Method for generating three-dimensional section contour of designated area of design layout in real time

Abstract

A method for generating a three-dimensional section contour of a designated area of a design layout in real time comprises the following steps: generating a section contour diagram of each process layer according to a given process file; acquiring coordinate information of a specified area in the specified area in the actual layout; converting the coordinate information of the specified area into layout input information for generating a section profile diagram; and according to the layout input information, calling a process file section contour generation process to generate the section contour of the specified area. According to the method for generating the three-dimensional section contour of the designated area of the design layout in real time, a development designer can conveniently check the three-dimensional section contour of the designated area in the layout in real time, and the design efficiency is accelerated and improved.

Description

Technical Field

[0001] The invention relates to the field of semiconductor integrated circuit automated design and flat panel display, and in particular to a method for generating a three-dimensional cross-sectional profile of a designated area of ​​a design layout in real time. Background Art

[0002] When designing a layout in the field of integrated circuit design and flat panel display, due to the large changes in the film layers in each area of ​​the actual layout, the developer is not satisfied with the cross-sectional profile diagram generated only by the process file. The developer hopes to obtain the cross-sectional profile diagram of the specified area of ​​the layout in real time. At present, there is only a cross-sectional profile diagram directly generated by the process file, and there is no method to obtain the cross-sectional profile diagram of the specified area of ​​the layout in real time. This method has certain limitations and cannot meet the requirements of the developer. Summary of the invention

[0003] In order to solve the deficiencies in the prior art, the purpose of the present invention is to provide a method for generating a three-dimensional cross-sectional profile of a specified area of ​​a design layout in real time, so as to facilitate developers and designers to view the three-dimensional cross-sectional profile of the specified area in real time and improve design efficiency.

[0004] To achieve the above object, the present invention provides a method for generating a three-dimensional cross-sectional profile of a designated area of ​​a design layout in real time, comprising the following steps:

[0005] Generate the cross-sectional profile of each process layer according to the given process file;

[0006] Specify an area in the actual map and obtain the coordinate information of the specified area;

[0007] Converting coordinate information of a designated area into layout input information for generating a cross-sectional profile;

[0008] According to the layout input information, a process for generating a cross-section profile of a process file is called to generate a cross-section profile of a specified area.

[0009] Furthermore, the step of specifying an area in the actual layout and obtaining coordinate information of the specified area also includes: specifying the area by box-selecting or line-selecting any area in the actual layout in a layout design program.

[0010] Furthermore, the step of specifying an area in the actual layout and obtaining coordinate information of the specified area also includes: sending a communication protocol signal to a cross-section contour display program through a layout design program, thereby obtaining the coordinate information of the specified area.

[0011] Furthermore, the step of converting the coordinate information of the designated area into layout input information for generating a cross-sectional contour map further includes: performing intersection cutting with each process layer through the coordinate information of the designated area, and converting the coordinate information into layout input information.

[0012] Furthermore, the graphics within the specified area are obtained through intersection cutting.

[0013] Furthermore, a layout is generated through the graphics, that is, information is input into the layout.

[0014] Furthermore, the step of calling the process of generating the cross-sectional contour of the process file according to the layout input information to generate the cross-sectional contour of the specified area also includes: drawing each process layer in turn according to the layout input information to draw a three-dimensional structure diagram of the specified area, and then using a preset cross-section to intercept the three-dimensional structure diagram to obtain the cross-sectional contour of the specified area.

[0015] To achieve the above objectives, the present invention also provides a computer-readable storage medium having a computer program stored thereon, which, when executed, executes the steps of the method for generating a three-dimensional cross-sectional profile of a specified area of ​​a design layout in real time as described above.

[0016] To achieve the above objectives, the present invention also provides an electronic device, including a memory and a processor, wherein the memory stores a computer program running on the processor, and when the processor runs the computer program, the steps of the method for generating a three-dimensional cross-sectional contour of a specified area of ​​a design layout in real time as described above are executed.

[0017] Through the above method, the specified area in the actual layout is selected by box / line selection, and then the selected area data is exchanged through the communication protocol, and converted as the layout input information for generating the cross-section outline diagram. The three-dimensional cross-section outline diagram of the specified area of ​​the design layout is generated in real time. It is convenient for developers to view the three-dimensional cross-section outline of the specified area in the layout in real time, which speeds up the improvement of design efficiency.

[0018] Other features and advantages of the present invention will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0020] Figure 1 A flow chart of a method for generating a three-dimensional cross-sectional profile of a designated area of ​​a design layout in real time according to the present invention;

[0021] Figure 2 A schematic diagram of a process file of a method for generating a three-dimensional cross-sectional profile of a designated area of ​​a design layout in real time according to the present invention;

[0022] Figure 3 A schematic diagram of a cross-sectional profile of a process file according to the present invention;

[0023] Figure 4 is a schematic diagram of an actual layout according to the present invention;

[0024] Figure 5 A cross-sectional outline schematic diagram is generated in real time for selecting an actual layout area according to the present invention. DETAILED DESCRIPTION

[0025] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0026] Figure 1 The flowchart of the method for generating the three-dimensional cross-sectional profile of the designated area of ​​the design layout in real time according to the present invention will be referred to below. Figure 1 , the method of the present invention for generating the three-dimensional cross-sectional contour of the specified area of ​​the design layout in real time is described in detail.

[0027] First, in step 101, a cross-sectional profile diagram of a process file is generated according to a given process file.

[0028] In one embodiment of the present invention, Figure 2 An embodiment of a process file is shown, in which basic information such as film thickness, connection relationship, height, etc. of each film layer are defined.

[0029] like Figure 2 As shown in the figure, Die1, Die2, and Die3 represent the names of the dielectric layers, RX and TX represent the names of the conductor layers, and each process layer defines the attribute parameters of each process layer. For example, the THICK parameter represents the thickness of each process layer. The connection relationship between the dielectric layer and the conductor layer is determined by the order of the process layers in the process file. The connection order of the five process layers shown in the figure is from top to bottom: Die3, RX, Die2, TX, Die1.

[0030] Die3 is the starting layer, and the THICK parameter indicating the thickness is 300, then the starting height of Die3 is 0, and the ending height is 300, that is, the third coordinate of the vertex at the bottom of the process layer is 0, and the third coordinate of the vertex at the top is 300; RX is the next layer of Die3, and the THICK parameter indicating the thickness is 100, then the starting height of RX is 300, and the ending height is 300+100, that is, the third coordinate of the vertex at the bottom of the process layer is 300, and the third coordinate of the vertex at the top is 300+100; Die2 is the next layer of RX, and the THICK parameter indicating the thickness is 200, then the starting height of Die2 is 300+100, and the ending height is 300+100+300, that is, the third coordinate of the vertex at the bottom of the process layer is 300+100, and the third coordinate of the vertex at the top is 30 0+100+300; TX is the next layer of Die2, and the THICK parameter indicating the thickness is 100, then the starting height of TX is 300+100+300, and the ending height is 300+100+300+100, that is, the third coordinate of the vertex at the bottom of the process layer is 300+100+300, and the third coordinate of the vertex at the top is 300+100+300+100; Die1 is the next layer of TX, and the THICK parameter indicating the thickness is 200, then the starting height of Die1 is 300+100+300+100, and the ending height is 300+100+300+100+200, that is, the third coordinate of the vertex at the bottom of the process layer is 300+100+300+100, and the third coordinate of the vertex at the top is 300+100+300+100+200.

[0031] Then, according to the basic information of each process layer in the process file and the expected stacking effect, a spatial rectangular coordinate system is established, and the three-dimensional coordinates of the key points of each process layer in the spatial rectangular coordinate system are determined. The three-dimensional coordinates of the key points of each process layer are marked in the spatial rectangular coordinate system, and each process layer is drawn in turn according to the three-dimensional coordinates. The three-dimensional structure diagram composed of each process layer can be drawn. The three-dimensional structure is intercepted using a preset cross section, and the resulting plane diagram is the contour diagram of each process layer on the preset cross section, which is the cross-sectional contour diagram. According to Figure 2 The cross-sectional profile generated by the process file, such as Figure 3 shown.

[0032] In step 102, an area is designated in the actual layout, and coordinate information of the designated area is obtained.

[0033] In one embodiment of the present invention, Figure 4 A simple actual layout is shown as an example, which includes conductor layers RX and TX.

[0034] By sending a communication protocol signal to the layout design program, the box selection / line selection function of the layout design program is activated. In the actual layout, box selection or line selection of any area is used as an example here (the same applies to line selection, and the final area is expanded to a certain size outside the line selection, which is box selection). Figure 4 After the box is released, the layout design program sends a communication protocol signal to the cross-section outline display program to obtain the coordinate information of the specified area.

[0035] In step 103, the coordinate information of the designated area is converted into layout input information for generating a cross-sectional contour schematic diagram.

[0036] In one embodiment of the present invention, Figure 4 As shown, the coordinate information of the red frame is intersected with all the layers of the original layout, and an intersection is cut out. The figure in the red frame is obtained, and then a layout is generated through this figure. This layout is the layout input information.

[0037] In step 104, based on the obtained layout input information for generating the cross-sectional profile schematic diagram, a process for generating a cross-sectional profile of a process file is called to generate a cross-sectional profile of a designated area.

[0038] In one embodiment of the present invention, according to the layout input information, each process layer is drawn in turn to draw a three-dimensional structure diagram of the specified area, and then the three-dimensional structure diagram is intercepted using a preset cross section to obtain a cross-sectional contour of the specified area.

[0039] In one embodiment of the present invention, the final generated frame selection actual layout area generates a cross-sectional outline schematic diagram in real time, such as Figure 5 shown.

[0040] In one embodiment of the present invention, there is also provided an electronic device, comprising a memory and a processor, wherein the memory stores a computer program running on the processor, and when the processor runs the computer program, the steps of the method for generating a three-dimensional cross-sectional contour of a specified area of ​​a design layout in real time as described above are executed.

[0041] In one embodiment of the present invention, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed, the steps of the method for generating a three-dimensional cross-sectional profile of a specified area of ​​a design layout in real time as described above are executed.

[0042] Those skilled in the art can understand that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions recorded in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A method for generating a three-dimensional cross-sectional profile of a specified area of ​​a design layout in real time, characterized in that: The following steps are involved: Generate the cross-sectional profile of each process layer according to the given process file; Specify an area in the actual map and obtain the coordinate information of the specified area; Converting coordinate information of a designated area into layout input information for generating a cross-sectional profile; According to the layout input information, a process for generating a cross-section profile of a process file is called to generate a cross-section profile of a specified area.

2. The method for generating a three-dimensional cross-sectional profile of a designated area of ​​a design layout in real time according to claim 1, characterized in that: The step of specifying an area in the actual layout and obtaining coordinate information of the specified area also includes: specifying the area by box-selecting or line-selecting any area in the actual layout in a layout design program.

3. The method for generating a three-dimensional cross-sectional profile of a designated area of ​​a design layout in real time according to claim 1, characterized in that: The step of specifying an area in the actual layout and obtaining coordinate information of the specified area also includes: sending a communication protocol signal to a cross-section contour display program through a layout design program, thereby obtaining the coordinate information of the specified area.

4. The method for generating a three-dimensional cross-sectional profile of a designated area of ​​a design layout in real time according to claim 1, characterized in that: The step of converting the coordinate information of the designated area into layout input information for generating a cross-sectional contour map also includes: performing intersection cutting with each process layer through the coordinate information of the designated area, and converting the coordinate information into layout input information.

5. The method for generating a three-dimensional cross-sectional profile of a designated area of ​​a design layout in real time according to claim 4, characterized in that: The graphics within the specified area are obtained through intersection cutting.

6. The method for generating a three-dimensional cross-sectional profile of a designated area of ​​a design layout in real time according to claim 5, characterized in that: A layout is generated through the graphics, that is, information is input into the layout.

7. The method for generating a three-dimensional cross-sectional profile of a designated area of ​​a design layout in real time according to claim 1, characterized in that: The step of calling the process of generating the cross-sectional contour of the process file according to the layout input information to generate the cross-sectional contour of the specified area also includes: drawing each process layer in turn according to the layout input information to draw a three-dimensional structure diagram of the specified area, and then using a preset cross-section to intercept the three-dimensional structure diagram to obtain the cross-sectional contour of the specified area.

8. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is running, the steps of the method for generating a three-dimensional cross-sectional profile of a specified area of ​​a design layout in real time as described in any one of claims 1 to 7 are executed.

9. A device for generating a three-dimensional cross-sectional profile of a designated area of ​​a design layout in real time, characterized in that: The method comprises a memory and a processor, wherein the memory stores a computer program running on the processor, and the processor executes the steps of the method for generating a three-dimensional cross-sectional profile of a specified area of ​​a design layout in real time as described in any one of claims 1 to 7 when running the computer program.

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