Method for determining position offset of measuring equipment and related product

Abstract

The invention discloses a method for determining the position offset of a measuring device and a related product, and the method comprises the steps: obtaining collection information which comprises a first image collected by a first lens and a second image collected by a second lens; the first image and the second image are matched, a second target point corresponding to the first target point is determined in the second image, and the first target point is a point in the first image; and determining a position offset based on the first position coordinate of the first target point and the second position coordinate of the second target point, performing target point matching on acquired images of different lenses, and then determining the position offset of the measurement equipment based on the position coordinates of the target points in the different images. The accuracy of the determined position offset of the measurement equipment is improved.

Description

Technical Field

[0001] The present application belongs to the field of data processing technology, and in particular, relates to a method for determining a position offset of a measuring device and related products. Background Art

[0002] At present, in the production process of semiconductors, two lenses with different resolutions, such as an electronic optical lens and an optical lens, may be required to observe the same object. The above process may require moving the same observation object to observe under different lenses. However, the above movement of the observation object may cause inaccurate movement displacement, so that the two lenses cannot observe the same object, so it is necessary to calibrate the movement position of the observation object. The existing technology relies on manually determining the position offset caused by the movement position and calibrating the movement position of the observation object based on the position offset. However, manually determining the position offset may cause the problem of inaccurate position offset, resulting in inaccurate calibration results. Summary of the invention

[0003] The method, system, device, equipment, medium and product for determining the position offset of a measuring device provided in the embodiments of the present application can improve the accuracy of determining the offset of the position of a moving observation object when different lenses observe the observation object.

[0004] In a first aspect, an embodiment of the present application provides a method for determining a position offset of a measuring device, comprising:

[0005] Acquire acquisition information, where the acquisition information includes a first image acquired by a first lens and a second image acquired by a second lens, wherein the first image and the second image are respectively acquired by changing the position of a mobile platform where the acquisition object is located by controlling a measuring device while keeping the positions of the first lens and the second lens unchanged;

[0006] Matching the first image and the second image, determining a second target point in the second image corresponding to the first target point, wherein the first target point is a point in the first image;

[0007] Based on the first position coordinates of the first target point and the second position coordinates of the second target point, a position offset is determined, where the position offset is an offset generated by the mobile platform when the measuring device controls the change of the position of the mobile platform.

[0008] In a second aspect, an embodiment of the present application provides a measurement device, including:

[0009] A first lens, used for acquiring a first image;

[0010] A second lens, used for acquiring a second image;

[0011] A mobile platform, used to hold the collection object and change the position of the mobile platform in response to the control of the control device;

[0012] A control device is connected to the mobile platform, and the control device is used to obtain acquisition information, the acquisition information includes a first image acquired by a first lens and a second image acquired by a second lens, wherein the magnification of the first lens is different from that of the second lens, and the first image and the second image are respectively acquired by changing the position of the mobile platform where the acquisition object is located by controlling the control device while the positions of the first lens and the second lens remain unchanged; the first image and the second image are matched, and a second target point corresponding to the first target point is determined in the second image, wherein the first target point is a point in the first image; based on the first position coordinates of the first target point and the second position coordinates of the second target point, a position offset is determined, and the position offset is the offset generated by the mobile platform when the measuring device controls the mobile platform to move by changing the position of the mobile platform through the control device.

[0013] In a third aspect, an embodiment of the present application provides a device for determining a position offset of a measuring device, comprising:

[0014] An acquisition module, used to acquire acquisition information, the acquisition information including a first image acquired by a first lens and a second image acquired by a second lens, the first image and the second image being images acquired by controlling a measuring device to change a position of a mobile platform where the acquisition object is located while the positions of the first lens and the second lens remain unchanged;

[0015] A matching module, used to match the first image and the second image, and determine a second target point in the second image corresponding to the first target point, wherein the first target point is a point in the first image;

[0016] The determination module is used to determine the position offset based on the first position coordinates of the first target point and the second position coordinates of the second target point. The position offset is the offset generated by the mobile platform when the measuring device controls the change of the position of the mobile platform.

[0017] In a fourth aspect, an embodiment of the present application provides an electronic device, the device comprising:

[0018] a processor and a memory storing computer program instructions;

[0019] When the processor executes the computer program instructions, it is used to execute the method for determining the position offset of the measuring device of the first aspect.

[0020] In a fifth aspect, an embodiment of the present application provides a computer storage medium having computer program instructions stored thereon, and when the computer program instructions are executed by a processor, the method for determining the position offset of the measuring device according to the first aspect described above is implemented.

[0021] In a sixth aspect, an embodiment of the present application provides a computer program product, including a computer program, which, when processed by a processor, implements the method for determining the position offset of the measuring device of the first aspect described above.

[0022] The method, apparatus, device, medium and product for determining the position offset of a measuring device provided in the embodiments of the present application obtain a first image captured by a first lens and a second image captured by a second lens in the acquisition information, and determine a second target point corresponding to the first target point in the second image by matching the first image and the second image. The same target point captured in the first image and the second image can be determined, and then the position offset is determined based on the first position coordinates of the first target point and the second position coordinates of the second target point, thereby achieving quantification of the position offset. The method of determining the offset by determining the position coordinates of the corresponding target point in different images can overcome the problem of inaccurate determination of the position offset in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solution of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0024] Figure 1 A schematic diagram of an exemplary lens device provided for some embodiments of the present application.

[0025] Figure 2 A schematic diagram of a system of a measurement device provided in some embodiments of the present application.

[0026] Figure 3 A schematic flow chart of a method for determining a position offset of a measuring device provided in some embodiments of the present application.

[0027] Figure 4 A schematic flow chart of another method for determining a position offset of a measuring device provided in some embodiments of the present application.

[0028] Figure 5 A flowchart of a method for determining a position offset of a measuring device provided in some embodiments of the present application.

[0029] Fig. 6AA schematic diagram of a pixel image of an exemplary first image provided for some embodiments of the present application.

[0030] Figure 6B A schematic diagram of a pixel image of an exemplary first image provided for some embodiments of the present application.

[0031] Figure 7 A schematic diagram of a device for determining a position offset of a measuring device provided in some embodiments of the present application.

[0032] Figure 8 A schematic diagram of the hardware structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0033] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating the examples of the present application.

[0034] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0035] Before describing the technical solutions provided by the embodiments of the present application, in order to facilitate the understanding of the embodiments of the present application, the present application first specifically describes the problems existing in the related art:

[0036] like Figure 1 As shown, Figure 11 is a schematic diagram of an exemplary lens device. In the production process of semiconductor products, it may be necessary to move the collection object 103 so that the collection object 103 can be observed under two lenses with different resolutions, such as the electronic optical lens 101 and the optical lens 102. The above process may require the measurement device to control the position of the mobile platform 104 where the collection object 103 is located so that it can be observed under different lenses. However, in the process of the above mobile range device moving the position of the mobile platform 104 where the collection object 103 is located, the mobile platform may have a position offset due to various reasons such as the device size, resulting in inaccurate position movement, which may cause the image collected by the above electronic optical lens 101 and the optical lens 102 to not be an image of the collection object. Therefore, it is necessary to calibrate the mobile position of the mobile platform where the collection object 103 is located. The prior art relies on manually calibrating the position offset of the above mobile offset and calibrating the mobile position of the mobile platform based on the position offset. It can be imagined that manually determining the position offset may cause the problem of inaccurate position offset, thereby causing inaccurate mobile position of the calibrated mobile platform.

[0037] Based on this, the embodiments of the present application provide a method, system, device, equipment, medium and product for determining the position offset of a measuring device, which can solve the above problems.

[0038] In some embodiments, Figure 2 The embodiment of the present application provides a measuring device, the system comprising:

[0039] A first lens 201, used for capturing a first image;

[0040] A second lens 202, used for capturing a second image;

[0041] The mobile platform 203 is used to hold the collection object and change the position of the mobile platform in response to the control of the measurement device;

[0042] A control device 204 is connected to the mobile platform 203. The control device 204 is used to obtain acquisition information, the acquisition information includes a first image acquired by the first lens 201 and a second image acquired by the second lens 202, the first image and the second image are respectively acquired by controlling the control device 204 to change the position of the mobile platform 203 where the acquisition object is located when the positions of the first lens 201 and the second lens 202 remain unchanged; the first image and the second image are matched, and a second target point corresponding to the first target point is determined in the second image, wherein the first target point is a point in the first image; based on the first position coordinates of the first target point and the second position coordinates of the second target point, a position offset is determined, and the position offset is the offset generated by the mobile platform when the control device controls the change of the position of the mobile platform.

[0043] Here, the first lens 201 can capture a first image of a collection object placed on the mobile platform 203, and the second lens 202 can capture a second image of the above-mentioned collection image, and the above-mentioned first image and second image are both images captured by changing the position of the mobile platform 203 by the control device 204. The control device 204 is connected to the mobile platform 203, and the control device 204 can change the position of the mobile platform 203 where the collection object is located, so that the above-mentioned first lens 201 and the second lens 202 can capture the image of the collection object.

[0044] The above-mentioned control device 204 can obtain the first image captured by the first lens 201 and the second image captured by the second lens 202, and determine the second target point corresponding to the first target point in the first image in the second image by matching the first image and the second image, and determine the offset based on the first position coordinates of the first target point and the second position coordinates of the second target point. Then, the position compensation value of the mobile platform can be determined based on the offset, and then the moving position of the mobile platform can be controlled based on the position compensation value, which can not only improve the accuracy and efficiency of the determined position offset of the mobile platform, but also enable the first lens 201 and the second lens 202 to capture the same capture object.

[0045] In some embodiments, Figure 3 As shown, the embodiment of the present application provides a method for determining the position offset of a measuring device, comprising the following steps S310-S330:

[0046] S310: Acquire acquisition information, where the acquisition information includes a first image acquired by a first lens and a second image acquired by a second lens, wherein the first image and the second image are images acquired by changing the position of a mobile platform where the acquisition object is located by controlling a measuring device while keeping the positions of the first lens and the second lens unchanged.

[0047] A first image captured by the first lens and a second image captured by the second lens can be obtained. Here, the first image is an image obtained by capturing the above-mentioned capture object through the first lens when the capture object is moved to the first preset position, and the second image is an image obtained by capturing the above-mentioned capture object through the second lens when the above-mentioned capture object is moved to the second preset position.

[0048] As Figure 2 Taking the measurement equipment shown as an example, the first lens may be an optical lens, and the second lens may be an electronic optical lens. The magnification of the first lens is different from that of the second lens. The images of the same acquisition object are acquired through lenses with different magnifications. In the production process of semiconductor products, the different lenses are required to acquire images of semiconductor products. For example, the image of the structure of the semiconductor product is first acquired under an optical lens, and then the image of the structure of the semiconductor product is acquired under an electronic optical lens with a larger magnification. Therefore, the electronic lens and the electronic optical lens are required to be able to acquire images of the same acquisition object or the same position of the same acquisition object. For example, the magnification of the electronic optical lens is 260K, and the magnification of the optical lens is 2.6K.

[0049] In some examples, before the first lens or the second lens captures an image, the lens may be adjusted to ensure that the focus of the lens is at the center of the captured image, which will not be described in detail here.

[0050] It can be imagined that observing semiconductor products based on images captured by lenses with different magnifications can observe semiconductor products during the production process of semiconductor products, which is beneficial to improving product yield.

[0051] S320: Match the first image and the second image, and determine a second target point in the second image corresponding to the first target point, wherein the first target point is a point in the first image.

[0052] Here, the first target point can be determined in the first image, and the first image and the second image can be matched to determine the second target point corresponding to the first image in the second image. The second target point corresponding to the first target point can be determined in the second image using an image matching algorithm.

[0053] S330: Determine a position offset based on the first position coordinates of the first target point and the second position coordinates of the second target point, where the position offset is an offset generated by the mobile platform when the measuring device controls the change of the position of the mobile platform.

[0054] When the positions of the first lens and the second lens remain unchanged for the first image and the second image, the position of the mobile platform where the acquisition object is located is controlled by the measuring device so that the images acquired by the different lenses can determine the position offset based on the first position coordinates of the first target point and the second position coordinates of the second target point. By determining the position offset, when acquiring images based on different lenses, the offset generated by the mobile platform when the measuring device controls the change of the mobile platform's movement position can be determined, which facilitates the subsequent calibration of the position of the mobile platform.

[0055] In some examples, a preset coordinate system may be pre-established, and the position offset may be determined based on the first position coordinates of the first target point in the preset coordinate system and the second position coordinates of the second target point in the preset coordinate system.

[0056] Here, different coordinate systems can be established based on the first image and the second image, respectively, and the position offset can be determined based on the first position coordinates of the first target point in the first coordinate system and the second position coordinates of the second target point in the second image. For example, the center point of the image can be selected as the first target point in the first image, and the second target point corresponding to the center point of the first image can be determined in the second image based on the image matching algorithm. Afterwards, the position coordinates of the center point of the second image are determined in the second image, and then the position offset is determined based on the position coordinates of the center point of the second image and the second position coordinates of the second target point. For example, the first position coordinates of the center point of the first image in the first coordinate system are (0, 0), and the second position coordinates of the second target point corresponding to the first target point determined in the second image are (4, 6) in the second coordinate system, so the position offset can be determined to be (-4, -6).

[0057] It can be imagined that the position offset is determined based on the first position coordinates of the first target point in the first coordinate system and the second position coordinates of the second target point in the second coordinate system, satisfying the following:

[0058] Expression: (x 1 ,y 1 )-(x 2 ,y 2 )=(x δ ,y δ )(1)

[0059] Among them, the above (x 1 ,y 1 ) is the first position coordinate of the first target point, (x 1 ,y 1 ) is the second position coordinate of the second target point, (x δ ,y δ ) is the position offset.

[0060] In some examples, when only one preset coordinate system is established, the position coordinates of the center point of the first image and the position coordinates of the center point of the second image can be determined in the preset coordinate system respectively. For example, the position coordinates of the center point of the first image in the preset coordinate system are determined to be (0, 0), and the position coordinates of the center point of the second image in the preset coordinate system are determined to be (4, 4). The midline point of the first image can also be selected as the first target point, and then a second target point (1, 2) matching the first target point is determined in the second image, and the position change is determined to be (1, 2)-(4, 4)=(-3, -2).

[0061] The embodiment of the present application obtains a first image captured by a first lens and a second image captured by a second lens in the acquisition information, and then matches the first image and the second image, and determines a second target point corresponding to the first target point in the second image, which is equivalent to determining the same target point captured by the first image in the second image, and then determines a position offset based on the first position coordinates of the first target point and the second position coordinates of the second target point, thereby achieving quantification of the position offset, avoiding the problem of inaccurate offset determination caused by manual determination of the position offset, and improving the accuracy of the position offset.

[0062] Here, in order to further improve the accuracy of the offset, the pixel points of the first image and the second image may be matched to determine a corresponding group of pixel points, and then the offset may be determined by the pixel coordinates of the pixel points.

[0063] In some embodiments, Figure 4 As shown, the first target point includes a first pixel point, the second target point includes a second pixel point, the first position coordinates include a first pixel coordinate of the first pixel point in the first image, and the second position coordinates include a second pixel coordinate of the second pixel point in the second image;

[0064] The above step S320: matching the first image and the second image, and determining the second target point corresponding to the first target point in the second image, may include step S410:

[0065] S410: Match the first image and the second image, and determine a second pixel point corresponding to the first pixel point in the second image.

[0066] After determining the first pixel in the first image, an image matching algorithm may be used to determine the second pixel corresponding to the first pixel in the second image. It is conceivable that after determining the second pixel in the second image, an image matching algorithm may be used to determine the first pixel corresponding to the second pixel in the first image. It is conceivable that the above-mentioned first pixel may be a pixel determined in response to a user operation.

[0067] In some examples, a central pixel point of the first image may be determined in the first image as the first pixel point, and then a second pixel point matching the central pixel point of the first image may be determined in the second image based on an image matching algorithm.

[0068] The above step S430: determining the position offset based on the first position coordinates of the first target point and the second position coordinates of the second target point may include step S420:

[0069] S420: Determine a position offset based on the first pixel coordinate, the second pixel coordinate, and the pixel size of the pixel point.

[0070] The first pixel coordinates are the pixel coordinates of the first pixel in the first image, representing the row and column coordinates of all the pixels in the first image. For example, the first image includes 5×5 pixels. Taking the central pixel of the first image as the first pixel, the first pixel coordinates are (3, 3), representing the position of the first pixel in the first image as the third row and the third column. Based on the same idea, the second pixel coordinates can be determined. Here, the offset coordinates of the pixel can be determined based on the first pixel coordinates and the second pixel coordinates, and then the position offset can be determined based on the offset coordinates of the pixel and the pixel size.

[0071] In some examples, continuing to take the central pixel point of the first image as the first pixel point, if the second pixel coordinate is (4, 4), it can be determined that the second pixel point is offset by one pixel in both the row coordinate and the column coordinate relative to the first pixel point, and the position offset can be determined based on the first pixel coordinate, the second pixel coordinate and the pixel size.

[0072] The embodiment of the present application determines a second pixel point in the second image that matches the first pixel point in the first image, and determines the position offset based on the first pixel coordinates of the first pixel point, the second pixel coordinates of the second pixel point, and the size of the pixel point, thereby improving the precision of the determined position offset and further improving the accuracy of the determined position offset.

[0073] It is conceivable that since the first image and the second image are captured by different lenses respectively, there may be a problem of different sizes of the first image and the second image. Before determining the position offset based on the pixel coordinates and pixel size of the above-mentioned pixel points, the sizes of the first image and the second image can be optimized and set to be the same before determining the position offset.

[0074] In some embodiments, Figure 5As shown, the image sizes of the first image and the second image are different. In the above step S410: matching the first image and the second image, before determining the second pixel point corresponding to the first pixel point in the second image, the determination method may further include the following steps S510-S530:

[0075] S510: Re-dividing the pixels included in the first image to obtain a third image with the same image size as the second image.

[0076] Here, the pixels included in the first image may be re-divided to obtain a third image. It may be determined that the pixel size of the third image is the same as that of the second image, and the pixel size of each pixel in the third image is the same as that of each pixel in the second image.

[0077] Here, the pixel points of the image captured by the lens with a larger magnification may be re-divided first, so as to improve the accuracy of the subsequent position offset.

[0078] The above step S410: matching the first image and the second image, and determining the second pixel point corresponding to the first pixel point in the second image, includes:

[0079] S520: Match the third image and the second image, and determine a second pixel point corresponding to a third pixel point in the second image, wherein the third pixel point is a pixel point in the third image.

[0080] The third image can be matched with the second image to determine the second pixel corresponding to the third pixel in the second image. In some examples, based on the same idea, the central pixel in the third image can be used as the third pixel, and then the second pixel corresponding to the third pixel is determined in the second image.

[0081] It is conceivable that in the above step S510, the pixels of the second image may also be re-divided to obtain a third image of the same image size as the first image, and then the pixels matching the third image are determined in the first image, which will not be repeated here.

[0082] The above step S420: determining the position offset based on the first pixel coordinate, the second pixel coordinate and the pixel size of the pixel point includes:

[0083] S530: Determine a position offset based on a third pixel coordinate of the third pixel in the third image, the second pixel coordinate, and a pixel size of the pixel.

[0084] The position offset may be determined based on the third pixel coordinates, the second pixel coordinates, and the pixel size of the third pixel. For example, the central pixel of the third image is used as the third pixel, and the position offset is determined by the third pixel coordinates, the second pixel coordinates, and the pixel size of the central pixel.

[0085] In the embodiment of the present application, when the image sizes of the first image and the second image are different, the pixel points of the first image are re-divided to obtain a third image with the same size as the second image, so that the pixel sizes of the images captured by the two lenses are the same, and then the second image is matched based on the third image to determine the second pixel point corresponding to the third pixel point, and then the position offset is determined based on the third pixel coordinates, the second pixel coordinates and the pixel size. The pixel sizes of the images captured by the two lenses can be unified and then the position offset can be determined, thereby improving the accuracy of the determined position offset.

[0086] It is conceivable that after determining the position offset, the measuring device can adjust the position of the mobile platform where the acquisition object is located based on the position offset, and compensate the position of the mobile platform so that different lenses can observe the same acquisition object.

[0087] In some embodiments, the acquisition information further includes a first coordinate and a second coordinate, the first coordinate being the coordinate of the mobile platform where the acquisition object is located when the first lens acquires the first image, and the second coordinate being the coordinate of the mobile platform where the acquisition object is located when the second lens acquires the second image;

[0088] After the above step S330: determining the position offset between the first lens and the second lens based on the first position coordinates of the first target point and the second position coordinates of the second target point, the determination method further includes:

[0089] The compensation value of the position of the mobile platform where the acquisition object is located is determined based on the first coordinate, the second coordinate and the position offset; the coordinates of the mobile platform where the acquisition object is located are compensated based on the position compensation value to obtain the target coordinates.

[0090] The above-mentioned acquisition information may include the first coordinates of the mobile platform where the acquisition object is located when the first lens acquires the above-mentioned acquisition object, and the second coordinates of the mobile platform where the acquisition object is located when the second lens acquires the acquisition object. The compensation value of the mobile platform can be determined based on the above-mentioned position compensation value, the first coordinates, and the second coordinates. For example, the position and direction of movement of the mobile platform are determined based on the above-mentioned first coordinates and the second coordinates. The value that the mobile platform needs to move based on the first coordinate after the acquisition by the first lens is completed can be determined through the above-mentioned first coordinates, the second coordinates and the position offset. The measurement equipment can compensate the first coordinates of the mobile platform where the acquisition object is located based on the above compensation value to obtain the target coordinates. Afterwards, the mobile platform can be moved to the first coordinates first. After the first lens completes the image acquisition, the acquisition object can be moved to the target coordinates so that the second lens can acquire the image.

[0091] In the embodiment of the present application, after determining the position offset, the compensation value of the position of the mobile platform is determined by using the first coordinate, the second coordinate and the position compensation value, and the coordinates of the mobile platform where the acquisition object is located are compensated based on the above compensation value, so that in the subsequent production process of semiconductor products, the above target coordinates can be used to move the acquisition object, thereby improving product production efficiency.

[0092] It is conceivable that the above position offset may be an offset in a two-dimensional direction, and the offset in the two-dimensional direction may be determined by pixel coordinates.

[0093] In some embodiments, the position offset includes a first position offset and a second position offset, the pixel size of the pixel point includes a first size in a first preset direction and a second size in a second preset direction, the first pixel coordinate includes a first sub-pixel coordinate in the first preset direction and a second sub-pixel coordinate in the second preset direction, and the second pixel coordinate includes a third sub-pixel coordinate in the first preset direction and a fourth sub-pixel coordinate in the second preset direction.

[0094] Determining a position offset based on the first pixel coordinate, the second pixel coordinate, and the pixel size of the pixel point includes: determining a first position offset in a first preset direction based on the first sub-pixel coordinate, the third sub-pixel coordinate, and the first size, and determining a second position offset in a second preset direction based on the second sub-pixel coordinate, the fourth sub-pixel coordinate, and the second size.

[0095] The first pixel coordinates may include row coordinates and column coordinates of the pixel point, for example: Fig. 6A 6A is a schematic diagram of an exemplary pixel image of a first image, for example, Fig. 6AIn the pixel image schematic diagram shown in FIG. 1 , the first pixel coordinate of the first target point is determined to be (3, 3), indicating that the pixel position of the pixel indicated by the first target point in the first image is the 3rd row and the 3rd column. Here, the first sub-pixel coordinate is 3, the second sub-pixel coordinate is 3, and the second pixel coordinate can also include a row coordinate and a column coordinate. Similarly, Figure 6B As shown, based on the second sub-pixel coordinates of the second target point corresponding to the first target point determined in the second image being (4, 2), the pixel position of the pixel point indicated by the above-mentioned first target point in the first image is the 4th row and the 2nd column. Here, the third sub-pixel value coordinate is 4, and the fourth sub-pixel coordinate is 2. The pixel size can include a first size of the pixel point in the row direction and a second size in the column direction.

[0096] A first position offset in a first preset direction can be determined based on the first sub-pixel coordinate, the third sub-pixel coordinate, and the first size. Taking the first sub-pixel coordinate as 3 and the third sub-pixel coordinate as 4 as an example, the first position offset is the product of the difference between the third sub-pixel coordinate and the first size. At the same time, a second position offset in a second preset direction can be determined based on the second sub-pixel coordinate, the fourth sub-pixel coordinate, and the second size. Taking the second sub-pixel coordinate as 3 and the fourth sub-pixel coordinate as 2 as an example, the second position offset is the product of the difference between the fourth sub-pixel coordinate and the second size.

[0097] Determining a first position offset in a first preset direction based on the first sub-pixel coordinates, the third sub-pixel coordinates and the first size, and determining a second position offset in a second preset direction based on the second sub-pixel coordinates, the fourth sub-pixel coordinates and the second size, satisfies the following conditions:

[0098]

[0099] Among them, a is the first position offset, b is the second position offset, c 1 is the first sub-pixel coordinate, c 2 is the third sub-pixel coordinate, α 1 is the first dimension, d 1 is the second sub-pixel coordinate, d 2 is the fourth sub-pixel coordinate, α 2 The first size.

[0100] The embodiment of the present application determines the first sub-pixel coordinate and the second sub-pixel coordinate included in the first pixel coordinate, and determines the third sub-pixel coordinate and the fourth sub-pixel coordinate included in the second pixel coordinate, and determines the first position offset and the second position offset respectively based on the above four sub-pixel coordinates and the first size and the second size of the pixel size, so as to determine the offset of the pixel point in the row coordinate and the column coordinate, thereby improving the accuracy of the determined position offset.

[0101] It is conceivable that the above-mentioned multiple position offsets may correspond to multiple position compensation values, and the coordinates of the mobile platform where the acquisition object is located may be compensated based on the multiple position compensation values.

[0102] In some embodiments, the compensation value includes a first compensation value and a second compensation value.

[0103] The first coordinate includes a first sub-coordinate in a first preset direction and a second sub-coordinate in a second preset direction, and the second coordinate includes a third sub-coordinate in the first preset direction and a fourth sub-coordinate in the second preset direction.

[0104] Determining the compensation value of the position of the mobile platform based on the first coordinate, the second coordinate and the position offset includes: determining the first compensation value in the first preset direction based on the first sub-coordinate, the third sub-coordinate and the first position offset, and determining the second compensation value in the second preset direction based on the second sub-coordinate, the fourth sub-coordinate and the second position offset. Compensating the coordinates of the mobile platform where the acquisition object is located based on the compensation value of the position to obtain the target coordinates includes: compensating the coordinates of the mobile platform where the acquisition object is located based on the first compensation value and the second compensation value to obtain the target coordinates.

[0105] It is conceivable that the above-mentioned first coordinate and second coordinate can both be two-dimensional coordinates. For example, the first coordinate includes the first sub-coordinate and the second sub-coordinate, and the second coordinate includes the second sub-coordinate and the third sub-coordinate. The first compensation value in the first preset direction can be determined based on the first sub-coordinate, the third sub-coordinate and the first position offset. For example, the first compensation value is determined based on the difference between the third sub-coordinate and the first sub-coordinate and the sum of the first position offset. At the same time, the second compensation value in the second preset direction is determined based on the second sub-coordinate, the fourth sub-coordinate and the second position offset. For example, the second compensation value is determined based on the difference between the fourth sub-coordinate and the second sub-coordinate and the sum of the second position offset. Then, based on the first compensation value and the second compensation value, the coordinates of the mobile platform where the acquisition object is located are compensated, and the target coordinates to which the acquisition object needs to move based on the first coordinate after the first lens acquisition is completed are determined.

[0106] The embodiment of the present application determines the first sub-coordinate and the second sub-coordinate included in the first coordinate, and determines the third sub-coordinate and the fourth sub-coordinate included in the second coordinate, and determines the first compensation value and the second compensation value based on the above four sub-coordinates, the first position offset and the second position offset, respectively, so as to determine the target coordinates that the mobile platform needs to move based on the first coordinate, so as to facilitate the second lens to capture an image. Based on the same inventive concept, the embodiment of the present application also provides a device for determining the position offset of a measuring device.

[0107] In some embodiments, Figure 7 As shown, an embodiment of the present application provides a device for determining a position offset of a measuring device, comprising:

[0108] An acquisition module 701 is used to acquire acquisition information, where the acquisition information includes a first image acquired by a first lens and a second image acquired by a second lens, where the first image and the second image are respectively acquired by changing the position of a mobile platform where an acquisition object is located by controlling a measuring device while keeping the positions of the first lens and the second lens unchanged;

[0109] A matching module 702 is used to match the first image and the second image, and determine a second target point in the second image corresponding to the first target point, wherein the first target point is a point in the first image;

[0110] The determination module 703 is used to determine the position offset based on the first position coordinates of the first target point and the second position coordinates of the second target point. The position offset is the offset generated by the mobile platform when the measuring device controls the change of the position of the mobile platform.

[0111] The above-mentioned device obtains the first image captured by the first lens and the second image captured by the second lens in the acquisition information through the acquisition module, and then matches the first image and the second image through the matching module, and determines the second target point corresponding to the first target point in the second image, which is equivalent to determining the same target point captured by the first image in the second image, and then determines the position offset based on the first position coordinates of the first target point and the second position coordinates of the second target point through the determination module, thereby realizing the quantification of the position offset, avoiding the problem of inaccurate offset determination caused by manual determination of the offset, and improving the accuracy of the offset.

[0112] In some embodiments, the first target point includes a first pixel point, the second target point includes a second pixel point, the first position coordinates include a first pixel coordinate of the first pixel point in the first image, and the second position coordinates include a second pixel coordinate of the second pixel point in the second image.

[0113] Matching module, which can be used for:

[0114] Matching the first image and the second image, and determining a second pixel point corresponding to the first pixel point in the second image;

[0115] Determine the module, which can be used for:

[0116] A position offset is determined based on the first pixel coordinate, the second pixel coordinate, and the pixel size of the pixel point.

[0117] In some embodiments, the first image and the second image have different image sizes.

[0118] Determine the module, which can also be used to:

[0119] Re-dividing the pixels included in the first image to obtain a third image with the same image size as the second image;

[0120] Matching module, which can be used for:

[0121] Matching the third image and the second image, and determining a second pixel point corresponding to the third pixel point in the second image, wherein the third pixel point is a pixel point in the third image;

[0122] Determine the module, which can be used for:

[0123] The position offset is determined based on the third pixel coordinates of the third pixel point in the third image, the second pixel coordinates, and the pixel size of the pixel point.

[0124] In some embodiments, the acquisition information further includes a first coordinate and a second coordinate, the first coordinate being the coordinate of the mobile platform where the acquisition object is located when the first lens acquires the first image, and the second coordinate being the coordinate of the mobile platform where the acquisition object is located when the second lens acquires the second image;

[0125] Determine the module, which can also be used to:

[0126] Determine a compensation value for the position of the mobile platform where the acquisition object is located based on the first coordinate, the second coordinate, and the position offset;

[0127] The coordinates of the mobile platform where the acquisition object is located are compensated based on the compensation value of the position to obtain the target coordinates.

[0128] In some embodiments, the position offset includes a first position offset and a second position offset, the pixel size of the pixel includes a first size in a first preset direction and a second size in a second preset direction, the first pixel coordinate includes a first sub-pixel coordinate in the first preset direction and a second sub-pixel coordinate in the second preset direction, the second pixel coordinate includes a third sub-pixel coordinate in the first preset direction and a fourth sub-pixel coordinate in the second preset direction,

[0129] Determine the module, which can be used for:

[0130] A first position offset in a first preset direction is determined based on the first sub-pixel coordinates, the third sub-pixel coordinates and the first size, and a second position offset in a second preset direction is determined based on the second sub-pixel coordinates, the fourth sub-pixel coordinates and the second size.

[0131] In some embodiments, the compensation value includes a first compensation value and a second compensation value.

[0132] The first coordinate includes a first sub-coordinate in a first preset direction and a second sub-coordinate in a second preset direction, the second coordinate includes a third sub-coordinate in the first preset direction and a fourth sub-coordinate in the second preset direction,

[0133] Determine the module, which can be used for:

[0134] Determine a first compensation value in a first preset direction based on the first sub-coordinate, the third sub-coordinate and the first position offset, and determine a second compensation value in a second preset direction based on the second sub-coordinate, the fourth sub-coordinate and the second position offset;

[0135] The coordinates of the mobile platform where the acquisition object is located are compensated based on the first compensation value and the second compensation value to obtain the target coordinates.

[0136] The device of the above embodiment is used to implement the method for determining the position offset of the corresponding measuring device in any of the above embodiments, and has the beneficial effects of the corresponding method embodiment, which will not be described in detail here.

[0137] Figure 8 A schematic diagram of the hardware structure of an electronic device provided in an application embodiment.

[0138] The electronic device 800 may include a processor 801 and a memory 802 storing computer program instructions.

[0139] Specifically, the processor 801 may include a central processing unit (CPU), or an application specific integrated circuit (ASIC), or may be configured to implement one or more integrated circuits of the embodiments of the present application.

[0140] The memory 802 may include a large capacity memory for data or instructions. By way of example and not limitation, the memory 802 may include a hard disk drive (HDD), a floppy disk drive, a flash memory, an optical disk, a magneto-optical disk, a magnetic tape, or a universal serial bus (USB) drive or a combination of two or more of these. In appropriate cases, the memory 802 may include a removable or non-removable (or fixed) medium. In appropriate cases, the memory 802 may be inside or outside the integrated gateway disaster recovery device. In a specific embodiment, the memory 802 is a non-volatile solid-state memory.

[0141] In certain embodiments, memory 802 includes a read-only memory (ROM). The ROM may be a mask-programmed ROM, a programmable ROM (PROM), an erasable PROM (EPROM), an electrically erasable PROM (EEPROM), an electrically alterable ROM (EAROM), or flash memory, or a combination of two or more of the above, where appropriate.

[0142] The memory may include a read-only memory (ROM), a random access memory (RAM), a magnetic disk storage medium device, an optical storage medium device, a flash memory device, an electrical, optical or other physical / tangible memory storage device. Thus, typically, the memory includes one or more tangible (non-transitory) computer-readable storage media (e.g., a memory device) encoded with software including computer-executable instructions, and when the software is executed (e.g., by one or more processors), it is operable to perform the operations described with reference to the method according to the first aspect of the present application.

[0143] The processor 801 reads and executes the computer program instructions stored in the memory 802 to implement any one of the methods for determining the position offset of the measuring device in the above embodiments.

[0144] In one example, the electronic device may further include a communication interface 803 and a bus 804. Figure 8 The processor 801, the memory 802, and the communication interface 803 are connected via a bus 804 and communicate with each other.

[0145] The communication interface 803 is mainly used to implement communication between various modules, devices, units and / or equipment in the embodiments of the present application.

[0146] Bus 804 includes hardware, software or both, and the parts of online data flow billing equipment are coupled to each other. For example, but not limitation, bus may include accelerated graphics port (AGP) or other graphics bus, enhanced industrial standard architecture (EISA) bus, front-end bus (FSB), hypertransport (HT) interconnection, industrial standard architecture (ISA) bus, infinite bandwidth interconnection, low pin count (LPC) bus, memory bus, micro channel architecture (MCA) bus, peripheral component interconnection (PCI) bus, PCI-Express (PCI-X) bus, serial advanced technology attachment (SATA) bus, video electronics standard association local (VLB) bus or other suitable bus or two or more of these combinations. In appropriate cases, bus 804 may include one or more buses. Although the present application embodiment describes and shows a specific bus, the application considers any suitable bus or interconnection.

[0147] The electronic device of the above embodiment is used to implement the method for determining the position offset of the corresponding measuring device in any of the above embodiments, and has the beneficial effects of the corresponding method embodiment, which will not be described in detail here.

[0148] In addition, in combination with the method for determining the position offset of the measuring device in the above embodiment, the embodiment of the present application can provide a computer storage medium for implementation. The computer storage medium stores computer program instructions; when the computer program instructions are executed by the processor, any method for determining the position offset of the measuring device in the above embodiment is implemented.

[0149] In addition, in combination with the method for determining the position offset of the measuring device in the above embodiment, the embodiment of the present application can provide a computer program product to implement. When the instructions of the computer program product are executed by a processor of an electronic device, any method for determining the position offset of the measuring device in the above embodiment is implemented.

[0150] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present application (including the claims) is limited to these examples. In line with the concept of the present application, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the embodiments of the present application as described above, which are not provided in detail for the sake of simplicity.

[0151] The functional blocks shown in the above-described block diagram can be implemented as hardware, software, firmware or a combination thereof. When implemented in hardware, it can be, for example, an electronic circuit, an application specific integrated circuit (ASIC), appropriate firmware, a plug-in, a function card, etc. When implemented in software, the elements of the present application are programs or code segments that are used to perform the required tasks. The program or code segment can be stored in a machine-readable medium, or transmitted on a transmission medium or a communication link by a data signal carried in a carrier wave. "Machine-readable medium" can include any medium capable of storing or transmitting information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROM, flash memory, erasable ROM (EROM), floppy disks, CD-ROMs, optical disks, hard disks, optical fiber media, radio frequency (RF) links, etc. The code segment can be downloaded via a computer network such as the Internet, an intranet, etc.

[0152] It should also be noted that the exemplary embodiments mentioned in this application describe some methods or devices based on a series of steps or devices. However, this application is not limited to the order of the above steps, that is, the steps can be performed in the order mentioned in the embodiment, or in a different order from the embodiment, or several steps can be performed simultaneously.

[0153] The above reference is according to the method of the embodiment of the present application, the flow chart of the device (device) and the computer program product and / or the block diagram described various aspects of the present application.It should be understood that each square box in the flow chart and / or the block diagram and the combination of each square box in the flow chart and / or the block diagram can be realized by computer program instructions.These computer program instructions can be provided to the processor of a general-purpose computer, a special-purpose computer or other programmable data processing device to produce a machine so that these instructions executed by the processor of the computer or other programmable data processing device enable the realization of the function / action specified in one or more square boxes of the flow chart and / or the block diagram.Such a processor can be but is not limited to a general-purpose processor, a special-purpose processor, a special application processor or a field programmable logic circuit.It can also be understood that each square box in the block diagram and / or the flow chart and the combination of the square boxes in the block diagram and / or the flow chart can also be realized by the dedicated hardware that performs the specified function or action, or can be realized by the combination of dedicated hardware and computer instructions.

[0154] The above is only a specific implementation of the present application. Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the above-described devices, modules and units can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the protection scope of the present application is not limited to this. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the protection scope of the present application.

Claims

1. A method for determining a position offset of a measuring device, characterized in that: include: Acquire acquisition information, where the acquisition information includes a first image acquired by a first lens and a second image acquired by a second lens, where the first image and the second image are respectively acquired by changing the position of a mobile platform where the acquisition object is located by controlling a measuring device while the positions of the first lens and the second lens remain unchanged; Matching the first image and the second image, and determining a second target point in the second image corresponding to the first target point, wherein the first target point is a point in the first image; Based on the first position coordinates of the first target point and the second position coordinates of the second target point, a position offset is determined, where the position offset is the offset generated by the mobile platform when the measuring device controls the change of the position of the mobile platform.

2. The method for determining the position offset of a measuring device according to claim 1, characterized in that: The first target point includes a first pixel point, the second target point includes a second pixel point, the first position coordinates include a first pixel coordinate of the first pixel point in the first image, and the second position coordinates include a second pixel coordinate of the second pixel point in the second image, The matching the first image and the second image to determine a second target point corresponding to the first target point in the second image includes: Matching the first image and the second image, and determining a second pixel point corresponding to the first pixel point in the second image; The determining of the position offset based on the first position coordinates of the first target point and the second position coordinates of the second target point includes: The position offset is determined based on the first pixel coordinate, the second pixel coordinate, and a pixel size of the pixel point.

3. The method for determining the position offset of a measuring device according to claim 2, characterized in that: The first image and the second image have different image sizes, Before matching the first image with the second image and determining in the second image a second pixel point corresponding to the first pixel point, the determination method further includes: Re-dividing the pixels included in the first image to obtain a third image with the same image size as the second image; The matching the first image and the second image to determine a second pixel point corresponding to the first pixel point in the second image includes: Matching the third image and the second image, and determining the second pixel point corresponding to the third pixel point in the second image, wherein the third pixel point is a pixel point in the third image; The determining the position offset based on the first pixel coordinate, the second pixel coordinate, and the pixel size of the pixel point includes: The position offset is determined based on a third pixel coordinate of the third pixel point in the third image, the second pixel coordinate and a pixel size of the pixel point.

4. The method for determining the position offset of a measuring device according to claim 2, characterized in that: The acquisition information further includes a first coordinate and a second coordinate, the first coordinate being the coordinate of the mobile platform where the acquisition object is located when the first lens acquires the first image, and the second coordinate being the coordinate of the mobile platform where the acquisition object is located when the second lens acquires the second image; After determining the position offset between the first lens and the second lens based on the first position coordinates of the first target point and the second position coordinates of the second target point, the determination method further includes: A compensation value of the position of the mobile platform where the acquisition object is located is determined based on the first coordinate, the second coordinate, and the position offset.

5. The method for determining the position offset of a measuring device according to claim 4, characterized in that: The position offset includes a first position offset and a second position offset, the pixel size of the pixel point includes a first size in a first preset direction and a second size in a second preset direction, the first pixel coordinate includes a first sub-pixel coordinate in the first preset direction and a second sub-pixel coordinate in the second preset direction, the second pixel coordinate includes a third sub-pixel coordinate in the first preset direction and a fourth sub-pixel coordinate in the second preset direction, The determining the position offset based on the first pixel coordinate, the second pixel coordinate and the pixel size of the pixel point includes: The first position offset in the first preset direction is determined based on the first sub-pixel coordinates, the third sub-pixel coordinates and the first size, and the second position offset in the second preset direction is determined based on the second sub-pixel coordinates, the fourth sub-pixel coordinates and the second size.

6. The method for determining the position offset of a measuring device according to claim 5, characterized in that: The compensation value includes a first compensation value and a second compensation value, The first coordinate includes a first sub-coordinate in a first preset direction and a second sub-coordinate in a second preset direction, the second coordinate includes a third sub-coordinate in the first preset direction and a fourth sub-coordinate in the second preset direction, The determining the compensation value of the position of the mobile platform where the acquisition object is located based on the first coordinate, the second coordinate, and the position offset includes: The first compensation value in a first preset direction is determined based on the first sub-coordinate, the third sub-coordinate and the first position offset, and the second compensation value in a second preset direction is determined based on the second sub-coordinate, the fourth sub-coordinate and the second position offset.

7. A measuring device, characterized in that: include: A first lens, used for acquiring a first image; A second lens, used for acquiring a second image; A mobile platform, used to hold the collection object and change the position of the mobile platform in response to the control of the control device; A control device, wherein the control device is connected to the mobile platform, and the control device is used to obtain acquisition information, wherein the acquisition information includes a first image acquired by a first lens and a second image acquired by a second lens, wherein the first image and the second image are respectively acquired by changing the position of the mobile platform where the acquisition object is located under the control of the control device while the positions of the first lens and the second lens remain unchanged; matching the first image and the second image, and determining a second target point corresponding to the first target point in the second image, wherein the first target point is a point in the first image; and determining a position offset based on the first position coordinates of the first target point and the second position coordinates of the second target point, wherein the position offset is the offset generated by the mobile platform when the measuring device controls the mobile platform to move under the control of the control device.

8. An electronic device, characterized in that: The device includes: a processor, and a memory storing computer program instructions; The processor reads and executes the computer program instructions to implement the method for determining the position offset of the measuring device according to any one of claims 1 to 6.

9. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer program instructions, and when the computer program instructions are executed by a processor, the method for determining the position offset of the measuring device according to any one of claims 1 to 6 is implemented.

10. A computer program product, comprising a computer program, characterized in that When the computer program is processed by a processor, the method for determining the position offset of the measuring device according to any one of claims 1 to 6 is implemented.

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