Impedance matching network and radio frequency power supply system
By designing an impedance matching network including cables, adjustment modules, sampling modules and control modules, the traditional network's shortcomings in speed and accuracy are solved, and the fast, convenient and accurate impedance matching of RF power supplies and loads is achieved.
Patent Information
- Application Number
- CN202411529162.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-30
- Publication Date
- 2025-02-11
AI Technical Summary
The traditional impedance matching network has shortcomings in speed and accuracy, and cannot meet the current requirements of RF power supply for fast, convenient and accurate impedance matching.
An impedance matching network including a first cable, a regulation module, a sampling module and a control module is designed. By sampling the reactance parameters of the load and controlling the adjustment module to the grounding point of the cable according to these parameters, the impedance of the radio frequency power supply and the load is realized. match.
It realizes fast, convenient and accurate impedance matching between RF power supply and load, improves matching speed and accuracy, and can accurately provide the required impedance value according to the load's reactance parameters.
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Figure CN119420311A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of radio frequency technology, and in particular to an impedance matching network and a radio frequency power supply system. Background Art
[0002] At present, with the development of RF power in practical applications, higher requirements are put forward for impedance matching networks. Traditional impedance matching networks generally use electronic components such as inductors and capacitors, but the adjustment speed of electronic components such as inductors and capacitors is slow, and the adjustment may be inaccurate due to problems of electronic components such as inductors and capacitors themselves, which cannot meet the current impedance matching requirements. Therefore, in the process of RF power supply providing RF energy to the load, how to achieve fast, convenient and accurate impedance matching has become a problem that needs to be considered. Summary of the invention
[0003] The present application provides an impedance matching network and a radio frequency power supply system, which can quickly, conveniently and accurately perform impedance matching between a radio frequency power supply and a load.
[0004] In a first aspect, an impedance matching network is provided, wherein the impedance matching network is used to perform impedance matching between a radio frequency power supply and a load, wherein the radio frequency power supply is used to be connected to the input end of the load to provide radio frequency energy to the load. The impedance matching network includes a first cable, an adjustment module, a sampling module, and a control module. The first cable has a first end, a second end, and a grounding point located between the first end and the second end. The first end is used to be connected to the input end of the load, the second end is open, and the grounding point is used for grounding. The adjustment module is used to adjust the position of the grounding point of the first cable so that the grounding point of the first cable changes between the first end and the second end. The sampling module is used to sample and obtain the reactance parameters of the load. The control module is connected to both the adjustment module and the sampling module, and the control module is used to receive the reactance parameters of the load, and control the adjustment module to adjust the position of the grounding point of the first cable according to the reactance parameters of the load.
[0005] In a possible implementation, the reactance parameter of the load includes a reactance value or an admittance value. The sampling module is used to sample and obtain the reactance value or the admittance value of the load, and the control module is used to receive the reactance value or the admittance value of the load, and determine the first target grounding point of the first cable according to the reactance value or the admittance value of the load, and then control the adjustment module to adjust the position of the grounding point of the first cable to the first target grounding point.
[0006] In a possible implementation, when the sampling module is used to sample and obtain the reactance value of the load, the control module is further used to convert the reactance value of the load into a corresponding admittance value, and determine the first target grounding point of the first cable according to the admittance value of the load.
[0007] In a possible implementation manner, the wavelength of the radio frequency energy provided by the radio frequency power supply to the load and transmitted in the first cable is a first wavelength, wherein the length of the first cable is equal to 1 / 2 of the first wavelength.
[0008] In a possible implementation manner, during a process in which the grounding point of the first cable changes from the first end to the second end, the admittance value of the first cable continues to decrease.
[0009] In a possible implementation manner, the adjustment module is used to adjust the grounding point of the first cable to change between a first position and a second position of the first cable, and the first position and the second position are positions other than the end of the first cable. The first position is closer to the first end than the second position, the second position is closer to the second end than the first position, the length between the first position and the first end is greater than or equal to 1 / 16 of the first wavelength, and the length between the second position and the second end is greater than or equal to 1 / 16 of the first wavelength.
[0010] In a possible implementation manner, the frequency of the radio frequency energy provided by the radio frequency power supply to the load is between 300 MHz and 300 GHz.
[0011] In a possible implementation, the adjustment module includes an adjustment motor, the adjustment module includes an adjustment motor, the adjustment motor is used to adjust the position of the grounding point of the first cable so that the grounding point of the first cable changes between the first end and the second end; the control module is used to control the adjustment motor to adjust the position of the grounding point of the first cable according to the reactance parameters of the load.
[0012] In a possible implementation, the first cable also has a plurality of connection points; the adjustment module includes a plurality of gating branches, the plurality of gating branches correspond to the plurality of connection points one by one, wherein one end of each gating branch is grounded, the other end of each gating branch is selectively connected to the corresponding connection point of the first cable, and when one of the gating branches is connected to the corresponding connection point of the first cable, the other gating branches are disconnected from the corresponding other connection points of the first cable. The control module is used to select one of the gating branches to connect to the corresponding connection point of the first cable according to the reactance parameter of the load, so as to adjust the position of the grounding point of the first cable.
[0013] In a second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system comprising a radio frequency power supply and an impedance matching network. The impedance matching network is used to perform impedance matching between the radio frequency power supply and the load, and the radio frequency power supply is used to connect to the input end of the load to provide radio frequency energy to the load. Wherein, the impedance matching network comprises a first cable, an adjustment module, a sampling module and a control module. The first cable has a first end, a second end and a grounding point located between the first end and the second end, the first end is used to connect to the input end of the load, the second end is open, and the grounding point is used for grounding. The adjustment module is used to adjust the position of the grounding point of the first cable so that the grounding point of the first cable changes between the first end and the second end. The sampling module is used to sample and obtain the reactance parameters of the load. The control module is connected to both the adjustment module and the sampling module, and the control module is used to receive the reactance parameters of the load, and control the adjustment module to adjust the position of the grounding point of the first cable according to the reactance parameters of the load.
[0014] The impedance matching network and RF power supply system of the present application perform impedance matching between the RF power supply and the load by setting a first cable. The structure is simple, and the adjustment module is controlled according to the reactance parameters of the load to adjust the position of the grounding point of the first cable. The operation is convenient and the impedance matching speed is faster. The position of the grounding point of the first cable corresponds to the corresponding impedance value, and the required impedance value can be accurately provided, so that the RF power supply and the load can be impedance matched quickly, conveniently and accurately. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.
[0016] Figure 1 is a schematic diagram of an impedance matching network in an embodiment of the present application.
[0017] Figure 2 FIG. 4 is a schematic diagram of the admittance distribution of the first cable in an embodiment of the present application.
[0018] Figure 3 The schematic diagram of an adjusting module in an embodiment of the present application includes an adjusting motor.
[0019] Figure 4 The schematic diagram of the regulation module in one embodiment of the present application includes a plurality of gating branches.
[0020] Figure 5 FIG. 4 is a schematic diagram of an impedance matching network in another embodiment of the present application.
[0021] Figure 6 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application.
[0022] Explanation of the accompanying drawings: 1000, RF power supply system, 10, impedance matching network, CC1, first cable, E1, first end, E2, second end, E3, first target grounding point, GND, ground, 100, adjustment module, 110, adjustment motor, 120, selection branch, S1, first switch, 200, sampling module, 300, control module, RF, RF power supply, RFP, RF energy, RL, load, In, input end, CC2, second cable, E4, third end, E5, fourth end, E6, second target grounding point. DETAILED DESCRIPTION
[0023] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0024] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0025] In the following, the terms "first", "second", "third", and "fourth" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", "third", and "fourth" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.
[0026] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.
[0027] See also Figure 1 , Figure 1FIG. 1 is a schematic diagram of an impedance matching network in an embodiment of the present application. Figure 1 As shown, the present application provides an impedance matching network 10, which is used to perform impedance matching between a radio frequency power supply RF and a load RL, and the radio frequency power supply RF is used to be connected to the input terminal In of the load RL to provide radio frequency energy RFP to the load RL. The impedance matching network 10 includes a first cable CC1, an adjustment module 100, a sampling module 200 and a control module 300. The first cable CC1 has a first end E1, a second end E2 and a grounding point between the first end E1 and the second end E2. The first end E1 is used to be connected to the input terminal In of the load RL, the second end E2 is open, and the grounding point is used for grounding. The adjustment module 100 is used to adjust the position of the grounding point of the first cable CC1 so that the grounding point of the first cable CC1 changes between the first end E1 and the second end E2. The sampling module 200 is used to sample and obtain the reactance parameters of the load RL. The control module 300 is connected to both the adjustment module 100 and the sampling module 200 . The control module 300 is used to receive the reactance parameter of the load RL and control the adjustment module 100 to adjust the position of the grounding point of the first cable CC1 according to the reactance parameter of the load RL.
[0028] Therefore, the impedance matching network 10 in the present application performs impedance matching between the RF power supply RF and the load RL by setting the first cable CC1. The structure is simple, and the adjustment module 100 is controlled according to the reactance parameters of the load RL to adjust the position of the grounding point of the first cable CC1. The operation is convenient and the impedance matching speed is faster. The position of the grounding point of the first cable CC1 corresponds to the corresponding impedance value, and the required impedance value can be accurately provided, so that the RF power supply RF and the load RL can be impedance matched quickly, conveniently and accurately.
[0029] In one or more embodiments, the grounding point of the first cable CC1 may be electrically connected to the ground GND through a conductor, so that the grounding point of the first cable CC1 is grounded.
[0030] Further, when the grounding point of the first cable CC1 is electrically connected to the ground GND through a conductor, the conductor may be a flexible conductor. Since the first cable CC1 and the ground GND are generally arranged at fixed positions, it is not convenient to adjust the positions. In order to make the grounding point of the first cable CC1 adjustable, the conductor is set as a flexible conductor, so that the electrical connection between the conductor and the grounding point of the first cable CC1 can be adjusted, so that the adjustment module 100 can adjust the position of the grounding point of the first cable CC1.
[0031] In one or more embodiments, the load RL may include an input terminal In and a ground terminal, wherein the input terminal In of the load RL is used to input radio frequency energy RFP, and the ground terminal of the load RL is used for grounding. The sampling module 200 may be connected between the input terminal In of the load RL and the ground terminal of the load RL to sample and obtain the reactance parameters of the load RL.
[0032] Furthermore, the sampling module 200 can obtain parameters such as voltage and current at both ends of the load RL by sampling to obtain the reactance parameters of the load RL.
[0033] In one or more embodiments, the reactance parameter of the load RL includes a reactance value or an admittance value. The sampling module 200 is used to sample and obtain the reactance value or the admittance value of the load RL, and the control module 300 is used to receive the reactance value or the admittance value of the load RL, and determine the first target grounding point E3 of the first cable CC1 according to the reactance value or the admittance value of the load RL, and then control the adjustment module 100 to adjust the position of the grounding point of the first cable CC1 to the first target grounding point E3.
[0034] Thus, the impedance matching network 10 in the present application can determine the first target grounding point E3 of the first cable CC1 based on the reactance value or admittance value of the load RL according to the correspondence between the length between the first end E1 and the grounding point and the reactance value or admittance value that can be provided when the grounding point of the first cable CC1 is short-circuited, and then control the adjustment module 100 to adjust the position of the grounding point of the first cable CC1 to the first target grounding point E3 to achieve impedance matching.
[0035] Please also read Figure 2 , Figure 2 FIG. 1 is a schematic diagram of the admittance distribution of the first cable in one embodiment of the present application. Figure 2 As shown, the horizontal axis d is the length between the first end E1 and the grounding point, the vertical axis B is the admittance value of the first cable CC1, λ is the wavelength of the RF energy RFP provided by the RF power supply RF to the load RL transmitted in the first cable CC1, corresponding to the first cable CC1, that is, the first wavelength, the length between the first end E1 and the grounding point is within the range of 0-λ / 2, and as the length between the first end E1 and the grounding point increases, the admittance value of the first cable CC1 continues to decrease. Figure 1 , Figure 2 As shown, when the sampling module 200 is used to sample the reactance value of the load RL, the control module 300 is also used to convert the reactance value of the load RL into a corresponding admittance value, and determine the first target grounding point E3 of the first cable CC1 according to the admittance value of the load RL.
[0036] Therefore, the impedance matching network 10 in the present application can determine the first target grounding point E3 of the first cable CC1 according to the admittance value of the load RL more conveniently and intuitively, and can determine the first target grounding point E3 faster, which can further improve the impedance matching speed.
[0037] It should be noted that, when the length between the first end E1 and the grounding point is in the range of 0-λ / 2, the admittance value is positive, indicating that the admittance property of the admittance value of the first cable CC1 is inductive, and when the length between the first end E1 and the grounding point is in the range of λ / 2-λ, the admittance value is negative, indicating that the admittance property of the admittance value of the first cable CC1 is capacitive.
[0038] In one or more embodiments, the wavelength of the radio frequency energy RFP provided by the radio frequency power source RF to the load RL transmitted in the first cable CC1 is the first wavelength, wherein the length of the first cable CC1 is equal to 1 / 2 of the first wavelength.
[0039] Therefore, the impedance matching network 10 in the present application is based on Figure 2 The schematic diagram of the admittance distribution of the first cable CC1 is shown. When the length of the first cable CC1 is equal to 1 / 2 of the first wavelength, the first cable CC1 can already provide the required admittance value in various situations, and the length between the first end E1 and the grounding point in the range of λ / 2-λ will repeat the waveform of the length between the first end E1 and the grounding point in the range of 0-λ / 2, which increases the trouble of impedance matching and the loss of cable wire. Therefore, the length of the first cable CC1 can be equal to 1 / 2 of the first wavelength.
[0040] like Figure 1 , Figure 2 As shown, during the change of the grounding point of the first cable CC1 from the first end E1 to the second end E2, the admittance value of the first cable CC1 continues to decrease.
[0041] Therefore, the impedance matching network 10 in the present application is based on Figure 2 The schematic diagram of the admittance distribution of the first cable CC1 is shown. Since the length of the first cable CC1 is equal to 1 / 2 of the first wavelength, the admittance value of the first cable CC1 continues to decrease during the change of the grounding point of the first cable CC1 from the first end E1 to the second end E2.
[0042] It should be noted that the continuous decrease in the admittance value of the first cable CC1 is described from the perspective of a specific value. If described from the perspective of the admittance property, in the process of the grounding point of the first cable CC1 changing from the first end E1 to the second end E2, the admittance value of the first cable CC1 is within the range of 0-λ / 4, that is, in the process of the grounding point of the first cable CC1 changing from the first end E1 to the midpoint of the first end E1 and the second end E2, the admittance property is inductive, and the inductive admittance value continues to decrease to zero; the admittance value of the first cable CC1 is within the range of λ / 4-λ / 2, that is, in the process of the grounding point of the first cable CC1 changing from the midpoint of the first end E1 and the second end E2 to the second end E2, the admittance property is capacitive, and the capacitive admittance value continues to rise to infinity.
[0043] like Figure 1 , Figure 2 As shown, the adjustment module 100 is used to adjust the grounding point of the first cable CC1 between the first position and the second position of the first cable CC1, and the first position and the second position are positions other than the end of the first cable CC1. The first position is closer to the first end E1 than the second position, and the second position is closer to the second end E2 than the first position. The length between the first position and the first end E1 is greater than or equal to 1 / 16 of the first wavelength, and the length between the second position and the second end E2 is greater than or equal to 1 / 16 of the first wavelength.
[0044] Therefore, the impedance matching network 10 in the present application is based on Figure 2 The schematic diagram of the admittance distribution of the first cable CC1 shown in the figure, by setting the grounding point of the first cable CC1 to change between the first position and the second position of the first cable CC1, wherein the length between the first position and the first end E1 is greater than or equal to 1 / 16 of the first wavelength, and the length between the second position and the second end E2 is greater than or equal to 1 / 16 of the first wavelength, can avoid the negative impact of the rapid increase of the inductive or capacitive admittance value of the first cable CC1 on the impedance matching, and also avoid the total reflection of the RF energy RFP caused by the extreme impedance mismatch in the impedance matching process, which may cause damage to the RF power supply RF.
[0045] Furthermore, the length between the first position and the first end E1 may be greater than or equal to 1 / 8 of the first wavelength, and the length between the second position and the second end E2 may be greater than or equal to 1 / 8 of the first wavelength.
[0046] Therefore, in actual applications, the impedance matching network 10 in the present application has a small change in the admittance value of the load RL, and the length between the first position and the first end E1 can be greater than or equal to 1 / 8 of the first wavelength, and the length between the second position and the second end E2 can be greater than or equal to 1 / 8 of the first wavelength, thereby achieving impedance matching.
[0047] In one or more embodiments, the frequency of the radio frequency energy RFP provided by the radio frequency power source RF to the load RL is between 300 MHz and 300 GHz.
[0048] Thus, in the impedance matching network 10 of the present application, the wavelength of the RF energy RFP provided by the RF power supply RF to the load RL transmitted in the first cable CC1 is related to the frequency of the RF energy RFP. When the frequency of the RF energy RFP provided by the RF power supply RF to the load RL is between 300 MHz and 300 GHz, that is, when the RF energy RFP provided by the RF power supply RF to the load RL is microwave power energy, the first wavelength is shorter and the length of the first cable CC1 is also shorter, which saves space inside the RF power supply RF and facilitates moving the position of the grounding point of the first cable CC1.
[0049] In one or more embodiments, the frequency of the radio frequency energy RFP provided by the radio frequency power source RF to the load RL is between 300 kHz and 300 MHz.
[0050] Therefore, in the impedance matching network 10 of the present application, when the frequency of the RF energy RFP provided by the RF power supply RF to the load RL is between 300kHz and 300MHz, although the first wavelength is longer and the length of the first cable CC1 is also longer, the accuracy requirement for the adjustment module 100 is lower, and the position of the grounding point of the first cable CC1 can be adjusted in more diverse ways.
[0051] See also Figure 3 , Figure 3 FIG. 1 is a schematic diagram of an adjustment module in an embodiment of the present application including an adjustment motor. Figure 3 As shown, the adjustment module 100 includes an adjustment motor 110, which is used to adjust the position of the grounding point of the first cable CC1 so that the grounding point of the first cable CC1 changes between the first end E1 and the second end E2; the control module 300 is used to control the adjustment motor 110 to adjust the position of the grounding point of the first cable CC1 according to the reactance parameters of the load RL.
[0052] Therefore, the impedance matching network 10 in the present application converts rotation into transmission by setting the adjustment motor 110 to adjust the position of the grounding point of the first cable CC1, so that the control module 300 can accurately control the position of the grounding point of the first cable CC1.
[0053] In one or more embodiments, when the grounding point of the first cable CC1 is electrically connected to the ground GND through a conductor, one end of the conductor can be movably connected to the first cable CC1, and the other end of the conductor is connected to the ground GND, and the position where the first cable CC1 is connected to the conductor is the grounding point. The adjustment motor 110 controls the end of the conductor movably connected to the first cable CC1 to move relative to the first cable CC1, thereby changing the position where the first cable CC1 is connected to the conductor to adjust the position of the grounding point of the first cable CC1.
[0054] See also Figure 4 , Figure 4 FIG. 1 is a schematic diagram showing that a regulating module in an embodiment of the present application includes multiple gating branches. Figure 4 As shown, the first cable CC1 also has a plurality of connection points; the adjustment module 100 includes a plurality of gating branches 120, and the plurality of gating branches 120 correspond to the plurality of connection points one by one, wherein one end of each gating branch 120 is grounded, and the other end of each gating branch 120 is selectively connected to the corresponding connection point of the first cable CC1, and when one of the gating branches 120 is connected to the corresponding connection point of the first cable CC1, the other gating branches 120 are disconnected from the corresponding other connection points of the first cable CC1. When one of the gating branches 120 is connected to the corresponding connection point of the first cable CC1, the corresponding connection point of the first cable CC1 is connected to the ground GND through the corresponding gating branch 120, and serves as a grounding point. The control module 300 is used to select one of the gating branches 120 to be connected to the corresponding connection point of the first cable CC1 according to the reactance parameters of the load RL, so as to adjust the position of the grounding point of the first cable CC1.
[0055] That is, in one or more embodiments, Figure 4 As shown, the first cable CC1 may also include multiple connection points, and the adjustment module may also be connected between the multiple connection points and the ground GND, for selecting to establish a connection between one of the connection points and the ground GND, so that the connection point is connected to the ground GND and serves as a grounding point. Therefore, the position of the grounding point can be changed by selecting different connection points to connect to the ground GND.
[0056] Therefore, the impedance matching network 10 in the present application can achieve impedance matching faster by setting multiple selection branches 120 corresponding to multiple connection points one by one, and when one of the selection branches 120 is connected to the corresponding connection point of the first cable CC1, the other selection branches 120 are disconnected from the other corresponding connection points of the first cable CC1.
[0057] like Figure 4As shown, each selection branch 120 includes a first switch S1, and multiple first switches S1 correspond one-to-one to multiple connection points. The control module 300 is used to control one of the first switches S1 to be turned on according to the reactance parameters of the load RL, and control the other first switches S1 to be turned off, so that one of the selection branches 120 is connected to the corresponding connection point of the first cable CC1.
[0058] See also Figure 5 , Figure 5 FIG. 1 is a schematic diagram of an impedance matching network in another embodiment of the present application. Figure 5 As shown, the impedance matching network 10 may also include a second cable CC2, and the second cable CC2 cooperates with the first cable CC1 to perform impedance matching between the radio frequency power supply RF and the load RL. The second cable CC2 has a third end E4 and a fourth end E5 relative to each other, and a grounding point located between the third end E4 and the fourth end E5, the third end E4 is used to connect to the input end In of the load RL, the fourth end E5 is open, and the grounding point is used for grounding. The adjustment module 100 may also be used to adjust the position of the grounding point of the second cable CC2, so that the grounding point of the second cable CC2 changes between the third end E4 and the fourth end E5.
[0059] In one or more embodiments, the control module 300 is further configured to determine a second target grounding point E6 of the second cable CC2 according to the reactance value or admittance value of the load RL, and then control the adjustment module 100 to adjust the position of the grounding point of the second cable CC2 to the second target grounding point E6.
[0060] In one or more embodiments, the length of the first cable CC1 is different from the length of the second cable CC2. For example, the length of the first cable CC1 may be 1 / 4 of the first wavelength, and the length of the second cable CC2 may be 1 / 2 of the first wavelength.
[0061] Furthermore, the adjustment module 100 is also used to adjust the grounding point of the second cable CC2 to change between a third position and a fourth position of the second cable CC2, wherein the third position is a non-end position of the second cable CC2. The third position is closer to the third end E4 than the fourth position, the fourth position is closer to the fourth end E5 than the third position, the length between the third position and the third end E4 is 1 / 4 of the first wavelength, and the length between the fourth position and the fourth end E5 is zero.
[0062] Therefore, the impedance matching network 10 in the present application can select the inductive or capacitive admittance value as needed to match the impedance of the RF power supply RF and the load RL, and there is no need to add additional switching devices. When it is not necessary to provide an inductive admittance value, the first target connection point can be adjusted to the second position. Similarly, when it is not necessary to provide a capacitive admittance value, the first and second target connection points can be adjusted to the third position.
[0063] For more specific content of the second cable CC2 , reference may be made to the relevant content of the first cable CC1 in any of the aforementioned embodiments, which will not be described in detail herein.
[0064] In one or more embodiments, the impedance matching network 10 may further include a third cable. The length of the first cable CC1 is equal to 1 / 2 of the first wavelength, and the variation range of the first cable CC1 is expressed in wavelength, and the grounding point of the first cable CC1 varies between 1 / 16 of the first wavelength and 7 / 16 of the first wavelength; the length of the second cable CC2 is equal to 1 / 2 of the first wavelength, and the variation range of the first cable CC1 is expressed in wavelength, and the grounding point of the second cable CC2 varies between 7 / 16 of the first wavelength and 1 / 2 of the first wavelength; the length of the third cable is greater than or equal to 1 / 16 of the first wavelength, and the variation range of the first cable CC1 is expressed in wavelength, and the grounding point of the third cable varies between zero and 1 / 16 of the first wavelength.
[0065] Therefore, the impedance matching network 10 in the present application can directly use the second cable CC2 or the third cable when the required admittance value is large, thereby further accelerating the impedance matching speed.
[0066] For more specific content of the third cable, reference may be made to the relevant content of the first cable CC1 and / or the second cable CC2 in any of the aforementioned embodiments, which will not be repeated here.
[0067] In one or more embodiments, the first cable CC1, the second cable CC2 and the third cable of the present application may all be coaxial cables.
[0068] In one or more embodiments, the control module 300 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).
[0069] The impedance matching network 10 of the present application performs impedance matching between the radio frequency power supply RF and the load RL by setting cables such as the first cable CC1. The structure is simple, and the impedance matching can be achieved by adjusting the position of the grounding point of the cables such as the first cable CC1. The operation is convenient and the impedance matching speed is also faster. The position of the grounding point of the cables such as the first cable CC1 corresponds to the corresponding impedance value, and the required impedance value can be accurately provided, so that the radio frequency power supply RF and the load RL can be impedance matched quickly, conveniently and accurately.
[0070] See also Figure 6 , Figure 6 FIG. 1 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application. Figure 6 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a radio frequency power supply RF and an impedance matching network 10 in any of the aforementioned embodiments.
[0071] Please refer again Figure 1 .like Figure 1 As shown, the impedance matching network 10 is used to perform impedance matching between the radio frequency power supply RF and the load RL, and the radio frequency power supply RF is used to connect to the input terminal In of the load RL to provide radio frequency energy RFP to the load RL. Among them, the impedance matching network 10 includes a first cable CC1, an adjustment module 100, a sampling module 200 and a control module 300. The first cable CC1 has a first end E1, a second end E2 and a grounding point located between the first end E1 and the second end E2. The first end E1 is used to connect to the input terminal In of the load RL, the second end E2 is open, and the grounding point is used for grounding. The adjustment module 100 is used to adjust the position of the grounding point of the first cable CC1 so that the grounding point of the first cable CC1 changes between the first end E1 and the second end E2. The sampling module 200 is used to sample and obtain the reactance parameters of the load RL. The control module 300 is connected to both the adjustment module 100 and the sampling module 200. The control module 300 is used to receive the reactance parameters of the load RL, and control the adjustment module 100 to adjust the position of the grounding point of the first cable CC1 according to the reactance parameters of the load RL.
[0072] The more specific structure of the impedance matching network 10 can refer to the relevant content of the impedance matching network 10 in any of the aforementioned embodiments, which will not be repeated here.
[0073] like Figure 6 As shown, the radio frequency power source RF can be used to connect with the load RL to provide radio frequency energy RFP to the load RL.
[0074] The impedance matching network 10 and the RF power supply system 1000 of the present application perform impedance matching between the RF power supply RF and the load RL by setting cables such as the first cable CC1. The structure is simple, and the impedance matching can be achieved by adjusting the position of the grounding point of the cables such as the first cable CC1. The operation is convenient and the impedance matching speed is also faster. The position of the grounding point of the cables such as the first cable CC1 corresponds to the corresponding impedance value, and the required impedance value can be accurately provided, so that the RF power supply RF and the load RL can be impedance matched quickly, conveniently and accurately.
[0075] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.
Claims
1. An impedance matching network, characterized in that: Used to perform impedance matching between a radio frequency power source and a load, wherein the radio frequency power source is used to be connected to an input terminal of the load to provide radio frequency energy to the load; Wherein, the impedance matching network comprises: A first cable having a first end and a second end opposite to each other and a grounding point located between the first end and the second end, wherein the first end is used to be connected to the input end of the load, the second end is open-circuited, and the grounding point is used to be grounded; an adjusting module, configured to adjust a position of a grounding point of the first cable so that the grounding point of the first cable changes between the first end and the second end; A sampling module, used for sampling to obtain the reactance parameters of the load; A control module is connected to both the adjustment module and the sampling module, and is used to receive the reactance parameter of the load and control the adjustment module to adjust the position of the grounding point of the first cable according to the reactance parameter of the load.
2. The impedance matching network according to claim 1, characterized in that: The reactance parameter of the load includes a reactance value or an admittance value; Among them, the sampling module is used to sample the reactance value or admittance value of the load, the control module is used to receive the reactance value or admittance value of the load, and determine the first target grounding point of the first cable according to the reactance value or admittance value of the load, and then control the adjustment module to adjust the position of the grounding point of the first cable to the first target grounding point.
3. The impedance matching network according to claim 2, characterized in that: When the sampling module is used to sample and obtain the reactance value of the load, the control module is also used to convert the reactance value of the load into a corresponding admittance value, and determine the first target grounding point of the first cable according to the admittance value of the load.
4. The impedance matching network according to claim 1, characterized in that: The wavelength of the radio frequency energy provided by the radio frequency power supply to the load and transmitted in the first cable is a first wavelength; The length of the first cable is equal to 1 / 2 of the first wavelength.
5. The impedance matching network according to claim 4, characterized in that: During the change of the grounding point of the first cable from the first end to the second end, the admittance value of the first cable continues to decrease.
6. The impedance matching network according to claim 4, characterized in that: The adjusting module is used to adjust the grounding point of the first cable to change between a first position and a second position of the first cable, wherein the first position and the second position are positions other than the end of the first cable; The first position is closer to the first end than the second position, the second position is closer to the second end than the first position, the length between the first position and the first end is greater than or equal to 1 / 16 of the first wavelength, and the length between the second position and the second end is greater than or equal to 1 / 16 of the first wavelength.
7. The impedance matching network according to claim 4, characterized in that: The frequency of the radio frequency energy provided by the radio frequency power supply to the load is between 300 MHz and 300 GHz.
8. The impedance matching network according to claim 1, characterized in that: The adjustment module comprises an adjustment motor, and the adjustment motor is used to adjust the position of the grounding point of the first cable so that the grounding point of the first cable changes between the first end and the second end; The control module is used to control the adjustment motor to adjust the position of the grounding point of the first cable according to the reactance parameter of the load.
9. The impedance matching network according to claim 1, characterized in that: The first cable also has a plurality of connection points; the regulating module includes a plurality of gating branches, the plurality of gating branches correspond to the plurality of connection points one by one, wherein one end of each gating branch is grounded, the other end of each gating branch is selectively connected to a corresponding connection point of the first cable, and when one of the gating branches is connected to a corresponding connection point of the first cable, the other gating branches are disconnected from the other corresponding connection points of the first cable; The control module is used to select one of the selection branches to connect to the corresponding connection point of the first cable according to the reactance parameters of the load, so as to adjust the position of the grounding point of the first cable.
10. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply and an impedance matching network as claimed in any one of claims 1 to 9.