A method and system for detection of plasma product species and concentrations

By coupling calculations using temperature simulation, plasma simulation, and chemical reaction simulation modules, the complexity of plasma product pattern discrimination and concentration detection is solved, achieving a low-cost and simplified detection process and improving the accuracy and efficiency of detection results.

CN119521513BActive Publication Date: 2026-05-29HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HUAZHONG UNIV OF SCI & TECH
Filing Date
2024-11-18
Publication Date
2026-05-29

AI Technical Summary

Technical Problem

Existing technologies for plasma product mode discrimination and concentration detection suffer from high detection costs, complex detection methods, poor agreement between calculation results and actual results, and long processing times. Furthermore, the simulation calculations do not consider the coupling of the temperature field, resulting in significant discrepancies between the results and reality.

Method used

The temperature acquisition module obtains real-time temperature, and through the coupled calculation of temperature simulation module, plasma simulation module and chemical reaction simulation module, the reaction rate and particle number density of the main plasma products over a long time scale are realized, simplifying the detection process and avoiding the use of expensive instruments.

Benefits of technology

It enables low-cost and simplified detection of plasma product types and concentrations. The detection process is simple and convenient, and it comprehensively considers the influence of temperature field on product concentration, thus ensuring the efficient operation of plasma in industrial applications.

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Abstract

The application discloses a kind of detection method and system for plasma product species and concentration, belong to plasma technical field, comprising: based on the real-time temperature when generating plasma is collected, obtain the spatial temperature distribution diagram in different time plasma reaction cavity inside under different discharge voltages;By simulating the discharge process in plasma reaction cavity, the species and particle number density of main plasma product under short time scale are obtained;Based on temperature distribution diagram and discharge area when generating plasma, according to particle number density, obtain the generation rate of each product inside plasma reaction cavity and the concentration change of substance under long time scale.The application realizes plasma product mode discrimination and product concentration detection under long time scale, the application comprehensively considers the influence of real-time discharge area, temperature field on product concentration calculation, detection process is simple and convenient, provides guarantee for the efficient operation of plasma in industrial application.
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