branch 103. In other embodiments, it is easy to understand that the first voltage measurement branch 106 can also be connected in the same way as... Figure 1 As shown, connecting in parallel with the device under test (DUT) does not change the results in either parallel connection method.

[0043] like Figure 2 The diagram shown is a schematic flowchart of a dynamic calibration method for light control applied to the aforementioned light control calibration fixture, provided by an embodiment of the present invention. The method includes the following steps.

[0044] Step S201: Control the device under test to connect to the selected branch. Determine the loop current flowing through the known resistance branch based on the power supply voltage of the power supply branch, the first voltage measured by the first voltage measurement branch, the second voltage measured by the second voltage measurement branch, and the resistance value of the known resistance branch.

[0045] like Figure 1As shown, since the calibration fixture is used to test and calibrate the device under test (DUT), the DUT is first connected to the DUT selection branch 103. When the switch branch 102 is included in the overall circuit structure of the optical control calibration fixture, the switch branch 102 is closed. When the second voltage measurement branch includes the first on / off switch K4, the first on / off switch K4 is closed. Then, based on the power supply voltage of the power supply branch, the first voltage measured by the first voltage measurement branch, and the second voltage measured by the second voltage measurement branch, the voltage on the known resistance branch is determined. Since the resistance of the known resistance branch is known, the current flowing through the known resistance branch can be calculated based on Ohm's law. Since other branches are connected in series with the known resistance branch, the current flowing through the known resistance branch is the overall loop current of the optical control calibration fixture.

[0046] The known current flowing through the resistor branch is:

[0047]

[0048] Wherein, I is the current flowing through the known resistor branch, that is, the loop current, R1 is the resistance value of the known resistor branch, U1 is the power supply voltage of the power supply branch, V1 is the first voltage measured by the first voltage measurement branch, and V2 is the second voltage measured by the second voltage measurement branch.

[0049] Step S202: Determine the controllable resistance value of the controllable photoresistor branch based on the loop current and the second voltage, and determine the resistance of the device under test based on the loop current and the first voltage.

[0050] After determining the current of the overall circuit of the photoelectric calibration fixture, the controllable resistance value of the controllable photoresistor branch can be calculated based on the second voltage measured by the second voltage measurement branch:

[0051]

[0052] Among them, R L The controllable resistance value of the controllable photoresistor branch;

[0053] Furthermore, based on the loop current and the first voltage measured in the first voltage measuring branch, the resistance value of the device under test can be calculated.

[0054]

[0055] Among them, R DUT The resistance of the device under test is denoted as .

[0056] Step S203: Change the controllable resistance value of the controllable photoresistor branch, and determine the resistance of the device under test after each change of the controllable resistance value of the controllable photoresistor branch, thereby completing the test of the device under test for different ranges of resistance values.

[0057] Since the measurement requirements of the device under test are to complete calibration tests of different resistance values, and the initial controllable resistance value of the controllable photoresistor branch is likely not the expected value, after obtaining the initial controllable resistance value of the controllable photoresistor branch, it is necessary to change the controllable resistance value of the controllable photoresistor branch. The purpose is to adjust the controllable resistance value of the controllable photoresistor branch to the resistance value required for calibration. After each change of the controllable resistance value of the controllable photoresistor branch, the resistance of the device under test is determined again to complete the test of different resistance values ​​of the device under test.

[0058] The beneficial effects achievable in this embodiment have been described in the above-described light control calibration fixture embodiments, and therefore will not be repeated here.

[0059] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all be included within the protection scope of the present invention.

Claims

1. A light-controlled calibration fixture, characterized in that, It includes a power supply branch, a device under test (DUT) connection branch, a known resistance branch, a controllable photoresistor branch, a first voltage measurement branch, and a second voltage measurement branch; The positive terminal of the power supply branch is connected to the input terminal of the selected branch of the device under test, the negative terminal of the power supply branch is grounded, the output terminal of the selected branch of the device under test is connected to the input terminal of the controllable photoresistor branch, the output terminal of the controllable photoresistor branch is connected to the input terminal of the known resistance branch, and the output terminal of the known resistance branch is grounded. The second voltage measurement branch is connected in parallel with the controllable photoresistor branch, and the first voltage measurement branch is connected in parallel with the device under test selective connection branch.

2. The optical calibration fixture according to claim 1, characterized in that, The controllable photoresistor branch includes an adjustable current source, a light-emitting diode, and a photoresistor; The output terminal of the adjustable current source is connected to the positive terminal of the light-emitting diode, the negative terminal of the light-emitting diode is connected to the input terminal of the adjustable current source, and the resistance value of the photoresistor is controlled by the light intensity of the light-emitting diode.

3. The optical calibration fixture according to claim 1, characterized in that, The device under test (DUT) selection branch includes a first single-pole double-throw (SPD) switch and a second SPD switch. The moving end of the first SPD switch is connected to the input end of the DUT selection branch, and the moving end of the second SPD switch is connected to the output end of the DUT selection branch. The first stationary end of the first SPD switch is connected to the first stationary end of the second SPD switch. The second stationary ends of the first SPD switch and the second stationary ends of the second SPD switch are used to connect the two ends of the DUT.

4. The optical calibration fixture according to claim 1, characterized in that, The power supply branch includes a probe station power supply, the positive terminal of which is connected to the positive terminal of the power supply branch, and the negative terminal of which is connected to the negative terminal of the power supply branch.

5. The optical calibration fixture according to claim 1, characterized in that, The known resistor branch includes a first resistor, the value of which is selected manually.

6. The optical calibration fixture according to claim 1, characterized in that, The first voltage measurement branch includes a first voltmeter, and the second voltage measurement branch includes a second voltmeter.

7. The optical calibration fixture according to claim 6, characterized in that, The second voltage measurement branch also includes a first on / off switch, which is connected in series with the second voltmeter in the second voltage measurement branch.

8. A light-controlled dynamic calibration method, characterized in that, Applied to the optical calibration fixture of claim 1, the method includes: The device under test is controlled to connect to the selected branch. Based on the power supply voltage of the power supply branch, the first voltage measured by the first voltage measurement branch, the second voltage measured by the second voltage measurement branch, and the resistance value of the known resistance branch, the loop current flowing through the known resistance branch is determined. Based on the loop current and the second voltage, determine the controllable resistance value of the controllable photoresistor branch, and based on the loop current and the first voltage, determine the resistance of the device under test; The controllable resistance value of the controllable photoresistor branch is changed, and the resistance of the device under test is determined accordingly after each change of the controllable resistance value of the controllable photoresistor branch, so as to complete the test of the resistance value of the device under test in different ranges.

9. The light-controlled dynamic calibration method according to claim 8, characterized in that, The step of determining the loop current flowing through the known resistance branch based on the power supply voltage of the power supply branch, the first voltage measured by the first voltage measuring branch, the second voltage measured by the second voltage measuring branch, and the resistance value of the known resistance branch includes: Calculate the current flowing through the known resistor branch: Wherein, I is the current flowing through the known resistor branch, that is, the loop current, R1 is the resistance value of the known resistor branch, U1 is the power supply voltage of the power supply branch, V1 is the first voltage measured by the first voltage measurement branch, and V2 is the second voltage measured by the second voltage measurement branch.

10. The light-controlled dynamic calibration method according to claim 9, characterized in that, The controllable resistance value of the controllable photoresistor branch is: Among them, R L The controllable resistance value of the controllable photoresistor branch; The resistance of the device under test is: Among them, R DUT The resistance of the device under test is denoted as .

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