An integrated valve device and liquid medicine supply method for a valve distribution box of a centralized medicine supply system

Abstract

The invention relates to an integrated valve device and a liquid medicine supply method for a valve distribution box of a centralized medicine supply system, wherein the device comprises: a main three-way valve and a branch three-way valve modularly mounted on a bottom plate and a blocking member. The main three-way valve integrating the main control and the liquid discharge switch has a main inlet facing the front of the box, a liquid discharge port located at the back, and a main outlet with a T-shaped flow channel vertical section located at the side of the valve; the branch three-way valve integrating the forced switch and the branch control has an extended inlet and an expansion port located at both sides and a branch outlet with a T-shaped flow channel vertical section facing the front of the box; the extended inlet of the adjacent branch three-way valve is directly connected to the main outlet of the main three-way valve, and the blocking member is combined with the expansion port relatively far away from the branch three-way valve. The main inlet and the branch outlet both face the same side of the bottom plate, and the main inlet is relatively collapsed to the branch outlet; the T-shaped flow channel vertical section of the main three-way valve and the T-shaped flow channel horizontal section of the branch three-way valve form a spliced ​​main flow channel in the valve, which is used to flexibly expand the branch and simplify the components.

Description

Technical Field

[0001] The present invention relates to the technical field of liquid delivery systems for factory chemicals used in semiconductor, PCB, panel and photovoltaic manufacturing equipment in high-end equipment manufacturing, so as to supply liquid medicines used in high-end manufacturing (such as strong acid, strong alkali or deionized water used in semiconductor processing), and in particular to an integrated valve device and liquid medicine supply method of a valve manifold box (VMB) of a centralized medicine supply system. Background Art

[0002] In the centralized liquid supply system of the factory chemical system of semiconductor wafer, PCB circuit board, display panel, photovoltaic panel manufacturing factory, a valve manifold box (VMB) is usually used at the source of the treatment liquid supply to centrally control and distribute the treatment liquid. The box is integrated into the centralized supply system to distribute the liquid from the liquid storage tank to multiple production processing equipment, such as wet processing equipment working on semiconductor wafers. Compared with the distance to the processing equipment, the valve distribution box is closer to the liquid storage tank. Figure 1As shown, there are many components such as control valves and connecting pipelines in the early valve distribution box. The specific structure mainly includes: a main inlet valve 125 connected to the main supply interface, multiple branch manual valves 136 and multiple branch pneumatic valves 135, as well as a branch preset valve 139 and a drain valve 126 according to the flow direction of the liquid medicine. The outlet of the main inlet valve 125 is connected to the main pipeline 161, and the main pipeline 161 is connected to multiple first branch pipelines 162. The outlet of the first branch pipeline 162 is connected to the branch manual valve 136, and the outlet of the branch manual valve 136 is connected to the second branch pipeline 163. The outlet of the second branch pipeline 163 is connected to the branch pneumatic valve 135. The second branch pipeline 163 is branched and connected to the preset pipeline 164. The outlet of the preset pipeline 164 is connected to the branch preset valve 139; the end of the main pipeline 161 is connected to the drain pipeline 165, and the outlet of the drain pipeline 165 is connected to the drain valve 126. In addition, the main inlet of the main inlet valve 125 is connected to the main inlet pipeline, the branch outlet of the branch pneumatic valve 135 is connected to the branch pipeline outside the box, and the outlet of the drain valve 126 is connected to the cleaning branch pipeline outside the box (not shown). The liquid supply system in the valve distribution box plays an important role in ensuring production continuity and improving product quality. With the advancement of science and technology, the requirements for the cleanliness, reliability and space utilization of the liquid supply system are getting higher and higher, especially in an environment with high cleanliness and low leakage risk. The performance of the liquid supply system directly affects the stability of production and the quality of the product. The valve distribution box of the existing centralized drug supply system has the problem of large space occupation. The traditional centralized liquid supply system requires a large number of valves and pipeline components, resulting in a large overall system volume, occupying valuable production space, and high assembly cost. The high cost of high-quality valves and pipeline materials increases the overall cost of the centralized liquid supply system; plus there are many dead zones in the joints, and there are a large number of joints in the centralized liquid supply system, which is easy to form dead zones, reducing the cleanliness of the centralized liquid supply system. The more joints there are, the more leakage risks there are, affecting the reliability of the centralized liquid supply system.

[0003] Invention patent CN107202180A discloses an integrated valve group for a fluid circuit in a limited space, which integrates an automatic flow control valve, a flow meter, a pressure gauge, a thermometer, and various fluid input and output pipelines, greatly reducing the use of excessive adapters, elbows, tees and other components in the pipeline, thereby reducing the complexity of the reflux system layout in a limited space, reducing the risk of fluid leakage in the system, and improving the safety of the system. However, in the related art, three (or more) branch fluid channels are set in the valve group, which does not have branch expandability. In addition, an inlet of a fluid input main pipeline and outlets of multiple fluid input branch pipelines are arranged on the surface of the fluid input module, and flow sensors are installed on each branch to measure the flow, which then enters the electric flow control valve. The three-way flow is regulated by electricity, without considering how to forcibly control the main branch of the integrated valve group in an emergency during factory production. Therefore, for those skilled in the art, if the integrated valve group is to be applied to a valve distribution box (VMB), an inlet forced control valve and a forced control valve at each branch outlet must be installed externally at the main inlet and each branch outlet, respectively, which is not conducive to the technical development trend of reducing the box space of the valve distribution box (VMB).

[0004] Utility model patent CN217130980U discloses a fluid diversion and control integrated module, including a diversion component, the diversion component includes a diversion box and a water inlet pipe and multiple water outlet pipes arranged inside the diversion box, a water inlet and multiple water outlets are opened on the side wall of the diversion box, the water inlet end of the water inlet pipe is sealed and connected to the water inlet, the water outlet end of the water inlet pipe is sealed and connected to the water inlet ends of multiple water outlet pipes, and the water outlet ends of multiple water outlet pipes are respectively sealed and connected to multiple water outlets; the pipeline flow control component is arranged on the side wall of the diversion box and connected to the water inlet end of the water outlet pipe; the pipeline flow adjustment component is arranged on the side wall of the diversion box and connected to the water outlet end of the water outlet pipe. The various components of fluid control, namely the pipeline, electromagnetic control valve, regulating valve, etc. are integrated on the diversion component. The concept of diverter integration is proposed in the related technology. An electromagnetic control valve is used to control the opening and closing of the flow channel in the diverter. The electric drive does not have the function of forced control of the main branch, and the integrated valve body of the diverter assumes the function of the pipeline. The flow channel design in the integrated valve body is relatively complex and long. Under long-term maintenance or emergency shutdown, the integrated valve body is susceptible to corrosion or deposition by the treatment liquid in a static state.

[0005] Invention patent CN118463036A discloses a chemical supply system for semiconductor production, in which the liquid outlet of the storage tank is connected to the stop valve through a pipeline, the delivery pump is arranged on the pipeline between the stop valve and the pneumatic valve, the pneumatic valve is connected to the VMB valve box through a pipeline, a pulsation damper and a pressure gauge are arranged on the pipeline between the pneumatic valve and the VMB valve box, and the VMB valve box is connected to the machine liquid point through a pipeline. The delivery pump, pneumatic valve, pressure gauge, VMB valve box and machine liquid point are respectively connected to the control module by signal. The diaphragm pulsation damper on the system transmission pipeline can absorb the energy of pressure waves and pulsating flow in the chemical pipeline system, making the flow of the pipeline system more stable. However, there is no technical inspiration for reducing the box space of the VMB valve box.

[0006] Invention patent CN109564885A discloses a liquid delivery system capable of dispensing liquid chemicals. The system is divided into three layers: active components (such as flow controllers, pressure sensors, flow measurement sensors, pressure regulators, valves, etc.) on the top layer; substrate blocks on the second intermediate layer (used to form fluid connections between active components); and a bottom plate, which serves as a supporting structure for the entire system. The main improvement is in the substrate blocks, each of which has at least one fluid channel with an inlet and an outlet connected to a common surface. The common surface is used to install standard active components such as flow controllers, pressure sensors, flow measurement sensors, pressure regulators, valves, etc. That is, in the related art, the concept of U-shaped flow channel modularization to replace pipelines is proposed, and the control valve is set on the substrate block. However, a substrate block with only one inlet and one outlet cannot establish a connection between the main flow channel and the branch flow channel, which means that the connection mechanism between the main flow channel and the branch flow channel must be established on the top layer, but the specific structure is not disclosed, and those skilled in the art have no way of knowing how to integrate it.

[0007] In summary, the traditional centralized liquid supply system used for production plant affairs takes up a large space and requires a large number of valves and pipe fittings, resulting in a large overall size of the valve distribution box, which occupies valuable production space. In addition, there are many valve and pipeline materials, which not only has high maintenance costs, but also has many dead zones in the joints. If there are a large number of joints in the valve distribution box, it is easy to form a dead zone for the flow of liquid medicine, which is prone to leakage, affecting the reliability of the valve distribution box. If the external pipeline is simply integrated into the control valve, the shape of the flow channel in the control valve will become more complicated, making it difficult to clean. Therefore, there is an urgent need for an integrated valve device that has a reduced box space, a small number of joints, can integrate a forced control valve, and is easy to clean. Summary of the invention

[0008] The main purpose of the present invention is to provide an integrated valve device for a valve distribution box in a centralized drug supply system. The main improvement is to reduce the box space of the valve distribution box (VMB) in the centralized drug supply system, greatly reduce the number of valve bodies and connecting pipes, and have the functions of branch expandability, forced switch control and easy cleaning, which is in line with the development trend of VMB miniaturization.

[0009] The second main purpose of the present invention is to provide a method for supplying liquid medicine in a centralized drug supply system. By utilizing the integrated valve device of the valve distribution box of the centralized drug supply system provided in the embodiment of the present invention, modular expansion of branch liquid supply can be achieved and forced switching valve components can be integrated. It also has the easy-to-clean feature of the spliced ​​main channel inside the valve.

[0010] The main purpose of the present invention is achieved through the following technical solutions, which provide an integrated valve device for a valve distribution box of a centralized drug supply system, including:

[0011] The main three-way valve is modularly mounted on the bottom plate, and has a main inlet facing the front of the box, a liquid discharge port located at the back, and a main outlet with a T-shaped flow channel vertical section located on the side of the valve; the main three-way valve comprises a main valve body and a main control valve component and a liquid discharge switch valve component arranged on the same main valve body, the control points of the main control valve component and the liquid discharge switch valve component are respectively located at the two ends of the T-shaped flow channel horizontal section of the main three-way valve, and the main control valve component is used to open and close the connection between the main inlet and the main outlet;

[0012] A shunt three-way valve is modularly mounted on the bottom plate and connected side by side to one side of the main three-way valve, the shunt three-way valve having an extended inlet and an expansion port located on the sides of two corresponding valves and a shunt outlet with a T-shaped flow channel vertical section facing the front of the box, and the extended inlet of the shunt three-way valve adjacent to the main three-way valve is directly connected to the main outlet of the main three-way valve; the shunt three-way valve comprises a shunt valve body and a shunt control valve component and a forced switch valve component which are arranged on the same shunt valve body and located on the T-shaped flow channel vertical section of the shunt three-way valve, and the control points of the shunt control valve component and the forced switch valve component are respectively located at the extension end and the connection end of the T-shaped flow channel vertical section of the shunt three-way valve;

[0013] A blocking member, combined with an expansion port of the branch three-way valve relatively far away from the main three-way valve;

[0014] Among them, the main inlet of the main three-way valve and the branch outlet of the branch three-way valve are both facing the same side of the bottom plate, and the main inlet of the main three-way valve is relatively collapsed to the branch outlet of the branch three-way valve; the T-shaped flow channel horizontal section of the branch three-way valve and the T-shaped flow channel vertical section of the main three-way valve constitute a spliced ​​main flow channel in the valve, and the T-shaped flow channel vertical section of the branch three-way valve is a branch flow channel in the valve.

[0015] The implementation principle of this basic structure example is to use the combined structure of the spliced ​​main flow channel in the valve and the combination method of connecting the branch flow channel in the branch three-way valve as a whole, significantly reduce a large proportion of independent valves and external pipes with interfaces (specifically, more than 90% of components can be saved), greatly reduce the space occupied and maintenance cost of the valve distribution box, and the device also reduces the hidden dangers of leakage points and improves the reliability and safety of the centralized drug supply system. At the same time, integrating the branch control valve and the forced switch valve in the branch three-way valve can reduce the dead zone of the joint, improve the cleanliness of the liquid supply of the centralized drug supply system, and ensure the transmission quality of the liquid (specifically, ultra-pure chemicals for semiconductor manufacturing). In addition, integrating the main control valve and the drain switch valve in the main three-way valve makes it easy to clean the spliced ​​main flow channel in the valve, improve the cleanliness and maintenance convenience of the system, and ensure the long-term stable operation of the system. Through the side-by-side connection of the main three-way valve and the branch three-way valve, the unlimited expansion of the branch three-way valve is realized, which can flexibly respond to valve distribution boxes with different branch requirements and enhance the applicability and flexibility of the centralized drug supply system. In addition, facing the front of the valve distribution box, the main inlet of the main three-way valve is relatively collapsed to the branch outlet of the branch three-way valve, which makes it easier to distinguish the connection between the main line and the branch line. Specifically, the effects are shown in the following points:

[0016] 1. The main three-way valve and the branch three-way valve are modularly installed on the base plate, making the valve distribution box compact and easy to expand and maintain;

[0017] 2. The extended inlet of the branch three-way valve is directly connected to the main outlet of the main three-way valve or the extended port of the adjacent branch three-way valve, which integrates the pipeline connection of the main channel, reduces fluid resistance and improves fluid flow efficiency;

[0018] 3. The blocking piece is combined with the expansion port of the branch three-way valve which is relatively far away from the main three-way valve, effectively preventing liquid leakage and improving the safety and reliability of the system;

[0019] 4. The main inlet of the main three-way valve and the branch outlet of the branch three-way valve face the same side, and the main inlet is relatively collapsed to the branch outlet to prevent misconnection, optimize the fluid path, and reduce pressure loss;

[0020] 5. The T-shaped flow channel vertical section of the main three-way valve and the T-shaped flow channel horizontal section of the branch three-way valve form a valve-jointed main flow channel, which further improves the cleanliness and stability of the system.

[0021] In a preferred example, the present invention can be further configured as follows: the extended inlet of the branch three-way valve has a hose portion, an inner support ring is arranged in the opening of the hose portion, and the extension port of the branch three-way valve and the main outlet of the main three-way valve are provided with a tightening ring to directly tighten the hose portion and the inner support ring at the corresponding extension port or main outlet.

[0022] By adopting the preferred technical features of the above structure, the extended inlet of the shunt three-way valve is provided with a hose part, an inner support ring is arranged in the opening of the hose part, and the extension port of the shunt three-way valve and the main outlet of the main three-way valve are provided with a tight rotating ring, and the hose part and the inner support ring are directly tightened at the corresponding extension port or main outlet. This structure determines that there is no need for direct connection of pipelines on both sides of the shunt three-way valve, reduces the number of interfaces, thereby significantly reducing the space occupation and cost of the system, and also reduces the dead zone of the joint, and improves the cleanliness of the system. At the same time, the connection between the shunt module valve and the components on both sides is more stable, reducing the risk of leakage. In addition, the unlimited scalability of the shunt three-way valve is guaranteed, and it can flexibly respond to different shunt requirements, enhancing the applicability and flexibility of the system.

[0023] In a preferred example, the present invention can be further configured as follows: the inner support ring of the branch three-way valve has a snap-fit ​​portion, and the expansion port of the branch three-way valve and the main outlet of the main three-way valve have corresponding snap-fit ​​ring grooves.

[0024] By adopting the preferred technical features of the above structure, the inner support ring of the branch three-way valve has a snap-fitting portion, and the expansion port and the main outlet of the branch three-way valve have corresponding snap-fit ​​ring grooves, so that the inner support ring is not easy to fall out, which not only enhances the sealing performance of the connection part, but also reduces the risk of leakage, simplifies the connection method, reduces the difficulty of installation, and improves the reliability and stability of the system.

[0025] In a preferred example, the present invention can be further configured as follows: the blocking member is selected from one of a sealing plug and a cleaning three-way valve, the cleaning three-way valve and the main three-way valve have a symmetrical and identical structure, the cleaning three-way valve is modularly installed on the bottom plate and is located on the extended side of the branch three-way valve connected side by side, when the main three-way valve is closed, the cleaning three-way valve is opened to clean the spliced ​​main channel in the valve.

[0026] By adopting the preferred technical features of the above structure, the use of blocking parts significantly improves the cleanliness and maintenance convenience of the system. The specific performance is as follows:

[0027] 1. Selection of blocking parts: The blocking parts can be selected as sealing plugs or cleaning three-way valves, that is, the extension port of the branch three-way valve farthest from the main three-way valve can be connected to both the sealing plug and the cleaning three-way valve; when the sealing plug is selected, it can effectively prevent liquid leakage and improve the safety and reliability of the system. After removing the sealing plug, the spliced ​​main flow channel in the valve can be cleaned; when the cleaning three-way valve is selected, the cleaning three-way valve has the same corresponding structure as the main three-way valve and is modularly installed on the bottom plate; when the main three-way valve is closed and the cleaning three-way valve is opened, cleaning liquid can be supplied to clean the spliced ​​main flow channel in the valve to ensure the cleanliness of the system and the quality of liquid supply;

[0028] 2. Implementation of cleaning function: Through the design of cleaning three-way valve, the spliced ​​main flow channel in the valve can be cleaned separately without affecting other parts, reducing the accumulation of pollutants in the system, extending the service life of the system, and improving the reliability and safety of the system;

[0029] 3. Convenience of maintenance: The modular combination of blocking parts makes it easier to replace and maintain components in the system. The sealing plug can be quickly replaced or the three-way valve can be cleaned as needed without disassembling the entire system, which greatly shortens maintenance time and improves system availability.

[0030] In summary, the above-mentioned basic structure combined with the overall preferred technical features not only improves the cleanliness and reliability of the system, but also enhances the maintenance convenience of the system.

[0031] In a preferred example, the present invention can be further configured as follows: the discharge switch valve member is used to open and close the connection between the main outlet and the discharge port; the T-shaped flow channel cross section of the main three-way valve includes a second intermediate flow channel having a long and a short V-shaped longitudinal section, one end of the second intermediate flow channel is connected to the outer ring connected to the annular cavity of the main outlet, and a horizontal section is connected between the other end of the intermediate flow channel and the discharge port.

[0032] By adopting the preferred technical features of the above structure, the T-shaped flow channel cross section of the main three-way valve includes a second intermediate flow channel with a long and a short V-shaped longitudinal section, one end of which is connected to an annular cavity of an outer ring connected to the main outlet, and the other end is connected to the drain port with a horizontal section; in this way, the flow path of the fluid in the main three-way valve is optimized, the length of the main three-way valve is shortened, and the main control valve component and the drain switch valve component can be close to each other; during maintenance or cleaning, the residual liquid in the spliced ​​main flow channel in the valve can be discharged from the drain port, thereby reducing the accumulation of pollutants in the valve.

[0033] In a preferred example, the present invention can be further configured such that the main circuit control valve component and the forced switch valve component are arranged linearly to facilitate identification of the main branch circuit forced control situation.

[0034] By adopting the preferred technical features of the above structure and utilizing the linear arrangement design of the main control valve and the forced switch valve, the system's operational convenience and visualization are significantly improved. Specifically:

[0035] 1. Convenient operation: The linear arrangement allows the operator to intuitively see the position and status of each valve component. Without complex spatial cognition, the operator can quickly identify whether the main branch is in a forced open state, thereby reducing the risk of misoperation;

[0036] 2. Enhanced visualization: This arrangement makes it easy to observe the control status of the main and branch circuits. Especially in emergency situations, it is possible to quickly determine whether the main circuit control valve and the corresponding branch circuit forced switch valve are in the open or closed state, so as to take corresponding measures;

[0037] 3. Ability to identify the forced control of the main and branch circuits: Linear arrangement helps to distinguish the control logic of the main circuit and branch circuits, making it easier to understand and grasp the operating status of the system, and improve the reliability and safety of the system;

[0038] In summary, the above technical solution not only improves the operational convenience and visualization of the system, but also enhances the system reliability and security.

[0039] In a preferred example, the present invention can be further configured as follows: the branch three-way valve also has a preset port facing the front of the box, bypassing the branch control valve member and connected to the vertical section of the T-shaped flow channel of the branch three-way valve.

[0040] By adopting the preferred technical features of the above structure, the three-way shunt valve also includes a preset port facing the front of the box, which bypasses the shunt control valve and directly connects to the vertical section of the T-shaped flow channel; the aperture of the preset port is smaller than the aperture of the shunt outlet, and in some cases (such as emergency flushing or maintenance), operations can be performed directly through the preset port without being affected by the shunt control valve, thereby enhancing the emergency handling capability of the system. The design of the preset port improves the flexibility and reliability of the system, and can maintain efficient and stable operation under various working conditions.

[0041] In a preferred example, the present invention can be further configured as follows: the aperture of the preset port is smaller than the aperture of the branch outlet, and the switch of the branch control valve member can change the branch liquid supply volume; the vertical section of the T-shaped flow channel of the branch three-way valve includes a first intermediate flow channel having a long and a short V-shaped longitudinal section, a horizontal section is connected between one end of the first intermediate flow channel and the branch outlet, and a vertical section is connected between the other end of the first intermediate flow channel and the horizontal section of the T-shaped flow channel of the branch three-way valve.

[0042] By adopting the preferred technical features of the above structure, the internal flow channel design and flow control ability of the branch three-way valve are significantly optimized, and the specific effects are as follows:

[0043] 1. Variable design of preset port: Since the aperture of the preset port is smaller than that of the branch outlet, emergency flushing or maintenance can be performed through the preset port to discharge the residual liquid in the branch flow channel inside the valve without being affected by the branch control valve, thus enhancing the emergency handling capability of the system;

[0044] 2. Flexible control of branch supply volume: The switch of the branch control valve can change the branch supply volume, which means that the supply volume of each branch can be dynamically adjusted according to actual needs, improving the adaptability and flexibility of the system;

[0045] 3. The first intermediate flow channel with one long and one short V-shaped longitudinal section: when the liquid flows through the three-way split valve, it can flow smoothly along the predetermined path, reducing turbulence and resistance and improving the flow efficiency of the fluid;

[0046] 4. The connection between the horizontal section and the vertical section of the first intermediate flow channel: A horizontal section is connected between one end of the first intermediate flow channel and the branch outlet, ensuring that the liquid smoothly transitions from the intermediate flow channel to the branch outlet, avoiding pressure loss and vortex phenomenon caused by sudden changes in the flow channel; a vertical section is connected between the other end of the first intermediate flow channel and the T-shaped flow channel horizontal section of the branch three-way valve, so that the liquid can smoothly flow from the T-shaped flow channel horizontal section of the branch three-way valve into the T-shaped flow channel vertical section of the branch three-way valve, and can be evenly distributed inside the branch three-way valve, further improving the reliability and stability of the system;

[0047] In summary, through the above technical features, the branch three-way valve can not only achieve precise flow control, but also maintain efficient and stable operation under various working conditions, thereby improving the overall performance and reliability of the system.

[0048] The second main purpose of the present invention is achieved through the following technical solutions, which provide a liquid medicine supply method for a centralized medicine supply system, comprising:

[0049] S1. An integrated valve device of a valve distribution box of a centralized drug supply system as described above is arranged in the valve distribution box, and the number of the branch three-way valves can be modularly expanded on the bottom plate;

[0050] S2, during the liquid supply process, the main control valve element of the main three-way valve and the forced switch valve element of the branch three-way valve are kept in an open state, and the drain switch valve element of the main three-way valve is kept in a closed state, and the connection of the branch liquid supply is controlled by the individual switch of the branch control valve element of the branch three-way valve, so as to control the change of the liquid supply amount of each branch at the corresponding branch outlet;

[0051] S3. During the first maintenance process, the main line control valve component of the main line three-way valve is closed, and the drain switch valve component of the main line three-way valve is opened.

[0052] The implementation principle of this basic method example is that the setting of step S1 significantly reduces most (more than 90%) of the connections of valves and pipe fittings, greatly reducing the space occupancy and cost of the valve distribution box; at the same time, by reducing the dead zone of the joint, the cleanliness of the system is improved, ensuring the transmission quality of ultra-pure chemicals; in addition, this method also reduces the risk of leakage points and improves the reliability and safety of the system; through the side-by-side connection of the main three-way valve and the branch three-way valve, the branch three-way valve is infinitely expanded, which can flexibly respond to different branch requirements and enhance the applicability and flexibility of the system.

[0053] Specifically:

[0054] 1. Modular expansion of the three-way branch valve: The number of the three-way branch valves can be modularly expanded on the base plate, so that the system can be flexibly configured according to actual needs, thereby improving the scalability and adaptability of the system;

[0055] 2. Main-branch liquid supply control: During the liquid supply process, the main-branch control valve of the main three-way valve and the forced switch valve of the branch three-way valve remain in the open state, the discharge switch valve of the main three-way valve is closed, and the branch control valve of the branch three-way valve is individually switched to control the change of the liquid supply volume of each branch at the corresponding branch outlet, so as to achieve precise control of the liquid supply volume and improve the stability and reliability of the system;

[0056] 3. Maintenance process control: In the first maintenance process, close the main control valve of the main three-way valve and open the drain switch valve of the main three-way valve, which can effectively remove the residual liquid in the spliced ​​main channel in the valve, reduce the risk of pollution and corrosion, and improve the cleanliness and service life of the system.

[0057] In a preferred example, the present invention can be further configured as follows: in step S1, the branch three-way valve also has a preset port facing the front of the box, bypassing the branch control valve component and connected to the T-shaped flow channel vertical section of the branch three-way valve, and the aperture of the preset port is smaller than the aperture of the branch outlet; in step S2, the switch of the branch control valve component can change the branch liquid supply.

[0058] By adopting the preferred technical features of the above method, the preset port design of the branch three-way valve is utilized to bypass the branch control valve component and directly connect to the vertical section of the T-shaped flow channel. The aperture is smaller than the branch outlet, so that operation can be performed through the preset port during emergency flushing or maintenance without being affected by the branch control valve component. The branch flow channel in the valve can be cleaned or used to change the branch supply volume, thereby enhancing the emergency handling capability of the centralized drug supply system. When the switch of the branch control valve component can change the branch liquid supply volume, the liquid supply volume of each branch can be dynamically adjusted according to actual needs, thereby improving the adaptability and flexibility of the system.

[0059] In a preferred example, the present invention can be further configured as follows: in step S1, the blocking component is a cleaning three-way valve, the cleaning three-way valve and the main three-way valve have a symmetrical and identical structure, and the cleaning three-way valve is modularly installed on the bottom plate and is located on the extended side of the branch three-way valve connected side by side; in step S3, during the second maintenance process, the forced switching valve component of the branch three-way valve is closed, and the cleaning three-way valve is opened to supply cleaning solution to clean the spliced ​​main flow channel in the valve to the drain port.

[0060] By adopting the preferred technical features of the above method, the use of cleaning three-way valves can significantly improve the cleanliness and maintenance convenience of the system. Specifically:

[0061] 1. Use of the cleaning three-way valve: The blocking part uses a cleaning three-way valve, which has the same structure as the main three-way valve and is modularly installed on the bottom plate; when the main three-way valve is closed, the cleaning three-way valve is opened to supply cleaning liquid to clean the spliced ​​main flow channel in the valve to the drain port; this ensures the cleanliness of the spliced ​​main flow channel in the valve, reduces the accumulation of pollutants, and extends the service life of the system;

[0062] 2. Control during the second maintenance process: During the second maintenance process, the forced on / off valve of the branch three-way valve is closed, and the cleaning three-way valve is opened; this precise control method ensures the effectiveness and safety of the cleaning process and avoids contamination of the internal part of the integrated valve device;

[0063] 3. Enhance the reliability of the centralized drug supply system: By regularly cleaning the spliced ​​main channel in the valve, the cleaning three-way valve can also provide a large water pressure to test for hidden leaks during maintenance and eliminate leaks in advance. The system can maintain a good operating state, reduce failures caused by dirt or blockage, and improve the reliability and stability of the system.

[0064] In summary, the technical solution of the device or method of the present invention includes at least one of the following technical effects that contribute to the prior art:

[0065] 1. Significantly reduces most of the independently installed valves and pipelines with pipe fittings in the traditional valve distribution box (VMB), greatly reducing the system space occupation and cost. At the same time, by reducing the dead zone of the joint, the cleanliness of the centralized drug supply system is improved, the transmission quality of the drug solution is ensured, and the liquid flow rate (CV value or KV value) of the centralized drug supply system under a given pressure difference can be guaranteed;

[0066] 2. Through the parallel connection of the main three-way valve and the branch three-way valve, the branch three-way valve can be infinitely expanded and the internal and external pipes of the box can be omitted, which can flexibly meet the different branch requirements of the valve distribution box (VMB) and enhance the applicability and flexibility of the centralized drug supply system;

[0067] 3. Integrating the branch control valve components and the forced switch valve components in the branch three-way valve, the discharge port of the main three-way valve, and the preset port of the branch three-way valve can reduce the dead zone of the joint and improve the cleanliness of the liquid supply of the centralized drug supply system, which can not only reduce a large number of external components but also clean the spliced ​​main flow channel in the valve and the branch flow channel in the valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0068] Figure 1 A schematic top view of a valve distribution box of a centralized drug supply system in the prior art is shown;

[0069] Figure 2 A front view schematic diagram of an integrated valve device of a valve distribution box of a centralized drug supply system in a specific embodiment of the present invention is shown;

[0070] Figure 3 A schematic diagram of the back side of an integrated valve device of a valve distribution box of a centralized drug supply system in a specific embodiment of the present invention is shown;

[0071] Figure 4 A schematic top view of an integrated valve device of a valve distribution box of a centralized drug supply system in a specific embodiment of the present invention is shown;

[0072] Figure 5 A schematic longitudinal section diagram of an integrated valve device of a valve distribution box of a centralized drug supply system along a spliced ​​main flow channel in a valve is shown in a specific embodiment of the present invention (the blocking member is specifically a sealing plug);

[0073] Figure 6 Draw Figure 5 A partial enlarged view of the extended inlet;

[0074] Figure 7 A multi-view stereoscopic schematic diagram of a main three-way valve used in the integrated valve device in a specific embodiment of the present invention is shown;

[0075] Figure 8 A schematic diagram of the exploded components of the main three-way valve used in the integrated valve device in a specific embodiment of the present invention is shown;

[0076] Fig. 9 A top view of a main three-way valve used in the integrated valve device in a specific embodiment of the present invention and a longitudinal cross-sectional view of a T-shaped flow channel thereof are shown;

[0077] Fig.10 A multi-view stereoscopic schematic diagram of a branch three-way valve used in the integrated valve device in a specific embodiment of the present invention is shown;

[0078] Fig.11 A schematic diagram of the exploded view of the components of the three-way branch valve used in the integrated valve device in a specific embodiment of the present invention is shown;

[0079] Fig.12A schematic diagram showing a top view of a three-way branch valve used in the integrated valve device in a specific embodiment of the present invention and a longitudinal section of a vertical section of a T-shaped flow channel thereof;

[0080] Fig.13 A longitudinal cross-sectional schematic diagram of an integrated valve device of a valve distribution box of a centralized drug supply system along a spliced ​​main flow channel in a valve in a modified embodiment of the present invention is shown (the blocking member is specifically a cleaning three-way valve);

[0081] Fig.14 A block diagram of a method for supplying liquid medicine in a centralized medicine supply system according to an embodiment of the present invention is shown.

[0082] Figure numerals: 125, main inlet valve; 126, drain valve; 135, branch pneumatic valve; 136, branch manual valve; 139, branch preset valve; 161, main pipeline; 162, first branch pipeline; 163, second branch pipeline; 164, preset pipeline; 165, drain pipeline; 10, bottom plate; 11, side; 20, main three-way valve; 21, main inlet; 22, drain port; 23, main outlet; 24, main valve body; 25, main control valve member; 26, drain switch valve member; 27, second intermediate flow channel; 28, annular cavity; 30 , shunt three-way valve; 31, extended inlet; 32, expansion port; 32A, clamping ring groove; 33, shunt outlet; 34, shunt valve body; 35, shunt control valve member; 36, forced switch valve member; 37, first intermediate flow channel; 38, hose part; 39, preset port; 40, blocking member; 41, sealing plug; 42, cleaning three-way valve; 51, inner support ring; 51A, clamping part; 52, emergency rotary ring; 61, spliced ​​main flow channel in the valve; 62, branch flow channel in the valve; 71, main inlet pipeline; 72, branch pipeline outside the box; 73, cleaning pipeline outside the box. DETAILED DESCRIPTION

[0083] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments for understanding the inventive concept of the present invention, and cannot represent all the embodiments, nor are they interpreted as the only embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field on the premise of understanding the inventive concept of the present invention are within the scope of protection of the present invention.

[0084] It should be noted that if there are directional indications (such as up, down, left, right, front, back, etc.) involved in the embodiments of the present invention, the directional indications are only used to explain the relative position relationship, movement, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly. In order to facilitate the understanding of the technical solution of the present invention, the integrated valve device of the valve distribution box of the centralized drug supply system of the present invention is further described and explained below, but it is not limited to the protection scope of the present invention.

[0085] The "T-shaped flow channel" referred to in the text refers to a valve body with three interfaces (corresponding to two through ends and one extended end respectively) and staggered flow channels connecting the three interfaces (respectively a through flow channel and a non-through flow channel connecting the middle section of the through flow channel), wherein two interfaces correspond to each other (corresponding to two through ends respectively), and the other interface deviates from the through flow channel of the two interfaces (the other interface corresponds to the extended end). The "T-shaped flow channel horizontal section" referred to in the text refers to the through flow channel connecting the two interfaces to form a through end. The "T-shaped flow channel vertical section" referred to in the text refers to the non-through flow channel connecting the other interface, the inner end of the non-through flow channel is connected to the through flow channel of the two interfaces to form a connecting end, and the end of the non-through flow channel away from the through flow channel is formed as an extending end. The "direct connection" referred to in the text means that there is no need for pipeline connection between valves, but the connecting parts of two adjacent valves are connected to each other. The "√-type" mentioned in the text refers to the fact that the flow channel in the valve presents a V-shape with one short and one long when cut longitudinally. The shorter flow channel of the V-shape is generally vertical to provide for the setting of the valve port, while the longer flow channel of the V-shape is generally inclined to guide the fluid and shorten the extension length of the flow channel in the horizontal plane. The "√-type" is not the bending shape of the horizontal section. The so-called longitudinal direction refers to the section perpendicular to the base plate mounting surface, and the so-called horizontal direction refers to the section parallel to the base plate mounting surface.

[0086] Figure 1 It is a combination of valves and pipelines inside the valve distribution box of the prior art. Figures 2 to 12 It is about the integrated valve device of a specific embodiment of the present invention, Fig.13 is an integrated valve device of a modified embodiment, Fig.14 1 is a flow chart of the method for supplying liquid medicine common to the specific embodiment and the variant embodiment. Figure 1 and Figure 4 In the specific embodiment, the integrated valve device has a compact structure under the same branch supply. Figures 7 to 9 The main three-way valve 20 used in the specific embodiment shown is Figures 10 to 12 The three-way valve 30 can be used in the modified embodiment. Figure 5 and Fig.13 ,exist Figure 5 The specific embodiment uses three branch three-way valves 30. Fig.13The modified embodiment uses two branch three-way valves 30. These numbers are for schematic representation only. In specific applications, the branch three-way valves 30 can be connected in series to four or more, which also proves that the branch three-way valves 30 in the embodiment of the present invention are expandable in number.

[0087] Figure 2 A front view schematic diagram of an integrated valve device of a valve distribution box of a centralized drug supply system according to an embodiment of the present invention is shown. Figure 3 A schematic diagram showing the back side of the integrated valve device is shown. Figure 4 A schematic top view of the integrated valve device is shown. Figure 5 The integrated valve device is shown in a longitudinal section along the main spliced ​​flow channel in the valve. The integrated valve device has the effects of improving the liquid supply accuracy, simplifying the system components, enhancing the reliability and facilitating maintenance. The integrated valve device includes: a main three-way valve 20, one or more branch three-way valves 30 and a blocking member 40 modularly mounted on the base plate 10. The internal flow channels of the main three-way valve 20 and the branch three-way valve 30 are both T-shaped flow channels (viewed from the mounting surface of the base plate 10), but the directions of the T-shaped flow channels are different, such as Figure 4 As shown, the extended end (main outlet 23) of the T-shaped flow channel vertical section of the main three-way valve 20 is parallel to the side 11 of the bottom plate 10, and the extended end (branch outlet 33) of the T-shaped flow channel vertical section of the branch three-way valve 30 points to the side 11 of the bottom plate 10. Multiple branch three-way valves 30 are arranged side by side, and the main three-way valve 20 is arranged on one side of the multiple branch three-way valves 30, and the blocking member 40 is arranged on the other side. The blocking member 40 is combined with the expansion port 32 of the branch three-way valve 30 relatively far away from the main three-way valve 20. In the example, the blocking member 40 is specifically a sealing plug 41.

[0088] Related References Figure 7 , Figure 8 and Fig. 9The main three-way valve 20 has a main inlet 21 facing the front of the box, a drain port 22 located at the back, and a main outlet 23 of the T-shaped flow channel vertical section located on the side of the valve. The main inlet 21, the drain port 22 and the main outlet 23 respectively constitute the two through ends of the T-shaped flow channel horizontal section in the main three-way valve 20 and the extended end of the T-shaped flow channel vertical section; for example, the main inlet 21 and the main outlet 23 can be a flange interface with a diameter of about 1 inch, and the drain port 22 can be a quick connector with a diameter of about 0.75 inches. The main three-way valve 20 includes a main valve body 24 and a main control valve component 25 and a drain switch valve component 26 arranged on the same main valve body 24. The control points of the main control valve component 25 and the drain switch valve component 26 are respectively adjacent to the two ends of the T-shaped flow channel horizontal section of the main three-way valve 20. The main control valve component 25 is used to open and close the connection between the main inlet 21 and the main outlet 23. The main control valve 25 and the drain switch valve 26 can be elastic manually rotatable switch valves. The main control valve 25 realizes the forced control of the liquid medicine flowing into the main flow channel, and the drain switch valve 26 realizes the forced control of cleaning the residual liquid medicine in the main flow channel.

[0089] Related References Fig.10 , Fig.11 and Fig.12 The three-way branch valve 30 is connected in parallel to one side of the three-way main valve 20. The three-way branch valve 30 has an extended inlet 31 and an expanded port 32 located on the two corresponding valve sides and a branch outlet 33 with the T-shaped flow channel vertical section facing the front of the box. The extended inlet 31, the expanded port 32 and the branch outlet 33 respectively constitute the two through ends of the T-shaped flow channel horizontal section in the three-way branch valve 30 and the extended end of the T-shaped flow channel vertical section; the three-way branch valve 30 adjacent to the main three-way valve 20 The extended inlet 31 of the valve 30 is directly connected to the main outlet 23 of the main three-way valve 20; the branch three-way valve 30 includes a branch valve body 34 and a branch control valve member 35 and a forced switch valve member 36 arranged on the same branch valve body 34 and located in the T-shaped flow channel vertical section of the branch three-way valve 30, and the control points of the branch control valve member 35 and the forced switch valve member 36 are respectively located between the extension end and the connection end of the T-shaped flow channel vertical section of the branch three-way valve 30. The branch control valve member 35 can be a pneumatic valve to realize the rapid opening and closing of the branch liquid supply, including the adjustment and change of the branch liquid supply amount. The forced switch valve member 36 can be an elastic manually rotating switch valve to realize the forced closing of the branch liquid supply. The closing combination of the branch control valve member 35 and the forced switch valve member 36 plus the combination of the preset port 39 can additionally realize the control of the discharge of the residual liquid in the branch flow channel.

[0090] See also Figure 4 The main inlet 21 of the main three-way valve 20 and the branch outlet 33 of the branch three-way valve 30 are both facing the same side 11 of the bottom plate 10 (such as Figure 4 As shown in FIG. 1 ), the main inlet 21 of the main three-way valve 20 is relatively collapsed at the branch outlet 33 of the branch three-way valve 30; the T-shaped flow channel transverse section of the branch three-way valve 30 and the T-shaped flow channel vertical section of the main three-way valve 20 form a valve internal splicing main flow channel 61 (as shown in FIG. Figure 5 and Fig. 9 As shown in FIG. 1 ), the vertical section of the T-shaped flow channel of the three-way branch valve 30 is a branch flow channel 62 in the valve (as shown in FIG. Fig.12 as shown). Figure 5 The spliced ​​main flow channel 61 in the middle valve is cut along the axial direction of the flow channel. Fig. 9 and Fig.12 The spliced ​​main flow channel 61 in the middle valve is a radial cross-cutting flow channel. Fig.12 The branch flow channel 62 in the middle valve is cut along the axial direction of the flow channel.

[0091] In summary, Figure 4 and Figure 1 Under the comparison, the combined structure of the valve-jointed main flow channel 61 without pipeline connection and the combination of the valve-jointed branch flow channel 62 in the branch three-way valve 30 are used to significantly reduce a large proportion of independent valves and external pipes with interfaces (specifically, more than 90% of components can be saved), greatly reducing the space occupied and maintenance costs of the valve distribution box. The device also reduces the hidden dangers of leakage points and improves the reliability and safety of the centralized drug supply system. At the same time, the integration of the branch control valve component 35 and the forced switch valve component 36 in the branch three-way valve 30 can reduce the dead zone of the joint, improve the cleanliness of the liquid supply of the centralized drug supply system, and ensure the transmission quality of the liquid medicine (specifically, ultra-pure chemicals for semiconductor manufacturing). In addition, the integration of the main control valve component 25 and the drain switch valve component 26 in the main three-way valve 20 makes it easy to clean the valve-jointed main flow channel 61, improve the cleanliness and maintenance convenience of the system, and ensure the long-term stable operation of the system. By connecting the main three-way valve 20 and the branch three-way valve 30 side by side, the branch three-way valve 30 can be infinitely expanded, and the valve distribution box with different branching requirements can be flexibly responded to, thereby enhancing the applicability and flexibility of the centralized drug supply system. In addition, facing the front of the valve distribution box, the main inlet 21 of the main three-way valve 20 is relatively collapsed to the branch outlet 33 of the branch three-way valve 30, so as to facilitate the identification of the connection between the main inlet pipeline 71 and the branch pipeline 72 outside the box (such as Figure 4 The main inlet pipeline 71 is connected to the main inlet 21 of the main three-way valve 20, the branch pipeline 72 outside the box is connected to the branch outlet 33 of the branch three-way valve 30, and the cleaning pipeline 73 outside the box is connected to the drain port 22 of the main three-way valve 20 (as shown). Figure 4As shown). In addition to the valve distribution box having a box front shape, the main inlet pipeline 71 is an external input pipeline corresponding to a valve distribution box. In the application of the variation, the main inlet pipeline 71 connected thereto can be bent and wound around the bottom plate 10 by utilizing the relative collapse of the main inlet 21 of the main three-way valve 20; the bottom plate 10 can be designed to be enlarged, and the two sides or four sides of the valve distribution box are each used as a box front (that is, there are two box fronts or four box fronts), and each side of the two or four peripheries of the valve distribution box can be connected to multiple external branch pipelines 72, and the liquid medicine is distributed and exported through the multi-branch distribution of the valve distribution box; the multiple main inlet pipelines 71 bent and wound around the two or four sides can be concentrated at the middle point of the bottom plate 10, and connected to a main delivery pipe of the liquid medicine storage tank, so as to achieve better branch supply.

[0092] Specifically, the effects of the specific embodiments of the present invention are shown in the following aspects:

[0093] 1. System expandability: The main three-way valve 20 and the branch three-way valve 30 are modularly installed on the base plate 10, making the valve distribution box compact and easy to expand and maintain; the blocking member 40 is combined with the expansion port 32 of the branch three-way valve 30 which is relatively far away from the main three-way valve 20, so the number of branch pipelines outside the box can be expanded, and liquid leakage can be effectively prevented, thereby improving the safety and reliability of the system;

[0094] 2. Integration of pipelines in the box: The extended inlet 31 of the branch three-way valve 30 is directly connected to the main outlet 23 of the main three-way valve 20 or the extended port 32 of the adjacent branch three-way valve 30, integrating the connection between the main pipeline in the box and the branch pipeline in the box, reducing fluid resistance and improving fluid circulation efficiency;

[0095] 3. Easy-to-identify installation of the main and branch pipelines outside the box: the main inlet 21 of the main three-way valve 20 and the branch outlet 33 of the branch three-way valve 30 face the same side 11, and the main inlet 21 is relatively collapsed to the branch outlet 33 to prevent misconnection, optimize the fluid path, and reduce pressure loss;

[0096] 4. Smaller valve distribution box: The valve internal spliced ​​main channel 61 composed of the T-shaped channel vertical section of the main three-way valve 20 and the T-shaped channel horizontal section of the branch three-way valve 30 makes the components more compact and further improves the cleanliness and stability of the system.

[0097] The specific structure of the main three-way valve 20 is shown in Figure 4 , Figure 7 , Figure 8 and Fig. 9 In a preferred example, the drain switch valve 26 is used to open and close the communication between the main outlet 23 and the drain port 22; the T-shaped flow channel cross section of the main three-way valve 20 includes a second intermediate flow channel 27 (such as a long and a short V-shaped longitudinal section) having a long V-shaped longitudinal section. Fig. 9 As shown in the figure, one end of the second intermediate flow channel 27 is connected to the annular cavity 28 of the outer ring and connected to the main outlet 23, and a horizontal section is connected between the other end of the intermediate flow channel and the drain port 22. Based on the second intermediate flow channel 27 with a long and a short V-shaped longitudinal section, the annular cavity 28 connected at one end, and the horizontal section connected to the drain port 22 at the other end, the flow path of the fluid in the main three-way valve 20 is optimized, the length of the main three-way valve 20 is shortened, and the main control valve component 25 and the drain switch valve component 26 can be close to each other; during maintenance or cleaning, the residual liquid in the spliced ​​main flow channel 61 in the valve can be discharged from the drain port 22, thereby reducing the accumulation of pollutants in the valve. Refer to Figure 8 and Fig. 9 The main control valve member 25 and the discharge switch valve member 26 are manually rotated forced switch valves, including a film valve head capable of closing the valve, a driving rod connected to the film valve head, and a rotating wheel for driving the driving rod to rise and fall.

[0098] The specific structure of the three-way branch valve 30 is shown in Fig.10 , Fig.11 and Fig.12 In a preferred example, the extended inlet 31 of the three-way branch valve 30 has a hose portion 38, and an inner support ring 51 (such as Figure 5 and Figure 6 As shown in FIG. 1 ), the expansion port 32 of the branch three-way valve 30 and the main outlet 23 of the main three-way valve 20 are provided with an emergency rotating ring 52 (as shown in FIG. Figure 6 As shown in the figure, the hose portion 38 and the inner support ring 51 are directly tightened at the corresponding expansion port 32 or main outlet 23. This structure ensures that there is no need for direct connection of pipelines on both sides of the shunt three-way valve 30, which reduces the number of interfaces, thereby significantly reducing system space occupancy and cost, and also reduces joint dead zones, thereby improving system cleanliness. At the same time, the connection between the shunt module valve and the components on both sides is more stable, reducing the risk of leakage. In addition, the unlimited scalability of the shunt three-way valve 30 is guaranteed, and it can flexibly respond to different shunt requirements, enhancing the applicability and flexibility of the system. Fig.11 and Fig.12 The branch control valve component 35 is a pneumatic switch valve, including a diaphragm valve head that can close the valve, a driving rod connected to the diaphragm valve head, and a piston disk connected to the driving rod for lifting and lowering; the forced switch valve component 36 is a manually rotated forced switch valve, including a diaphragm valve head that can close the valve, a driving rod connected to the diaphragm valve head, and a rotating wheel that drives the driving rod to rise and fall.

[0099] The specific connection structure of the main three-way valve 20 and the branch three-way valve 30 can be found in Figure 6 In a preferred example but not limiting, the inner support ring 51 of the three-way branch valve 30 located at the extension inlet 31 has a snap-fit ​​portion 51A (such as Figure 6As shown in FIG. 1 ), the expansion port 32 of the branch three-way valve 30 and the main outlet 23 of the main three-way valve 20 have corresponding snap ring grooves 32A (as shown in FIG. 1 ). Figure 6 As shown). The clamping portion 51A of the inner support ring 51 of the branch three-way valve 30 at the extended inlet 31 is clamped into the clamping ring groove 32A of the extended port 32 of the branch three-way valve 30 or the clamping ring groove of the main outlet 23 of the main three-way valve 20, so that the inner support ring 51 is not easy to fall out, which not only enhances the sealing performance of the connection part, but also reduces the risk of leakage, simplifies the connection method, reduces the difficulty of installation, and improves the reliability and stability of the system.

[0100] For the second shunt interface structure, please refer to Figure 5 and Fig.12 In a preferred example, the branch three-way valve 30 also has a preset port 39 facing the front of the box, bypassing the branch control valve 35 and connected to the T-shaped flow channel vertical section of the branch three-way valve 30. The aperture of the preset port 39 is smaller than the aperture of the branch outlet 33. In some cases (such as emergency flushing or maintenance), operations can be performed directly through the preset port 39 without being affected by the branch control valve 35, thereby enhancing the emergency handling capability of the system. The design of the preset port 39 improves the flexibility and reliability of the system, and can maintain efficient and stable operation under various working conditions.

[0101] For more detailed information about the second interface, refer to Fig.10 , Fig.11 and Fig.12 In a preferred example, the aperture of the preset port 39 is smaller than the aperture of the branch outlet 33, and the switch of the branch control valve 35 can change the branch liquid supply volume; the T-shaped flow channel vertical section of the branch three-way valve 30 includes a first intermediate flow channel 37 (such as a long and a short V-shaped longitudinal section) having a long V-shaped longitudinal section and a short V-shaped longitudinal section. Fig.12 As shown in FIG. 1 ), a horizontal section is connected between one end of the first intermediate flow channel 37 and the branch outlet 33, and a vertical section is connected between the other end of the first intermediate flow channel 37 and the T-shaped flow channel transverse section of the branch three-way valve 30. This significantly optimizes the internal flow channel design and flow control capability of the branch three-way valve 30, and the specific effects are as follows:

[0102] 1. Variable design of the preset port 39: Since the aperture of the preset port 39 is smaller than the aperture of the branch outlet 33, the preset port 39 can be used to discharge the residual liquid in the branch flow channel 62 in the valve during emergency flushing or maintenance without being affected by the branch control valve 35, thereby enhancing the emergency handling capability of the system;

[0103] 2. Flexible control of the liquid supply volume of the branch: the switch of the branch control valve 35 can change the liquid supply volume of the branch, which means that the liquid supply volume of each branch can be dynamically adjusted according to actual needs, thereby improving the adaptability and flexibility of the system;

[0104] 3. The first intermediate flow channel 37 with one long and one short V-shaped longitudinal section: when the liquid flows through the three-way branch valve 30, it can flow smoothly along the predetermined path, reduce turbulence and resistance, and improve the flow efficiency of the fluid;

[0105] 4. The connection between the horizontal section and the vertical section of the first intermediate flow channel 37: A horizontal section is connected between one end of the first intermediate flow channel 37 and the branch outlet 33, ensuring that the liquid smoothly transitions from the intermediate flow channel to the branch outlet 33, avoiding pressure loss and vortex phenomenon caused by sudden changes in the flow channel; a vertical section is connected between the other end of the first intermediate flow channel 37 and the T-shaped flow channel horizontal section of the branch three-way valve 30, so that the liquid can smoothly flow from the T-shaped flow channel horizontal section of the branch three-way valve 30 into the T-shaped flow channel vertical section of the branch three-way valve 30, and can be evenly distributed inside the branch three-way valve 30, further improving the reliability and stability of the system;

[0106] In summary, through the above technical features, the branch three-way valve 30 can not only achieve precise flow control, but also maintain efficient and stable operation under various working conditions, thereby improving the overall performance and reliability of the system.

[0107] For the configuration relationship between the main three-way valve 20 and the branch three-way valve 30 on the bottom plate 10, please refer to Figure 4 In a preferred example, the main circuit control valve 25 and the forced switch valve 36 are arranged linearly to facilitate identification of the main branch forced control situation. This linear arrangement design significantly improves the system's operational convenience and visualization. Specifically:

[0108] 1. Convenient operation: The linear arrangement allows the operator to intuitively see the position and status of each valve component. Without complex spatial cognition, the operator can quickly identify whether the main branch is in a forced open state, thereby reducing the risk of misoperation;

[0109] 2. Enhanced visualization: This arrangement makes it easy to observe the control status of the main and branch circuits. Especially in an emergency, it is possible to quickly determine whether the main circuit control valve 25 and the corresponding branch circuit forced switch valve 36 are in an open or closed state, so as to take corresponding measures;

[0110] 3. Ability to identify the forced control of the main and branch circuits: Linear arrangement helps to distinguish the control logic of the main circuit and branch circuits, making it easier to understand and grasp the operating status of the system, and improve the reliability and safety of the system;

[0111] In summary, the above technical solution not only improves the operational convenience and visualization of the system, but also enhances the system reliability and security.

[0112] A specific structure of the blocking member 40 is shown in FIG. Figure 5In a preferred example, the blocking component 40 is selected from one of a sealing plug 41 and a cleaning three-way valve 42. The blocking component 40 in this example is specifically a sealing plug 41. The use of the blocking component 40 significantly improves the cleanliness and maintenance convenience of the system. The blocking component can be selected from a sealing plug 41 or a cleaning three-way valve 42, that is, the extended port of the branch three-way valve farthest from the main three-way valve can be connected to both the sealing plug and the cleaning three-way valve; when a sealing plug is selected, it can effectively prevent liquid leakage and improve the safety and reliability of the system. After removing the sealing plug, the spliced ​​main flow channel in the valve can be cleaned; the modular combination of the blocking component makes it easier to replace and maintain components in the system, and the sealing plug 41 (such as Figure 5 as shown) or cleaning three-way valve 42 (as shown Fig.13 There is no need to dismantle the entire system, which greatly shortens maintenance time and improves system availability.

[0113] Another specific structure of the blocking member 40 is shown in Fig.13 In the variant embodiment, the blocking member 40 is specifically a cleaning three-way valve 42, which has a symmetrical and identical structure with the main three-way valve 20. The cleaning three-way valve 42 is modularly installed on the bottom plate 10 and is located on the extended side of the branch three-way valve 30 connected in parallel. When the main three-way valve 20 is closed, the cleaning three-way valve 42 is opened to clean the spliced ​​main flow channel 61 in the valve. The use of the blocking member 40 significantly improves the cleanliness and maintenance convenience of the system. The blocking member can be selected as a sealing plug 41 or a cleaning three-way valve 42. When the cleaning three-way valve is selected, the cleaning three-way valve has the same corresponding structure as the main three-way valve and is modularly installed on the base plate; when the main three-way valve is closed and the cleaning three-way valve is opened, cleaning solution can be supplied to clean the spliced ​​main flow channel in the valve to ensure the cleanliness of the system and the liquid supply quality; through the design of the cleaning three-way valve, the spliced ​​main flow channel in the valve can be cleaned separately without affecting other parts, reducing the accumulation of pollutants in the system, extending the service life of the system, and improving the reliability and safety of the system.

[0114] See also Fig.14 An embodiment of the present invention provides a method for supplying liquid medicine in a centralized drug supply system, comprising: step S1 of setting an integrated valve device of a valve distribution box of a centralized drug supply system in the valve distribution box; during the liquid supply process in step S2, the main line control valve component and the forced switch valve component are kept open, and the drain switch valve component is kept closed, and the connection of the branch liquid supply is controlled by the individual switch of the branch control valve component of the branch three-way valve; and, during the first maintenance process in step S3, the main line control valve component is closed, and the drain switch valve component is opened.

[0115] In step S1, set as described above Figures 2 to 5 As shown or Fig.13The integrated valve device of the valve distribution box of the centralized drug supply system shown in the figure is in the valve distribution box, and the number of the branch three-way valves 30 can be modularly expanded on the base plate 10; see Figure 4 One end of the main inlet pipeline 71 is connected to the main inlet 21 of the main three-way valve 20, and the other end is connected to the liquid medicine storage tank outside the box; one end of multiple branch pipelines 72 outside the box is connected to the branch outlet 33 of the branch three-way valve 30, and the other end is connected to the factory production equipment outside the box.

[0116] In step S2, refer to Figure 5 During the liquid supply process, the main control valve element 25 of the main three-way valve 20 and the forced switch valve element 36 of the branch three-way valve 30 remain in an open state, and the drain switch valve element 26 of the main three-way valve 20 remains in a closed state, and the connection of the branch liquid supply is controlled by the individual switch of the branch control valve element 35 of the branch three-way valve 30, and the change of the liquid supply amount of each branch at the corresponding branch outlet 33 is controlled. The liquid medicine is introduced from the main inlet 21, and then discharged from the branch outlet 33 through the valve internal splicing main flow channel 61 and the individual valve internal branch flow channel 62. The forced on-off valve element 36 of the shunt three-way valve 30 can forcefully close the discharge of the liquid medicine from the shunt outlet 33, and the shunt control valve element can quickly switch the liquid medicine on and off to be discharged from the shunt outlet 33, thereby achieving the effect of shunt liquid supply switch or shunt quantity two-stage regulation. The change in effect depends on whether the component connected to the preset port 39 is a discharge pipeline (or a blocking component) or a second shunt pipeline connected to the branch pipeline 72 outside the box.

[0117] In step S3, refer to Fig. 9 and Fig.12 In the first maintenance process, the main control valve member 25 of the main three-way valve 20 is closed, and the drain switch valve member 26 of the main three-way valve 20 is opened. The residual liquid medicine remaining in the spliced ​​main flow channel 61 in the valve is discharged from the drain port 22. In different examples, the liquid medicine supply method of the present invention may also include a branch maintenance process, and the residual liquid medicine in the branch flow channel 62 in the valve can be discharged from the preset port 39.

[0118] Therefore, the setting of step S1 significantly reduces most (more than 90%) of the connections between valves and pipe fittings, greatly reducing the space occupied and cost of the valve distribution box; at the same time, by reducing the dead zone of the joint, the cleanliness of the system is improved, and the transmission quality of ultra-pure chemicals is ensured; in addition, the method also reduces the hidden dangers of leakage points and improves the reliability and safety of the system; through the side-by-side connection of the main three-way valve 20 and the branch three-way valve 30, the branch three-way valve 30 is infinitely expanded, which can flexibly respond to different branch requirements and enhance the applicability and flexibility of the system.

[0119] The above-mentioned method for supplying liquid medicine of the present invention specifically includes the following effects:

[0120] 1. Modular expansion of the three-way branch valve 30: The number of the three-way branch valves 30 can be modularly expanded on the base plate 10, so that the system can be flexibly configured according to actual needs, thereby improving the scalability and adaptability of the system;

[0121] 2. Main branch liquid supply control: During the liquid supply process, the main control valve element 25 of the main three-way valve 20 and the forced switch valve element 36 of the branch three-way valve 30 remain in the open state, and the discharge switch valve element 26 of the main three-way valve 20 is closed. The branch control valve element 35 of the branch three-way valve 30 is individually switched to control the change of the liquid supply amount of each branch at the corresponding branch outlet 33, so as to achieve precise control of the liquid supply amount and improve the stability and reliability of the system;

[0122] 3. Maintenance process control: In the first maintenance process, the main control valve component 25 of the main three-way valve 20 is closed, and the drain switch valve component 26 of the main three-way valve 20 is opened, which can effectively remove the residual liquid in the spliced ​​main flow channel 61 in the valve, reduce the risk of pollution and corrosion, and improve the cleanliness and service life of the system.

[0123] When the function of the preset port 39 is to change the amount of shunt connectivity, in a preferred example, in step S1, the shunt three-way valve 30 also has a preset port 39 facing the front of the box, bypassing the shunt control valve component 35 and connecting to the T-shaped flow channel vertical section of the shunt three-way valve 30, and the aperture of the preset port 39 is smaller than the aperture of the shunt outlet 33; in step S2, the switch of the shunt control valve component 35 can change the shunt liquid supply. Therefore, it is possible to operate through the preset port 39 during emergency flushing or maintenance without being affected by the shunt control valve component 35, and can clean the branch flow channel 62 in the valve or change the shunt supply amount, thereby enhancing the emergency handling capability of the centralized drug supply system; when the switch of the shunt control valve component 35 can change the shunt liquid supply amount, the liquid supply amount of each shunt can be dynamically adjusted according to actual needs, thereby improving the adaptability and flexibility of the system.

[0124] When the preset port 39 is used for split-way cleaning, please refer to Fig.12 In the first maintenance process of step S3, the forced on-off valve member 36 and the branch control valve member 35 of the branch three-way valve 30 are also closed, and the preset port 39 is opened. The flow channel based on the preset port 39 is connected to the bottom of the first intermediate flow channel with a long and a short V-shaped longitudinal section included in the T-shaped flow channel vertical section of the branch three-way valve 30, and the residual liquid medicine remaining in the branch flow channel 62 in the valve is discharged through the preset port 39.

[0125] In a variant embodiment, using Fig.13In the integrated valve device shown in step S1, the blocking member 40 is a cleaning three-way valve 42, and the cleaning three-way valve 42 has a symmetrical and identical structure with the main three-way valve 20. The cleaning three-way valve 42 is modularly installed on the bottom plate 10 and is located on the extended side of the branch three-way valve 30 connected in parallel; Fig.14 As shown in the dotted box of step S3, during the second maintenance process, the forced switch valve member 36 of the branch three-way valve 30 is closed, and the cleaning three-way valve 42 is opened to supply cleaning solution to clean the spliced ​​main flow channel 61 in the valve to the drain port 22.

[0126] The use of the cleaning three-way valve 42 can significantly improve the system cleanliness and maintenance convenience, and the specific effects include:

[0127] 1. Use of the cleaning three-way valve 42: The blocking member 40 uses a cleaning three-way valve 42, which has the same structure as the main three-way valve 20 and is modularly installed on the bottom plate 10; when the main three-way valve 20 is closed, the cleaning three-way valve 42 is opened to supply cleaning liquid to clean the spliced ​​main flow channel 61 in the valve to the drain port 22; this ensures the cleanliness of the interior of the spliced ​​main flow channel 61 in the valve, reduces the accumulation of pollutants, and extends the service life of the system;

[0128] 2. Control during the second maintenance process: During the second maintenance process, the forced on-off valve member 36 of the branch three-way valve 30 is closed, and the cleaning three-way valve 42 is opened; this precise control method ensures the effectiveness and safety of the cleaning process and avoids contamination of the internal part of the integrated valve device;

[0129] 3. Enhance the reliability of the centralized drug supply system: By regularly cleaning the spliced ​​main flow channel 61 in the valve, the cleaning three-way valve 42 can also provide a large water pressure to test whether there are hidden leaks during maintenance, so as to eliminate leaks in advance. The system can maintain a good operating state, reduce failures caused by dirt or blockage, and improve the reliability and stability of the system.

[0130] The embodiments of this specific implementation method are all preferred embodiments for facilitating the understanding or implementation of the technical solutions of the present invention, and are not intended to limit the protection scope of the present invention. All equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An integrated valve device for a valve distribution box of a centralized drug supply system, characterized in that: include: The main three-way valve is modularly mounted on the bottom plate, and has a main inlet facing the front of the box, a liquid discharge port located at the back, and a main outlet with a T-shaped flow channel vertical section located on the side of the valve; the main three-way valve comprises a main valve body and a main control valve component and a liquid discharge switch valve component arranged on the same main valve body, the control points of the main control valve component and the liquid discharge switch valve component are respectively located at the two ends of the T-shaped flow channel horizontal section of the main three-way valve, and the main control valve component is used to open and close the connection between the main inlet and the main outlet; A shunt three-way valve is modularly mounted on the bottom plate and connected side by side to one side of the main three-way valve, the shunt three-way valve having an extended inlet and an expansion port located on the sides of two corresponding valves and a shunt outlet with a T-shaped flow channel vertical section facing the front of the box, and the extended inlet of the shunt three-way valve adjacent to the main three-way valve is directly connected to the main outlet of the main three-way valve; the shunt three-way valve comprises a shunt valve body and a shunt control valve component and a forced switch valve component which are arranged on the same shunt valve body and located on the T-shaped flow channel vertical section of the shunt three-way valve, and the control points of the shunt control valve component and the forced switch valve component are respectively located at the extension end and the connection end of the T-shaped flow channel vertical section of the shunt three-way valve; A blocking member, combined with an expansion port of the branch three-way valve relatively far away from the main three-way valve; The main inlet of the main three-way valve and the branch outlet of the branch three-way valve are both oriented toward the same side of the bottom plate, and the main inlet of the main three-way valve is relatively collapsed to the branch outlet of the branch three-way valve; the T-shaped flow channel horizontal section of the branch three-way valve and the T-shaped flow channel vertical section of the main three-way valve form a valve internal spliced ​​main flow channel, and the T-shaped flow channel vertical section of the branch three-way valve is a valve internal branch flow channel; The main circuit control valve and the forced switch valve are arranged linearly to identify the main branch circuit forced control situation; The three-way branch valve also has a preset port facing the front of the box, bypassing the branch control valve member and connected to the vertical section of the T-shaped flow channel of the three-way branch valve; The aperture of the preset port is smaller than the aperture of the branch outlet, and the switch of the branch control valve member can change the branch liquid supply volume; the T-shaped flow channel vertical section of the branch three-way valve includes a first intermediate flow channel with a long and a short V-shaped longitudinal section, a horizontal section is connected between one end of the first intermediate flow channel and the branch outlet, and a vertical section is connected between the other end of the first intermediate flow channel and the T-shaped flow channel horizontal section of the branch three-way valve; Based on the first intermediate flow channel with one long and one short V-shaped longitudinal section, the liquid can flow smoothly along a predetermined path when flowing into the branch three-way valve, reducing turbulence and resistance and improving the flow efficiency of the fluid.

2. The integrated valve device of the valve distribution box of the centralized drug supply system according to claim 1 is characterized in that: The extended inlet of the branch three-way valve has a hose portion, an inner support ring is arranged in the opening of the hose portion, and the expansion port of the branch three-way valve and the main outlet of the main three-way valve are provided with a tight ring to directly tighten the hose portion and the inner support ring at the corresponding expansion port or main outlet.

3. The integrated valve device of the valve distribution box of the centralized drug supply system according to claim 2 is characterized in that: The inner support ring of the branch three-way valve has a clamping portion, and the expansion port of the branch three-way valve and the main outlet of the main three-way valve have corresponding clamping ring grooves.

4. The integrated valve device of the valve distribution box of the centralized drug supply system according to claim 1 is characterized in that: The blocking member is selected from one of a sealing plug and a cleaning three-way valve. The cleaning three-way valve and the main three-way valve have a symmetrical and identical structure. The cleaning three-way valve is modularly installed on the bottom plate and is located on the extended side of the branch three-way valve connected side by side. When the main three-way valve is closed, the cleaning three-way valve is opened to clean the spliced ​​main channel in the valve.

5. The integrated valve device of the valve distribution box of the centralized drug supply system according to claim 1 is characterized in that: The liquid discharge switch valve is used to open and close the connection between the main outlet and the liquid discharge port; the T-shaped flow channel cross section of the main three-way valve includes a second intermediate flow channel with a long and a short V-shaped longitudinal section, one end of the second intermediate flow channel is connected to the outer ring and connected to the annular cavity of the main outlet, and a horizontal section is connected between the other end of the intermediate flow channel and the liquid discharge port.

6. A method for supplying liquid medicine in a centralized medicine supply system, characterized in that: Includes steps: S1. The integrated valve device of the valve distribution box of the centralized drug supply system as claimed in claim 1 is arranged in the valve distribution box, and the number of the branch three-way valves can be modularly expanded on the bottom plate; S2, during the liquid supply process, the main control valve element of the main three-way valve and the forced switch valve element of the branch three-way valve are kept in an open state, and the drain switch valve element of the main three-way valve is kept in a closed state, and the connection of the branch liquid supply is controlled by the individual switch of the branch control valve element of the branch three-way valve, so as to control the change of the liquid supply amount of each branch at the corresponding branch outlet; S3. During the first maintenance process, the main line control valve component of the main line three-way valve is closed, and the drain switch valve component of the main line three-way valve is opened.

7. The method for supplying liquid medicine in a centralized medicine supply system according to claim 6, characterized in that: In step S1, the branch three-way valve further has a preset port toward the front of the box, bypassing the branch control valve component and connected to the T-shaped flow channel vertical section of the branch three-way valve, and the aperture of the preset port is smaller than the aperture of the branch outlet; in step S2, the switch of the branch control valve component can change the branch liquid supply; In step S1, the blocking component is a cleaning three-way valve, and the cleaning three-way valve has a symmetrical and identical structure with the main three-way valve. The cleaning three-way valve is modularly installed on the bottom plate and is located on the extended side of the branch three-way valve connected side by side; in step S3, during the second maintenance process, the forced switching valve component of the branch three-way valve is closed, and the cleaning three-way valve is opened to supply cleaning solution to clean the spliced ​​main flow channel in the valve to the drain port.

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