Axis motion measurement compensation processing method based on laser interferometer

Abstract

The invention relates to the field of shaft motion measurement compensation, in particular to a shaft motion measurement compensation processing method based on a laser interferometer, which comprises the following steps: S1, acquiring shaft motion real-time measurement data based on the laser interferometer, and performing initialization processing to obtain real-time data characteristics and real-time data dynamic trend of the shaft motion real-time measurement data; s2, performing composite verification processing by using the real-time data characteristics and the real-time data dynamic trend of the real-time measurement data of the shaft motion to obtain a composite verification processing result of the real-time measurement data of the shaft motion; s3, delayed comparison processing is carried out according to the composite verification processing result of the real-time measurement data of the shaft motion to obtain a compensation processing result of the shaft motion measurement, the whole process is closed-loop processing, after real-time data acquisition, based on environmental factors of data acquisition, reasonable application of the measurement data of the shaft motion and other associated data in a single process is realized, and the measurement accuracy of the shaft motion is improved. High accuracy of measured data is achieved, and meanwhile the data trend serves as a compensation result to be jointly output.

Description

Technical Field

[0001] The invention relates to the field of axis motion measurement compensation, and in particular to an axis motion measurement compensation processing method based on a laser interferometer. Background Art

[0002] Laser interferometers can measure objects extremely accurately. The working principle is to use a beam splitter to split a beam of light into two equal halves. When the light hits the beam splitter, half of the light passes through and half of the light is reflected back. One of the beams hits a mirror and from there to a detector. The other beam hits or passes through the object being measured, hits a second mirror, returns through the beam splitter, and hits the same detector. The measurement results are relatively stable under a stable working environment.

[0003] In a motion control system, the axis has multiple states, and the system needs to respond accordingly based on the state of the axis. Therefore, real-time monitoring of axis motion and post-monitoring control actions become necessary functions of the process production line. The axis motion data can be obtained in real time with the help of a laser interferometer. However, considering the influence of the production line environment, the accuracy of the actual measurement data becomes a problem that needs to be solved urgently. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention provides a method for measuring and compensating axis motion based on laser interferometer. The laser interferometer collects real-time data and takes environmental factors into consideration to ultimately output accurate measurement results of the axis motion and possible compensation processing directions.

[0005] To achieve the above object, the present invention provides an axis motion measurement compensation processing method based on laser interferometer, comprising: S1. Based on the laser interferometer, the real-time measurement data of the axis motion is obtained and initialized to obtain the real-time data characteristics and real-time data dynamic trend of the real-time measurement data of the axis motion; S2, using the real-time data characteristics and the real-time data dynamic trend of the real-time measurement data of the axis motion to perform composite verification processing to obtain a composite verification processing result of the real-time measurement data of the axis motion; S3, performing delayed comparison processing according to the composite verification processing result of the real-time measurement data of the axis motion to obtain the axis motion measurement compensation processing result.

[0006] Preferably, the real-time data characteristics and real-time data dynamic trends of the real-time measurement data of the axis motion obtained by initializing the data based on the laser interferometer include: S1-1, obtaining the current time as the starting time t for collecting the real-time measurement data of the axis motion; S1-2, obtaining the real-time measurement data of the axis motion at the acquisition start time t as a starting reference; S1-3, obtaining the wavelength of the corresponding laser interferometer according to the starting reference as the real-time data feature of the real-time measurement data of the axis motion; S1-4. Using the real-time data features, establish a real-time dynamic trend of the real-time measurement data of the axis motion at the current moment according to the current moment.

[0007] Further, using the real-time data feature to establish a real-time dynamic trend of the real-time measurement data of the axis motion at the current moment according to the current moment includes: S1-4-1, obtaining the real-time data features at the collection start time t corresponding to the real-time data features at time t-1 and the real-time data features at time t-2; S1-4-2, respectively obtaining the real-time measurement data of the axis motion at time t-1 and the real-time measurement data of the axis motion at time t-2 according to the real-time data characteristics at time t-1 and the real-time data characteristics at time t-2; S1-4-3, using the real-time data features at time t-2 and the real-time data features at time t-1 to establish a preceding time feature trend mapping; S1-4-4, using the real-time data features at time t-1 and the real-time data features at the collection start time t to establish a feature trend mapping at the current time; S1-4-5, using the real-time measurement data of the axis motion at time t-2 and the real-time measurement data of the axis motion at time t-1 to establish a preceding time data trend mapping; S1-4-6, using the real-time measurement data of the axis motion at time t-1 and the real-time measurement data of the axis motion at the acquisition start time t to establish a data trend mapping at the current time; S1-4-7, using the mapping trend of the previous moment feature trend mapping and the current moment feature trend mapping as the real-time feature dynamic trend at the current moment; S1-4-8, using the mapping trend of the previous moment data trend mapping and the current moment data trend mapping as the real-time data dynamic trend at the current moment; S1-4-9, determine whether the trend direction of the real-time feature dynamic trend and the real-time data dynamic trend at the current moment is consistent, if so, use the real-time feature dynamic trend and the real-time data dynamic trend at the current moment as the real-time dynamic trend of the real-time measurement data of the axis motion at the current moment, otherwise, return to S1-4-1; Among them, the mapping trend is the numerical trend of the preceding moment value and the following moment value in the mapping. When the preceding moment value is greater than the following moment value, the mapping trend is decreasing; when the preceding moment value is less than the following moment value, the mapping trend is increasing.

[0008] Furthermore, the composite verification processing result of the real-time measurement data of the axis motion is obtained by performing composite verification processing using the real-time data characteristics and the real-time data dynamic trend of the real-time measurement data of the axis motion, including: S2-1, obtaining measurement environment data of the real-time measurement data of the axis movement as a traceability verification label according to the real-time measurement data of the axis movement; S2-2, obtaining historical axis motion real-time measurement data corresponding to the traceability verification tag from the historical axis motion real-time measurement data according to the traceability verification tag to establish a data reference data set; S2-3, acquiring historical axis motion real-time measurement data of the same wavelength according to the traceability verification tag to establish a characteristic reference data set; S2-4, using the data reference data set, the feature reference data set and the real-time dynamic trend to perform composite verification processing to obtain a composite verification processing result of the real-time measurement data of the axis motion; The measurement environment data include the environment temperature, environment humidity and environment radiation value during the measurement process of the real-time measurement data of the axis movement.

[0009] Furthermore, the composite verification processing result of the real-time measurement data of the axis motion obtained by composite verification processing using the data reference data set, the feature reference data set and the real-time dynamic trend includes: S2-4-1, determine whether the mapping trend of the real-time dynamic trend is consistent, if so, execute S2-4-2, otherwise, execute S2-4-3; S2-4-2, determine whether the real-time feature dynamic trend of the real-time dynamic trend has a corresponding subset in the data benchmark data set, if so, obtain the subset corresponding to the real-time feature dynamic trend in the data benchmark data set as a composite verification process label, and execute S2-4-4, otherwise, execute S2-4-3; S2-4-3, determine whether the real-time data dynamic trend of the real-time dynamic trend has a corresponding subset in the feature benchmark data set, if so, obtain the subset corresponding to the real-time data dynamic trend in the feature benchmark data set as a composite verification process label, and execute S2-4-4, otherwise, return to S2-1; S2-4-4. Obtain the t+ to determine whether the mapping trend of the composite verification process label corresponding to the historical axis motion real-time measurement data is relatively consistent with the mapping trend of the real-time dynamic trend. If so, use the composite verification process label as the composite verification processing result of the axis motion real-time measurement data; otherwise, perform independent backtracking processing.

[0010] Furthermore, the independent backtracking process includes: S2-4-4-1. Obtain the measurement environment data and measurement wavelength corresponding to the composite verification process label respectively; S2-4-4-2, determine whether the measurement wavelength corresponding to the composite verification process label meets the measurement standard, if so, execute S2-4-4-3, otherwise, the measurement wavelength is abnormal and the process is abandoned; S2-4-4-3, determine whether the environmental radiation value of the measured environmental data corresponding to the composite verification process label is relatively consistent with the environmental radiation value of the measured environmental data corresponding to the real-time measurement data of the axis movement. If so, execute S2-4-4-4; otherwise, the environmental radiation value is abnormal and the processing is abandoned; S2-4-4-4, determine whether the ambient temperature and ambient humidity of the composite verification process tag corresponding to the measured environmental data correspond to each other, if so, execute S2-4-4-5, otherwise, the ambient temperature and ambient humidity are abnormal, and the processing is abandoned; S2-4-4-5, determine whether the number of executions of the independent backtracking process at the current moment is greater than 1, if so, return to S2-1, otherwise, give up the process; Among them, the measurement standard is the rated working state of the laser interferometer, and the relative consistency between the environmental radiation value of the measured environmental data corresponding to the composite verification process label and the environmental radiation value of the measured environmental data corresponding to the real-time measurement data of the axis motion is defined as the relative fluctuation of the environmental radiation value not exceeding 5%.

[0011] Further, the delayed comparison processing is performed according to the composite verification processing result of the real-time measurement data of the axis motion to obtain the axis motion measurement compensation processing result, including: S3-1, obtaining the real-time measurement data of the axis motion at the next moment corresponding to the acquisition start moment t as the real-time measurement data of the axis motion at moment t+1; S3-2, using the real-time measurement data of the axis motion at time t+1 to establish a delayed comparison label at the collection start time t; S3-3, using the delayed comparison tag at the acquisition start time t to perform delayed comparison processing on the composite verification processing result of the real-time measurement data of the axis motion to obtain a basic analysis result of the electromagnetic wave measurement data; S3-4. Obtain axis motion measurement compensation processing results according to the basic analysis results of the electromagnetic wave measurement data.

[0012] Furthermore, using the real-time measurement data of the axis motion at time t+1 to establish a delayed comparison tag at the collection start time t includes: Obtain the measurement environment data corresponding to the real-time measurement data of the axis motion at time t+1 as a delayed first-level comparison tag at the collection start time t; Obtaining the real-time dynamic trend corresponding to the real-time measurement data of the axis movement at time t+1 as a delayed secondary comparison tag at the collection start time t; Using the real-time measurement data of the axis motion at time t+1 as the delayed third-level comparison label of the acquisition start time t; The delayed first-level comparison label, delayed second-level comparison label and delayed third-level comparison label of the collection starting time t are used as the delayed comparison label of the collection starting time t.

[0013] Furthermore, the delayed comparison tag at the acquisition start time t is used to perform delayed comparison processing on the composite verification processing result of the real-time measurement data of the axis motion to obtain the basic analysis results of the electromagnetic wave measurement data, including: S3-1-1, determine whether the delayed comparison tag corresponding to the delayed first-level comparison tag at the acquisition start time t corresponds to the composite verification processing result of the real-time measurement data of the axis motion, if so, execute S3-1-2, otherwise, the delayed comparison processing fails, the measurement environment data is abnormal, and the output electromagnetic wave measurement data basic analysis result is empty; S3-1-2, determine whether the delayed comparison tag at the acquisition start time t corresponds to the composite verification processing result of the delayed secondary comparison tag and the real-time measurement data of the axis motion. If so, execute S3-1-3. Otherwise, the delayed comparison processing fails, the mapping trend is abnormal, and the output electromagnetic wave measurement data basic analysis result is empty; S3-1-3. Determine whether the delayed comparison label at the acquisition start time t corresponds to the composite verification processing result of the delayed third-level comparison label and the real-time measurement data of the axis motion. If so, the delayed comparison processing is passed, and the composite verification processing result is output as the basic analysis result of the electromagnetic wave measurement data. Otherwise, the delayed comparison processing fails, and the real-time measurement data of the axis motion at time t+1 is output as the basic analysis result of the electromagnetic wave measurement data.

[0014] Further, obtaining the axis motion measurement compensation processing result according to the basic analysis result of the electromagnetic wave measurement data includes: S3-4-1, determine whether the basic analysis result of the electromagnetic wave measurement data exists, if so, execute S3-4-2, otherwise, directly execute S3-4-3; S3-4-2, determine whether the corresponding moment of the basic analysis result of the electromagnetic wave measurement data is the collection start time t, if so, output the real-time measurement data of the axis motion at the collection start time t, and use the current moment as the updated collection start time t, and return to S1-1, otherwise, output the real-time measurement data of the axis motion at the collection start time t and the real-time measurement data of the axis motion at time t+1 as the axis motion measurement compensation processing result, and use time t+1 as the updated collection start time t, and return to S1-1; S3-4-3. Determine whether the basic analysis result of the electromagnetic wave measurement data corresponds to abnormal measurement environment data. If so, output the real-time measurement data of the axis motion and the measurement environment data at the collection start time t, and use the time t+1 as the updated collection start time t, and return to S1-1. Otherwise, obtain the real-time measurement data of the axis motion at the t+output collection start time t and the corresponding real-time dynamic trend as the axis motion measurement compensation processing result, and use the time t+1 as the updated collection start time t, and return to S1-1.

[0015] Compared with the closest prior art, the present invention has the following beneficial effects: Taking into account the actual implementation application scenarios of the solution, the overall solution is a closed-loop processing. After real-time data collection, based on the environmental factors of data collection and multi-level analysis and processing of historical data of the same type, the laser interferometer measurement data analysis, verification and output of the front, middle and back parts are formed, thereby realizing the reasonable application of axis motion measurement data and other related data in a single process, ensuring stable output of results while achieving high accuracy of measurement data, and outputting data trends as compensation results. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a flow chart of an axis motion measurement compensation processing method based on laser interferometer provided by the present invention. DETAILED DESCRIPTION

[0017] The specific implementation modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0018] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] Embodiment 1: The present invention provides a method for measuring and compensating axis motion based on a laser interferometer, such as Figure 1 As shown, including: S1. Based on the laser interferometer, the real-time measurement data of the axis motion is obtained and initialized to obtain the real-time data characteristics and real-time data dynamic trend of the real-time measurement data of the axis motion; S2, using the real-time data characteristics and the real-time data dynamic trend of the real-time measurement data of the axis motion to perform composite verification processing to obtain a composite verification processing result of the real-time measurement data of the axis motion; S3, performing delayed comparison processing according to the composite verification processing result of the real-time measurement data of the axis motion to obtain the axis motion measurement compensation processing result.

[0020] S1 specifically includes: S1-1, obtaining the current time as the starting time t for collecting the real-time measurement data of the axis motion; S1-2, obtaining the real-time measurement data of the axis motion at the acquisition start time t as a starting reference; S1-3, obtaining the wavelength of the corresponding laser interferometer according to the starting reference as the real-time data feature of the real-time measurement data of the axis motion; S1-4. Using the real-time data features, establish a real-time dynamic trend of the real-time measurement data of the axis motion at the current moment according to the current moment.

[0021] S1-4 specifically includes: S1-4-1, obtaining the real-time data features at the collection start time t corresponding to the real-time data features at time t-1 and the real-time data features at time t-2; S1-4-2, respectively obtaining the real-time measurement data of the axis motion at time t-1 and the real-time measurement data of the axis motion at time t-2 according to the real-time data characteristics at time t-1 and the real-time data characteristics at time t-2; S1-4-3, using the real-time data features at time t-2 and the real-time data features at time t-1 to establish a preceding time feature trend mapping; S1-4-4, using the real-time data features at time t-1 and the real-time data features at the collection start time t to establish a feature trend mapping at the current time; S1-4-5, using the real-time measurement data of the axis motion at time t-2 and the real-time measurement data of the axis motion at time t-1 to establish a preceding time data trend mapping; S1-4-6, using the real-time measurement data of the axis motion at time t-1 and the real-time measurement data of the axis motion at the acquisition start time t to establish a data trend mapping at the current time; S1-4-7, using the mapping trend of the previous moment feature trend mapping and the current moment feature trend mapping as the real-time feature dynamic trend at the current moment; S1-4-8, using the mapping trend of the previous moment data trend mapping and the current moment data trend mapping as the real-time data dynamic trend at the current moment; S1-4-9, determine whether the trend direction of the real-time feature dynamic trend and the real-time data dynamic trend at the current moment is consistent, if so, use the real-time feature dynamic trend and the real-time data dynamic trend at the current moment as the real-time dynamic trend of the real-time measurement data of the axis motion at the current moment, otherwise, return to S1-4-1; Among them, the mapping trend is the numerical trend of the preceding moment value and the following moment value in the mapping. When the preceding moment value is greater than the following moment value, the mapping trend is decreasing; when the preceding moment value is less than the following moment value, the mapping trend is increasing.

[0022] S2 specifically includes: S2-1, obtaining measurement environment data of the real-time measurement data of the axis movement as a traceability verification label according to the real-time measurement data of the axis movement; S2-2, obtaining historical axis motion real-time measurement data corresponding to the traceability verification tag from the historical axis motion real-time measurement data according to the traceability verification tag to establish a data reference data set; S2-3, acquiring historical axis motion real-time measurement data of the same wavelength according to the traceability verification tag to establish a characteristic reference data set; S2-4, using the data reference data set, the feature reference data set and the real-time dynamic trend to perform composite verification processing to obtain a composite verification processing result of the real-time measurement data of the axis motion; The measurement environment data include the environment temperature, environment humidity and environment radiation value during the measurement process of the real-time measurement data of the axis movement.

[0023] S2-4 specifically includes: S2-4-1, determine whether the mapping trend of the real-time dynamic trend is consistent, if so, execute S2-4-2, otherwise, execute S2-4-3; S2-4-2, determine whether the real-time feature dynamic trend of the real-time dynamic trend has a corresponding subset in the data benchmark data set, if so, obtain the subset corresponding to the real-time feature dynamic trend in the data benchmark data set as a composite verification process label, and execute S2-4-4, otherwise, execute S2-4-3; S2-4-3, determine whether the real-time data dynamic trend of the real-time dynamic trend has a corresponding subset in the feature benchmark data set, if so, obtain the subset corresponding to the real-time data dynamic trend in the feature benchmark data set as a composite verification process label, and execute S2-4-4, otherwise, return to S2-1; S2-4-4. Obtain the t+ to determine whether the mapping trend of the composite verification process label corresponding to the historical axis motion real-time measurement data is relatively consistent with the mapping trend of the real-time dynamic trend. If so, use the composite verification process label as the composite verification processing result of the axis motion real-time measurement data; otherwise, perform independent backtracking processing.

[0024] S2-4-4 specifically includes: S2-4-4-1. Obtain the measurement environment data and measurement wavelength corresponding to the composite verification process label respectively; S2-4-4-2, determine whether the measurement wavelength corresponding to the composite verification process label meets the measurement standard, if so, execute S2-4-4-3, otherwise, the measurement wavelength is abnormal and the process is abandoned; S2-4-4-3, determine whether the environmental radiation value of the measured environmental data corresponding to the composite verification process label is relatively consistent with the environmental radiation value of the measured environmental data corresponding to the real-time measurement data of the axis movement. If so, execute S2-4-4-4; otherwise, the environmental radiation value is abnormal and the processing is abandoned; S2-4-4-4, determine whether the ambient temperature and ambient humidity of the composite verification process tag corresponding to the measured environmental data correspond to each other, if so, execute S2-4-4-5, otherwise, the ambient temperature and ambient humidity are abnormal, and the processing is abandoned; S2-4-4-5, determine whether the number of executions of the independent backtracking process at the current moment is greater than 1, if so, return to S2-1, otherwise, give up the process; Among them, the measurement standard is the rated working state of the laser interferometer, and the relative consistency between the environmental radiation value of the measured environmental data corresponding to the composite verification process label and the environmental radiation value of the measured environmental data corresponding to the real-time measurement data of the axis motion is defined as the relative fluctuation of the environmental radiation value not exceeding 5%.

[0025] S3 specifically includes: S3-1, obtaining the real-time measurement data of the axis motion at the next moment corresponding to the acquisition start moment t as the real-time measurement data of the axis motion at moment t+1; S3-2, using the real-time measurement data of the axis motion at time t+1 to establish a delayed comparison label at the collection start time t; S3-3, using the delayed comparison tag at the acquisition start time t to perform delayed comparison processing on the composite verification processing result of the real-time measurement data of the axis motion to obtain a basic analysis result of the electromagnetic wave measurement data; S3-4. Obtain axis motion measurement compensation processing results according to the basic analysis results of the electromagnetic wave measurement data.

[0026] S3-2 specifically includes: S3-2-1, obtaining the measurement environment data corresponding to the real-time measurement data of the axis motion at time t+1 as a delayed first-level comparison tag at the collection start time t; S3-2-2, obtaining the real-time dynamic trend corresponding to the real-time measurement data of the axis movement at time t+1 as the delayed secondary comparison label of the collection start time t; S3-2-3, using the real-time measurement data of the axis motion at time t+1 as the delayed third-level comparison label of the collection start time t; S3-2-4, using the delayed first-level comparison label, delayed second-level comparison label and delayed third-level comparison label of the collection start time t as the delayed comparison label of the collection start time t.

[0027] S3-1 specifically includes: S3-1-1, determine whether the delayed comparison tag corresponding to the delayed first-level comparison tag at the acquisition start time t corresponds to the composite verification processing result of the real-time measurement data of the axis motion, if so, execute S3-1-2, otherwise, the delayed comparison processing fails, the measurement environment data is abnormal, and the output electromagnetic wave measurement data basic analysis result is empty; S3-1-2, determine whether the delayed comparison tag at the acquisition start time t corresponds to the composite verification processing result of the delayed secondary comparison tag and the real-time measurement data of the axis motion. If so, execute S3-1-3. Otherwise, the delayed comparison processing fails, the mapping trend is abnormal, and the output electromagnetic wave measurement data basic analysis result is empty; S3-1-3. Determine whether the delayed comparison label at the acquisition start time t corresponds to the composite verification processing result of the delayed third-level comparison label and the real-time measurement data of the axis motion. If so, the delayed comparison processing is passed, and the composite verification processing result is output as the basic analysis result of the electromagnetic wave measurement data. Otherwise, the delayed comparison processing fails, and the real-time measurement data of the axis motion at time t+1 is output as the basic analysis result of the electromagnetic wave measurement data.

[0028] S3-4 specifically includes: S3-4-1, determine whether the basic analysis result of the electromagnetic wave measurement data exists, if so, execute S3-4-2, otherwise, directly execute S3-4-3; S3-4-2, determine whether the corresponding moment of the basic analysis result of the electromagnetic wave measurement data is the collection start time t, if so, output the real-time measurement data of the axis motion at the collection start time t, and use the current moment as the updated collection start time t, and return to S1-1, otherwise, output the real-time measurement data of the axis motion at the collection start time t and the real-time measurement data of the axis motion at time t+1 as the axis motion measurement compensation processing result, and use time t+1 as the updated collection start time t, and return to S1-1; S3-4-3. Determine whether the basic analysis result of the electromagnetic wave measurement data corresponds to abnormal measurement environment data. If so, output the real-time measurement data of the axis motion and the measurement environment data at the collection start time t, and use the time t+1 as the updated collection start time t, and return to S1-1. Otherwise, obtain the real-time measurement data of the axis motion at the t+output collection start time t and the corresponding real-time dynamic trend as the axis motion measurement compensation processing result, and use the time t+1 as the updated collection start time t, and return to S1-1.

[0029] It will be appreciated by those skilled in the art that embodiments of the present invention may be provided as methods, systems, or computer program products. Therefore, the present invention may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Furthermore, the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0030] The present invention is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of the processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0031] These computer program instructions may also be stored in a computer readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer readable memory produce an article of manufacture including an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0032] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process in the computer or other programmable device. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0033] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in the relevant field should understand that the specific implementation methods of the present invention can still be modified or replaced by equivalents. Any modification or equivalent replacement that does not depart from the spirit and scope of the present invention should be covered within the scope of protection of the claims of the present invention.

Claims

1. A method for measuring and compensating axis motion based on laser interferometer, characterized in that: include: S1. Based on the laser interferometer, the real-time measurement data of the axis motion is obtained and initialized to obtain the real-time data characteristics and real-time data dynamic trend of the real-time measurement data of the axis motion; S2, using the real-time data characteristics and the real-time data dynamic trend of the real-time measurement data of the axis motion to perform composite verification processing to obtain a composite verification processing result of the real-time measurement data of the axis motion; S3. Performing a delayed comparison process according to the composite verification process result of the real-time measurement data of the axis motion to obtain an axis motion measurement compensation process result.

2. The method for measuring and compensating axis motion based on laser interferometer according to claim 1, characterized in that: The real-time data characteristics and real-time data dynamic trends of the real-time measurement data of the axis motion obtained by initializing the real-time measurement data of the axis motion based on the laser interferometer include: S1-1, obtaining the current time as the starting time t for collecting the real-time measurement data of the axis motion; S1-2, obtaining the real-time measurement data of the axis motion at the acquisition start time t as a starting reference; S1-3, obtaining the wavelength of the corresponding laser interferometer according to the starting reference as the real-time data feature of the real-time measurement data of the axis motion; S1-4. Using the real-time data features, establish a real-time dynamic trend of the real-time measurement data of the axis motion at the current moment according to the current moment.

3. The method for measuring and compensating axis motion based on laser interferometer according to claim 2, characterized in that: Using the real-time data feature to establish the real-time dynamic trend of the real-time measurement data of the axis movement at the current moment includes: S1-4-1, obtaining the real-time data features at the collection start time t corresponding to the real-time data features at time t-1 and the real-time data features at time t-2; S1-4-2, respectively obtaining the real-time measurement data of the axis motion at time t-1 and the real-time measurement data of the axis motion at time t-2 according to the real-time data characteristics at time t-1 and the real-time data characteristics at time t-2; S1-4-3, using the real-time data features at time t-2 and the real-time data features at time t-1 to establish a preceding time feature trend mapping; S1-4-4, using the real-time data features at time t-1 and the real-time data features at the collection start time t to establish a feature trend mapping at the current time; S1-4-5, using the real-time measurement data of the axis motion at time t-2 and the real-time measurement data of the axis motion at time t-1 to establish a preceding time data trend mapping; S1-4-6, using the real-time measurement data of the axis motion at time t-1 and the real-time measurement data of the axis motion at the acquisition start time t to establish a data trend mapping at the current time; S1-4-7, using the mapping trend of the previous moment feature trend mapping and the current moment feature trend mapping as the real-time feature dynamic trend at the current moment; S1-4-8, using the mapping trend of the previous moment data trend mapping and the current moment data trend mapping as the real-time data dynamic trend at the current moment; S1-4-9, determine whether the trend direction of the real-time feature dynamic trend and the real-time data dynamic trend at the current moment is consistent, if so, use the real-time feature dynamic trend and the real-time data dynamic trend at the current moment as the real-time dynamic trend of the real-time measurement data of the axis motion at the current moment, otherwise, return to S1-4-1; Among them, the mapping trend is the numerical trend of the preceding moment value and the following moment value in the mapping. When the preceding moment value is greater than the following moment value, the mapping trend is decreasing; when the preceding moment value is less than the following moment value, the mapping trend is increasing.

4. The method for measuring and compensating axis motion based on laser interferometer according to claim 3, characterized in that: The composite verification processing result of the real-time measurement data of the axis motion is obtained by performing composite verification processing using the real-time data characteristics and the real-time data dynamic trend of the real-time measurement data of the axis motion, including: S2-1, obtaining measurement environment data of the real-time measurement data of the axis movement as a traceability verification label according to the real-time measurement data of the axis movement; S2-2, obtaining historical axis motion real-time measurement data corresponding to the traceability verification tag from the historical axis motion real-time measurement data according to the traceability verification tag to establish a data reference data set; S2-3, acquiring historical axis motion real-time measurement data of the same wavelength according to the traceability verification tag to establish a characteristic reference data set; S2-4, using the data reference data set, the feature reference data set and the real-time dynamic trend to perform composite verification processing to obtain a composite verification processing result of the real-time measurement data of the axis motion; The measurement environment data include the environment temperature, environment humidity and environment radiation value during the measurement process of the real-time measurement data of the axis movement.

5. The method for axis motion measurement and compensation processing based on laser interferometer as claimed in claim 4, characterized in that: The composite verification processing result of the real-time measurement data of the axis motion obtained by composite verification processing using the data reference data set, the feature reference data set and the real-time dynamic trend includes: S2-4-1, determine whether the mapping trend of the real-time dynamic trend is consistent, if so, execute S2-4-2, otherwise, execute S2-4-3; S2-4-2, determine whether the real-time feature dynamic trend of the real-time dynamic trend has a corresponding subset in the data benchmark data set, if so, obtain the subset corresponding to the real-time feature dynamic trend in the data benchmark data set as a composite verification process label, and execute S2-4-4, otherwise, execute S2-4-3; S2-4-3, determine whether the real-time data dynamic trend of the real-time dynamic trend has a corresponding subset in the feature benchmark data set, if so, obtain the subset corresponding to the real-time data dynamic trend in the feature benchmark data set as a composite verification process label, and execute S2-4-4, otherwise, return to S2-1; S2-4-4. Obtain the t+ to determine whether the mapping trend of the composite verification process label corresponding to the historical axis motion real-time measurement data is relatively consistent with the mapping trend of the real-time dynamic trend. If so, use the composite verification process label as the composite verification processing result of the axis motion real-time measurement data; otherwise, perform independent backtracking processing.

6. The method for measuring and compensating axis motion based on laser interferometer according to claim 5, characterized in that: The independent backtracking process includes: S2-4-4-1. Obtain the measurement environment data and measurement wavelength corresponding to the composite verification process label respectively; S2-4-4-2, determine whether the measurement wavelength corresponding to the composite verification process label meets the measurement standard, if so, execute S2-4-4-3, otherwise, the measurement wavelength is abnormal and the process is abandoned; S2-4-4-3, determine whether the environmental radiation value of the measured environmental data corresponding to the composite verification process label is relatively consistent with the environmental radiation value of the measured environmental data corresponding to the real-time measurement data of the axis movement. If so, execute S2-4-4-4; otherwise, the environmental radiation value is abnormal and the processing is abandoned; S2-4-4-4, determine whether the ambient temperature and ambient humidity of the composite verification process tag corresponding to the measured environmental data correspond to each other, if so, execute S2-4-4-5, otherwise, the ambient temperature and ambient humidity are abnormal, and the processing is abandoned; S2-4-4-5, determine whether the number of executions of the independent backtracking process at the current moment is greater than 1, if so, return to S2-1, otherwise, give up the process; Among them, the measurement standard is the rated working state of the laser interferometer, and the relative consistency between the environmental radiation value of the measured environmental data corresponding to the composite verification process label and the environmental radiation value of the measured environmental data corresponding to the real-time measurement data of the axis motion is defined as the relative fluctuation of the environmental radiation value not exceeding 5%.

7. The method for axis motion measurement and compensation based on laser interferometer as claimed in claim 5, characterized in that: The delayed comparison processing is performed according to the composite verification processing result of the real-time measurement data of the axis motion to obtain the axis motion measurement compensation processing result, which includes: S3-1, obtaining the real-time measurement data of the axis motion at the next moment corresponding to the acquisition start moment t as the real-time measurement data of the axis motion at moment t+1; S3-2, using the real-time measurement data of the axis motion at time t+1 to establish a delayed comparison label at the collection start time t; S3-3, using the delayed comparison tag at the acquisition start time t to perform delayed comparison processing on the composite verification processing result of the real-time measurement data of the axis motion to obtain a basic analysis result of the electromagnetic wave measurement data; S3-4. Obtain axis motion measurement compensation processing results according to the basic analysis results of the electromagnetic wave measurement data.

8. The method for measuring and compensating axis motion based on laser interferometer according to claim 7, characterized in that: Using the real-time measurement data of the axis motion at time t+1 to establish a delayed comparison tag at the collection start time t includes: Obtain the measurement environment data corresponding to the real-time measurement data of the axis motion at time t+1 as a delayed first-level comparison tag at the collection start time t; Obtaining the real-time dynamic trend corresponding to the real-time measurement data of the axis movement at time t+1 as a delayed secondary comparison tag at the collection start time t; Using the real-time measurement data of the axis motion at time t+1 as the delayed third-level comparison label of the acquisition start time t; The delayed first-level comparison label, delayed second-level comparison label and delayed third-level comparison label of the collection starting time t are used as the delayed comparison label of the collection starting time t.

9. The method for axis motion measurement and compensation based on laser interferometer as claimed in claim 8, characterized in that: The delayed comparison tag at the acquisition start time t is used to perform delayed comparison processing on the composite verification processing result of the real-time measurement data of the axis motion to obtain the basic analysis results of the electromagnetic wave measurement data, including: S3-1-1, determine whether the delayed comparison tag corresponding to the delayed first-level comparison tag at the acquisition start time t corresponds to the composite verification processing result of the real-time measurement data of the axis motion, if so, execute S3-1-2, otherwise, the delayed comparison processing fails, the measurement environment data is abnormal, and the output electromagnetic wave measurement data basic analysis result is empty; S3-1-2, determine whether the delayed comparison tag at the acquisition start time t corresponds to the composite verification processing result of the delayed secondary comparison tag and the real-time measurement data of the axis motion. If so, execute S3-1-3. Otherwise, the delayed comparison processing fails, the mapping trend is abnormal, and the output electromagnetic wave measurement data basic analysis result is empty; S3-1-3. Determine whether the delayed comparison label at the acquisition start time t corresponds to the composite verification processing result of the delayed third-level comparison label and the real-time measurement data of the axis motion. If so, the delayed comparison processing is passed, and the composite verification processing result is output as the basic analysis result of the electromagnetic wave measurement data. Otherwise, the delayed comparison processing fails, and the real-time measurement data of the axis motion at time t+1 is output as the basic analysis result of the electromagnetic wave measurement data.

10. The method for axis motion measurement and compensation based on laser interferometer according to claim 9, characterized in that: Acquiring the axis motion measurement compensation processing result according to the basic analysis result of the electromagnetic wave measurement data includes: S3-4-1, determine whether the basic analysis result of the electromagnetic wave measurement data exists, if so, execute S3-4-2, otherwise, directly execute S3-4-3; S3-4-2, determine whether the corresponding moment of the basic analysis result of the electromagnetic wave measurement data is the collection start time t, if so, output the real-time measurement data of the axis motion at the collection start time t, and use the current moment as the updated collection start time t, and return to S1-1, otherwise, output the real-time measurement data of the axis motion at the collection start time t and the real-time measurement data of the axis motion at time t+1 as the axis motion measurement compensation processing result, and use time t+1 as the updated collection start time t, and return to S1-1; S3-4-3. Determine whether the basic analysis result of the electromagnetic wave measurement data corresponds to abnormal measurement environment data. If so, output the real-time measurement data of the axis motion and the measurement environment data at the collection start time t, and use the time t+1 as the updated collection start time t, and return to S1-1. Otherwise, obtain the real-time measurement data of the axis motion at the t+output collection start time t and the corresponding real-time dynamic trend as the axis motion measurement compensation processing result, and use the time t+1 as the updated collection start time t, and return to S1-1.

Images