Clean room suspended particle monitoring system and monitoring method

Abstract

The invention belongs to the technical field of clean room detection, and particularly relates to a clean room suspended particle monitoring system and monitoring method. The system comprises a shell, a wheel set moving mechanism for driving the shell to move, a monitoring host for processing detection data and realizing data communication with a background control system, a detection cavity body for accommodating to-be-detected air in a clean room, a face type light source for forming face type light which is longitudinally upward, and a first transverse moving mechanism for driving the face type light source to move front and back, the suspended particle image acquisition mechanism is used for acquiring an image of a longitudinal light spot formed by the surface type light source in the detection cavity body through the transparent detection window; the air supply mechanism is used for continuously supplying air in a detection environment to the detection cavity body in unit detection time; a transparent detection window is arranged on one side wall of the detection cavity body; through cooperation of the first transverse moving mechanism, the suspended particle image acquisition mechanism, the surface type light source and the detection cavity body, air at any point in the detection area in the clean room can be sampled and detected, and detection is more representative.

Description

Technical Field

[0001] The present invention relates to the technical field of clean room detection, and in particular to a clean room suspended particle monitoring system and a monitoring method. Background Art

[0002] Clean room is also called dust-free workshop, clean room or clean room. Clean room refers to a specially designed room that removes pollutants such as particles, harmful air, bacteria, etc. in the air within a certain space, and controls the indoor temperature, cleanliness, indoor pressure, air flow speed and distribution, noise vibration, lighting, and static electricity within a certain required range through a control system. That is, no matter how the external air conditions change, the room can maintain the originally set requirements for cleanliness, temperature, humidity, and pressure. Clean rooms are mostly used in high-precision modern industry, cutting-edge technology or medical fields.

[0003] However, the existing clean room dust-free detection equipment is basically fixed-point detection, resulting in unrepresentative detection results. To this end, we propose a clean room suspended particle monitoring system and monitoring method to solve the problems existing in the existing technology. Summary of the invention

[0004] The object of the present invention is to provide a clean room suspended particle monitoring system and monitoring method to solve the problems raised in the background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: A clean room suspended particle monitoring system, comprising a housing, characterized in that it also includes:

[0006] A wheel moving mechanism, used for driving the housing to move on the ground;

[0007] Monitoring host, used to process detection data and realize data communication with the background control system;

[0008] The detection cavity body is arranged inside the shell and is used to contain the air to be detected in the clean room; a transparent detection window is arranged on one side wall of the detection cavity body;

[0009] A surface light source is disposed on the bottom surface of the detection cavity body and is used to form a surface light facing vertically upwards;

[0010] A first transverse movement mechanism, used for driving the planar light source to move forward and backward;

[0011] A suspended particle image acquisition mechanism, used for acquiring an image of a longitudinal light spot formed by the planar light source in the detection cavity body through the transparent detection window;

[0012] The air supply mechanism is used to continuously supply the air in the detection environment to the detection cavity within a unit detection time.

[0013] The clean room suspended particle monitoring system described in the present invention is characterized in that a first longitudinal airflow diffuser plate and a second horizontal airflow diffuser plate are provided in the detection chamber body; the inner cavity of the detection chamber body is divided into an air intake detection chamber and an exhaust chamber by the first airflow diffuser plate, and the transparent detection window is located on the side wall of the air intake detection chamber at one end away from the exhaust chamber; the second airflow diffuser plate and the first transverse movement mechanism are both arranged in the air intake detection chamber, and the first transverse movement mechanism, the second airflow diffuser plate and the air inlet of the detection chamber body are arranged in sequence from bottom to top.

[0014] In the clean room suspended particle monitoring system of the present invention, a transparent partition is provided in the air intake detection chamber between the second airflow diffuser plate and the first transverse movement mechanism.

[0015] In the clean room suspended particle monitoring system of the present invention, the second airflow diffuser plate is a one-way semi-transparent mirror and its lower surface is the light-incoming side, and the light-emitting direction of the surface light source is inclined away from the suspended particle image acquisition mechanism.

[0016] The clean room suspended particle monitoring system described in the present invention, wherein the air supply mechanism includes a longitudinal ventilation duct running longitudinally through the outer shell, a transverse air inlet duct arranged transversely at the upper end of the longitudinal ventilation duct and connected thereto, and an air supply fan arranged in the inner cavity of the longitudinal ventilation duct; the lower end of the longitudinal ventilation duct is connected to the air inlet of the detection cavity body.

[0017] The clean room suspended particle monitoring system described in the present invention, wherein the wheel group moving mechanism includes a roller wheel group longitudinally rotatably arranged on the lower surface of the shell, and a driving module providing driving force for the roller wheel group; the roller wheel group includes two first rollers arranged side by side at the front end of the shell, and two second rollers arranged side by side at the rear end of the shell; a transparent portion is provided on the bottom surface of the shell corresponding to the second rollers; the two second rollers are both located between the suspended particle image acquisition mechanism and the detection chamber body; a projection mechanism is also provided above the second roller to project the image of the second roller into the suspended particle image acquisition mechanism.

[0018] The clean room suspended particle monitoring system described in the present invention, wherein the projection mechanism includes a semi-transparent and semi-reflective mirror arranged obliquely just above the transparent part, and a total reflective mirror arranged horizontally just above the semi-transparent and semi-reflective mirror and reflecting the image of the second roller onto the upper surface of the semi-transparent and semi-reflective mirror; when assembled in place, the semi-transparent and semi-reflective mirror is located between the transparent detection window and the suspended particle image acquisition mechanism.

[0019] In the clean room suspended particle monitoring system of the present invention, a second lateral movement mechanism for driving the suspended particle image acquisition mechanism to move in the left-right direction is further provided in the housing.

[0020] In the clean room suspended particle monitoring system of the present invention, the suspended particle image acquisition mechanism comprises a camera and an optical microscope component arranged at the front end of the camera.

[0021] To achieve the above object, the present invention also provides the following technical solution: a monitoring method for a clean room suspended particle monitoring system, the method comprising the following steps:

[0022] Move along a preset path in the area to be detected by the wheel group moving mechanism;

[0023] The air supply mechanism continuously supplies air into the detection cavity body within a preset time period;

[0024] Projecting surface light through the surface light source to scatter the suspended particles in the detection cavity body;

[0025] The suspended particle image acquisition mechanism acquires a detection image of the scattered suspended particles through the transparent detection window;

[0026] The detection host obtains a grayscale image of the detection image according to the detection image, compares it with a standard image in a database, and outputs a comparison result;

[0027] The background control system issues a prompt to the monitoring personnel according to the comparison result.

[0028] Compared with the prior art, the present invention has the following beneficial effects: during the detection process, the outer shell is driven to move along a preset path in the area to be detected by the wheel group moving mechanism, and the air drawn into the detection chamber body can be image scanned and detected through the cooperation of the first transverse movement mechanism, the suspended particle image acquisition mechanism and the surface light source. It only needs to select a suitable number of images and compare the grayscale of the standard comparison images in the database to know the situation of suspended particles in the environment within the preset detection time. Compared with the traditional fixed-point detection method, the result is more representative and closer to the actual situation in the clean room. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 The figure is an external structural diagram of the clean room suspended particle monitoring system of the present invention.

[0031] Figure 2 for Figure 1 A longitudinal cross-sectional view along the front-to-back direction.

[0032] Figure 3 The present invention is a flow chart of the steps of the monitoring method of the clean room suspended particle monitoring system. DETAILED DESCRIPTION

[0033] The terms "first", "second", "third" and "fourth" etc. in the specification and claims of the present invention and the drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units that are not listed, or may optionally include other steps or units that are inherent to these processes, methods, products or devices.

[0034] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present invention. The appearance of the phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0035] "Multiple" means two or more. "And / or" describes the relationship between related objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the related objects are in an "or" relationship.

[0036] Moreover, the terms "up, down, left, right, upper end, lower end, longitudinal" and the like indicating directions are all based on the posture and position of the device or equipment described in this solution during normal use.

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the following will be described clearly and completely in combination with the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are partial embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work belong to the protection scope of the present invention.

[0038] This embodiment discloses Figures 1 to 3 The clean room suspended particle monitoring system shown in the figure includes a housing 10, which is used to form a sealed installation and detection space, which can provide protection for its internal components and prevent external suspended particles from interfering with the detection results;

[0039] Furthermore, the system further includes a wheel moving mechanism 20, which is used to drive the housing 10 to move on the ground, thereby facilitating movement along a set path in the area to be detected and performing the detection process;

[0040] Furthermore, the system also includes a monitoring host 30 for processing the detection data and realizing data communication with the background control system, so that the background control system can prompt and alarm the monitoring personnel according to the processed detection data;

[0041] Furthermore, the system further comprises a detection cavity body 40, which is arranged inside the housing 10 and is used to accommodate the air to be detected in the clean room; specifically, a transparent detection window is provided on one side wall of the detection cavity body 40; and in order to avoid interference from reflected light, a black light-absorbing layer is also coated on the inner wall of the detection cavity body 40;

[0042] Furthermore, the system further includes a surface light source 50, which is disposed on the bottom surface of the detection cavity body 40 and is used to form a surface light facing vertically upward. When the suspended particles flow through the surface light along the airflow, scattering occurs, and at this time, the suspended particles in the surface light can be photographed and identified;

[0043] Furthermore, the system further includes a first transverse movement mechanism 60, which is used to drive the surface light source 50 to move forward and backward, so as to perform scanning detection on suspended particles at multiple positions inside the detection cavity;

[0044] Furthermore, the system further includes a suspended particle image acquisition mechanism 70, which is used to acquire the image of the longitudinal light spot formed by the surface light source 50 in the detection cavity body 40 through the transparent detection window 130, that is, the image of the suspended particles passing through the surface light surface; when the suspended particles pass through the surface light surface, it is only necessary to shoot the desired number of images to be detected within a set time and transmit them to the monitoring host 30, and the monitoring host 30 performs image processing on the image to be detected according to the existing image grayscale processing technology to obtain a grayscale image to be compared, and compares the grayscale image to be compared with the standard comparison image in the database, that is, the brightness and number of the suspended particles in the actual captured image are different from the brightness and number of the suspended particles in the standard comparison image. If the brightness and number of the suspended particles in the actual captured image are greater than those in the standard comparison image, it means that the suspended particles in the clean room do not meet the standards at this time, and a prompt is sent to the background control system at this time, so that the monitoring personnel can know that the clean room needs to be filtered, thereby realizing the monitoring process;

[0045] Furthermore, the system also includes an air supply mechanism 80, which is used to continuously supply air in the detection environment to the detection cavity within a unit detection time, so that the suspended particle image acquisition mechanism 70 can acquire a larger number of monitoring images, thereby increasing the number of samples for sampling monitoring and further improving the degree of proximity between the monitoring results and the actual results.

[0046] During the detection process, the outer shell 10 is driven by the wheel moving mechanism 20 to move along a preset path in the area to be detected, and the air drawn into the detection chamber body 40 can be image scanned and detected through the cooperation of the first transverse movement mechanism 60, the suspended particle image acquisition mechanism 70 and the surface light source 50. It only needs to select a suitable number of images and compare the grayscale of the standard comparison chart in the database to know the situation of suspended particles in the environment within the preset detection time. Compared with the traditional fixed-point detection method, the result is more representative and closer to the actual situation in the clean room.

[0047] In this embodiment, a longitudinal first airflow diffuser plate 90 and a horizontal second airflow diffuser plate 100 are provided in the detection chamber body 40; the inner cavity of the detection chamber body 40 is divided into an intake detection chamber 110 and an exhaust chamber 120 by the first airflow diffuser plate 90, and the transparent detection window 130 is located on the side wall of the intake detection chamber 110 away from the exhaust chamber 120, and the suspended particle image acquisition mechanism 70 is located on the side of the intake detection chamber 110 away from the exhaust chamber 120 and directly opposite to the transparent detection window 130; the second airflow diffuser plate 100 and the first transverse movement mechanism 60 are both arranged in the intake detection chamber 110, and the first transverse movement mechanism 60, the second airflow diffuser plate 100 and the air inlet of the detection chamber body 40 are arranged in sequence from bottom to top, and through the cooperation of the first airflow diffuser plate 90 and the second airflow diffuser plate 100, the intake airflow can be quickly and evenly diffused to the entire intake detection chamber 110 and can evenly enter the exhaust chamber 120, so as to ensure that the airflow in the intake detection chamber 110 is kept as balanced and consistent as possible.

[0048] Among them, the front-to-back length of the first transverse movement mechanism 60 is consistent with the front-to-back length of the air intake detection chamber 110. The first transverse movement mechanism 60 is used to drive the surface light source 50 to move forward and backward and scan the suspended particles in the air intake detection chamber 110 forward or backward successively, so that the suspended particle image acquisition mechanism 70 can capture images.

[0049] Furthermore, the exhaust cavity 120 is conical and the opening contour of its larger end is consistent with the longitudinal cross-sectional contour of the intake detection cavity 110 and shines on the vertically arranged first airflow diffuser plate 90, while the smaller end of the exhaust cavity 120 is connected to the outside through the exhaust pipe.

[0050] In this embodiment, a transparent partition 140 is provided in the air intake detection chamber 110 between the second airflow diffuser plate 100 and the first transverse movement mechanism 60 to separate the first transverse movement mechanism 60 and the surface light source 50, so as to prevent the turbulence generated by the surface light source 50 during the forward and backward movement from interfering with the image capturing quality of the suspended particle image acquisition mechanism 70.

[0051] In this embodiment, the second air flow diffuser plate 100 is a one-way semi-transparent mirror and its lower surface is the light-incoming side. The light-emitting direction of the surface light source 50 is inclined in the direction away from the suspended particle image acquisition mechanism 70, so that the light of the surface light source 50 can reduce the amount of downward reflected light after entering the second air flow diffuser plate 100, thereby reducing the interference of the downward reflected light on the picture shooting of the suspended particle image acquisition mechanism 70.

[0052] In this embodiment, the air supply mechanism 80 includes a longitudinal ventilation duct 81 which longitudinally penetrates the outer shell 10, a transverse air inlet duct 82 which is transversely arranged at the upper end of the longitudinal ventilation duct 81 and connected thereto, and a blower 83 arranged in the inner cavity of the longitudinal ventilation duct 81; the lower end of the longitudinal ventilation duct 81 is connected to the air inlet of the detection cavity body 40, and the sampling monitoring of high-position air can be realized through the longitudinal ventilation duct 81. In order to further facilitate the acquisition of monitoring air at positions of different heights, the longitudinal ventilation duct 81 can be set as a multi-stage telescopic tube, so that the monitoring personnel can adjust the height of the transverse air inlet duct 82 according to the actual needs. Of course, the telescopic tube can also be set to an electric type, and the control can be directly realized through the monitoring control host.

[0053] In this embodiment, the wheel group moving mechanism 20 includes a roller wheel group 21 longitudinally rotatably arranged on the lower surface of the shell 10, and a driving module 22 that provides driving force for the roller wheel group 21; further, the roller wheel group 21 includes two first rollers 210 arranged side by side at the front end of the shell 10, and two second rollers 211 arranged side by side at the rear end of the shell 10; the driving module 22 is installed at the front end of the shell 10, and is used to drive the first roller 210 to rotate; a transparent portion 160 is provided on the bottom surface of the shell 10 corresponding to the second roller 211, and specifically, the transparent portion 160 is semicircularly recessed toward the inside of the shell 10, so that the upper part of the second roller 211 is located on the upper side of the bottom surface of the shell 10; further, the two second rollers 211 are both located between the suspended particle image acquisition mechanism 70 and the detection chamber body 40, and a projection mechanism 170 is also provided above the second roller 211 to project the image of the second roller 211 into the suspended particle image acquisition mechanism 70; wherein, The projection mechanism 170 specifically includes a semi-transparent mirror 171 which is tilted and arranged just above the transparent part 160, and a total reflective mirror 172 which is horizontally arranged just above the semi-transparent mirror 171 and reflects the image of the second roller 211 onto the upper surface of the semi-transparent mirror 171. When assembled in place, the semi-transparent mirror 171 is located between the transparent detection window 130 and the suspended particle image acquisition mechanism 70. Through the cooperation of the total reflective mirror 172, the semi-transparent mirror 171 and the transparent part 160, the light on the peripheral side wall of the second roller 211 can be reflected into the lens of the suspended particle image acquisition mechanism 70, so that the suspended particle image acquisition mechanism 70 can synchronously acquire the sedimentation particles on the ground corresponding to the path traveled by the second roller 211, and synchronous monitoring of the ground can be realized. In order to facilitate image processing and make the sedimentation particles adhering to the side wall of the second roller 211 have a greater contrast with the background in the image, the outer peripheral side wall of the second roller 211 is preferably a black detachable silicone rubber sleeve.

[0054] Among them, the driving module 22 can select a motor gear module or a motor magnetic wheel module, or use a hub motor module, and directly use the outer rotor of the motor as a rolling wheel. This scheme prefers the result of the magnetic wheel driving method. Compared with the first driving method, the magnetic wheel transmission method is quieter and can achieve lossless and frictionless transmission without generating friction debris, which is more suitable for the use requirements of clean rooms. Correspondingly, the second roller 211 also adopts a magnetic wheel structure that can cooperate with the motor magnetic wheel for transmission.

[0055] In this embodiment, a second lateral movement mechanism 180 is further provided in the outer shell 10 for driving the suspended particle image acquisition mechanism 70 to move in the left and right direction, so as to drive the suspended particle image acquisition mechanism 70 to move left and right to capture images of the outer peripheral side walls of the left and right second rollers 211, so as to further obtain the distribution of ground sedimentation particles in a wider range on the travel path.

[0056] In this embodiment, the suspended particle image acquisition mechanism 70 includes a camera 71 and an optical microscope assembly 72 disposed at the front end of the camera 71; through the cooperation of the camera 71 and the optical microscope assembly 72, the monitoring speed can be greatly improved, and the whole process is simple and convenient.

[0057] In addition, the detection method of the clean room suspended particle monitoring system of this embodiment includes the following steps:

[0058] Step S10: driving the housing 10 and its internal components to move along a preset path within the area to be detected by the wheel moving mechanism 20;

[0059] Step S20: At the same time, the air supply mechanism 80 continuously supplies air into the detection cavity body 40 within a preset time period to ensure that the suspended particles on the preset path can be sent into the housing 10;

[0060] Step S30: projecting surface light through the surface light source 50 to scatter the suspended particles in the detection cavity body 40 so that the particles stand out from the black inner wall background of the detection cavity;

[0061] Step S40: the suspended particle image acquisition mechanism 70 further acquires a detection image of the scattered suspended particles through the transparent detection window 130;

[0062] Step S50: Finally, the detection host obtains the grayscale image according to the detection image and compares it with the standard image in the database and outputs the comparison result, that is, each feature information of the grayscale image of the detection image is compared with each standard feature information of the grayscale image of the standard image one by one, and the standard image is used as a threshold reference. When the corresponding value of the detection image is greater than the threshold value of the standard image, an alarm prompt is triggered, and a prompt message is sent to the background control system through the monitoring host 30;

[0063] Step S60: Finally, the background control system sends a prompt to the monitoring personnel according to the comparison result to filter the air in the clean room.

[0064] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the appended claims of the present invention.

Claims

1. A clean room suspended particle monitoring system, comprising a housing, characterized in that: Also includes: A wheel moving mechanism, used for driving the housing to move on the ground; Monitoring host, used to process detection data and realize data communication with the background control system; The detection cavity body is arranged inside the shell and is used to contain the air to be detected in the clean room; a transparent detection window is arranged on one side wall of the detection cavity body; A surface light source is disposed on the bottom surface of the detection cavity body and is used to form a surface light facing vertically upwards; A first transverse movement mechanism, used for driving the planar light source to move forward and backward; A suspended particle image acquisition mechanism, used for acquiring an image of a longitudinal light spot formed by the planar light source in the detection cavity body through the transparent detection window; The air supply mechanism is used to continuously supply the air in the detection environment to the detection cavity within a unit detection time.

2. The clean room suspended particle monitoring system according to claim 1, characterized in that: A first longitudinal airflow diffuser plate and a second horizontal airflow diffuser plate are provided in the detection chamber body; the inner cavity of the detection chamber body is divided into an air intake detection chamber and an exhaust chamber by the first airflow diffuser plate, and the transparent detection window is located on the side wall of the air intake detection chamber at one end away from the exhaust chamber; the second airflow diffuser plate and the first transverse movement mechanism are both arranged in the air intake detection chamber, and the first transverse movement mechanism, the second airflow diffuser plate and the air inlet of the detection chamber body are arranged in sequence from bottom to top.

3. The clean room suspended particle monitoring system according to claim 2, characterized in that: A transparent partition is provided in the air intake detection chamber between the second airflow diffuser plate and the first transverse movement mechanism.

4. The clean room suspended particle monitoring system according to claim 2, characterized in that: The second airflow diffuser plate is a one-way semi-transparent mirror and its lower surface is a light-incoming side. The light-emitting direction of the planar light source is inclined in a direction away from the suspended particle image acquisition mechanism.

5. The clean room suspended particle monitoring system according to claim 2, characterized in that: The air supply mechanism includes a longitudinal ventilation duct that longitudinally penetrates the outer shell, a transverse air inlet duct that is transversely arranged at the upper end of the longitudinal ventilation duct and connected thereto, and a blower arranged in the inner cavity of the longitudinal ventilation duct; the lower end of the longitudinal ventilation duct is connected to the air inlet of the detection cavity body.

6. The clean room suspended particle monitoring system according to claim 1, characterized in that: The wheel group moving mechanism includes a roller group that is longitudinally rotatably arranged on the lower surface of the shell, and a driving module that provides driving force for the roller group; the roller group includes two first rollers that are arranged side by side at the front end of the shell, and two second rollers that are arranged side by side at the rear end of the shell; a transparent portion is provided on the bottom surface of the shell corresponding to the second rollers; both of the second rollers are located between the suspended particle image acquisition mechanism and the detection chamber body; a projection mechanism is also provided above the second roller to project the image of the second roller into the suspended particle image acquisition mechanism.

7. The clean room suspended particle monitoring system according to claim 6, characterized in that: The projection mechanism includes a semi-transparent and semi-reflective mirror tiltedly arranged just above the transparent part, and a total reflective mirror horizontally arranged just above the semi-transparent and semi-reflective mirror and reflecting the image of the second roller onto the upper surface of the semi-transparent and semi-reflective mirror; when assembled in place, the semi-transparent and semi-reflective mirror is located between the transparent detection window and the suspended particle image acquisition mechanism.

8. The clean room suspended particle monitoring system according to claim 7, characterized in that: A second lateral movement mechanism is also provided in the housing for driving the suspended particle image acquisition mechanism to move along the left-right direction.

9. The clean room suspended particle monitoring system according to claim 1, characterized in that: The suspended particle image acquisition mechanism comprises a camera and an optical microscope component arranged at the front end of the camera.

10. A monitoring method for a clean room suspended particle monitoring system, according to the clean room suspended particle monitoring system according to any one of claims 1 to 9, characterized in that: The method comprises the following steps: Move along a preset path in the area to be detected by the wheel group moving mechanism; The air supply mechanism continuously supplies air into the detection cavity body within a preset time period; Projecting surface light through the surface light source to scatter the suspended particles in the detection cavity body; The suspended particle image acquisition mechanism acquires a detection image of the scattered suspended particles through the transparent detection window; The detection host obtains a grayscale image of the detection image according to the detection image, compares it with a standard image in a database, and outputs a comparison result; The background control system issues a prompt to the monitoring personnel according to the comparison result.

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