Clean room airborne particle monitoring system and method

Abstract

The present application belongs to the technical field of clean room detection, and particularly relates to a clean room suspended particle monitoring system and a monitoring method, which comprises a shell, a wheel group moving mechanism for moving the shell, a monitoring host for processing detection data and realizing data communication with a background control system, a detection cavity body for containing air to be detected in a clean room, a surface light source for forming a vertically upward surface light, a first horizontal moving mechanism for driving the surface light source to move forward and backward, a suspended particle image acquisition mechanism for acquiring an image of a vertical light spot formed by the surface light source in the detection cavity body through a transparent detection window, and an air supply mechanism for continuously supplying air in a detection environment to the detection cavity body in a unit detection time; the transparent detection window is arranged on a side wall of the detection cavity body; and air at any point in a detection area in the clean room can be sampled and detected through cooperation of the first horizontal moving mechanism, the suspended particle image acquisition mechanism, the surface light source and the detection cavity body, so that the detection is more representative.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of clean room detection, in particular to a clean room suspended particle monitoring system and a monitoring method. BACKGROUND

[0002] The clean room is also called dust-free workshop, dust-free room or clean room. The clean room is a room specially designed to maintain the cleanliness, temperature, humidity and pressure of the room within a certain range regardless of the change of external air conditions. The clean room is mainly used in high-precision modern industry, cutting-edge technology or medical field.

[0003] However, the existing clean room dust detection equipment is basically point detection, which leads to the fact that the detection result is not representative. Therefore, the present application provides a clean room suspended particle monitoring system and a monitoring method to solve the problems existing in the prior art. SUMMARY

[0004] The present application aims to provide a clean room suspended particle monitoring system and a monitoring method to solve the problems in the background art.

[0005] To achieve the above-mentioned purpose, the present application provides the following technical scheme: a clean room suspended particle monitoring system, comprising a shell, characterized in that it further comprises:

[0006] A wheel group moving mechanism is arranged on the bottom of the shell and is used to drive the shell to move on the ground.

[0007] A monitoring host is arranged in the shell and is used to process detection data and realize data communication with a background control system.

[0008] A detection cavity body is arranged in the shell and is used to accommodate the air to be detected in the clean room. A transparent detection window is arranged on one side wall of the detection cavity body.

[0009] A surface light source is arranged on the bottom surface of the detection cavity body and is used to form a vertical surface light.

[0010] A first horizontal moving mechanism is arranged on the bottom surface of the detection cavity body and is used to drive the surface light source to move forward and backward.

[0011] A suspended particle image acquisition mechanism is arranged on the bottom surface of the detection cavity body and is used to acquire the image of the vertical light spot formed by the surface light source in the detection cavity body through the transparent detection window.

[0012] A gas supply mechanism is arranged on the bottom surface of the detection cavity body and is used to continuously supply the air in the detection environment to the detection cavity within a unit detection time.

[0013] The clean room suspended particle monitoring system, wherein the detection cavity body is provided with a first airflow diffusion plate in the longitudinal direction and a second airflow diffusion plate in the horizontal direction; the inner cavity of the detection cavity body is divided into an air inlet detection cavity and an air outlet cavity by the first airflow diffusion plate, the transparent detection window is located on the side wall of the air inlet detection cavity away from the air outlet cavity; the second airflow diffusion plate and the first horizontal moving mechanism are both arranged in the air inlet detection cavity, and the first horizontal moving mechanism, the second airflow diffusion plate and the air inlet of the detection cavity body are sequentially arranged from bottom to top.

[0014] The clean room suspended particle monitoring system, wherein a transparent partition plate is arranged between the second airflow diffusion plate and the first horizontal moving mechanism in the air inlet detection cavity.

[0015] The clean room suspended particle monitoring system, wherein the second airflow diffusion plate is a one-way semi-transparent lens, the lower surface of the second airflow diffusion plate is the light inlet side, and the light outlet direction of the surface light source is inclined away from the direction of the suspended particle image acquisition mechanism.

[0016] The clean room suspended particle monitoring system, wherein the air supply mechanism comprises a vertical ventilation pipe longitudinally penetrating through the shell, a horizontal air inlet pipe transversely arranged at the upper end of the vertical ventilation pipe and in communication with the vertical ventilation pipe, and a blower arranged in the inner cavity of the vertical ventilation pipe; the lower end of the vertical ventilation pipe is in communication with the air inlet of the detection cavity body.

[0017] The clean room suspended particle monitoring system, wherein the wheel group moving mechanism comprises a roller wheel group rotatably arranged on the lower surface of the shell in the longitudinal direction, and a driving module for providing driving force for the roller wheel group; the roller wheel group comprises two first rollers arranged side by side on the front end of the shell, and two second rollers arranged side by side on the rear end of the shell; a transparent part is arranged on the bottom surface of the shell corresponding to the second rollers; the second rollers are both located between the suspended particle image acquisition mechanism and the detection cavity body; a projection mechanism is further arranged above the second rollers for projecting the image of the second rollers into the suspended particle image acquisition mechanism.

[0018] The clean room suspended particle monitoring system, wherein the projection mechanism comprises a semi-transparent half-mirror arranged vertically above the transparent part, and a full mirror arranged horizontally above the semi-transparent half-mirror and reflecting the image of the second rollers onto the upper surface of the semi-transparent half-mirror; when assembled, the semi-transparent half-mirror is located between the transparent detection window and the suspended particle image acquisition mechanism.

[0019] The cleanroom suspended particle monitoring system of the present invention further includes a second transverse mechanism inside the outer shell that drives the suspended particle image acquisition mechanism to move in the left-right direction.

[0020] The cleanroom suspended particle monitoring system of the present invention includes a suspended particle image acquisition mechanism comprising a camera and an optical microscope assembly disposed at the front end of the camera.

[0021] To achieve the above objectives, the present invention also provides the following technical solution: a monitoring method for a cleanroom suspended particle monitoring system, the method comprising the following steps:

[0022] The wheel assembly moving mechanism moves within the detection area according to a preset path;

[0023] The air supply mechanism continuously supplies air into the detection chamber within a preset time period;

[0024] The surface light source projects surface light and causes the suspended particles inside the detection cavity to scatter;

[0025] The suspended particle image acquisition mechanism acquires a detection image of the scattered suspended particles through the transparent detection window;

[0026] The detection host obtains the grayscale image of the detected image, compares it with the standard image in the database, and outputs the comparison result.

[0027] The background control system issues a prompt to the monitoring personnel based on the comparison results.

[0028] Compared with the prior art, the beneficial effects of the present invention are as follows: During the detection process, the outer shell is moved along a preset path within the detection area by the wheel group moving mechanism. Furthermore, through the cooperation of the first lateral movement mechanism, the suspended particle image acquisition mechanism, and the surface light source, the air drawn into the detection chamber can be scanned and detected. By simply selecting an appropriate number of images and comparing their grayscale values ​​with the standard comparison images in the database, the situation of suspended particles in the environment within the preset detection time can be determined. Compared with the traditional fixed-point detection method, the results are more representative and closer to the actual situation in the clean room. Attached Figure Description

[0029] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0030] Figure 1 This is an external structural diagram of the cleanroom suspended particle monitoring system of the present invention.

[0031] Figure 2 for Figure 1 A longitudinal sectional view along the front-to-back direction.

[0032] Figure 3 This is a flowchart of the monitoring method of the cleanroom suspended particle monitoring system of the present invention. Detailed Implementation

[0033] The terms "first," "second," "third," and "fourth," etc., used in the specification, claims, and accompanying drawings of this invention are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses.

[0034] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the invention. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0035] "Multiple" refers to two or more. "And / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. The character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0036] Furthermore, the terms indicating orientation, such as "up," "down," "left," "right," "upper end," "lower end," and "longitudinal," are all based on the posture and position of the device or equipment described in this solution during normal use.

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, a clear and complete description will be provided below in conjunction with the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the protection scope of the present invention.

[0038] This embodiment discloses, as follows:Figures 1 to 3 The cleanroom airborne particle monitoring system shown includes a housing 10, which forms a sealed installation and detection space, providing protection for its internal components while preventing external airborne particles from interfering with the detection results.

[0039] Furthermore, the system also includes a wheel set moving mechanism 20, which is used to move the outer shell 10 on the ground, thereby facilitating movement along a set path and performing the inspection process within the area to be inspected.

[0040] Furthermore, the system also includes a monitoring host 30, which is used to process detection data and communicate with the background control system, so that the background control system can provide alerts and alarms to the monitoring personnel based on the processed detection data.

[0041] Furthermore, the system also includes a detection chamber body 40, which is located inside the housing 10 and is used to contain the air to be tested in the clean room; specifically, a transparent detection window is provided on one side wall of the detection chamber body 40; and in order to avoid interference from reflected light, a black light-absorbing layer is also coated on the inner wall of the detection chamber body 40.

[0042] Furthermore, the system also includes a surface light source 50, which is disposed on the bottom surface of the detection cavity body 40 and is used to form a surface light with the vertical direction upward. When suspended particles flow along the airflow through the surface light, scattering will occur, and at this time, suspended particles in the surface light can be photographed and identified.

[0043] Furthermore, the system also includes a first transverse mechanism 60, which is used to drive the surface light source 50 to move back and forth so as to perform surface scanning detection on suspended particles at multiple locations inside the detection cavity.

[0044] Furthermore, this system also includes a suspended particle image acquisition mechanism 70, which is used to acquire images of the longitudinal light spots formed by the surface light source 50 in the detection cavity body 40 through the transparent detection window 130, that is, images of suspended particles passing through the surface smooth surface; when suspended particles pass through the surface smooth surface, only a desired number of images to be detected need to be captured within a set time and transmitted to the monitoring host 30. The monitoring host 30 performs image processing on the images to be detected according to existing image grayscale processing technology to obtain grayscale images to be compared, and compares the grayscale images to be compared with the standard comparison images in the database. That is, the brightness and number of suspended particles in the actual captured image are different from the brightness and number of suspended particles in the standard comparison image. If the brightness and number of suspended particles in the actual captured image are greater than those in the standard comparison image, it means that the suspended particles in the clean room do not meet the standard. At this time, a prompt is sent to the background control system, and the monitoring personnel can know that the clean room needs to be filtered, thereby realizing the monitoring process.

[0045] Furthermore, the system also includes an air supply mechanism 80, which continuously supplies air from the detection environment to the detection chamber within a unit detection time, so that the suspended particle image acquisition mechanism 70 can acquire more monitoring images, thereby increasing the number of samples for sampling and monitoring, and further improving the closeness between the monitoring results and the actual results.

[0046] During the detection process, the outer shell 10 is moved along a preset path within the detection area by the wheel group moving mechanism 20. With the cooperation of the first lateral movement mechanism 60, the suspended particle image acquisition mechanism 70 and the surface light source 50, the air drawn into the detection chamber body 40 can be scanned and detected. By simply selecting an appropriate number of images and comparing their grayscale values ​​with the standard comparison images in the database, the situation of suspended particles in the environment within the preset detection time can be known. Compared with the traditional fixed-point detection method, the results are more representative and closer to the actual situation in the clean room.

[0047] In this embodiment, the detection chamber body 40 is provided with a longitudinal first airflow diffuser plate 90 and a horizontal second airflow diffuser plate 100. The inner cavity of the detection chamber body 40 is divided into an air intake detection chamber 110 and an exhaust chamber 120 by the first airflow diffuser plate 90. A transparent detection window 130 is located on the side wall of the air intake detection chamber 110 away from the exhaust chamber 120. The suspended particle image acquisition mechanism 70 is located on the side of the air intake detection chamber 110 away from the exhaust chamber 120 and is directly opposite to the transparent detection window 130. The second airflow diffuser plate 100 and the first transverse mechanism 60 are both provided in the air intake detection chamber 110. The first transverse mechanism 60, the second airflow diffuser plate 100 and the air inlet of the detection chamber body 40 are arranged sequentially from bottom to top. Through the cooperation of the first airflow diffuser plate 90 and the second airflow diffuser plate 100, the airflow can be quickly and evenly diffused to the entire air intake detection chamber 110 and can be evenly entered into the exhaust chamber 120, so as to ensure that the airflow in the air intake detection chamber 110 is kept as balanced as possible.

[0048] The front-to-back length of the first transverse mechanism 60 is the same as the front-to-back length of the air intake detection chamber 110. The first transverse mechanism 60 is used to drive the surface light source 50 to move back and forth and scan the suspended particles in the air intake detection chamber 110 in front or back successively, so that the suspended particle image acquisition mechanism 70 can capture the image.

[0049] Furthermore, the exhaust chamber 120 is conical, and the opening profile of its larger end is the same size as the longitudinal cross-sectional profile of the intake detection chamber 110 and is illuminated on the longitudinally placed first airflow diffuser plate 90, while the smaller end of the exhaust chamber 120 is connected to the outside through an exhaust pipe.

[0050] In this embodiment, a transparent partition 140 is provided in the air intake detection cavity 110 between the second airflow diffuser plate 100 and the first transverse mechanism 60 to separate the first transverse mechanism 60 and the surface light source 50, so as to avoid the turbulence generated by the surface light source 50 during its back-and-forth movement from interfering with the image capture quality of the suspended particle image acquisition mechanism 70.

[0051] In this embodiment, the second airflow diffuser plate 100 is a one-way semi-transparent lens with its lower surface being the light-inlet side. The light-emitting direction of the surface light source 50 is tilted away from the suspended particle image acquisition mechanism 70, so that the light from the surface light source 50 can reduce the amount of downward reflected light after entering the second airflow diffuser plate 100, thereby reducing the interference caused by the downward reflected light on the image capture of the suspended particle image acquisition mechanism 70.

[0052] In this embodiment, the air supply mechanism 80 includes a longitudinal ventilation pipe 81 that runs through the outer shell 10, a transverse air inlet pipe 82 that is arranged at the upper end of the longitudinal ventilation pipe 81 and communicates with it, and a blower 83 that is arranged in the inner cavity of the longitudinal ventilation pipe 81. The lower end of the longitudinal ventilation pipe 81 is connected to the air inlet of the detection chamber body 40. The longitudinal ventilation pipe 81 can be used to sample and monitor high-level air. In order to further facilitate the acquisition of monitoring air at different heights, the longitudinal ventilation pipe 81 can be set as a multi-stage telescopic pipe, so that the monitoring personnel can adjust the height of the transverse air inlet pipe 82 according to the actual needs. Of course, the telescopic pipe can also be set as an electric type and directly controlled by the monitoring control host.

[0053] In this embodiment, the wheel assembly moving mechanism 20 includes a roller assembly 21 longitudinally rotatably disposed on the lower surface of the housing 10, and a drive module 22 providing driving force to the roller assembly 21; further, the roller assembly 21 includes two first rollers 210 arranged side by side at the front end of the housing 10, and two second rollers 211 arranged side by side at the rear end of the housing 10; the drive module 22 is installed at the front end of the housing 10 and is used to drive the first rollers 210 to rotate; a transparent portion 160 is provided on the bottom surface of the housing 10 corresponding to the second rollers 211, specifically, the transparent portion 160 is semi-circularly recessed towards the interior of the housing 10, so that the upper part of the second rollers 211 is located on the upper side of the bottom surface of the housing 10; further, both second rollers 211 are located between the suspended particle image acquisition mechanism 70 and the detection cavity body 40, and a projection mechanism 170 is provided above the second rollers 211 to project the image of the second rollers 211 into the suspended particle image acquisition mechanism 70; wherein, The projection mechanism 170 specifically includes a semi-transparent mirror 171 tilted above the transparent part 160 and a total reflection mirror 172 horizontally positioned above the semi-transparent mirror 171, reflecting the image of the second roller 211 onto the upper surface of the semi-transparent mirror 171. When assembled, the semi-transparent mirror 171 is located between the transparent detection window 130 and the suspended particle image acquisition mechanism 70. Through the cooperation of the total reflection mirror 172, the semi-transparent mirror 171, and the transparent part 160, the light on the peripheral sidewall of the second roller 211 can be reflected into the lens of the suspended particle image acquisition mechanism 70, thereby enabling the suspended particle image acquisition mechanism 70 to simultaneously acquire the settled particles on the ground corresponding to the path traversed by the second roller 211, thus achieving synchronous monitoring of the ground. In order to facilitate image processing and make the settled particles adhering to the sidewall of the second roller 211 have a greater contrast with the background in the image, the outer peripheral sidewall of the second roller 211 is preferably covered with a black removable silicone sleeve.

[0054] The drive module 22 can be a motor gear module or a motor magnetic wheel module, or a hub motor module, where the outer rotor of the motor can be used directly as a rolling wheel. This solution is the preferred magnetic wheel drive method. Compared with the first drive method, the magnetic wheel drive is quieter and can achieve lossless and frictionless transmission without generating friction debris, which is more suitable for the use requirements of clean rooms. Correspondingly, the second roller 211 also adopts a magnetic wheel structure that can be used in conjunction with the motor magnetic wheel for transmission.

[0055] In this embodiment, the outer casing 10 is further provided with a second transverse mechanism 180 that drives the suspended particle image acquisition mechanism 70 to move in the left and right direction, so as to drive the suspended particle image acquisition mechanism 70 to move left and right to capture images of the outer peripheral sidewalls of the two second rollers 211, so as to further obtain the distribution of ground sedimentation particles in a wider range along the travel path.

[0056] In this embodiment, the suspended particle image acquisition mechanism 70 includes a camera 71 and an optical microscope assembly 72 disposed at the front end of the camera 71; by using the cooperation between the camera 71 and the optical microscope assembly 72, the monitoring speed can be greatly improved, and the whole process is simple and convenient.

[0057] Furthermore, the detection method of the cleanroom airborne particle monitoring system in this embodiment includes the following steps:

[0058] Step S10: Drive the outer shell 10 and its internal components to move along a preset path within the area to be tested by the wheel group moving mechanism 20;

[0059] Step S20: At the same time, the air supply mechanism 80 continuously supplies air to the detection chamber body 40 within a preset time period to ensure that suspended particles on the preset path can be sent into the shell 10.

[0060] Step S30: And project surface light through surface light source 50 and scatter the suspended particles in the detection cavity body 40, making them stand out from the black inner wall background of the detection cavity;

[0061] Step S40: The further suspended particle image acquisition mechanism 70 acquires a detection image of the suspended particles that are scattering through the transparent detection window 130;

[0062] Step S50: Finally, the detection host obtains the grayscale image of the detection image and compares it with the standard image in the database and outputs the comparison result. That is, the grayscale image of the detection image is compared with the standard feature information of the grayscale image of the standard image one by one. The standard image is used as a threshold reference. When the corresponding value of the detection image is greater than the threshold value of the standard image, an alarm is triggered and the monitoring host 30 sends the prompt information to the background control system.

[0063] Step S60: The final back-end control system sends a prompt to the monitoring personnel based on the comparison results, so that the air in the clean room can be filtered.

[0064] It should be understood that those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A cleanroom suspended particle monitoring system, comprising a housing, characterized in that, Also includes: A wheel assembly moving mechanism is used to move the outer casing on the ground; The monitoring host is used to process the detection data and communicate with the background control system. The detection chamber body is located inside the outer shell and is used to contain the air to be tested in the clean room; a transparent detection window is provided on one side wall of the detection chamber body; A surface light source is disposed on the bottom surface of the detection cavity body and is used to form a longitudinally upward surface light. The first lateral movement mechanism is used to drive the surface light source to move back and forth; A suspended particle image acquisition mechanism is used to acquire an image of a longitudinal light spot formed by the surface light source within the detection cavity through the transparent detection window; An air supply mechanism is used to continuously supply air from the detection environment to the detection chamber body within a unit detection time. The wheel assembly moving mechanism includes a roller assembly that is longitudinally rotatably disposed on the lower surface of the housing, and a drive module that provides driving force to the roller assembly; the roller assembly includes two first rollers arranged side by side at the front end of the housing, and two second rollers arranged side by side at the rear end of the housing; a transparent portion is provided on the bottom surface of the housing corresponding to the second rollers; both second rollers are located between the suspended particle image acquisition mechanism and the detection cavity body; a projection mechanism is also provided above the second rollers to project the image of the second rollers into the suspended particle image acquisition mechanism; The projection mechanism includes a semi-transparent and semi-reflective mirror tilted directly above the transparent part, and a total reflection mirror horizontally positioned directly above the semi-transparent and semi-reflective mirror to reflect the image of the second roller onto the upper surface of the semi-transparent and semi-reflective mirror; when assembled, the semi-transparent and semi-reflective mirror is located between the transparent detection window and the suspended particle image acquisition mechanism; the housing also includes a second transverse movement mechanism that drives the suspended particle image acquisition mechanism to move in the left-right direction.

2. The cleanroom suspended particle monitoring system according to claim 1, characterized in that, The detection chamber body is provided with a longitudinal first airflow diffuser plate and a horizontal second airflow diffuser plate; the inner cavity of the detection chamber body is divided into an air intake detection chamber and an exhaust chamber by the first airflow diffuser plate, and the transparent detection window is located on the side wall of the air intake detection chamber away from the exhaust chamber; the second airflow diffuser plate and the first transverse mechanism are both provided in the air intake detection chamber, and the first transverse mechanism, the second airflow diffuser plate and the air intake of the detection chamber body are arranged sequentially from bottom to top.

3. The cleanroom suspended particle monitoring system according to claim 2, characterized in that, A transparent partition is provided inside the air intake detection chamber between the second airflow diffuser plate and the first transverse mechanism.

4. The cleanroom suspended particle monitoring system according to claim 2, characterized in that, The second airflow diffuser plate is a one-way semi-transparent lens with its lower surface being the light-inlet side, and the light-emitting direction of the surface light source is inclined away from the direction of the suspended particle image acquisition mechanism.

5. The cleanroom suspended particle monitoring system according to claim 2, characterized in that, The air supply mechanism includes a longitudinally arranged ventilation pipe that runs through the outer shell, a transversely arranged air inlet pipe that is located at the upper end of the longitudinally arranged ventilation pipe and communicates with it, and a blower located in the inner cavity of the longitudinally arranged ventilation pipe; the lower end of the longitudinally arranged ventilation pipe is connected to the air inlet of the detection cavity body.

6. The cleanroom suspended particle monitoring system according to claim 1, characterized in that, The suspended particle image acquisition mechanism includes a camera and an optical microscope assembly located at the front end of the camera.

7. A monitoring method for a cleanroom airborne particle monitoring system, comprising the cleanroom airborne particle monitoring system according to any one of claims 1-6, characterized in that, The method includes the following steps: The wheel assembly moving mechanism moves within the detection area according to a preset path; The air supply mechanism continuously supplies air into the detection chamber within a preset time period; The surface light source projects surface light and causes the suspended particles inside the detection cavity to scatter; The suspended particle image acquisition mechanism acquires a detection image of the scattered suspended particles through the transparent detection window; The detection host obtains the grayscale image of the detected image, compares it with the standard image in the database, and outputs the comparison result. The background control system issues a prompt to the monitoring personnel based on the comparison results.

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