Substrate storage container and cover-side substrate support part

Abstract

The invention provides a substrate storage container and a cover body side substrate supporting part. The substrate storage container is provided with: a cover body-side substrate support section (73) capable of supporting the edge sections of the plurality of substrates when the container main body opening is closed by the cover body; and a rear-side substrate support section that supports the plurality of substrates in a state in which the edge sections of the plurality of substrates are aligned in cooperation with the lid-side substrate support section (73) when the container main body opening section is closed by the lid, the lid-side substrate support section (73) having a support flat surface (731) that supports the substrates by coming into contact with the peripheral surfaces of the respective edge sections of the plurality of substrates, and the rear-side substrate support section (731) being configured so as to support the plurality of substrates in a state in which the edge sections of the plurality of substrates are aligned in a state in which the lid-side substrate support section (73) is aligned with the edge sections of the plurality of substrates. Supporting flat surfaces (731), which are in contact with the peripheral surfaces of the edge portions of adjacent substrates among the plurality of substrates, have overlapping portions (733) that face each other in a direction parallel to the upper surfaces of the substrates.

Description

Technical Field

[0001] The present invention relates to a substrate storage container and a cover-side substrate support portion used when storing, storing, conveying, and transporting substrates such as semiconductor wafers. Background Art

[0002] Conventionally, there is known a substrate storage container including a container body and a cover as a substrate storage container for storing substrates composed of semiconductor wafers and transporting them in a process within a factory (for example, see Patent Documents 1 and 2).

[0003] One end of the container body has an opening peripheral portion on which an opening of the container body is formed. The other end of the container body has a closed cylindrical wall portion. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by the wall portion and can store substrates. The cover body can be detached relative to the opening peripheral portion and can close the opening of the container body. The side substrate support portion is arranged in pairs on the wall portion in the substrate storage space. When the opening of the container body is not closed by the cover body, the side substrate support portion can support the edge of the substrate in a state where adjacent substrates are separated and arranged at a predetermined interval from each other.

[0004] A front holding member is provided on the portion of the cover body and on the portion opposite to the substrate storage space when the opening of the container body is closed. When the opening of the container body is closed by the cover body, the front holding member can support the edge of the substrate. In addition, an inner substrate support portion is provided on the wall portion in a paired manner with the front holding member. The inner substrate support portion can support the edge of the substrate. When the opening of the container body is closed by the cover body, the inner substrate support portion supports the substrate by cooperating with the front holding member, and holds the substrates in a state where adjacent substrates are arranged and separated from each other at a predetermined interval.

[0005] Patent Document 1: Japanese Patent Publication No. 6375577 Patent document 2: Japanese Patent Publication No. 6258069

[0006] In the semiconductor manufacturing process, substrates that have been thinned by grinding or the like are sometimes stored in substrate storage containers for transportation. In this case, the substrates may be bent, broken, or damaged due to their own weight or vibrations and slight impacts during transportation. Therefore, it is considered that the plurality of support members supporting the substrates in the substrate storage container are configured to have a wide spacing so as to avoid such breakage and damage during transportation. However, due to the above-mentioned deflection, when the container body opening is closed by the cover, due to the generation of transverse grooves, etc., it is sometimes impossible to cooperate with the front holding member to support the substrate. Summary of the invention

[0007] An object of the present invention is to provide a substrate storage container and a cover-side substrate support portion that can hold a thin substrate without breakage or damage when the substrate is bent due to its own weight or impact.

[0008] The substrate storage container of the present invention comprises: a container body, comprising a cylindrical wall portion, the wall portion having a container body opening formed at one end and the other end being closed, the inner surface of the wall portion forming a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening; a cover body capable of being detached from the container body opening and capable of closing the container body opening; a cover body side substrate support portion, which is arranged as a part of the cover body and is a portion opposite to the substrate storage space when the container body opening is closed by the cover body, and is capable of supporting edge portions of the plurality of substrates when the container body opening is closed by the cover body; and The inner substrate support portion is arranged in pair with the cover body side substrate support portion in the substrate storage space, and can support the edge portions of the multiple substrates. When the container body opening is closed by the cover body, the inner substrate support portion cooperates with the cover body side substrate support portion to support the multiple substrates in a state where the edge portions of the multiple substrates are arranged. The cover body side substrate support portion has a supporting flat surface, and the supporting flat surface abuts against the peripheral surfaces of the edge portions of each of the multiple substrates to support the substrates. The supporting flat surface abutting against the peripheral surfaces of the edge portions of each adjacent substrate among the multiple substrates has an overlapping portion opposing in a direction parallel to the upper surface of the substrate.

[0009] In addition, it is preferred that a plurality of the supporting flat surfaces are provided, one each relative to the peripheral surface of the edge portion of each of the plurality of substrates. In addition, it is preferred that the supporting flat surface is located at the free end of the cantilever spring. In addition, it is preferred that the supporting flat surface abuts against the one substrate at a point on the peripheral surface of the edge portion of the front portion of one of the substrates. In addition, it is preferred that the plurality of substrates are arranged and stored in the substrate storage space, and the length of the supporting flat surface in the arrangement direction of the plurality of substrates is greater than 5 mm. In addition, it is preferred that the area of ​​the supporting flat surface is 50 mm. 2 above.

[0010] In addition, the cover body side substrate support portion of the present invention is a cover body side substrate support portion of a substrate storage container, wherein the substrate storage container comprises: a container body, which has a cylindrical wall portion, the wall portion having a container body opening portion formed at one end and the other end being closed, and an inner surface of the wall portion is used to form a substrate storage space that can store a plurality of substrates and is connected to the container body opening portion; a cover body that can be detached relative to the container body opening portion and can close the container body opening portion; the cover body side substrate support portion is arranged on a part of the cover body and is a portion opposite to the substrate storage space when the container body opening portion is closed by the cover body, and can be closed when the container body opening is closed by the cover body. The cover body side substrate supporting portion is capable of supporting the edge portions of the multiple substrates; and an inner substrate supporting portion, which is arranged in pair with the cover body side substrate supporting portion in the substrate storage space and is capable of supporting the edge portions of the multiple substrates. When the container main body opening is closed by the cover body, the inner substrate supporting portion cooperates with the cover body side substrate supporting portion to support the multiple substrates in a state where the edge portions of the multiple substrates are arranged. The cover body side substrate supporting portion has a supporting flat surface, and the supporting flat surface abuts against the peripheral surface of the edge portion of each of the multiple substrates to support the substrates. The supporting flat surface abutting against the peripheral surface of the edge portion of each adjacent substrate among the multiple substrates has an overlapping portion opposing in a direction parallel to the upper surface of the substrate.

[0011] In addition, it is preferred that a plurality of the supporting flat surfaces are provided, one each relative to the peripheral surface of the edge portion of each of the plurality of substrates. In addition, it is preferred that the supporting flat surface is located at the free end of the cantilever spring. In addition, it is preferred that the supporting flat surface abuts against the one substrate at a point on the peripheral surface of the edge portion of the front portion of one of the substrates. In addition, it is preferred that the plurality of substrates are arranged and stored in the substrate storage space, and the length of the supporting flat surface in the arrangement direction of the plurality of substrates is greater than 5 mm. In addition, it is preferred that the area of ​​the supporting flat surface is 50 mm. 2 above.

[0012] According to the present invention, it is possible to provide a substrate storage container and a cover-side substrate support portion that can hold a thin substrate W without breaking or damaging the substrate when the substrate W is bent due to its own weight or impact. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is an exploded perspective view showing a state where a plurality of substrates are stored in a substrate storage container according to an embodiment of the present invention. Figure 2 It is a perspective view showing a container body of a substrate storage container according to an embodiment of the present invention. Figure 3 It is a perspective view showing a lid of a substrate storage container according to an embodiment of the present invention. Figure 4 It is a perspective view showing a front holding member of the substrate storage container according to the embodiment of the present invention. Figure 5 It is a front view which shows the front holding member of the substrate storage container which concerns on embodiment of this invention. Figure 6 It is an enlarged front view showing the front holding member of the substrate storage container according to the embodiment of the present invention. Figure 7 It is a cross-sectional view showing the positional relationship between a substrate stored in a substrate storage container and a front holding member according to an embodiment of the present invention. Description of reference numerals:

[0051] 1: substrate storage container; 2: container body; 3: cover body; 5: substrate support plate portion (side substrate support portion); 6: inner side substrate support portion; 20: wall portion; 21: container body opening portion; 27: substrate storage space; 28: opening peripheral portion; 73: cover body side substrate support portion; 731: support flat surface; 733: overlapping portion; H1: length; W: substrate. DETAILED DESCRIPTION

[0014] Hereinafter, the substrate storage container 1 and the cover body side substrate support portion 73 of the present embodiment will be described with reference to the drawings. Figure 1 The direction from the upper right to the lower left in the figure is defined as the front direction D11, the opposite direction is defined as the rear direction D12, and they are combined to define the front-to-back direction D1. In addition, the direction from the lower wall 24 to the upper wall 23 ( Figure 1 The upper direction in the figure is defined as the upper direction D21, the opposite direction is defined as the lower direction D22, and the combination of them is defined as the upper and lower directions D2. Figure 1 The left direction D31 is defined as the direction from the lower right to the upper left in FIG. 1 , and the opposite direction is defined as the right direction D32, and the combination of these is defined as the left-right direction D3. Arrows indicating these directions are illustrated in the main drawings.

[0015] In addition, the substrates stored in the substrate storage container 1 (see Figure 1 ) is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc. that has been thinned by grinding, etc., and is a thin wafer used in industry. The substrate in this embodiment is a silicon wafer with a diameter of 300 mm.

[0016] like Figure 1 and Figure 2As shown, the substrate storage container 1 is used as a process container for storing the substrate W composed of the above-mentioned silicon wafers and transporting it in the process within the factory, or as a shipping container for transporting the substrate W by transportation methods such as land transportation, air transportation, and sea transportation. The substrate storage container 1 includes a container body 2 and a cover body 3. The container body 2 has a substrate support plate-shaped portion 5 as a side substrate support portion and a back substrate support portion 6. The cover body 3 has a front holding member 7 having a cover side substrate support portion 73 (see Figures 4 to 6 ).

[0017] like Figure 1 As shown in FIG. 1 , the container body 2 has a cylindrical wall portion 20 having a container body opening 21 formed at one end and the other end being closed. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 is surrounded by the wall portion 20. Figure 2 As shown in FIG. 2 , the substrate support plate-shaped portion 5 is disposed at the portion of the wall portion 20 that forms the substrate storage space 27. Figure 1 As shown, a plurality of substrates W can be stored in the substrate storage space 27 .

[0018] The substrate support plate-like parts 5 are provided in pairs on the wall part 20 in the substrate storage space 27. When the container body opening 21 is not closed by the cover body 3 (in the open state), the substrate support plate-like parts 5 abut against the edge parts of the plurality of substrates W, thereby supporting the edge parts of the plurality of substrates W in a state where adjacent substrates W are separated and arranged at a predetermined interval. The back side substrate support part 6 is provided at the rear side of the substrate support plate-like parts 5.

[0019] The back substrate support portion 6 (see Figure 2 etc.) in the substrate storage space 27 and the front holding member 7 (see Figure 3 When the container body opening 21 is not closed by the lid 3 (in the closed state), the back substrate support 6 abuts against the edge of the plurality of substrates W, thereby supporting the rear of the edge of the plurality of substrates W.

[0020] The lid 3 can be arranged relative to the opening peripheral edge 28 ( Figure 1 The front holding member 7 is provided in the portion of the cover body 3 and is the portion facing the substrate storage space 27 when the container body opening 21 is closed by the cover body 3. The front holding member 7 is arranged in a pair with the back substrate support portion 6 inside the substrate storage space 27.

[0021] When the container body opening 21 is closed by the cover 3, the front holding member 7 abuts against the edge portions of the plurality of substrates W, thereby supporting the front portions of the edge portions of the plurality of substrates W. When the container body opening 21 is closed by the cover 3, the front holding member 7 cooperates with the back substrate supporting portion 6 to support the plurality of substrates, thereby maintaining the adjacent substrates in a state of being separated and arranged at a predetermined interval.

[0022] The substrate storage container 1 is made of a resin such as a plastic material. Examples of the resin of the material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymer, or alloys thereof. When conductivity is imparted to the resin of these molding materials, a conductive substance such as carbon fiber, carbon powder, carbon nanotube, and conductive polymer is selectively added. In addition, glass fiber or carbon fiber may be added to improve rigidity.

[0023] The following is a detailed description of each part. Figure 1 As shown, the wall portion 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25 and a second side wall 26. The rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25 and the second side wall 26 are made of the above-mentioned materials and are integrally formed.

[0024] The first side wall 25 is opposed to the second side wall 26, and the upper wall 23 is opposed to the lower wall 24. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 constitute an opening peripheral edge portion 28, which has a positional relationship opposed to the rear wall 22 and forms a container body opening portion 21 having a substantially rectangular shape.

[0025] The opening peripheral portion 28 is provided at one end of the container body 2, and the rear wall 22 is located at the other end of the container body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the rear wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 form a substrate storage space 27 surrounded by them. The container body opening 21 formed in the opening peripheral portion 28 is connected to the substrate storage space 27 surrounded by the wall portion 20 and formed inside the container body 2. A maximum of 13 substrates W can be stored in the substrate storage space 27. In addition, in the present embodiment, it is a substrate storage structure that can store 13 substrates W, but it can also be formed as a structure of a substrate storage container in which the substrate support plate-shaped portion 5 is removed, and a substrate support plate-shaped portion (not shown) that can store 25 substrates W is fixed to the container body 2, so that 25 substrates W can be stored.

[0026] like Figure 1 As shown, latch engaging recesses 231A, 231B, 241A, 241B are formed in the upper wall 23 and the lower wall 24 and in the vicinity of the opening peripheral edge 28, and are recessed toward the outside of the substrate storage space 27. The latch engaging recesses 231A, 231B, 241A, 241B are formed one each near the left and right ends of the upper wall 23 and the lower wall 24, and a total of four are formed.

[0027] like Figure 1 As shown, a top flange 236 is fixed to the center of the upper wall 23. The top flange 236 is a component that is hooked and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automatic wafer transport system), a PGV (wafer substrate transport vehicle), etc.

[0028] The substrate support plate-like portions 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are arranged in pairs in the left-right direction D3 in the substrate storage space 27. Alternatively, the substrate support plate-like portions 5 may be integrally formed with the first side wall 25 and the second side wall 26.

[0029] The substrate support plate-like portion 5 has a plate-like, roughly arc-shaped shape. Thirteen substrate support plate-like portions 5 are provided on the first side wall 25 side and the second side wall 26 side along the up-down direction D2, respectively, for a total of 26 substrate support plate-like portions 5. Adjacent substrate support plate-like portions 5 are arranged in a positional relationship that is separated from each other by an interval of 10 mm to 30 mm in the up-down direction D2 and is parallel to each other. In addition, another plate-like component parallel to the substrate support plate-like portion 5 is arranged above the substrate support plate-like portion 5 located at the top. This component is a component that guides the substrate W located at the top and inserted into the substrate storage space 27 when the substrate W is inserted.

[0030] In addition, the 13 substrate support plate-like parts 5 arranged on the first side wall 25 and the 13 substrate support plate-like parts 5 arranged on the second side wall 26 are positioned opposite to each other in the left-right direction D3. In addition, the 13 substrate support plate-like parts 5 and the plate-shaped guide member parallel to the substrate support plate-like parts 5 are positioned parallel to the inner surface of the lower wall 24. Figure 2 As shown in FIG. 1 and FIG. 2 , a convex portion is provided on the upper surface of the substrate support plate-shaped portion 5. The substrate W supported on the substrate support plate-shaped portion 5 only contacts the protruding ends of the convex portion and does not contact the substrate support plate-shaped portion 5 in a planar manner.

[0031] The substrate supporting plate-shaped portion 5 can support edge portions of the plurality of substrates W while adjacent substrates W among the plurality of substrates W are separated from each other by a predetermined interval and are in a positional relationship parallel to each other.

[0032] like Figure 2 As shown, the back substrate support portion 6 has a back edge support portion 60. The back edge support portion 60 is formed integrally with the rear end portion of the substrate support plate portion 5. The back substrate support portion 6 may also be formed integrally with the first side wall 25, the second side wall 26, and the rear wall 22.

[0033] The number of the back edge support parts 60 is set to correspond to each substrate W that can be stored in the substrate storage space 27, specifically, 13 are set. The back edge support parts 60 arranged on the first side wall 25 side and the second side wall 26 side have a positional relationship with the front holding member 7 described later in the front-to-back direction D1. When the substrate W is stored in the substrate storage space 27 and the cover body 3 is closed, the back edge support parts 60 clamp and support the edge of the edge of the substrate W.

[0034] Next, the cover body 3 and the front holding member 7 are described in detail. Figure 1 As shown in FIG. 1 and FIG. 2 , the cover 3 has a substantially rectangular shape that is substantially consistent with the shape of the opening peripheral portion 28 of the container body 2. The cover 3 can be detached from the opening peripheral portion 28 of the container body 2. By attaching the cover 3 to the opening peripheral portion 28, the cover 3 can close the container body opening 21. Figure 1 The back surface of the cover body 3 shown in the figure is provided with an annular sealing member 4. The sealing member 4 is made of various thermoplastic elastomers such as polyester and polyolefin that can be elastically deformed, fluororubber, silicone rubber, etc. The sealing member 4 is arranged to surround the outer peripheral edge of the cover body 3.

[0035] When the cover 3 is mounted on the opening peripheral portion 28, the sealing member 4 is elastically deformed by being sandwiched between the opening peripheral portion 28 and the inner surface of the cover 3, and the cover 3 seals the container body opening 21 in a sealed state. By removing the cover 3 from the opening peripheral portion 28, the substrate W can be taken out or put into the substrate storage space 27 in the container body 2.

[0036] The cover body 3 has a cover body main body having the appearance of the cover body 3, and a latch mechanism is provided on the cover body main body. Figure 1 As shown, the latch mechanism is arranged near the left and right ends of the cover body, and includes two upper latch parts 32A that can protrude from the upper side of the cover body in the upward direction D21, and two lower latch parts 32B that can protrude from the lower side of the cover body in the downward direction D22. The two upper latch parts 32A are arranged near the left and right ends of the upper side of the cover body, and the two lower latch parts 32B are arranged near the left and right ends of the lower side of the cover body.

[0037] The operating part 33 is provided on the outer surface side of the cover body. By operating the operating part 33 from the front side of the cover body, the upper latch part 32A and the lower latch part 32B can be protruded from the upper side or the lower side of the cover body, or can be in a state of not protruding from the upper side or the lower side. The upper latch portion 32A protrudes from the upper side of the cover body in the upward direction D21 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B protrudes from the lower side of the cover body in the downward direction D22 and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the cover body 3 to the opening peripheral edge portion 28 of the container body 2.

[0038] like Figure 3 As shown, a recess 34 is formed inside the cover body constituting the cover body 3, and is recessed toward the outside (front direction D11) of the substrate storage space 27. The front holding member 7 is fixed to the cover body portion inside the recess 34.

[0039] like Figures 4 to 6 As shown in FIG. 1 , the front holding member 7 has a cover body side substrate support portion 73, a leg portion 72, and a vertical frame body 71. Twenty-five cover body side substrate support portions 73 are provided in the vertical direction D2, and each is supported one by one by an elastically deformable leg portion 72. The leg portion 72 extends in the right direction D32 in a manner separated from the cover body side substrate support portion 73. Figures 4 to 6As shown, at the end of the foot portion 72, a vertical frame body 71 extending in the up-down direction D2 is integrally formed with the foot portion 72. Thus, the cover body side substrate support portion 73 is located at the free end of the cantilever spring that configures the foot portion 72 as a cantilever beam. By storing the substrate W in the substrate storage space 27 and closing the cover body 3, the cover body side substrate support portion 73 uses the elastic force of the foot portion 72 to clamp and support the front end edge of the edge portion of the substrate W in a state of applying force to the center of the substrate storage space 27.

[0040] The rear surface of the cover body side substrate support portion 73 has a support flat surface 731, and the support flat surface 731 abuts against the substrate at a point on the peripheral surface of the edge portion of each of the plurality of substrates W to support the substrate W. A plurality of support flat surfaces 731 are provided in a one-to-one correspondence with the peripheral surfaces of the edge portions of each of the plurality of substrates W, and are composed of vertical planes. When the container body opening 21 is closed by the cover body 3, the support flat surface 731 abuts against the edge of the surface (upper surface) of the substrate W. When the container body opening 21 is closed by the cover body 3, the cover body side substrate support portion 73 can be elastically displaced in a direction (front direction D11) from the other end of the container body 2 toward one end.

[0041] like Figures 4 to 6 As shown, the cover side substrate support portion 73 has a shape at the center position in the left-right direction D3: the half of the rectangular shape on the front end side is offset in the downward direction D22 relative to the half of the rectangular shape connected to the leg portion 72. Figure 6 As shown in the figure, the left lower end portion of the support flat surface 731 of one cover side substrate support portion 73 and the right upper end portion of the support flat surface 731 of the next cover side substrate support portion 73 form an overlapping portion 733 that is opposed in the direction parallel to the upper surface of the substrate W, that is, the left-right direction D3. In this way, since the support flat surfaces 731 have the overlapping portions 733 that are opposed in the left-right direction D3, in this direction, it is possible to avoid forming a linear gap between the adjacent support flat surfaces 731 in the up-down direction D2, and form a crank-shaped gap.

[0042] The length H1 of the edge of the free end side of the support flat surface 731 of the cover side substrate support portion 73 in the arrangement direction of the plurality of substrates W stored in the substrate storage space 27, that is, in the up-down direction D2, is 5 mm or more and 9 mm or less. In addition, the area S1 of the support flat surface 731 is 50 mm 2 Above and 71.5mm 2 the following.

[0043] Since the length H1 of the free end side edge of the support flat surface 731 of the cover side substrate support portion 73 in the vertical direction D2 is 5 mm or more, the area S1 that contacts the peripheral surface of the edge of the substrate W can be increased to 50 mm. 2As described above, even when a thin substrate W is bent, it is difficult to apply force to the substrate W itself, and the substrate W is difficult to break. As a result, the substrate is difficult to be damaged. Furthermore, it is more preferred that the length H1 of the edge of the free end side of the support flat surface 731 of the cover side substrate support part 73 in the up-down direction D2 is 7 mm or more, thereby making the substrate more difficult to break.

[0044] Furthermore, since the length H1 of the free end side edge of the support flat surface 731 of the cover side substrate support portion 73 in the vertical direction D2 is 9 mm or less, the area of ​​contact with the peripheral surface of the edge of the substrate W can be suppressed to 71.5 mm. 2 , so that the number of substrates W that can be stored in the substrate storage container 1 is not less than that of a conventional substrate storage container. The length H1 of the edge of the free end side of the supporting flat surface 731 of the cover side substrate support portion 73 in the up-down direction D2 is preferably 8.4 mm or less, thereby reliably ensuring that the number of substrates W can be stored is not less than that of a conventional substrate storage container.

[0045] According to the substrate storage container 1 of the first embodiment having the above-described structure, the following effects can be obtained. The cover-side substrate support portion 73 has a support flat surface 731 that abuts against the peripheral surface of each edge portion of the plurality of substrates W to support the substrates W, and the support flat surface 731 abutting against the peripheral surface of each edge portion of adjacent substrates W among the plurality of substrates W has an overlapping portion 733 that is opposed in a direction parallel to the upper surface of the substrate W. According to this structure, it is possible to provide a substrate storage container 1 that can hold the substrate W without breakage or damage when the thin substrate W is bent due to its own weight or impact.

[0046] Furthermore, the plurality of support flat surfaces 731 are provided in one-to-one correspondence with the peripheral surfaces of the edge portions of the plurality of substrates W. According to this configuration, one support flat surface 731 abuts against the peripheral surface of the edge portion of one substrate W, and one substrate W can be supported by one support flat surface 731 .

[0047] In addition, the support flat surface 731 is located at the free end of the cantilever spring. According to this structure, the support flat surface 731 can be supported by the cantilever spring. As a result, the substrate W can be supported by the support flat surface 731 with an appropriate force.

[0048] In addition, the length H1 of the support flat surface 731 in the arrangement direction of the plurality of substrates W is 5 mm or more. According to this structure, the area of ​​the support flat surface 731 in contact with the peripheral surface of the edge of the substrate W can be increased to 50 mm. 2Therefore, the substrate W can be supported by the large-area support flat surface 731, so even if the thin substrate W is bent, it is difficult to apply force to the substrate W itself, and the substrate W can be difficult to break. As a result, the substrate W can be difficult to be damaged.

[0049] The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims.

[0050] For example, the shapes of the container body and the cover, and the number and size of substrates W that can be stored in the container body are not limited to the shapes of the container body 2 and the cover 3, and the number and size of substrates that can be stored in the container body 2 in the present embodiment. That is, the structures of the side substrate support portion (substrate support plate-shaped portion 5), the cover side substrate support portion 73, and the back side substrate support portion 6 are not limited to the structures of the embodiment. In addition, the substrate in the present embodiment is a silicon wafer with a diameter of 300 mm, but it is not limited to this value.

Claims

1. A substrate storage container, characterized in that: The substrate storage container comprises: The container body has a cylindrical wall portion, the wall portion has a container body opening formed at one end and is closed at the other end, and the inner surface of the wall portion forms a substrate storage space that can store a plurality of substrates and communicates with the container body opening; A cover body, which can be detached from the opening of the container body and can close the opening of the container body; a cover-side substrate support portion, which is disposed on a portion of the cover and is opposed to the substrate storage space when the opening of the container body is closed by the cover, and is capable of supporting edge portions of the plurality of substrates when the opening of the container body is closed by the cover; as well as The back substrate support portion is arranged in pair with the cover body side substrate support portion in the substrate storage space, and can support the edge portions of the plurality of substrates. When the container body opening is closed by the cover body, the back substrate support portion cooperates with the cover body side substrate support portion to support the plurality of substrates in a state where the edge portions of the plurality of substrates are arranged. The cover-side substrate support portion has a support flat surface, and the support flat surface abuts against the peripheral surface of the edge portion of each of the plurality of substrates to support the substrate. The supporting flat surface that contacts the peripheral surface of the edge portion of each of the adjacent substrates among the plurality of substrates has an overlapping portion that faces in a direction parallel to the upper surface of the substrate.

2. The substrate storage container according to claim 1, wherein: The supporting flat surface is provided in plurality, one supporting flat surface being provided for each peripheral surface of the edge portion of each of the plurality of substrates.

3. The substrate storage container according to claim 2, characterized in that: The flat support surface is located at the free end of the cantilever spring.

4. The substrate storage container according to any one of claims 1 to 3, characterized in that: The supporting flat surface contacts the one substrate at a point on the peripheral surface of the edge portion of the front portion of the one substrate.

5. The substrate storage container according to claim 4, characterized in that: The plurality of substrates are arranged and stored in the substrate storage space, The length of the supporting flat surface in the arrangement direction of the plurality of substrates is 5 mm or more.

6. The substrate storage container according to claim 4, characterized in that: The area of ​​the supporting flat surface is 50 mm 2 above.

7. A cover side substrate support portion, which is a cover side substrate support portion of a substrate storage container, characterized in that: The substrate storage container comprises: The container body has a cylindrical wall portion, the wall portion has a container body opening formed at one end and is closed at the other end, and the inner surface of the wall portion forms a substrate storage space that can store a plurality of substrates and communicates with the container body opening; A cover body, which can be detached from the opening of the container body and can close the opening of the container body; a cover-side substrate support portion, which is disposed on a portion of the cover and is opposed to the substrate storage space when the opening of the container body is closed by the cover, and is capable of supporting edge portions of the plurality of substrates when the opening of the container body is closed by the cover; as well as The back substrate support portion is arranged in pair with the cover body side substrate support portion in the substrate storage space, and can support the edge portions of the plurality of substrates. When the container body opening is closed by the cover body, the back substrate support portion cooperates with the cover body side substrate support portion to support the plurality of substrates in a state where the edge portions of the plurality of substrates are arranged. The cover-side substrate support portion has a support flat surface, and the support flat surface abuts against the peripheral surface of the edge portion of each of the plurality of substrates to support the substrate. The supporting flat surface that contacts the peripheral surface of the edge portion of each of the adjacent substrates among the plurality of substrates has an overlapping portion that faces in a direction parallel to the upper surface of the substrate.

8. The cover side substrate support portion according to claim 7, wherein: The supporting flat surface is provided in plurality, one supporting flat surface being provided for each peripheral surface of the edge portion of each of the plurality of substrates.

9. The cover side substrate support portion according to claim 8, wherein: The flat support surface is located at the free end of the cantilever spring.

10. The cover side substrate support portion according to any one of claims 7 to 9, characterized in that: The supporting flat surface contacts the one substrate at a point on the peripheral surface of the edge portion of the front portion of the one substrate.

11. The cover side substrate support portion according to claim 10, wherein: The plurality of substrates are arranged and stored in the substrate storage space, The length of the supporting flat surface in the arrangement direction of the plurality of substrates is 5 mm or more.

12. The cover side substrate support portion according to claim 10, wherein: The area of ​​the supporting flat surface is 50 mm 2 above.

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