A microfluidic chip

Abstract

The embodiment of the present application discloses a kind of microfluidic chip.The microfluidic chip includes oppositely arranged first substrate and second substrate, microfluidic channel is formed between first substrate and second substrate, microfluidic channel is used to accommodate at least one droplet;Multiple drive electrodes, multiple first sensing electrodes and multiple second sensing electrodes are located on the side of first substrate, adjacent drive electrodes are loaded with different drive voltage signals to drive droplet to move;First sensing electrode and second sensing electrode are loaded with detection signal, and the position of droplet is determined according to the change of the capacitance formed by first sensing electrode and a certain electrode and the change of the capacitance formed by second sensing electrode and a certain electrode when droplet flows.The microfluidic chip provided by the present application can obtain the position of droplet while driving the movement of droplet, and solve the problem of low reliability of equipment caused by the inability to detect the position of droplet in the prior art.

Description

[0001] This application is a divisional application filed on April 27, 2021, with application number 202110462149.1 and invention title "A Microfluidic Chip". Technical Field

[0002] The present invention relates to the field of microcontroller technology, and in particular to a microfluidic chip. Background Technology

[0003] Microfluidics refers to the technology of using microchannels (tens to hundreds of micrometers in size) to process or manipulate tiny fluids (volumes ranging from nanoliters to attoliters). Microfluidic chips are the main platform for realizing microfluidic technology. Microfluidic chips are characterized by parallel sample acquisition and processing, high integration, high throughput, fast analysis speed, low power consumption, low material consumption, and low pollution. Microfluidic chip technology can be applied in fields such as bioengineering, disease diagnosis and drug research, cell analysis, and environmental monitoring and protection.

[0004] When the surface of the drive unit driving the droplet motion is uneven or contains impurities due to issues with raw materials, processes, or the environment, it can affect the droplet's motion. Since the driving timing is predetermined, the absence of a droplet position feedback mechanism will affect subsequent processes, reduce experimental efficiency, or even cause experimental failure. Real-time feedback of the droplet position is particularly important in experiments with complex droplet movement paths.

[0005] In existing microfluidic technologies, it is often difficult to provide real-time feedback on droplet position. Some literature mentions using optical detection methods to obtain droplet position, but this method usually requires external laser equipment, which is cumbersome, not easy to diagnose on-site, and costly. Summary of the Invention

[0006] This invention provides a microfluidic chip that can acquire the position of a droplet while driving its movement, thus solving the problem of low reliability of existing devices due to the inability to detect the droplet position.

[0007] In a first aspect, embodiments of the present invention provide a microfluidic chip, including a first substrate and a second substrate disposed opposite to each other, wherein a microfluidic channel is formed between the first substrate and the second substrate, and the microfluidic channel is used to accommodate at least one droplet;

[0008] The first substrate has a plurality of driving electrodes, a plurality of first sensing electrodes, and a plurality of second sensing electrodes located on one side. The driving electrodes are arranged in an array. The first sensing electrodes extend along a first direction and are arranged along a second direction. The second sensing electrodes extend along the second direction and are arranged along the first direction. The first direction is parallel to the row direction of the array of driving electrodes, and the second direction is parallel to the column direction of the array of driving electrodes. The projection of the first sensing electrode on the plane of the first substrate at least partially overlaps with the projection of the gap between two adjacent rows of driving electrodes on the plane of the first substrate. The projection of the second sensing electrode on the plane of the first substrate at least partially overlaps with the projection of the gap between two adjacent columns of driving electrodes on the plane of the first substrate.

[0009] Adjacent driving electrodes are loaded with different driving voltage signals to drive the droplet to move;

[0010] The first sensing electrode and the second sensing electrode are loaded with detection signals, and the position of the droplet is determined based on the capacitance change formed by the first sensing electrode and a certain electrode and the capacitance change formed by the second sensing electrode and a certain electrode when the droplet flows through.

[0011] In a second aspect, embodiments of the present invention also provide a microfluidic chip, including a first substrate and a second substrate disposed opposite to each other, wherein a microfluidic channel is formed between the first substrate and the second substrate, and the microfluidic channel is used to accommodate at least one droplet;

[0012] Multiple driving electrodes are located on one side of the first substrate. The driving electrodes are arranged in an array, and adjacent driving electrodes are loaded with different driving voltage signals to drive the droplet to move.

[0013] At least one edge of the driving electrode extends in a curved shape.

[0014] Thirdly, embodiments of the present invention also provide a microfluidic chip, including a first substrate and a second substrate disposed opposite to each other, wherein a microfluidic channel is formed between the first substrate and the second substrate, and the microfluidic channel is used to accommodate at least one droplet;

[0015] Multiple driving electrodes are located on one side of the first substrate. The driving electrodes are arranged in an array, and adjacent driving electrodes are loaded with different driving voltage signals to drive the droplet to move.

[0016] It also includes multiple scan signal lines extending along a first direction, multiple data signal lines extending along a second direction, and transistors corresponding to the driving electrodes one by one. The gate of each transistor is connected to one of the scan signal lines, the first electrode is connected to one of the data signal lines, and the second electrode is connected to the corresponding driving electrode.

[0017] The scan signal line, the data signal line, and the transistor are all located on the side of the driving electrode away from the second substrate;

[0018] At least one of the scan signal line, the data signal line, and the transistor overlaps with the driving electrode. The microfluidic chip provided in this embodiment includes a first substrate and a second substrate disposed opposite to each other. A microfluidic channel is formed between the first substrate and the second substrate, the microfluidic channel being used to accommodate at least one droplet. Multiple driving electrodes arranged in an array are disposed on one side of the first substrate, with adjacent driving electrodes loaded with different driving voltage signals to drive the droplet to move. Multiple first sensing electrodes and multiple second sensing electrodes are disposed on one side of the first substrate, with the first sensing electrodes and second sensing electrodes loaded with detection signals. The position of the droplet is determined based on the capacitance change formed by the first sensing electrode and a certain electrode and the capacitance change formed by the second sensing electrode and a certain electrode when the droplet flows through. The first sensing electrode... Extending along a first direction and arranged along a second direction, the second sensing electrode extends along the second direction and is arranged along the first direction. The first direction is parallel to the row direction of the array of driving electrodes, and the second direction is parallel to the column direction of the array of driving electrodes. The projection of the first sensing electrode onto the plane of the first substrate at least partially overlaps with the projection of the gap between two adjacent rows of driving electrodes onto the plane of the first substrate. The projection of the second sensing electrode onto the plane of the first substrate at least partially overlaps with the projection of the gap between two adjacent columns of driving electrodes onto the plane of the first substrate. This enables the acquisition of the droplet's position while driving the droplet's movement, solving the problem of low reliability of the device in the prior art due to the inability to detect the droplet's position. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of a microfluidic chip in related technologies;

[0020] Figure 2 This is a schematic diagram of the structure of another microfluidic chip in the related technology;

[0021] Figure 3 This is a schematic diagram of the structure of a microfluidic chip provided in an embodiment of the present invention;

[0022] Figure 4 For along Figure 3 A schematic diagram of a cross-sectional structure with a central section line AA';

[0023] Figure 5 A schematic diagram of the circuit structure of a microfluidic chip provided in an embodiment of the present invention;

[0024] Figure 6 A cross-sectional structural diagram of a microfluidic chip provided in an embodiment of the present invention;

[0025] Figure 7 A cross-sectional structural diagram of another microfluidic chip provided in an embodiment of the present invention;

[0026] Figure 8 A cross-sectional structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0027] Figure 9 A cross-sectional structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0028] Figure 10 A cross-sectional structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0029] Figure 11 This is a schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0030] Figure 12 For along Figure 11 A schematic diagram of a cross-sectional structure with a central section line BB';

[0031] Figure 13 A partial structural schematic diagram of a microfluidic chip provided in an embodiment of the present invention;

[0032] Figure 14 A partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0033] Figure 15 A partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0034] Figure 16 A partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0035] Figure 17 A partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0036] Figure 18 A partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0037] Figure 19 A partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0038] Figure 20 A top view schematic diagram of a common electrode in a microfluidic chip provided in an embodiment of the present invention;

[0039] Figure 21 A cross-sectional structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0040] Figure 22 A partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0041] Figure 23 For along Figure 22 A schematic diagram of a cross-sectional structure with a central section CC';

[0042] Figure 24 A partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention;

[0043] Figure 25 for Figure 24 A schematic diagram of a cross-sectional structure. Detailed Implementation

[0044] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0045] The terminology used in the embodiments of this invention is for the purpose of describing specific embodiments only and is not intended to limit the invention. It should be noted that directional terms such as "upper," "lower," "left," and "right" described in the embodiments of this invention are used to describe the angles shown in the accompanying drawings and should not be construed as limiting the embodiments of this invention. Furthermore, in the context, it should be understood that when referring to an element being formed "upper" or "lower" of another element, it can be formed not only directly "upper" or "lower" of the other element, but also indirectly "upper" or "lower" of the other element through an intermediate element. The terms "first," "second," etc., are used for descriptive purposes only and do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0046] Research on microfluidic chips began in the early 1990s. They represent a potential technology for realizing lab-on-a-chip (Lab-on-a-chip) solutions, integrating basic operational units such as sample preparation, reaction, separation, and detection in biological, chemical, and medical analytical processes onto a single micrometer-scale chip. A network of microchannels allows for controlled fluid flow throughout the system, replacing various functions of conventional biological or chemical laboratories and automating the entire analytical process. Due to its immense potential in integration, automation, portability, and efficiency, microfluidic chip technology has become a current research hotspot and one of the world's cutting-edge technologies. Over the past two decades, digital microfluidic chips have shown a rapid development trend in both laboratory research and industrial applications, especially those based on microdroplet manipulation, which have made significant progress. Currently, the volume of manipulated droplets can reach microliters or even nanoliters. This allows for more precise mixing of microliter and nanoliter-level droplets at the microscale, and more complete chemical reactions within the droplets. Furthermore, different biochemical reactions within the droplets can be monitored. Microdroplets can contain cells and biomolecules, such as proteins and DNA, thus enabling higher-throughput monitoring. Among many methods for driving microdroplets, the traditional approach involves generating and controlling microdroplets within microchannels. However, the manufacturing process of microchannels is very complex, and they are easily clogged, have low reusability, and require complex peripheral equipment for operation.

[0047] Due to the numerous advantages of dielectric wetting, it is increasingly being used to manipulate microdroplets in digital microfluidic chips. Because dielectric wetting-based microfluidic chips do not require complex devices such as microchannels, micropumps, and microvalves, their fabrication process is simple, generates little heat, responds quickly, consumes little power, and is easy to package. Microfluidic chips based on dielectric wetting can achieve the distribution, separation, transport, and merging of microdroplets. In contrast, digital microfluidic chips based on electrowetting on a dielectric control system manipulate droplets using electrodes, thus requiring a large number of electrode units. For example, Figure 1 This is a schematic diagram of the structure of a microfluidic chip in the related technology, for reference. Figure 1 The microfluidic chip includes a control circuit 01 and multiple drive units 02. Each drive unit 02 is electrically connected to the control circuit 01 and is used to drive the droplet 03 to flow along a preset motion path. This microfluidic chip has the advantages of simple structure and low cost, but it cannot provide real-time feedback on the position of the droplet, which limits its application scenarios. Figure 2 This is a schematic diagram of another microfluidic chip in the related technology, for reference. Figure 2The microfluidic chip includes a control circuit 01, multiple drive units 02, and a laser head 04. Both the drive units 02 and the laser head 04 are electrically connected to the control circuit 01. The drive units 02 are used to drive the droplet to move, and the laser head 04 emits a laser beam to detect the position of the droplet. The droplet is located by using optical detection. However, the structure is complicated, it is not easy to diagnose on-site in real time, and the cost is high.

[0048] In view of this, embodiments of the present invention provide a microfluidic chip, including a first substrate and a second substrate disposed opposite to each other, with a microfluidic channel formed between the first substrate and the second substrate, the microfluidic channel being used to accommodate at least one droplet; a plurality of driving electrodes, a plurality of first sensing electrodes, and a plurality of second sensing electrodes located on one side of the first substrate, the driving electrodes being arranged in an array, the first sensing electrodes extending along a first direction and arranged along a second direction, the second sensing electrodes extending along the second direction and arranged along the first direction, the first direction being parallel to the row direction of the array of driving electrodes, the second direction being parallel to the column direction of the array of driving electrodes, the projection of the first sensing electrode onto the plane of the first substrate at least partially overlapping the projection of the gap between two adjacent rows of driving electrodes onto the plane of the first substrate, the projection of the second sensing electrode onto the plane of the first substrate at least partially overlapping the projection of the gap between two adjacent columns of driving electrodes onto the plane of the first substrate; adjacent driving electrodes are loaded with different driving voltage signals to drive the droplet to move; the first sensing electrodes and the second sensing electrodes are loaded with detection signals, and the position of the droplet is determined based on the capacitance change formed by the first sensing electrode and a certain electrode and the capacitance change formed by the second sensing electrode and a certain electrode when the droplet flows through.

[0049] In this design, both the first and second substrates can be glass substrates. A sealant is applied between the first and second substrates to form one or more microfluidic channels that accommodate droplet movement. The driving electrodes can be block electrodes arranged in an array on the first substrate, formed using a metal oxide (e.g., indium tin oxide, ITO). The area of ​​each driving electrode is smaller than the area projected onto the first substrate by the droplet. When driving the droplet, adjacent driving electrodes are subjected to different driving voltages. The droplet is driven by the differential voltage between adjacent driving electrodes, controlling its movement along a preset path. Since the driving electrodes are arrayed and discretely arranged, electrodes can be placed between them to form a capacitor. When the droplet flows through, the capacitance changes, thereby determining the droplet's position. In the technical solution of this invention, a first sensing electrode and a second sensing electrode are respectively provided on a first substrate, extending along a first direction (the row direction of the driving electrode array) and a second direction (the column direction of the driving electrode array). At least a portion of the first sensing electrode is located in the gap between two adjacent rows of driving electrodes, and at least a portion of the second sensing electrode is located in the gap between two adjacent columns of driving electrodes, but not completely below the driving electrodes, thereby preventing the driving electrodes from shielding the signals of the sensing electrodes. When detecting the position of a droplet, both the first and second sensing electrodes are loaded with a corresponding voltage. The first sensing electrode and an electrode in the microfluidic chip form a first capacitor, and the second sensing electrode and an electrode in the microfluidic chip form a second capacitor. This electrode can be a common electrode disposed on the second substrate, a trace in the first substrate, or a pole of another capacitor, or the first and second sensing electrodes can be the other poles of each other's capacitors, only needing to form a capacitor with the corresponding sensing electrode. When a droplet flows past a certain position, the magnitudes of the first and second capacitors at that position will change due to the influence of the droplet. The position of the droplet can be obtained by detecting the change in capacitance.

[0050] The technical solution of this invention forms a microfluidic channel between a first substrate and a second substrate, the microfluidic channel being used to accommodate at least one droplet; multiple arrayed driving electrodes are arranged on one side of the first substrate, with adjacent driving electrodes loaded with different driving voltage signals to drive the droplet to move; multiple first sensing electrodes and multiple second sensing electrodes are arranged on one side of the first substrate, with the first and second sensing electrodes loaded with detection signals, and the position of the droplet is determined based on the capacitance change formed by the first sensing electrode and a certain electrode and the capacitance change formed by the second sensing electrode and a certain electrode when the droplet flows through, thereby realizing the ability to obtain the position of the droplet while driving the droplet to move, solving the problem of low reliability of the device in the prior art due to the inability to detect the droplet position.

[0051] The above is the core idea of ​​the embodiments of the present invention. The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0052] For example, Figure 3 This is a schematic diagram of the structure of a microfluidic chip provided in an embodiment of the present invention. Figure 4 For along Figure 3 A schematic diagram of a cross-sectional structure with the midsection line AA'. Figure 3 A top view of a microfluidic chip is shown. The microfluidic chip includes multiple driving electrodes 11, multiple first sensing electrodes 12, and multiple second sensing electrodes 13. The driving electrodes 11 are arranged in an array, with adjacent driving electrodes 11 subjected to different driving voltages. The differential voltage between adjacent driving electrodes 11 drives the droplet, controlling its movement along a preset path. The first sensing electrodes 12 extend along a first direction x and are arranged along a second direction y. The second sensing electrodes 13 extend along the second direction y and are arranged along the first direction x. The first direction x is parallel to the row direction of the array of driving electrodes 11, and the second direction y is parallel to the column direction of the array of driving electrodes 11. Figure 3 The rectangular shapes of the driving electrode 11, the first sensing electrode 12, and the second sensing electrode 13 shown are merely schematic; in actual implementation, they can be configured according to specific circumstances. (Reference) Figure 4 The microfluidic chip includes a first substrate 10 and a second substrate 20 disposed opposite to each other, with a microfluidic channel 30 formed between the first substrate 10 and the second substrate 20. The microfluidic channel 30 is used to accommodate at least one droplet 31. Exemplarily, in this embodiment, the driving electrode 11, the first sensing electrode 12, and the second sensing electrode 13 are all located on the side of the first substrate 10 closer to the second substrate 20. An insulating layer 14 is disposed between different electrode layers. Along the direction z from the first substrate 10 to the second substrate 20, the first sensing electrode 12 covers the gap between two adjacent rows of driving electrodes 11, and the second sensing electrode 13 covers the gap between two adjacent columns of driving electrodes 11. Figure 4 In one embodiment, the width d1 of the first sensing electrode 12 is greater than the width d2 of the gap between two adjacent rows of driving electrodes 11, and the width d3 of the second sensing electrode 13 is greater than the width d4 of the gap between two adjacent columns of driving electrodes 11. By setting the widths of the first sensing electrode 12 and the second sensing electrode 13 to be relatively wide, it is beneficial to reduce the resistance of the first sensing electrode 12 and the second sensing electrode 13, and reduce the voltage drop when the detection signal is applied. In other embodiments, the width of the first sensing electrode 12 can also be set to be less than or equal to the gap between two adjacent rows of driving electrodes 11, and the width of the second sensing electrode 13 can be less than or equal to the gap between two adjacent columns of driving electrodes 11. The specific implementation can be designed according to the actual situation. The embodiments of the present invention do not limit the width of the gap between the sensing electrode and the driving electrode. Figure 4The example shows that a common electrode 21 is also provided on one side of the second substrate 20. The common electrode 21 can be formed using ITO. When a detection signal is applied to the first sensing electrode 12 and the second sensing electrode 13, the first sensing electrode 12 and the common electrode 21 form a first capacitor C1, and the second sensing electrode 13 and the common electrode 21 form a second capacitor C2. When a droplet flows through, it causes a change in the dielectric constant between the sensing electrode and the common electrode. The capacitance between the first sensing electrode 12 and the common electrode 21 becomes C1', and the capacitance between the second sensing electrode 13 and the common electrode 21 becomes C2', thereby determining the position of the droplet. In other embodiments, the other electrode forming the capacitor with the sensing electrode can also be a trace in the microfluidic chip or a pole of another capacitor, etc., and can be designed according to the actual situation in specific implementation.

[0053] Based on the above embodiments, Figure 5 This is a schematic diagram of the circuit structure of a microfluidic chip provided in an embodiment of the present invention, with reference to... Figure 5 Optionally, the microfluidic chip provided in this embodiment also includes multiple scan signal lines 15 extending along the first direction x, multiple data signal lines 16 extending along the second direction y, and transistors 17 corresponding to the driving electrodes 11. The gate of each transistor 17 is connected to a scan signal line 15, the first electrode is connected to a data signal line, and the second electrode is connected to the corresponding driving electrode 11.

[0054] It is understandable that for microfluidic chips with a large number of driving electrodes and a complex structure, an active driving method including scan signal line 15, data signal line 16 and transistor 17 can be set up. Similar to a display panel, each driving electrode 11 is similar to a sub-pixel in the display panel. Scanning is achieved by using scan signal line 15 and data signal line 16, and active driving of driving electrode 11 is achieved by using the switching of transistor 17. The first electrode of transistor 17 can be the source electrode and the second electrode can be the drain electrode. Transistor 17 can be a thin film transistor, specifically a thin film transistor formed by using amorphous silicon material, polycrystalline silicon material or metal oxide material as the active layer.

[0055] Optionally, the scan signal line, data signal line, and transistor are all located on the side of the driving electrode away from the second substrate; at least one of the scan signal line, data signal line, and transistor overlaps with the driving electrode.

[0056] For example, Figure 6 This is a cross-sectional structural diagram of a microfluidic chip provided in an embodiment of the present invention, with reference to... Figure 6The transistor 17 includes a gate 171, an active layer 172, a source 173 (first electrode), and a drain 174 (second electrode). The scan signal line 15, the data signal line 16, and the transistor 17 are all located on the side of the driving electrode 11 away from the second substrate 20. In this embodiment, since the first sensing electrode 12 and the second sensing electrode 13 need to be located at least partially in the gap of the driving electrode 11, in order to increase the strength of the positioning signal and reduce signal interference, the scan signal line 15 and / or the data signal line 16 are not routed in the gap of the driving electrode 11 as much as possible, and are all located below the driving electrode 11. Correspondingly, the transistor 17 is also located below the driving electrode 11 and is not located in the gap. In this way, the driving electrode 11 can shield the parasitic capacitance caused by the scan signal line 15, the data signal line 16, or the transistor 17, thereby improving the droplet positioning accuracy.

[0057] Understandable Figure 6 In the cross-sectional structure shown, the shape of the section line is similar to Figure 3 The dashed line AA' in the diagram, where the cross-section on the left side of the dashed line extends along the first direction x (the row direction of the driving electrode array), and the cross-section on the right side of the dashed line extends along the second direction y (the column direction of the driving electrode array), wherein the scan signal line 15 and the gate 171 of the transistor 17 are connected, because... Figure 6 The structure at the connection point between the scan signal line 15 and the gate 171 is not shown in the diagram, therefore... Figure 6 The intermediate scan signal line 15 and the gate 171 are separate structures, while the data signal line 16 is connected to the source 173 of the transistor 17. Figure 6 The diagram shows a structure in which data signal line 16 and source 173 are connected as one unit.

[0058] Figure 6 In the illustrated embodiment, a common electrode 21 is disposed on one side of the second substrate 20. When a detection signal is applied to the first sensing electrode 12 and the second sensing electrode 13, the first sensing electrode 12 and the common electrode 21 form a first capacitor C1, and the second sensing electrode 13 and the common electrode 21 form a second capacitor C2. When a droplet flows through, it causes a change in the dielectric constant between the sensing electrode and the common electrode. The capacitance between the first sensing electrode 12 and the common electrode 21 becomes C1', and the capacitance between the second sensing electrode 13 and the common electrode 21 becomes C2', thereby determining the position of the droplet. In other embodiments, the common electrode may not be provided, and the sensing electrode forms a capacitor with a certain trace or other electrode in the microfluidic chip. For example, Figure 7This is a cross-sectional structural diagram of another microfluidic chip provided in an embodiment of the present invention. It can be understood that driving the droplet movement and detecting the droplet position are generally performed in a time-sharing manner. In this embodiment, when a detection signal is applied to the first sensing electrode 12 and the second sensing electrode 13, the first sensing electrode 12 and the scanning signal line 15 (in other embodiments, other signal lines or electrodes may also be used; this embodiment of the present invention is not limited) form a third capacitor C3, and the second sensing electrode 13 and the data signal line 16 (in other embodiments, other signal lines or electrodes may also be used; this embodiment of the present invention is not limited) form a fourth capacitor C4. When the droplet flows through, the distribution of induced charges within the droplet changes due to the influence of the sensing electrodes, thereby changing the capacitance between the first sensing electrode 12 and the scanning signal line 15 to C3', and the capacitance between the second sensing electrode 13 and the data signal line 16 to C4'. The position of the droplet is determined based on the change in capacitance. The principle of the embodiment with a common electrode is not shown below. Figure 7 similar.

[0059] Figure 8 This is a cross-sectional structural diagram of another microfluidic chip provided in an embodiment of the present invention, with reference to... Figure 8 Optionally, the first sensing electrode 12 is disposed on the same layer as the scan signal line 15, and the second sensing electrode 13 is disposed on the same layer as the data signal line 16.

[0060] Since the extension direction of the first sensing electrode 12 is the same as that of the scanning signal line 15, and the extension direction of the second sensing electrode 13 is the same as that of the data signal line 16, in order to reduce the film layer of the microfluidic chip, the first sensing electrode 12 and the scanning signal line 15 can be set to be on the same layer, and the second sensing electrode 13 and the data signal line 16 can be on the same layer. During the fabrication process, the first sensing electrode 12 and the scanning signal line 15 can be formed in one step using the same process, and the second sensing electrode 13 and the data signal line 16 can be formed in one step using the same process, thereby reducing the thickness and fabrication cost of the microfluidic chip.

[0061] Optionally, the first sensing electrode or the second sensing electrode is disposed in the same layer as the driving electrode. For example, Figure 9 This is a cross-sectional view of another microfluidic chip provided in an embodiment of the present invention, wherein the cross-section is parallel to the column direction of the driving electrode array, as shown in the reference diagram. Figure 9 The first sensing electrode 12 is on the same layer as the driving electrode 11, that is, the first sensing electrode 12 is disposed in the gap between two adjacent rows of driving electrodes 11. Figure 10 This is a cross-sectional structural diagram of another microfluidic chip provided in an embodiment of the present invention, wherein the cross-section is parallel to the row direction of the driving electrode array, as shown in the reference diagram. Figure 10The second sensing electrode 13 is in the same layer as the driving electrode 11, that is, the second sensing electrode 13 is disposed in the gap between two adjacent rows of driving electrodes 11. In specific implementation, optionally, the sensing electrode disposed in the same layer as the driving electrode is formed of the same material as the driving electrode. Figure 9 In the illustrated embodiment, the first sensing electrode 12 and the driving electrode 11 are made of the same material. Figure 10 In the illustrated embodiment, the second sensing electrode 13 and the driving electrode 11 are made of the same material. For example, the material of the driving electrode 11 can be ITO, and the specific material can be selected according to the actual situation. In other embodiments, the first sensing electrode and the second sensing electrode can be set to be on the same layer as the driving electrode, and a bridge can be set at the intersection of the first sensing electrode and the second sensing electrode to avoid short circuit between the first sensing electrode and the second sensing electrode, similar to the structure of the touch electrode in the display panel.

[0062] In another embodiment, for example, when the microfluidic chip has a small number of driving electrodes and a relatively simple structure, a passive driving method can be used, i.e., no transistors are used. Optionally, the microfluidic chip provided in this embodiment also includes multiple data signal lines extending along a first direction or a second direction, each data signal line being connected to a corresponding driving electrode.

[0063] For example, taking a data signal line extending along a first direction as an example, Figure 11 This is a schematic diagram of another microfluidic chip provided in an embodiment of the present invention, with reference to... Figure 11 The microfluidic chip also includes multiple data signal lines 16 extending along a first direction x. Each data signal line 16 is connected to a corresponding driving electrode 11. In specific implementations, electrical connection can be achieved by setting vias in the film layer between the data signal line 16 and the driving electrode 11. In other embodiments, the data signal lines may also extend along a second direction, with a structure similar to... Figure 11 Similarly, the difference is that when the data signal line extends along the second direction, the data signal line extends along the column direction of the driving electrode array.

[0064] Figure 12 For along Figure 11 A schematic diagram of a cross-sectional structure with the mid-section line BB', for reference. Figure 12 Optionally, the data signal line 16 is located on the side of the drive electrode 11 away from the second substrate 20; the data signal line 16 is insulated from and overlaps with the drive electrode 11'.

[0065] It is understandable that the data signal line 16 is electrically connected to the corresponding drive electrode 11 and is insulated from and overlapped with other drive electrodes 11' in the same row. This arrangement can prevent the data signal line 16 from occupying the gap of the drive electrode 11 and reduce the influence of the parasitic capacitance generated by the data signal line 16 on the signal of the first sensing electrode 12 or the second sensing electrode 13.

[0066] Continue to refer to Figure 11 and Figure 12 Optionally, the data signal line 16 extends along the first direction x, the first sensing electrode 12 is disposed in the same layer as the data signal line 16, and the second sensing electrode 13 is disposed in the same layer as the driving electrode 11. Optionally, the sensing electrode disposed in the same layer as the driving electrode is formed using the same material as the driving electrode. In specific implementation, the first sensing electrode 12 and the data signal line 16 can be formed in one step using the same process and material, and the second sensing electrode 13 and the driving electrode 11 can be formed in one step using the same process and material; or in another embodiment, the data signal line extends along the second direction, the second sensing electrode is disposed in the same layer as the data signal line, the first sensing electrode is disposed in the same layer as the driving electrode, and the second sensing electrode and the data signal line are formed in one step using the same process and material. The implementation method is the same as... Figure 11 and Figure 12 Similarly, details will not be elaborated here.

[0067] Optionally, the first sensing electrode extends in a curved shape along a first direction, and / or the second sensing electrode extends in a curved shape along a second direction.

[0068] For example, Figure 13 This is a partial structural diagram of a microfluidic chip provided in an embodiment of the present invention, with reference to... Figure 13 In this embodiment, the first sensing electrode 12 extends in a curved shape along the first direction x, and the second sensing electrode 13 extends in a curved shape along the second direction y. This arrangement helps to increase the area of ​​the sensing capacitance formed by the first sensing electrode 12 and the second sensing electrode 13, thereby increasing the signal strength. Correspondingly, the edge of the driving electrode 11 needs to match the shape of the sensing electrode. It is understood that... Figure 13 In one embodiment, the width of the first sensing electrode 12 and the second sensing electrode 13 is the same as the slit width of the driving electrode 11, so their boundaries coincide. In other embodiments, the width of the first sensing electrode 12 and the second sensing electrode 13 can be smaller than or larger than the slit of the driving electrode 11. In specific implementation, it is necessary to make a portion of the first sensing electrode 12 and the second sensing electrode 13 located in the slit of the driving electrode 11 to ensure the signal strength when detecting the position of the droplet.

[0069] Optionally, the curved shape includes a serrated shape or a wavy shape.

[0070] Continue to refer to Figure 13 Both the first sensing electrode 12 and the second sensing electrode 13 extend in a wavy shape. In other embodiments, the sensing electrodes may also be serrated. For example, Figure 14 This is a partial structural diagram of another microfluidic chip provided in an embodiment of the present invention, with reference to... Figure 14The first sensing electrode 12 and the second sensing electrode 13 both extend in a sawtooth shape. In other embodiments, the first sensing electrode 12 and the second sensing electrode 13 may also be designed in other curved shapes. This embodiment of the present invention does not limit this.

[0071] It should be noted that, Figure 13 and Figure 14 The first sensing electrode 12 and the second sensing electrode 13 shown are both curved in shape, which is only exemplary. In other embodiments, only the first sensing electrode or the second sensing electrode may be curved, and the edge shape of the corresponding driving electrode corresponds to the edge of the sensing electrode. The specific implementation can be designed according to the actual situation.

[0072] Optional, continue to refer to Figure 13 or Figure 14 The edge of the driving electrode 11 has the same shape as the edge of the adjacent first sensing electrode 12 or second sensing electrode 13 near the driving electrode, meaning the edge shape of the driving electrode 11 and the adjacent first sensing electrode 12 or second sensing electrode 13 mesh with each other. The projection of the first sensing electrode 12 onto the plane of the first substrate is between the projection of the first sensing electrode 12 onto the plane of the first substrate, meaning the first sensing electrode 12 is located in the gap between two adjacent rows of driving electrodes 11. These two electrodes can be on the same layer or different layers. Similarly, the projection of the second sensing electrode 13 onto the plane of the first substrate is between the projection of the second sensing electrode 13 onto the plane of the first substrate, meaning the second sensing electrode 13 is located in the gap between two adjacent columns of driving electrodes 11. These two electrodes can be on the same layer or different layers. Figure 13 and Figure 14 The diagrams shown are top views of the microfluidic chip; the structure of the first substrate is not shown.

[0073] Since an electric field needs to be formed between adjacent driving electrodes 11 in this embodiment to drive the droplet to move, the edges of the driving electrodes 11 are also designed to be curved. This increases the overlap length between adjacent driving electrodes 11, effectively increasing the facing area between adjacent driving electrodes 11, thereby increasing the electric field strength between the two driving electrodes 11, which is more conducive to driving the droplet to move.

[0074] Figure 15 This is a partial structural diagram of another microfluidic chip provided in an embodiment of the present invention. Optionally, refer to... Figure 15 The microfluidic chip provided in this embodiment also includes multiple scan signal lines 15, multiple data signal lines 16, a first electrode 18 corresponding to the driving electrode 11, and a transistor 17 corresponding to the driving electrode 11. Figure 15The diagram shows the circuit schematic of transistor 17 (the specific structure of transistor 17 is not shown). The gate of each transistor 17 is connected to a scan signal line 15, the first electrode is connected to a data signal line 16, and the second electrode is connected to the corresponding driving electrode 11 through a via. The first electrode 18 and the driving electrode 11 form a storage capacitor. The scan signal line 15, the data signal line 16, the first electrode 18, and the transistor 17 are located within the projection of the driving electrode 11 onto the plane of the first substrate. The edges of the scan signal line 15, the data signal line 16, and the driving electrode 11 bypass the edges of the transistor 17.

[0075] It is understandable that when applying a driving voltage to the driving electrode 11, it is often necessary to maintain it for a certain period of time. In order to maintain the voltage stability of the driving electrode 11, the first electrode 18 and the driving electrode 11 can be set to form a storage capacitor. Since the first sensing electrode 12 and the second sensing electrode 13 are located in the gap of the driving electrode 11, the scan signal line 15, the data signal line 16, the first electrode 18 and the transistor 17 are all located below the driving electrode 11. The areas of the scan signal line 15 and the data signal line 16 near the transistor 17, and the edges of the first sensing electrode 12 and the second sensing electrode 13 all bypass the area where the transistor 17 is located, so as to leave enough space to set up the transistor 17. The specific routing method can be designed according to the actual situation.

[0076] Figure 15 In the illustrated structure, each first electrode 18 is a discrete electrode. Since the function of the first electrode 18 is to form a storage capacitor with the driving electrode 11, in other embodiments, multiple first electrodes 18 can be electrically connected to apply the same voltage signal. Optionally, at least two adjacent first electrodes are electrically connected, and the connection portion of the two electrically connected first electrodes includes a hollow area, which overlaps with the first sensing electrode and / or the second sensing electrode.

[0077] For example, Figure 16 This is a partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention, with reference to... Figure 16 The two adjacent first electrodes 18 are electrically connected through the connecting trace 191 of the electrode connection part 19. The connection part 19 includes a hollow area 192, which overlaps with the first sensing electrode 12 or the second sensing electrode 13.

[0078] Understandably, by setting at least two first electrodes 18 electrically connected, signals can be applied to multiple first electrodes 18 simultaneously, reducing wiring difficulty and driving costs. Furthermore, by setting a cutout area 192 in the connection portion 19, signal interference from the connection portion 19 to the sensing electrodes can be reduced, improving detection accuracy. It should be noted that... Figure 16The arrangement of four connecting lines 192 and three cutout areas 192 between the two first electrodes 18 shown is only illustrative. In actual implementation, the number of connecting lines and cutout areas is not limited.

[0079] Figure 16 In the illustrated embodiment, the first electrode 18, the first sensing electrode 12, and the second sensing electrode 13 are all disposed in different layers, for example, corresponding to Figure 6 In other embodiments, to reduce the number of film layers, optionally, the first sensing electrode is disposed in the same layer as the scan signal line, and the second sensing electrode is disposed in the same layer as the data signal line; for example, Figure 17 This is a partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention, with reference to... Figure 17 The first electrode 18 and the first sensing electrode 12 are disposed on the same layer, and the connection trace 191 of the connection portion 19 of the two first electrodes 18 that are electrically connected to each other extends along the first direction x. Figure 18 This is a partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention, with reference to... Figure 18 The first electrode 18 and the second sensing electrode 13 are disposed on the same layer, and the connection trace 191 of the connection portion 19 of the two first electrodes 18 that are electrically connected to each other extends along the second direction y. Figure 17 and Figure 18 All views shown are top views of the microfluidic chip, with the same fill to indicate the same layer arrangement, for example... Figure 17 The first electrode 18 and the first sensing electrode 12 are filled with the same shape.

[0080] Optionally, both the first sensing electrode and the second sensing electrode include a first region and a second region, with the first region of the first sensing electrode and the first region of the second sensing electrode being insulated from and overlapping each other; the width of the first region of the first sensing electrode is smaller than the width of the second region of the first sensing electrode, and / or the width of the first region of the second sensing electrode is smaller than the width of the second region of the second sensing electrode.

[0081] For example, Figure 19 This is a partial structural schematic diagram of another microfluidic chip provided in an embodiment of the present invention, with reference to... Figure 19 The first sensing electrode 12 includes a first region 121 and a second region 122, and the second sensing electrode 13 includes a first region 131 and a second region 132. The first region 121 of the first sensing electrode 12 and the first region 131 of the second sensing electrode 13 intersect. By setting the width d5 ​​of the first region 121 of the first sensing electrode 12 to be smaller than the width d6 of the second region 122, and the width d7 of the first region 131 of the second sensing electrode 13 to be smaller than the width d8 of the second region 132, the overlapping area of ​​the two sensing electrodes can be reduced, thereby reducing parasitic capacitance.

[0082] When the first sensing electrode 12 and the second sensing electrode 13 are extended in a curved shape, the width of the intersection area can also be narrowed. The specific implementation can be designed according to the actual situation.

[0083] In other embodiments, only the first sensing electrode or the second sensing electrode may be designed with a narrow linewidth at the intersection to reduce parasitic capacitance.

[0084] In some embodiments, such as microfluidic chips with a small number of driving electrodes, simple structure, and only one droplet, in order to simplify the circuit structure, detection signals can be applied to all first sensing electrodes and second sensing electrodes simultaneously, and the position of the droplet can be determined based on the capacitance change. However, when there are two or more droplets, in order to avoid the generation of ghost points, a scanning method can be used to apply signals to the sensing electrodes in one direction. Optionally, detection signals can be applied to the first sensing electrodes sequentially along the second direction in a time-division manner, or to the second sensing electrodes sequentially along the first direction in a time-division manner. The position of the droplet can be determined based on the capacitance change formed by the first sensing electrode and a certain electrode and the capacitance change formed by the second sensing electrode and a certain electrode when the droplet flows through.

[0085] Since the first sensing electrode and the second sensing electrode are arranged in an intersecting manner, their intersection can form a capacitor. Therefore, the position of the droplet can be determined by the capacitance change between the first sensing electrode and the second sensing electrode. In one embodiment, optionally, one of the first sensing electrode and the second sensing electrode is a transmitting electrode and the other is a receiving electrode. The position of the droplet is determined based on the capacitance change between the first sensing electrode and the second sensing electrode when the droplet flows through.

[0086] In another embodiment, the position of the droplet can be determined based on the capacitance change formed by the sensing electrode and the common electrode located on the second substrate. Optionally, the common electrode includes multiple branch electrodes extending along a first direction or a second direction, and the number of branch electrodes is the same as the number of the first sensing electrode or the second sensing electrode.

[0087] For example, Figure 20 This is a top view schematic diagram of a common electrode in a microfluidic chip provided by an embodiment of the present invention. Figure 21 This is a cross-sectional structural diagram of another microfluidic chip provided in an embodiment of the present invention. Figure 20 and Figure 21 Taking a common electrode comprising multiple branch electrodes extending along a first direction as an example, Figure 21 The diagram shows a cross-sectional structure with the section line parallel to the second direction. In this embodiment, the branch electrode can also be driven independently and cooperate with the first sensing electrode or the second sensing electrode to form a capacitor to realize the positioning of the droplet.

[0088] In microfluidic chips, the size of the driving electrodes is typically on the order of millimeters, and the spacing between them can be tens of micrometers. Optionally, along the first direction, the distance between two adjacent driving electrodes is 10 μm to 40 μm; along the second direction, the distance between two adjacent driving electrodes is also 10 μm to 40 μm. This ensures that the areas of the first and second sensing electrodes are relatively large, guaranteeing the signal strength when detecting the droplet position. In other embodiments, optionally, an insulating hydrophobic layer is provided on the side of both the first and second substrates adjacent to the microfluidic channel to provide insulation and reduce droplet movement resistance.

[0089] This invention also provides a microfluidic chip, including a first substrate and a second substrate disposed opposite to each other, with a microfluidic channel formed between the first substrate and the second substrate, the microfluidic channel being used to accommodate at least one droplet; a plurality of driving electrodes located on one side of the first substrate, the driving electrodes being arranged in an array, adjacent driving electrodes being loaded with different driving voltage signals to drive the droplet to move; at least one edge of the driving electrode extending in a curved shape.

[0090] For example, Figure 22 This is a partial structural diagram of another microfluidic chip provided in an embodiment of the present invention. Figure 23 For along Figure 22 A schematic diagram of a cross-sectional structure with the central section CC', for reference. Figure 22 The microfluidic chip includes multiple driving electrodes 11 arranged in an array. Adjacent driving electrodes 11 are applied with different driving voltages. The droplet is driven by the differential voltage between adjacent driving electrodes 11, controlling the droplet to move along a preset path. The edges of the driving electrodes 11 extend in a curved shape. Figure 22 The wave shape shown is for illustrative purposes only; in practice, it can be a sawtooth shape or other curved shape. Reference Figure 23 The microfluidic chip includes a first substrate 10 and a second substrate 20 disposed opposite to each other, with a microfluidic channel 30 formed between the first substrate 10 and the second substrate 20. The microfluidic channel 30 is used to accommodate at least one droplet 31. In other embodiments, a common electrode may also be disposed on the second substrate 20, and structures such as scan signal lines, data signal lines, and transistors may also be included. A first sensing electrode and a second sensing electrode may also be disposed in the gap of the driving electrode to obtain the position of the droplet. The specific implementation can be designed according to actual needs.

[0091] This invention also provides a microfluidic chip, including a first substrate and a second substrate disposed opposite to each other, with a microfluidic channel formed between the first substrate and the second substrate, the microfluidic channel being used to accommodate at least one droplet; a plurality of driving electrodes located on one side of the first substrate, the driving electrodes being arranged in an array, adjacent driving electrodes being loaded with different driving voltage signals to drive the droplet to move; further including a plurality of scan signal lines extending along a first direction, a plurality of data signal lines extending along a second direction, and transistors corresponding one-to-one with the driving electrodes, each transistor having its gate connected to a scan signal line, its first electrode connected to a data signal line, and its second electrode connected to the corresponding driving electrode; the scan signal lines, data signal lines, and transistors are all located on the side of the driving electrodes away from the second substrate; at least one of the scan signal lines, data signal lines, and transistors overlaps with the driving electrodes.

[0092] For example, Figure 24 This is a partial structural diagram of another microfluidic chip provided in an embodiment of the present invention. Figure 25 for Figure 24 A cross-sectional structural diagram, for reference Figure 24 The microfluidic chip includes multiple driving electrodes 11 arranged in an array. Adjacent driving electrodes 11 are loaded with different driving voltages, and the droplets are driven by the differential voltage between adjacent driving electrodes 11, controlling the droplets to move along a preset path. It also includes multiple scan signal lines 15 extending along a first direction x, multiple data signal lines 16 extending along a second direction y, and transistors 17 corresponding to each driving electrode 11. The gate of each transistor 17 is connected to one scan signal line 15, its first electrode is connected to one data signal line 16, and its second electrode is connected to the corresponding driving electrode 11. (Reference) Figure 25 The transistor 17 includes a gate 171, an active layer 172, a source 173 (first electrode), and a drain 174 (second electrode). The scan signal line 15, the data signal line 16, and the transistor 17 are all located on the side of the driving electrode 11 away from the second substrate 20. The scan signal line 15 and / or the data signal line 16 are preferably not routed in the gaps of the driving electrode 11, and are all located below the driving electrode 11. Correspondingly, the transistor 17 is also located below the driving electrode 11 and not in the gaps. In this way, the driving electrode 11 can shield the parasitic capacitance caused by the scan signal line 15, the data signal line 16, or the transistor 17, improve the droplet driving accuracy and speed, and avoid the electric field generated between the scan signal line 15 / data signal line 16 and the driving electrode from generating a reaction force on the droplet movement. In other embodiments, at least one of the scan signal line, the data signal line, and the transistor overlaps with the driving electrode. The edge of the driving electrode 11 extends in a curved shape, similar to Figure 22The wave shape is shown in the figure. In other embodiments, a first sensing electrode and a second sensing electrode can also be provided in the gap of the driving electrode to obtain the position of the droplet, in combination with the embodiment with droplet positioning function, and the structure of the microfluidic chip provided in the foregoing embodiment can be specifically referred to.

[0093] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, combinations, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A microfluidic chip, characterized in that, It includes a first substrate and a second substrate disposed opposite to each other, with a microfluidic channel formed between the first substrate and the second substrate, the microfluidic channel being used to accommodate at least one droplet; Multiple driving electrodes are located on one side of the first substrate. The driving electrodes are arranged in an array, and adjacent driving electrodes are loaded with different driving voltage signals to drive the droplet to move. It also includes multiple scan signal lines extending along a first direction, multiple data signal lines extending along a second direction, and transistors corresponding to the driving electrodes one by one. The gate of each transistor is connected to one of the scan signal lines, the first electrode of the transistor is connected to one of the data signal lines, and the second electrode of the transistor is connected to the corresponding driving electrode. The scan signal line, the data signal line, and the transistor are all located on the side of the driving electrode away from the second substrate; The scan signal line and / or the data signal line are both located below the driving electrode and overlap with the driving electrode; the transistor is disposed below the driving electrode and overlaps with the driving electrode. The first substrate is provided with a plurality of first sensing electrodes and a plurality of second sensing electrodes; The projection of the first sensing electrode onto the plane of the first substrate and the projection of the gap between the driving electrode onto the plane of the first substrate at least partially overlap, and the projection of the second sensing electrode onto the plane of the first substrate and the projection of the gap between the driving electrode onto the plane of the first substrate at least partially overlap.

2. The microfluidic chip according to claim 1, characterized in that, A common electrode is provided on the second substrate.

3. The microfluidic chip according to claim 2, characterized in that, The common electrode includes multiple branch electrodes extending along a first direction or a second direction, the number of which is the same as the number of the first sensing electrode or the second sensing electrode.

4. The microfluidic chip according to claim 1, characterized in that, Along the first direction, the distance between two adjacent driving electrodes is ; Along the second direction, the distance between two adjacent driving electrodes is .

5. The microfluidic chip according to claim 1, characterized in that, The first sensing electrode extends along a first direction and is arranged along a second direction. The second sensing electrode extends along the second direction and is arranged along the first direction. The first direction is parallel to the row direction of the array of driving electrodes, and the second direction is parallel to the column direction of the array of driving electrodes. The projection of the first sensing electrode onto the plane of the first substrate at least partially overlaps with the projection of the gap between two adjacent rows of driving electrodes onto the plane of the first substrate. The projection of the second sensing electrode onto the plane of the first substrate at least partially overlaps with the projection of the gap between two adjacent columns of driving electrodes onto the plane of the first substrate.

6. The microfluidic chip according to claim 5, characterized in that, At least one of the scan signal line, the data signal line, and the transistor overlaps with the drive electrode.

7. The microfluidic chip according to claim 5, characterized in that, The first sensing electrode or the second sensing electrode is disposed in the same layer as the driving electrode.

8. The microfluidic chip according to claim 5, characterized in that, The first sensing electrode is disposed on the same layer as the data signal line, and the second sensing electrode is disposed on the same layer as the driving electrode; or The second sensing electrode is disposed on the same layer as the data signal line, and the first sensing electrode is disposed on the same layer as the driving electrode.

9. The microfluidic chip according to claim 5, characterized in that, The first sensing electrode extends in a curved shape along the first direction, and / or the second sensing electrode extends in a curved shape along the second direction.

10. The microfluidic chip according to claim 9, characterized in that, The bending shape includes a sawtooth shape or a wave shape.

11. The microfluidic chip according to claim 9, characterized in that, The edge of the driving electrode extends in a curved shape so that the edge shape of the driving electrode corresponds to the edge shape of the first sensing electrode and / or the second sensing electrode.

12. The microfluidic chip according to claim 11, characterized in that, It also includes a first electrode that corresponds one-to-one with the driving electrode, and the second electrode of the transistor is connected to the corresponding driving electrode through a through hole. The first electrode and the driving electrode form a storage capacitor.

13. The microfluidic chip according to claim 12, characterized in that, The scan signal line, the data signal line, the first electrode, and the transistor are located within the projection of the driving electrode onto the plane of the first substrate, and the edges of the scan signal line, the data signal line, and the driving electrode bypass the edge of the transistor.

14. The microfluidic chip according to claim 12, characterized in that, At least two adjacent first electrodes are electrically connected, and the connection portion of the two electrically connected first electrodes includes a hollow area, which overlaps with the first sensing electrode and / or the second sensing electrode.

15. The microfluidic chip according to claim 14, characterized in that, The first sensing electrode is disposed on the same layer as the scan signal line, and the second sensing electrode is disposed on the same layer as the data signal line; The first electrode and the first sensing electrode are disposed on the same layer, and the connection traces of the connection portions of the two first electrodes that are electrically connected to each other extend along the first direction; or the first electrode and the second sensing electrode are disposed on the same layer, and the connection traces of the connection portions of the two first electrodes that are electrically connected to each other extend along the second direction.

16. The microfluidic chip according to claim 5, characterized in that, Both the first sensing electrode and the second sensing electrode include a first region and a second region, wherein the first region of the first sensing electrode and the first region of the second sensing electrode are insulated from each other and overlap. The width of the first region of the first sensing electrode is smaller than the width of the second region of the first sensing electrode, and / or the width of the first region of the second sensing electrode is smaller than the width of the second region of the second sensing electrode.

Images